Preparation method of texture fusion coating cutting tool

By depositing a multilayer coating of TiCN, TiN, and Al2O3 on the tool surface, the problem of easy coating peeling during high-speed cutting was solved, improving tool life and machining efficiency, and enhancing workpiece quality.

CN121992370APending Publication Date: 2026-05-08LUDONG UNIVERSITY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
LUDONG UNIVERSITY
Filing Date
2026-02-02
Publication Date
2026-05-08

AI Technical Summary

Technical Problem

Existing high-speed cutting tools are prone to fatigue cracking and peeling of coatings during high-speed cutting, resulting in shortened lifespan and affecting machining efficiency and workpiece quality.

Method used

By studying the interaction mechanism between the microtexture of the tool surface, the coating growth texture and the workpiece deformation texture, a texture fusion mechanism was established. Wear-resistant coating components were deposited on the tool substrate surface using CVD process to form a multilayer coating of TiCN, TiN and Al2O3.

Benefits of technology

It improves tool wear life and workpiece surface quality, and enhances machining efficiency and overall tool mechanical properties.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a preparation method of a texture fusion coating cutter. According to the method, a texture fusion design thought is introduced into the field of coating cutter design, an interaction mechanism among a cutter surface micro-texture, a coating growth texture and a workpiece deformation texture is explored, a texture fusion mechanism among the cutter surface micro-texture, the coating growth texture and the workpiece deformation texture is clarified, and a matching model of a coating component system and a specific workpiece under the principle guidance of the texture fusion mechanism is established; and the selected wear-resistant coating components conforming to the texture fusion mechanism are deposited on the microtexture surface of the tool in a specific preferred orientation growth mode by adopting a CVD process, so that the dual effects of considering the wear life of the tool and the surface quality of a workpiece are achieved. The method can be applied to ceramic and hard alloy cutter materials, and the prepared texture fusion coating cutter is expected to solve the problems that friction wear is aggravated, the service life of the coating is shortened and the quality of the machined surface is difficult to meet the user requirement due to high-speed dry cutting of difficult-to-machine materials. The prepared tool can be used for high-speed dry cutting machining of nickel base alloy Inconel-718 and Ti6A14V alloy.
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Description

Technical Field

[0001] This invention belongs to the field of mechanical cutting tool manufacturing technology, and more specifically, relates to a method for preparing a textured fusion coating tool. Background Technology

[0002] For example, the milling and grinding machine, also known as the rail emergency vehicle, can protect the rails, but the most crucial component of the milling and grinding machine, the milling cutter, still needs to be imported from abroad. Therefore, it is necessary to achieve breakthroughs in key core technologies for milling cutters in order to support the development of my country's high-end equipment manufacturing industry.

[0003] Currently, high-speed cutting tools, represented by end mills, urgently need breakthroughs in core aspects such as materials, structural design, and coating technology. Coating technology, as an effective way to improve tool life, can give tools excellent comprehensive mechanical properties, thereby improving machining efficiency. To improve the bonding strength between the coating and the substrate and achieve friction reduction control at the tool-chip interface, researchers have combined the coating with microtextures on the tool surface, improving tool-workpiece friction and heat dissipation, and reducing adhesion and diffusion. However, the tool is subjected to impact and coupled stress during high-speed cutting, causing the coating to easily develop fatigue cracks and peel off, shortening its service life. Therefore, developing high-performance, long-life microtextured coated tools is of decisive significance for improving machining efficiency and workpiece machining quality. Summary of the Invention

[0004] In view of this, the present invention provides a method for preparing a textured fusion coated cutting tool, the method comprising the following steps: The texture fusion mechanism among the tool surface microtexture, coating growth texture and workpiece deformation texture is determined. Based on the texture fusion mechanism, a matching model between the coating component system and a specific workpiece is established, and the wear-resistant coating components are determined based on the matching model. Select a tool substrate and form a surface microtexture on the tool substrate; A coating corresponding to the wear-resistant coating components is deposited on the surface of the tool substrate.

[0005] Optionally, the step of determining the texture fusion mechanism among the tool surface microtexture, coating growth texture, and workpiece deformation texture includes: By studying the effects of microtexture parameters and coating growth texture parameters on coating hardness, toughness, residual stress, elastic modulus, tribological properties and film-substrate adhesion, the optimal matching model between microtexture parameters and coating growth texture parameters was determined. Through high-speed cutting experiments, statistical data on workpiece surface quality, machining efficiency, and tool life were obtained. The correlation dimension method was used to study the statistical data on workpiece surface quality, machining efficiency, and tool life. The texture fusion parameters of the tool, coating, and workpiece were analyzed and calculated using fractal methods to determine the fractal dimension of the texture fusion mechanism. Using a grey relational weighted analysis model and mathematical morphology, we construct the correlation between the equivalent stress distribution within the workpiece and chip, the normal stress distribution at the tool-chip contact interface, the equivalent strain within the chip, and three texture parameters. This reveals the synergistic influence of the three texture parameters on the friction state of the tool-chip contact area and elucidates the interaction mechanism and fusion mechanism among the three textures.

[0006] Optionally, the step of establishing a matching model between the coating component system and a specific workpiece based on the texture fusion mechanism specifically includes: By utilizing the properties of the rescaled transformation group and numerical calculations, the fractal dimension, information dimension, and correlation dimension of the optimal multifractal system are obtained, and a matching model between the coating component system and a specific workpiece is established under the guidance of the texture fusion mechanism principle.

[0007] Alternatively, the tool matrix is ​​an Al2O3 / TiC ceramic turning tool with a weight percentage of 45% Al2O3 + 55% TiC.

[0008] Optionally, the step of forming a surface microtexture on the tool substrate specifically includes: Nanosecond laser processing technology is used to process microtextures conforming to the texture fusion mechanism on the rake and flank faces of the cutting tool; the processing parameters are: pump voltage 15-25V, output power 10-15W, scanning speed 3-8 mm / s, pulse frequency 3-8 Hz, and 1-3 scans.

[0009] Optionally, the tool substrate is a carbide turning tool or a carbide end mill, with a weight percentage of 79% WC + 15% TiC + 6% Co or 94% WC + 6% Co.

[0010] Optionally, the step of forming a surface microtexture on the tool substrate specifically includes: Picosecond lasers were used to fabricate microtextures conforming to the texture fusion mechanism, with the following processing parameters: energy density 2-3 J / cm². 2 The repetition frequency is 50-100kHz, the single exposure time is 0.5-1.0ms, and the number of repetitions is 5-10.

[0011] Optionally, the step of depositing a coating corresponding to the wear-resistant coating components on the surface of the tool substrate specifically includes: A coating is deposited on the surface of a tool with microtexture using a CVD process. The coating consists of a TiCN layer, a TiN layer, and an Al2O3 layer from the inside out. The deposition parameters for the TiCN layer were: temperature 850-880℃, pressure 60-90 mbar, deposition time 300-450 min, and volume percentages of H2, N2, TiCl4, and CH3CN of 50-85%, 5-40%, 1-4%, and 0.1-1%, respectively. The deposition parameters for the TiN layer were: temperature 900-1050 ℃, pressure 500-800 mbar, deposition time 50-100 min, and volume percentages of H2, N2, and TiCl4 of 60-80%, 20-35%, and 0.5-2%, respectively. Preferred orientation Al2O3 nucleation parameters: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 10-30 min, and volume percentages of H2, N2, AlCl3, CO2, HCl and CO of 80-90%, 5-10%, 0.5-2%, 1-5%, 1.5-3% and 0.1-1%, respectively. The preferred orientation Al2O3 deposition parameters were: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 100-300 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, H2S and CO of 80-90%, 5-20%, 0.5-5%, 1-5%, 1.5-3%, 0.1-1% and 0.1-1%, respectively; wherein the ratio of H2S to CO2 was greater than 0.08 and less than 0.11.

[0012] The beneficial effects of this invention are as follows: The present invention discloses a method for preparing texture-fused coated cutting tools. By exploring the interaction mechanism among the tool surface microtexture, coating growth texture, and workpiece deformation texture, the method elucidates the texture fusion mechanism among these three elements. A matching model between the coating component system and a specific workpiece is established under the guidance of the texture fusion mechanism principle. Using CVD technology, selected wear-resistant coating components conforming to the texture fusion mechanism are deposited on the tool microtexture surface in a specific preferred orientation growth manner, achieving a dual effect of balancing tool wear life and workpiece surface quality. The texture-fused coated cutting tools prepared by the above process can be used for cutting nickel-based alloys Inconel-718 and Ti6A14V alloys.

[0013] Other features and advantages of the present invention will be described in detail in the following detailed description section. Attached Figure Description

[0014] The present invention can be better understood by referring to the following description taken in conjunction with the accompanying drawings, in which the same or similar reference numerals are used throughout the drawings to denote the same or similar parts.

[0015] Figure 1A flowchart illustrating the implementation of a textured fusion coated tool preparation method according to an embodiment of the present invention is shown.

[0016] Figure 2 A schematic diagram of the texture fusion mechanism according to an embodiment of the present invention is shown; wherein: 1 is the tool surface microtexture, 2 is the coating growth texture, 3 is the workpiece deformation texture, 4 is the tool substrate, and 5 is the chip. Detailed Implementation

[0017] To enable those skilled in the art to more fully understand the technical solutions of the present invention, exemplary embodiments of the present invention will be described more comprehensively and in detail below with reference to the accompanying drawings. Obviously, the one or more embodiments of the present invention described below are merely one or more specific ways to implement the technical solutions of the present invention, and are not exhaustive. It should be understood that other ways belonging to a general inventive concept can be used to implement the technical solutions of the present invention, and should not be limited to the embodiments described exemplary. Based on one or more embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0018] Example: Figure 1 A flowchart illustrating the implementation of the textural fusion coating tool preparation method according to an embodiment of the present invention is shown. Figure 2 A schematic diagram illustrating the texture blending mechanism of an embodiment of the present invention is shown. (Refer to...) Figure 1 and Figure 2 The method for preparing textured fusion coated cutting tools according to embodiments of the present invention includes the following steps: Step S100: Determine the texture fusion mechanism between the tool surface microtexture, coating growth texture and workpiece deformation texture, establish a matching model between the coating component system and a specific workpiece based on the texture fusion mechanism, and determine the wear-resistant coating components based on the matching model. Step S200: Select a tool substrate and form a surface microtexture on the tool substrate; Step S300: Deposit a coating corresponding to the wear-resistant coating components on the surface of the tool substrate.

[0019] Specifically, this invention introduces the concept of texture fusion design into the field of coated tool design. By exploring the interaction mechanism between tool surface microtexture, coating growth texture, and workpiece deformation texture, the texture fusion mechanism among the three is clarified, and a matching model of coating component system and specific workpiece under the guidance of the texture fusion mechanism principle is established. The selected wear-resistant coating components that conform to the texture fusion mechanism are deposited on the tool microtexture surface in a specific preferred orientation growth mode using CVD process, achieving the dual effect of taking into account both tool wear life and workpiece surface quality.

[0020] Furthermore, in this embodiment of the invention, the texture blending mechanism is determined based on the following method: First, the effects of microtexture parameters and coating growth texture on coating hardness, toughness, residual stress, elastic modulus, tribological properties, and film-substrate adhesion are investigated. The shape, characteristic dimensions, and distribution density of the microtexture on the tool surface are optimized. A crystallography-based coating interface model and equations of motion are established to explore the correlation between preferred coating orientation, crystallization conditions, microstructure, and superhardness. An interaction model between microtexture parameters and coating growth texture is constructed. Second, the microscopic physical and mechanical characteristics of the coating-chip contact surface on the tool rake face during cutting are studied. The influence of microtexture parameters and coating growth texture on the friction and stress distribution at the tool-chip interface is revealed, and the fusion mechanism between coating growth texture and workpiece deformation texture based on cutting load distribution characteristics is elucidated. Finally, a theoretical model was established to quantitatively evaluate the interface of tool surface microtexture, coating growth texture and workpiece deformation texture, as well as the texture structure and texture performance. The mechanism of their effects on tool-chip interface characteristics was explored, and the interaction law between the three texture characteristic parameters and the tool-chip interface friction coefficient, tool surface stress field and cutting edge stress value was clarified. The scientific essence of the texture fusion mechanism of the three was revealed.

[0021] Furthermore, the specific implementation process of the texture fusion coating tool preparation method of this invention is as follows: 1) Quantitative evaluation of tool surface microtexture, coating growth texture, and workpiece deformation texture: By studying the effects of microtexture parameters and coating growth texture on coating hardness, toughness, residual stress, elastic modulus, tribological properties, and film-substrate adhesion, an optimal matching model between microtexture parameters and coating growth texture parameters was determined. High-speed cutting experiments were conducted to obtain statistical data on workpiece surface quality, machining efficiency, and tool life. The fractal behavior of the modal characteristics of the above system was studied using the correlation dimension method. In-depth analysis and calculation of the texture fusion parameters among the tool, coating, and workpiece were performed using fractal methods to determine the fractal dimension of the texture fusion mechanism. A grey relational weighted analysis model and mathematical morphology were used to construct the correlation between the equivalent stress distribution within the workpiece and chip, the normal stress distribution at the tool-chip contact interface, the equivalent strain within the chip, and the composite signals of the three texture parameters. This revealed the synergistic influence of the three texture parameters on the friction state of the tool-chip contact area, elucidating the interaction mechanism and fusion mechanism among the three textures. By utilizing the properties of the rescaled transformation group and numerical calculations, the fractal dimension, information dimension, and correlation dimension of the optimal multifractal system are obtained. A matching model of the coating component system and specific workpieces under the guidance of the fusion mechanism principle is established, and wear-resistant coating components that conform to the texture fusion mechanism are selected.

[0022] 2) Selection of matrix material: The substrate materials for coated tools include Al2O3 / TiC ceramic turning tools (45% Al2O3 + 55% TiC by weight), and carbide turning and milling cutters (79% WC + 15% TiC + 6% Co or 94% WC + 6% Co by weight).

[0023] 3) Microtexturing of the tool's front and rear faces: For Al2O3 / TiC ceramic turning tools, nanosecond laser processing technology is used to fabricate microtextures conforming to the texture fusion mechanism on the rake and flank faces of the tool. The processing parameters are: pump voltage 15-25V, output power 10-15W, scanning speed 3-8mm / s, pulse frequency 3-8 Hz, and 1-3 scans. For carbide turning and milling cutters, picosecond laser processing is used to fabricate microtextures conforming to the texture fusion mechanism. The processing parameters are: energy density 2-3J / cm³. 2 The repetition frequency is 50-100kHz, the single exposure time is 0.5-1.0ms, and the number of repetitions is 5-10.

[0024] 4) Texture fusion mechanism coating deposition: A multilayer coating of TiCN, TiN, and Al2O3 was deposited on the surface of a tool with microtextured surface using a CVD process. The TiCN deposition parameters were: temperature 850-880℃, pressure 60-90 mbar, and deposition time 300-450 min; the volume percentages of H2, N2, TiCl4, and CH3CN were 50-85%, 5-40%, 1-4%, and 0.1-1%, respectively.

[0025] The TiN deposition parameters were: temperature 900-1050 ℃, pressure 500-800 mbar, deposition time 50-100 min, and volume percentages of H2, N2 and TiCl4 of 60-80%, 20-35% and 0.5-2%, respectively.

[0026] Preferred orientation Al2O3 nucleation parameters: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 10-30 min, and volume percentages of H2, N2, AlCl3, CO2, HCl and CO of 80-90%, 5-10%, 0.5-2%, 1-5%, 1.5-3% and 0.1-1%, respectively.

[0027] The preferred orientation Al2O3 deposition parameters were: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 100-300 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, H2S and CO of 80-90%, 5-20%, 0.5-5%, 1-5%, 1.5-3%, 0.1-1% and 0.1-1%, respectively; wherein the ratio of H2S to CO2 was greater than 0.08 and less than 0.11.

[0028] As a preferred embodiment, the tool material is an Al2O3 / TiC ceramic turning tool (45% Al2O3 + 55% TiC by weight). First, a nanosecond laser is used to machine microtextures conforming to the texture fusion mechanism on the rake and flank faces of the tool at a distance of 100µm from the main and secondary cutting edges. The machining parameters are: pump voltage 18V, scanning speed 7mm / s, repetition frequency 5Hz, and 2 scans. The corresponding microtexture spacing is 30-50µm, and the depth is approximately 20-40µm. Then, TiCN, TiN, and Al2O3 coatings were sequentially deposited on the surface of the tool with microtextured machining using a CVD process. The TiCN deposition parameters were: temperature 865 ℃, pressure 70 mbar, deposition time 400 min, and volume percentages of H2, N2, TiCl4, and CH3CN of 82%, 15%, 2.5%, and 0.5%, respectively. The TiN deposition parameters were: temperature 1000 ℃, pressure 650 mbar, deposition time 70 min, and volume percentages of H2, N2, and TiCl4 of 74%, 25%, and 1%, respectively. The Al2O3 nucleation parameters were: temperature 1025 ℃, pressure 70 mbar, deposition time 25 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, and CO of 82%, 10%, 1.5%, 3.5%, 2%, and 1%, respectively. The preferred orientation Al2O3 deposition parameters were: temperature 1025℃, pressure 70 mbar, deposition time 180 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, H2S, and CO of 82.92%, 10%, 1.5%, 3%, 2%, 0.28%, and 0.3%, respectively; 0.08 <H2S / CO2=0.09<0.11。

[0029] As another preferred embodiment, the tool material is a cemented carbide tool, such as YT15 cemented carbide turning and milling cutters (composition: 79% WC + 15% TiC + 6% Co by weight), YG6 cemented carbide turning and milling cutters (composition: 94% WC + 6% Co by weight), etc. First, a microtexture conforming to the texture fusion mechanism is machined on the tool surface using a picosecond laser; the machining parameters are: energy density 2.5 J / cm². 2The repetition frequency was 90 kHz, the single exposure time was 0.5 ms, 0.8 ms, and 1.0 ms, and the number of repetitions was 7. Then, TiCN, TiN, and Al2O3 coatings were sequentially deposited on the surface of the tool with the microtextured structure using a CVD process. The TiCN deposition parameters were: temperature 870 ℃, pressure 70 mbar, deposition time 350 min, and volume percentages of H2, N2, TiCl4, and CH3CN of 82.5%, 14%, 3%, and 0.5%, respectively. The Al2O3 nucleation parameters were: temperature 1025 ℃, pressure 70 mbar, deposition time 25 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, and CO of 77%, 15%, 2%, 2.5%, 2%, and 1.5%, respectively. The Al2O3 deposition parameters were: temperature 1025 ℃, pressure 70 mbar, deposition time 180 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, H2S, and CO of 78%, 15%, 2.5%, 2.5%, 1.5%, 0.25%, and 0.25%, respectively; 0.08 <H2S / CO2=0.1<0.11。

[0030] The method for preparing textured coated cutting tools according to embodiments of the present invention introduces the concept of texture fusion mechanism, determines the fractal dimension of tool surface microtexture, coating growth texture, and workpiece deformation texture, and studies the interaction mechanism between texture fusion mechanism and the fractal behavior of system modal characteristics such as tool life and machining efficiency; secondly, it studies the synergistic influence of texture fusion mechanism on tool dynamic fatigue performance and cutting performance; finally, it establishes a comprehensive model of tool texture fusion-wear life, and proposes a set of coating tool design theory and preparation technology based on texture fusion mechanism, so as to improve the design and manufacturing level of coating tools in my country and promote the development of my country's high-end equipment manufacturing industry.

[0031] While one or more embodiments of the present invention have been described above, those skilled in the art will recognize that the present invention can be implemented in any other form without departing from its spirit and scope. Therefore, the embodiments described above are illustrative and not restrictive, and many modifications and substitutions will be apparent to those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A method for preparing a textured fusion coated cutting tool, characterized in that, include: The texture fusion mechanism among the tool surface microtexture, coating growth texture and workpiece deformation texture is determined. Based on the texture fusion mechanism, a matching model between the coating component system and a specific workpiece is established, and the wear-resistant coating components are determined based on the matching model. Select a tool substrate and form a surface microtexture on the tool substrate; A coating corresponding to the wear-resistant coating components is deposited on the surface of the tool substrate.

2. The method for preparing textured fusion coated cutting tools according to claim 1, characterized in that, The steps for determining the texture fusion mechanism among tool surface microtexture, coating growth texture, and workpiece deformation texture include: By studying the effects of microtexture parameters and coating growth texture parameters on coating hardness, toughness, residual stress, elastic modulus, tribological properties and film-substrate adhesion, the optimal matching model between microtexture parameters and coating growth texture parameters was determined. Through high-speed cutting experiments, statistical data on workpiece surface quality, machining efficiency, and tool life were obtained. The correlation dimension method was used to study the statistical data on workpiece surface quality, machining efficiency, and tool life. The texture fusion parameters of the tool, coating, and workpiece were analyzed and calculated using fractal methods to determine the fractal dimension of the texture fusion mechanism. Using a grey relational weighted analysis model and mathematical morphology, we construct the correlation between the equivalent stress distribution within the workpiece and chip, the normal stress distribution at the tool-chip contact interface, the equivalent strain within the chip, and three texture parameters. This reveals the synergistic influence of the three texture parameters on the friction state of the tool-chip contact area and elucidates the interaction mechanism and fusion mechanism among the three textures.

3. The method for preparing a textured fusion coating tool according to claim 2, characterized in that, The specific steps for establishing a matching model between the coating component system and a specific workpiece based on the texture fusion mechanism are as follows: By utilizing the properties of the rescaled transformation group and numerical calculations, the fractal dimension, information dimension, and correlation dimension of the optimal multifractal system are obtained, and a matching model between the coating component system and a specific workpiece is established under the guidance of the texture fusion mechanism principle.

4. The method for preparing a textured fusion coated cutting tool according to claim 1, characterized in that, The tool matrix is ​​an Al2O3 / TiC ceramic turning tool, with a weight percentage of 45% Al2O3 + 55% TiC.

5. The method for preparing a textured fusion coated cutting tool according to claim 4, characterized in that, The step of forming surface microtextures on the tool substrate specifically involves: Nanosecond laser processing technology is used to process microtextures conforming to the texture fusion mechanism on the rake and flank faces of the cutting tool; the processing parameters are: pump voltage 15-25V, output power 10-15W, scanning speed 3-8 mm / s, pulse frequency 3-8 Hz, and 1-3 scans.

6. The method for preparing a textured fusion coated cutting tool according to claim 1, characterized in that, The tool substrate is a carbide turning tool or a carbide end mill, with a weight percentage of 79% WC + 15% TiC + 6% Co or 94% WC + 6% Co.

7. The method for preparing a textured fusion coated cutting tool according to claim 6, characterized in that, The step of forming surface microtextures on the tool substrate specifically involves: The micro-texture in accordance with the texture fusion mechanism is processed by picosecond laser, and the processing parameters are as follows: energy density 2-3 J / cm 2 , repetition frequency 50-100 kHz, single exposure time 0.5-1.0 ms, and repetition number 5-10.

8. The method for preparing a textured fusion coating tool according to claim 1, characterized in that, The step of depositing a coating corresponding to the wear-resistant coating components on the surface of the tool substrate specifically involves: A coating is deposited on the surface of a tool with microtexture using a CVD process. The coating consists of a TiCN layer, a TiN layer, and an Al2O3 layer from the inside out. The deposition parameters for the TiCN layer were: temperature 850-880℃, pressure 60-90 mbar, deposition time 300-450 min, and volume percentages of H2, N2, TiCl4, and CH3CN of 50-85%, 5-40%, 1-4%, and 0.1-1%, respectively. The deposition parameters for the TiN layer were: temperature 900-1050 ℃, pressure 500-800 mbar, deposition time 50-100 min, and volume percentages of H2, N2, and TiCl4 of 60-80%, 20-35%, and 0.5-2%, respectively. Preferred orientation Al2O3 nucleation parameters: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 10-30 min, and volume percentages of H2, N2, AlCl3, CO2, HCl and CO of 80-90%, 5-10%, 0.5-2%, 1-5%, 1.5-3% and 0.1-1%, respectively. The preferred orientation Al2O3 deposition parameters were: temperature 1000-1050 ℃, pressure 60-90 mbar, deposition time 100-300 min, and volume percentages of H2, N2, AlCl3, CO2, HCl, H2S and CO of 80-90%, 5-20%, 0.5-5%, 1-5%, 1.5-3%, 0.1-1% and 0.1-1%, respectively; wherein the ratio of H2S to CO2 was greater than 0.08 and less than 0.11.