Transmitter

Abstract

An emitter (1) having: an electron source tip (10); a first filament (50) connected to a first position (10a) on the side surface of the electron source tip (10); a second filament (60) connected to a second position (10b) on the side surface of the electron source tip (10); two upper positive terminals (20a, b) connected to first side surfaces (50a, b) at two locations of the first filament (50), respectively; two upper negative terminals (20c, d) connected to second side surfaces (60a, b) at two locations of the second filament (60), respectively; one lower positive terminal (30a) electrically connected to the two upper positive terminals (20a, b); one lower negative terminal (30b) electrically connected to the two upper negative terminals (20c, d); and an insulator (40) carrying the upper positive terminals (20a, b), the upper negative terminals (20c, d), the lower positive terminal (30a), and the lower negative terminal (30b), the first position (10a) and the second position (10b) being different positions, the first side surfaces (50a, b) of the first filament (50) being connected to the side surfaces of the upper positive terminals (20a, b), respectively, and the second side surfaces (50a, b) being connected to the side surfaces of the lower positive terminals (30a, b). The second side surfaces (60a, b) of the second filament (60) are connected to the side surfaces of the upper negative terminals (20c, d), respectively.

Description

Technical Field

[0001] This invention relates to transmitters. Background Technology

[0002] Electron sources are used in various devices such as electron beam lithography apparatus, electron beam mapping apparatus, multi-electron beam systems, scanning electron microscopes (SEM), transmission electron microscopes (TEM), electron beam microanalyzers, and micro-focusing X-ray devices.

[0003] For example, Patent Document 1 discloses an electron source for the purpose of providing a stable electron source for long-term operation. The electron source comprises: a tungsten or molybdenum having an electron-emitting surface with a {100} crystal plane exposed at the front end. <100> A single crystal rod with orientation; a metal oxide layer covering the {100} crystal plane; a diffusion source for diffusing the raw material of the metal oxide layer; and a pathway, which are formed in... <100> On an oriented single crystal rod, a diffusion path is formed from the diffusion source to the vicinity of the front end or front end, which becomes the diffusion path for the raw material from the diffusion source.

[0004] As shown in Patent Document 1, in the case of a transmitter with an electron source tip connected to a filament, the position of the electron source changes little by little when a voltage is applied. Due to the change in the position of the electron source tip, the processing accuracy may be reduced.

[0005] In addition, Patent Document 2 discloses an electron gun for the purpose of providing an electron gun that is not easily affected by positional displacement caused by magnetism. The electron gun has a multifilament heater consisting of a first filament connected to two positive terminals and a second filament connected to two negative terminals.

[0006] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2011-065790 Patent Document 2: US2022-0076914A Summary of the Invention

[0007] The problem that the invention aims to solve As in Patent Document 2, by employing a multifilament heater structure, it is theoretically possible to suppress positional displacement caused by magnetism. However, when each filament is formed on the upper surface of the terminal, the contact point between the filament and the terminal is small and fragile, making it difficult to suppress positional displacement caused by magnetism for an extended period of time.

[0008] Furthermore, Patent Document 2 shows a configuration with four upper terminals, in which four lower terminals are also presumed to be present. However, since several devices utilizing the transmitter correspond to two lower terminals, a new configuration is required that incorporates four upper terminals within the two lower terminals.

[0009] The present invention was made in view of the above-mentioned problems, and its object is to provide an electron source with excellent positional stability of the electron source tip during use and a method for manufacturing the same.

[0010] Methods for solving problems That is, the present invention is as follows.

[0011] (1) A transmitter, which has: The tip of the electron source; The first filament is connected to the first position on the side of the tip of the electron source; The second filament is connected to the second position on the side of the tip of the electron source; Two upper positive terminals are respectively connected to the first side of two parts of the first filament; Two upper negative terminals are respectively connected to the second side of two parts of the second filament; One lower positive terminal is electrically connected to the two upper positive terminals; One lower negative terminal is electrically connected to the two upper negative terminals; and An insulator that carries the upper positive terminal, the upper negative terminal, the lower positive terminal, and the lower negative terminal. The first position and the second position are different positions. The first side of the first filament is connected to the side of the upper positive terminal. The second side of the second filament is connected to the side of the upper negative terminal.

[0012] (2) In the transmitter described in (1), when viewed from the first plane orthogonal to the front end direction of the tip of the electron source, the two upper positive terminals and the two upper negative terminals are configured such that the line segment connecting the centers of the two upper positive terminals intersects with the line segment connecting the centers of the two upper negative terminals.

[0013] (3) In the transmitter described in (1) or (2), the first filament and the second filament are arranged to cross each other when viewed from the top of the first surface orthogonal to the front end direction of the tip of the electron source.

[0014] (4) In the transmitter described in (3), when viewed from above on the first surface, the angle θ1 formed by the projection lines of the first filament and the second filament is more than 80° and less than 90°.

[0015] (5) In the transmitter described in (3), when viewed from above on the first surface, the angle θ1 formed by the projection lines of the first filament and the second filament is less than 80°.

[0016] (6) In any one of (1) to (5) of the transmitter, when viewed from a first surface orthogonal to the front end direction of the tip of the electron source, the first filament is configured such that the line segment connecting the side of the two upper positive terminals to the first side of the first filament intersects with the line segment connecting the center of the two upper positive terminals.

[0017] (7) In any one of (1) to (6) of the transmitter, when viewed from the first surface orthogonal to the front end direction of the tip of the electron source, the second filament is configured such that the line segment connecting the side of the two upper negative terminals to the second side of the second filament intersects with the line segment connecting the center of the two upper negative terminals.

[0018] (8) In any of (1) to (5) and (7) of the transmitter, when viewed from the top of the first surface orthogonal to the front end direction of the tip of the electron source, the first filament is configured such that the line segment connecting the side of the two upper positive terminals to the first side of the first filament does not intersect with the line segment connecting the center of the two upper positive terminals.

[0019] (9) In any of (1) to (6) and (8) of the transmitter, when viewed from the first surface orthogonal to the front end direction of the tip of the electron source, the second filament is configured such that the line segment connecting the side of the two upper negative terminals to the second side of the second filament does not intersect with the line segment connecting the center of the two upper negative terminals.

[0020] (10) In any one of (1) to (9) of the transmitter, when viewed from a first surface orthogonal to the front end direction of the tip of the electron source, the first filament and the second filament are configured such that the side of the upper positive terminal to which the first side of the first filament is connected is at least opposite to the side of the upper negative terminal to which the second side of the second filament is connected.

[0021] (11) In any of (1) to (9) of the transmitter, when viewed from a first surface orthogonal to the front end direction of the tip of the electron source, the first filament and the second filament are configured such that the side of the upper positive terminal to which the first side of the first filament is connected is not opposite to the side of the upper negative terminal to which the second side of the second filament is connected.

[0022] (12) In any of (1) to (11) the emitter, the first filament is joined at a position closer to the tip of the electron source than the second filament.

[0023] (13) In any of the emitters described in (1) to (11), the second filament is joined at a position closer to the tip of the electron source than the first filament.

[0024] (14) In any one of (1) to (13) of the transmitter, the pair of upper positive terminals have positive terminal connection portions that electrically connect the pair of upper positive terminals, and the pair of upper negative terminals have negative terminal connection portions that electrically connect the pair of upper negative terminals.

[0025] The effects of the invention According to the present invention, an electron source with excellent positional stability of the electron source tip can be provided during use. Attached Figure Description

[0026] Figure 1 This is a schematic perspective view of the transmitter of this embodiment.

[0027] Figure 2 This represents a top view of the insulator taken from the tip of the electron source, on the first plane orthogonal to the direction of the front end of the electron source tip.

[0028] Figure 3A This represents a top view of the insulator taken from the tip of the electron source, on the first plane orthogonal to the direction of the front end of the electron source tip.

[0029] Figure 3B This represents a top view of the insulator taken from the tip of the electron source, on the first plane orthogonal to the direction of the front end of the electron source tip.

[0030] Figure 4 This represents a top view of the insulator taken from the tip of the electron source, on the first plane orthogonal to the direction of the front end of the electron source tip. Detailed Implementation

[0031] Hereinafter, embodiments of the present invention (hereinafter referred to as "this embodiment") will be described in detail with reference to the accompanying drawings. However, the present invention is not limited thereto, and various modifications can be made without departing from its spirit. It should be noted that the scale of the drawings is not limited to the scale shown in the figures.

[0032] In this embodiment, the terms "X direction," "Y direction," "Z direction," and "XY plane direction" are defined as needed. Here, the "Z direction" is the direction parallel to the direction in which electrons are irradiated from the front end of the electron source tip 10. The direction in which electrons are irradiated from the front end of the electron source tip 10 is also called the "Z+ direction," and the direction opposite to the Z+ direction is also called the "Z- direction." In addition, unless otherwise specified, the "Z direction" is parallel to the extending directions of the upper terminal 20 and the lower terminal 30.

[0033] Additionally, the "XY plane direction" refers to the plane direction that intersects with the Z direction. The XY plane direction can also be parallel to the plane 40a extending from the upper terminal 20 and the plane 40b extending from the lower terminal 30 of the insulator 40. Furthermore, unless otherwise specified, the Z direction can also be orthogonal to the XY plane direction. The "X direction" and "Y direction" are intersecting directions within the XY plane. The "X direction" refers to the direction connecting the centers of the upper positive terminals 20a and 20b, and the "Y direction" refers to the direction connecting the centers of the upper negative terminals 20c and 20d. The X and Y directions can also be non-orthogonal.

[0034] Terms describing shape and / or geometric conditions need not be strictly limited, but can be interpreted to include a range of degrees to which the same function can be expected. For example, terms such as "parallel" and / or "orthogonal" are equivalent to the terms mentioned above.

[0035] When describing a structure as being "above," "below," "on the upper side," "below the lower side," "above," or "below," it can also include situations where the structure is directly connected to the other structures, and situations where the structure contains other structures between the other structures. In other words, a situation where the structure contains other structures between the other structures can be described as the structure being indirectly connected to the other structures. Furthermore, expressions like "above," "on the upper side," or "above" can be interchanged with expressions like "below," "below the lower side," or "below." In other words, the up-down direction can be reversed. The same applies to left-right.

[0036] When the same or similar reference numerals are used to label the same parts and / or parts with the same function, repeated descriptions are sometimes omitted. Additionally, the scale of the drawings sometimes differs from the actual scale. Furthermore, sometimes a portion of the structure of the embodiment is omitted from the drawings.

[0037] Figure 1 This refers to transmitter 1 in this embodiment. For example... Figure 1 As shown, the transmitter 1 of this embodiment includes: an electron source tip 10; a first filament 50 connected to a first position 10a on the side of the electron source tip 10; a second filament 60 connected to a second position 10b on the side of the electron source tip 10; two upper positive terminals 20a and 20b respectively connected to the first side surfaces 50a and 50b of the two portions of the first filament 50; two upper negative terminals 20c and 20d respectively connected to the second side surfaces 60a and 60b of the two portions of the second filament; a lower positive terminal 30a electrically connected to the two upper positive terminals 20a and 20b; a lower negative terminal 30b electrically connected to the two upper negative terminals 20c and 20d; and an insulator 40 carrying the upper positive terminals 20a and 20b, the upper negative terminals 20c and 20d, the lower positive terminal 30a, and the lower negative terminal 30b.

[0038] It should be noted that the upper positive terminals 20a and 20b and the upper negative terminals 20c and 20d are collectively referred to as "upper terminals 20". Similarly, the lower positive terminals 30a and lower negative terminals 30b are collectively referred to as "lower terminals 30". The structure of the transmitter 1 according to this embodiment will be described in more detail below.

[0039] The electron source chip 10 is a material that emits electrons by heating and applying an electric field, and may also have an electron emitting surface at the front end. There are no particular limitations on the electron emitting material, and examples include at least one selected from the group consisting of tungsten, molybdenum, tantalum, rhenium, lanthanum boride such as LaB6, cerium boride such as CeB6, and iridium cerium such as Ir2Ce.

[0040] Additionally, the tip of the electron source may include a diffusion source 11. There are no particular limitations on the diffusion source 11, and examples include composite oxides of barium oxide and scandium oxide.

[0041] The first filament 50 and the second filament 60 serve as filaments for heating the electron source tip 10 and are connected to the electron source tip 10. More specifically, the first filament 50 and the second filament 60 can be connected to a heating power supply via the upper terminal 20 and the lower terminal 30, respectively, and the electron source tip 10 is heated by current flowing through the heating power supply. The current flowing through the first filament 50 and the second filament 60 can, for example, be set to make the electron source approximately 1800K.

[0042] exist Figure 1 The diagram shows the first filament 50 being engaged in a position closer to the front end of the electron source tip 10 than the second filament 60, but it is not limited to this; the second filament 60 may also be engaged in a position closer to the front end of the electron source tip 10 than the first filament 50.

[0043] The distance between the first position 10a on the side of the electron source tip 10 to which the first filament 50 is connected and the second position 10b on the side of the electron source tip 10 to which the second filament 60 is connected is preferably 10~500μm, or it can be 50~300μm. It should be noted that this distance refers to the distance of the gap between the first filament 50 and the second filament 60.

[0044] Furthermore, tungsten or graphite filaments, carbon heaters, etc., can be used as the first filament 50 and the second filament 60. Additionally, the raw materials constituting the first filament 50 and the second filament 60 can be the same or different.

[0045] The first sides 50a and 50b of the first filament 50 are connected to two upper positive terminals 20a and 20b, respectively, and any portion between the first sides 50a and 50b is connected to the first position 10a of the side of the electron source tip 10. Additionally, the second sides 60a and 60b of the second filament 60 are connected to two upper negative terminals 20c and 20d, respectively, and any portion between the second sides 60a and 60b is connected to the second position 10b of the side of the electron source tip 10.

[0046] like Figure 1 As shown, in the transmitter 1 of this embodiment, two upper positive terminals 20a and 20b are electrically connected to one lower positive terminal 30a, and two upper negative terminals 20c and 20d are electrically connected to one lower negative terminal 30b. Thus, the transmitter 1 has a structure that transforms two lower terminals 30 into four upper terminals 20.

[0047] The connection method between the two upper positive terminals 20a and 20b and the one lower positive terminal 30a is not particularly limited. For example, the following methods can be used: the two upper positive terminals 20a and 20b are each connected to the lower positive terminal 30a; for example... Figure 1 As shown, an upper positive terminal 20b is connected to a lower positive terminal 30a, and the upper positive terminal 20a is connected to the upper positive terminal 20b.

[0048] Here, the connection between the upper positive terminals 20a and 20b and the lower positive terminal 30a is called the upper and lower positive terminal connection part 80a, and the connection part that electrically connects a pair of upper positive terminals 20a and 20b is called the upper positive terminal connection part 81a.

[0049] The connection method of the two upper negative terminals 20c and 20d and the one lower negative terminal 30b is not particularly limited. For example, the following methods can be used: the two upper negative terminals 20c and 20d are each connected to the lower negative terminal 30b; for example... Figure 1 As shown, an upper negative terminal 20c is connected to a lower negative terminal 30b, and an upper negative terminal 20c is connected to an upper negative terminal 20d.

[0050] Here, the connection between the upper negative terminals 20c and 20d and the lower negative terminal 30b is called the upper and lower negative terminal connection part 80b, and the connection part that electrically connects a pair of upper negative terminals 20c and 20d is called the upper negative terminal connection part 81b.

[0051] exist Figure 1In the example shown, the upper positive terminal connection 81a is located on the Z+ direction surface of the insulator 40, and the upper negative terminal connection 81b is located in the insulator 40, but it is not limited to this. In addition to the upper positive terminal connection 81a, the upper negative terminal connection 81b may also be located on the Z+ direction surface of the insulator 40 in a manner that bypasses the upper positive terminal connection 81a and the upper positive terminals 20a and 20b.

[0052] With the above structure, during heating, electrons are supplied from the lower negative terminal 30b to the two upper negative terminals 20c and 20d, and electrons are supplied from the second side surfaces 60a and 60b of the second filament 60 to the second position 10b on the side of the electron source tip 10. Then, electrons flow from the first position 10a on the side of the electron source tip 10 to the first side surfaces 50a and 50b of the first filament 50, and electrons flow from the upper positive terminals 20a and 20b to the lower positive terminal 30a.

[0053] The transmitter 1 of this embodiment has a structure in which filaments are mounted on two upper positive terminals 20a, 20b and two upper negative terminals 20c, 20d, and the electron source tip 10 is supported by the two filaments. Therefore, compared with a structure in which the electron source tip 10 is supported by a single filament connecting the positive and negative terminals, the electron source tip is held more stably.

[0054] The electron gun includes a magnetic lens that generates a magnetic field and a transmitter 1. Electrons can then be emitted from the front end of the transmitter 1 through the magnetic lens toward the target. Since the transmitter 1 is positioned within the magnetic field formed by the magnetic lens, the magnetic field exerts a magnetic force on the filament. This may cause a positional shift in the transmitter 1, impairing the positional stability of the electron source tip.

[0055] In particular, since magnetic repulsion tends to act in the XY plane, when the first side surfaces 50a and 50b of the first filament 50 are in contact with the upper surfaces of the two upper positive terminals 20a and 20b and the contact area is small, or when the second side surfaces 60a and 60b of the second filament 60 are in contact with the upper surfaces of the two upper negative terminals 20c and 20d and the contact area is small, the positional stability of the electron source tip may be further impaired.

[0056] In contrast, in this embodiment, the first sides 50a and 50b of the first filament 50 are respectively connected to the side 20a' of the upper positive terminal 20a and the side 20b' of the upper positive terminal 20b, and the second sides 60a and 60b of the second filament 60 are respectively connected to the side 20c' of the upper negative terminal 20c and the side 20d' of the upper negative terminal 20d.

[0057] There are no particular limitations on the method of connecting the side of the filament to the side of the terminal; for example, spot welding can be used.

[0058] Figure 2 This is a top view of the insulator 40 taken from the side of the electron source tip 10 in the Z-direction. Figure 2 The image shows the flow of the current indicated by arrow C and the direction of the force F generated at that time. (As shown...) Figure 2 As shown, the first sides 50a and 50b of the first filament 50 are connected to the sides 20a' and 20b' of the upper positive terminal 20a and the upper positive terminal 20b, respectively. The second sides 60a and 60b of the second filament 60 are connected to the sides 20c' and 20d' of the upper negative terminal 20c and the upper negative terminal 20d, respectively. Therefore, it can be seen that within the magnetic field formed by the magnetic lens, the filament experiences magnetic force resistance in the XY plane direction. Figure 2 As shown on the left and right, this antagonistic relationship also holds true when current flows in the opposite direction.

[0059] Furthermore, by such a method of connecting the ends of the filaments to the sides, the contact areas between the first sides 50a, 50b and the upper positive terminals 20a, 20b, and the contact areas between the second sides 60a, 60b and the upper negative terminals 20c, 20d, are increased. Therefore, the connection between the first filament 50 and the upper positive terminals 20a, 20b, and the connection between the second filament 60 and the upper negative terminals 20c, 20d, are strengthened, and positional changes during prolonged use are suppressed.

[0060] Furthermore, by connecting the first sides 50a and 50b to sides 20a' and 20b', and connecting the second sides 60a and 60b to sides 20c' and 20d', the upper terminal 20 can support the first filament 50 and the second filament 60 against the force of the magnetic force in the XY plane within the magnetic field formed by the magnetic lens. For example, as Figure 2 As shown on the right, in the upper positive terminal 20a, the force F generated by the first filament 50 is applied to the side 20a', and the upper positive terminal 20a supports the first filament 50.

[0061] Therefore, the positional stability of the electron source tip is further improved. Furthermore, as a result, the irradiation position accuracy of the electron beam is further improved when used in various devices such as electron beam lithography apparatuses, electron beam mapping apparatuses, multi-electron beam systems, scanning electron microscopes (SEM), transmission electron microscopes (TEM), electron beam microanalyzers, and micro-focusing X-ray devices.

[0062] The insulator 40 in this embodiment is not particularly limited; for example, aluminum oxide can be used. The bonding of the upper terminal 20 and the lower terminal 30 to the insulator 40 is not particularly limited; for example, brazing can be used.

[0063] See Figure 3 below. Figure 4Further explanation of the configuration of transmitter 1 in this embodiment. Figure 3~ Figure 4 This represents a top view of the insulator 40, taken from the side of the electron source tip 10, on the first plane orthogonal to the direction of the front end of the electron source tip 10. It should be noted that the first plane has the same meaning as the "XY plane".

[0064] Preferably, in a top view from the first surface, the projection lines of the first filament 50 and the second filament 60 onto the first surface are arranged in an intersecting manner. For example... Figure 3A As shown, the angle θ1 formed by the projection lines of the first filament 50 and the second filament 60 is between 80° and 90°, and can be between 82° and 90°, or between 84° and 90°. Additionally, as... Figure 3B As shown, in the first surface, the angle θ1 formed by the projection lines of the first filament 50 and the second filament 60 is preferably less than 80°, and can be more than 10° and less than 75°, more than 20° and less than 70°, or more than 30° and less than 65°.

[0065] It should be noted that, in this embodiment, "top view" refers to viewing the first surface from a surface along the first surface. Under the top view of the first surface, the first filament 50 and the second filament 60 are projected onto the first surface.

[0066] like Figure 3A As shown, in the top view of the first side, the two upper positive terminals 20a and 20b and the two upper negative terminals 20c and 20d can be configured to intersect the line segment l1 connecting the centers of the two upper positive terminals 20a and 20b with the line segment l2 connecting the centers of the two upper negative terminals 20c and 20d.

[0067] The angle θ2 formed by line segment l1 and line segment l2 is preferably 80° or more and 90° or less, and can be 82° or more and 90° or less, or 84° or more and 90° or less. In addition, the angle θ2 is preferably less than 80°, and can be 10° or more and 75° or less, 20° or more and 70° or less, or 30° or more and 65° or less.

[0068] like Figure 3A , Figure 3B As shown, in the top view of the first side, the first filament 50 can be configured such that the line segment connecting the sides 20a' and 20b' of the two upper positive terminals 20a and 20b connected to the first sides 50a and 50b of the first filament 50 intersects with the line segment l1 connecting the center of the two upper positive terminals 20a and 20b. It should be noted that, here, the line segment connecting the sides 20a' and 20b' is equal to that of the first filament 50.

[0069] like Figure 3A , Figure 3BAs shown, in the top view of the first side, the second filament 60 can be configured such that the line segment connecting the sides 20c' and 20d' of the two upper negative terminals 20c and 20d connected to the second sides 60a and 60b of the second filament 60 intersects with the line segment l2 connecting the centers of the two upper negative terminals 20c and 20d. It should be noted that, here, the line segment connecting the sides 20c' and 20d' is equal to that of the second filament 60.

[0070] From the top view of the first side, the first filament 50 can be configured such that the line segment connecting the sides 20a' and 20b' of the two upper positive terminals 20a and 20b to the first sides 50a and 50b of the first filament 50 does not intersect with the line segment l1 connecting the centers of the two upper positive terminals. It should be noted that, here, the line segment connecting the sides 20a' and 20b' is equal to that of the first filament 50.

[0071] like Figure 4 As shown, in the top view of the first side, the second filament 60 can be configured such that the line segment connecting the sides 20c' and 20d' of the two upper negative terminals 20c and 20d connected to the second sides 60a and 60b of the second filament 60 does not intersect with the line segment l2 connecting the centers of the two upper negative terminals. It should be noted that, here, the line segment connecting the sides 20c' and 20d' is equal to that of the second filament 60. It should be noted that in... Figure 4 In the text, the abbreviation indicates the first filament, 50, etc.

[0072] like Figure 3B As shown, in the top view of the first side, the first filament 50 and the second filament 60 can be configured such that the sides 20a' and 20b' of the upper positive terminals 20a and 20b connected to the first sides 50a and 50b of the first filament 50 are at least opposite to the sides 20c' and 20d' of the upper negative terminals 20c and 20d connected to the second sides 60a and 60b of the second filament 60. Here, "at least opposite" means, for example, as... Figure 3B As shown, it is sufficient for side 20a' to be opposite to side 20c'; it is not necessary for side 20a' to be opposite to side 20d'.

[0073] like Figure 3A As shown, when viewed from above the first surface, the first filament 50 and the second filament 60 can be configured such that the sides 20a' and 20b' of the upper positive terminals 20a and 20b connected to the first side surfaces 50a and 50b of the first filament 50 are not opposite to the sides 20c' and 20d' of the upper negative terminals 20c and 20d connected to the second side surfaces 60a and 60b of the second filament 60.

[0074] Industrial availability This invention has industrial applicability as a transmitter.

[0075] Explanation of reference numerals in the attached figures 1 Emitter, 10 Electron source tip, 10a Position 1, 10b Position 2, 11 Diffuser, 20 Upper terminal, 20a Upper positive terminal, 20a' Side, 20b Upper positive terminal, 20b' Side, 20c Upper negative terminal, 20c' Side, 20d Upper negative terminal, 20d' Side, 30 Lower terminal, 30a Lower positive terminal, 30b Lower negative terminal, 40 Insulator, 40a Surface, 40b Surface, 50 First filament, 50a First side, 50b First side, 60 Second filament, 60a Second side, 60b Second side, 80a Upper and lower positive terminal connection, 80b Upper and lower negative terminal connection, 81a Upper positive terminal connection, 81b Upper negative terminal connection.

Claims

1. A transmitter, which has: The tip of the electron source; The first filament is connected to the first position on the side of the tip of the electron source; The second filament is connected to the second position on the side of the tip of the electron source; Two upper positive terminals are respectively connected to the first side of two parts of the first filament; Two upper negative terminals are respectively connected to the second side of two parts of the second filament; One lower positive terminal is electrically connected to the two upper positive terminals; One lower negative terminal is electrically connected to the two upper negative terminals; and An insulator that carries the upper positive terminal, the upper negative terminal, the lower positive terminal, and the lower negative terminal. The first position and the second position are different positions. The first side of the first filament is connected to the side of the upper positive terminal. The second side of the second filament is connected to the side of the upper negative terminal.

2. The transmitter according to claim 1, wherein, Viewed from above on the first plane orthogonal to the front end direction of the electronic source tip, the two upper positive terminals and the two upper negative terminals are configured such that the line segment connecting the centers of the two upper positive terminals intersects with the line segment connecting the centers of the two upper negative terminals.

3. The transmitter according to claim 1, wherein, Viewed from above on the first surface orthogonal to the front end direction of the electron source tip, the projection lines of the first filament and the second filament toward the first surface intersect.

4. The transmitter according to claim 3, wherein, When viewed from above on the first surface, the angle θ1 formed by the projection lines of the first filament and the second filament is between 80° and 90°.

5. The transmitter according to claim 3, wherein, When viewed from above on the first surface, the angle θ1 formed by the projection lines of the first filament and the second filament is less than 80°.

6. The transmitter according to claim 1, wherein, Viewed from above on the first surface orthogonal to the front end direction of the electronic source tip, the first filament is configured such that the line segment connecting the side of the two upper positive terminals to the first side of the first filament intersects with the line segment connecting the center of the two upper positive terminals.

7. The transmitter according to claim 1, wherein, Viewed from above on the first surface orthogonal to the front end direction of the electronic source tip, the second filament is configured such that the line segment connecting the side of the two upper negative terminals to the second side of the second filament intersects with the line segment connecting the center of the two upper negative terminals.

8. The transmitter according to claim 1, wherein, Viewed from above on the first surface orthogonal to the front end direction of the electronic source tip, the first filament is configured such that the line segment connecting the side of the two upper positive terminals to the first side of the first filament does not intersect with the line segment connecting the center of the two upper positive terminals.

9. The transmitter according to claim 1, wherein, Viewed from above on the first plane orthogonal to the front end direction of the electronic source tip, the second filament is configured such that the line segment connecting the side of the two upper negative terminals to the second side of the second filament does not intersect with the line segment connecting the center of the two upper negative terminals.

10. The transmitter according to claim 1, wherein, Viewed from above on a first surface orthogonal to the front end direction of the electronic source tip, the first filament and the second filament are configured such that the side of the upper positive terminal to which the first side of the first filament is connected is at least opposite to the side of the upper negative terminal to which the second side of the second filament is connected.

11. The transmitter according to claim 1, wherein, Viewed from above on a first surface orthogonal to the front end direction of the electronic source tip, the first filament and the second filament are configured such that the side of the upper positive terminal to which the first side of the first filament is connected is not opposite to the side of the upper negative terminal to which the second side of the second filament is connected.

12. The transmitter according to claim 1, wherein, The first filament is joined at a position closer to the tip of the electron source than the second filament.

13. The transmitter according to claim 1, wherein, The second filament is joined at a position closer to the tip of the electron source than the first filament.

14. The transmitter according to claim 1, wherein, Each pair of upper positive terminals has a positive terminal connection portion that electrically connects the pair of upper positive terminals. The pair of upper negative terminals have a negative terminal connection portion that electrically connects the pair of upper negative terminals.

Images