Spray head cleaning equipment

Abstract

The invention provides spray header cleaning equipment which comprises a first groove, and an avoiding hole penetrating through the first groove is formed in the bottom wall of a cleaning cavity; the output end of the lifting part is in power connection with the tank cover, and the lifting part drives the tank cover to move in the first direction, so that the cleaning cavity is switched between the opening state and the closing state; the sealing piece is arranged in the cleaning cavity, and the sealing piece abuts against the side wall of the spraying head to form a sealed environment, so that cleaning liquid in the cleaning cavity is sprayed out of the first groove through the small holes of the spraying head; the multiple liquid outlet ends of the liquid supply system penetrate through the tank cover and point to the cleaning cavity in the first direction. The pushing piece is arranged below the first groove, and the top wall of the pushing piece penetrates through the avoiding hole and extends into the cleaning cavity to bear the spraying head; one end of the transmission part is connected with the groove cover or the output end of the lifting part, and the other end of the transmission part is connected with the pushing part, so that the pushing part and the groove cover synchronously move in the first direction, and the spraying head is conveniently detached from the first groove.

Description

Technical Field

[0001] This application relates to the field of spray head cleaning, and more particularly to a spray head cleaning device. Background Technology

[0002] Spray heads are key components in industries such as semiconductors, chemicals, and coatings. The cleanliness of the small orifices inside the spray head directly affects the uniformity of the spray.

[0003] Traditional cleaning methods for spray heads primarily employ high-pressure water jet rinsing. During this process, only a small amount of water enters the interior of the orifice, making it difficult to remove contaminants such as particles and crystals (wax used to fix products during processing, and silicon powder remaining in the orifice after cutting fluid processing). The adhesion of these residues hinders the plasma from penetrating the orifice and bombarding the wafer surface, thereby causing irreversible defects on the wafer surface.

[0004] When water flows through the small holes of the spray head, the water pressure is low, resulting in poor cleaning of the attached substances. When the water flows at high speed over the outer surface of the spray head, there is a large tension between the water film on the outer surface of the spray head and the support fixture, which causes the spray head to adhere to the support fixture. After cleaning, the fixture is difficult to remove from the support fixture.

[0005] Therefore, how to design a cleaning device that can improve the cleaning effect of spray heads has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] This application provides a spray head cleaning device to at least solve the above-mentioned technical problems existing in the prior art.

[0007] A spray head cleaning device is provided, including a first tank, the first tank opening upward to form a cleaning chamber for placing the spray head, and the bottom wall of the cleaning chamber is provided with a clearance hole penetrating the first tank; The tank cover and the lifting component are connected to the power of the tank cover by the output end of the lifting component, which drives the tank cover to move in the first direction, so that the cleaning chamber switches between the open and closed states. A sealing element is installed inside the cleaning chamber. The sealing element abuts against the side wall of the spray head to form a sealed environment, so that the cleaning liquid in the cleaning chamber is sprayed out of the first groove through the small hole of the spray head. The liquid supply system has several outlets, which penetrate the tank cover and point towards the cleaning chamber in the first direction. A pusher is positioned below the first groove, and the top wall of the pusher extends through the clearance hole into the cleaning chamber to support the spray head. The transmission component has one end connected to the slot cover or the output end of the lifting component, and the other end connected to the pushing component, so as to realize that the pushing component and the slot cover move synchronously along the first direction.

[0008] In one embodiment, a support fixture is included, which is disposed on the bottom wall of the cleaning chamber, and a sealing element is disposed on the top wall of the support fixture. The support fixture is provided with a through hole, the inner diameter of which is smaller than the inner diameter of the clearance hole.

[0009] In one embodiment, the sealing element includes a first sealing ring and a second sealing ring, which are coaxially arranged. The top wall of the bearing fixture is provided with a first bearing groove and a second bearing groove, and the first sealing ring and the second sealing ring are respectively installed in the first bearing groove and the second bearing groove.

[0010] In one embodiment, an isolation zone is formed between the first bearing groove and the second bearing groove. The isolation zone is provided with a plurality of through grooves evenly distributed along the circumference of the bearing fixture. The pusher includes a plurality of top blocks, each corresponding to a through groove. The top block extends through the through groove to the cleaning chamber. The side wall of the top block abuts against the inner wall of the through groove, and the top wall of the top block abuts against the bottom wall of the spray head.

[0011] In one embodiment, the pusher further includes a support ring located below the top block, and several top blocks are fixedly connected to the support ring.

[0012] In one embodiment, the transmission component includes a connecting rod, one end of which is fixedly connected to the groove cover, and the other end of which is fixedly connected to the pusher.

[0013] In one embodiment, the liquid supply system includes a second tank and a pumping structure. The second tank is disposed below the first tank to receive cleaning fluid flowing out from the clearance hole. One end of the pumping structure extends into the inner cavity of the second tank, and the other end of the pumping structure is connected to the liquid outlet of the liquid supply system.

[0014] In one embodiment, the liquid supply system includes a heating structure disposed in a second tank to heat the cleaning liquid in the second tank.

[0015] In one embodiment, the liquid supply system further includes a drain chamber and an overflow trough. The second trough is located inside the drain chamber, and the overflow trough is located above the drain chamber and outside the second trough. The overflow trough is connected to the drain chamber through an overflow hole.

[0016] In one embodiment, the pumping structure includes a pump body and a filter. The output end of the filter is connected to the input end of the pump body. The input end of the filter is connected to the inner cavity of the second tank through a pipe. The inlet of the pipe is located on the side wall of the second tank and has a reserved height between it and the bottom wall of the second tank.

[0017] Compared with the prior art, the spray head cleaning device of this application has the following advantages: This application utilizes a tank cover that fits with a first tank cover to enclose the spray head to be cleaned within the cleaning chamber. At this time, the sealing element abuts against the side wall of the spray head, thereby setting the cleaning chamber into a sealed environment. The liquid supply system provides high-pressure cleaning fluid into the cleaning chamber. At this time, the cleaning fluid is sprayed out only through the small holes of the spray head. Compared with the rinsing of the spray head in the prior art, the pressure of the cleaning fluid in the small holes is increased, which improves the cleaning effect of the inner wall of the small holes and reduces the risk of dirt residue in the small holes. When the lifting component drives the tank cover to open the cleaning chamber, the tank cover drives the pushing component to rise in the first direction through the transmission component, thereby pushing the spray head away from the sealing component, solving the problem of water film tension causing the spray head to be adsorbed inside the cleaning chamber, and making it easier to disassemble the spray head. During the cleaning process, the spray head is pressed directly against the seal under the action of gravity. At the same time, the cleaning fluid sprayed from the liquid outlet of the liquid supply system is directly shot towards the spray head in the first direction, increasing the squeezing force between the spray head and the seal, thereby improving the stability of the spray head inside the cleaning chamber.

[0018] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this application, nor is it intended to limit the scope of this application. Other features of this application will become readily apparent from the following description. Attached Figure Description

[0019] The above and other objects, features, and advantages of exemplary embodiments of this application will become readily apparent from the following detailed description taken in conjunction with the accompanying drawings. Several embodiments of this application are illustrated in the drawings by way of example and not limitation, wherein: In the accompanying drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0020] Figure 1 A schematic diagram of the overall structure of this application is shown; Figure 2 A schematic diagram of the closed-state structure of this application is shown; Figure 3 This diagram illustrates the structure of the enabled state of this application. Figure 4 A schematic diagram of the structure of the load-bearing fixture of this application is shown; Figure 5 A schematic diagram of the structure of the pusher component of this application is shown; Figure 6 A partial structural schematic diagram of this application is shown; Figure 7 A partial unfolded schematic diagram of this application is shown; Figure 8 A schematic diagram of the structure of the second groove of this application is shown.

[0021] Explanation of the labels in the diagram: X, first direction; 1. First tank; 10. Cleaning chamber; 11. Drain hole; 12. Blockage; 100. Spray head; 101. Clearance hole; 2. Slot cover; 3. Lifting components; 4. Sealing element; 41. First sealing ring; 42. Second sealing ring; 5. Liquid supply system; 50. Liquid outlet; 51. Second tank; 52. Pumping structure; 521. Pump body; 522. Filter; 523. Pipeline; 53. Heating structure; 54. Drainage chamber; 541. Drainage pipe; 55. Overflow tank; 56. Overflow hole; 6. Pushing component; 61. Pushing block; 62. Supporting ring; 7. Transmission components; 71. Connecting rod; 8. Support fixture; 81. Through hole; 82. First support groove; 83. Second support groove; 84. Isolation zone; 85. Through groove. Detailed Implementation

[0022] To make the objectives, features, and advantages of this application more apparent and understandable, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] In this embodiment, the direction is defined, with the vertical direction being the first direction X.

[0024] like Figure 1 and Figure 2 As shown, the cleaning equipment includes a first tank 1, wherein the opening of the first tank 1 faces upward, and a cleaning chamber 10 for storing cleaning fluid is formed inside the first tank 1. The spray head 100 to be cleaned is placed in the first tank 1 to complete the cleaning operation.

[0025] It also includes a tank cover 2 and a lifting component 3. The output end of the lifting component 3 is fixedly connected to the tank cover 2 to drive the tank cover 2 to move along the first direction X. The tank cover 2 cooperates with the first tank 1 to complete the switching between the open and closed states of the cleaning chamber 10, so as to realize the placement and cleaning operation of the spray head 100.

[0026] It is worth noting that when the tank cover 2 separates from the first tank 1, the cleaning chamber 10 opens, as follows: Figure 3 As shown, the spray head 100 is inserted into the gap between the tank cover 2 and the first tank 1; when the tank cover 2 is closed on the first tank 1, the cleaning chamber 10 is sealed, as shown. Figure 2As shown, by providing cleaning fluid into the cleaning chamber 10 and pressurizing it, the cleaning fluid passes through the small holes of the spray head 100, thereby achieving the cleaning operation of the small holes of the spray head 100.

[0027] Furthermore, the bottom wall of the cleaning chamber 10 is provided with a clearance hole 101 that penetrates the first groove 1. When the spray head 100 is placed, the small hole on the spray head 100 is aligned with the clearance hole 101, so that the cleaning liquid is sprayed out of the cleaning chamber 10 through the small hole of the spray head 100.

[0028] After the tank cover 2 and the first tank 1 are fitted together to seal the cleaning chamber 10, in order to allow the cleaning fluid in the cleaning chamber 10 to pass through the small hole of the spray head 100 under high pressure, in this embodiment, as follows: Figure 2 As shown, it also includes a sealing element 4, wherein the sealing element 4 is installed inside the cleaning chamber 10, and the sealing element 4 abuts against the side wall of the spray head 100 to form a sealed environment, so as to ensure that the cleaning liquid is sprayed out only from the small hole of the spray head 100 to provide an environment for the cleaning chamber 10 to form high pressure.

[0029] In this embodiment, as Figure 2 and Figure 3 As shown, it also includes a support fixture 8, which is arranged in a ring shape inside the cleaning chamber 10. The support fixture 8 is provided with a through hole 81, the inner diameter of which is smaller than the inner diameter of the clearance hole 101. It is worth noting that the spray area is formed at the position where the spray head 100 is provided with a small hole; the support area is formed at the position where no small hole is provided. When the spray head 100 is placed inside the cleaning chamber 10, the spray area of ​​the spray head 100 is aligned with the through hole 81, and the support area of ​​the spray head 100 overlaps the top wall of the support fixture 8, thereby completing the placement of the spray head 100.

[0030] Specifically, the seal 4 is disposed between the top wall of the support fixture 8 and the bottom wall of the support area of ​​the spray head 100, and the seal 4 is used to prevent the cleaning fluid in the cleaning chamber 10 from flowing out from the gap between the support fixture 8 and the spray head 100.

[0031] Furthermore, in this embodiment, as Figure 3 and Figure 4 As shown, the sealing element 4 includes a first sealing ring 41 and a second sealing ring 42. The top wall of the bearing fixture 8 is provided with a first bearing groove 82 and a second bearing groove 83. The first sealing ring 41 and the second sealing ring 42 are coaxially arranged. The diameter of the first sealing ring 41 is smaller than the diameter of the second sealing ring 42. The first sealing ring 41 and the second sealing ring 42 are respectively installed in the first bearing groove 82 and the second bearing groove 83. The top walls of the first sealing ring 41 and the second sealing ring 42 are in contact with the bearing area of ​​the spray head 100.

[0032] The arrangement of the first sealing ring 41 and the second sealing ring 42 forms a multi-layer seal, thereby improving the sealing effect of the cleaning chamber 10.

[0033] When the high-pressure cleaning fluid in the cleaning chamber 10 passes through the small hole of the spray head 100, the high-pressure cleaning fluid easily penetrates into the gap between the spray head 100 and the support fixture 8. The tension of the cleaning fluid adsorbs the spray head 100, making it difficult to remove the cleaned spray head 100 from the support fixture 8.

[0034] Therefore, in this embodiment, a pusher 6 and a transmission member 7 are also included. The pusher 6 is disposed below the first groove 1 and extends along the first direction X, passing through the clearance hole 101 and being inserted into the cleaning chamber 10. When the spray head 100 is placed in the cleaning chamber 10, the top wall of the pusher 6 abuts against the bearing area of ​​the spray head 100, thereby completing the bearing of the spray head 100. The transmission member 7 is disposed between the groove cover 2 and the pusher 6. One end of the transmission member 7 is connected to the groove cover 2, and the other end of the transmission member 7 is connected to the pusher 6, so that the pusher 6 and the groove cover 2 move up and down together along the first axial direction X.

[0035] When the lifting component 3 pushes the groove cover 2 upward and separates from the first groove 1, the transmission component 7 drives the pushing component 6 to move upward, thereby lifting the spray head 100 upward, overcoming the adsorption force between the spray head 100 and the supporting fixture 8, and completing the removal of the spray head 100.

[0036] Specifically, such as Figure 4 As shown, the pusher 6 includes several push blocks 61 and a support ring 62. The push blocks 61 are evenly distributed around the circumference of the support fixture 8. The support ring 62 is located below the push blocks 61 and is fixedly connected to the push blocks 61. The top wall of the push block 61 abuts against the bottom wall of the spray head 100. The support ring 62 is connected to the transmission component 7.

[0037] Furthermore, such as Figure 4 and Figure 5 As shown, an isolation zone 84 is formed between the first bearing groove 82 and the second bearing groove 83. A plurality of through grooves 85 are provided on the isolation zone 84. The plurality of through grooves 85 correspond one-to-one with a plurality of top blocks 61. The top blocks 61 extend through the through grooves 85 into the cleaning chamber 10. The side wall of the top block 61 and the side wall of the through groove 85 are slidably connected along the first direction X.

[0038] With the above configuration, when the lifting member 3 separates the tank cover 2 from the first tank 1, the transmission member 7 pushes the top block 61 along the first direction X via the support ring 62, making the top wall of the top block 61 higher than the top wall of the supporting fixture 8. At this time, the spray head 100 is placed in the cleaning chamber 10 and located on the top block 61, which supports the spray head 100. When the lifting member 3 moves the tank cover 2 downward, the top block 61 moves downward slowly. After the cleaning chamber 10 of the first tank 1 is sealed by the tank cover 2, the top block 61... The top wall of the spray head 100 is flush with the top wall of the support fixture 8, and the support area of ​​the spray head 100 abuts against the seal 4, thus completing the placement of the spray head 100. At this time, cleaning fluid is slowly injected into the cleaning chamber 10. Due to the large weight of the spray head 100 itself, the cleaning fluid cannot push the spray head 100 to move radially within the cleaning chamber 10. When the cleaning chamber 10 is full, the pressure inside the cleaning chamber 10 gradually increases, and the cleaning fluid is sprayed outward under high pressure through the small hole of the spray head 100, thereby achieving the cleaning of the spray head 100.

[0039] It is worth noting that the transmission component 7 in this embodiment is a connecting rod 71. The connecting rod 71 is C-shaped and passes over the outside of the groove cover 2 and the first groove 1. One end of the connecting rod 71 is fixedly connected to the groove cover 2, and the other end of the connecting rod 71 is connected to the support ring 62.

[0040] In this embodiment, the connecting rod 71 extends below the bottom wall of the support ring 62 to support the support ring 62.

[0041] Furthermore, three connecting rods 71 ​​are provided, two of which are symmetrically arranged about the axis of the slot cover 2, forming an angle of 180 degrees between the two connecting rods and the axis of the slot cover 2. The third connecting rod 71 is positioned between the two connecting rods 71, as shown below. Figure 6 and Figure 7 As shown, the position of this connecting rod 71 is designed to allow for a large gap, so that the spray head 100 can be smoothly inserted into the cleaning chamber 10.

[0042] It is worth noting that the advantage of the sealing element 4 including the concentrically arranged first sealing ring 41 and second sealing ring 42 is that it improves the sealing performance while reducing the risk of the sealing position being punctured by the high-pressure cleaning fluid. At this time, the top block 61 passes through the isolation area 84 between the first sealing ring 41 and the second sealing ring 42. Due to the shielding of the first sealing ring 41 and the second sealing ring 42, it is difficult for cleaning fluid to remain in the isolation area 84. Therefore, it is easy to break the tension of the cleaning fluid between the support fixture 8 and the spray head 100 from this point, making it easy to remove the spray head 100 from the support fixture 8.

[0043] Furthermore, the slot 85 is provided for the top block 61 to pass through, enabling the pusher 6 to move stably along the first direction X.

[0044] In order to achieve a greater pressure in the cleaning chamber 10, this embodiment also includes a liquid supply system 5. The liquid supply system 5 has several outlets 50 arranged on the tank cover 2. The outlets 50 spray into the cleaning chamber 10 along the first direction X, thereby pressurizing the cleaning chamber 10.

[0045] Furthermore, such as Figure 2 As shown, the liquid supply system 5 also includes a pumping structure 52 and a second tank 51. The second tank 51 opens upward and is located below the first tank 1. The second tank 51 receives the cleaning liquid sprayed from the small hole of the spray head 100. The pumping structure 52 sends the cleaning liquid in the second tank 51 to the liquid outlet 50 and back to the cleaning chamber 10, so as to realize the recycling of the cleaning liquid.

[0046] Furthermore, such as Figure 2 As shown, the pumping structure 52 includes a pump body 521, a filter 522, and a pipe 523. The output end of the filter 522 is connected to the input end of the pumping structure 52. The input end of the filter 522 is connected to the inner cavity of the second tank 51 through the pipe 523. The output end of the pump body 521 is connected to the liquid outlet 50.

[0047] When the cleaning fluid in the second tank 51 enters the pump body 521, it filters the residue and dirt through the filter 522 to prevent impurities from flowing back into the cleaning chamber 10.

[0048] Furthermore, the pipe 523 is installed on the side wall of the second tank 51, and a certain height is left between the port of the pipe 523 and the bottom wall of the second tank 51. When the cleaning liquid sprayed by the spray head 100 enters the interior of the second tank 51, large particles will settle on the bottom wall of the second tank 51, reducing the risk of large particle impurities being sucked into the filter 522.

[0049] In this embodiment, as Figure 6 and Figure 7 As shown, the liquid outlet 50 is provided with four sets and fixedly installed on the tank cover 2. The cleaning liquid injected into the liquid outlet 50 directly sprays onto the spray head 100, pressing the spray head 100 onto the support fixture 8.

[0050] In this embodiment, as Figure 2 , Figure 3 and Figure 8 As shown, the liquid supply system 5 also includes a drain chamber 54 and an overflow trough 55. The second trough 51 is placed inside the drain chamber 54, and the overflow trough 55 is located on the outer side of the top of the second trough 51. The overflow trough 55 is located above the drain chamber 54, and the overflow trough 55 is connected to the drain chamber 54 through an overflow hole 56.

[0051] With the above configuration, when the cleaning fluid inside the second tank 51 is filled, the cleaning fluid overflows from the top edge of the second tank 51 and flows into the overflow tank 55. At this time, the floating objects in the second tank 51 can be buffered in the overflow tank 55. The cleaning fluid and dirt in the overflow tank 55 enter the drain chamber 54 through the overflow hole 56. The bottom wall of the drain chamber 54 is provided with a downward-through drain pipe 541. At this time, the dirt and the overflowed cleaning fluid are discharged from the drain pipe 541.

[0052] Furthermore, under normal circumstances, the spray head 100 is fixed with paraffin wax. At this time, the paraffin wax will remain in the small holes of the spray head 100. In order to improve the cleaning effect of paraffin wax, in this embodiment, a heating structure 53 is provided in the second tank 51. The heating structure 53 is used to heat the circulating cleaning liquid, thereby melting the paraffin wax in the small holes of the spray head 100. When the paraffin wax enters the second tank 51, it floats on the upper surface of the cleaning liquid. The overflow of the cleaning liquid carries the paraffin wax into the overflow tank 55 and the drain chamber 54, thereby achieving the cleaning of paraffin wax.

[0053] Furthermore, the second tank 51 is located inside the drain chamber 54, making it difficult for external wind to blow directly onto the outer wall of the second tank 51, thereby reducing the cooling rate of the cleaning fluid in the second tank 51 and reducing energy consumption.

[0054] Furthermore, such as Figure 3 and Figure 8 As shown, the bottom wall of the first tank 1 is provided with a drain hole 11 and a plug 12 is provided in the drain hole 11. After the spray head 100 has finished cleaning, the plug 12 is pulled out from the drain hole 11, and the cleaning liquid in the first tank 1 flows from the drain hole 11 to the sewage discharge chamber 54, thereby impacting the dirt and impurities in the sewage discharge chamber 54 and cleaning the sewage discharge chamber 54.

[0055] In this embodiment, the lifting component 3 is an electric push rod. In addition, the lifting component 3 may also be a cylinder or a lifting motor.

[0056] The heating structure 53 adopts a conventional electric heating method. The heating structure 53 in this application is a conventional component on the market and will not be described in detail here.

[0057] It should be understood that the various forms of processes shown above can be used to rearrange, add, or delete steps. For example, the steps described in this disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this application can be achieved, and this is not limited herein.

[0058] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0059] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A spray head cleaning device, characterized in that, Includes a first groove (1), the first groove (1) opens upward to form a cleaning chamber (10) for placing a spray head (100), and the bottom wall of the cleaning chamber (10) is provided with a clearance hole (101) that penetrates the first groove (1); The tank cover (2) and the lifting component (3) are connected to the output end of the lifting component (3) in a power connection, which drives the tank cover (2) to move in the first direction (X), so that the cleaning chamber (10) switches between the open state and the closed state. The sealing element (4) is set inside the cleaning chamber (10). The sealing element (4) abuts against the side wall of the spray head (100) to form a sealed environment, so that the cleaning liquid in the cleaning chamber (10) is sprayed out of the first groove (1) through the small hole of the spray head (100). The liquid supply system (5) has several outlets (50), and the outlets (50) penetrate the tank cover (2) and point towards the cleaning chamber (10) along the first direction (X). Pushing member (6) is provided below the first groove (1). The top wall of the pushing member (6) extends through the clearance hole (101) into the cleaning chamber (10) to carry the spray head (100). The transmission component (7) is connected at one end to the slot cover (2) or to the output end of the lifting component (3), and at the other end to the push component (6) so as to realize that the push component (6) and the slot cover (2) move synchronously along the first direction (X).

2. The spray head cleaning device according to claim 1, characterized in that, Includes a support fixture (8), which is set on the bottom wall of the cleaning chamber (10), and a sealing element (4) is set on the top wall of the support fixture (8). The support fixture (8) has a through hole (81), the inner diameter of which is smaller than the inner diameter of the clearance hole (101).

3. The spray head cleaning device according to claim 2, characterized in that, The sealing element (4) includes a first sealing ring (41) and a second sealing ring (42), which are coaxially arranged. The top wall of the bearing fixture (8) is provided with a first bearing groove (82) and a second bearing groove (83), and the first sealing ring (41) and the second sealing ring (42) are respectively installed in the first bearing groove (82) and the second bearing groove (83).

4. The spray head cleaning device according to claim 3, characterized in that, An isolation zone (84) is formed between the first bearing groove (82) and the second bearing groove (83). Several through grooves (85) are evenly distributed around the bearing fixture (8) in the isolation zone (84). The pusher (6) includes several top blocks (61). The top blocks (61) correspond one-to-one with the through grooves (85). The top blocks (61) extend through the through grooves (85) to the cleaning chamber (10). The side wall of the top block (61) abuts against the inner wall of the through groove (85). The top wall of the top block (61) abuts against the bottom wall of the spray head (100).

5. A spray head cleaning device according to claim 4, characterized in that, The pusher (6) also includes a support ring (62), which is located below the top block (61), and several top blocks (61) are fixedly connected to the support ring (62).

6. A spray head cleaning device according to claim 1 or 5, characterized in that, The transmission component (7) includes a connecting rod (71), one end of which is fixedly connected to the groove cover (2), and the other end of which is fixedly connected to the pusher (6).

7. A spray head cleaning device according to claim 6, characterized in that, The liquid supply system (5) includes a second tank (51) and a pumping structure (52). The second tank (51) is located below the first tank (1) to receive the cleaning fluid flowing out from the clearance hole (101). One end of the pumping structure (52) extends into the inner cavity of the second tank (51), and the other end of the pumping structure (52) is connected to the liquid outlet (50) of the liquid supply system (5).

8. A spray head cleaning device according to claim 7, characterized in that, The liquid supply system (5) includes a heating structure (53) which is disposed in the second tank (51) to heat the cleaning liquid in the second tank (51).

9. A spray head cleaning device according to claim 8, characterized in that, The liquid supply system (5) also includes a drain chamber (54) and an overflow trough (55). The second trough (51) is located inside the drain chamber (54), and the overflow trough (55) is located above the drain chamber (54) and outside the second trough (51). The overflow trough (55) is connected to the drain chamber (54) through an overflow hole (56).

10. A spray head cleaning device according to claim 7, characterized in that, The pumping structure (52) includes a pump body (521) and a filter (522). The output end of the filter (522) is connected to the input end of the pump body (521). The input end of the filter (522) is connected to the inner cavity of the second groove (51) through a pipe (523). The inlet of the pipe (523) is located on the side wall of the second groove (51) and there is a reserved height between it and the bottom wall of the second groove (51).

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