Gas preheating device of chemical vapor deposition furnace

Abstract

The invention discloses a gas preheating device of a chemical vapor deposition furnace, which belongs to the technical field of chemical vapor deposition and comprises a base, a filter box is fixed on one side of the upper end of the base, a gas inlet pipe is fixedly arranged at the upper end of the filter box, a fan is arranged on one side of the filter box, and the fan is communicated with the filter box through a conveying pipe I; the preheating assembly is arranged, external gas is fed into the filter box through the draught fan after being fed into the preheating assembly through the gas inlet pipe, is filtered through the filter screen and then enters the first preheating cavity through the second conveying pipe, the gas flows along a spiral channel formed by spiral blades and the cavity wall, and the gas flows into the second preheating cavity through the second conveying pipe. After being heated by the heating pipe and the electric heating wire, the gas enters the second preheating cavity and the third preheating cavity sequentially through the through grooves to be continuously heated and is finally exhausted from the gas outlet pipe, and due to the design of the multiple preheating cavities and the spiral channel, the gas circulation time is effectively prolonged, the preheating effect is greatly improved, and uniform and sufficient gas preheating is guaranteed.

Description

Technical Field

[0001] This invention belongs to the field of chemical vapor deposition technology, specifically relating to a gas preheating device for a chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) is an important thin film deposition technique widely used in the preparation of semiconductor, optical, and functional materials. In the CVD process, reactant gases are preheated to a specific temperature by a heater within the furnace, causing them to decompose and deposit onto a cold substrate to form a thin film. The preheating device is a crucial component of the CVD process, directly affecting the quality and efficiency of the deposited film.

[0003] The preheating chambers of existing chemical vapor deposition furnace gas preheating devices are mostly in-line or simple cavity structures. Gas is prone to forming a "short-circuit flow" and passing through the inner wall quickly. The flow path is short, the heat exchange is insufficient, and the preheating effect is poor. In addition, the device lacks a filter cleaning function. The filter is prone to clogging after long-term use, which not only affects gas flow but also reduces filtration and preheating efficiency, thus affecting process stability and product quality. Summary of the Invention

[0004] To address the problems mentioned in the background art, the present invention provides a gas preheating device for a chemical vapor deposition furnace, which aims to increase the gas passage time through the preheating chamber and improve the preheating effect.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a gas preheating device for a chemical vapor deposition furnace, comprising a base, a filter box fixed on one side of the upper end of the base, an air inlet pipe fixed on the upper end of the filter box, a fan on one side of the filter box, the fan and the filter box being connected by a conveying pipe, a conveying pipe two being installed at the end of the fan away from the conveying pipe one, a filter screen being fixed inside the filter box, a cleaning component being installed inside the filter box at a position corresponding to the filter screen, and a preheating component being installed at the end of the conveying pipe two away from the fan;

[0006] The preheating assembly includes a preheating box. The preheating box is located at the end of the conveying pipe away from the fan. A preheating chamber 1 is located on one side of the preheating box, and a preheating chamber 3 is located on the other side of the preheating chamber 1. A preheating chamber 2 is located between the preheating chamber 3 and the preheating chamber 1. Through grooves are provided on the upper side between the preheating chamber 2 and the preheating chamber 1, and on the lower side between the preheating chamber 2 and the preheating chamber 3. Heating tubes are fixed in the preheating chambers 1, 2, and 3. Spiral blades are fixed on the surface of the heating tubes. A spiral channel is formed between the spiral blades and the inner wall of the preheating chamber. Heating wires are fixed on the spiral blades. An air outlet pipe is fixed on the upper side of the end of the preheating box away from the conveying pipe 2.

[0007] Preferably, the preheating component further includes a baffle, a baffle is fixedly provided in the through groove, a plurality of ventilation slots are provided in the baffle, a rotating plate is rotatably connected to one side of the baffle at the position corresponding to the ventilation slot, the rotating plate is connected to the preheating box through a rotating rod, an arc-shaped rod is fixedly provided at one end of the baffle at the position corresponding to the rotating rod, a side plate is fixedly provided at one end of the rotating rod at the position corresponding to the arc-shaped rod, and a spring is sleeved on the outer side of the arc-shaped rod on the upper side of the side plate.

[0008] Preferably, a rubber sealing gasket is provided between the spiral blade and the inner wall of the preheating chamber, and a connecting flange is fixedly connected to the upper end of the air inlet pipe.

[0009] Preferably, a PLC controller is configured on the lower front side of the preheating box, and the heating tube and heating wire are electrically connected to the PLC controller. The PLC controller can realize precise start-up and shutdown and power adjustment of the heating tube and heating wire.

[0010] Preferably, a limiting plate is fixed at the lower end of the arc-shaped rod, and a sliding hole corresponding to the arc-shaped rod is opened in the side plate. The arc-shaped rod is fixed to the side of the baffle with the rotating rod as the center.

[0011] Preferably, the cleaning assembly includes a fixed box, a fixed box is fixed to the upper side of one end of the filter box, a motor is installed at one end of the fixed box, a screw is driven to the output end of the motor, a sliding plate is threaded to one side of the screw, a movable seat is provided inside the filter box at the position corresponding to the filter screen, a cleaning brush is installed at the lower end of the movable seat, and the movable seat and the sliding plate are connected by a connecting rod.

[0012] Preferably, the cleaning component further includes a chip discharge port. A chip discharge port is provided at one end of the filter box corresponding to the position of the filter screen. A sealing plate is fixed at one end of the filter box corresponding to the position of the chip discharge port by bolts. The lower end of the chip discharge port is flush with the upper end of the filter screen.

[0013] Preferably, the cleaning component further includes a collection box, and the collection box is provided at the upper end of the base corresponding to the chip discharge port. A groove corresponding to the collection box is opened at the upper end of the base, and an inclined bucket is fixedly connected to one end of the base at the position corresponding to the chip discharge port.

[0014] Preferably, the lower end of the cleaning brush is tightly fitted to the upper end of the filter screen, and sliding holes corresponding to the connecting rod are opened on both sides of one end of the base, with the side of the connecting rod tightly fitted to the inner wall of the sliding hole.

[0015] Preferably, handles are fixed to one end of the sealing plate and the upper sides of both ends of the collection box, and after the lower end of the collection box is placed into the groove, the side of the collection box fits tightly against the inner wall of the groove.

[0016] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention features a preheating component. External gas enters through the inlet pipe, is then fed into the filter box by a fan, filtered by the filter screen, and then enters the first preheating chamber through the second delivery pipe. The gas flows along the spiral channel formed by the spiral blades and the chamber wall, and after being heated by the heating tube and the heating wire, it sequentially enters the second and third preheating chambers through the through slots for continuous heating, and finally exits from the outlet pipe. The design of multiple preheating chambers and spiral channels effectively extends the gas flow time, significantly improves the preheating effect, and ensures that the gas is preheated evenly and fully.

[0017] 2. This invention achieves backflow prevention by setting a baffle. When gas flows into the next preheating chamber through the channel, it enters the ventilation slot of the baffle and pushes the baffle to rotate. The baffle drives the side plate to slide along the arc rod through the rotating rod, which compresses the spring. After the gas stops, the spring extends and drives the rotating rod to reset, which drives the rotating plate to block the ventilation slot. This can effectively prevent gas from flowing back to the previous preheating chamber, ensure the orderly unidirectional flow of gas, and maintain the heating stability of each preheating chamber.

[0018] 3. The cleaning component of the present invention can automatically clean the filter screen. The motor drives the screw to rotate, which in turn moves the slide plate, connecting rod and moving seat. The cleaning brush at the lower end of the moving seat cleans the impurities on the upper part of the filter screen at the same time to prevent the filter screen from clogging. When cleaning, the sealing plate bolt is unscrewed and the waste is discharged through the waste discharge port. The collection box placed in the groove of the base can collect the waste in a concentrated manner to avoid environmental pollution. The sealing plate design also facilitates the smooth discharge of waste, ensuring filtration and ventilation efficiency. Attached Figure Description

[0019] Figure 1 This is a cross-sectional perspective view of the present invention; Figure 2 This is a sectional right-side perspective view of the present invention; Figure 3 This is a perspective view of the present invention; Figure 4 This is a perspective view of the baffle of the present invention; Figure 5 This is a sectional perspective view of the fixing box of the present invention; In the diagram: 1. Base; 2. Preheating assembly; 21. Preheating box; 22. Preheating chamber one; 23. Preheating chamber two; 24. Preheating chamber three; 25. Air outlet pipe; 26. Through groove; 27. Spiral blade; 28. Heating tube; 29. ​​Spiral channel; 210. Heating wire; 211. Baffle; 212. Rotating plate; 213. Ventilation groove; 214. Rotating rod; 215. Side plate; 216. Arc rod; 217. Spring; 3. Fan; 4. Conveying pipe one; 5. Filter box; 6. Cleaning assembly; 61. Cleaning brush; 62. Fixing box; 63. Moving seat; 64. Motor; 65. Screw; 66. Slide plate; 67. Connecting rod; 68. Chip discharge port; 69. Sealing plate; 610. Collection box; 611. Groove; 612. Inclined hopper; 7. Filter screen; 8. Air inlet pipe; 9. Conveying pipe two. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example 1 Please see Figure 1-5 The present invention provides the following technical solution: a gas preheating device for a chemical vapor deposition furnace, comprising a base 1, a filter box 5 fixed on one side of the upper end of the base 1, an air inlet pipe 8 fixed on the upper end of the filter box 5, a fan 3 on one side of the filter box 5, the fan 3 and the filter box 5 being connected by a first conveying pipe 4, a second conveying pipe 9 installed at the end of the fan 3 away from the first conveying pipe 4, a filter screen 7 fixed inside the filter box 5, a cleaning component 6 installed inside the filter box 5 at a position corresponding to the filter screen 7, and a preheating component 2 installed at the end of the second conveying pipe 9 away from the fan 3. The preheating assembly 2 includes a preheating box 21. The preheating box 21 is located at the end of the conveying pipe 2 9 away from the fan 3. A preheating chamber 1 22 is located on one side of the preheating box 21. A preheating chamber 3 24 is located on the other side of the preheating chamber 1 22. A preheating chamber 23 is located between the preheating chamber 3 24 and the preheating chamber 1 22. A through groove 26 is provided on the upper side between the preheating chamber 23 and the preheating chamber 1 22, and on the lower side between the preheating chamber 23 and the preheating chamber 3 24. A heating tube 28 is fixed in each of the preheating chamber 1 22, the preheating chamber 23 and the preheating chamber 3 24. A spiral blade 27 is fixed on the surface of the heating tube 28. A spiral channel 29 is formed between the spiral blade 27 and the inner wall of the preheating chamber. An electric heating wire 210 is fixed on the spiral blade 27. An air outlet pipe 25 is fixed on the upper side of the end of the preheating box 21 away from the conveying pipe 2 9.

[0022] Specifically, the preheating component 2 also includes a baffle 211. A baffle 211 is fixed in the through groove 26. A plurality of ventilation grooves 213 are formed in the baffle 211. A rotating plate 212 is rotatably connected to one side of the baffle 211 at a position corresponding to the ventilation grooves 213. The rotating plate 212 is connected to the preheating box 21 via a rotating rod 214. An arc-shaped rod 216 is fixed at one end of the baffle 211 at a position corresponding to the rotating rod 214. A side plate 21 is fixed at one end of the rotating rod 214 at a position corresponding to the arc-shaped rod 216. 5. A spring 217 is sleeved on the outer side of the arc-shaped rod 216 on the upper side of the side plate 215. By adopting the above technical solution, when the gas flows into the next preheating chamber through the through groove 26, it will enter the ventilation groove 213 of the baffle 211 and push it to rotate. The baffle 211 drives the side plate 215 to slide along the arc-shaped rod 216 through the rotating rod 214, so that the spring 217 is compressed. After the gas stops, the spring 217 springs back to its original position, driving the rotating plate 212 to block the ventilation groove 213, effectively preventing the gas from flowing back to the previous preheating chamber.

[0023] Specifically, a rubber sealing gasket is provided between the spiral blade 27 and the inner wall of the preheating chamber, and a connecting flange is fixed to the upper end of the air inlet pipe 8. By adopting the above technical solution, the rubber sealing gasket can enhance the sealing performance between the spiral blade 27 and the inner wall of the preheating chamber, prevent gas leakage or short circuit, and ensure the preheating effect. The connecting flange facilitates the stable connection between the air inlet pipe 8 and the external pipeline, improving the ease of installation and disassembly and the sealing performance of the connection.

[0024] Specifically, a PLC controller is configured on the lower front side of the preheating box 21. The heating tube 28 and the heating wire 210 are electrically connected to the PLC controller. The PLC controller can realize the precise start-up and shutdown and power adjustment of the heating tube 28 and the heating wire 210. By adopting the above technical solution, the precise start-up and shutdown and power adjustment of the heating tube 28 and the heating wire 210 are realized, ensuring that the gas preheating temperature is stable and controllable, improving the preheating accuracy and process adaptability, and ensuring the deposition quality.

[0025] Specifically, a limiting plate is fixed to the lower end of the arc-shaped rod 216, and a sliding hole corresponding to the arc-shaped rod 216 is opened in the side plate 215. The arc-shaped rod 216 is fixed to the side of the baffle 211 with the rotating rod 214 as the center. By adopting the above technical solution, the limiting plate can prevent the side plate 215 from slipping off the arc-shaped rod 216, the sliding hole adapts to the arc-shaped rod 216 to ensure smooth sliding, and the setting of the center of the arc-shaped rod 216 ensures that the baffle 211 rotates smoothly, improving the reliability of preventing gas backflow.

[0026] In this embodiment, after connecting the external gas pipeline to the inlet pipe 8, the fan 3 is started. The preheated gas first enters the filter box 5, is filtered by the filter screen 7, and is then sent into the preheating chamber 22 through the second delivery pipe 9. It flows along the spiral channel 29 formed by the spiral blade 27 and the chamber wall, and is heated by the heating tube 28 and the heating wire 210. Subsequently, the gas enters the second preheating chamber 23 and the third preheating chamber 24 through the through groove 26 to continue to rise in temperature, and is finally discharged from the outlet pipe 25. The design of multiple preheating chambers and spiral channels 29 extends the gas flow time and significantly improves the preheating effect.

[0027] When the gas flows into the next preheating chamber through the channel 26, it enters the ventilation channel 213 of the baffle 211 and pushes it to rotate. The baffle 211 drives the side plate 215 to slide along the arc rod 216 through the rotating rod 214, which compresses the spring 217. After the gas stops, the spring 217 springs back to its original position, driving the rotating plate 212 to block the ventilation channel 213, effectively preventing the gas from flowing back to the previous preheating chamber.

[0028] Example 2 The difference between this embodiment and embodiment 1 is that the cleaning component 6 includes a fixed box 62. The fixed box 62 is fixed to the upper side of one end of the filter box 5. A motor 64 is installed at one end of the fixed box 62. A screw 65 is driven to the output end of the motor 64. A sliding plate 66 is threaded to one side of the surface of the screw 65. A movable seat 63 is provided inside the filter box 5 at a position corresponding to the filter screen 7. A cleaning brush 61 is installed at the lower end of the movable seat 63. The movable seat 63 and the sliding plate 66 are connected by a connecting rod 67. By adopting the above technical solution, the motor 64 is turned on to drive the screw 65 to rotate, which drives the sliding plate 66 to move inside the fixed box 62. The movable seat 63 is pushed to move horizontally through the connecting rod 67. The cleaning brush 61 at the lower end of the movable seat 63 simultaneously cleans the upper end of the filter screen 7 automatically, preventing impurities from accumulating and clogging the filter screen 7, and ensuring filtration and ventilation efficiency.

[0029] Specifically, the cleaning component 6 also includes a chip discharge port 68. A chip discharge port 68 is provided at one end of the filter box 5 corresponding to the position of the filter screen 7. A sealing plate 69 is fixed at one end of the filter box 5 corresponding to the position of the chip discharge port 68 by bolts. The lower end of the chip discharge port 68 is flush with the upper end of the filter screen 7. By adopting the above technical solution, when cleaning, the fixing bolts of the sealing plate 69 are unscrewed, and the waste generated during cleaning can slide along the filter screen 7 and be discharged through the chip discharge port 68.

[0030] Specifically, the cleaning component 6 also includes a collection box 610. The collection box 610 is provided at the upper end of the base 1 at the position corresponding to the chip discharge port 68. The upper end of the base 1 has a groove 611 corresponding to the collection box 610. An inclined bucket 612 is fixedly connected to one end of the base 1 at the position corresponding to the chip discharge port 68. By adopting the above technical solution, the collection box 610 is placed in the groove 611 of the base 1 for positioning. Waste chips can be centrally guided into the collection box 610, avoiding random discharge and pollution of the processing environment.

[0031] Specifically, the lower end of the cleaning brush 61 is tightly fitted to the upper end of the filter screen 7, and the base 1 has sliding holes on both sides corresponding to the connecting rod 67. The side of the connecting rod 67 is tightly fitted to the inner wall of the sliding hole. By adopting the above technical solution, the cleaning brush 61 and the filter screen 7 are tightly fitted to ensure thorough cleaning. The sliding hole and the connecting rod 67 are tightly fitted and limited to ensure stable movement during cleaning, avoid deviation, and improve the cleaning effect of the filter screen 7 and the reliability of the device operation.

[0032] Specifically, handles are fixed to one end of the sealing plate 69 and the upper sides of both ends of the collection box 610. After the lower end of the collection box 610 is placed into the groove 611, the side of the collection box 610 is tightly fitted with the inner wall of the groove 611. By adopting the above technical solution, the handles facilitate the opening and closing of the sealing plate 69 and the placement and removal of the collection box 610. The collection box 610 is tightly fitted with the groove 611 to ensure that the waste is collected without leakage, thereby improving the convenience of cleaning operations and the cleanliness of the environment.

[0033] In this embodiment, when the motor 64 is turned on, the screw 65 is driven to rotate, which drives the slide plate 66 to move in the fixed box 62. The moving seat 63 is pushed to move horizontally through the connecting rod 67. The cleaning brush 61 at the lower end of the slide plate 63 automatically cleans the upper end of the filter screen 7 at the same time, preventing impurities from accumulating and clogging the filter screen 7, and ensuring filtration and ventilation efficiency.

[0034] When cleaning, unscrew the fixing bolts of the sealing plate 69. The waste generated during cleaning can slide along the filter screen 7 and be discharged through the chip discharge port 68. Place the collection box 610 into the groove 611 of the base 1 for positioning. The waste can be concentrated and guided into the collection box 610 to avoid random discharge and pollution of the processing environment. The design of the sealing plate 69 also facilitates the smooth discharge of waste.

[0035] The working principle and usage process of this invention are as follows: First, install the device in a suitable position, connect the external gas pipeline to the inlet pipe 8, and start the fan 3. After the preheated gas enters the filter box 5, it is filtered by the filter screen 7 and then sent into the preheating chamber 22 through the second delivery pipe 9. It flows along the spiral channel 29 formed by the spiral blade 27 and the chamber wall, and is heated by the heating pipe 28 and the heating wire 210. Then, the gas enters the second preheating chamber 23 and the third preheating chamber 24 through the through groove 26 in sequence to continue to rise in temperature, and finally is discharged from the outlet pipe 25. The design of multiple preheating chambers and spiral channels 29 extends the gas flow time and significantly improves the preheating effect.

[0036] When the gas flows into the next preheating chamber through the channel 26, it enters the ventilation channel 213 of the baffle 211 and pushes it to rotate. The baffle 211 drives the side plate 215 to slide along the arc rod 216 through the rotating rod 214, which compresses the spring 217. After the gas stops, the spring 217 springs back to its original position, driving the rotating plate 212 to block the ventilation channel 213, effectively preventing the gas from flowing back to the previous preheating chamber.

[0037] When the motor 64 is turned on, the screw 65 is driven to rotate, which causes the slide plate 66 to move within the fixed box 62. The moving seat 63 is pushed to move horizontally through the connecting rod 67. Simultaneously, the cleaning brush 61 at the lower end automatically cleans the upper end of the filter screen 7 to prevent impurities from accumulating and clogging the filter screen 7, thus ensuring filtration and ventilation efficiency.

[0038] When cleaning, unscrew the fixing bolts of the sealing plate 69. The waste generated during cleaning can slide along the filter screen 7 and be discharged through the chip discharge port 68. Place the collection box 610 into the groove 611 of the base 1 for positioning. The waste can be concentrated and guided into the collection box 610 to avoid random discharge and pollution of the processing environment. The design of the sealing plate 69 also facilitates the smooth discharge of waste.

[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A gas preheating device for a chemical vapor deposition furnace, comprising a base (1), characterized in that: A filter box (5) is fixed on one side of the upper end of the base (1). An air inlet pipe (8) is fixed on the upper end of the filter box (5). A fan (3) is provided on one side of the filter box (5). The fan (3) and the filter box (5) are connected by a first conveying pipe (4). A second conveying pipe (9) is installed at the end of the fan (3) away from the first conveying pipe (4). A filter screen (7) is fixed inside the filter box (5). A cleaning component (6) is installed inside the filter box (5) at the position corresponding to the filter screen (7). A preheating component (2) is provided at the end of the second conveying pipe (9) away from the fan (3). The preheating assembly (2) includes a preheating box (21). The preheating box (21) is located at the end of the conveying pipe (9) away from the fan (3). A preheating chamber (22) is located on one side inside the preheating box (21), and a preheating chamber (24) is located on the other side of the preheating chamber (22). A preheating chamber (23) is located between the preheating chamber (24) and the preheating chamber (22). The upper side between the preheating chamber (23) and the preheating chamber (22), and the upper side between the preheating chamber (23) and the preheating chamber (22), and the upper side between the preheating chamber (23) and the preheating chamber (3) (24) are provided with through grooves (26) on the lower side. Heating tubes (28) are fixed in the first preheating chamber (22), the second preheating chamber (23) and the third preheating chamber (24). Spiral blades (27) are fixed on the surface of the heating tubes (28). A spiral channel (29) is formed between the spiral blades (27) and the inner wall of the preheating chamber. Heating wires (210) are fixed on the spiral blades (27). An air outlet pipe (25) is fixed on the upper side of the preheating box (21) away from the second conveying pipe (9).

2. The gas preheating device for a chemical vapor deposition furnace according to claim 1, characterized in that: The preheating component (2) also includes a baffle (211). The baffle (211) is fixed in the through groove (26). A plurality of ventilation grooves (213) are opened in the baffle (211). A rotating plate (212) is rotatably connected to one side of the baffle (211) at the position corresponding to the ventilation groove (213). The rotating plate (212) is connected to the preheating box (21) through a rotating rod (214). An arc-shaped rod (216) is fixed at one end of the baffle (211) at the position corresponding to the rotating rod (214). A side plate (215) is fixed at one end of the rotating rod (214) at the position corresponding to the arc-shaped rod (216). A spring (217) is sleeved on the outer side of the arc-shaped rod (216) on the side plate (215).

3. The gas preheating device for a chemical vapor deposition furnace according to claim 1, characterized in that: A rubber sealing gasket is provided between the spiral blade (27) and the inner wall of the preheating chamber, and a connecting flange is fixed to the upper end of the air inlet pipe (8).

4. The gas preheating device for a chemical vapor deposition furnace according to claim 1, characterized in that: A PLC controller is configured on the lower front side of the preheating box (21). The heating tube (28) and the heating wire (210) are electrically connected to the PLC controller. The PLC controller can be used to accurately start and stop the heating tube (28) and the heating wire (210) and adjust their power.

5. A gas preheating device for a chemical vapor deposition furnace according to claim 2, characterized in that: The lower end of the arc-shaped rod (216) is fixed with a limiting plate, and a sliding hole corresponding to the arc-shaped rod (216) is opened in the side plate (215). The arc-shaped rod (216) is fixed to the side of the baffle (211) with the rotating rod (214) as the center.

6. The gas preheating device for a chemical vapor deposition furnace according to claim 1, characterized in that: The cleaning assembly (6) includes a fixed box (62). The fixed box (62) is fixed on the upper side of one end of the filter box (5). A motor (64) is installed at one end of the fixed box (62). A screw (65) is connected to the output end of the motor (64). A sliding plate (66) is threaded on one side of the surface of the screw (65). A movable seat (63) is provided inside the filter box (5) at the position corresponding to the filter screen (7). A cleaning brush (61) is installed at the lower end of the movable seat (63). The movable seat (63) and the sliding plate (66) are connected by a connecting rod (67).

7. A gas preheating device for a chemical vapor deposition furnace according to claim 6, characterized in that: The cleaning component (6) also includes a chip discharge port (68). A chip discharge port (68) is provided at one end of the filter box (5) at a position corresponding to the filter screen (7). A sealing plate (69) is fixed at one end of the filter box (5) at a position corresponding to the chip discharge port (68) by bolts. The lower end of the chip discharge port (68) is flush with the upper end of the filter screen (7).

8. The gas preheating device for a chemical vapor deposition furnace according to claim 7, characterized in that: The cleaning component (6) also includes a collection box (610). The collection box (610) is provided at the position corresponding to the chip discharge port (68) on the upper end of the base (1). A groove (611) corresponding to the collection box (610) is opened at the upper end of the base (1). An inclined bucket (612) is fixedly connected at the position corresponding to the chip discharge port (68) on one end of the base (1).

9. A gas preheating device for a chemical vapor deposition furnace according to claim 6, characterized in that: The lower end of the cleaning brush (61) is tightly fitted to the upper end of the filter screen (7), and the base (1) has sliding holes on both sides corresponding to the connecting rod (67), and the side of the connecting rod (67) is tightly fitted to the inner wall of the sliding hole.

10. A gas preheating device for a chemical vapor deposition furnace according to claim 7, characterized in that: Handles are fixed to one end of the sealing plate (69) and the upper sides of both ends of the collection box (610). After the lower end of the collection box (610) is placed into the groove (611), the side of the collection box (610) fits tightly against the inner wall of the groove (611).

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