Flammable and explosive gas using system and method

Abstract

The embodiment of the invention provides a flammable and explosive gas using system and method. The system comprises a gas supply module, a gas using module, a pumping and discharging treatment module and a control module. The gas utilization module is connected with the gas supply module and the pumping and discharging treatment module, and the gas supply module is used for providing flammable and explosive gas for the gas utilization module; the reaction cavity of the gas using module is in a negative pressure environment; the pumping and discharging treatment module body comprises pumping and discharging equipment, and the pumping and discharging equipment is used for pumping and discharging gas from the reaction cavity; an oxygen concentration detection device is arranged at a gas outlet of the pumping and discharging equipment, and the oxygen concentration detection device indirectly detects the concentration of oxygen in the reaction cavity by detecting the concentration of oxygen at the gas outlet of the pumping and discharging equipment; and the control module is used for judging whether the oxygen concentration is within the safe use range of the flammable and explosive gas or not according to the oxygen concentration, and controlling the gas supply module to stop supplying the flammable and explosive gas to the gas consumption module if the oxygen concentration is detected not to be within the safe use range of the flammable and explosive gas. The invention provides a safe use scheme of flammable and explosive gas in a negative pressure environment.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more particularly to a system and method for using flammable and explosive gases. Background Technology

[0002] Flammable and explosive gases are required in semiconductor manufacturing processes, including hydrogen, methane, and nitric oxide. For example, hydrogen can be introduced during semiconductor material growth to reduce impurities and defects. However, hydrogen poses a high risk due to its small molecular weight, high permeability, low ignition energy, and hydrogen embrittlement. The risk increases with the increase in hydrogen flow rate.

[0003] Safety in the use of flammable and explosive gases is the biggest concern in the process of using flammable and explosive gases. In some application scenarios, flammable and explosive gases may be used in a negative pressure environment. Currently, there is no risk detection solution for flammable and explosive gases used in negative pressure environments. Therefore, how to detect risks in negative pressure environments is an urgent problem to be solved. Summary of the Invention

[0004] This disclosure provides a system and method for using flammable and explosive gases.

[0005] In a first aspect, embodiments of this disclosure provide a flammable and explosive gas utilization system, comprising: a gas supply module, a gas consumption module, an extraction and treatment module, and a control module; the gas consumption module is connected to both the gas supply module and the extraction and treatment module, the gas supply module being used to supply flammable and explosive gas to the gas consumption module; the flammable and explosive gas is a flammable and explosive gas; the flammable and explosive gas reacts in the reaction chamber of the gas consumption module; wherein, the reaction chamber is under negative pressure when gas is supplied; the extraction and treatment module includes an extraction device, the extraction device being used to extract gas from the reaction chamber; an oxygen concentration detection device is provided at the outlet of the extraction device, the oxygen concentration detection device indirectly detecting the oxygen concentration in the reaction chamber by detecting the oxygen concentration at the outlet of the extraction device; the control module is used to determine whether the oxygen concentration is within the safe operating range of the flammable and explosive gas based on the oxygen concentration, and if the detected oxygen concentration is not within the safe operating range of the flammable and explosive gas, control the gas supply module to stop supplying flammable and explosive gas to the gas consumption module.

[0006] According to the above scheme, by connecting the reaction chamber, which is under negative pressure, to an extraction device, the extraction device extracts the gas from the reaction chamber. An oxygen concentration detection device is installed at the outlet of the extraction device. The gas output from the outlet of the extraction device is pressurized to a positive pressure environment. Therefore, the oxygen concentration in the negative pressure environment can be detected under positive pressure to identify the safety risks of using flammable and explosive gases in the reaction chamber under negative pressure. The control module then cuts off the supply of flammable and explosive gases when a safety risk is detected. The above-mentioned flammable and explosive gas usage system provides a safety risk detection and control scheme for the use of flammable and explosive gases in a negative pressure environment, which can reduce the safety risks during the use of flammable and explosive gases.

[0007] In conjunction with the first aspect, in some embodiments of the flammable and explosive gas utilization system provided in the first aspect, the gas supply module includes a first gas supply pipe and a plurality of second gas supply pipes seamlessly connected to the first gas supply pipe. The plurality of second gas supply pipes are used to divert the flammable and explosive gas transported by the first gas supply pipe. The outlets of the plurality of second gas supply pipes are respectively connected to the inlets of the reaction chamber for supplying flammable and explosive gas to the reaction chamber. The gas supply module includes a relatively sealed first cabinet and a second cabinet, at least a portion of the first gas supply pipe is located in the first cabinet, and at least a portion of each of the second gas supply pipes is located in the second cabinet. A negative pressure extraction device is connected to the first cabinet and the second cabinet for extracting gas from the first cabinet and the second cabinet to create a negative pressure inside the first cabinet and the second cabinet. The first cabinet and the second cabinet are explosion-proof cabinets. Flammable and explosive gas detection sensors are respectively provided on the top of the first cabinet and the second cabinet.

[0008] According to the above scheme, the gas supply module uses explosion-proof cabinets, specifically the first and second cabinets, to house the first and second pipes. A negative pressure extraction device is used to extract the gas from the first and second cabinets, creating a negative pressure environment inside them. Therefore, in the event of a flammable or explosive gas leak in the first and second pipes, the flammable or explosive gas inside the first and second cabinets will not spill into the external environment. Furthermore, by separately housing portions of the first and second pipes within the first and second cabinets, respectively, the volume of the leaking pipe can be reduced in the event of a flammable or explosive gas leak, maximizing the safety of the flammable or explosive gas system.

[0009] In conjunction with the first aspect, in some embodiments of the flammable and explosive gas usage system provided in the first aspect, the gas supply module further includes a flammable and explosive gas inlet main valve, a pressure regulating device, and a pipeline vacuum monitoring and control device connected to the first pipeline; the main inlet valve, pressure regulating device, and pipeline vacuum monitoring and control device are located in the first cabinet, wherein the flammable and explosive gas inlet main valve is used to control the on / off flow of flammable and explosive gas in the first pipeline; the pressure regulating device is used to detect and regulate the pressure of the flammable and explosive gas passing through the pressure regulating device to adapt to the pressure environment of the first pipeline and the reaction chamber; the pipeline vacuum monitoring and control device is used to detect the vacuum degree in the pipeline when no flammable and explosive gas is introduced, and to determine whether the vacuum degree meets the conditions for the introduction of flammable and explosive gas.

[0010] According to the above scheme, by installing a flammable and explosive gas inlet main valve, a pressure regulating device, and a pipeline vacuum monitoring device in the first pipeline, the vacuum level of the first pipeline when no flammable and explosive gas is introduced can be detected by the pipeline vacuum monitoring device. When the vacuum level meets the requirements, the main inlet valve is opened to supply flammable and explosive gas, and the pressure regulating device is used to adjust the gas pressure in the pipeline to match the pressure environment in the second pipeline and the reaction chamber, thereby controlling the safe use of flammable and explosive gas. In addition, the aforementioned main inlet valve, pressure regulating device, and pipeline vacuum monitoring device are installed in the first cabinet, so if there is a flammable and explosive gas leak at the connection between the first pipeline and these components, it will not leak into the external environment.

[0011] In conjunction with the first aspect, in some embodiments of the flammable and explosive gas usage system provided in the first aspect, the gas supply module further includes a gas mass flow controller and a normally closed valve disposed in each of the second gas supply pipelines; wherein, the gas mass flow controller is used to control the gas flow rate of the second gas supply pipeline, and the normally closed valve is used to disconnect the flammable and explosive gas supply of the second gas supply pipeline; the gas mass flow controller and the normally closed valve are located in the second cabinet.

[0012] According to the above scheme, by installing a gas mass flow controller and a normally closed valve in the second pipeline, it is possible to differentiate and control flammable and explosive gases in different second pipelines to meet process requirements. Furthermore, the gas mass flow controller 1017 and the normally closed valve are located inside the second cabinet, which prevents flammable and explosive gases from leaking into the external environment when leaks occur at the connection points between these components and the second pipeline, thus improving the safety of using flammable and explosive gases.

[0013] In conjunction with the first aspect, in some embodiments of the flammable and explosive gas utilization system provided in the first aspect, the reaction chamber includes multiple air inlets, and the multiple air inlets of the reaction chamber are connected one-to-one with the air outlets of the multiple second pipes; the reaction chamber includes multiple regions, and each region corresponds to at least one air inlet of the reaction chamber; the air inlets of the reaction chambers corresponding to the multiple regions are not reused.

[0014] According to the above scheme, the gas mass flow controllers and normally closed valves installed in each second pipeline can meet the flammable and explosive gas flow requirements of different parts of the same reaction chamber, and can also be adapted to the flammable and explosive gas flow requirements of different reaction chambers.

[0015] In conjunction with the first aspect, in some embodiments of the flammable and explosive gas utilization system provided in the first aspect, the extraction and treatment module further includes a treatment device and an exhaust pipe connecting the extraction device and the treatment device, wherein the flammable and explosive gas in the exhaust pipe is in a positive pressure environment; the treatment device is connected to the extraction device and is used to perform safe treatment on the flammable and explosive gas discharged by the extraction device; the extraction device, the treatment device, and the exhaust pipe are located in a relatively sealed third cabinet, wherein the gas in the third cabinet is extracted by a negative pressure extraction device to create a negative pressure environment inside the third cabinet; a flammable and explosive gas detection sensor is provided on the top of the third cabinet.

[0016] According to the above scheme, the extraction and discharge module can realize gas extraction, oxygen concentration monitoring, flammable and explosive gas treatment, and safe discharge. Before the flammable and explosive gas is introduced, the gas in the reaction chamber is subjected to the extraction and discharge equipment to establish a vacuum environment inside the reaction chamber.

[0017] Secondly, embodiments of this disclosure provide a method for using flammable and explosive gas. The method includes: a flammable and explosive gas safety system designed as described in the first aspect and various possible designs of the first aspect, the flammable and explosive gas safety system including a gas supply module, a gas consumption module, and an extraction and processing module; the gas consumption module includes a reaction chamber under negative pressure, and the extraction and processing module includes an extraction device and an oxygen concentration detection device; the method includes: when the reaction chamber is in operation with flammable and explosive gas introduced, using the extraction device to extract the reacted gas from the reaction chamber; obtaining the oxygen concentration in the gas from the oxygen concentration detection device, and determining whether it is within the safe operating range of the flammable and explosive gas based on the oxygen concentration; wherein the oxygen concentration detection device detects the oxygen concentration in the gas discharged by the extraction device, and the oxygen concentration in the gas discharged by the extraction device is considered equivalent to the oxygen concentration in the reaction chamber; in response to detecting that the oxygen concentration exceeds the safe operating range, controlling the gas supply module to stop supplying flammable and explosive gas to the gas consumption module.

[0018] According to the above scheme, the oxygen concentration in the reaction chamber is indirectly detected by using an oxygen concentration detection device installed at the exhaust port of the extraction equipment. The reaction chamber is in a negative pressure environment, which provides a safety risk detection scheme for the use of flammable and explosive gases in a negative pressure environment, and can reduce the safety risks during the use of flammable and explosive gases.

[0019] In conjunction with the second aspect, in some embodiments of the flammable and explosive gas usage method provided in the second aspect, the gas supply module includes a first pipe disposed in a first cabinet and a plurality of second pipes disposed in a second cabinet, wherein the flammable and explosive gas in the first pipe and the second pipe is in a positive pressure environment; the method further includes: according to the received gas supply command, detecting whether the negative pressure extraction state for negative pressure extraction of the first cabinet and the second cabinet meets a first preset condition; in response to the detection result being yes, controlling the operation of the processing equipment; wherein the processing equipment is connected to the extraction equipment through an exhaust pipe; when the processing equipment is operating normally, controlling the extraction equipment to operate and controlling the extraction main valve to open, so that the extraction equipment is connected to the gas channel of the reaction chamber; in response to the extraction equipment being in normal operating state, controlling the normally closed valve in the second pipe to open, so that the second pipe is connected to the reaction chamber; when the pressure in the reaction chamber, the pressure in the second pipe, and the oxygen concentration detected by the oxygen concentration detection device are detected to meet the preset gas supply conditions, controlling the opening of the main inlet valve in the first pipe to supply flammable and explosive gas from the first pipe to the second pipe, so that the reaction chamber enters the working state.

[0020] According to the above scheme, upon receiving a gas supply command, the negative pressure extraction status of the first and second cabinets is first checked to ensure that flammable and explosive gases in the first and second pipelines do not leak into the external environment. After confirming that the negative pressure extraction status of the first and second cabinets is normal, the processing equipment can be started to ensure the processing of flammable and explosive gases. After the processing equipment is running normally, the operation of the extraction equipment is controlled to ensure that flammable and explosive gases can be extracted to the processing equipment for processing once they are introduced into the reaction chamber. After the extraction equipment is running normally, the valve in the second pipeline is opened. Then, after detecting that the pressure in the first and second pipelines and reading the oxygen concentration in the reaction chamber from the oxygen concentration detection device meet the preset gas supply conditions, the main inlet valve is opened. Thus, when the main inlet valve is opened, the first pipeline, the second pipeline, the first cabinet, the second cabinet, the reaction chamber, the extraction equipment, and the processing equipment are all in a gas-supply state, thereby avoiding the safety risks associated with the use of flammable and explosive gases.

[0021] In conjunction with the second aspect, in some embodiments of the flammable and explosive gas usage method provided in the second aspect, the extraction device, the processing device, and the exhaust pipe are located in a third cabinet. The negative pressure extraction device extracts the gas from the first, second, and third cabinets, making the interiors of the first, second, and third cabinets negatively pressured. The method further includes: when the flammable and explosive gas usage system is in a gas supply state, if one or more of the following are detected, the main inlet valve is controlled to close, stopping the supply of flammable and explosive gas: the negative pressure extraction state of one or more of the first, second, and third cabinets is abnormal; or the pressure inside the reaction chamber does not meet the preset gas supply conditions.

[0022] According to the above scheme, in the event of an abnormal negative pressure extraction, the aforementioned executing entity controls the main inlet valve in the first pipeline to close, thereby stopping the supply of flammable and explosive gases. This ensures the safety of the flammable and explosive gas usage system and the external environment. In conjunction with the second aspect, in some embodiments of the flammable and explosive gas usage method provided in the second aspect, the method further includes: in response to detecting an alarm signal from one or more corresponding flammable and explosive gas detection sensors in the first cabinet, the second cabinet, and the third cabinet, controlling the main inlet valve in the first pipeline to close to stop the supply of flammable and explosive gases, and controlling the normally closed valves in each of the second pipelines to close.

[0023] According to the above scheme, by closing all flammable and explosive gas supply valves after detecting the alarm signal of one or more corresponding flammable and explosive gas detection sensors in the first cabinet, the second cabinet, and the third cabinet, the continued leakage of flammable and explosive gases can be prevented, and the safety risk can be reduced.

[0024] The flammable and explosive gas usage system and method disclosed herein provide flammable and explosive gases to a gas-using module in a negative pressure environment. The flammable and explosive gases react within the reaction chamber of the gas-using module, and the oxygen concentration extracted from the reaction chamber is detected at the outlet of the extraction device. This indirectly detects the oxygen concentration within the reaction chamber, and the safety risk of the gas-using module is assessed based on the detected oxygen concentration. This provides a safety risk detection scheme for the use of flammable and explosive gases in a negative pressure environment, which can reduce the safety risks during the use of flammable and explosive gases. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the flammable and explosive gas usage system provided in this disclosure. Figure 1 ;

[0027] Figure 2 This is a schematic diagram of the structure of the flammable and explosive gas usage system provided in this disclosure. Figure 2 ;

[0028] Figure 3 This disclosure provides an illustrative procedure for the use of flammable and explosive gases. Figure 1 ;

[0029] Figure 4 This disclosure provides an illustrative procedure for the use of flammable and explosive gases. Figure 2 . Detailed Implementation

[0030] The technical solutions of the embodiments of this disclosure will now be described with reference to the accompanying drawings.

[0031] In scenarios involving the use of flammable and explosive gases, both positive-pressure and negative-pressure systems pose a risk of fire or even explosion. Therefore, it is essential to ensure the safe use of flammable and explosive gases.

[0032] Taking hydrogen as an example, in semiconductor manufacturing processes, hydrogen usage systems can include positive-pressure hydrogen systems and negative-pressure hydrogen systems. A positive-pressure hydrogen system refers to a system where the internal pressure is greater than the external pressure. Under positive pressure, hydrogen tends to move from high-pressure areas to low-pressure areas to reduce the pressure difference. In a positive-pressure hydrogen system, the flow and use of the gas are achieved by pressurizing and injecting hydrogen into pipelines. In semiconductor manufacturing processes, positive-pressure hydrogen systems are typically used for hydrogen injection and control.

[0033] In a positive-pressure hydrogen system, hydrogen can leak into the environment if the pipeline fails to maintain a tight seal or ruptures. The presence of a leak can be detected by monitoring the hydrogen concentration in the environment, allowing for timely safety response actions. In positive-pressure hydrogen systems, hydrogen leak sensors are typically placed on the ceiling of the space surrounding the equipment for monitoring; for example, a hydrogen leak sensor can be installed on the ceiling of the room where the hydrogen-using equipment is located. The sensor's alarm signal is linked to the hydrogen supply valve, which shuts off the valve immediately upon detecting a leak and alerts personnel to evacuate.

[0034] A negative pressure hydrogen system refers to a system used in semiconductor manufacturing where a negative pressure environment below atmospheric pressure is created inside the system to control the flow of hydrogen and prevent leakage. Such a system typically includes components such as a negative pressure container, negative pressure piping, and negative pressure control devices. Hydrogen systems operating under negative pressure require sealing. If the seal fails or the piping ruptures, there is a risk of oxygen leaking into the piping. If the oxygen-to-hydrogen mixture ratio is within the explosive range after oxygen leaks into the piping, the piping will risk implosion. In this case, because there is no hydrogen leakage, the hydrogen leak sensors in the environment cannot detect the oxygen leak into the piping and therefore cannot issue an alarm. Furthermore, the safety risks of hydrogen systems increase under negative pressure.

[0035] This disclosure discloses a hydrogen utilization system with positive and negative pressure zones, and formulates different safety strategies for flammable and explosive gases for different zones. By detecting the oxygen concentration in the negative pressure zone after the reaction gas is extracted, the mixing ratio of flammable and explosive gases with oxygen is controlled to ensure that the use of flammable and explosive gases is within the safe range, thus ensuring the safety of flammable and explosive gas use during the start-up, operation and shutdown of the flammable and explosive gas utilization system.

[0036] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the structure of the flammable and explosive gas safety system provided in this disclosure. Figure 1 The flammable and explosive gas safety system includes a gas supply module 101, a gas consumption module 102, an extraction and treatment module 103, and a control module (not shown in the figure).

[0037] The gas consumption module 102 is connected to the gas supply module 101 and the extraction and treatment module 103 respectively. The gas supply module 101 is used to supply flammable and explosive gas to the gas consumption module 102. The flammable and explosive gas reacts in the reaction chamber 1021 of the gas consumption module. The reaction chamber 1021 is in a negative pressure environment when it is working.

[0038] The extraction and discharge processing module 103 includes an extraction and discharge device 1031, which is used to extract gas from the reaction chamber 1021. An oxygen concentration detection device 1032 is installed at the outlet of the extraction and discharge device 1031. The oxygen concentration detection device 1032 indirectly detects the oxygen concentration in the reaction chamber 1021 by detecting the oxygen concentration at the outlet of the extraction and discharge device 1031.

[0039] The aforementioned flammable and explosive gases may include, but are not limited to, hydrogen, carbon monoxide, and methane. The aforementioned reaction chamber 1021 is a closed chamber.

[0040] Because the reaction chamber 1021 in the gas module 102 is under negative pressure, oxygen in the environment may leak into the reaction chamber 1021 (e.g., in the event of a seal failure or pipe rupture). Since flammable and explosive gases are introduced into the reaction chamber 1021 during operation, and the mixing ratio of these gases with oxygen may be within an explosive range, an explosion may occur inside the reaction chamber 1021. Therefore, there is a risk associated with the use of flammable and explosive gases.

[0041] In this scheme, the extraction device 1031 is used to extract the gas in the reaction chamber 1021 before the flammable and explosive gas is introduced, ensuring that the reaction chamber 1021 is in a vacuum environment. That is, the gas in the reaction chamber 1021 is extracted before the flammable and explosive gas is introduced. Therefore, after the flammable and explosive gas is introduced, and without external oxygen leakage into the reaction chamber 1021, the mixing ratio of oxygen and flammable and explosive gas in the reaction chamber 1021 will be within a safe range.

[0042] In addition, to monitor the oxygen concentration in the reaction chamber 1021 and prevent an explosion, an oxygen detection device 1032 is installed at the outlet of the extraction device 1031. As one implementation, the inlet of the extraction device 1031 can be welded to the outlet of the reaction chamber 1021. The extraction device 1031 can pressurize the gas input into it. The outlet of the extraction device 1031 outputs the pressurized gas. The negative pressure extraction device can pressurize the gas extracted from the reaction chamber. After pressurization, all gases can be considered to be pressurized proportionally. Therefore, the oxygen concentration detected at the outlet of the extraction device 1031 can be considered as the oxygen concentration in the reaction chamber 1021. Before or after flammable and explosive gas is introduced into the reaction chamber 1021, the oxygen concentration in the reaction chamber 1021 can be monitored in real time to ensure that abnormal oxygen concentration in the reaction chamber 1021 can be detected in a timely manner so as to deal with the safety risks of flammable and explosive gas that may exist in the reaction chamber 1021 in a timely manner.

[0043] In some embodiments, the pressure inside the reaction chamber 1021 is less than 4000 Pa. The pressure inside the reaction chamber 1021 can be detected by the chamber vacuum detection device 1022 (the pressure here can reflect the vacuum level in the reaction chamber).

[0044] Within this pressure range, if a pipeline seal fails or is damaged, flammable and explosive gases may mix with air. If the pressure inside reaction chamber 1021 is less than 4000 Pa, and a pipeline seal failure or damage causes hydrogen to mix with air, under these gas conditions, the concentration of flammable and explosive gases (hydrogen concentration <1% at this pressure) can be guaranteed to be below the lower explosive limit (LEL) of flammable and explosive gases (e.g., the LLE of hydrogen is 4%). This allows for the safe release of hydrogen from reaction chamber 1021, reducing the safety risks within the reaction chamber.

[0045] In some embodiments, the oxygen concentration within the reaction chamber 1021 is less than 1%. An oxygen concentration alarm can be triggered when the oxygen concentration within the reaction chamber 1021 is greater than or equal to 1%. In one example, the oxygen concentration alarm can be triggered by the aforementioned pipeline oxygen detection device 1032. In another example, the oxygen concentration detected by the pipeline oxygen detection device 1032 can be transmitted to the control module, which triggers an oxygen concentration alarm when it detects that the received oxygen concentration is greater than or equal to 1%. The control module can be communicatively connected to the aforementioned gas supply module, gas consumption module, and extraction / exhaust processing module, respectively.

[0046] In this embodiment, the control module is used to determine whether the oxygen concentration is within the safe operating range for flammable and explosive gases. If the detected oxygen concentration is not within the safe operating range for flammable and explosive gases, the control module stops supplying flammable and explosive gases to the gas-consuming module. This ensures that when the oxygen concentration in the negative pressure environment exceeds the safe operating range for flammable and explosive gases, the supply of flammable and explosive gases to the reaction chamber will cease, thereby reducing safety risks.

[0047] The flammable and explosive gas utilization system provided in this embodiment connects a reaction chamber under negative pressure to an extraction device. The extraction device extracts the gas from the reaction chamber. An oxygen concentration detection device is installed at the outlet of the extraction device. The gas output from the outlet of the extraction device is pressurized to a positive pressure environment. Therefore, the oxygen concentration in the negative pressure environment can be detected under positive pressure to identify the safety risks of using flammable and explosive gases in the negative pressure reaction chamber. The control module then cuts off the supply of flammable and explosive gases when a safety risk is detected. The above-described flammable and explosive gas utilization system provides a safety risk detection and control scheme for the use of flammable and explosive gases in a negative pressure environment, which can reduce the safety risks during the use of flammable and explosive gases.

[0048] Please refer to Figure 2 , Figure 2 This is a schematic diagram of the structure of the flammable and explosive gas usage system provided in this disclosure. Figure 2 .and Figure 1 Compared to the illustrated embodiment, this embodiment includes the following: Figure 1 The same gas consumption module 102 and extraction / exhaust processing module 103. (And...) Figure 1The difference is that the gas supply module 101 includes a first gas supply pipe 1011 and a plurality of second gas supply pipes 1010 seamlessly connected to the first gas supply pipe 1011. The plurality of second gas supply pipes 1010 are used to divert the flammable and explosive gas transported by the first gas supply pipe 1011.

[0049] The outlets of multiple second gas supply pipes 1010 are respectively connected to the inlet of the reaction chamber 1021 to supply flammable and explosive gases to the reaction chamber 1021.

[0050] The gas supply module 101 includes a relatively sealed first cabinet 1016 and a second cabinet 1019. At least a portion of the first gas supply pipe 1011 is located inside the first cabinet 1016; at least a portion of each second gas supply pipe 1010 is located inside the second cabinet 1019; wherein, a negative pressure extraction device is connected to the first cabinet 1016 and the second cabinet 1019, and is used to extract the gas in the first cabinet 1016 and the second cabinet 1019 so that the internal air pressure of the first cabinet 1016 and the second cabinet 1019 is negative.

[0051] The first cabinet 1016 and the second cabinet 1019 are explosion-proof cabinets.

[0052] The first pipe 1011 and the second pipe 1010 provide a positive pressure environment for flammable and explosive gases, preventing external gases from entering the first pipe 1011 and the second pipe 1010. In addition, while the first pipe 1011 and the second pipe 1010 provide a positive pressure environment for flammable and explosive gases, the reaction chamber 1021 is in a negative pressure environment, which allows for the smooth supply of flammable and explosive gases to the reaction chamber 1021.

[0053] The first cabinet 1016 and the second cabinet 1019 are made of carbon steel or stainless steel plates. Both cabinets are designed with mesh or strip-shaped round perforated air inlets and exhaust vents, with the remaining parts sealed. The exhaust vents and air inlets are designed diagonally to ensure there are no "dead zones" (areas where gas cannot circulate) within the cabinets.

[0054] The negative pressure extraction equipment can extract leaked flammable and explosive gases from the first cabinet 1016 and the second cabinet 1019 into a dedicated external pipeline (not the atmospheric environment). This is similar to negative pressure extraction.

[0055] Simultaneously, the gas inside the first cabinet 1016 and the second cabinet 1019 can achieve an air exchange frequency of greater than or equal to N times per minute. N is a preset value, such as 4. Negative pressure exhaust sensors can be installed on the outside of the first cabinet 1016 and the second cabinet 1019. The negative pressure exhaust status (negative pressure exhaust pressure) is detected using a sampling tube.

[0056] "Relative sealing" means that the cabinet is under negative pressure, and only the outside air can flow in at the designated air inlet, while the rest is sealed, thus ensuring that in the event of a flammable or explosive gas leak, the flammable or explosive gas leaked into the cabinet cannot escape into the external environment.

[0057] Alarm devices are respectively installed on the top of the first cabinet 1016 and the second cabinet 1019. The alarm devices can detect the concentration of flammable and explosive gases in the first cabinet 1016 and the second cabinet 1019. If the concentration of flammable and explosive gases exceeds the safety threshold, the alarm devices will sound an alarm to indicate the safety risk of using flammable and explosive gases.

[0058] The control module is also used to control the main intake valve 1012 and each normally closed valve 1018 to close based on the alarm signal received from the alarm device.

[0059] and Figure 1 Compared to the illustrated embodiment, in this embodiment, the gas supply module uses a first cabinet and a second cabinet to house the first and second pipes. A negative pressure extraction device is used to extract the gas from the first and second cabinets, creating a negative pressure environment inside them. Therefore, when flammable or explosive gases leak from the first and second pipes, the flammable or explosive gases inside the first and second cabinets will not overflow into the external environment. Furthermore, by separately housing a portion of the first pipe and a portion of the second pipe within the first and second cabinets, respectively, the volume of the leaking pipe can be reduced in the event of a flammable or explosive gas leak, maximizing the safety of the flammable or explosive gas system.

[0060] In some embodiments of this example, such as Figure 2 As shown, the gas supply module 101 also includes a main inlet valve 1012, a pressure regulating device, and a pipeline vacuum monitoring and control device 1015 connected to the first pipeline 1011; the main inlet valve 1012, the pressure regulating device, and the pipeline vacuum monitoring and control device 1015 are located in the first cabinet 1016. Among them,

[0061] The main inlet valve 1012 is used to control the flow of flammable and explosive gas in the first pipeline 1011, thereby controlling the supply of flammable and explosive gas. The main inlet valve 1012 is used to control the supply of flammable and explosive gas in the semiconductor manufacturing process and to cut off the supply of flammable and explosive gas in emergency situations (such as flammable and explosive gas leaks).

[0062] A pressure regulating device is used to detect and regulate the pressure of flammable and explosive gases passing through the pressure regulating device to adapt to the pressure environment of the first pipeline 1011 and the reaction chamber 1021.

[0063] The pipeline vacuum monitoring and control device 1015 is used to detect the vacuum level in the pipeline when no flammable or explosive gas is introduced, and to determine whether the vacuum level meets the preset gas supply conditions.

[0064] The pressure regulating device described above may include a pressure regulating valve 1014 and a pressure sensor 1013. The pressure regulating valve 1014 (e.g., a manual pressure regulating valve) is used to control the pressure at the downstream end of the pressure regulating valve to match the pressure environment of the pipeline (including the first pipeline 1011 and the second pipeline 1010) and the reaction chamber 1021.

[0065] Pressure sensor 1013, used in conjunction with pressure regulating valve 1014, is used to detect the pressure in the first pipeline 1011 in real time.

[0066] The pipeline vacuum monitoring and control device 1015 includes a pipeline vacuum gauge or a vacuum pressure switch.

[0067] The pipeline vacuum gauge is used to monitor the vacuum level in the pipeline when flammable and explosive gases are not supplied, and to determine whether the conditions for opening the main inlet valve 1012 have been met. If the seal of the first pipeline 1011 interface fails, the vacuum level in the first pipeline 1011 cannot reach the set value.

[0068] Vacuum pressure switch: It has the same function as the pipeline vacuum gauge, and the two can be used interchangeably.

[0069] The first pipe 1011, the main air inlet valve 1012, the pressure regulating device, and the pipe vacuum monitoring and control device 1015 located in the first cabinet 1016 constitute the air supply end area.

[0070] In these embodiments, by installing a main inlet valve, a pressure regulating device, and a pipeline vacuum monitoring device in the first pipeline, the vacuum level of the first pipeline when no flammable or explosive gas is introduced can be detected by the pipeline vacuum monitoring device. When the vacuum level meets the requirements, the main inlet valve is opened to supply flammable or explosive gas, and the pressure regulating device is used to adjust the gas pressure in the first pipeline to match the pressure environment in the second pipeline and the reaction chamber, thereby controlling the safe use of flammable and explosive gas. Furthermore, since the aforementioned main inlet valve, pressure regulating device, and pipeline vacuum monitoring device are located within the first cabinet, any leakage of flammable or explosive gas at the connection between the first pipeline and these components will not leak into the external environment.

[0071] In some embodiments, the gas supply module 101 further includes a gas mass flow controller 1017 and a normally closed valve 1018 disposed in each of the second gas supply pipelines 1010; wherein...

[0072] The gas flow quality controller 1017 is used to control the gas flow of the second gas supply pipeline 1010, and the normally closed valve 1018 is used to disconnect the supply of flammable and explosive gas to the second gas supply pipeline 1010.

[0073] The gas mass flow controller 1017 and the normally closed valve 1018 are located in the second cabinet 1019.

[0074] In these embodiments, the second cabinet 1019, together with the second pipe 1010, the gas mass flow controller 1017, and the normally closed valve 1018 disposed within the second cabinet 1019, constitutes a flammable and explosive gas diversion control area. In this area, the flammable and explosive gas in the second pipe 1010 is under positive pressure, while the internal space of the second cabinet outside the second pipe 1010 is under negative pressure.

[0075] The gas flow quality controller 1017 in each second gas supply pipeline 1010 can accurately control the flow rate of flammable and explosive gases in the second gas supply pipeline 1010.

[0076] For each second gas supply pipeline 1010, a normally closed valve 1018 can be installed after the gas flow quality controller 1017 of the second gas supply pipeline 1010. When a second gas supply pipeline 1010 is not in use or needs to be closed, the gas supply of the branch is cut off through the normally closed valve in the second gas supply pipeline 1010.

[0077] In these embodiments, by installing a gas mass flow controller and a normally closed valve in the second pipeline, it is possible to differentiate and control flammable and explosive gases in different second pipelines to meet process requirements. Furthermore, the gas mass flow controller and normally closed valve are housed within the second cabinet, preventing flammable and explosive gases from leaking into the external environment at the connection points between these components and the second pipeline, thus improving the safety of using flammable and explosive gases.

[0078] In some embodiments, the reaction chamber 1021 includes a plurality of air inlets, and the plurality of air inlets of the reaction chamber 1021 are connected one-to-one with the air outlets of the plurality of second pipes 1010.

[0079] The reaction chamber comprises multiple regions, each region corresponding to at least one air inlet of the reaction chamber; the air inlets of the reaction chambers corresponding to the multiple regions are not reused.

[0080] In these embodiments, the gas mass flow controllers and normally closed valves installed through each second pipeline can meet the flammable and explosive gas flow requirements of different parts of the same reaction chamber, and can also be adapted to the flammable and explosive gas flow requirements of different reaction chambers.

[0081] In some instances, the portion of the first pipe located outside the first and second cabinets is a seamless pipe; the portion of the second pipe located outside the second cabinet is a seamless pipe, such as a seamless steel pipe.

[0082] In these embodiments, the first conduit can be formed by connecting different conduits together. The seamed portion of the first conduit 1011 can be located within the first cabinet 1016 or the second cabinet 1019. The portion of the first conduit outside the first cabinet 1016 and the second cabinet 1019 is a seamless conduit. By providing a seamless portion of the first conduit outside the first cabinet 1016 and the second cabinet 1019, the exposed portion of the first conduit will not leak flammable or explosive gases.

[0083] Similarly, the portion of the second pipe located outside the second cabinet 1019 uses seamless pipe, which can ensure that the exposed portion of the second pipe will not leak flammable or explosive gases.

[0084] In these embodiments, by using seamless pipes for the first pipe outside the first cabinet and the second cabinet, and for the second pipe located outside the second cabinet, the safety of flammable and explosive gas leakage from the exposed pipes can be maximized, thereby further improving the safety of using flammable and explosive gases.

[0085] In some embodiments, negative pressure extraction sensors are respectively provided on the exterior of the first cabinet and the second cabinet; the negative pressure extraction sensors are used to detect the extraction pressure of the negative pressure extraction device.

[0086] The control module is also used to determine whether the negative pressure extraction status is abnormal based on the negative pressure extraction status signal transmitted by the negative pressure extraction sensor corresponding to the negative pressure extraction equipment; if the negative pressure extraction status is determined to be abnormal, the main air intake valve is controlled to close.

[0087] The negative pressure extraction sensor uses a sampling tube to detect extraction pressure abnormalities. If an abnormal extraction pressure occurs, the negative pressure environment in the first cabinet 1016 and the second cabinet 1019 will change, potentially causing gas leaking into the first cabinet 1016 and the second cabinet 1019 to leak into the external environment. Therefore, by detecting abnormal extraction pressure, the control module closes the main air inlet valve 1012 when an abnormality is detected, and indicates a malfunction in the negative pressure extraction equipment. This further ensures the safe use of flammable and explosive gases.

[0088] Please continue to refer to this. Figure 1 or Figure 2 In some embodiments, the above-mentioned extraction and exhaust processing module 103 further includes a processing device 1033 and an exhaust pipe 1034 connecting the extraction and exhaust device 1031 and the processing device 1033, wherein the flammable and explosive gas in the exhaust pipe 1034 is in a positive pressure environment.

[0089] The processing device 1033 is connected to the extraction device 1031 and is used to perform safe treatment on the flammable and explosive gases discharged by the extraction device 1031.

[0090] The extraction device 1031, the processing device 1033, and the exhaust pipe 1034 are located in a relatively sealed third cabinet 1035. The gas in the third cabinet 1035 is extracted by the negative pressure extraction device, so that the inside of the third cabinet 1035 is in a negative pressure environment.

[0091] An alarm device 20 is installed on the top of the third cabinet 1035.

[0092] In these embodiments, the above-mentioned extraction and exhaust processing module 103 can realize gas extraction, oxygen concentration monitoring, flammable and explosive gas treatment and safe discharge. Before the flammable and explosive gas is introduced, the gas in the reaction chamber 1021 is subjected to the action of the extraction and exhaust equipment to establish a vacuum environment inside the reaction chamber 1021.

[0093] If a flammable or explosive gas leaks from the exhaust pipe 1034, the treatment equipment 1033, or the extraction equipment 1031, the alarm device 20 corresponding to the third cabinet 1035 can detect the abnormal concentration of flammable or explosive gas in the third cabinet 1035 and trigger an alarm. The control module is used to control the main intake valve and the normally closed valves of each second pipe 1010 to close based on the alarm signal received from the alarm device 20.

[0094] At the exhaust end of the extraction device 1031, an oxygen concentration monitoring device 1032 is connected to the pipeline to monitor the oxygen concentration in the flammable and explosive gas in real time. The flammable and explosive gas, along with the purging nitrogen from the extraction device 1031 (connected to the extraction device for gas sealing and cleaning), ultimately flow into the treatment device 1033. The treatment device 1033 treats the flammable and explosive gas exhaust gas entering it. Treatment by the treatment device 1033 controls the concentration of the flammable and explosive gas within a safe range. Taking hydrogen as an example, treatment by the treatment device 1033 can control the hydrogen concentration to <1%. Therefore, the flammable and explosive gas treated by the treatment device 1033 can be safely discharged.

[0095] In some embodiments, the extraction and discharge processing module 103 further includes a main extraction and discharge valve; the main extraction and discharge valve is located in the connection channel between the extraction and discharge device 1031 and the reaction chamber 1021, and is used to control the opening and closing of the gas passage between the extraction and discharge device 1031 and the reaction chamber 1021. Through the aforementioned main extraction and discharge valve, it is possible to control whether the gas passage between the extraction and discharge device 1031 and the reaction chamber 1021 is open or closed.

[0096] Please refer to Figure 3 , Figure 3 A schematic flowchart for the use of flammable and explosive gases. Figure 1 This method is used for, for example Figure 1 or Figure 2The illustrated embodiment provides a flammable and explosive gas safety system. The system includes a gas supply module, a gas consumption module, and an extraction and treatment module. The gas consumption module includes a reaction chamber under negative pressure, and the extraction and treatment module includes extraction equipment and an oxygen concentration detection device. Figure 3 As shown, the method includes the following steps.

[0097] S301: When the reaction chamber is in operation with flammable and explosive gas introduced into it, the gas after the reaction is extracted from the reaction chamber using an extraction device.

[0098] S302: Obtain the oxygen concentration in the gas from the oxygen concentration detection device, and determine whether it is within the safe operating range based on the oxygen concentration; wherein, the oxygen concentration detection device detects the oxygen concentration in the gas discharged from the extraction equipment, and the oxygen concentration in the gas discharged from the extraction equipment is regarded as the oxygen concentration in the reaction chamber.

[0099] S303: In response to the detection that the oxygen concentration is not within the safe operating range, the gas supply module is controlled to stop supplying flammable and explosive gas to the gas consumption module.

[0100] The entity executing the method of using flammable and explosive gases can be the control module of the flammable and explosive gas use system. This control module may include electronic devices that are communicatively connected to the gas supply module, gas consumption module, and extraction and treatment module.

[0101] For the connection relationships between the gas consumption module, the gas supply module, and the gas extraction and treatment module, as well as the composition of each module, please refer to [reference needed]. Figure 1 or Figure 2 The illustrated embodiment will not be described in detail here.

[0102] When the reaction chamber is purged with flammable and explosive gases and is in operation, it is under negative pressure. The pressure inside the reaction chamber is less than 4000 Pa. Within this pressure range, even if the reaction chamber experiences a sealing failure, causing ambient air to flow back into the chamber, the final hydrogen concentration inside the reaction chamber will still be outside the explosive range.

[0103] Flammable and explosive gases entering the reaction chamber react with semiconductor materials or devices located within the chamber to reduce impurities or defects in the semiconductor materials. After the reaction, the reaction chamber produces a post-reaction gas.

[0104] The aforementioned actuator can control the operation of the extraction equipment to extract the reacted gas from the reaction chamber. The oxygen content of the reacted gas remains unchanged compared to the gas before the reaction. The oxygen concentration in the reaction chamber can be indirectly detected by detecting the oxygen content of the pressurized gas discharged from the extraction equipment.

[0105] A pressurization device is installed at the rear end of the extraction equipment. Therefore, the rear end of the extraction equipment, the processing equipment, and the exhaust pipe between the extraction equipment and the processing equipment are in a positive pressure environment.

[0106] The oxygen concentration detection device is installed at the exhaust port of the extraction equipment to indirectly detect the oxygen concentration in the reaction chamber.

[0107] Excessive oxygen concentration in the reaction chamber can cause an explosion inside the chamber, posing a safety risk.

[0108] To prevent an explosion inside the reaction chamber, the oxygen concentration inside the reaction chamber must be controlled to be less than 1%.

[0109] The implementing entity can obtain the oxygen concentration from the oxygen concentration detection device and determine whether it is within the safe use range for flammable and explosive gases based on the oxygen concentration.

[0110] If the oxygen concentration is detected to be outside the safe operating range, the gas supply module will stop supplying flammable and explosive gases to the gas consumption module.

[0111] In this embodiment, the oxygen concentration in the reaction chamber is indirectly detected by using an oxygen concentration detection device installed at the exhaust port of the extraction equipment. The reaction chamber is in a negative pressure environment, which provides a safety risk detection scheme when flammable and explosive gases are used in a negative pressure environment, and can reduce the safety risks during the use of flammable and explosive gases.

[0112] Please refer to Figure 4 , Figure 4 A schematic flowchart for the use of flammable and explosive gases. Figure 2 This method is used for, for example Figure 2 The illustrated embodiment provides a flammable and explosive gas safety system. The system includes a gas supply module, a gas consumption module, and an extraction and treatment module. The gas consumption module includes a reaction chamber under negative pressure. The extraction and treatment module includes extraction equipment and an oxygen concentration detection device. The gas supply module includes a first pipe located in a first cabinet and multiple second pipes located in a second cabinet. The flammable and explosive gas in the first and second pipes is under positive pressure. The negative pressure extraction equipment is connected to the first and second cabinets and is used to extract the gas from the first and second cabinets, thus creating a negative pressure environment inside both cabinets. Figure 4 As shown, the method includes the following steps:

[0113] S401: Based on the received gas supply command, detect whether the negative pressure inside the first cabinet and the second cabinet meets the first preset condition.

[0114] S402: In response to a positive detection result, control the operation of the processing equipment; wherein the processing equipment is connected to the extraction equipment through an exhaust pipe.

[0115] S403: When the processing equipment is running normally, control the operation of the extraction equipment and control the opening of the main extraction valve to connect the extraction equipment with the gas channel of the reaction chamber.

[0116] S404: In response to the pumping equipment being in normal operation, the normally closed valve in the second pipeline is opened, so that the second pipeline is connected to the reaction chamber.

[0117] S405: When the pressure inside the reaction chamber, the gas pressure in the second pipeline, and the oxygen concentration detected by the oxygen concentration detection device meet the preset gas supply conditions, the main inlet valve in the first pipeline is opened to supply flammable and explosive gas from the first pipeline to the second pipeline so that the reaction chamber enters the working state.

[0118] Before introducing hydrogen, the negative pressure extraction status of the first and second cabinets is checked. If the detected negative pressure extraction status (detected by negative pressure extraction sensors installed outside the first and second cabinets) does not meet the first preset condition, a negative pressure extraction anomaly is determined, and the introduction of flammable and explosive gases into the first pipeline is prohibited. Prohibiting the introduction of flammable and explosive gases into the first pipeline can be achieved by keeping the main inlet valve in the first pipeline closed. The aforementioned first preset condition includes the value output by the negative pressure extraction sensor being within a preset range. This preset range is set according to the specific application scenario.

[0119] When the negative pressure extraction status of the first cabinet and the second cabinet meets the first preset condition, the aforementioned execution entity can control the operation of the processing equipment.

[0120] When the processing equipment is detected to be in normal operating condition, control the operation of the pumping equipment.

[0121] After detecting that the pumping equipment is operating normally, the aforementioned executing entity controls the normally closed valve in the second pipeline to open, thereby connecting the second pipeline to the reaction chamber.

[0122] The valve at the inlet of the reaction chamber to the pumping equipment (i.e., the main pumping valve) has two setting modes: full pumping mode and fast pumping mode.

[0123] The slow pumping mode is activated when the air pressure inside the reaction chamber is within the first preset pressure range (e.g., 300mbar to 1000mbar).

[0124] When the air pressure inside the reaction chamber is lower than the lower limit of the first preset pressure range, the fast pumping mode is activated.

[0125] Slow extraction mode: The diameter of the flow pipe at the main extraction valve is small, which limits the gas flow rate and prevents the vacuum in the reaction chamber from dropping too quickly.

[0126] Fast extraction mode: The diameter of the flow pipe at the main extraction valve is relatively large. When the gas pressure in the cavity is less than 300mbar, the gas is thin, so the gas flow rate is reduced.

[0127] The aforementioned actuator can control the orifice size of the main extraction valve based on the gas pressure within the reaction chamber, enabling switching between the two modes. During gas extraction, the slow extraction mode helps reduce gas disturbance within the reaction chamber, thereby reducing contamination of the reaction chamber (contamination is generated by the process or moving parts).

[0128] The aforementioned executing entity can wait until the gas pressure in the first pipeline and the second pipeline, as well as the wall concentration in the reaction chamber, meet the preset gas supply conditions, and then control the main gas inlet valve in the first pipeline to open so that flammable and explosive gas can be supplied from the first pipeline to the second pipeline, thereby putting the reaction chamber into working condition.

[0129] The aforementioned preset gas supply conditions include that the pressure in the first pipeline and the pressure in the second pipeline are less than a second preset pressure threshold, and the oxygen concentration is less than a preset oxygen concentration threshold.

[0130] The second preset pressure threshold can be used as a judgment threshold for the vacuum level within the pipeline, to confirm whether the reaction chamber, the first pipeline, and the second pipeline are properly sealed. The gas pressure within the pipeline is generally related to the pumping capacity of the negative pressure extraction pump and the pipeline's sealing performance. The second preset pressure threshold can be 300 Pa. The preset oxygen concentration threshold is related to the leakage rate of the pipeline and chamber, and the type of process gas within the chamber. The criterion for its value is that there is no risk of explosion for flammable and explosive gases at this oxygen concentration. If the flammable and explosive gas is hydrogen, the preset oxygen concentration threshold can be 1%.

[0131] After the main inlet valve in the first control pipe is opened, the first pipe connects to the second pipe, allowing flammable and explosive gas to be supplied from the first pipe to the second pipe. Since the second pipe is pre-connected to the reaction chamber, flammable and explosive gas can be introduced into the reaction chamber after the main inlet valve is opened. Once the flammable and explosive gas is introduced into the reaction chamber, the reaction chamber enters its working state.

[0132] In the above steps, upon receiving a gas supply command, the negative pressure extraction status of the first and second cabinets is first checked to ensure that flammable and explosive gases in the first and second pipelines do not leak into the external environment. After confirming that the negative pressure extraction status of the first and second cabinets is normal, the processing equipment can be started to ensure the processing of flammable and explosive gases. After the processing equipment is running normally, the operation of the extraction equipment is controlled to ensure that once flammable and explosive gases are introduced into the reaction chamber, they can be extracted to the flammable and explosive gas processing equipment for treatment. After the extraction equipment is running normally, the valve in the second pipeline is opened. Then, after detecting that the pressure in the first and second pipelines, and reading the oxygen concentration in the reaction chamber from the oxygen concentration detection device, meets the preset gas supply conditions, the main inlet valve is opened. Thus, when the main flammable and explosive gas valve is opened, the first pipeline, the second pipeline, the first cabinet, the second cabinet, the reaction chamber, the extraction equipment, and the processing equipment are all in a gas-supply state, thereby avoiding the safety risks associated with the use of flammable and explosive gases.

[0133] In some optional implementations of this embodiment, the extraction device, processing device, and exhaust pipe are located in the third cabinet. The negative pressure extraction device extracts gas from the third cabinet, creating a negative pressure inside the first, second, and third cabinets. The method further includes:

[0134] When a flammable and explosive gas system is in operation, if one or more of the following events are detected, the main inlet valve will be closed to stop the supply of flammable and explosive gas:

[0135] The negative pressure extraction status of one or more of the first cabinet, second cabinet and third cabinet is abnormal;

[0136] The pressure inside the reaction chamber does not meet the preset gas supply conditions.

[0137] In some application scenarios, if the negative pressure extraction status of any one of the first, second, and third cabinets does not meet the first preset condition, then the negative pressure extraction will be abnormal.

[0138] If two or more of the negative pressure extraction states in the first, second, and third cabinets do not meet the first preset condition, the negative pressure extraction state is abnormal.

[0139] When the negative pressure extraction is abnormal, flammable and explosive gases may leak into the external environment. It is necessary to forcibly close the main valve of the flammable and explosive gases, while the extraction pump and treatment equipment operate normally.

[0140] In the event of an abnormal negative pressure extraction, the aforementioned actuator closes the main inlet valve in the first pipeline, stopping the supply of flammable and explosive gases. This ensures the safety of the flammable and explosive gas usage system and the external environment.

[0141] In some applications, the pressure within the reaction chamber exceeds the upper limit of the first preset pressure range, indicating an abnormal pressure. This pressure exceeding the upper limit is generally caused by a malfunction in the pressure regulating valve of the gas supply module, leading to flow or pressure fluctuations, or by a failure in the downstream extraction equipment, causing the pressure within the reaction chamber to rise. It is necessary to close the main valve for flammable and explosive gases to prevent the total amount of flammable and explosive gases within the reaction chamber from increasing further, thereby reducing safety risks.

[0142] In some optional implementations of this embodiment, the method further includes:

[0143] In response to the detection of alarm signals from one or more corresponding flammable and explosive gas detection sensors in the first, second, and third cabinets, the main inlet valve in the first pipeline is closed to stop the supply of flammable and explosive gas, and the normally closed valves in each of the second pipelines are also closed.

[0144] If an alarm signal is detected from one or more corresponding flammable and explosive gas detection sensors in the first, second, and third cabinets, it indicates that hydrogen has leaked outside the pipeline (first pipeline, second pipeline, or exhaust pipeline). All valves must be closed, and the extraction equipment must be powered off and shut down.

[0145] In these implementations, by closing all flammable and explosive gas supply valves after detecting alarm signals from one or more corresponding flammable and explosive gas detection sensors in the first, second, and third cabinets, the continued leakage of flammable and explosive gases can be prevented, thus reducing safety risks.

[0146] The above description is merely a preferred embodiment of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features disclosed in this disclosure that have similar functions.

[0147] While several specific implementation details are included in the foregoing discussion, these should not be construed as limiting the scope of this disclosure. Certain features described in the context of individual embodiments may also be implemented in combination in a single embodiment. Conversely, various features described in the context of a single embodiment may also be implemented individually or in any suitable sub-combination in multiple embodiments.

[0148] Although the subject matter has been described using language specific to structural features and methodological logic, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or actions described above. Rather, the specific features and actions described above are merely illustrative examples of implementing the claims.

Claims

1. A flammable and explosive gas utilization system, characterized in that, include: Gas supply module, gas consumption module, gas extraction and treatment module, and control module; The gas-consuming module is connected to the gas supply module and the extraction and processing module respectively. The gas supply module is used to supply flammable and explosive gas to the gas-consuming module. The flammable and explosive gas reacts in the reaction chamber of the gas-consuming module. The reaction chamber is in a negative pressure environment during operation. The extraction and discharge processing module includes an extraction and discharge device for extracting gas from the reaction chamber; an oxygen concentration detection device is installed at the gas outlet of the extraction and discharge device, and the oxygen concentration detection device indirectly detects the oxygen concentration in the reaction chamber by detecting the oxygen concentration at the gas outlet of the extraction and discharge device. The control module is used to determine whether the oxygen concentration is within the safe operating range for flammable and explosive gases based on the oxygen concentration. If the oxygen concentration is not within the safe operating range for flammable and explosive gases, the control module stops supplying the flammable and explosive gas to the gas-consuming module.

2. The system according to claim 1, characterized in that, The gas supply module includes a first gas supply pipe and a plurality of second gas supply pipes seamlessly connected to the first gas supply pipe. The plurality of second gas supply pipes are used to divert the flammable and explosive gas transported by the first gas supply pipe. The outlets of multiple second gas supply pipes are respectively connected to the inlet of the reaction chamber to supply the flammable and explosive gas to the reaction chamber; The gas supply module includes a relatively sealed first cabinet and a second cabinet, with at least a portion of the first gas supply pipe located inside the first cabinet; at least a portion of each of the second gas supply pipes is located inside the second cabinet; wherein, a negative pressure extraction device is connected to the first cabinet and the second cabinet, and is used to extract the gas in the first cabinet and the second cabinet so that the internal air pressure of the first cabinet and the second cabinet is negative. The first cabinet and the second cabinet are explosion-proof cabinets; The top of the first cabinet and the second cabinet are respectively equipped with flammable and explosive gas detection sensors.

3. The system according to claim 2, characterized in that, The gas supply module also includes a main inlet valve, a pressure regulating device, and a pipeline vacuum monitoring and control device connected to the first pipeline; the main inlet valve, pressure regulating device, and pipeline vacuum monitoring and control device are located in the first cabinet, wherein... The main air inlet valve is used to control the flow of flammable and explosive gas in the first pipeline. The pressure regulating device is used to detect and regulate the pressure of flammable and explosive gas passing through the pressure regulating device, so as to adapt to the pressure environment of the first pipeline and the reaction chamber. The pipeline vacuum monitoring and control device is used to detect the vacuum level in the pipeline when the flammable and explosive gas is not introduced, and to determine whether the vacuum level meets the conditions for introducing the flammable and explosive gas.

4. The system according to claim 3, characterized in that, The gas supply module also includes a gas mass flow controller and normally closed valves installed in each of the second gas supply pipelines; wherein... The gas flow quality controller is used to control the gas flow of the second gas supply pipeline, and the normally closed valve is used to disconnect the supply of flammable and explosive gas to the second gas supply pipeline. The gas mass flow controller and the normally closed valve are located in the second cabinet.

5. The system according to claim 3, characterized in that, The reaction chamber includes multiple air inlets, and the multiple air inlets of the reaction chamber are connected one-to-one with the air outlets of the multiple second pipes; The reaction chamber includes multiple regions, each region corresponding to at least one air inlet of the reaction chamber; the air inlets of the reaction chambers corresponding to the multiple regions are not reused.

6. The system according to any one of claims 2-5, characterized in that, Negative pressure extraction sensors are respectively installed on the outside of the first cabinet and the second cabinet; the negative pressure extraction sensors are used to detect the extraction pressure of the negative pressure extraction equipment.

7. The system according to claim 4, characterized in that, The control module is also used to control the main intake valve and each of the normally closed valves to close based on the alarm signal received from the flammable and explosive gas detection sensor.

8. The system according to claim 1, characterized in that, The extraction and treatment module also includes a treatment device and an exhaust pipe connecting the extraction device and the treatment device, wherein the flammable and explosive gas in the exhaust pipe is in a positive pressure environment. The processing device is connected to the extraction device and is used to safely process the flammable and explosive gases discharged by the extraction device. The extraction device, the processing device, and the exhaust pipe are located in a relatively sealed third cabinet, wherein the gas in the third cabinet is extracted by the negative pressure extraction device to make the interior of the third cabinet a negative pressure environment. The top of the third cabinet is equipped with a flammable and explosive gas detection sensor.

9. The system according to claim 8, characterized in that, The extraction and discharge processing module also includes an extraction and discharge main valve; The main exhaust valve is located in the connection channel between the exhaust equipment and the reaction chamber, and is used to control the opening and closing of the gas channel between the exhaust equipment and the reaction chamber.

10. The system according to any one of claims 1-5, characterized in that, The gas pressure inside the reaction chamber is less than 4000 Pa.

11. The system according to any one of claims 1-5, characterized in that, The oxygen concentration in the reaction chamber is less than 1%.

12. The system according to any one of claims 2-5, characterized in that, The portion of the first pipe located outside the first cabinet and the second cabinet is a seamless pipe; the portion of the second pipe located outside the second cabinet is a seamless pipe.

13. The system according to claim 2, characterized in that, The control module is also used to determine whether the negative pressure extraction status is abnormal based on the negative pressure extraction status signal transmitted by the negative pressure extraction sensor corresponding to the negative pressure extraction equipment; if the negative pressure extraction status is determined to be abnormal, the main air intake valve is controlled to close.

14. A method for using a flammable and explosive gas, used in the flammable and explosive gas safety system as described in any one of claims 1-13, wherein the flammable and explosive gas safety system includes a gas supply module, a gas consumption module, and an extraction and treatment module; the gas consumption module includes a reaction chamber under negative pressure, and the extraction and treatment module includes extraction equipment and an oxygen concentration detection device; the method includes: When the reaction chamber is in operation with flammable and explosive gas introduced into it, the gas after the reaction is extracted from the reaction chamber using an extraction device. The oxygen concentration in the gas is obtained from the oxygen concentration detection device, and it is determined whether the gas is within the safe operating range for flammable and explosive gases based on the oxygen concentration. The oxygen concentration detection device detects the oxygen concentration in the gas discharged from the extraction device, and the oxygen concentration in the gas discharged from the extraction device is regarded as the oxygen concentration in the reaction chamber. In response to the detection that the oxygen concentration exceeds the safe operating range, the gas supply module is controlled to stop supplying flammable and explosive gas to the gas consumption module.

15. The method according to claim 14, characterized in that, The gas supply module includes a first pipe located in a first cabinet and multiple second pipes located in a second cabinet, wherein the flammable and explosive gases in the first and second pipes are under positive pressure; the method further includes: Based on the received gas supply command, it is detected whether the negative pressure extraction status used for negative pressure extraction of the first cabinet and the second cabinet meets the first preset condition. In response to a positive detection result, the processing equipment is controlled to operate; wherein, the processing equipment is connected to the extraction equipment via an exhaust pipe; When the processing equipment is running normally, the pumping equipment is controlled to operate, and the main pumping valve is controlled to open, so that the pumping equipment is connected to the gas channel of the reaction chamber. In response to the pumping equipment being in normal operation, the normally closed valve in the second pipeline is opened, so that the second pipeline is connected to the reaction chamber; When the pressure inside the reaction chamber, the pressure inside the second pipe, and the oxygen concentration detected by the oxygen concentration detection device meet the preset gas supply conditions, the main air inlet valve in the first pipe is opened to supply flammable and explosive gas from the first pipe to the second pipe, so that the reaction chamber enters the working state.

16. The method according to claim 15, characterized in that, The extraction device, the processing device, and the exhaust pipe are located in the third cabinet. The negative pressure extraction device extracts the gas from the first, second, and third cabinets, creating a negative pressure inside the first, second, and third cabinets. The method further includes: When the flammable and explosive gas system is in operation, if one or more of the following events are detected, the main inlet valve will be closed to stop the supply of flammable and explosive gas: The negative pressure extraction status of one or more of the first cabinet, the second cabinet, and the third cabinet is abnormal; The pressure inside the reaction chamber does not meet the preset gas supply conditions.

17. The method according to claim 16, characterized in that, The method further includes: In response to the detection of an alarm signal from one or more corresponding flammable and explosive gas detection sensors in the first cabinet, the second cabinet, and the third cabinet, the main inlet valve in the first pipeline is controlled to close to stop the supply of flammable and explosive gas, and the normally closed valves in each of the second pipelines are also controlled to close.

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