Performance detection method and system of optical element and computer program product

Abstract

The invention relates to the technical field of lens performance detection, in particular to a performance detection method and system for an optical element and a computer program product, and the method comprises the following steps: carrying out field scanning shooting on a sample which is placed at a measurement position and is irradiated by a light source based on preset field scanning parameters; image data of the sample at different field scanning positions are obtained; selecting a target area from the image data, and performing field scanning superposition processing on the image data of the target area to generate a field scanning superposition graph; and determining performance parameters of the sample based on the field scanning superposition graph. According to the invention, field scanning can be carried out on the sample, and field scanning superposition graph and focusing plane display can be carried out on the image data of the sample obtained by field scanning, so that automatic analysis aiming at the micro lens is realized, and digitization, standardization and traceability of the measurement process are realized.

Description

Technical Field

[0001] This invention relates to the field of lens performance testing technology, and specifically to a method, system, and computer program product for testing the performance of optical elements. Background Technology

[0002] Microlenses are widely used in optoelectronics, imaging, and communications, and their optical performance directly affects system quality. With the miniaturization and integration of devices, the requirements for measurement accuracy, efficiency, and intelligence are increasing. Current measurement methods largely rely on traditional instruments and manual operation, resulting in rigid processes, low efficiency, poor repeatability, susceptibility to human error, and scattered measurement data, making systematic analysis and quality traceability difficult. For batch devices such as microlens arrays, traditional methods are cumbersome to assemble and difficult to debug, failing to meet the needs of online inspection and intelligent manufacturing. Therefore, existing technologies have significant shortcomings in terms of accuracy, efficiency, and automation, urgently requiring a solution that can achieve intelligent, efficient, and high-precision measurement of the optical performance of microlenses. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a method, system and computer program product for testing the performance of optical components. This invention addresses the problems of low efficiency, poor repeatability, susceptibility to human error, difficulty in achieving systematic analysis and quality traceability, and cumbersome assembly, difficult debugging and inability to meet the needs of online testing and intelligent manufacturing for batch devices.

[0004] The technical solution to achieve the above objectives is: This invention provides a method for testing the performance of optical components, the method comprising the following steps: Based on preset scanning parameters, the sample placed at the measurement position and illuminated by the light source is scanned and photographed to obtain image data of the sample at different scanning positions. Select a target region from the image data and perform sweep overlay processing on the image data of the target region to generate a sweep overlay map; Based on the sweep field overlay image, the performance parameters of the sample are determined.

[0005] A further improvement to the performance testing method for the optical element of the present invention is that it further includes: Based on the sweep image overlay, the focal position of the sample is determined, and then the focal plane of the sample is determined; based on the focal plane, the performance parameters of the sample are determined. And / or, It can display at least one of the following in real time: image data of the sample, the generation process of the scan overlay image, and the focal plane of the sample.

[0006] A further improvement of the performance testing method for the optical element of the present invention is that the set scanning parameters include the range of sample movement in the Z-axis direction and the step size of movement. And / or, Selecting a target region from image data includes: drawing a selection box on the displayed image data of the sample that can enclose a bright spot; specifying a straight path within the selection box; obtaining the coordinate set of all pixels constituting the straight path; and using the region corresponding to the coordinate set as the target region. And / or, The sample is scanned and photographed based on preset scanning parameters to obtain image data of the sample at different scanning positions. This includes: controlling the relative movement between the image acquisition device and the sample to perform scanning and photographing based on preset scanning parameters, thereby obtaining image data of the sample at different scanning positions.

[0007] The present invention also provides a method for testing the performance of an optical element, the method comprising: Images are acquired from the sample placed at the measurement position and illuminated by the light source to obtain the raw image data of the sample; Remove the sample and keep the light source illuminating the image to obtain light source image data; Remove the sample and turn off the light source to acquire background image data; The performance parameters of the sample are determined based on image data, light source image data, and background image data.

[0008] A further improvement to the performance testing method for the optical element of the present invention is that it further includes: Image acquisition is performed on the sample to obtain reference image data of the sample; Perform a Fourier transform on the reference image data to generate the spatial spectrum of the sample; The position of the sample is adjusted based on the sharpness of the spatial spectrum, which is characterized by quantifying the intensity of high-frequency components or edge sharpness of the spatial spectrum. Through iterative adjustments until the clarity reaches its optimal value, the spatial position of the sample at this point is determined as the measurement position.

[0009] The present invention also provides a computer program product, including computer instructions or a computer program, wherein when at least a portion of the computer instructions or the computer program is executed by a processor, a method for detecting the performance of an optical element or a phase analysis method is implemented.

[0010] This invention also provides a performance testing system for optical components, the system comprising: The sweeping parameter setting unit is used to set the sweeping parameters; The sweep field control unit is connected to the sweep field parameter setting unit and is used to sweep and photograph the sample placed at the measurement position and illuminated by the light source according to the set sweep field parameters to obtain image data of the sample at different sweep field positions. The field distribution calculation unit, connected to the field sweep control unit, is used to select a target region in the image data and perform field sweep overlay processing on the image data of the target region to generate a field sweep overlay map. Based on the field sweep overlay map, the performance parameters of the sample are determined.

[0011] A further improvement of the performance testing system for optical elements of the present invention is that the field distribution calculation unit is also used to determine the focal position of the sample based on the scanned field overlay map, and then determine the focal plane of the sample; and to determine the performance parameters of the sample based on the focal plane. And / or, It also includes a display unit connected to the sweep field control unit and the field distribution calculation unit, for real-time display of at least one of the following: sample image data, the generation process of the sweep field overlay map, and the sample's focal plane. A further improvement of the performance testing system for the optical element of the present invention is that the scanning parameters set by the scanning parameter setting unit include the range of sample movement in the Z-axis direction and the step size of movement. And / or, It also includes an input unit connected to the field distribution calculation unit; The input unit is used to input a selection box that can enclose a bright spot drawn on the image data of the displayed sample; The field distribution calculation unit is used to specify a straight path within the selection box, obtain the coordinate set of all pixels that constitute the straight path, and take the area corresponding to the coordinate set as the target area. And / or, The scanning control unit is used to control the relative movement between the image acquisition device and the sample based on preset scanning parameters to perform scanning and imaging, thereby acquiring image data of the sample at different scanning positions.

[0012] This invention also provides a performance testing system for optical components, the system comprising: The scanning control unit is used to acquire images of a sample placed at the measurement position and illuminated by a light source, obtaining the raw image data of the sample; it is also used to acquire images of a sample removed while the light source is still illuminating the sample, obtaining the light source image data; and it is also used to acquire images of a sample removed and the light source turned off, obtaining the background image data. The optical parameter performance calculation unit, connected to the scanning control unit, is used to determine the performance parameters of the sample based on image data, light source image data, and background image data.

[0013] The beneficial effects of the performance testing method and system for optical elements of the present invention are as follows: The detection method and system of this invention perform a sweep field overlay (i.e., light field distribution) on the image data of the sample, which can yield the actual focal length of the lens (the sweep field distance corresponding to the extreme point of the light field distribution is the focal length). Furthermore, the sweep field overlay can also reflect the aberrations of the lens; obvious asymmetry in the light field distribution before and after the focal point, and multiple extreme values, indicate that the lens has significant aberrations.

[0014] The detection method and system of this invention can also obtain the focal plane display (i.e., point spread function) of the sample through field scanning, which can reflect the lateral optical resolution of the lens. This lateral optical resolution is determined by the central spot (Airy disk) of the focal plane; the smaller the spot, the higher the lateral optical resolution of the lens. Furthermore, this focal plane display can also reflect the aberrations and imaging performance of the lens. The obvious asymmetry and elliptical distribution of the central spot of the focal plane indicates that the lens has significant aberrations and relatively poor imaging performance.

[0015] The detection method and system of the present invention can scan the sample and then display the image data of the sample obtained by scanning as a scan overlay map and a focused plane, realizing automatic analysis of microlenses and achieving digitalization, standardization and traceability of the measurement process.

[0016] The detection method and system of the present invention perform Fourier transform on the image data of the sample, and compare the image data of the sample with the image data of the Fourier transform. This helps to adjust the setting position of the sample and the setting angle of the lens in the sample. By adjusting the setting angle of the lens, the optical path can be adjusted to obtain clearer and brighter image data of the sample.

[0017] The detection method and system of the present invention perform field scanning and overlay processing on the image data of the sample to quickly find the focal position. The focal position is the coordinate information of the focal point with the best focusing effect. Based on the coordinate information, the focal plane with the best focusing effect can be found from the image data of the sample and displayed.

[0018] The detection method and system of the present invention integrate multiple functions such as motion control, image acquisition and analysis processing, and realize the automatic control of the entire process of sample positioning, optical path adjustment, data acquisition and analysis, and realize the digitalization, standardization and traceability of the measurement process. Attached Figure Description

[0019] Figure 1 This is a system diagram of the first embodiment of the performance testing system for optical elements of the present invention.

[0020] Figure 2 This is an interface diagram of the optical element performance testing system of the present invention, used for adjusting the sample position and the optical path of the device.

[0021] Figure 3This is a field analysis interface diagram of the performance testing system for the optical element of this invention.

[0022] Figure 4 and Figure 5 This is a decomposed schematic diagram of the field distribution calculation unit of the performance testing system for the optical element of the present invention, which generates a swept field superposition diagram.

[0023] Figure 6 This is a diagram showing the PSF and MTF calculation results of the performance testing system for the optical element of this invention.

[0024] Figure 7 This is a sample imaging quality effect diagram of the performance testing system for the optical element of the present invention.

[0025] Figure 8 This is a schematic diagram of image data for the performance testing system and method of the optical element of the present invention.

[0026] Figure 9 In the performance testing system and method for optical elements of the present invention, and Figure 9 A schematic diagram of the background image corresponding to the image data shown.

[0027] Figure 10 This is a diagram of the transmittance calculation display interface in the performance testing system and method for optical elements of the present invention.

[0028] Figure 11 The performance testing system and method for optical elements of this invention are for... Figure 9 The image shown is a schematic diagram after Fourier transform of the image data.

[0029] Figure 12 for Figure 11 A schematic diagram showing the phase extraction results of the selected region.

[0030] Figure 13 for Figure 11 A schematic diagram of the phase distribution in the image.

[0031] Figure 14 for Figure 11 A schematic diagram of phase expansion in the image.

[0032] Figure 15 for Figure 11 A schematic diagram of wavelet aberration results.

[0033] Figure 16 for Figure 11 A schematic diagram of the Zenico analysis results.

[0034] Figure 17 for Figure 11 A schematic diagram of the PSF and MTF calculation results from the phase analysis.

[0035] Figure 18 for Figure 11 A schematic diagram of the field distribution in the image.

[0036] Figure 19 This is a system diagram of a second embodiment of the performance testing system for optical elements of the present invention.

[0037] Figure 20 This is a flowchart of the first embodiment of the performance testing method for optical elements of the present invention.

[0038] Figure 21 This is a flowchart of a second embodiment of the performance testing method for optical elements of the present invention. Detailed Implementation

[0039] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0040] See Figure 1 This invention provides a method, system, and computer program product for testing the performance of optical components, enabling intelligent, efficient, and high-precision measurement of the optical performance of micro- and nano-optical components such as microlenses and metalenses, and promoting the digitization and standardization of the measurement process. The method, system, and computer program product for testing the performance of optical components of this invention will be described below with reference to the accompanying drawings.

[0041] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0042] See Figure 1 This diagram shows a system diagram of a first embodiment of the performance testing system for optical elements of the present invention. The following is in conjunction with... Figure 1 The performance testing system for the optical elements of the present invention will be described.

[0043] like Figure 1 As shown, the performance testing system for optical elements of the present invention includes a scanning field parameter setting unit 21, a scanning field control unit 22, and a field distribution calculation unit 23. The scanning field parameter setting unit 21 is connected to the scanning field control unit 22, and the field distribution calculation unit 23 is connected to the scanning field control unit 22. The scanning field parameter setting unit 21 is used to set the scanning field parameters. The scanning field control unit 22 is used to perform scanning field imaging on a sample placed at a measurement position and illuminated by a light source according to the set scanning field parameters to obtain image data of the sample at different scanning field positions. The field distribution calculation unit 23 is used to select a target area in the image data and perform scanning field overlay processing on the image data of the target area to generate a scanning field overlay image. Based on the scanning field overlay image, the performance parameters of the sample are determined.

[0044] The field distribution calculation unit 23 performs a sweep field overlay plot (i.e., light field distribution) on the image data of the sample, which can obtain the actual focal length of the lens (the sweep field distance corresponding to the extreme point of the light field distribution is the focal length). Furthermore, the sweep field overlay plot can also reflect the aberrations of the lens. When the light field distribution before and after the focal point shows obvious asymmetry and multiple extreme values, it indicates that the lens has obvious aberrations.

[0045] Furthermore, during the process of creating a sweeping overlay map of the sample's image data, the field distribution calculation unit 23 can determine the extreme points of the lens's optical field distribution and then find the corresponding sweeping distance, which is taken as the lens's actual focal length. This field distribution calculation unit 23 can obtain the lens's actual focal length during the sweeping overlay map process.

[0046] The field distribution calculation unit 23 can also judge the aberration of the lens during the process of scanning the field to obtain the light field distribution before and after the focal point, and then judge the symmetry of the light field distribution and the number of extreme values. If it is asymmetrical and / or has multiple extreme values, it is judged that the lens has obvious aberrations; otherwise, it is judged that the lens does not have obvious aberrations.

[0047] Of course, lens aberrations can also be judged manually. The field distribution calculation unit 23 will display the graph used to judge lens aberrations to the operator for viewing. The operator can then judge whether there are obvious aberrations in the lens based on experience.

[0048] Preferably, the scanning control unit 22 in the detection system of the present invention is communicatively connected to the image acquisition device, which performs scanning and imaging of the sample. Before imaging, the sample to be detected is placed on an object plane conjugate to the target surface of the image acquisition device. The image acquisition device is preferably an industrial camera.

[0049] Furthermore, the plane on which the sample is placed can be positioned using a positioning mechanism.

[0050] The sample is the optical element to be tested, which can be a microlens, optical lens, metalens, etc. A microlens can be a single lens or a lens group (e.g., a lens group containing at least two lenses). The positioning mechanism can adjust the position of the sample. At the corresponding position, an industrial camera captures an image of the sample, forming image data. This image data, along with the corresponding positioning mechanism position data, is then stored as data source data in the storage unit. In some embodiments, the position adjustment via the positioning mechanism can also be performed by an image acquisition device; that is, keeping the object plane on which the sample is placed stationary, the image acquisition device is moved to perform a sweeping image capture.

[0051] The sweeping control unit 22 collects data from different data sources using corresponding communication protocols or tools. The sweeping control unit 22 is connected to the industrial camera and the positioning mechanism to send the image data from the industrial camera and the position data from the positioning mechanism to the storage unit for storage.

[0052] The storage unit is used to store data such as data from the data source, scanned overlay images of the samples, and performance parameters of the samples. This storage unit provides traceable data storage services. Image data captured by the camera and position data from the positioning mechanism within the data source can be stored correspondingly or in association.

[0053] Furthermore, the field distribution calculation unit of the present invention is also used to determine the focal position of the sample based on the sweep field overlay map, and then determine the focal plane of the sample, and determine the performance parameters of the sample based on the focal plane.

[0054] The focal plane (i.e., the point spread function) reflects the lateral optical resolution of a lens, which is determined by the center spot (Airy disk) of the focal plane. The smaller the spot, the higher the lateral optical resolution of the lens. Furthermore, the focal plane can also reflect the lens's aberrations and imaging performance. A significant asymmetry or elliptical distribution of the center spot on the focal plane indicates that the lens has significant aberrations and relatively poor imaging performance.

[0055] Furthermore, when determining the performance parameters of a sample based on the focal plane, the field distribution calculation unit measures the size of the central spot on the focal plane and compares it with a preset spot size lookup table to obtain the corresponding lateral optical resolution. For example, a lookup table corresponding to the range of spot sizes and lateral optical resolutions can be preset in the storage unit. Alternatively, a standard spot size corresponding to a minimum standard lateral optical resolution can be preset. The field distribution calculation unit then compares the measured actual size of the central spot on the focal plane with this standard spot size. If the actual size is less than or equal to the standard spot size, the lateral optical resolution is considered acceptable; if it is greater than the standard spot size, the lateral optical resolution is considered unacceptable.

[0056] In one specific embodiment of the present invention, the detection system of the present invention further includes a display unit connected to the sweep field control unit 22 and the field distribution calculation unit 23. The display unit is used to display at least one of the following in real time: image data of the sample, the generation process of the sweep field overlay map, and the focal plane of the sample.

[0057] The sweeping parameter setting unit 21 and sweeping control unit 22 of the present invention are used to realize the automatic sweeping function. Further, the sweeping parameters set by the sweeping parameter setting unit 21 include the sample's movement range and movement step size in the Z-axis direction. And / or, the sweeping control unit 22 is used to control the relative movement between the image acquisition device (camera) and the sample based on the preset sweeping parameters to perform sweeping and imaging, thereby acquiring image data of the sample at different sweeping positions. The movement function of the sample or image acquisition device in the Z-axis direction can be realized by a mechanism positioning module, which has a Z-axis control unit capable of controlling the sample-bearing platform or image acquisition device to move along the Z-axis. After the sweeping parameter setting unit 21 sets the sweeping parameters, the sweeping control unit 22 sends sweeping commands to the Z-axis control unit and the camera according to the set movement range and movement step size in the Z-axis direction, allowing the Z-axis control unit to move sequentially according to the movement step size. With each step, the camera captures an image of the sample, thus obtaining a set of image data of samples with the same XY-axis coordinates but different Z-axis positions. The scanning control unit 22 can control the start and end of the scanning.

[0058] Furthermore, the system also includes an image acquisition module, which comprises a camera selection unit, an acquisition control unit, and a camera parameter setting unit. The camera selection unit is used to select the camera to be used. The acquisition control unit is connected to the camera selection unit and is used to control the camera to acquire images of the sample. The camera parameter setting unit is connected to the camera selection unit and is used to set the acquisition parameters for the camera selected by the camera selection unit. Preferably, a scanning control unit 22 is connected to the acquisition control unit, and the scanning control unit is used to control the camera to acquire images of the sample to obtain image data of the sample.

[0059] Furthermore, a camera selection panel is provided on the display interface, allowing manual selection of the appropriate camera. Specifically, multiple cameras can be installed on the stage, each capable of capturing images in different spectral bands. This allows for selection of the camera used for the sample to be tested, based on actual needs. After selecting the corresponding camera on the camera selection panel, the acquisition control unit connects to that camera to control the switching between acquisition and standby modes. A camera parameter setting panel is also provided on the display interface, allowing for manual input of parameters or automatic parameter setting. The acquisition control unit automatically sets the camera parameters based on preset parameters. When parameters are manually entered, they are received by the camera parameter setting unit, which then sends the received parameters to the acquisition control unit, which controls the camera to set the corresponding parameters. Settable camera parameters include exposure time, contrast, brightness, and gain.

[0060] The mechanism positioning module includes a Z-axis control unit and an XY-axis control unit. The Z-axis control unit is connected to the Z-axis controller and can control the platform to move upward and downward along the Z-axis. Specifically, a position control panel is set on the display interface, which provides Z-axis position control function and XY-axis position control function. The Z-axis position control function includes moving upward, moving downward, setting zero position, returning to zero, and displaying the current position. The XY-axis control unit is connected to the XY motion platform and can control the platform to move horizontally along the XY-axis. The XY-axis position control function includes XY motion range, horizontal movement, setting zero position, returning to zero, and displaying the current position.

[0061] In one specific embodiment of the present invention, the field distribution calculation unit 23 is used to select a target region in the image data and perform field sweeping and overlay processing on the image data of the target region to generate a field sweeping overlay map, thereby obtaining the focal position of the sample and then obtaining a focal plane for display. Further, the detection system of the present invention also includes an input unit connected to the field distribution calculation unit 23; the input unit is used to input a selection box drawn on the displayed image data of the sample that can enclose a bright spot; the field distribution calculation unit 23 is used to specify a straight path within the selection box, obtain the coordinate set of all pixels constituting the straight path, and take the region corresponding to the coordinate set as the target region. Preferably, the field distribution calculation unit 23 is used to obtain a set of X-axis and Y-axis coordinates within the selection box (i.e., selecting two straight paths), the X-axis coordinate set and the Y-axis coordinate set being located on a straight line, as the target region. Figure 3As shown, the displayed image data includes two captured points. The user can click on the highlighted point, hold down the mouse button, and drag it outwards. Releasing the mouse button at the desired location creates a green rectangle, which is the selection box. The green rectangle scales with the mouse movement. The field distribution calculation unit 23 automatically obtains the center position of the selection box and the X and Y axis positions of its four corners. Furthermore, combined with... Figure 3 As shown, the user can manually modify the X and Y coordinates of the center position of the selected point, and the width W of the selection box. The field distribution calculation unit 23 automatically calculates the position of the new selection box, and the display unit automatically displays the new selection box on the interface.

[0062] like Figure 4 As shown, the field distribution calculation unit 23 overlays all acquired image data along the selected X and Y axes. The display interface has two areas: one for the XZ overlay process and the other for the YZ overlay process. The field distribution calculation unit obtains a row of data passing through the center point and within the selection box area from the aforementioned coordinate positions, using it as a row of data in the overlay image. Combined with the Z-axis position information, the data is overlaid sequentially according to the scanning process to obtain the XZ overlay image. Furthermore, the field distribution calculation unit 23 obtains a column of data passing through the center point and within the selection box area from the aforementioned coordinate positions, transposes it into a row of data, and then overlays it sequentially in the aforementioned manner to obtain the YZ overlay image. Two light rays are obtained through overlay. The field distribution calculation unit can select a focal point from these two light rays to obtain the coordinates of the focal point, and then select the focal plane corresponding to the focal point from the image data, such as... Figure 6 As shown, the sweep overlay image can visually display the imaging effect of the sample at different positions, thereby evaluating the actual focal length and imaging quality of the sample.

[0063] A second embodiment of the performance testing system for optical elements of the present invention, as follows: Figure 19 As shown, the detection system includes a scanning control unit 21 and an optical performance parameter calculation unit 24. The optical performance parameter calculation unit 24 is connected to the scanning control unit 21. The scanning control unit 21 is used to acquire images of a sample placed at the measurement position and illuminated by a light source to obtain the original image data of the sample; it is also used to acquire images of the sample after it has been removed but the light source is still illuminating the sample to obtain light source image data; and it is also used to acquire images of the sample after it has been removed and the light source is turned off to obtain background image data. The optical parameter performance calculation unit is used to determine the performance parameters of the sample based on the image data, the light source image data, and the background image data.

[0064] The optical performance parameters include actual focal length, focusing efficiency, and transmittance. Transmittance imaging can also be performed on the image data using the optical performance parameter calculation unit. A background image refers to an image formed by taking a picture of the stage without a light source or sample; a light source image refers to an image formed by taking a picture of the stage with a light source on, without a sample; and a lens image refers to an image formed by taking a picture of the stage with a light source on, a sample on, and a camera. Figure 8 Image data of the sample, Figure 9 A background image is displayed. For example... Figure 10 The diagram shown illustrates the interface for transmitting power calculation.

[0065] Furthermore, it also includes a Fourier transform and preview module connected to the scanning control unit 21, used to determine the measurement position. The scanning control unit 21 is used to acquire reference image data of the sample by image acquisition. The Fourier transform and preview module performs a Fourier transform on the reference image data to generate a spatial spectrum of the sample. The position of the sample is adjusted based on the sharpness of the spatial spectrum. The sharpness is characterized by quantifying the intensity of high-frequency components or edge sharpness of the spatial spectrum. Through iterative adjustment, until the sharpness reaches the optimal value, the spatial position of the sample at this time is determined as the measurement position.

[0066] Furthermore, the focal plane found during the field sweeping and superposition process of the field distribution calculation unit 23 can be used as a coarse adjustment reference, and then the image after Fourier transform can be used for fine adjustment of sharpness.

[0067] like Figure 2 As shown, the display interface has two display areas: a real-time image display area and an FFT image display area. The real-time image display area is used to display the image data acquired by the camera, while the FFT image display area is used to display the image after Fourier transform. The Fourier transform and preview module is connected to the acquisition control unit and performs Fourier transform on the image data of the acquired sample. The Fourier transform and preview module is also used to display the Fourier transformed image in the FFT image display area. By displaying the Fourier transformed image in real time, it is helpful to adjust the optical path and set the parameters of the mechanism positioning module.

[0068] The system allows for both manual and automatic adjustment of the sample's position and / or the lens angle in the detection equipment based on the displayed Fourier transform image. An automatic adjustment button is located on the position control panel, enabling automatic adjustment. In automatic adjustment mode, the mechanism positioning module first adjusts its position along the XY axis by a certain distance. Then, the camera acquires an image, and the corresponding Fourier transform image is displayed in real-time on the FFT screen display area. This image is compared to the previous Fourier transform image to obtain changes in brightness and sharpness. The position is then reversed, and the comparison continues. If the brightness and sharpness requirements are still not met, the lens angle is rotated and adjusted until the Fourier transform image meets the required brightness and sharpness. The manual adjustment mode follows the same steps as the automatic adjustment, adjusting the position of the mechanism positioning module and the lens angle until the Fourier transform image meets the requirements.

[0069] The detection system of this invention further includes a field analysis unit, a focusing efficiency calculation unit, and a transmittance calculation unit. The field analysis unit performs field distribution calculation, focusing plane display, PSF & MTF calculation, and resolution calculation based on the image data obtained from the field scan. The focusing efficiency calculation unit calculates the focusing efficiency value of the lens based on the image data, the selected area, and the lens diameter parameters. Figure 7 The figure shows the calculation results curves of PSF and MTF. The above-mentioned field distribution calculation, PSF & MTF calculation, and focusing efficiency calculation are performed by reconstructing the theoretical phase and optical field using measured parameters and comparing the difference with the actual measurement results to obtain the corresponding calculation results. Specifically, the field distribution calculation can adopt the optical field distribution calculation method disclosed in the metasurface phase measurement method of a prior Chinese patent (application number: 202311291864.9, invention title: Metasurface Phase Measurement Method and System). The PSF & MTF calculation and focusing efficiency calculation can adopt the MTF, PSF, and focusing efficiency calculation methods disclosed in the microstructure sample detection equipment and detection method of a prior Chinese patent (application number: 202310808581.0, invention title: Microstructure Sample Detection Equipment and Detection Method).

[0070] The detection system of this invention presents the results of the data analysis layer through a human-computer interaction interface of computer application software. End users can access the microlens optical performance detection system of this invention through the human-computer interaction interface, view the real-time detection process, and view various data analysis results in the form of images, tables, reports, etc. Figure 7 As shown, the results of the sample imaging quality evaluation are displayed. Figure 11 As shown, a certain area is selected on the image after Fourier transform. Figure 11 The green circular selection box, as shown Figure 12 As shown, it displays Figure 11 Select the phase extraction result in the box. Figure 13 and Figure 14 The phase distribution and phase unfolding diagram are shown. Figure 15 The wave aberration results are displayed. Figure 16 The results of the Zernike analysis were displayed. Figure 17 The results of PSF and MTF calculations are displayed. Figure 18 The field distribution map is displayed.

[0071] The present invention also provides a method for testing the performance of optical components, which will be described below.

[0072] like Figure 20 As shown, the detection method of the present invention includes the following steps: Step S101 is executed, based on preset scanning parameters, the sample placed at the measurement position and illuminated by the light source is scanned and photographed to obtain image data of the sample at different scanning positions; then step S102 is executed. Step S102 is executed, a target region is selected from the image data, and the image data of the target region is scanned and overlaid to generate a scanned overlay map; then step S103 is executed. Perform step S103 to determine the performance parameters of the sample based on the scan overlay image.

[0073] Furthermore, when placing the sample, the sample to be measured is placed at an object plane position conjugate to the target surface of the image acquisition device (such as a camera), and then the image acquisition device is used to scan and photograph the sample.

[0074] In step S103, the performance parameters of the sample are determined, including the light field distribution, focusing, and whether there is a significant pixel difference.

[0075] In one specific embodiment of the present invention, the detection method further includes determining the focal position of the sample based on a scanned overlay image, and then determining the focal plane of the sample; and determining the performance parameters of the sample based on the focal plane. The performance parameters of the sample determined based on the focal plane include focal plane distribution, PSF (point spread function), MTF (modulation transfer function), relative focusing efficiency, and imaging resolution.

[0076] And / or, display in real time at least one of the following: image data of the sample, the generation process of the scan overlay map, and the focal plane of the sample.

[0077] In one specific embodiment of the present invention, the set sweep parameters include the range of sample movement in the Z-axis direction and the step size of movement. And / or, the step of setting the target area includes: drawing a selection box that can enclose a bright spot on the image data of the displayed sample; specifying a straight line path within the selection box; obtaining the coordinate set of all pixels constituting the straight line path; and using the area corresponding to the coordinate set as the target area; preferably, specifying a set of X-axis and Y-axis coordinates within the selection box (i.e., specifying two straight line paths), wherein the X-axis coordinate set and the Y-axis coordinate set are located on a straight line, and are used as the target area; And / or, based on preset scanning parameters, perform scanning and imaging of the sample to obtain image data of the sample at different scanning positions, including: based on preset scanning parameters, controlling the relative movement between the image acquisition device and the sample to perform scanning and imaging, thereby obtaining image data of the sample at different scanning positions.

[0078] A second embodiment of the detection method of the present invention, as follows: Figure 21 As shown, the detection method includes the following steps: Step S201 is executed to acquire an image of the sample placed at the measurement position and illuminated by the light source, thereby obtaining the raw image data of the sample; then step S202 is executed. Execute step S202, remove the sample and keep the light source illuminating the image to obtain light source image data; then execute step S203; Execute step S203, remove the sample and turn off the light source to acquire image data, and then execute step S204; Step S204 is executed to determine the performance parameters of the sample based on image data, light source image data, and background image data.

[0079] In step S204, the transmittance of the sample can be calculated based on the corresponding light source image, background image, and sample image data.

[0080] Furthermore, it also includes: acquiring images of the sample to obtain reference image data of the sample; Perform a Fourier transform on the reference image data to generate the spatial spectrum of the sample; The position of the sample is adjusted based on the sharpness of the spatial spectrum, which is characterized by quantifying the intensity of high-frequency components or edge sharpness of the spatial spectrum. Through iterative adjustments until the clarity reaches its optimal value, the spatial position of the sample at this point is determined as the measurement position.

[0081] The present invention also provides a computer program product, comprising computer instructions or a computer program, which, when at least a portion of the computer instructions or computer program is executed by a processor, can implement the microlens optical performance detection method described in this specification. In some embodiments, the computer program product may involve only a computer program, which may be carried on a storage medium or a processing device. In other embodiments, the computer program product may also be a storage medium or a processing device containing the aforementioned computer program. The processing device may include one or more processors, and the storage medium.

[0082] The present invention has been described in detail above with reference to the accompanying drawings and embodiments. Those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention, and the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. A method for testing the performance of an optical element, characterized in that, The method includes: Based on preset scanning parameters, the sample placed at the measurement position and illuminated by the light source is scanned and photographed to obtain image data of the sample at different scanning positions. A target region is selected from the image data, and the image data of the target region is subjected to sweep overlay processing to generate a sweep overlay map; Based on the sweep field overlay image, the performance parameters of the sample are determined.

2. The performance testing method for optical elements as described in claim 1, characterized in that, Also includes: Based on the scan overlay image, the focal position of the sample is determined, and then the focal plane of the sample is determined; Based on the focal plane, the performance parameters of the sample are determined; And / or, The image data of the sample, the generation process of the scan overlay image, and at least one of the focal plane of the sample can be displayed in real time.

3. The performance testing method for optical elements as described in claim 1, characterized in that, The set sweep parameters include the range of sample movement in the Z-axis direction and the step size of movement; And / or, Selecting a target region from the image data includes: drawing a selection box that can enclose a bright spot on the displayed image data of the sample; specifying a straight path within the selection box; obtaining the coordinate set of all pixels constituting the straight path; and taking the region corresponding to the coordinate set as the target region. And / or, The step of scanning and photographing the sample based on preset scanning parameters to obtain image data of the sample at different scanning positions includes: controlling the relative movement between the image acquisition device and the sample to perform scanning and photographing based on the preset scanning parameters, thereby obtaining image data of the sample at different scanning positions.

4. A method for testing the performance of an optical element, characterized in that, The method includes: Images are acquired from the sample placed at the measurement position and illuminated by the light source to obtain the raw image data of the sample; Remove the sample and continue illuminating the light source to acquire image data of the light source; Remove the sample and turn off the light source to acquire background image data; The performance parameters of the sample are determined based on the image data, the light source image data, and the background image data.

5. The performance testing method for optical elements as described in claim 4, characterized in that, Also includes: Image acquisition is performed on the sample to obtain reference image data of the sample; Perform a Fourier transform on the reference image data to generate a spatial spectrum of the sample; The position of the sample is adjusted based on the sharpness of the spatial spectrum, which is characterized by quantifying the intensity of high-frequency components or edge sharpness of the spatial spectrum. Through iterative adjustments, until the clarity reaches the optimal value, the spatial position of the sample at this point is determined as the measurement position.

6. A computer program product, characterized in that, It includes computer instructions or computer programs, which, when executed by a processor in at least a portion, enable the implementation of the performance testing method or phase analysis method for the optical element as described in any one of claims 1 to 5.

7. A performance testing system for an optical element, characterized in that, The system includes: The sweeping parameter setting unit is used to set the sweeping parameters; The sweeping control unit is connected to the sweeping parameter setting unit and is used to sweep and photograph the sample placed at the measurement position and illuminated by the light source according to the set sweeping parameters to obtain image data of the sample at different sweeping positions. A field distribution calculation unit, connected to the scanning control unit, is used to select a target region in the image data and perform scanning overlay processing on the image data of the target region to generate a scanning overlay map. Based on the scanning overlay map, the performance parameters of the sample are determined.

8. The performance testing system for optical elements as described in claim 7, characterized in that, The field distribution calculation unit is also used to determine the focal position of the sample based on the scanned field overlay map, and then determine the focal plane of the sample; and to determine the performance parameters of the sample based on the focal plane. And / or, It also includes a display unit connected to the scanning control unit and the field distribution calculation unit, for displaying in real time at least one of the image data of the sample, the generation process of the scanning overlay map, and the focal plane of the sample.

9. The performance testing system for optical elements as described in claim 7, characterized in that, The sweeping parameters set by the sweeping parameter setting unit include the sample's movement range and movement step size in the Z-axis direction. And / or, It also includes an input unit connected to the field distribution calculation unit; The input unit is used to input a selection box that can enclose a bright spot, drawn on the displayed image data of the sample; The field distribution calculation unit is used to specify a straight path within the selection box, obtain the coordinate set of all pixels constituting the straight path, and take the region corresponding to the coordinate set as the target region. And / or, The scanning control unit is used to control the relative movement between the image acquisition device and the sample based on the preset scanning parameters to perform scanning and imaging, thereby acquiring image data of the sample at different scanning positions.

10. A performance testing system for an optical element, characterized in that, The system includes: The scanning control unit is used to acquire images of a sample placed at the measurement position and illuminated by a light source to obtain the raw image data of the sample; it is also used to acquire images of the sample after it has been removed while the light source is still illuminating the sample to obtain the light source image data; and it is also used to acquire images of the sample after it has been removed and the light source is turned off to obtain the background image data. An optical parameter performance calculation unit, connected to the scanning control unit, is used to determine the performance parameters of the sample based on the image data, the light source image data, and the background image data.

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