Manual taking tool for mask plate of photoetching machine

Abstract

The invention discloses a manual taking tool for a mask plate of a photoetching machine, and the tool comprises a lower layer structure which comprises a mask plate leading-in part and a mask plate bearing part which are connected with each other; the mask leading-in component is located at the front end. The upper-layer structure is positioned above the lower-layer structure and comprises a mask plate moving part formed by a screw rod and a screw rod sleeve, the screw rod sleeve is sleeved on the screw rod, and the inner side surface of the screw rod sleeve is used for being in contact with the side surface of the mask plate and clamping the mask plate; and the screw rod rotates to drive the screw rod sleeve to move so as to drive the mask plate to move. According to the invention, the risk of manually taking the mask from an area with a narrow manual operation space can be reduced, the safety of the mask can be ensured, and the error risk caused by manual operation can be avoided.

Description

Technical Field

[0001] This invention relates to the field of semiconductor integrated circuit manufacturing, and in particular to a manual tool for handling photolithography machine reticles. Background Technology

[0002] To ensure high production efficiency, advanced lithography machines are designed with an internal mask storage mechanism (IRL) featuring a multi-layered, tower-like structure. Figure 1 The diagram shown is a schematic of the internal mask storage mechanism of a conventional lithography machine. An internal mask storage mechanism 101 includes six grid structures 102, each of which is used to hold a mask 201. When two... Figure 1 When the internal mask storage mechanism 101 shown is used, it can store 12 masks. This avoids the need to frequently select the working mask 201 from outside the machine, thereby ensuring the continuous operation of the lithography machine and improving work efficiency.

[0003] In actual operation, if the lithography machine malfunctions, the internal mask storage mechanism 101 (IRL) cannot automatically retrieve the internal mask 201, requiring manual removal. The gap between the internal mask and the hardware structure in the IRL is extremely small, approximately 5mm horizontally and 2.5mm vertically, resulting in very limited space for manual operation and posing a significant risk. Furthermore, human error during manual operation can easily damage the mask 201. The mask 201 is expensive, costing approximately 1 million RMB per unit. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a manual tool for picking up photolithography masks, which can reduce the risk of manually picking up masks from a confined area, ensure the safety of the mask and avoid the error risk caused by human operation.

[0005] To solve the above-mentioned technical problems, the lithography machine mask manual handling tool provided by the present invention includes: The lower structure includes a mask inlet component and a mask receiving component connected together; the mask inlet component is located at the front end.

[0006] The upper structure located above the lower structure includes a mask moving component formed by a lead screw and a lead screw sleeve, the lead screw sleeve being sleeved on the lead screw, the inner side of the lead screw sleeve being used to contact and clamp the side of the mask; the rotation of the lead screw drives the lead screw sleeve to move, thereby driving the mask to move.

[0007] A further improvement is that the mask entry component has a ramp structure.

[0008] A further improvement is that the top surface of the mask receiving component is a flat structure, and the highest point of the ramp structure is level with the top surface of the mask receiving component.

[0009] A further improvement is that the lower structure includes at least two first strip structures, each of which includes a corresponding mask introduction component and a mask receiving component.

[0010] A further improvement is that the material of the lead screw sleeve includes rubber.

[0011] A further improvement is that the ends of each of the first strip structures are fixed to the end panel.

[0012] A further improvement is that the upper structure includes two mask moving parts, the inner sides of the lead screw sleeves of the two mask moving parts being opposite to and used to clamp the mask from both sides of the mask when the mask is picked up.

[0013] A further improvement is that each of the lead screws is connected to a motor, and the motor drives the lead screw to rotate.

[0014] A further improvement is that the motor is located on the outside of the end panel.

[0015] A further improvement includes: two side end panels, which are respectively fixed to both ends of the end panel and form a frame structure with the end panel having a front opening. The inner frame size of the frame structure is set according to the size of the mask to ensure that the mask fits properly when it is picked up.

[0016] A further improvement is that the first strip structure on both sides is fixed together with the side end panel on the corresponding side.

[0017] A further improvement is that the material of each of the first strip structures, each of the side end panels, and the end panel includes acrylic.

[0018] A further improvement is that each of the mask moving parts is respectively disposed on the inner side of the inner side of the corresponding side panel.

[0019] A further improvement includes: two limiting devices, which are respectively disposed on the first strip structure on both sides, and the distance between the front end face of each limiting device and the front end face of the mask guide component is greater than or equal to the side length of the mask.

[0020] A further improvement is that the limiting device uses a rubber ring and is fitted and fixed on the first strip structure.

[0021] A further improvement is that multiple motor control buttons are provided on the end panel, including a forward button and a backward button, which are used to manually control the movement of the mask when picking up the mask.

[0022] A further improvement is that a handle is also provided on the end panel.

[0023] A further improvement is that the handle is composed of a strip-shaped rod.

[0024] This invention provides a manual mask handling tool for lithography machines that eliminates the need for direct hand handling of the mask. Instead, the lower structure guides the mask in and supports its bottom, while the upper structure's mask-moving component uses a lead screw sleeve to contact and clamp the mask's side. Rotation of the lead screw moves the sleeve and the mask, thus enabling the mask to be placed or removed. Therefore, the tool's overall frame remains stationary during mask handling; only the lead screw needs to be rotated. This eliminates the risks associated with manual mask handling in confined spaces and mitigates human error. Consequently, this invention reduces the risks of manually handling masks in limited spaces, ensuring mask safety and avoiding errors caused by human error. Attached Figure Description

[0025] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments: Figure 1 This is a schematic diagram of the internal mask storage mechanism of an existing lithography machine; Figure 2 This is a three-dimensional structural schematic diagram of the manual photomask handling tool of the lithography machine according to an embodiment of the present invention; Figure 3 This is an enlarged view of the front end area of ​​the manual photomask handling tool in an embodiment of the present invention; Figure 4 This is an enlarged view of the end region of the manual photomask handling tool in an embodiment of the present invention. Detailed Implementation

[0026] like Figure 2 The diagram shown is a three-dimensional structural schematic of the manual mask handling tool for a lithography machine according to an embodiment of the present invention; as shown... Figure 3 The image shown is an enlarged view of the front end area of ​​the manual mask-handling tool in an embodiment of the present invention; as shown... Figure 4 The image shown is an enlarged view of the end region of the manual photomask handling tool of an embodiment of the present invention; the manual photomask handling tool of an embodiment of the present invention includes: The lower structure includes a mask inlet component 301a and a mask receiving component 301b connected to each other; the mask inlet component 301a is located at the front end.

[0027] In embodiments of the present invention, such as Figure 3 As shown, the mask plate import component 301a has a ramp structure.

[0028] The top surface of the mask receiving component 301b is a flat structure, and the highest point of the ramp structure is level with the top surface of the mask receiving component 301b.

[0029] Back Figure 2 As shown, the lower structure includes at least two first strip structures 301, each of which includes a corresponding mask inlet component 301a and a mask receiving component 301b.

[0030] The upper structure located above the lower structure includes a mask moving component 302 formed by a lead screw 302a and a lead screw sleeve 302b. The lead screw sleeve 302b is sleeved on the lead screw 302a, and the inner side of the lead screw sleeve 302b is used to contact and clamp the side of the mask 201. The rotation of the lead screw 302a drives the lead screw sleeve 302b to move, thereby driving the mask 201 to move.

[0031] In this embodiment of the invention, the material of the lead screw sleeve 302b includes rubber.

[0032] In embodiments of the present invention, such as Figure 2 As shown, the ends of each of the first strip structures 301 are fixed to the end panel 303.

[0033] The upper structure includes two mask moving parts 302, the inner sides of the lead screw sleeves 302b of the two mask moving parts 302 being opposite to and used to clamp the mask 201 from both sides when the mask 201 is picked up.

[0034] Each of the lead screws 302a is connected to a motor 305, and the motor 305 drives the lead screw 302a to rotate.

[0035] The motor 305 is located on the outside of the end panel 303.

[0036] In this embodiment of the invention, it further includes: two side end panels 304, which are respectively fixed to both ends of the end panel 303 and form a frame structure with the end panel 303 having a front opening. The inner frame size of the frame structure is set according to the size of the mask 201 to ensure that it fits the mask 201 when it is picked up. Figure 2 As shown, when the mask plate 201 is picked up, the mask plate 201 will enter the frame structure from the front opening and move along the ends of the mask plate inlet component 301a and the mask plate receiving component 301b. The movement is achieved by rotating the lead screw 302a.

[0037] In this embodiment of the invention, the first strip structure 301 on both sides is fixed together with the side end panel 304 on the corresponding side.

[0038] The material of each of the first strip structures 301, each of the side end panels 304 and the end panel 303 includes acrylic.

[0039] Each of the mask plate moving parts 302 is respectively disposed on the inner side of the inner side of the corresponding side panel 304.

[0040] It also includes two limiting devices 306, which are respectively disposed on the first strip structure 301 on both sides. The distance between the front end face of each limiting device 306 and the front end face of the mask guide member 301a is greater than or equal to the side length of the mask 201. In some embodiments, the limiting device 306 is a rubber ring and is sleeved and fixed on the first strip structure 301. In other embodiments, the limiting device 306 may also use other structures and materials that can achieve limiting.

[0041] like Figure 4 As shown, a plurality of motor control buttons are provided on the end panel 303, and the motor control buttons are located in the dashed box 308. The motor control buttons include a forward button and a backward button, and the motor control buttons are used to manually control the movement of the mask 201 when the mask 201 is picked up.

[0042] A handle 307 is also provided on the end panel 303. In this embodiment of the invention, the handle 307 is composed of a strip. In other embodiments, the handle 307 may also adopt other suitable structures.

[0043] In this embodiment of the invention, the manual mask handling tool for the lithography machine does not require direct hand handling of the mask 201. Instead, the lower structure facilitates the introduction of the mask 201 and provides support for its bottom. The upper structure's mask moving component 302 uses a lead screw sleeve 302b to contact and clamp the side of the mask 201. The rotation of the lead screw 302a moves the lead screw sleeve 302b and the mask 201. The tool frame does not move when picking up or placing the mask 201; only the lead screw 302a needs to be rotated. Therefore, the risk of difficulty in operating the mask 201 in a confined space when picking it up by hand is eliminated, and human error is avoided. Thus, the present invention can reduce the risk of manually picking up the mask 201 from a confined area, ensure the safety of the mask 201, and avoid the risk of error caused by human operation.

[0044] The manual mask handling tool for lithography machines in this embodiment of the invention ensures the safety of the mask and avoids the risk of errors caused by human operation.

[0045] The embodiments of this invention primarily address the technical problems identified by the present invention through targeted improvements. By measuring the IRL (Integrated Photomask) and the dimensions of the photomask (mask plate), and designing a fixture based on the motion trajectory, this invention provides a manual photomask handling tool for lithography machines. This tool achieves the goals of photomask fit, automatic dragging, error-proofing, and safe bottom support. In the manual photomask handling tool of this invention, the inner frame dimensions of the frame structure are designed according to the photomask dimensions. For example, the inner frame dimensions are 152*152*6mm (length*width*height), ensuring the tool fits the photomask.

[0046] The tool in this embodiment of the invention also features a two-layer structure. The lower layer has a protruding design with a ramp at the front end; that is, the mask plate inlet component 301a is a ramp structure that inlets the mask plate and supports it, serving to receive the mask plate. The mask plate receiving component 301b is used to receive the mask plate. The upper layer is a stepper motor lead screw (lead screw 302a) with a rubber sleeve (lead screw sleeve 302b) on the outside, used to contact the side of the mask plate and move the mask plate along with the lead screw.

[0047] In this embodiment of the invention, a limiting device 306 is installed at a position 152mm away from the front end of the tool. This is achieved by wrapping a rubber ring around the acrylic material. The purpose is to limit the movement of the mask plate 201 when the motor 305 drives it, so as to prevent the mask plate 201 from moving excessively and causing an impact.

[0048] In this embodiment of the invention, a stepper motor control button is installed at the end of the tool. It has two function keys: forward and backward. The motor is manually and at a constant speed to drive the mask to move, ensuring safety.

[0049] The embodiments of the present invention can solve the problem of damage rate during manual removal and ensure the safety of the mask.

[0050] The present invention has been described in detail above through specific embodiments, but these are not intended to limit the invention. Many modifications and improvements can be made by those skilled in the art without departing from the principles of the invention, and these should also be considered within the scope of protection of the present invention.

Claims

1. A manual tool for handling photolithography machine photomasks, characterized in that, include: The lower structure includes a mask inlet component and a mask receiving component connected together; the mask inlet component is located at the front end; The upper structure located above the lower structure includes a mask moving component formed by a lead screw and a lead screw sleeve, the lead screw sleeve being sleeved on the lead screw, the inner side of the lead screw sleeve being used to contact and clamp the side of the mask; the rotation of the lead screw drives the lead screw sleeve to move, thereby driving the mask to move.

2. The manual photomask handling tool as described in claim 1, characterized in that: The mask entry component has a ramp structure.

3. The manual photomask handling tool as described in claim 2, characterized in that: The top surface of the mask receiving component is flat, and the highest point of the ramp structure is level with the top surface of the mask receiving component.

4. The manual photomask handling tool as described in claim 3, characterized in that: The lower structure includes at least two first strip structures, each of which includes a corresponding mask import component and a mask receiving component.

5. The manual photomask handling tool as described in claim 1, characterized in that: The material of the lead screw sleeve includes rubber.

6. The manual photomask handling tool as described in claim 1, characterized in that: The ends of each of the first strip structures are fixed to the end panel.

7. The manual photomask handling tool as described in claim 6, characterized in that: The upper structure includes two mask moving parts, the inner sides of the lead screw sleeves of the two mask moving parts being opposite to and used to clamp the mask from both sides of the mask when the mask is picked up.

8. The manual photomask handling tool as described in claim 7, characterized in that: Each of the lead screws is connected to a motor, and the motor drives the lead screw to rotate.

9. The manual photomask handling tool as described in claim 8, characterized in that: The motor is located on the outside of the end panel.

10. The manual photomask handling tool as described in claim 8, characterized in that, Also includes: Two side panels are respectively fixed to both ends of the end panel and together with the end panel form a frame structure with a front opening. The inner frame size of the frame structure is set according to the size of the mask to ensure that it meets the requirements of the mask when it is picked up.

11. The manual photomask handling tool as described in claim 10, characterized in that: The first strip structure on each side is fixed to the side end panel on the corresponding side.

12. The manual photomask handling tool as described in claim 11, characterized in that: The material of each of the first strip structures, each of the side panels and the end panels includes acrylic.

13. The manual photomask handling tool as described in claim 10, characterized in that: Each of the aforementioned mask moving components is respectively disposed on the inner side of the inner side of the corresponding side panel.

14. The manual photomask handling tool as described in claim 11, characterized in that, It also includes: two limiting devices, which are respectively disposed on the first strip structure on both sides, and the distance between the front end face of each limiting device and the front end face of the mask guide component is greater than or equal to the side length of the mask.

15. The manual photomask handling tool as described in claim 14, characterized in that: The limiting device uses a rubber ring and is fitted and fixed on the first strip structure.

16. The manual photomask handling tool as described in claim 9, characterized in that: Multiple motor control buttons are provided on the end panel, including a forward button and a backward button. The motor control buttons are used to manually control the movement of the mask when picking up the mask.

17. The manual photomask handling tool as described in claim 16, characterized in that: A handle is also provided on the end panel.

18. The manual photomask handling tool as described in claim 17, characterized in that: The handle consists of a strip-shaped rod.

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