Laser direct writing imaging system and method based on single-axis micro-displacement device

Abstract

The embodiment of the invention provides a laser direct-writing imaging system and method based on a single-axis micro-displacement device, which are used for realizing laser direct-writing imaging of an uneven exposure surface and improving the precision of laser direct-writing imaging. The method provided by the embodiment of the invention comprises the following steps: acquiring 3D surface topography model data of a substrate; according to the 3D surface topography model data, Z-axis target coordinates of exposure point positions of the single-axis micro-displacement device units on a scanning path are generated; issuing Z-axis target coordinates of a plurality of exposure points to each edge computing node, controlling the mobile platform to perform uniform linear scanning motion, and controlling each edge computing node to query a locally stored Z-axis target coordinate query table in real time according to the physical coordinates of the current single-axis micro-displacement device unit; and adjusting the position of the laser light source in the Z-axis direction to be consistent with the Z-axis target coordinate in real time according to the query result, and controlling the laser light source to expose the position of the exposure point.

Description

Technical Field

[0001] This invention relates to the field of data processing technology, and in particular to a laser direct-write imaging system and method based on a single-axis micro-displacement device. Background Technology

[0002] Laser direct writing imaging devices in related technologies (such as the laser direct plate-making device for planar screen printing plates disclosed in application number: 201310084860.3) control the laser array to scan the photosensitive coating on the exposure surface back and forth in a preset horizontal direction in the plane containing the X and Y axes.

[0003] The applicant discovered that in the relevant technology, the distance between each laser in the laser array and the vertical direction of the exposure surface is fixed. If the exposure surface is uneven, or the exposure surface itself is uneven, the size of the light spot on the exposure surface will change due to the change in object distance, resulting in a loss of exposure accuracy. Alternatively, existing laser direct writing imaging equipment cannot be used for exposure imaging on uneven exposure surfaces at all. Summary of the Invention

[0004] This invention provides a laser direct-write imaging system and method based on a single-axis micro-displacement device, which is used to realize laser direct-write imaging on uneven exposure surfaces and improve the accuracy of laser direct-write imaging.

[0005] The first aspect of this invention provides a laser direct-write imaging system based on a single-axis micro-displacement device, which may include:

[0006] A mobile platform is used to carry a single-axis micro-displacement device array composed of multiple arrayed single-axis micro-displacement device units, and to adjust the position of the single-axis micro-displacement device array in the X and Y axis directions; the single-axis micro-displacement device unit is used to adjust the position of the laser source in the Z axis direction, the Z axis being perpendicular to the plane containing the X and Y axes;

[0007] The distributed edge computing module contains multiple edge computing nodes; each single-axis micro-displacement device unit or each group of single-axis micro-displacement device units is connected to a configured independent edge computing node.

[0008] The edge computing node is configured to: receive a Z-axis target coordinate lookup table of multiple exposure points sent by the host computer; during the uniform scanning exposure stage, query the locally stored Z-axis target coordinate lookup table in real time according to the physical coordinates of the current single-axis micro-displacement device unit; adjust the position of the laser source in the Z-axis direction in real time according to the query result to keep it consistent with the queried Z-axis target coordinates, and control the laser source to expose the position of the exposure point.

[0009] Optionally, as a possible implementation, the laser direct-write imaging system based on a single-axis micro-displacement device in this embodiment of the invention may further include: a host computer, wherein the host computer is configured to:

[0010] Before uniform scanning exposure, acquire 3D surface morphology model data of the substrate;

[0011] Based on the 3D surface morphology model data, the Z-axis target coordinates of each exposure point position of each lithography head on the scanning path are generated;

[0012] Based on the physical layout of the single-axis micro-displacement device array, a lookup table is generated for the X and Y mounting reference coordinates of each single-axis micro-displacement device unit and the Z-axis target coordinates of multiple exposure points.

[0013] Optionally, as a possible implementation, in this embodiment of the invention, the edge computing node can also be configured as:

[0014] Load the static physical installation deviation data of each laser source in the X-axis direction;

[0015] Based on the current Z-axis depth, query the dynamic yaw lookup table to obtain the X-axis dynamic yaw error caused by the Z-axis motion;

[0016] The static physical installation deviation data and the X-axis dynamic yaw error are superimposed at high frequency to obtain the comprehensive spatial displacement misalignment.

[0017] The overall spatial displacement misalignment is converted into a time offset of the laser pulse, and the laser is controlled to emit exposure pulses according to the time offset to eliminate the overall spatial displacement misalignment.

[0018] Optionally, as a possible implementation, in this embodiment of the invention, the edge computing node can also be configured as:

[0019] When the control system determines that the single-axis micro-displacement device has received a large-amplitude tracking focus command and is in a transient defocusing process of high-speed climbing or descending, it synchronously increases the instantaneous emission power of the corresponding laser or increases the pulse width.

[0020] Once the uniaxial micro-displacement device has stabilized and reached the focal plane, the laser power is restored to the rated power to ensure that the total lithography energy received on any terrain surface remains consistent.

[0021] Optionally, as a possible implementation, in this embodiment of the invention, the edge computing node is implemented using an MCU or an FPGA.

[0022] A second aspect of this invention provides a laser direct-write imaging method based on a uniaxial micro-displacement device, which may include:

[0023] The substrate's topographic changes are detected by displacement sensors, and 3D surface morphology model data of the substrate is obtained.

[0024] Based on the 3D surface morphology model data, the Z-axis target coordinates of each single-axis micro-displacement device unit at each position on the scanning path are generated;

[0025] The system sends Z-axis target coordinates of multiple exposure points to each edge computing node, controls the moving platform to perform uniform linear scanning motion, and controls each edge computing node to query the locally stored Z-axis target coordinate lookup table in real time according to the physical coordinates of the current single-axis micro-displacement device unit. Based on the query results, the system adjusts the position of the laser source in the Z-axis direction in real time to keep it consistent with the Z-axis target coordinates, and controls the laser source to expose the position of the exposure point.

[0026] Optionally, as a possible implementation, the laser direct-write imaging method based on a uniaxial micro-displacement device in this embodiment of the invention may further include:

[0027] When it is determined that the single-axis micro-displacement device has received a large-amplitude tracking focus command and is in a transient defocusing process of high-speed climbing or descending, the instantaneous emission power of the corresponding laser is increased or the pulse width is increased simultaneously.

[0028] After the single-axis micro-displacement device has stably reached the focal plane, the laser power is restored to the rated power to ensure that the total lithography energy received by the exposure surface remains consistent.

[0029] Optionally, as a possible implementation, the laser direct-write imaging method based on a uniaxial micro-displacement device in this embodiment of the invention may further include:

[0030] Load the static physical installation deviation data of each laser source in the X-axis direction;

[0031] Based on the current Z-axis depth, query the dynamic yaw lookup table to obtain the X-axis dynamic yaw error caused by the Z-axis motion;

[0032] The static physical installation deviation data and the X-axis dynamic yaw error are superimposed at high frequency to obtain the comprehensive spatial displacement misalignment.

[0033] The overall spatial displacement misalignment is converted into a time offset of the laser pulse, and the laser is controlled to emit exposure pulses according to the time offset to eliminate the overall spatial displacement misalignment.

[0034] Optionally, as a possible implementation, the laser direct-write imaging method based on a uniaxial micro-displacement device in this embodiment of the invention may further include:

[0035] Based on the repeatability characteristics of single-axis micro-displacement devices, an offline calibration program is executed to obtain the motor-specific current level and displacement nonlinear hysteresis curve data of each single-axis micro-displacement device as a displacement mapping table.

[0036] The displacement mapping table is stored in the edge computing node;

[0037] When adjusting the position of the laser source in the Z-axis direction, the terrain change command detected by the displacement sensor is received, and the terrain change command is filtered by a delay de-jitter algorithm with a specific step length to suppress millisecond-level natural jitter.

[0038] The displacement mapping table is queried according to the filtered terrain change command to generate an open-loop feedforward drive signal. The open-loop feedforward drive signal is used to drive the single-axis micro-displacement device to perform the adjustment of the laser source position in the Z-axis direction, so as to realize Z-axis open-loop feedforward control without real-time position feedback.

[0039] As can be seen from the above technical solutions, the embodiments of the present invention have the following advantages:

[0040] In this embodiment of the invention, the position of the focal point (i.e., laser spot) of the laser source array can be adjusted in the Z-axis direction based on a single-axis micro-displacement device array. During the uniform scanning exposure stage, the Z-axis target coordinates of multiple exposure points are queried in real time based on the physical coordinates of the current single-axis micro-displacement device unit; the position of the laser source in the Z-axis direction is adjusted in real time to maintain consistency with the Z-axis target coordinates, and the laser source is controlled to expose the position of the exposure point. Therefore, the laser direct-write imaging system based on a single-axis micro-displacement device in this embodiment can dynamically adapt the position of the focal point (i.e., laser spot) of the laser source array according to the 3D surface morphology of the substrate surface of the exposure surface, avoiding the loss of exposure accuracy caused by the change in the spot size of the exposure surface due to the change in object distance, and enabling exposure imaging on uneven exposure surfaces, thus expanding the application range of laser direct-write imaging. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of an embodiment of a laser direct-write imaging system based on a single-axis micro-displacement device according to the present invention;

[0042] Figure 2 This is a schematic diagram of one embodiment of a laser direct-write imaging method based on a single-axis micro-displacement device according to the present invention. Detailed Implementation

[0043] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0044] The terms "first," "second," "third," "fourth," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0045] In the description of this application, unless otherwise stated, "a plurality of" means two or more. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" shall be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection; as a mechanical connection or an electrical connection; as a direct connection or an indirect connection through an intermediate medium; or as a connection within two components.

[0046] For ease of understanding, the specific processes in the embodiments of the present invention are described below. Please refer to [link / reference]. Figure 1 An embodiment of a laser direct-write imaging system based on a single-axis micro-displacement device in this invention may include: a mobile platform (not shown in the figure), a single-axis micro-displacement device array 20, and a distributed edge computing module 30.

[0047] A mobile platform is used to carry a single-axis micro-displacement device array 20 and adjust the position of the single-axis micro-displacement device array in the X and Y axis directions. The specific mechanical structure can refer to the existing technology and is not limited here.

[0048] The single-axis micro-displacement device array 20 may include multiple arrayed single-axis micro-displacement device units 201. The single-axis micro-displacement device units 201 are used to adjust the position of the laser source in the Z-axis direction, wherein the Z-axis is perpendicular to the plane containing the X and Y axes. The single-axis micro-displacement device (e.g., a voice coil motor, VCM) can adjust the height of the focal point in the Z-axis direction by moving the focusing lens or by moving the laser source as a whole.

[0049] The distributed edge computing module 30 includes multiple edge computing nodes 301; each single-axis micro-displacement device unit 201 or each group of single-axis micro-displacement device units 201 is connected to a configured independent edge computing node 301. Optionally, the edge computing nodes are implemented using an MCU or an FPGA.

[0050] The edge computing node 301 is configured to: receive a Z-axis target coordinate lookup table of multiple exposure points sent by the host computer; during the uniform scanning exposure stage, query the locally stored Z-axis target coordinate lookup table in real time according to the physical coordinates of the current single-axis micro-displacement device unit; adjust the position of the laser source in the Z-axis direction in real time according to the query result to keep it consistent with the queried Z-axis target coordinates, and control the laser source to expose the position of the exposure point.

[0051] In this embodiment of the invention, the laser direct-write imaging system based on a single-axis micro-displacement device array can adjust the position of the focal point (i.e., laser spot) of the laser source array in the Z-axis direction. During the uniform scanning exposure stage, the Z-axis target coordinates of multiple exposure points are queried in real time based on the physical coordinates of the current single-axis micro-displacement device unit. Based on the query results, the position of the laser source in the Z-axis direction is adjusted in real time to maintain consistency with the Z-axis target coordinates, and the laser source is controlled to expose the exposure points. Therefore, the laser direct-write imaging system based on a single-axis micro-displacement device in this embodiment can dynamically adapt the position of the focal point (i.e., laser spot) of the laser source array according to the 3D surface morphology of the substrate surface to avoid exposure accuracy loss caused by changes in the spot size of the exposure surface due to changes in object distance. This allows for exposure imaging on uneven exposure surfaces, expanding the application range of laser direct-write imaging.

[0052] Optionally, in the above Figure 1 Based on the embodiments shown, the laser direct-write imaging system based on single-axis micro-displacement devices in this application embodiment may further include: a host computer configured to: acquire 3D surface morphology model data of the substrate before uniform scanning exposure; generate Z-axis target coordinates of each lithography head at each position on the scanning path based on the 3D surface morphology model data; and generate X and Y mounting reference coordinates of each single-axis micro-displacement device unit and a lookup table of Z-axis target coordinates of multiple exposure points based on the physical arrangement of the single-axis micro-displacement device array.

[0053] Optionally, in the above Figure 1 Based on the illustrated embodiments, in the laser direct-write imaging system based on a single-axis micro-displacement device in this application embodiment, to further improve the laser imaging accuracy, the X-axis dynamic yaw error during the movement process can be corrected. The edge computing node is also configured to: load the static physical installation deviation data of each laser source in the X-axis direction; query the dynamic yaw lookup table according to the current Z-axis depth to obtain the X-axis dynamic yaw error caused by Z-axis movement; perform high-frequency superposition of the static physical installation deviation data and the X-axis dynamic yaw error to obtain the comprehensive spatial displacement misalignment; convert the comprehensive spatial displacement misalignment into the timing offset of the laser pulse, and control the laser to emit exposure pulses according to the timing offset to eliminate the comprehensive spatial displacement misalignment. For example, the comprehensive spatial displacement misalignment in the X-axis direction can be accurately converted into a microsecond / nanosecond-level delay or early emission command of the laser pulse to eliminate the comprehensive spatial displacement misalignment.

[0054] Optionally, in the above Figure 1 Based on the embodiments shown, in the laser direct-write imaging system based on a single-axis micro-displacement device in this application embodiment, in order to further improve the consistency of laser imaging, the laser energy during the focusing process can be controlled. The edge computing node is also configured to: when the control system determines that the single-axis micro-displacement device is receiving a large-amplitude focusing command and is in a transient defocusing process of high-altitude climbing or descending, synchronously increase the instantaneous emission power of the corresponding laser or increase the pulse width; after the single-axis micro-displacement device stably reaches the focal plane, restore the laser power to the rated power state to ensure that the total lithography energy received under any terrain on the exposure surface remains consistent.

[0055] For ease of understanding, the specific workflow of the laser direct-write imaging system based on a single-axis micro-displacement device will be described below. The laser direct-write imaging method based on a single-axis micro-displacement device in the embodiments of this application may include:

[0056] S201: Obtain 3D surface morphology model data of the substrate;

[0057] For example, the host computer can detect changes in the substrate topography using a displacement sensor, or it can obtain 3D surface topography model data of the substrate based on other detection methods or data query methods.

[0058] S202: Based on the 3D surface morphology model data, generate the Z-axis target coordinates of each single-axis micro-displacement device unit at each position on the scanning path;

[0059] The host computer plans the scanning path of the lithography head array on the substrate based on the lithography process requirements (such as exposure linewidth and splicing overlap rate). Typically, a raster scanning method is used, discretizing the scanning path into a sequence of target points corresponding to timestamps or position stamps. For each discrete point on the scanning path, the host computer queries the 3D surface undulation model to obtain the corresponding substrate surface height value. Combined with the nominal focal length of the lithography system, the Z-axis target coordinates of that point are calculated. The Z-axis target coordinates refer to the real-time height coordinates of the laser source required to illuminate substrates of different heights while maintaining a preset spot size along the Z-axis direction.

[0060] S203: Sends the Z-axis target coordinates of multiple exposure points to each edge computing node, controls the moving platform to perform uniform linear scanning motion, and sends focus tracking commands to each edge computing node.

[0061] The system sends Z-axis target coordinates of multiple exposure points to each edge computing node, controls the moving platform to perform uniform linear scanning motion, and sends focus tracking commands to each edge computing node. This enables each edge computing node to query the locally stored Z-axis target coordinate lookup table in real time based on the physical coordinates of the current single-axis micro-displacement device unit. Based on the query results, the system adjusts the position of the laser source in the Z-axis direction in real time to keep it consistent with the Z-axis target coordinates, and controls the laser source to expose the position of the exposure point.

[0062] Optionally, in the above Figure 2 Based on the illustrated embodiment, as a possible implementation method, in order to further improve the consistency of laser imaging, the laser direct-write imaging method based on a single-axis micro-displacement device may further include: when the control system determines that the single-axis micro-displacement device is receiving a large-amplitude tracking focus command and is in a transient defocusing process of high-speed climbing or descending, the instantaneous emission power of the corresponding laser is synchronously increased or the pulse width is increased; after the single-axis micro-displacement device stably reaches the focal plane, the laser power is restored to the rated power state to ensure that the total lithography energy received by the exposure surface remains consistent.

[0063] Optionally, in the above Figure 2 Based on the illustrated embodiment, as a possible implementation method to further improve laser imaging accuracy, the laser direct-write imaging method based on a single-axis micro-displacement device may further include: loading static physical installation deviation data of each laser source in the X-axis direction; querying a dynamic yaw lookup table according to the current Z-axis depth to obtain the X-axis dynamic yaw error caused by Z-axis motion; performing high-frequency superposition of the static physical installation deviation data and the X-axis dynamic yaw error to obtain the comprehensive spatial displacement misalignment; converting the comprehensive spatial displacement misalignment into a time-series offset of the laser pulse, and controlling the laser to emit exposure pulses according to the time-series offset to eliminate the comprehensive spatial displacement misalignment.

[0064] Optionally, in the above Figure 2 Based on the illustrated embodiment, as a possible implementation method to further improve laser imaging accuracy, the laser direct-write imaging method based on single-axis micro-displacement devices may further include: based on the repeatability characteristics of the single-axis micro-displacement devices, executing an offline calibration program to obtain the motor-specific current level and displacement nonlinear hysteresis curve data of each single-axis micro-displacement device as a displacement mapping table; storing the displacement mapping table in an edge computing node; when adjusting the position of the laser source in the Z-axis direction, receiving terrain change commands detected by the displacement sensor, and filtering the terrain change commands using a delay de-jitter algorithm with a specific step length to suppress millisecond-level natural jitter; querying the displacement mapping table according to the filtered terrain change commands to generate an open-loop feedforward drive signal, which is used to drive the single-axis micro-displacement devices to perform the action of adjusting the position of the laser source in the Z-axis direction, realizing Z-axis open-loop feedforward control without real-time position feedback. Z-axis open-loop feedforward control can eliminate the loop delay of "sensor acquisition-transmission-calculation-feedback" in traditional closed-loop control, compensate for nonlinear hysteresis using offline calibration data, and achieve the focal plane control accuracy required for industrial-grade lithography.

[0065] In the embodiments provided in this application, it should be understood that the disclosed systems, modules, and units can be implemented in other ways. For example, the system embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interfaces, devices, or units, and may be electrical, mechanical, or other forms.

[0066] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0067] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0068] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0069] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A laser direct-write imaging system based on a single-axis micro-displacement device, characterized in that, include: A mobile platform is used to carry a single-axis micro-displacement device array composed of multiple arrayed single-axis micro-displacement device units, and to adjust the position of the single-axis micro-displacement device array in the X and Y axis directions; the single-axis micro-displacement device unit is used to adjust the position of the laser source in the Z axis direction, the Z axis being perpendicular to the plane containing the X and Y axes; The distributed edge computing module contains multiple edge computing nodes; each single-axis micro-displacement device unit or each group of single-axis micro-displacement device units is connected to a configured independent edge computing node. The edge computing node is configured to receive a Z-axis target coordinate lookup table of multiple exposure points sent by the host computer; During the uniform scanning exposure stage, the Z-axis target coordinate lookup table stored locally is queried in real time based on the physical coordinates of the current single-axis micro-displacement device unit. Based on the query results, the position of the laser source in the Z-axis direction is adjusted in real time to be consistent with the queried Z-axis target coordinates, and the laser source is controlled to expose the position of the exposure point.

2. The system according to claim 1, characterized in that, Also includes: The host computer is configured as follows: Before uniform scanning exposure, acquire 3D surface morphology model data of the substrate; Based on the 3D surface morphology model data, the Z-axis target coordinates of each exposure point position of each lithography head on the scanning path are generated; Based on the physical layout of the single-axis micro-displacement device array, a lookup table is generated for the X and Y mounting reference coordinates of each single-axis micro-displacement device unit and the Z-axis target coordinates of multiple exposure points.

3. The system according to claim 1, characterized in that, The edge computing node is also configured to: Load the static physical installation deviation data of each laser source in the X-axis direction; Based on the current Z-axis depth, query the dynamic yaw lookup table to obtain the X-axis dynamic yaw error caused by the Z-axis motion; The static physical installation deviation data and the X-axis dynamic yaw error are superimposed at high frequency to obtain the comprehensive spatial displacement misalignment. The overall spatial displacement misalignment is converted into a time offset of the laser pulse, and the laser is controlled to emit exposure pulses according to the time offset to eliminate the overall spatial displacement misalignment.

4. The system according to claim 1, characterized in that, The edge computing node is also configured to: When the control system determines that the single-axis micro-displacement device has received a large-amplitude tracking focus command and is in a transient defocusing process of high-speed climbing or descending, it synchronously increases the instantaneous emission power of the corresponding laser or increases the pulse width. Once the uniaxial micro-displacement device has stabilized and reached the focal plane, the laser power is restored to the rated power to ensure that the total lithography energy received on any terrain surface remains consistent.

5. The system according to claim 3 or 4, characterized in that, The edge computing nodes are implemented using MCUs or FPGAs.

6. A laser direct-write imaging method based on a uniaxial micro-displacement device, characterized in that, The method, applied to the laser direct-write imaging system based on a single-axis micro-displacement device as described in claim 1, comprises: Obtain 3D surface topography model data of the substrate; Based on the 3D surface morphology model data, the Z-axis target coordinates of each single-axis micro-displacement device unit at each position on the scanning path are generated; The system sends Z-axis target coordinates of multiple exposure points to each edge computing node, controls the moving platform to perform uniform linear scanning motion, and controls each edge computing node to query the locally stored Z-axis target coordinate lookup table in real time according to the physical coordinates of the current single-axis micro-displacement device unit. Based on the query results, the system adjusts the position of the laser source in the Z-axis direction in real time to keep it consistent with the Z-axis target coordinates, and controls the laser source to expose the position of the exposure point.

7. The method according to claim 6, characterized in that, Also includes: When it is determined that the single-axis micro-displacement device has received a large-amplitude tracking focus command and is in a transient defocusing process of high-speed climbing or descending, the instantaneous emission power of the corresponding laser is increased or the pulse width is increased simultaneously. After the single-axis micro-displacement device has stably reached the focal plane, the laser power is restored to the rated power to ensure that the total lithography energy received by the exposure surface remains consistent.

8. The method according to claim 6, characterized in that, Also includes: Load the static physical installation deviation data of each laser source in the X-axis direction; Based on the current Z-axis depth, query the dynamic yaw lookup table to obtain the X-axis dynamic yaw error caused by the Z-axis motion; The static physical installation deviation data and the X-axis dynamic yaw error are superimposed at high frequency to obtain the comprehensive spatial displacement misalignment. The overall spatial displacement misalignment is converted into a time offset of the laser pulse, and the laser is controlled to emit exposure pulses according to the time offset to eliminate the overall spatial displacement misalignment.

9. The method according to any one of claims 6 to 8, characterized in that, The method further includes: Based on the repeatability characteristics of single-axis micro-displacement devices, an offline calibration program is executed to obtain the motor-specific current level and displacement nonlinear hysteresis curve data of each single-axis micro-displacement device as a displacement mapping table. The displacement mapping table is stored in the edge computing node; When adjusting the position of the laser source in the Z-axis direction, the terrain change command detected by the displacement sensor is received, and the terrain change command is filtered by a delay de-jitter algorithm with a specific step length to suppress millisecond-level natural jitter. The displacement mapping table is queried according to the filtered terrain change command to generate an open-loop feedforward drive signal. The open-loop feedforward drive signal is used to drive the single-axis micro-displacement device to perform the adjustment of the laser source position in the Z-axis direction, so as to realize Z-axis open-loop feedforward control without real-time position feedback.

10. The method according to claim 9, characterized in that, The edge computing nodes are implemented using MCUs or FPGAs.

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