Microminiature diaphragm valve

Abstract

The subminiature diaphragm valve comprises a parent body, the inner side of the top of the parent body is in threaded connection with an air cylinder body, the top of the air cylinder body is fixedly provided with an air cylinder cover, and the inner side of the top of the air cylinder cover is in threaded connection with a quick-plug connector; the piston assembly comprises an upper piston arranged in the cylinder cover in a sliding mode, a plurality of piston pads sequentially arranged in the axial direction of the cylinder body and middle pistons arranged between the adjacent piston pads in a sliding mode, a spring is arranged between the upper piston and the cylinder cover, and an air chamber is defined by every two adjacent piston pads and the middle piston between the two adjacent piston pads. Gas enters from the quick-plug connector and is dispersed to the multiple air chambers step by step, an integrated mounting assembly is arranged at the bottom of the parent body, and thrust generated by the multiple air chambers is overlapped, so that enough resultant force can be generated in an extremely compact space on the inner side of the air cylinder body to overcome the elastic force of the spring, and reliable opening of the parent body is achieved.

Description

Technical Field

[0001] This invention relates to the field of diaphragm valve technology, and more particularly to an ultra-miniature diaphragm valve. Background Technology

[0002] In semiconductor integrated systems, diaphragm valves are key fluid control components used for the precise control of ultrapure, highly corrosive, or specialty process fluids (gases or liquids). With the continuous development of the semiconductor industry, the integration level of integrated circuits is constantly increasing, and semiconductor manufacturing equipment is becoming increasingly precise and compact, placing higher demands on the fluid control components used within them. Customer requirements for valve operating conditions are becoming increasingly diverse, specifically in terms of flow coefficient (CV value), interface type, service life, and dynamic granularity.

[0003] Currently, existing diaphragm valves on the market mainly suffer from the following technical problems: First, conventional diaphragm valves have a large cylinder body outer diameter and a relatively high overall height. Furthermore, their bottom connection interfaces typically use a 1.125-inch or 1.5-inch W-seal surface, resulting in large center hole spacing, sealing surface diameter, and flow channel diameter. This leads to the valve occupying a significant amount of installation space in the semiconductor panel. When multiple valves need to be densely arranged, space utilization is low.

[0004] Secondly, the cylinder structure of existing diaphragm valves suffers from insufficient driving force after miniaturization. When the outer diameter of the cylinder body is reduced to about 10mm, the space available for installing the piston assembly is extremely limited. The thrust generated by a single piston structure within this limited space is insufficient to overcome the spring force and achieve reliable valve opening. Attempting to compensate for the insufficient thrust by increasing the driving air pressure may exceed the pressure resistance limit of the ultra-miniature valve body. Therefore, to solve the above problems, an ultra-miniature diaphragm valve is proposed. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing an ultra-miniature diaphragm valve.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An ultra-miniature diaphragm valve includes a main body, a cylinder body is threaded to the inner top of the main body, a cylinder head is fixedly mounted on the top of the cylinder body, a quick-connect fitting is threaded to the inner top of the cylinder head, a piston assembly is provided inside the cylinder body, the piston assembly includes an upper piston slidably disposed in the cylinder head, a plurality of piston pads arranged sequentially along the axial direction of the cylinder body, and a middle piston slidably disposed between adjacent piston pads, and a spring is provided between the upper piston and the cylinder head;

[0008] The adjacent middle pistons are interconnected, the top middle piston is connected to the upper piston, and the bottom of the bottom middle piston is provided with a lower piston. The two adjacent piston pads and the middle piston between them form an air chamber, and the lower piston and the bottom piston pad form an air chamber. Gas enters from the quick-connect connector and is gradually dispersed into multiple air chambers. The thrust generated by each air chamber is superimposed to overcome the elastic force of the spring and realize the opening of the main body.

[0009] The bottom of the mother body is provided with an integrated installation assembly, which includes a fixed base. A limit plate is fixed on the top of the fixed base. A drive plate is rotatably connected to the top of the limit plate. Multiple locking heads are slidably arranged between the limit plate and the drive plate in the circumferential direction. Multiple locking wedges are slidably arranged on the inner side of the fixed base in the circumferential direction. The locking wedges are used to control the vertical height of the locking heads. The locking heads are used to lock the mother body.

[0010] The above technical solution further includes:

[0011] The piston assembly also includes a first sealing ring sleeved between the upper piston and the cylinder head. The spring is sleeved on the outside of the upper piston and disposed on the inside of the cylinder head. The bottom of the spring abuts against the upper piston and the top abuts against the cylinder head. The cylinder body has a top thickness of 0.4 mm and an outer diameter of 10 mm. The cylinder body and the cylinder head are fixed by an interference fit.

[0012] The piston pad and the middle piston are stacked and nested together. A third sealing ring is provided between the end of the middle piston and a piston pad. A second sealing ring is provided between the bottom outer side of the middle piston and another piston pad. A second sealing ring is also provided between the top piston pad and the upper piston. A third sealing ring is also provided between the bottom piston pad and the lower piston. The air chamber is the closed space where the third sealing ring is located.

[0013] A central channel is provided through the axis of the middle piston, and a slot communicating with the central channel is provided at the end of the middle piston. A slot is also provided at the end of the lower piston, and the slot communicates with the air chamber.

[0014] The lower piston is slidably disposed on the inner bottom of the cylinder body. A fourth sealing ring is sleeved on the outer side of the lower piston. A slider is fixedly connected to the bottom of the lower piston. A guide is disposed on the inner side of the main body. A slide seat is disposed on the top of the guide. Two diaphragms are sandwiched between the slide seat and the guide. A valve seat is disposed at the bottom of the diaphragm and is stacked on the inner side of the guide. The cylinder body and the main body are threaded together with a given torque of 4 Nm, and the diaphragms, slide seat, guide and valve seat are locked together and sealed at the joint.

[0015] The bottom inner side of the mother body is provided with an air outlet groove, and the bottom of the mother body is provided with an air outlet and an air inlet. The air outlet is connected to the air outlet groove. The guide is designed with a porous surface. Fluid enters from the air inlet, passes through the guide and the air outlet groove in sequence, and is discharged from the air outlet.

[0016] The diaphragm is a complete arc shape with a thickness of 0.05 mm. The valve seat has a maximum diameter of no more than 4 mm and is fixed by the guide. The center hole spacing D1 of the mother body is 7.8 mm, the sealing surface diameter D2 is 3.8 mm, and the flow channel diameter D3 is 1.4 mm.

[0017] The integrated installation assembly also includes multiple base plates, which are fixedly connected to a fixed base. A support base is fixedly connected to both the fixed base and the base plates. A limiting plate is fixed to the inner side of the support base. The limiting plate has multiple limiting grooves extending through it in a uniform arc along the circumference. A driving plate has multiple driving grooves extending through it in a uniform arc along the circumference. Limiting slip rings are provided on the inner sides of both the limiting grooves and the driving grooves. A locking pin is provided on both limiting slip rings. The top of the locking pin is fixedly connected to a locking head. An adjusting worm gear is fixedly connected to the outer side of the driving plate. An adjusting worm is rotatably connected to the inner side of the support base. The adjusting worm and the adjusting worm gear mesh with each other. An internal hexagon head is fixedly connected to one end of the adjusting worm that extends to the outer side of the support base.

[0018] Multiple slide rails are fixedly connected to the inner bottom of the support base along a circumferential arc. The slide rails are slidably connected to the locking wedges. The locking pins and locking wedges are limited to slide. A locking gear ring is rotatably connected to the outer side of the support base. A locking bevel gear is fixedly connected to the top of the locking gear ring. Multiple locking screws are rotatably connected to the outer side of the support base along a circumferential arc. A locking bevel gear is fixedly connected to one end of the locking screws extending to the outer side of the support base. The locking bevel gear meshes with the locking bevel gear.

[0019] A locking gear is rotatably connected to the top of the base plate, and the locking gear meshes with the locking gear ring. A handwheel is fixedly connected to one end of the locking gear extending to the outside of the fixed seat. Multiple fixed cylinders are fixedly connected in a circumferential array along the inner side of the support seat. Multiple push cylinders are slidably arranged on the inner side of the fixed cylinders. The locking screw meshes with one end of the push cylinder, and the other end of the push cylinder is fixedly connected to the locking wedge.

[0020] The present invention has the following beneficial effects:

[0021] 1. In this invention, by adopting a design with multiple air chambers, the thrust generated by each air chamber is superimposed, so that sufficient resultant force can be generated in the extremely compact space inside the cylinder body to overcome the elastic force of the spring and realize the reliable opening of the main body, thus solving the technical problem of insufficient driving force caused by the structural size limitation of ultra-small valves.

[0022] 2. In this invention, the integrated installation components allow for quick fixing or disassembly of the main body simply by driving the locking wedge and the drive disc, significantly improving the installation and maintenance efficiency of the valve in semiconductor equipment. At the same time, the multiple locking heads arranged circumferentially can move synchronously towards the center and apply a uniform locking force to the main body, avoiding the skewing or stress concentration that may result from unilateral locking and ensuring the coaxiality between the main body and the cylinder body.

[0023] 3. In this invention, the connection interface at the bottom of the mother body is a 1-inch W-seal surface, wherein the center hole spacing D1 is 7.8mm, the sealing surface diameter D2 is 3.8mm, and the flow channel diameter D3 is 1.4mm. Compared with the existing 1.125-inch W-seal surfaces and 1.5-inch W-seal surfaces on the market, the interface size is significantly reduced, so that the valve occupies about one-third of the installation space of the 1.125-inch W-seal surface, which greatly improves the space utilization of the semiconductor equipment panel. At the same time, the flow channel diameter D3 of 1.4mm matches the ultra-low flow characteristics of only 0.08 CV value.

[0024] 4. In terms of sealing performance, the cylinder body is threadedly connected to the mother body and a torque of 4 Nm is applied. This torque locks the diaphragm, slide, guide, and valve seat together and forms a seal at the joint. The cylinder body applies a downward force to the slider, locking the slider, diaphragm, guide, and the lower sealing surface of the mother body and guide together to achieve the external seal of the valve. At the same time, the guide presses the valve seat downward to ensure that the sealing surfaces of the guide, valve seat, and mother body are locked together to achieve the internal seal of the valve. A single locking action forms both internal and external double seals, achieving a highly efficient and reliable seal within the limited space of an ultra-small valve. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the first overall structure of an ultra-miniature diaphragm valve and integrated mounting assembly proposed in this invention;

[0026] Figure 2 This is a schematic diagram of the second integral structure of an ultra-miniature diaphragm valve and integrated mounting assembly according to the present invention;

[0027] Figure 3 This is a schematic diagram of the first side view of an ultra-miniature diaphragm valve according to the present invention;

[0028] Figure 4This is a schematic diagram of the second side view of an ultra-miniature diaphragm valve according to the present invention;

[0029] Figure 5 This is a schematic diagram of the internal structure of the cylinder body in this invention;

[0030] Figure 6 This is a schematic diagram of the internal structure of the piston pad in this invention;

[0031] Figure 7 This is a schematic diagram of the overall cross-sectional structure of an ultra-small diaphragm valve according to the present invention;

[0032] Figure 8 for Figure 7 Enlarged schematic diagram of the structure at point A in the middle;

[0033] Figure 9 for Figure 7 Enlarged schematic diagram of the structure at point B;

[0034] Figure 10 This is a schematic diagram of the cross-sectional planar structure of the parent body in this invention;

[0035] Figure 11 This is a schematic diagram of the diaphragm structure in the present invention;

[0036] Figure 12 This is a schematic cross-sectional view of the integrated installation component in this invention;

[0037] Figure 13 This is a schematic diagram of the internal structure of the fixed base and the support base in this invention;

[0038] Figure 14 for Figure 13 Enlarged schematic diagram of the structure at point C.

[0039] In the diagram: 1. Base plate; 2. Cylinder body; 3. Connecting joint; 11. Fixed seat; 12. Support seat; 13. Handwheel; 14. Locking gear; 15. Locking gear ring; 16. Locking bevel gear disc; 17. Adjusting worm gear; 18. Limiting disc; 180. Limiting groove; 19. Slide rail; 110. Locking wedge; 111. Drive disc; 1110. Drive groove; 112. Locking pin; 113. Locking head; 114. Limiting slip ring; 115. Locking bevel gear; 116. Locking screw; 117. Fixed cylinder; 118. Push cylinder; 119. Adjustment Worm gear; 120, Allen head; 20, Quick connector; 21, Mother body; 22, Cylinder head; 23, Upper piston; 24, Spring; 25, Piston gasket; 26, Fourth seal ring; 27, Lower piston; 28, Slider; 29, Air outlet; 210, Air inlet; 211, Slide seat; 212, Guide; 213, Middle piston; 214, Second seal ring; 215, Diaphragm; 216, Middle channel; 217, Groove; 218, Third seal ring; 219, Valve seat; 220, Air outlet groove; 221, First seal ring; 222, Air chamber. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] Example 1

[0042] like Figures 1-14 As shown, the present invention proposes an ultra-miniature diaphragm valve, including a mother body 21, a cylinder body 2 threadedly connected to the inner top of the mother body 21, a cylinder head 22 fixedly mounted on the top of the cylinder body 2, a quick connector 20 threadedly connected to the inner top of the cylinder head 22, a piston assembly provided inside the cylinder body 2, the piston assembly including an upper piston 23 slidably disposed in the cylinder head 22, a plurality of piston pads 25 arranged sequentially along the axial direction of the cylinder body 2, and a middle piston 213 slidably disposed between adjacent piston pads 25, and a spring 24 provided between the upper piston 23 and the cylinder head 22;

[0043] The adjacent middle pistons 213 are interconnected. The top middle piston 213 is connected to the upper piston 23. The bottom of the bottom middle piston 213 is provided with a lower piston 27. The two adjacent piston pads 25 and the middle piston 213 between them form a gas chamber 222. The lower piston 27 and the bottom piston pad 25 form a gas chamber 222. Gas enters from the quick connector 20 and is gradually dispersed to multiple gas chambers 222. The thrust generated by each gas chamber 222 is superimposed to overcome the elastic force of the spring 24 and realize the opening of the mother body 21.

[0044] This design adopts a multi-chamber 222 design. On the one hand, the gas is controlled to enter from the quick connector 20 and then gradually dispersed into multiple chambers 222. The thrust generated by each chamber 222 is superimposed, so that in the extremely compact space inside the cylinder body 2, a sufficient resultant force can be formed to overcome the elastic force of the spring 24 and realize the reliable opening of the main body 21. This solves the technical problem of insufficient driving force caused by the structural size limitation of ultra-small valves.

[0045] On the other hand, since the thrust of multiple air chambers 222 is superimposed, a larger total thrust can be obtained under the same driving air pressure, thereby reducing the minimum driving air pressure required for valve opening, enabling the valve to work stably under lower air source pressure, and improving the valve opening response speed and sensitivity.

[0046] The bottom of the mother body 21 is provided with an integrated installation assembly, which includes a fixed base 11. A limit plate 18 is fixed on the top of the fixed base 11. A drive plate 111 is rotatably connected to the top of the limit plate 18. Multiple locking heads 113 are slidably arranged between the limit plate 18 and the drive plate 111 in the circumferential direction. Multiple locking wedges 110 are slidably arranged on the inner side of the fixed base 11 in the circumferential direction. The locking wedges 110 are used to control the vertical height of the locking heads 113. The locking heads 113 are used to lock the mother body 21.

[0047] Furthermore, in semiconductor equipment, valves are densely arranged. Compared with the traditional threaded connection method, there is no need to use special torque tools for rotation and tightening, nor is it necessary to perform multiple rotation operations in narrow spaces. The main body 21 can be quickly fixed or disassembled simply by driving the locking wedge 110 and the drive disc 111, which greatly improves the installation and maintenance efficiency of valves in semiconductor equipment.

[0048] Example 2

[0049] like Figures 1-11 As shown, based on Embodiment 1, in this embodiment, the piston assembly further includes a first sealing ring 221 sleeved between the upper piston 23 and the cylinder head 22, a spring 24 sleeved on the outside of the upper piston 23 and disposed on the inside of the cylinder head 22, the bottom of the spring 24 abutting against the upper piston 23 and the top abutting against the cylinder head 22, the top thickness of the cylinder body 2 is 0.4mm and the outer diameter is 10mm, and the cylinder body 2 and the cylinder head 22 are fixed by an interference fit.

[0050] Furthermore, the cylinder body 2 of the ultra-miniature diaphragm valve in this design has a diameter of 10mm and a total height of only 68mm, which is much smaller than the size of diaphragm valves currently on the market.

[0051] Furthermore, the upper piston 23 is made of aluminum, the cylinder body 2, the cylinder head 22 and the spring 24 are made of stainless steel, and the first sealing ring 221 is a (1.9x1) fluororubber O-ring. The first sealing ring 221 is used to prevent gas leakage from the quick connector 20 into the cylinder head 22.

[0052] Furthermore, in conventional diaphragm valve structures, the cylinder head 22 and cylinder body 2 are connected by threads. However, the inner wall of the cylinder body 2 in this ultra-miniature diaphragm valve design is too thin, only 0.4mm, making a threaded connection impossible. The end of the cylinder body 2 has a tapered design. Therefore, when the cylinder head 22 overcomes the spring force of the spring 24 and is pressed into the cylinder body 2, it is limited by the inner wall of the cylinder body 2 after reaching a certain depth, preventing downward movement. At this point, the cylinder body 2 completely covers the end of the cylinder head 22, achieving a connection between the cylinder body 2 and the cylinder head 22. This ensures that the connection between the cylinder head and cylinder body remains intact under 4 million piston cycles.

[0053] The piston pad 25 and the middle piston 213 are stacked and nested together. A third sealing ring 218 is provided between the end of the middle piston 213 and one piston pad 25. A second sealing ring 214 is provided between the bottom outer side of the middle piston 213 and another piston pad 25. A second sealing ring 214 is also provided between the top piston pad 25 and the upper piston 23. A third sealing ring 218 is also provided between the bottom piston pad 25 and the lower piston 27. The air chamber 222 is the closed space where the third sealing ring 218 is located.

[0054] A central channel 216 is provided through the axis of the central piston 213, and a slot 217 communicating with the central channel 216 is provided at the end of the central piston 213. A slot 217 is also provided at the end of the lower piston 27, and the slot 217 communicates with the air chamber 222.

[0055] Furthermore, the piston pad 25, upper piston 23, middle piston 213 and lower piston 27 are all made of aluminum, the third sealing ring 218 is a (1.9x1) fluororubber O-ring, and the second sealing ring 214 is a (5.5x1.5) fluororubber O-ring.

[0056] Furthermore, when the bottom of the cylinder head 22 contacts the top of the upper piston 23, the main body 21 is in the open state, and when the bottom piston pad 25 contacts the inner bottom of the cylinder body 2, the main body 21 is in the open / closed state.

[0057] Furthermore, when the quick-connector 20 is vented, the gas enters from the quick-connector 20 and passes through the middle channel 216 and slot 217 of the upper piston 23 and the middle piston 213 in sequence, and is gradually dispersed to multiple air chambers 222. The thrust generated by each air chamber 222 is superimposed to overcome the elastic force of the spring 24, causing the upper piston 23, the middle piston 213 and the lower piston 27 to move upward together to squeeze the spring 24. The lower piston 27 drives the slider 28 to move upward, and the diaphragm 215 bends and lifts under its own deformation.

[0058] Furthermore, the fluid enters from the air inlet 210 at the bottom of the mother body 21, passes through the porous structure on the surface of the guide 212, passes under the diaphragm 215, then passes through the air outlet 220, and finally flows out from the air outlet 29, thereby opening the mother body 21.

[0059] Furthermore, if the thrust generated by a single air chamber 222 is F1, and this design has seven air chambers 222 (or N), then the total thrust generated is F2 = 7F1 (or NF1); where F1 = (S1 - S2)P, where (S1 - S2) is the effective area acting on the middle piston 213, which can be obtained by subtracting the corresponding area of ​​the piston pad 25 from that of the upper piston 23, where P is the minimum pressure driven by the gas.

[0060] Furthermore, when the quick-connect connector 20 is not vented, the main body 21 is in the closed state. The elastic force of the spring 24 will cause the upper piston 23, the middle piston 213 and the lower piston 27 to act downward together, first causing the slider 28 to squeeze the diaphragm 215 and the valve seat 219, thereby closing the main body 21.

[0061] The lower piston 27 is slidably disposed on the inner side of the bottom of the cylinder body 2. A fourth sealing ring 26 is sleeved on the outer side of the lower piston 27. A slider 28 is fixedly connected to the bottom of the lower piston 27. A guide 212 is disposed on the inner side of the mother body 21. A slide 211 is disposed on the top of the guide 212. Two diaphragms 215 are sandwiched between the slide 211 and the guide 212. A valve seat 219 is disposed on the bottom of the diaphragm 215. The valve seat 219 is stacked on the inner side of the guide 212. The cylinder body 2 and the mother body 21 are threaded together with a given torque of 4 Nm. The diaphragm 215, slide 211, guide 212 and valve seat 219 are locked together and sealed at the joint 3.

[0062] Furthermore, by threading the cylinder body 2 to the mother body 21 and applying a torque of 4 Nm, the diaphragm 215, slide 211, guide 212, and valve seat 219 are locked together, forming a seal at the joint 3. The cylinder body 2 applies a downward force to the slider 28, which locks the slider 28, diaphragm 215, guide 212, and the lower sealing surfaces of the mother body 21 and guide 212 together, achieving an external seal for the valve. At the same time, the guide 212 presses the valve seat 219 downward, ensuring that the sealing surfaces of the guide 212, valve seat 219, and mother body 21 are locked together, achieving an internal seal for the valve. This achieves a highly efficient and reliable seal within the limited space of an ultra-small valve.

[0063] The bottom inner side of the mother body 21 is provided with an air outlet groove 220. The bottom of the mother body 21 is provided with an air outlet 29 and an air inlet 210. The air outlet 29 is connected to the air outlet groove 220. The guide 212 has a multi-hole design on its surface. The guide 212 is provided with eight holes along the circumferential arc. The diameter of each hole is 0.8mm. The fluid enters from the air inlet 210, passes through the guide 212 and the air outlet groove 220 in sequence, and is discharged from the air outlet 29.

[0064] The diaphragm 215 is a complete arc shape with a thickness of 0.05 mm. The valve seat 219 has a maximum diameter of no more than 4 mm and is fixed by the guide 212. The center hole spacing D1 of the mother body 21 is 7.8 mm, the sealing surface diameter D2 is 3.8 mm, and the flow channel diameter D3 is 1.4 mm.

[0065] Furthermore, the diaphragm 215 is a completely arc-shaped piece with a thickness of only 0.05mm, made of Elgiloy material, while the commonly used thickness on the market is 0.127mm. This ultra-thin arc-shaped structure has the following technical advantages: First, the arc-shaped structure allows the diaphragm 215 to bend and lift naturally by its own elastic deformation when the valve is opened, without the need for additional driving force, thus reducing the opening thrust required by the piston assembly.

[0066] Secondly, the ultra-thin thickness of 0.05mm reduces the alternating stress generated by the diaphragm 215 during 4 million high-frequency opening and closing cycles. Combined with the one-time stamping process and EP surface treatment, it effectively prevents the diaphragm 215 from cracking or permanently deforming due to fatigue during long-term use.

[0067] Furthermore, the arc-shaped structure has better stress distribution characteristics than the flat diaphragm 215. When the slider 28 squeezes the diaphragm 215 to press the valve seat 219, the contact pressure between the diaphragm 215 and the valve seat 219 is more uniform, ensuring the reliability of the internal seal.

[0068] Furthermore, the maximum diameter of the valve seat 219 does not exceed 4mm. In this solution, the guide 212 is used to fix the valve seat 219. The guide 212 serves as the positioning element of the valve seat 219, which is precisely pressed into the predetermined position of the mother body 21. At the same time, the valve seat 219 is made of PCTFE material, which has good corrosion resistance and low permeability, and is suitable for ultrapure and corrosive media in semiconductor processes.

[0069] Furthermore, the connection interface at the bottom of the motherboard 21 is a 1-inch W-seal surface, with a center hole spacing D1 of 7.8 mm, a sealing surface diameter D2 of 3.8 mm, and a flow channel diameter D3 of 1.4 mm. Compared with the existing 1.125-inch W-seal surfaces (center hole spacing of approximately 12 mm and sealing surface diameter of approximately 6 mm) and 1.5-inch W-seal surfaces on the market, the interface size of this solution is significantly reduced. The beneficial effects of this miniaturized interface include: First, when valves are densely arranged in semiconductor devices, the 1-inch W-seal surface allows the valves to occupy approximately 1 / 3 of the installation space of the 1.125-inch W-seal surface, greatly improving the space utilization of the device panel;

[0070] Secondly, the flow channel diameter D3 is only 1.4mm, which matches the ultra-low flow rate characteristic of a CV value of only 0.08, thus achieving precise control of ultra-low flow process media; thirdly, the sealing surface diameter D2 is 3.8mm, which forms a good match with the maximum diameter of valve seat 219 not exceeding 4mm, ensuring the alignment accuracy between the sealing surface and valve seat 219.

[0071] Furthermore, the ultra-thin arc-shaped diaphragm 215 of 0.05 mm and the ultra-small valve seat 219 with a maximum diameter of no more than 4 mm cooperate with each other. When the valve is closed, the sealing contact area formed by the diaphragm 215 pressing against the valve seat 219 is small. When the valve is opened, the lifting height of the diaphragm 215 is precisely controllable. The synergistic effect of the two enables the flow channel opening to be precisely adjusted at the micron level, providing a structural basis for achieving ultra-low flow control with a CV value of only 0.08. It is suitable for application scenarios in semiconductor processes where there is an extreme miniaturization control requirement for fluid flow.

[0072] Example 3

[0073] like Figures 12-14As shown, based on the above embodiments, in this embodiment, the integrated installation assembly further includes multiple base plates 1, which are fixedly connected to the fixing base 11. The fixing base 11 and the base plates 1 are jointly fixedly connected to a support base 12. A limiting plate 18 is fixed to the inner side of the support base 12. The limiting plate 18 has multiple limiting grooves 180 extending through it at equal circumferential arcs. A driving plate 111 has multiple driving grooves 1110 extending through it at equal circumferential arcs. The limiting grooves 180 and the driving grooves 1110... The inner side is provided with a limiting slip ring 114 for limiting sliding. The two limiting slip rings 114 are provided with a locking pin 112 for limiting sliding. The top of the locking pin 112 is fixedly connected to the locking head 113. The outer side of the drive disc 111 is fixedly connected to an adjusting worm gear 119. The inner side of the support base 12 is rotatably connected to an adjusting worm 17. The adjusting worm 17 and the adjusting worm gear 119 mesh with each other. The end of the adjusting worm 17 extending to the outer side of the support base 12 is fixedly connected to an internal hexagon head 120.

[0074] Multiple slide rails 19 are fixedly connected to the bottom inner side of the support base 12 along the circumferential arc. The slide rails 19 are slidably connected to the locking wedge 110. The locking pin 112 is limited to slide between the locking wedge 110. A locking gear ring 15 is rotatably connected to the outer side of the support base 12. A locking bevel gear 16 is fixedly connected to the top of the locking gear ring 15. Multiple locking screws 116 are rotatably connected to the outer side of the support base 12 along the circumferential arc. A locking bevel gear 115 is fixedly connected to one end of the locking screw 116 extending to the outer side of the support base 12. The locking bevel gear 115 meshes with the locking bevel gear 16.

[0075] A locking gear 14 is rotatably connected to the top of the base plate 1, and the locking gear 14 meshes with the locking gear ring 15. A handwheel 13 is fixedly connected to one end of the locking gear 14 extending to the outside of the fixed seat 11. Multiple fixed cylinders 117 are fixedly connected to the inner side of the support seat 12 in a circumferential array with equal arc. Multiple push cylinders 118 are slidably limited on the inner side of the fixed cylinders 117. The locking screw 116 meshes with one end of the push cylinder 118, and the other end of the push cylinder 118 is fixedly connected to the locking wedge block 110.

[0076] Furthermore, during installation, the diaphragm valve body 21 of this design is placed inside the limiting plate 18. The operator drives the adjusting worm 17 to rotate through the internal hex head 120. The adjusting worm 17 meshes with the adjusting worm wheel 119, causing the drive plate 111, which is fixedly connected to the adjusting worm wheel 119, to rotate relative to the limiting plate 18. When the drive plate 111 rotates, the drive groove 1110 shifts position relative to the limiting groove 180. Through the limiting slip ring 114, the locking pin 112 moves along the trajectory of the limiting groove 180. This trajectory causes the locking pin 112 to generate radial displacement while moving circumferentially, thereby causing the locking head 113 to move radially closer to the body 21. Since the locking pin 112 is slidably set on the inclined surface of the locking wedge block 110, the locking head 113 will move downward in the vertical direction. At this time, there is still a gap between the locking head 113 and the body 21.

[0077] The worm gear drive has a self-locking characteristic, which can keep the radial position of the locking head 113 unchanged after adjustment, preventing loosening due to vibration or external force.

[0078] Furthermore, the operator drives the locking gear 14 to rotate via the handwheel 13. The locking gear 14 meshes with the locking gear ring 15, causing the locking gear ring 15 and the locking bevel gear disc 16 fixedly connected to it to rotate. The locking bevel gear 115 meshes with the locking bevel gear disc 16. When the locking screw 116 rotates, it drives the push cylinder 118 to move axially along the fixed cylinder 117. The push cylinder 118 pushes the locking wedge block 110 to slide along the slide rail 19. The sliding direction is opposite to the moving direction of the locking pin 112. During the sliding process, the locking wedge block 110 controls the vertical height of the locking pin 112 and the locking head 113 fixed on its top through the cooperation of its inclined surface with the locking pin 112. This allows the locking head 113 to be precisely adjusted vertically according to the specific locking position of the mother body 21, thereby achieving locking.

[0079] This design employs a double self-locking mechanism. The locking screw 116 has a self-locking characteristic, as does the worm gear transmission, ensuring that the radial position of the locking head 113 remains unchanged after adjustment. The synchronous meshing structure between the locking bevel gear disc 16 and multiple locking bevel gears 115, along with the threaded engagement between the locking screw 116 and the push cylinder 118, collectively guarantee the positional stability after vertical height adjustment, preventing loosening due to vibration.

[0080] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A miniature diaphragm valve, comprising a main body (21), wherein a cylinder body (2) is threadedly connected to the inner top of the main body (21), a cylinder head (22) is fixedly mounted on the top of the cylinder body (2), and a quick-connect fitting (20) is threadedly connected to the inner top of the cylinder head (22), characterized in that, The cylinder body (2) is provided with a piston assembly, which includes an upper piston (23) slidably disposed in the cylinder head (22), a plurality of piston pads (25) arranged sequentially along the axial direction of the cylinder body (2), and a middle piston (213) slidably disposed between adjacent piston pads (25). A spring (24) is provided between the upper piston (23) and the cylinder head (22). The adjacent middle pistons (213) are interconnected. The top middle piston (213) is connected to the upper piston (23). The bottom end of the bottom middle piston (213) is provided with a lower piston (27). The two adjacent piston pads (25) and the middle piston (213) between them form a gas chamber (222). The lower piston (27) and the bottom piston pad (25) form a gas chamber (222). Gas enters from the quick connector (20) and is gradually dispersed to multiple gas chambers (222). The thrust generated by each gas chamber (222) is superimposed to overcome the elastic force of the spring (24) to open the mother body (21). The bottom of the mother body (21) is provided with an integrated installation assembly, which includes a fixed base (11) fixedly disposed. A limit plate (18) is fixedly fixed on the top of the fixed base (11). A drive plate (111) is rotatably connected to the top of the limit plate (18). Multiple locking heads (113) are slidably disposed between the limit plate (18) and the drive plate (111) along the circumferential direction. Multiple locking wedges (110) are slidably disposed on the inner side of the fixed base (11) along the circumferential direction. The locking wedges (110) are used to control the vertical height of the locking heads (113). The locking heads (113) are used to lock the mother body (21).

2. The ultra-miniature diaphragm valve according to claim 1, characterized in that, The piston assembly also includes a first sealing ring (221) sleeved between the upper piston (23) and the cylinder head (22). The spring (24) is sleeved on the outside of the upper piston (23) and disposed on the inside of the cylinder head (22). The bottom of the spring (24) abuts against the upper piston (23) and the top abuts against the cylinder head (22). The top thickness of the cylinder body (2) is 0.4 mm and the outer diameter is 10 mm. The cylinder body (2) and the cylinder head (22) are fixed by an interference fit.

3. The ultra-miniature diaphragm valve according to claim 1, characterized in that, The piston pad (25) and the middle piston (213) are stacked and nested together. A third sealing ring (218) is provided between the end of the middle piston (213) and a piston pad (25). A second sealing ring (214) is provided between the bottom outer side of the middle piston (213) and another piston pad (25). A second sealing ring (214) is also provided between the top piston pad (25) and the upper piston (23). A third sealing ring (218) is also provided between the bottom piston pad (25) and the lower piston (27). The air chamber (222) is the closed space where the third sealing ring (218) is located.

4. The ultra-miniature diaphragm valve according to claim 1, characterized in that, A central channel (216) is provided through the axis of the central piston (213), and a slot (217) communicating with the central channel (216) is provided at the end of the central piston (213). A slot (217) is also provided at the end of the lower piston (27), and the slot (217) is communicating with the air chamber (222).

5. The ultra-miniature diaphragm valve according to claim 1, characterized in that, The lower piston (27) is slidably disposed on the inner side of the bottom of the cylinder body (2). A fourth sealing ring (26) is sleeved on the outer side of the lower piston (27). A slider (28) is fixedly connected to the bottom of the lower piston (27). A guide (212) is disposed on the inner side of the mother body (21). A slide (211) is disposed on the top of the guide (212). Two diaphragms (215) are sandwiched between the slide (211) and the guide (212). A valve seat (219) is disposed at the bottom of the diaphragm (215). The valve seat (219) is stacked on the inner side of the guide (212). The cylinder body (2) and the mother body (21) are threaded together with a given torque of 4 Nm. The diaphragm (215), slide (211), guide (212) and valve seat (219) are locked together and sealed at the joint (3).

6. The ultra-miniature diaphragm valve according to claim 5, characterized in that, The bottom inner side of the mother body (21) is provided with an air outlet groove (220). The bottom of the mother body (21) is provided with an air outlet (29) and an air inlet (210). The air outlet (29) is connected to the air outlet groove (220). The guide (212) has a porous surface design. Fluid enters from the air inlet (210), passes through the guide (212) and the air outlet groove (220) in sequence, and is discharged from the air outlet (29).

7. The ultra-miniature diaphragm valve according to claim 6, characterized in that, The diaphragm (215) is a complete arc shape and has a thickness of 0.05 mm. The valve seat (219) has a maximum diameter of no more than 4 mm and is fixed by the guide (212). The center hole spacing D1 of the mother body (21) is 7.8 mm, the sealing surface diameter D2 is 3.8 mm, and the flow channel diameter D3 is 1.4 mm.

8. The ultra-miniature diaphragm valve according to claim 1, characterized in that, The integrated installation assembly also includes multiple base plates (1), which are fixedly connected to a fixing seat (11). The fixing seat (11) and the base plates (1) are jointly fixedly connected to a support seat (12). The limiting plate (18) is fixed to the inner side of the support seat (12). The limiting plate (18) has multiple limiting grooves (180) extending through it in a uniform arc along the circumference. The driving plate (111) has multiple driving grooves (1110) extending through it in a uniform arc along the circumference. The inner sides of the limiting grooves (180) and the driving grooves (1110) are both provided with limiting sliding properties. The limiting slip ring (114) is provided with a locking pin (112) for limiting sliding. The top of the locking pin (112) is fixedly connected to the locking head (113). The outer side of the drive disc (111) is fixedly connected to the adjusting worm gear (119). The inner side of the support base (12) is rotatably connected to the adjusting worm (17). The adjusting worm (17) and the adjusting worm gear (119) mesh with each other. One end of the adjusting worm (17) extending to the outer side of the support base (12) is fixedly connected to the internal hexagon head (120).

9. A miniature diaphragm valve according to claim 8, characterized in that, The inner bottom of the support base (12) is fixedly connected with multiple slide rails (19) along the circumferential arc. The slide rails (19) are slidably connected to the locking wedge (110). The locking pin (112) is limited to slide with the locking wedge (110). The outer side of the support base (12) is rotatably connected with a locking gear ring (15). The top of the locking gear ring (15) is fixedly connected with a locking bevel gear disc (16). The outer side of the support base (12) is rotatably connected with multiple locking screws (116) along the circumferential arc. One end of the locking screw (116) extending to the outer side of the support base (12) is fixedly connected with a locking bevel gear (115). The locking bevel gear (115) meshes with the locking bevel gear disc (16).

10. A miniature diaphragm valve according to claim 9, characterized in that, The top of the base plate (1) is rotatably connected to a locking gear (14), and the locking gear (14) meshes with the locking gear ring (15). A handwheel (13) is fixedly connected to one end of the locking gear (14) extending to the outside of the fixed seat (11). Multiple fixed cylinders (117) are fixedly connected to the inner side of the support seat (12) in a circumferential array with equal arc. Multiple push cylinders (118) are slidably limited on the inner side of the fixed cylinders (117). The locking screw (116) meshes with one end of the push cylinder (118), and the other end of the push cylinder (118) is fixedly connected to the locking wedge (110).

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