Ceramic wafer punching equipment based on visual identification

Abstract

The invention relates to the technical field of laser drilling equipment, in particular to ceramic chip drilling equipment based on visual identification, which comprises a bottom plate, a moving part and an identification drilling part, the identifying and punching part comprises a hollow base which is through up and down, and an identifying module and a laser punching module which are respectively fixed on the left side and the right side of the base; the laser drilling module is accommodated in a hollow shell which is through up and down; a first fan is arranged at the top of the base, and a second fan is arranged at the top of the shell; an obliquely-arranged air guide plate is arranged in the base and used for guiding airflow blown in by the first fan to the side where the laser drilling module is located. Through a directional heat dissipation structure in which the low-expansion base, the heat insulation gasket and the asymmetric fan are matched with the air deflector, conduction and convection interference from a laser heat source to the identification module are effectively inhibited, and heat drift is remarkably reduced.

Description

Technical Field

[0001] This invention relates to the field of laser drilling equipment technology, and in particular to a ceramic sheet drilling device based on vision recognition. Background Technology

[0002] Currently, in the field of micro-hole forming on ceramic substrates, optically guided high-energy beam processing is commonly used. A mainstream configuration integrates an optical imaging module for acquiring surface features and positioning marks on the ceramic sheet, and a focused energy emission module for material removal, onto the same motion actuator via a fixed support. During operation, the optical imaging module first captures the coordinates of the points to be processed on the ceramic sheet. Then, the focused energy emission module moves to those coordinates and emits a high-energy beam to vaporize or melt the ceramic material, thereby forming the desired microholes. To shorten the processing cycle and improve response speed, the spatial distance between the two modules is typically designed to be extremely compact, sometimes even employing a coaxial or paraxial shared support layout, aiming to immediately proceed to the drilling process after identification.

[0003] However, the aforementioned tightly integrated processing system exhibits significant thermally induced accuracy degradation in practical applications. Because the focused energy emission module releases a large amount of thermal radiation and convection during operation, this heat is directly conducted to the adjacent optical imaging module through the mounting bracket, air medium, or housing. The lens, image sensor, and structural components inside the optical imaging module undergo microscopic expansion and refractive index changes upon heating, leading to a nonlinear shift in the imaging focal plane and pixel coordinate mapping relationship—a phenomenon known as thermal drift. This thermal drift directly causes a systematic deviation between the ceramic sheet positioning coordinates subsequently captured by the optical imaging module and their actual physical coordinates. Even if the recognition and drilling actions are sequential, residual heat continues to interfere with the module's baseline accuracy, causing a gradual accumulation of relative positional errors between multiple holes during continuous processing. Ultimately, this severely reduces the positioning accuracy and repeatability of ceramic sheet drilling, making it difficult to meet the requirements of high-density, high-alignment ceramic micro-hole array processing. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is that the large amount of heat generated by the focusing energy emission module in the visual recognition-based ceramic sheet drilling device is conducted to the optical imaging module, causing it to thermally drift, which seriously affects the positioning accuracy and repeatability of the ceramic sheet drilling.

[0005] The above-mentioned technical problems are solved by the following technical solution: This invention proposes a ceramic sheet drilling device based on visual recognition, including a base plate, a moving component, and a recognition drilling component; the moving component is installed on the base plate and is used to drive the recognition drilling component to move two-dimensionally in a horizontal plane; the recognition drilling component includes a hollow base that runs vertically through the base, a recognition module and a laser drilling module respectively fixed on the left and right sides of the base; the laser drilling module is housed in a hollow outer shell that runs vertically through the base; a first fan is provided on the top of the base, and a second fan is provided on the top of the outer shell; multiple inclined air guide plates are provided inside the base, and the air guide plates are used to guide the airflow blown in by the first fan to the side where the laser drilling module is located. In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: the first fan is installed at the top of the base, and its air outlet direction is vertically downward; the second fan is installed at the top of the housing, with its air inlet facing downward and its air outlet facing upward, forming an exhaust direction from bottom to top.

[0006] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: the air guide plate is a plate-shaped structure, with its upper end fixedly connected to the inner side of the top wall of the base, and its lower end extending obliquely towards the side where the laser drilling module is located. The included angle between the air guide plate and the bottom wall of the base is set to effectively guide the airflow to cover the bottom area of ​​the laser drilling module.

[0007] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: the base is made of a material with a low coefficient of thermal expansion, which is Invar or aluminum silicon carbide composite material, in order to reduce structural deformation caused by temperature changes.

[0008] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: a heat insulation pad may be provided between the outer shell and the base at the connection interface. The heat insulation pad is made of mica or polyimide material and is used to block the direct conduction of heat from the laser drilling module to the base.

[0009] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: the moving component includes a rectangular base, a first guide rail arranged along the left and right sides of the rectangular base, a first moving seat slidably engaged with the first guide rail, a first electric screw driving the first moving seat to move longitudinally along the first guide rail, a moving frame arranged across the rectangular base, a second guide rail arranged on the upper surface of the moving frame, a second moving seat slidably engaged with the second guide rail, and a second electric screw driving the second moving seat to move laterally along the second guide rail; the identification drilling component is fixed to the side of the second moving seat.

[0010] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: both the first movable seat and the second movable seat are provided with internal threaded holes on their outer sides, and the internal threaded holes are respectively engaged with the screw threads of the first electric lead screw and the second electric lead screw, and the first electric lead screw and the second electric lead screw are respectively driven by independent servo motors.

[0011] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: a plurality of through holes are provided on the base plate; a funnel-shaped dust collection device communicating with the through holes is provided below the base plate, and a detachable dust collection box is provided at the lower opening of the dust collection device for collecting ceramic debris generated during the drilling process.

[0012] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: the recognition module includes an industrial camera and a telecentric lens, the telecentric lens is fixed to the industrial camera by a lens bracket, the industrial camera and the telecentric lens are coaxially connected, and its imaging optical path is perpendicular to the base plate; the laser drilling module includes a fiber laser and a focusing lens group, the fiber laser and the focusing lens group are installed inside the housing.

[0013] In a preferred embodiment of the visual recognition-based ceramic sheet drilling device of the present invention: a longitudinally extending heat dissipation fin is provided in the base, the interior of the outer shell, and the outer wall; and the laser drilling module is provided in the outer shell on the side away from the base, with the built-in heat dissipation fins symmetrically arranged with the laser drilling module. The beneficial effects of this invention are: it effectively suppresses the thermal interference of the laser heat source on the visual recognition system. By arranging the recognition module and the laser drilling module on the left and right sides of a base with a low coefficient of thermal expansion, respectively, and placing a heat insulation pad between them, direct heat transfer is blocked from the conduction path; at the same time, an asymmetrical fan layout is adopted—the fan at the top of the base blows air downwards, and the fan at the top of the outer shell exhausts air upwards, combined with an internal inclined air guide plate, forming a directional airflow channel that precisely guides cool air to the bottom of the laser module and quickly exhausts hot air. This heat dissipation structure avoids hot air from lingering in the base cavity or flowing back to the recognition side, significantly reducing optical axis drift and focal length changes caused by temperature rise in the recognition module, thereby ensuring the stability of positioning accuracy during long-term continuous operation. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments of the present invention will be briefly described below. Obviously, the drawings described below only relate to some embodiments of the present invention and are not intended to limit the present invention. Wherein: Figure 1 This is a three-dimensional structural diagram of the present application; Figure 2 This is a top view of the structure of this application; Figure 3 This is a side view structural diagram of this application; Figure 4 This is a schematic diagram of the structure of the punched component identified in this application; Figure 5 for Figure 4 A diagram showing the view from below; Figure 6 This is a bottom view of the base in this application.

[0015] In the diagram: 1. Base plate; 11. Through hole; 2. Moving component; 21. Rectangular base; 22. First guide rail; 23. First moving seat; 24. First electric lead screw; 25. Moving frame; 26. Second guide rail; 27. Second moving seat; 28. Second electric lead screw; 3. Identification and drilling component; 31. Base; 32. Identification module; 33. Laser drilling module; 34. Outer shell; 35. First fan; 36. Second fan; 37. Air guide plate; 38. Heat insulation pad; 39. Heat dissipation fins. Detailed Implementation

[0016] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0017] The terminology used in this invention is that which is currently widely used in the art in consideration of the function of the invention; however, these terms may vary according to the intent of those skilled in the art, precedent, or new technology in the art. Furthermore, specific terms may be chosen by the applicant, and in such cases, their detailed meanings will be described in the detailed description of the invention. Therefore, the terms used in this specification should not be construed as simple names, but rather based on their meanings and the overall description of the invention.

[0018] Reference Figures 1-6 This embodiment provides a ceramic sheet drilling device based on visual recognition, including a base plate 1, a moving component 2, and a recognition drilling component 3. The moving component 2 is installed on the base plate 1 and is used to drive the recognition drilling component 3 to move in two dimensions in a horizontal plane. The recognition drilling component 3 includes a hollow base 31 that runs vertically through the base, a recognition module 32 and a laser drilling module 33 that are respectively fixed on the left and right sides of the base 31. The laser drilling module 33 is housed in a hollow outer shell 34 that runs vertically through the base. A first fan 35 is provided on the top of the base 31, and a second fan 36 is provided on the top of the outer shell 34. Multiple inclined air guide plates 37 are provided inside the base 31, and the air guide plates 37 are used to guide the airflow blown in by the first fan 35 to the side where the laser drilling module 33 is located.

[0019] The device of this application consists of three main parts: a base plate 1, a moving component 2, and a recognition and drilling component 3. The base plate 1 serves as the mounting reference surface for the entire machine, and its upper surface is precision-machined to ensure flatness, serving to support the ceramic sheet to be processed. Multiple through holes 11 are formed on the base plate 1, and the positions of these through holes 11 correspond to the subsequent drilling areas, facilitating the downward discharge of debris generated during the drilling process.

[0020] The moving component 2 is fixedly mounted on the base plate 1, and its structural design aims to achieve precise two-dimensional positioning of the identification punching component 3 in the horizontal plane. This moving component 2 typically includes two sets of orthogonal linear motion mechanisms, corresponding to the horizontal and vertical directions respectively. A servo motor drives a lead screw and nut pair, causing the slide to move smoothly along a high-precision guide rail, thus providing a stable motion platform for the identification punching component 3.

[0021] The identification and drilling component 3 is installed at the end of the moving component 2, and its core structure is a hollow base 31 that runs vertically through the material. This base 31 has an integral construction, forming a closed but open cavity inside, which reduces weight and provides space for airflow. An identification module 32 and a laser drilling module 33 are rigidly fixed to the left and right outer walls of the base 31, respectively. The identification module 32 typically consists of an industrial camera and an optical lens, used to acquire images of the ceramic sheet surface; the laser drilling module 33 is used to emit a focused laser beam to form micropores in the material. Considering that the laser drilling module 33 generates significant heat during operation, it is encapsulated within a hollow outer shell 34 that also runs vertically through the material. This outer shell 34 is arranged adjacent to the base 31, with a heat conduction path between them. To suppress heat diffusion towards the identification module 32, a first fan 35 is installed on the top of the base 31, with its airflow direction vertically downwards, sending ambient air into the internal cavity of the base 31. Meanwhile, a second fan 36 is provided on the top of the housing 34, and its installation direction allows airflow to be discharged upward from the inside of the housing 34 to the external environment.

[0022] Multiple inclined air guide plates 37 are arranged inside the cavity of the base 31. One end of each air guide plate 37 is connected to the inner side of the top wall of the base 31, and the other end extends towards the side where the laser drilling module 33 is located, forming a certain angle with the bottom wall of the base 31. When the first fan 35 blows downwards, the airflow enters the cavity and is blocked and guided by the air guide plates 37, forcing it to change direction and concentrate on the bottom area of ​​the laser drilling module 33. This airflow can carry away the heat accumulated below the module and reduce the retention of hot air in the middle of the base 31, thereby reducing the possibility of heat being conducted to the recognition module 32 through the base 31 body. At the same time, the second fan 36 continuously draws the heated air around the laser drilling module 33 upwards, forming a local forced convection circulation, further improving heat dissipation efficiency. Through the cooperation of the above mechanical structures, effective isolation and directional cooling of the heat source are achieved, which helps to maintain the thermal stability of the working environment of the recognition module 32.

[0023] Reference Figures 1-6 Furthermore, in this device, the first fan 35 is located on top of the base 31 and blows air downwards, while the second fan 36 is located on top of the housing 34 of the laser drilling module 33 and blows air upwards, forming an airflow organization method of "upward delivery and downward extraction, directional airflow". Compared with the traditional symmetrical arrangement where both sides of the fan blow downwards or upwards, this arrangement has a clear structural advantage in terms of thermal management effect. Its rationality can be analyzed from three aspects: airflow path, thermal insulation effect, and temperature field distribution.

[0024] When both fans blow downwards, cool air enters the base 31 and housing 34 simultaneously from above. However, since the recognition module 32 and the laser drilling module 33 are located on the left and right sides of the same base 31, the downward airflow inevitably covers both areas at the same time. On the one hand, the high-speed airflow directly impacts the optical window of the recognition module 32, which may cause a sudden change in the lens surface temperature, leading to focal length drift. On the other hand, the hot air generated by the laser drilling module 33, lacking an effective exhaust channel, easily accumulates at the bottom of the base 31 and inside the housing 34, forming localized high-temperature zones, which in turn exacerbates heat conduction towards the recognition module 32. Furthermore, the two downward airflows converge at the bottom of the base 31 without a clear exit, easily forming vortices or dead zones, reducing overall heat exchange efficiency.

[0025] When both fans blow air upwards, the system is essentially in a negative pressure suction state. At this time, the air inside the base 31 and the outer casing 34 is synchronously drawn upwards, while external air passively replenishes it from the surrounding gaps. Since the laser drilling module 33 is a high-temperature heat source, the air around it is heated and rises, aligning with the direction of the exhaust airflow, resulting in acceptable heat dissipation. However, because there is no active air intake in the area where the identification module 32 is located, the replenished air mostly comes from other areas inside the device, which may include heated return air. More importantly, the hot air exhausted from the laser drilling module 33, during its upward flow, may partially enter the cavity of the base 31 due to lateral diffusion, and then be drawn into the negative pressure area near the identification module 32, causing thermal contamination. Although this arrangement can dissipate heat, it cannot achieve effective isolation between the heat source and the sensitive element.

[0026] In contrast, this solution employs an asymmetrical airflow design: the first fan 35 at the top of the base 31 actively draws in cool air downwards, while the second fan 36 at the top of the outer casing 34 draws in hot air upwards. Because the base 31 has an inclined air guide plate 37 inside, the downward airflow is forced to the area below the laser-drilled module 33, creating a localized positive pressure airflow zone that ensures the cool air preferentially acts on the bottom of the heat source. Simultaneously, the second fan 36 establishes a negative pressure zone above the laser-drilled module 33, causing hot air to rapidly escape upwards along the inner wall of the outer casing 34. This "downward delivery and upward extraction" combined with the airflow guiding structure creates a unidirectional, closed circulation path around the laser-drilled module 33, improving heat exchange efficiency and effectively limiting the lateral diffusion of hot air towards the identification module 32.

[0027] More importantly, the side where the identification module 32 is located is free from active airflow disturbances and is in a relatively stable environment. The base 31, acting as a heat conduction path, experiences a significantly reduced temperature gradient on the side closest to the identification module 32 due to the absence of hot air recirculation and its distance from the main heat source. Therefore, by guiding the airflow direction through a mechanical structure, rather than simply increasing the air volume, effective thermal protection of the heat-sensitive element is achieved without introducing an additional temperature control system.

[0028] Reference Figures 1-6 In some embodiments: the first fan 35 is fixedly mounted on the top end face of the base 31, and its housing is connected to the top wall of the base 31 by screws or snap-fit ​​structures to ensure stable position during operation. The rotation axis of the fan impeller coincides with the cavity of the base 31, so that the airflow enters the internal cavity of the base 31 vertically downward from the fan outlet. This arrangement allows the cold air to evenly cover the upper area of ​​the base 31 and naturally sink under the combined action of gravity and wind pressure, providing initial momentum for the subsequent air guide plate 37 to guide the airflow.

[0029] The second fan 36 is installed at the top opening of the housing 34 of the laser drilling module 33, with its installation direction opposite to that of the first fan 35. Specifically, the air inlet side of the second fan 36 faces the lower space of the housing 34, i.e., the area above the laser drilling module 33; while the air outlet side faces the upper part of the housing 34, i.e., the environment above the equipment. When the second fan 36 operates, its impeller rotation creates a local negative pressure at the air inlet, drawing air upward from the lower part of the housing 34 and discharging it to the upper part of the equipment through the air outlet. Because the heat generated when the laser drilling module 33 is working raises the temperature and lowers the density of the surrounding air, and hot air itself has an upward tendency, the suction effect of the second fan 36 is in the same direction as the thermal buoyancy effect, thereby enhancing the efficiency of hot air discharge.

[0030] The airflow design of the two fans is not independent, but rather works in coordination with the internal geometry of the base 31 and the outer casing 34. The downward airflow provided by the first fan 35 is constrained by the air guide plate 37 within the cavity of the base 31 and directed to the bottom of the laser drilling module 33; while the negative pressure zone formed by the second fan 36 above the module causes the hot air in that area to continuously flow upward. Thus, a forced convection channel with a clear path from bottom to top is constructed around the laser drilling module 33, preventing airflow short-circuiting or hot air backflow to the recognition module 32 side, improving the directionality and effectiveness of the overall heat dissipation system.

[0031] Reference Figures 1-6The air guide plate 37 is a multi-piece flat plate component made of a material with a certain rigidity and heat resistance, such as aluminum alloy or engineering plastic. The upper end of the air guide plate 37 is fixed to the inner surface of the top wall of the base 31 by screws, riveting, or welding, and is positioned close to the center area of ​​the top of the base 31 to ensure structural stability under the impact of fan airflow. The lower end of the air guide plate 37 does not contact the bottom wall of the base 31, but extends towards the side where the laser drilling module 33 is located and is suspended inside the cavity of the base 31. Since the air guide plate 37 is tilted, its plate surface forms an acute angle with the bottom wall of the base 31. The size of this angle directly affects the deflection effect of the airflow: if the angle is too small, the airflow will easily adhere to the plate surface and directly hit the side wall of the base 31, making it difficult to effectively cover the bottom of the laser drilling module 33; if the angle is too large, the airflow deflection will be insufficient, and some cold air may fall directly to the middle of the base 31 or even the side of the identification module 32. When the included angle is controlled within the range of 30 to 60 degrees, the airflow blown downwards by the first fan 35 is effectively deflected upon contact with the air guide plate 37, forming a concentrated jet along the lower part of the plate surface, which precisely sweeps across the bottom area of ​​the housing 34 of the laser drilling module 33. This bottom area is usually where heat accumulates most severely, as the laser body and focusing lens assembly are concentrated here and far from the exhaust vent at the top of the housing 34. The cool air guided by the air guide plate 37 flows through this area, which can enhance the convective heat transfer coefficient and accelerate the transfer of heat from the outer wall of the housing 34 to the flowing air. At the same time, since the airflow path is restricted to the side of the base 31 near the laser drilling module 33, it prevents the cool air from spreading laterally to the installation area of ​​the identification module 32, thereby physically achieving thermal isolation of the heat-sensitive element.

[0032] Reference Figures 1-6 The base 31 structurally serves the dual function of supporting the identification module 32 and the laser drilling module 33, and its dimensional stability directly affects the relative positional accuracy of the two. To suppress geometric deformation caused by temperature fluctuations, the base 31 is made of a material with a low coefficient of thermal expansion. Specifically, Invar (Fe-36%Ni alloy) has a coefficient of linear expansion of approximately 1.2 × 10⁻⁶ °C in the range from room temperature to 100 °C. -6 / ℃, significantly lower than ordinary carbon steel or aluminum alloys; aluminum silicon carbide composites, through the introduction of a ceramic phase (SiC), maintain good thermal conductivity while controlling the coefficient of thermal expansion to 4–7 × 10. -6 The choice of the above materials allows the base 31 to maintain a small overall deformation even under the non-uniform temperature rise caused by local heating of the laser drilling module 33, thereby reducing the disturbance to the optical axis orientation of the recognition module 32.

[0033] Although the base 31 material itself has low expansion characteristics, the heat generated by the laser drilling module 33 can still be directly conducted through the metal contact surface between its outer shell 34 and the base 31. To reduce this heat conduction path, a heat insulation gasket 38 is added at the connection interface between the outer shell 34 and the base 31. This gasket is sandwiched between the mounting flange of the outer shell 34 and the side wall of the base 31, and its thickness is typically 0.5 to 2 mm. Its planar dimensions match the contact surface to ensure uniform stress after assembly. The materials used are mica or polyimide, both of which are non-metallic inorganic or polymeric insulating materials with low thermal conductivity (mica is about 0.7 W / m·K, and polyimide is about 0.1–0.5 W / m·K), much lower than that of metallic materials. The heat insulation pad 38 effectively increases thermal resistance without significantly affecting the mechanical connection stiffness, delaying and weakening the rate of heat transfer from the high-temperature shell 34 to the base 31 body, further reducing the temperature rise of the area of ​​the base 31 near the identification module 32, which helps maintain the positioning stability of the whole machine in continuous operation.

[0034] In the structural design of the base 31 and the outer shell 34, in order to further improve heat dissipation capacity and take into account installation functionality, heat dissipation fins 39 extending longitudinally are provided on both the internal cavity wall and the outer wall. These fins are arranged in parallel at equal intervals, with rectangular or trapezoidal cross sections. The height and thickness are optimized according to the thermal conductivity of the material and space constraints, so as to increase the heat dissipation surface area while avoiding excessive weakening of structural strength.

[0035] Specifically, both the inner and outer walls of the base 31 are provided with longitudinal heat dissipation fins 39, whose extension direction is consistent with the height direction of the equipment, which is conducive to forming effective convective heat transfer in conjunction with vertical airflow. The outer shell 34 also has longitudinal fins arranged inside, especially densely arranged on the inner wall near the laser drilling module 33, to enhance the efficiency of heat conduction from high-temperature components to the shell. It is worth noting that the laser drilling module 33 is arranged inside the shell 34 on the side away from the base 31. Conversely, on the side of the shell 34 near the base 31, opposite the laser drilling module 33, there is a symmetrically positioned set of built-in heat dissipation fins 39. This symmetrical arrangement is not for bearing the heat source, but rather to balance the temperature distribution across the cross-section of the shell 34 by increasing the heat capacity and heat dissipation area of ​​this region, reducing thermal bending deformation caused by unilateral heating, thereby maintaining the stability of the relative position between the shell 34 and the base 31. Furthermore, the longitudinal heat dissipation fins 39 on the outer wall of the shell 34 not only serve a heat dissipation function but also function as mechanical mounting interfaces. The top or sides of these outer heat dissipation fins 39 can be machined with threaded holes, through holes 11, or slot structures, which can be used as brackets, protective covers, cable clamps, or sensor mounting bases to fix the second fan 36. Since the fins themselves have high rigidity and good heat conduction paths, using them as mounting reference surfaces can ensure the positional accuracy of additional components, avoid weakening the structure by making additional holes in the main housing, and utilize the heat dissipation capacity of the fins to remove the small amount of heat generated by auxiliary electronic components (such as temperature sensors or drive circuits), thus achieving an integrated design of structure and function.

[0036] Reference Figures 1-2 The moving component 2 forms an orthogonal two-dimensional motion platform to support and drive the identification and punching component 3 to be precisely positioned in the horizontal plane. The platform uses a rectangular base 21 as its basic component, with a cuboid frame structure providing sufficient rigidity and a mounting reference surface. First guide rails 22 are fixedly installed on the left and right sides of the rectangular base 21 along the longitudinal direction. The two guide rails are parallel to each other, and the direction of movement of their sliding pairs is consistent with the longitudinal coordinate axis of the device. First moving seats 23 are respectively mounted on the two first guide rails 22, forming a low-friction sliding fit between the slider and the guide rails to ensure the smoothness and repeatability of the longitudinal movement.

[0037] An internal threaded hole is formed on the outer wall of the first movable seat 23, and the axis of the internal threaded hole is parallel to the extension direction of the first guide rail 22. The screw of the first electric lead screw 24 passes through the internal threaded hole and forms a helical pair connection with it. The two ends of the first electric lead screw 24 are supported on the rectangular base 21 by bearing seats, and one end is connected to the output shaft of the servo motor through a coupling. When the servo motor rotates, the screw rotates. Since the screw itself does not move axially, and the first movable seat 23 is constrained by the guide rail and can only slide longitudinally, the threaded pair converts the rotational motion into the linear motion of the first movable seat 23, thereby driving the movable frame 25 fixed to it to move longitudinally as a whole.

[0038] The movable frame 25 is a beam-type structure, with its two ends rigidly connected to the left and right first movable seats 23 respectively, spanning above the rectangular base 21. A second guide rail 26 is mounted laterally on the upper surface of the movable frame 25, extending perpendicularly to the first guide rail 22. A second movable seat 27 is slidably mounted on the second guide rail 26, and its bottom has a slider assembly matching the guide rail. An internal threaded hole is also provided on the side of the second movable seat 27, which engages with the screw thread of the second electric lead screw 28. The second electric lead screw 28 is arranged parallel to one side of the second guide rail 26 and fixed to the movable frame 25 by a support seat; one end of it is also connected to an independent servo motor. When the servo motor drives the second electric lead screw 28 to rotate, the second movable seat 27, constrained by the guide rail, can only move laterally, thereby achieving lateral feed relative to the movable frame 25.

[0039] The identification and drilling component 3 is fixed to the outer surface of the second moving base 27 by fasteners. It moves laterally with the second moving base 27 and longitudinally with the moving frame 25 as a whole, thereby achieving full-area coverage in the XY plane. The two sets of electric lead screw systems are independently controlled by their respective servo motors, without interference, and can realize compound trajectory motion or step-by-step positioning to meet the precise drilling requirements of multiple holes on ceramic sheets. The entire moving component 2, through the mechanical combination of guide rail-slider and lead screw-nut, has sufficient structural rigidity while ensuring motion accuracy to resist the slight reaction forces or vibration interference that may be generated during laser drilling.

[0040] The base plate 1 serves as the platform for the equipment, with its upper surface used to place the ceramic sheets to be processed. To facilitate the handling of debris generated during laser drilling, multiple through holes 11 are arranged in a specific layout on the base plate 1. These through holes 11 penetrate the thickness direction of the base plate 1 and are positioned corresponding to the working area of ​​the drilling identification component 3. This allows ceramic particles that fall off during drilling to fall naturally under gravity and be discharged through the through holes 11, preventing them from accumulating on the workpiece surface or scattering near the moving mechanism. A funnel-shaped dust collection device is installed below the base plate 1. This dust collection device consists of an upper conical constriction section and a lower straight cylindrical section. Its upper opening is sealed to the bottom surface of the base plate 1 to ensure that debris does not overflow. The conical structure design helps to gradually gather the dispersed debris into the central channel, improving collection efficiency and reducing the risk of clogging. A removable dust collection box is installed at the lower opening of the dust collection device. This collection box is typically made of plastic or thin-walled metal and has sufficient volume to hold all the ceramic dust generated in a single processing cycle. The collection box is connected to the lower end of the dust collection device via clips, slide rails, or flange bolts, facilitating periodic removal for cleaning or replacement. This structure not only achieves centralized management of debris but also prevents dust from spreading inside the equipment, helping to maintain the cleanliness of optical components and the long-term reliability of moving parts.

[0041] The identification module 32 consists of an industrial camera and a telecentric lens, which are rigidly connected via a mechanical interface. The industrial camera is a CMOS or CCD image sensor with its photosensitive chip located on the image plane of the imaging optical path. The telecentric lens is mounted to the front of the industrial camera via a standard C-mount or F-mount thread and is further secured by a lens bracket. This bracket is typically a ring-shaped metal piece, with one end clamping the lens barrel and the other end fastened to the side wall of the camera housing 34 or base 31 with screws to enhance the overall structure's vibration resistance. The optical axes of the industrial camera and the telecentric lens are strictly aligned, forming a coaxial optical system. Its imaging optical path is vertically downward, pointing perpendicularly to the surface of the ceramic plate placed on the base plate 1, thereby ensuring minimal geometric distortion of the acquired image and meeting high-precision positioning requirements.

[0042] The laser drilling module 33 includes a fiber laser and a focusing lens assembly. The fiber laser serves as the light source, with its output led out through a collimation unit. Its housing is fixed to a mounting platform inside the outer casing 34. The focusing lens assembly, located downstream of the laser beam propagation path, consists of at least one plano-convex lens or a compound achromatic lens, used to converge the parallel laser beam onto the workpiece surface to form a micron-sized spot. Both the fiber laser and the focusing lens assembly are embedded within the cavity of the outer casing 34, which is a cylindrical structure extending vertically. Its inner wall has steps or pressure rings for fixing optical components, while its outer wall is adjacent to the base 31. This integration method protects the internal optical components from external dust contamination and facilitates heat conduction outwards through the walls of the outer casing 34, providing a basis for the design of subsequent heat dissipation structures.

[0043] Reference Figures 1-6 In actual use, the vision-based ceramic sheet drilling device described in this application shall be executed in the following steps: First, the operator places the ceramic sheet to be processed stably on the upper surface of the base plate 1, ensuring it is within the working area of ​​the equipment. Multiple through holes 11 are provided on the base plate 1 in the corresponding area below the ceramic sheet for subsequent debris discharge.

[0044] Subsequently, the control system activates the moving component 2. The first electric lead screw 24 rotates under the drive of a servo motor, and through the helical pair formed with the inner threaded hole on the outer side of the first moving seat 23, drives the first moving seat 23 to move longitudinally along the first guide rails 22 on both sides of the rectangular base 21. Simultaneously, the second electric lead screw 28 rotates under the drive of another servo motor, and through its engagement with the inner threaded hole on the side of the second moving seat 27, drives the second moving seat 27 to move laterally along the second guide rail 26 on the upper surface of the moving frame 25. Through the coordinated control of the two sets of orthogonal motion mechanisms, the identification and drilling component 3 is precisely moved to the initial identification position above the ceramic sheet.

[0045] Upon reaching the predetermined position, the identification module 32 begins operation. The industrial camera images the surface of the ceramic sheet through a telecentric lens, with the imaging optical path pointing vertically downwards towards the base plate 1. The acquired image is analyzed by the image processing system to identify preset positioning marks, edge contours, or feature points, and to calculate the actual position of each drilling target point in the equipment coordinate system.

[0046] Based on the recognition results, the control system replans the path and drives the first electric lead screw 24 and the second electric lead screw 28 to work together, so that the second moving seat 27 drives the recognition and drilling component 3 to move as a whole, and accurately aligns the focused spot of the laser drilling module 33 with the first drilling target point.

[0047] After alignment, the laser drilling module 33 is activated. The fiber laser emits high-energy laser pulses, which are focused by the focusing lens group inside the housing 34 to form microholes on the ceramic sheet. The ceramic debris generated during the drilling process passes through the through hole 11 on the base plate 1 under the action of gravity, falls into the funnel-shaped dust collection device below, and finally collects in the detachable dust collection box for easy centralized cleaning.

[0048] Throughout the drilling process, the heat dissipation system operates continuously: the first fan 35 at the top of the base 31 blows downwards, and the cool air, after entering the internal cavity of the base 31, is guided by the inclined air guide plate 37 and flows to the bottom area on the side where the laser drilling module 33 is located; simultaneously, the second fan 36 at the top of the outer shell 34 draws upwards, expelling the heated air around the laser drilling module 33 through the interior of the outer shell 34. The longitudinal heat dissipation fins 39 on the inner and outer walls of the base 31 and the outer shell 34 further increase the heat dissipation area. The laser drilling module 33 is located on the inner side of the outer shell 34 away from the base 31, and symmetrically distributed internal heat dissipation fins 39 are provided on the opposite side to balance thermal deformation; the heat dissipation fins 39 on the outer side of the outer shell 34, in addition to assisting heat dissipation, also provide mounting interfaces for accessories such as fan brackets. Furthermore, the base 31 is made of Invar or aluminum silicon carbide composite material, and a mica or polyimide thermal insulation pad 38 is provided between the connection interface of the outer shell 34 and the base 31 to jointly suppress heat conduction to the identification module 32 and maintain a stable operating temperature.

[0049] After completing the machining of one hole, the system automatically moves to the next target point and repeats the cycle of identification, positioning, and drilling until all preset holes are machined. The entire process requires no manual intervention, and the thermal management structure effectively reduces the impact of thermal drift, ensuring high repeatability and machining consistency during continuous operation.

[0050] Finally, it should be noted that the methods and devices described in detail above are merely embodiments, and those skilled in the art can modify these embodiments in different ways as long as they do not depart from the scope of the present invention.

Claims

1. A ceramic sheet drilling device based on vision recognition, characterized in that: It includes a base plate (1), a moving component (2), and a punching component (3); the moving component (2) is mounted on the base plate (1) and is used to drive the punching component (3) to move in two dimensions in the horizontal plane; The identification and drilling component (3) includes a hollow base (31) that runs vertically through the base, an identification module (32) and a laser drilling module (33) that are respectively fixed on the left and right sides of the base (31); the laser drilling module (33) is housed in a hollow outer shell (34) that runs vertically through the base; a first fan (35) is provided on the top of the base (31), and a second fan (36) is provided on the top of the outer shell (34); multiple inclined air guide plates (37) are provided inside the base (31), and the air guide plates (37) are used to guide the airflow blown in by the first fan (35) to the side where the laser drilling module (33) is located.

2. The ceramic sheet drilling device based on visual recognition according to claim 1, characterized in that: The first fan (35) is installed at the top of the base (31) with its air outlet direction vertically downward; the second fan (36) is installed at the top of the housing (34) with its air inlet facing downward of the housing (34) and its air outlet facing upward of the housing (34), forming an exhaust direction from bottom to top.

3. The ceramic sheet drilling device based on vision recognition according to claim 1, characterized in that: The air guide plate (37) is a plate-shaped structure. Its upper end is fixedly connected to the inner side of the top wall of the base (31), and its lower end extends obliquely towards the side where the laser drilling module (33) is located. The angle between the air guide plate (37) and the bottom wall of the base (31) is set to effectively guide the airflow to cover the bottom area of ​​the laser drilling module (33).

4. The ceramic sheet drilling device based on vision recognition according to claim 1, characterized in that: The base (31) is made of a material with a low coefficient of thermal expansion, which is Invar or aluminum silicon carbide composite material, in order to reduce structural deformation caused by temperature changes.

5. The ceramic sheet drilling device based on vision recognition according to claim 1 or 4, characterized in that: A heat insulation pad (38) may also be provided between the outer shell (34) and the base (31) at the connection interface. The heat insulation pad (38) is made of mica or polyimide material and is used to block the direct conduction of heat from the laser drilling module (33) to the base (31).

6. The ceramic sheet drilling device based on vision recognition according to claim 1, characterized in that: The moving component (2) includes a rectangular base (21), a first guide rail (22) arranged on the left and right sides of the rectangular base (21), a first moving seat (23) slidably engaged with the first guide rail (22), a first electric screw (24) driving the first moving seat (23) to move longitudinally along the first guide rail (22), a moving frame (25) arranged across the rectangular base (21), a second guide rail (26) arranged on the upper surface of the moving frame (25), a second moving seat (27) slidably engaged with the second guide rail (26), and a second electric screw (28) driving the second moving seat (27) to move laterally along the second guide rail (26); the identification punching component (3) is fixed to the side of the second moving seat (27).

7. The ceramic sheet drilling device based on vision recognition according to claim 2, characterized in that: Both the first movable seat (23) and the second movable seat (27) have internal threaded holes on their outer sides, and these internal threaded holes are respectively engaged with the screw threads of the first electric screw (24) and the second electric screw (28). The first electric screw (24) and the second electric screw (28) are driven by independent servo motors.

8. The ceramic sheet drilling device based on visual recognition according to claim 1, characterized in that: The base plate (1) has several through holes (11); a funnel-shaped dust collection device communicating with the through holes (11) is provided below the base plate (1). A detachable dust collection box is provided at the lower opening of the dust collection device for collecting ceramic debris generated during the drilling process.

9. The ceramic sheet drilling device based on vision recognition according to claim 1, characterized in that: The identification module (32) includes an industrial camera and a telecentric lens. The telecentric lens is fixed to the industrial camera by a lens bracket. The industrial camera and the telecentric lens are coaxially connected, and its imaging optical path is perpendicular to the base plate (1). The laser drilling module (33) includes a fiber laser and a focusing lens group, which are installed inside the housing (34).

10. The ceramic sheet drilling device based on vision recognition according to claim 1, characterized in that: A longitudinally extending heat dissipation fin (39) is provided inside the base (31) and the outer wall of the outer shell (34), and the laser drilling module (33) is provided inside the outer shell (34) on the side away from the base (31), and the built-in heat dissipation fin (39) is symmetrically arranged with the laser drilling module (33).

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