Detection device for air film hole

Abstract

A film hole detection device comprises: a sample stage suitable for placing a sample to be detected; the measuring assembly comprises a light source suitable for emitting initial light; a lens assembly configured to be capable of converting the initial light into first detection light and configured to be capable of converting the initial light into second detection light; the first imaging assembly is suitable for obtaining a plane image of the to-be-detected sample according to the first back diffuse reflection light; the second imaging assembly is suitable for obtaining a light field image of the through hole according to the second back diffuse reflection light; the processing assembly is suitable for obtaining the position information of the gas film hole in the to-be-detected sample according to the plane image and determining whether the gas film hole is a through hole or not; under the condition that the gas film hole is determined to be a through hole, the processing assembly is used for controlling the lens assembly to emit second detection light and focusing the second detection light into the through hole according to the position information of the through hole; the processing assembly is further adapted to obtain a three-dimensional profile of the through hole from the light field image.

Description

Technical Field

[0001] This invention relates to the field of optical inspection, and in particular to a device for detecting air film pores. Background Technology

[0002] With the continuous development of the aero-engine industry, improving aero-engine performance has become a prominent issue in modern aviation. Turbine inlet temperature is one of the key technical indicators of aero-engines, and increasing turbine inlet temperature is an effective means of improving engine thrust and thrust-to-weight ratio. Currently, the turbine inlet temperature of aero-engines has reached approximately 2000K. However, the highest temperature that fourth-generation single-crystal alloy materials can withstand is approximately 1450K, far from meeting the operating environment of around 2000K. To overcome the limitations of the heat resistance of blade materials, thermal protection technology needs to be incorporated into the design and manufacturing of blades to fill the temperature gap. Besides high-temperature resistant structural materials, thermal protection technologies mainly include thermal barrier coatings and air-cooled structures. According to literature reports, film cooling technology can reduce the temperature by 400-500K, providing a more effective cooling effect.

[0003] Film cooling (FSL) technology utilizes numerous air vents distributed on the blade surface to allow airflow between the inside and outside of the blade. Low-temperature air from the internal chambers is expelled through these vents, forming a protective film of cold air on the blade surface to insulate against the impact of high-temperature gases, thus protecting the blade. The geometric parameters of the air vents, including vent diameter, vent position, vent sidewall profile, and blind vents, are the main factors affecting the effectiveness of FSL and are key indicators of the technology. Traditional methods for detecting air vents, such as the plug gauge method, visual comparison method, and water flow method, rely heavily on manual inspection by quality control personnel, which cannot guarantee inspection efficiency and accuracy. To meet the requirements for detecting the geometric parameters of air vents, a high-efficiency, high-precision method is needed to comprehensively and quantitatively measure and evaluate the characteristic elements of air vents.

[0004] Currently, commonly used methods for quantitative detection of film pores include probe measurement, optical measurement, industrial CT, and infrared imaging. Probe measurement, combined with a coordinate measuring machine (CMM), controls a probe to scan the inner surface of the film pore point by point along a planned path to obtain the morphology of the pore wall, offering high reliability. However, this method loses some morphological details, has low measurement efficiency, and may damage the sample surface, failing to meet the large-scale measurement needs of industrial scenarios. Current optical measurement methods can only obtain partial parameter information of film pores. Industrial CT is a widely used non-destructive testing technique that obtains three-dimensional image information of film pores by radiative scanning of the workpiece, capturing most of the geometric features of the film pores; however, CT equipment is expensive and has low detection efficiency. Infrared imaging can detect blind holes and evaluate pore diameter, but it cannot obtain more geometric structural information. Summary of the Invention

[0005] In view of this, the present invention provides a device for detecting air film pores, the device comprising:

[0006] A sample stage is used to place a sample to be tested, wherein the sample to be tested has at least one air film pore.

[0007] Measurement components, including:

[0008] A light source suitable for emitting initial light;

[0009] A lens assembly is configured to convert the initial light into a first probe light and illuminate the surface of the sample to be tested with the first probe light, and is also configured to convert the initial light into a second probe light and incident the second probe light into the through-hole; wherein the first probe light is parallel light, and after diffuse reflection from the sample to be tested, the first probe light obtains a first back diffuse reflection light; the second probe light is focused light, and after diffuse reflection from the through-hole, the second probe light obtains a second back diffuse reflection light;

[0010] A first imaging component is adapted to obtain a planar image of the sample under test based on the first back diffuse reflection light;

[0011] The second imaging component is adapted to obtain the light field image of the through hole based on the second back diffuse reflection light;

[0012] The processing component is adapted to obtain the position information of the air film pores on the sample under test based on the planar image and to determine whether the air film pores are through holes; if the air film pores are determined to be through holes, the processing component is used to control the lens assembly to emit a second probe light, and to focus the second probe light into the through hole according to the position information of the through hole; the processing component is also adapted to obtain the three-dimensional contour of the through hole based on the light field image.

[0013] According to an embodiment of the present invention, the lens assembly includes:

[0014] The first lens unit is configured to collimate the initial light and to change the divergence state of the initial light.

[0015] The second lens unit is configured to reduce the collimated initial light beam to obtain the first probe light, to convert the initial light after changing its divergence state into the second probe light, and to collect the first back diffuse reflection light and the second back diffuse reflection light.

[0016] According to an embodiment of the present invention, the above-described detection device further includes:

[0017] The first beam splitter is adapted to reflect the initial light output from the first lens unit to the second lens unit, and to transmit the back diffuse reflection light from the second lens unit to obtain transmitted light.

[0018] According to an embodiment of the present invention, the above-described detection device further includes:

[0019] The second beam splitter is adapted to reflect transmitted light obtained from the first probe light to the first imaging component to obtain the planar image, and is adapted to transmit transmitted light obtained from the second probe light to the second imaging component to obtain the light field image.

[0020] According to an embodiment of the present invention, the first lens unit includes a first lens, a second lens, and a moving module, wherein the moving module is used to change the position of the second lens;

[0021] When the initial light is converted into the first probe light, the first lens is adapted to collimate the initial light, and the position of the second lens is configured to be away from the optical path where the first lens is located, so as to prevent light from the first lens from entering the second lens;

[0022] When converting the initial light into the second probe light, the first lens is suitable for collimating the initial light, and the second lens is suitable for focusing the collimated initial light. The focused initial light has a different divergence state from the initial light emitted by the light source.

[0023] The collimated initial light is focused at a position far from the first beam splitter, and the collimated initial light continues to propagate to the first beam splitter after focusing.

[0024] According to an embodiment of the present invention, the second lens unit includes a third lens and a fourth lens, and the distance between the third lens and the fourth lens is equal to the sum of their focal lengths.

[0025] According to an embodiment of the present invention, the processing component includes:

[0026] The position determination unit is adapted to determine the position of the air film pores in the planar image;

[0027] The judgment unit is adapted to determine whether the air film hole is a blind hole based on the pixels surrounding the air film hole in the planar image;

[0028] The noise reduction unit is adapted to perform noise reduction processing on the planar image and input the noise-reduced planar image into the position determination unit.

[0029] According to an embodiment of the present invention, the position determination unit includes:

[0030] The classification module is suitable for classifying the pixels of the plane according to the pixel value of each pixel in the planar image;

[0031] The extraction module is suitable for extracting the pixel coordinates of the edges of the air film pores in the planar image based on the classification results;

[0032] The fitting module is suitable for fitting the pixel coordinates of the edge of the air film hole using the least squares method to obtain the center coordinates of the outer end face of the air film hole in the planar image and the aperture of the outer end face, wherein the outer end face of the air film hole is determined by the edge of the air film hole.

[0033] The position determination module is suitable for determining the position of the air film hole on the sample to be tested based on the center coordinates of the outer end face of the air film hole in the planar image and the hole diameter of the outer end face.

[0034] According to an embodiment of the present invention, the processing component further includes:

[0035] The refocusing unit is suitable for refocusing the light field image to obtain images at different depths inside the air film aperture;

[0036] The reconstruction unit is adapted to reconstruct the three-dimensional contour of the air film pore based on images at different depths inside the air film pore.

[0037] According to an embodiment of the present invention, the above-described detection device further includes:

[0038] The base, comprising the first and second parts; and

[0039] A lifting platform is installed on the first part, and the measuring component is installed on the lifting platform;

[0040] The sample stage includes:

[0041] A horizontal displacement stage is mounted on the second part; and

[0042] A rotating stage is mounted on the horizontal displacement stage, and the sample to be tested is placed on the rotating stage;

[0043] The horizontal displacement stage and the rotary stage cooperate to determine and adjust the position of the sample to be tested, and the lifting stage is used to adjust the height of the measuring component.

[0044] According to an embodiment of the present invention, the lens assembly can convert initial light into a first probe light and a second probe light. When the lens assembly converts the initial light into the first probe light, the detection device is in Kohler illumination mode, that is, the probe light output by the light source, after passing through the lens assembly, illuminates the surface of the sample to be tested in the form of the first probe light, so that the sample obtains uniform and sufficient illumination to obtain a clear image of the surface of the sample to be tested. After obtaining the image of the surface of the sample to be tested, the lens assembly can also convert the initial light into the second probe light. At this time, the detection device is in critical illumination mode. At this time, the beam of the second probe light can enter the interior of the air film aperture at different angles and generate back diffuse reflection on the sidewall of the air film aperture, obtaining a reflection signal (back diffuse reflection signal) carrying information about the interior of the aperture, thereby realizing the determination of the three-dimensional contour of the air film aperture. Attached Figure Description

[0045] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0046] Figure 1 An apparatus for detecting air film pores according to an embodiment of the present invention is shown;

[0047] Figure 2 A schematic diagram of a measuring component in Kohler illumination mode according to an embodiment of the present invention is shown;

[0048] Figure 3 A schematic diagram of a measurement component in a critical illumination mode according to an embodiment of the present invention is shown;

[0049] Explanation of reference numerals in the attached figures

[0050] 1-Sample stage; 11-Horizontal displacement stage; 12-Rotary stage;

[0051] 2-Measuring component; 21-Light source; 22-Lens assembly; 221-First lens unit;

[0052] 221-1 First lens; 221-2 Second lens; 222 Second lens unit;

[0053] 222-1-Third lens; 221-4-Fourth lens;

[0054] 23-First Imaging Component;

[0055] 24 - Second imaging component;

[0056] 25 - First beam splitter;

[0057] 26 - Second beam splitter;

[0058] 3-Processing components;

[0059] 4-Sample to be tested;

[0060] 5-Base; 51-Part One; 52-Part Two;

[0061] 6-Lifting platform. Detailed Implementation

[0062] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0063] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0064] All terms used herein, including technical and scientific terms, have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0065] When using expressions such as "at least one of A, B, and C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C. Similarly, when using expressions such as "at least one of A, B, or C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C.

[0066] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of the present invention. Throughout the accompanying drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted where they may cause confusion in understanding the present invention.

[0067] Figure 1 A partial structure of the air film pore detection device provided according to an embodiment of the present invention is shown.

[0068] Figure 2A schematic diagram of a measuring component in Kohler illumination mode, according to an embodiment of the present invention, is shown.

[0069] Figure 3 A schematic diagram of a measurement component in a critical illumination mode provided according to an embodiment of the present invention is shown.

[0070] like Figure 1-3 As shown, the detection device includes: a sample stage 1, a measuring component 2, and a processing component 3.

[0071] The sample stage 1 is suitable for placing the sample 4 to be tested (e.g., a blade). The sample 4 has at least one film-forming hole. The measurement assembly 2 includes: a light source 21, a lens assembly 22, a first imaging assembly 23, and a second imaging assembly 24. The light source 21 is suitable for emitting initial light. The lens assembly 22 is configured to convert the initial light into a first probe light and illuminate the surface of the sample 4, and is also configured to convert the initial light into a second probe light and incident the second probe light into the through-hole; wherein the first probe light is parallel light, and after diffuse reflection from the sample 4, a first back diffuse reflection light is obtained; the second probe light is focused light, and after diffuse reflection from within the through-hole, a second back diffuse reflection light is obtained. The first imaging assembly 23 is suitable for obtaining a planar image of the sample based on the first back diffuse reflection light. The second imaging assembly 24 is suitable for obtaining a light field image of the through-hole based on the second back diffuse reflection light. The processing assembly 3 is suitable for obtaining the position information of the film-forming hole on the sample 4 based on the planar image, and determining whether the film-forming hole is a blind hole. In the case where the air film hole is determined to be a through hole, the processing component 3 is used to control the lens component 22 to emit a second detection light, and to focus the second detection light into the through hole according to the position information of the through hole.

[0072] According to an embodiment of the present invention, when the lens assembly 22 converts the initial light into the first probe light, the detection device is in Kohler illumination mode. That is, the probe light output by the light source 21, after passing through the lens assembly, illuminates the surface of the sample to be tested in the form of the first probe light, so that the sample obtains uniform and sufficient illumination to obtain a clear planar image of the surface of the sample 4 to be tested. After obtaining the image of the surface of the sample 4 to be tested, the processing component 3 can identify whether the air film hole is a through hole. When the identification result is a through hole, the lens assembly 22 can also convert the initial light into the second probe light. At this time, the detection device is in critical illumination mode. At this time, the beam of the second probe light can enter the interior of the air film hole at different angles and generate back diffuse reflection on the side wall of the air film hole, obtaining a reflection signal (back diffuse reflection signal) carrying the information of the interior of the hole, thereby realizing the determination of the three-dimensional contour of the air film hole, and thus obtaining the internal parameter information of the air film hole. The detection device provided according to the embodiment of the present invention can comprehensively reflect the aperture, hole position, hole internal contour, blind hole (or through hole) identification, etc. of the air film hole.

[0073] The detection device of this invention can be used alone to identify blind holes on the sample 4 to be tested. The first imaging component 23 of this invention can be, for example, a common industrial camera or a high-resolution camera. The second imaging component 24 can be, for example, a light field camera.

[0074] The detection device provided according to the embodiments of the present invention is a dual-mode optical detection device that combines image recognition and light field imaging, which can realize efficient and non-destructive measurement of multiple parameters of air film pores.

[0075] According to embodiments of the present invention, reference continues. Figures 2-3 The lens assembly 22 includes a first lens unit 221 and a second lens unit 222. Because this detection device has two illumination modes, such as... Figure 2 As shown, when the detection device is in Kohler illumination mode, the first lens unit 221 is used to collimate the initial light, and the second lens unit is used to reduce the collimated initial light beam to obtain the first detection light. When the detection device is in Kohler illumination mode, as... Figure 3 As shown, the first lens unit 221 is adapted to change the divergence state of the initial light, and the second lens unit 222 is adapted to convert the initial light after the divergence state has been changed into the second probe light.

[0076] Continue to refer to Figures 2-3 According to an embodiment of the present invention, the detection device further includes a first beam splitter 5. The first beam splitter 5 is adapted to reflect the initial light output from the first lens unit 221 to the second lens unit 222, or to transmit the back diffuse reflected light passing through the second lens unit 222 to obtain transmitted light.

[0077] According to an embodiment of the present invention, the detection device further includes: a second beam splitter 6, adapted to reflect transmitted light obtained according to the first probe light to the first imaging component 23 to obtain a planar image, and adapted to transmit transmitted light obtained by the second probe light to the second imaging component 24 to obtain a light field image.

[0078] According to an embodiment of the present invention, the first lens unit 221 includes a first lens 221-1, a second lens 221-2, and a moving module. The moving module is used to change the position of the second lens 221-2 to switch between the Kohler illumination mode and the critical illumination mode. When converting the initial light into the first probe light, i.e., using the Kohler illumination mode, the first lens 221-1 is used to collimate the initial light, and the position of the second lens 221-2 is configured to be away from the optical path of the first lens 221-1 to prevent light from the first lens 221-1 from entering the second lens 221-2. When converting the initial light into the second probe light, i.e., using the critical illumination mode, the first lens 221-1 is used to collimate the initial light, and the second lens 221-2 is used to focus the collimated initial light. The focused position of the collimated initial light is away from the first beam splitter 5, and the collimated initial light continues to propagate to the first beam splitter after focusing. Since the focusing position of the collimated initial light is far from the first beam splitter 5, the initial light incident on the first beam splitter 5 is divergent light, and the focused initial light has a different divergence state from the initial light emitted by the light source.

[0079] According to an embodiment of the present invention, the second lens unit includes a third lens 222-1 and a fourth lens 221-4. The distance between the third lens 222-1 and the fourth lens 221-4 is equal to the sum of their focal lengths.

[0080] According to an embodiment of the present invention, in Kohler illumination mode, the combined effect of the third lens 222-1 and the fourth lens 221-4 can reduce the beam of the initial light after collimation by the first lens unit 221, thereby making the first probe light illuminating the sample 4 under test have a higher density for better imaging of the sample 4 under test. Simultaneously, the image of the sample 4 under test on the high-resolution camera is magnified several times compared to the sample. In critical illumination mode, the first lens unit 221 is used to change the divergence state of the initial light, achieving the collection of initial light energy (the initial light is divergent; if the first lens unit 221 is not used to change the divergence state of the initial light, most of the initial light energy will be lost). Furthermore, with the combined effect of the first lens unit 221 and the second lens unit 222, the second probe light illuminating the surface of the sample 4 under test has a smaller spot size. Therefore, more of the second probe light energy obtained from the initial light can enter the air film aperture to obtain a more accurate three-dimensional contour of the air film aperture. The position and number of lenses in the measurement assembly 2 can be adjusted according to the characteristics of the light source.

[0081] According to an embodiment of the present invention, the processing component 3 includes a position determination unit, a judgment unit, and a noise reduction unit.

[0082] The location determination unit is used to classify the pixels of the planar image based on the pixel value of each pixel, extract the location of the edge of the air film aperture in the planar image based on the classification result, and then obtain the location of the air film aperture in the planar image based on the location of the edge of the air film aperture. The judgment unit is used to determine whether the air film aperture is a blind aperture based on the pixels surrounding the air film aperture in the planar image. The noise reduction unit is used to perform noise reduction processing on the planar image and input the noise-reduced planar image into the location determination unit.

[0083] According to embodiments of the present invention, the classification method can be based on a binary method, also known as thresholding. The binary method divides pixels in a planar image into two categories based on their grayscale values: one is foreground (air film holes in the planar image), and the other is background. By setting a threshold, pixels with grayscale values ​​higher than the threshold are classified as foreground, and pixels with grayscale values ​​lower than the threshold are classified as background, thereby achieving the purpose of pixel classification in the image. Whether the air film hole is open (whether it is a blind hole) affects the intensity distribution of the reflected light field. A blind hole recognition model is established, and the light field images of the air film hole and its surroundings are extracted as training samples. The trained blind hole model can be used for blind hole recognition. According to embodiments of the present invention, the judgment unit is adapted to input the light field image formed by the air film hole and the pixels located around the air film hole in the planar image into the trained blind hole recognition model to determine whether the air film hole is a blind hole. According to embodiments of the present invention, training samples for the blind hole recognition model can be obtained through numerical simulation or experimental methods. Noise may exist in the planar image, and noise can affect the classification effect. Therefore, before inputting the planar image into the position determination unit, the planar image needs to be denoised using the denoising unit.

[0084] According to an embodiment of the present invention, the position determination unit includes a classification module, an extraction module, a fitting module, and a position determination module. The classification module is adapted to classify pixels in a planar image based on the pixel value of each pixel. The extraction module is adapted to extract the pixel coordinates of the edges of the air-film pores in the planar image based on the classification results. The fitting module is adapted to fit the pixel coordinates of the edges of the air-film pores using the least squares method to obtain the center coordinates of the outer end face of the air-film pore in the planar image and the aperture of the outer end face, wherein the outer end face of the air-film pore is determined by the edges of the air-film pore. The position determination module is adapted to determine the position of the air-film pore on the sample to be tested based on the center coordinates of the outer end face of the air-film pore in the planar image and the aperture of the outer end face.

[0085] According to an embodiment of the present invention, the processing component 3 further includes a refocusing unit and a reconstruction unit. The refocusing unit is used to refocus the light field image to obtain images at different locations inside the air film aperture. The reconstruction unit is used to reconstruct the three-dimensional contour of the air film aperture based on the images at different locations inside the air film aperture.

[0086] According to an embodiment of the present invention, the detection device further includes a base 7 and a lifting platform 8. The base 7 includes a first part 71 and a second part 72, and the base 7 may be, for example, a marble base. The lifting platform 8 is mounted on the first part 71, and the measuring component 2 is mounted on the lifting platform 8.

[0087] According to an embodiment of the present invention, the sample stage 1 includes a horizontal displacement stage 11 and a rotary stage 12. The horizontal displacement stage 11 is mounted on the second part 72. The rotary stage 12 is mounted on the horizontal displacement stage 11, and the sample 4 to be tested is placed on the rotary stage 13. The horizontal displacement stage 11 and the rotary stage 12 cooperate to determine and adjust the position of the sample 4 to be tested, and the lifting stage 6 is used to adjust the height of the measuring component 2.

[0088] According to an embodiment of the present invention, the horizontal displacement stage 11, the rotary stage 12, and the lifting stage 6 constitute a five-axis motion platform for the detection device. In this embodiment, the X direction is defined as the rightward direction, the Y direction as the outward direction along the letter face, and the Z direction as the upward direction. The rotary stage 12 is a two-dimensional rotary stage, meaning that the rotary stage 12 can rotate around the Z and Y directions.

[0089] The detection device provided according to the embodiments of the present invention combines the high precision of image recognition with the high efficiency of light field three-dimensional imaging, and can comprehensively reflect the aperture, position, internal contour, and blind hole identification of the air film pores.

[0090] The embodiments of the present invention have been described above. However, these embodiments are merely illustrative and not intended to limit the scope of the invention. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of the invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the invention, and all such substitutions and modifications should fall within the scope of the invention.

Claims

1. A device for detecting air film pores, comprising: A sample stage is used to place a sample to be tested, wherein the sample to be tested has at least one air film pore. Measurement components, including: A light source suitable for emitting initial light; A lens assembly is configured to convert the initial light into a first probe light and illuminate the surface of the sample to be tested with the first probe light, and is also configured to convert the initial light into a second probe light and incident the second probe light into the through-hole; wherein the first probe light is parallel light, and after diffuse reflection from the sample to be tested, the first probe light obtains a first back diffuse reflection light; the second probe light is focused light, and after diffuse reflection from the through-hole, the second probe light obtains a second back diffuse reflection light; A first imaging component is adapted to obtain a planar image of the sample under test based on the first back diffuse reflection light; The second imaging component is adapted to obtain the light field image of the through hole based on the second back diffuse reflection light; The processing component is adapted to obtain the position information of the air film pores on the sample under test based on the planar image and to determine whether the air film pores are through holes; if the air film pores are determined to be through holes, the processing component is used to control the lens assembly to emit a second probe light, and to focus the second probe light into the through hole according to the position information of the through hole; the processing component is also adapted to obtain the three-dimensional contour of the through hole based on the light field image.

2. The detection device according to claim 1, wherein, The lens assembly includes: The first lens unit is configured to collimate the initial light and to change the divergence state of the initial light. The second lens unit is configured to reduce the collimated initial light beam to obtain the first probe light, to convert the initial light after changing its divergence state into the second probe light, and to collect the first back diffuse reflection light and the second back diffuse reflection light.

3. The detection device according to claim 1 further includes: The first beam splitter is adapted to reflect the initial light output from the first lens unit to the second lens unit, and to transmit the back diffuse reflection light from the second lens unit to obtain transmitted light.

4. The detection device according to claim 1, further comprising: The second beam splitter is adapted to reflect transmitted light obtained from the first probe light to the first imaging component to obtain the planar image, and is adapted to transmit transmitted light obtained from the second probe light to the second imaging component to obtain the light field image.

5. The detection device according to claim 3, wherein, The first lens unit includes a first lens, a second lens, and a moving module, wherein the moving module is used to change the position of the second lens; When the initial light is converted into the first probe light, the first lens is adapted to collimate the initial light, and the position of the second lens is configured to be away from the optical path where the first lens is located, so as to prevent light from the first lens from entering the second lens; When converting the initial light into the second probe light, the first lens is suitable for collimating the initial light, and the second lens is suitable for focusing the collimated initial light. The focused initial light has a different divergence state from the initial light emitted by the light source. The collimated initial light is focused at a position far from the first beam splitter, and the collimated initial light continues to propagate to the first beam splitter after focusing.

6. The detection device according to claim 3, wherein, The second lens unit includes a third lens and a fourth lens; the distance between the third lens and the fourth lens is equal to the sum of their focal lengths.

7. The detection device according to claim 1, wherein, The processing component includes: The position determination unit is adapted to determine the position of the air film pores in the planar image; The judgment unit is adapted to determine whether the air film hole is a blind hole based on the pixels surrounding the air film hole in the planar image; The noise reduction unit is adapted to perform noise reduction processing on the planar image and input the noise-reduced planar image into the position determination unit.

8. The detection device according to claim 6, wherein, The location determination unit includes: The classification module is suitable for classifying the pixels of the plane according to the pixel value of each pixel in the planar image; The extraction module is suitable for extracting the pixel coordinates of the edges of the air film pores in the planar image based on the classification results; The fitting module is suitable for fitting the pixel coordinates of the edge of the air film hole using the least squares method to obtain the center coordinates of the outer end face of the air film hole in the planar image and the aperture of the outer end face, wherein the outer end face of the air film hole is determined by the edge of the air film hole. The position determination module is suitable for determining the position of the air film hole on the sample to be tested based on the center coordinates of the outer end face of the air film hole in the planar image and the hole diameter of the outer end face.

9. The detection device according to claim 1, wherein, The processing component further includes: The refocusing unit is suitable for refocusing the light field image to obtain images at different depths inside the air film aperture; The reconstruction unit is adapted to reconstruct the three-dimensional contour of the air film pore based on images at different depths inside the air film pore.

10. The detection device according to claim 1, further comprising: The base consists of a first part and a second part; as well as A lifting platform is installed on the first part, and the measuring component is installed on the lifting platform; The sample stage includes: A horizontal displacement stage is mounted on the second part; and A rotating stage is mounted on the horizontal displacement stage, and the sample to be tested is placed on the rotating stage; The horizontal displacement stage and the rotary stage cooperate to determine and adjust the position of the sample to be tested, and the lifting stage is used to adjust the height of the measuring component.

Images