A coating device and method for organic small molecule thin films

Abstract

This invention discloses a coating device and method for organic small molecule thin films, relating to the field of organic small molecule thin film coating technology. The invention involves forming spherical cap-shaped droplets by micro-level solution droplet addition, applying high-frequency vibrations of 20–200 kHz using an acoustic vibration device to create a high sound pressure zone inside the droplet and drive the solution to spread rapidly without contact. Subsequently, natural evaporation or low-temperature solvent evaporation at ≤80℃ induces the self-mixing flow of Marangoni molecules, ultimately forming a micron-scale continuous organic small molecule thin film coating. This coating remains continuous and crack-free under small elastic deformation of the substrate (0–5%).

Description

Technical Field

[0001] This invention relates to the field of organic small molecule thin film coating technology, specifically to an organic small molecule thin film coating device and method. Background Technology

[0002] Existing methods for applying anti-corrosion and environmentally friendly coatings mainly include spin coating, spray coating, blade coating, roller coating, dip coating, screen printing coating, slot extrusion coating, powder coating, and brush coating. These methods generally suffer from the following technical limitations: mechanical contact or high-speed shear forces can lead to uneven spreading of the organic small molecule solution, making it even more difficult to ensure film thickness consistency under the deformation of flexible substrates. Spin coating relies on centrifugal force, and its thickness control is significantly affected by the size and shape of the substrate, making it unsuitable for asymmetric or locally deformed substrates. Spraying, blade coating, and roller coating are contact or semi-contact coating methods, which suffer from streaks, thickness fluctuations, and solution backflow and accumulation problems. Summary of the Invention

[0003] To overcome the shortcomings of the prior art, the present invention provides the following technical solution: a coating method for organic small molecule films, comprising the following steps performed at room temperature: Step 1, substrate preparation: selecting a flexible or deformable substrate as a flexible substrate; the flexible substrate includes polyimide film, PET film, TPU film, flexible thin metal foil, or flexible polymer composite film; Step 2, solution preparation: preparing an organic small molecule solution; the film-forming solute in the organic small molecule solution is an organic small molecule coating material with anti-corrosion or environmental degradation functions; adding a trace amount of surfactant to the organic small molecule solution; the concentration of the trace surfactant is 0.01–0.1 wt%; Step 3, solution drop addition: using a drop addition assembly to... The organic small molecule solution obtained in step 2 is dropped onto the surface of the flexible or slightly deformable substrate obtained in step 1, forming a spherical cap-shaped droplet. Step 4, acoustic vibration spreading: Acoustic vibration is applied to the substrate with the spherical cap-shaped droplet obtained in step 3 using a spreading component, creating a high sound pressure zone inside the droplet. Driven by this high sound pressure zone, the solution spreads rapidly without contact, covering the substrate surface. Step 5, drying and curing: The spread liquid film obtained in step 4 is dried and cured using a gentle solvent evaporation method. During solvent evaporation, Marangoni molecules are induced to self-mix and flow, allowing the film-forming solute to continuously mix within the liquid film and achieve self-uniform thickness, ultimately forming a micron-scale continuous organic small molecule thin film coating. Under elastic deformation of 0–5% on the flexible or deformable substrate, the micron-scale continuous organic small molecule thin film coating obtained in step 5 maintains continuity without cracking or delamination.

[0004] Preferably, the mild solvent evaporation method in step 5 includes natural evaporation, low-temperature heating evaporation at ≤80℃, or low-speed airflow assisted evaporation at ≤0.5m / s; Marangoni molecular self-mixing flow is the internal flow formed by the surface tension gradient during the solvent evaporation process.

[0005] Preferably, the organic small molecule solution in step 2 is a solution of a film-forming solute dissolved in an aqueous solvent or a volatile organic solvent system; the trace surfactant in step 2 is used to enhance the internal mixing ability of Marangoni molecules in self-mixing flow.

[0006] Preferably, the spherical cap-shaped droplet in step 3 is a convex droplet formed under the action of surface tension after the solution is dropped onto the substrate surface; the high sound pressure zone in step 4 is a local high sound pressure gradient region formed inside the droplet by high frequency sound wave vibration; the contactless rapid spreading of the solution in step 4 is a spreading process achieved by the solution without mechanical contact or scraping under the drive of the high sound pressure zone.

[0007] Preferably, the thickness of the micron-scale continuous organic small molecule thin film coating formed in step 5 ranges from 1 to 50 μm.

[0008] An apparatus used in an organic small molecule thin film coating method includes a vibrating assembly and a dropping assembly. The vibrating assembly includes a frame beam with four support legs fixedly mounted on it. Each support leg has an electric roller rotatably mounted at its bottom end. The electric roller is rolled on a vibrating slide plate, which has two parallel slide rail grooves in which the electric roller rolls. An ultrasonic transducer, a surface acoustic wave generator, or a thin film-attached vibrating transducer module is embedded inside the vibrating slide plate. Four leveling electric cylinders are also fixedly mounted on the frame beam, and the ends of the telescopic rods of the four leveling electric cylinders are fixedly connected to a mounting frame. The dropping assembly is fixedly mounted on the mounting frame.

[0009] Preferably, the dripping assembly includes a spreading cover and a storage box, both of which are fixed on a mounting frame. A cover is fixedly installed on the storage box in an easily detachable manner. An air inlet is provided on the side of the cover, and a magnetically attached magnetic patch is also attached to the side of the cover to block the air inlet when not in use, preventing dust from entering the storage box. A three-way pipe, identical to the one inside the cover, is fixedly installed on the cover. One end of the three-way pipe is connected to the inside of the spreading cover. A dripping plate is fixedly provided at the bottom of the spreading cover, and the dripping plate has evenly distributed through holes for the solution to drip.

[0010] Preferably, the drip plate and / or the spreading cover are equipped with a horizontal angle sensor to monitor the horizontal state of the drip plate in real time. The horizontal angle sensor signal is used as a reference to adjust the extension and retraction of the four leveling electric cylinder telescopic rods to control the horizontality of the drip plate and realize closed-loop control.

[0011] Preferably, a ducted fan motor is installed at the end of the tee pipe away from the flexible guide pipe. The ducted fan motor is fixedly mounted on the cover by a ducted fan motor bracket. The ducted fan motor is coaxially arranged with the tee pipe. A dust cover is installed between the ducted fan motor and the tee pipe to prevent dust and impurities from being sucked into the tee pipe. The top of the ducted fan motor bracket is connected to the end of the tee pipe near the flexible guide pipe and the cover by a pull rod.

[0012] Preferably, a floating ring is provided inside the storage box, and a thin steel plate is fixedly installed on the inner side of the floating ring. Multiple conical perforations are opened on the thin steel plate, and piezoelectric ceramics are also concentrically fixed on the lower surface of the thin steel plate to drive the thin steel plate to vibrate.

[0013] Compared with the prior art, the present invention has the following advantages: (1) The present invention uses the acoustic field to form a high acoustic pressure gradient ΔP inside the droplet as the sole spreading power, without relying on scraping or rolling mechanical contact, fundamentally eliminating the problems of curing shrinkage stress, surface scraping shear damage, microcrack propagation caused by stress concentration, and film rupture caused by substrate stress deformation in the traditional mechanical film forming process. It is especially suitable for polyimide with yield strain >10%, low modulus and high elongation TPU, and TPU and PET system with the best elastic compatibility, realizing the film forming stability boundary that can still maintain solid-liquid acoustic wave stable coupling under high deformation, avoiding the film cracking and substrate rupture problems that are easy to occur on flexible substrates in the traditional scraping / rolling coating method, so that the film maintains a continuous and stable liquid film phase state during deformation and acoustic wave spreading; (2) The traditional spraying atomization of the present invention relies on high-speed airflow >1m / s to impact the substrate, which will cause droplet bouncing, splitting, atomization particle size out of control and splashing. The use of trace surfactants is only used as a condition for the formation of Marangoni gradient, while the power source for unfolding comes entirely from the 20–200kHz acoustic field. The drying stage is limited to a low-speed and mild airflow of ≤0.5m / s, so that the solution maintains a stable initial state of spherical cap after drop addition, without bouncing or splitting out of control, achieving precise delivery, no splashing, no atomization out of control, and no fluid impact damage; (3) This invention utilizes the interfacial free energy gradient ΔG formed by the surface tension difference of Δγ during solvent evaporation to induce the self-mixing flow of Marangoni molecules, achieving self-uniform control of film thickness of 1–50μm, without relying on external metering gaps or pumping shear force. The film thickness uniformity force comes from interfacial energy rather than mechanical force, making the film thickness continuous and smooth, without external curing shrinkage stress and local accumulation unevenness, significantly improving the film thickness uniformity and micron-level continuous film formation stability. Attached Figure Description

[0014] Figure 1 The diagram shows the vibration component and the dripping component of this invention.

[0015] Figure 2 This is a schematic diagram of the dropping component structure of the present invention.

[0016] Figure 3 This is a schematic diagram of the storage box structure of the present invention.

[0017] Figure 4 This is a schematic diagram of the thin steel plate structure of the present invention.

[0018] In the diagram: 101-Vibrating slide plate; 102-Support leg; 103-Electric roller; 104-Slide rail groove; 105-Leveling electric cylinder; 106-Mounting frame; 107-Frame beam; 201-Dispersion cover; 202-Storage box; 203-Drip plate; 204-Flexible guide pipe; 205-T-connector; 206-Tie rod; 207-Duct fan motor bracket; 208-Dust cover; 209-Duct fan motor; 210-Clip cover; 211-Air inlet; 212-Magnetic adhesive patch plate; 213-Thin steel plate; 214-Perforation; 215-Piezoelectric ceramic; 216-Floating ring. Detailed Implementation

[0019] The following is in conjunction with the appendix Figures 1-4 The technical solution of the present invention will be further illustrated through specific embodiments.

[0020] This invention provides a method for coating organic small molecule thin films, characterized by performing the following steps at room temperature: Step 1: Substrate Preparation. Select a flexible or deformable substrate as the flexible base material. Flexible base materials include polyimide film (high yield strain (>10%), solvent resistant, low bending stiffness; does not break under deformation, and allows sound waves to propagate), PET film (strong elastic deformation capability, moderate surface energy; easily excited by vibration energy), TPU film (low elastic modulus, high elongation; best deformation compatibility), flexible thin metal foil (possesses sound conductivity, smooth surface; low vibration transmission loss), or flexible polymer composite film (including barrier layer and functional layer; suitable for corrosion protection and environmental protection). Surface cleaning (such as plasma cleaning) is required to increase the surface energy of the substrate, making the spherical droplet more stable and its vibration spread more efficient after addition. After the surface energy is increased, the solution wetting angle decreases, which is conducive to the formation of a continuous phase in the liquid film during sound wave spread, preventing droplet bouncing or uncontrolled splitting. The acoustic vibration unfolding (step 4) requires good coupling between the substrate and the unfolding component. The flexible substrate has the ability to propagate sound waves at the solid interface. Its sound velocity, acoustic impedance and vibration attenuation coefficient are within a reasonable range in the thin film material, so that the high-frequency sound waves can form a stable vibration field when propagating on the substrate surface, without failing due to excessive damping.

[0021] Step 2, Solution Preparation: Prepare an organic small molecule solution; the film-forming solute in the organic small molecule solution is an organic small molecule coating material with anti-corrosion or environmentally degradable functions; add a trace amount of surfactant to the organic small molecule solution; the concentration of the trace surfactant is 0.01–0.1 wt%. The organic small molecule solution in Step 2 is a solution in which the film-forming solute is dissolved in an aqueous solvent or volatile organic solvent system; the trace amount of surfactant in Step 2 is used to enhance the internal mixing ability of Marangoni molecules for self-mixing flow. This solution system includes: solvent (dispersion medium): aqueous solvent or volatile organic solvent (such as ethanol, ethyl acetate, methyl formate, and other low-toxicity, volatile solvents); film-forming solute: organic small molecule coating material with anti-corrosion or environmentally degradable functions (such as benzimidazole anti-corrosion molecules, fatty acid ester degradable film-forming molecules, rosin ester modified small molecules, plant tannin-derived anti-corrosion small molecules); trace amount of surfactant. Organic small molecules have definite molecular weights, no long chain entanglement, low cohesive viscosity, interfacial migration capability, solvent evaporation-driven self-rearrangement, and no curing shrinkage stress, making them more suitable for the Marangoni molecular self-mixing flow mechanism.

[0022] The scientific mechanism of action of trace surfactants: A surface tension gradient Δγ (spatial surface tension difference) is formed during solvent evaporation. This gradient drives Marangoni molecule self-mixing flow within the liquid film. This flow is essentially solvent convection mixing induced by the interfacial free energy gradient, rather than mechanical force. The scientific basis for a reasonable concentration range: <0.01wt%: Insufficient surface tension gradient, Marangoni flow cannot form; 0.1wt%: The interface may be overactivated, forming foam or film surface disturbance; 0.01–0.1wt%: Gradient flow can be formed without disrupting film continuity. This step only provides the preconditions for interfacial energy-driven flow. The driving force for film unfolding does not come from the solution itself, but from the acoustic field in step 4. Therefore, this step does not involve a mechanical coating mechanism.

[0023] Step 3, Solution Dropping Step: The organic small molecule solution obtained in Step 2 is dropped onto the flexible or slightly deformable substrate surface obtained in Step 1 using a dropping component, forming a spherical cap-shaped droplet. The spherical cap-shaped droplet in Step 3 is a convex droplet formed under the action of surface tension after the solution is dropped onto the substrate surface. The formation mechanism of the spherical cap-shaped droplet: After the droplet is dropped, it is determined by the substrate surface energy, solution surface tension, gravity, density ρ, viscosity μ, droplet volume V, and wetting angle θ. Since the surface energy enhancement treatment has been completed in Step 1, the droplet will not form a perfect sphere, but will form a convex spherical cap-shaped droplet under the action of surface tension and wetting force. This is the initial state basis for the acoustic wave deployment. This method can achieve precise solution delivery, no splashing, no atomization, no scratching, and no centrifugation. It does not require large-volume dip coating or continuous roller coating. Therefore, a micro-level controllable droplet volume input method must be used. This method only provides the solution and does not provide the deployment driving force.

[0024] The dripping assembly includes a spreading cover 201 and a storage box 202, both of which are fixed on the mounting bracket 106. A cover 210 is fixedly installed on the storage box 202 in a way that is easy to disassemble. An air inlet 211 is provided on the side of the cover 210. A magnetic adhesive plate 212 is also magnetically attached to the side of the cover 210 to block the air inlet 211, so as to block the air inlet 211 when not in use and prevent dust from entering the storage box 202. A three-way pipe 205, which is the same as the inside of the cover 210, is fixedly installed on the cover 210. One end of the three-way pipe 205 is connected to the inside of the spreading cover 201 through the three-way pipe 205. A dripping plate 203 is fixedly provided at the bottom of the spreading cover 201. The dripping plate 203 has evenly arranged through holes for the solution to drip. A horizontal angle sensor is provided on the drip plate 203 and / or the spreading cover 201 to monitor the horizontal state of the drip plate 203 in real time. The extension and retraction of the four leveling electric cylinders 105 are adjusted based on the horizontal angle sensor signal to control the levelness of the drip plate 203 and achieve closed-loop control. A ducted fan motor 209 is provided at the end of the three-way pipe 205 away from the flexible guide pipe 204. The ducted fan motor 209 is fixedly mounted on the cover 210 through the ducted fan motor bracket 207. The ducted fan motor 209 and the three-way pipe 205 are coaxially arranged. A dust cover 208 is provided between the ducted fan motor 209 and the three-way pipe 205 to prevent dust and impurities from being sucked into the three-way pipe 205. The top of the ducted fan motor bracket 207 is connected to the end of the three-way pipe 205 near the flexible guide pipe 204 and the cover 210 through the pull rod 206. The storage box 202 has a floating ring 216 inside, and a thin steel plate 213 is fixedly installed on the inner side of the floating ring 216. The thin steel plate 213 has multiple conical perforations 214. A piezoelectric ceramic 215 is also concentrically fixed on the lower surface of the thin steel plate 213 to drive the thin steel plate 213 to vibrate.

[0025] The prepared organic small molecule solution is poured into the storage box 202, then the floating ring 216 is placed in, and finally the cover 210 is installed on the storage box 202. It should be noted that the piezoelectric ceramic 215 is energized by a wire that passes through the storage box 202. When the piezoelectric ceramic 215 is energized, it will vibrate. This vibration will be transmitted to the thin steel plate 213. Since the floating ring 216 floats on the solution and the piezoelectric ceramic 215 has its own weight, the floating state will cause the thin steel plate 213 to come into contact with the solution surface. Due to the vibration of the thin steel plate 213, the thin steel plate 213 will tap the solution, allowing the solution to pass through the perforation 214 to form an atomization (due to the conical shape of the perforation 214). Simultaneously, the ducted fan motor 209 is activated, blowing outside air into the three-way pipe 205. During this process, airflow occurs within the three-way pipe 205. According to Bernoulli's principle, the pressure inside the three-way pipe 205 is lower than the external atmospheric pressure. This causes air located at the ducted fan motor 209 to pass through the dust cover 208 (the gap between the ducted fan motor 209 and the three-way pipe 205) and enter the three-way pipe 205. This results in even more airflow within the three-way pipe 205. At the same time, outside air also flows through the air inlet. 211 enters the cap 210, then carries the atomized solution into the three-way tube 205. Guided by the three-way tube 205 and the flexible guide tube 204, the atomized solution enters the dispersing hood 201 and finally deposits on the dripping plate 203. Because the dripping plate 203 has multiple through holes, the deposited solution gradually permeates the dripping plate 203. With the air pressure provided by the ducted fan motor 209 to the three-way tube 205, the flexible guide tube 204, and the dispersing hood 201, the solution can more easily pass through the dripping plate 203 and then drip. Before this, the substrate needs to be laid flat on the vibrating slide plate 101, and then the electric roller 103 is controlled to roll in the slide rail groove 104, which makes the dripping plate 203 in the dispersing hood 201 move above the substrate, thereby uniformly dripping the organic small molecule solution onto the substrate.

[0026] Step 4, Acoustic Vibration Spreading Step: Acoustic vibration is applied to the substrate with the spherical droplet obtained in Step 3 by the spreading component, creating a high sound pressure zone inside the droplet. Driven by this high sound pressure zone, the solution spreads rapidly without contact, covering the substrate surface. The sound waves create pressure nodes and peaks inside the droplet, generating localized high pressure at the peaks, causing the droplet to spread into a continuous liquid film. The high sound pressure zone in Step 4 is a localized high sound pressure gradient region formed by high-frequency acoustic vibration inside the droplet. The rapid, contactless spreading of the solution is a spreading process achieved without mechanical contact or scraping, driven by the high sound pressure zone. Energy transfer mechanism of high-frequency acoustic vibration: The acoustic transducer forms a solid-interface vibration field on the substrate surface. The vibration propagates at the speed of sound c, forming a mixed field of standing waves and traveling waves on the thin, flexible substrate surface. When the droplet is located in the standing / traveling wave overlap region, a high sound pressure zone is formed inside, creating a pressure gradient ΔP within the liquid. This pressure gradient directly drives the liquid to spread rapidly without contact from the center outwards. Conditions for the formation of high sound pressure zones: vibration frequency 20–200 kHz.

[0027] The vibration assembly includes a frame beam 107, on which four support legs 102 are fixedly mounted. Each support leg 102 has an electric roller 103 rotatably mounted at its bottom end. The electric roller 103 is rolled on the vibrating slide plate 101, and the vibrating slide plate 101 has two parallel slide rail grooves 104, in which the electric roller 103 rolls. An ultrasonic transducer, a surface acoustic wave generator, or a thin-film attached vibration transducer module is embedded inside the vibrating slide plate 101. Four leveling electric cylinders 105 are also fixedly mounted on the frame beam 107. The ends of the telescopic rods of the four leveling electric cylinders 105 are fixedly connected to the mounting frame 106, on which a dripping assembly is fixedly mounted. The ultrasonic transducer, surface acoustic wave generator, or thin-film attached vibration transducer module installed inside the vibrating slide 101 is activated (the dripping component is not working at this time; if it is a production line, the dripping component and the spreading component are set separately to prevent mutual interference), causing the substrate on the vibrating slide 101 to vibrate. The dripping component drips onto the substrate surface to form a flexible or slightly deformable spherical cap-shaped droplet. High-frequency acoustic wave vibration is applied to the substrate of the spherical cap-shaped droplet through the ultrasonic transducer, surface acoustic wave generator, or thin-film attached vibration transducer module (transmitted to the substrate through the vibrating slide 101), so that a high sound pressure zone is formed inside the spherical cap-shaped droplet. Driven by the high sound pressure zone, the solution spreads rapidly without contact, so that the solution covers the substrate surface; the frequency range of the high-frequency acoustic wave vibration is 20–200kHz.

[0028] Step 5: Drying and Curing: The spread liquid film obtained in Step 4 is dried and cured using a mild solvent evaporation method. During the solvent evaporation process, Marangoni (effect name, specifically referring to interfacial flow phenomenon driven by surface tension difference) molecular self-mixing flow is induced, allowing the film-forming solute to continuously mix within the liquid film and achieve self-uniformity of thickness, ultimately forming a micron-scale continuous organic small molecule thin film coating (the thickness range of the formed micron-scale continuous organic small molecule thin film coating is 1–50 μm). Mild-temperature solvent evaporation methods include natural evaporation, low-temperature heating evaporation ≤80℃, or evaporation assisted by a low-speed airflow ≤0.5 m / s; Marangoni molecular self-mixing flow is an internal flow formed by the surface tension gradient during solvent evaporation. The scientific mechanism of Marangoni molecular self-mixing flow: Solvent evaporation reduces interfacial tension, and uneven distribution of surfactants leads to a surface tension difference Δγ. This difference forms an interfacial free energy gradient ΔG, inducing convective mixing within the liquid film, allowing the film-forming solute to continuously self-mix during evaporation. This self-mixing process achieves self-uniformity of film thickness.

Claims

1. A method for coating an organic small molecule thin film, characterized by, Perform the following steps at room temperature: Step 1, Substrate Preparation: Select a flexible or deformable substrate as the flexible substrate; flexible substrates include polyimide film, PET film, TPU film, flexible thin metal foil, or flexible polymer composite film; Step 2, Solution Preparation Steps: Prepare organic small molecule solutions; The film-forming solute in the organic small molecule solution is an organic small molecule coating material with anti-corrosion or environmentally degradable functions; Add a trace amount of surfactant to the organic small molecule solution; the concentration of the trace surfactant is 0.01–0.1 wt%. Step 3, Solution Dropping Step: The organic small molecule solution obtained in Step 2 is dropped onto the surface of the flexible or slightly deformable substrate obtained in Step 1 using a dropping assembly to form a spherical cap-shaped droplet; Step 4, Acoustic vibration spreading step: The spreading component applies acoustic vibration to the substrate with spherical cap-shaped droplets obtained in step 3, so that a high sound pressure zone is formed inside the spherical cap-shaped droplets, and the solution spreads rapidly without contact under the drive of the high sound pressure zone, so that the solution covers the surface of the substrate. Step 5, Drying and Curing: The spread liquid film obtained in Step 4 is dried and cured by a mild solvent evaporation method. During the solvent evaporation process, Marangoni molecules are induced to self-mix and flow, so that the film-forming solute is continuously mixed inside the liquid film and achieves self-uniform thickness, ultimately forming a micron-scale continuous organic small molecule thin film coating.

2. The method of claim 1, wherein the method is characterized by: In step 5, the mild solvent evaporation methods include natural evaporation, low-temperature heating evaporation at ≤80℃, or low-speed airflow assisted evaporation at ≤0.5m / s; Marangoni molecular self-mixing flow is the internal flow formed by the surface tension gradient during the solvent evaporation process.

3. The method of claim 1, wherein the method further comprises: The organic small molecule solution in step 2 is a solution of film-forming solute dissolved in an aqueous solvent or volatile organic solvent system; the trace surfactant in step 2 is used to enhance the internal mixing ability of Marangoni molecules in self-mixing flow.

4. The method of claim 1, wherein the method is characterized by: In step 3, the spherical droplet is a convex droplet formed under the action of surface tension after the solution is added to the substrate surface; in step 4, the high sound pressure zone is a local high sound pressure gradient region formed inside the droplet by high-frequency sound wave vibration; in step 4, the solution spreads rapidly without contact, which is a spreading process achieved by the solution without mechanical contact or scraping under the drive of the high sound pressure zone.

5. The method of claim 1, wherein the method further comprises: The thickness of the micron-scale continuous organic small molecule thin film coating formed in step 5 ranges from 1 to 50 μm.

6. The apparatus used in the method of claim 1, wherein: The vibration assembly includes a frame beam (107), on which four support legs (102) are fixedly installed. Each support leg (102) has an electric roller (103) rotatably installed at its bottom end. The electric roller (103) is rolled on the vibration slide plate (101), and the vibration slide plate (101) has two parallel slide rail grooves (104), in which the electric roller (103) rolls in the slide rail groove (104). An ultrasonic transducer, a surface acoustic wave generator, or a thin film attached vibration transducer module is embedded inside the vibration slide plate (101). Four leveling electric cylinders (105) are also fixedly installed on the frame beam (107). The ends of the telescopic rods of the four leveling electric cylinders (105) are fixedly connected to the mounting frame (106), and a dripping assembly is fixedly installed on the mounting frame (106).

7. The equipment used in the organic small molecule thin film coating method according to claim 6, characterized in that: The dripping assembly includes a spreader (201) and a storage box (202), both of which are fixed on a mounting bracket (106). A cover (210) is fixedly installed on the storage box (202) in a way that is easy to disassemble. A three-way pipe (205) identical to the one inside the cover (210) is fixedly installed on the cover (210). One end of the three-way pipe (205) is connected to the inside of the spreader (201) through the three-way pipe (205). A dripping plate (203) is fixedly provided at the bottom of the spreader (201). The dripping plate (203) has evenly arranged through holes for the solution to drip.

8. The equipment used in the organic small molecule thin film coating method according to claim 7, characterized in that: A horizontal angle sensor is provided on the drip plate (203) and / or the spreader cover (201) to monitor the horizontal state of the drip plate (203) in real time. The horizontal angle sensor signal is used as a reference to adjust the extension and retraction of the four leveling electric cylinders (105) to control the level of the drip plate (203) and realize closed-loop control.

9. The equipment used in the organic small molecule thin film coating method according to claim 8, characterized in that: A duct fan motor (209) is provided at the end of the tee pipe (205) away from the flexible guide pipe (204). The duct fan motor (209) is fixedly installed on the cover (210) through the duct fan motor bracket (207). The duct fan motor (209) and the tee pipe (205) are coaxially matched.

10. The equipment used in the organic small molecule thin film coating method according to claim 9, characterized in that: The storage box (202) is equipped with a floating ring (216) inside. A thin steel plate (213) is fixedly installed on the inner side of the floating ring (216). Multiple conical perforations (214) are opened on the thin steel plate (213). A piezoelectric ceramic (215) is also concentrically fixed on the lower surface of the thin steel plate (213) to drive the thin steel plate (213) to vibrate.

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