Lamp tube replacing tool and lamp tube replacing method thereof

Abstract

The invention relates to a lamp tube replacing tool and a lamp tube replacing method, the lamp tube replacing tool is used for replacing a halogen lamp tube in rapid thermal annealing equipment, and the lamp tube replacing tool comprises a needle cylinder which comprises a cylinder body and a piston capable of reciprocating in the cylinder body; the flexible clamping sleeve is provided with a connecting end and a clamping end, the connecting end is in airtight connection with an outlet in the front end of the needle cylinder, the clamping end is used for being connected to the outer surface of the halogen lamp tube in a sleeving mode, and a friction increasing structure is arranged on the inner wall of the flexible clamping sleeve; and negative pressure is formed in the flexible clamping sleeve by pulling the piston, so that the flexible clamping sleeve can uniformly press the sleeved halogen lamp tube on the friction increasing structure through external atmospheric pressure. Through the collaborative design of generating uniform clamping force through negative pressure adsorption and providing reliable friction force through a friction increasing structure, the risk that the lamp tube is broken due to uneven stress is greatly reduced, and the long-standing halogen lamp tube replacement problem in the semiconductor manufacturing industry is ingeniously solved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a lamp replacement tool and a lamp replacement method thereof. Background Technology

[0002] Rapid thermal annealing equipment is a critical piece of equipment in semiconductor manufacturing. It performs annealing, activation, and other processes by heating wafers to a predetermined high temperature in a very short time. To achieve rapid and uniform heating, such equipment typically features a dense array of hundreds (e.g., 409) high-power halogen lamps at the top of the process chamber. These halogen lamps experience performance degradation or failure after prolonged operation at high temperatures and require periodic replacement.

[0003] Due to the extremely narrow internal space of the equipment cavity, the dense array of lamps, and the brittle and fragile nature of the lamps themselves (usually made of quartz), replacement operations are exceptionally difficult and extremely risky. Currently, the industry generally lacks specialized tools, and often uses a cut 3 / 8-inch fluororubber hose 1 to directly pull out the halogen lamp 2. Figure 1 As shown, this method has significant drawbacks: First, it relies on the elastic deformation of the fluororubber hose 1 to generate radial clamping force. This force is unevenly distributed and easily leads to stress concentration in localized areas of the halogen lamp tube 2, causing the halogen lamp tube 2 to break during the pull-out process. Second, the rubber material will rapidly age and harden under long-term high-temperature radiation, losing its elasticity, resulting in a sharp decrease in clamping force or even failure. Finally, to compensate for insufficient clamping force, the operator often needs to pinch the side of the fluororubber hose 1 with their fingers, which further exacerbates the uneven force distribution, greatly increasing the risk of the halogen lamp tube 2 breaking and easily causing equipment damage.

[0004] Currently, the success rate of removing light bulbs using a 3 / 8-inch fluororubber hose 1 is only 40%, and the breakage rate of halogen lamp tube 2 is 0.5%. After repeated use and deformation, the success rate of removing halogen lamp tube 2 will drop significantly, and it is more likely that the lamp tube will be crushed due to uneven force on the halogen lamp tube 2. Summary of the Invention

[0005] The purpose of this invention is to provide a lamp replacement tool and a lamp replacement method. Based on the Magdeburg hemispheres experiment principle, the tool uses a syringe to provide negative pressure and atmospheric pressure to clamp the halogen bulb, which can apply a uniform circumferential clamping force to the halogen bulb and avoid the problem of bulb breakage caused by uneven force.

[0006] To achieve the above objectives, the present invention provides a lamp replacement tool for replacing halogen lamps in a rapid thermal annealing equipment, comprising:

[0007] A syringe, including a barrel and a piston that can reciprocate within the barrel;

[0008] A flexible clamping sleeve has a connecting end and a clamping end. The connecting end is airtightly connected to the front outlet of the syringe. The clamping end is used to fit onto the outer surface of the halogen lamp tube. The inner wall of the flexible clamping sleeve is provided with a friction-enhancing structure.

[0009] By pulling the piston to create a negative pressure within the flexible clamping sleeve, the flexible clamping sleeve can uniformly press the halogen lamp tube onto the friction-enhancing structure using external atmospheric pressure.

[0010] Optionally, the friction-enhancing structure is a threaded protrusion formed on the inner wall of the flexible clamping sleeve.

[0011] Optionally, the thread-like protrusions may be continuous spirals or discontinuously distributed protrusions.

[0012] Optionally, the flexible clamping sleeve is made of fluororubber material.

[0013] Optionally, the syringe barrel is made of a transparent or translucent material.

[0014] Optionally, the syringe barrel has a baffle at the rear end for easy hand-held application of force.

[0015] Optionally, the baffle is an annular flange integrally formed with the cylinder body, and its outer diameter is larger than the outer diameter of the cylinder body.

[0016] Optionally, the connecting end of the flexible clamping sleeve is airtightly connected to the front outlet of the syringe via a clamp.

[0017] Optionally, the cavity of the rapid thermal annealing equipment is provided with an array of multiple halogen lamps, and the size of the flexible clamping sleeve is configured to enter the narrow space of the cavity to replace a single halogen lamp.

[0018] Based on this, the present invention also provides a method for replacing a lamp tube, which is performed using the lamp tube replacement tool described above, and includes the following steps:

[0019] The clamping end of the flexible clamping sleeve is fitted onto the outer surface of the halogen lamp tube to be operated.

[0020] Pull the piston of the syringe to create a negative pressure inside the flexible clamping sleeve, so that the external atmospheric pressure will evenly press the halogen lamp tube onto the friction-enhancing structure inside the flexible clamping sleeve.

[0021] Under the clamping action of the negative pressure, the lamp replacement tool is moved along the axial direction of the halogen lamp tube to remove the halogen lamp tube from the equipment cavity or install it into the equipment cavity.

[0022] The lamp replacement tool and method provided by this invention have at least one of the following beneficial effects:

[0023] 1) Uniform stress distribution and low breakage rate: This invention uniquely utilizes the negative pressure adsorption principle (Mattberg hemisphere principle). When a negative pressure is formed inside the flexible clamping sleeve, the external atmospheric pressure applies a uniform clamping force from the entire circumference of the part of the lamp tube that is wrapped. This force is a uniformly distributed surface pressure, which greatly reduces the risk of the lamp tube breaking due to uneven stress.

[0024] (2) Reliable clamping: The clamping force of this lamp replacement tool mainly comes from atmospheric pressure, while the friction-enhancing structure provides auxiliary friction. Even if the elasticity of the flexible clamping sleeve decreases due to long-term use, as long as the airtightness is basically maintained, the uniform positive pressure generated by atmospheric pressure still exists, and the mechanical "biting" effect of the friction-enhancing structure can still provide sufficient anti-slip friction, which solves the problem of traditional rubber tubes aging and failing due to long-term use.

[0025] (3) High success rate and simple operation: The lamp replacement tool controls the clamping force by pulling the piston. Once sufficient negative pressure is formed, the clamping is firm and reliable; the lamp can be easily removed by releasing the piston. The operation process is standardized and has little dependence on the operator's feel, which greatly increases the success rate of a single operation from less than 40% in the traditional method to more than 95%.

[0026] (4) Extend tool life and reduce maintenance costs: Since the clamping mechanism does not depend on the elastic deformation of the material, the impact of material aging of the flexible clamping sleeve on tool performance is weakened. The overall service life of the tool is extended, reducing the frequency of spare parts replacement and maintenance costs.

[0027] (5) Highly adaptable, safe and efficient: The compact design of this lamp replacement tool allows it to easily enter the narrow space of the rapid heat annealing equipment cavity, enabling precise operation of individual lamps in a dense array. The entire method is safe and efficient, greatly improving the efficiency and reliability of equipment maintenance. Attached Figure Description

[0028] Those skilled in the art will understand that the accompanying drawings are provided to better understand the invention and do not constitute any limitation on the scope of the invention. Wherein:

[0029] Figure 1 This is a schematic diagram of the existing technology that uses fluororubber tubing to directly pull out the lamp tube;

[0030] Figure 2 This is a schematic diagram of the structure of a lamp replacement tool provided in an embodiment of the present invention;

[0031] Figure 3 for Figure 2 Perspective view;

[0032] Figure 4 This is a schematic diagram of using the lamp replacement tool kit provided in this embodiment of the invention to remove a lamp tube.

[0033] The attached figures are labeled as follows:

[0034] 1-Fluororubber hose; 2-Halogen lamp tube; 100-Syringe; 110-Cylinder; 120-Piston; 130-Baffle; 200-Flexible clamping sleeve; 210-Friction-enhancing structure; 300-Halogen lamp tube; 400-Cavity. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without original effort are within the scope of protection of the invention.

[0037] In the description of this invention, it should be understood that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this invention and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0038] Furthermore, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or apparatus that includes said element. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] Please refer to Figures 2-4 This invention provides a lamp replacement tool, comprising:

[0040] A syringe, including a barrel 110 and a piston 120 that can reciprocate within the barrel 110;

[0041] The flexible clamping sleeve 200 has a connecting end and a clamping end. The connecting end is airtightly connected to the front outlet of the syringe, and the clamping end is used to fit onto the outer surface of the halogen lamp tube 300. The inner wall of the flexible clamping sleeve 200 is provided with a friction-enhancing structure 210.

[0042] By pulling the piston 120 to create a negative pressure inside the flexible clamping sleeve 200, the flexible clamping sleeve 200 can evenly press the halogen lamp tube 300 onto the friction-increasing structure 210 by external atmospheric pressure.

[0043] This embodiment utilizes the principle of negative pressure adsorption (Madberg hemisphere principle). When a negative pressure is formed inside the flexible clamping sleeve 200, the external atmospheric pressure applies a uniform clamping force to the entire circumference of the halogen lamp tube 300 being wrapped, significantly reducing the risk of the halogen lamp tube 300 breaking due to uneven force. At the same time, a friction-enhancing structure 210 is provided on the inner wall of the flexible clamping sleeve 200 to increase friction, overcoming the limitation of relying solely on the deformation of the flexible clamping sleeve 200 itself to generate pressure. Even if the elasticity of the flexible clamping sleeve 200 decreases due to long-term use, as long as the airtightness is basically maintained, the uniform positive pressure generated by atmospheric pressure still exists, and the mechanical "biting" effect of the friction-enhancing structure 210 can still provide sufficient anti-slip friction, thereby improving the service life of the lamp tube replacement tool.

[0044] Specifically, the syringe portion includes a barrel 110 and a piston 120 that can reciprocate within the barrel 110. In a preferred embodiment, the barrel 110 may be made of a transparent or translucent material (such as polycarbonate), which allows the operator to visually observe the position and movement of the piston 120, thereby determining whether negative pressure is formed and to what extent, facilitating operational control.

[0045] In a preferred embodiment, the rear end of the syringe barrel 110 is provided with a baffle 130 for easy hand-held force application. Further, the baffle 130 can be an annular flange integrally formed with the barrel 110, and its outer diameter is larger than the outer diameter of the barrel 110. This design provides a clear and comfortable fulcrum for force application. When the piston 120 is pulled to generate negative pressure, the operator can use their palm or fingers to brace against the baffle 130, making the operation of pulling the piston 120 more stable and effortless.

[0046] The flexible clamping sleeve 200 is airtightly connected to the front outlet of the syringe via its connecting end. As a feasible connection method, the connecting end of the flexible clamping sleeve 200 is airtightly connected to the front outlet of the syringe via a clamp. This clamp connection method is reliable, secure, and facilitates the replacement of the flexible clamping sleeve 200. Of course, other conventional methods that achieve airtight connections, such as using threaded joints or interference fits, also fall within the scope of this invention.

[0047] In this embodiment, the flexible clamping sleeve 200 is made of high-temperature resistant and aging-resistant fluororubber tubing. Fluororubber can maintain stable performance at high temperatures and adapt to the environment of the equipment cavity.

[0048] In a preferred embodiment, the friction-enhancing structure 210 is a threaded protrusion formed on the inner wall of the flexible clamping sleeve 200. This threaded protrusion can be a continuous spiral, or it can be intermittently distributed bumps or stripes, its core function being to significantly increase the static friction force between the protrusion and the lamp tube surface. The thread profile can be triangular, arc-shaped, or trapezoidal, and the pitch can be designed as needed. In another alternative embodiment, the friction-enhancing structure 210 can also be designed as multiple annular ridges arranged axially, or a uniformly distributed array of hemispherical bumps, its core purpose being to provide a static friction force far greater than that of a smooth surface through mechanical engagement and deformation when in contact with the lamp tube surface.

[0049] In this embodiment, the clamping end of the flexible clamping sleeve 200 is open, and its inner diameter is slightly smaller than the outer diameter of the target halogen lamp tube 300. This size configuration ensures a certain degree of fit and sealing effect at the initial stage of sleeve connection.

[0050] The lamp replacement tool provided in this embodiment of the invention is particularly suitable for the following scenario: multiple halogen lamps 300 are arranged in an array within the cavity 400 of a rapid thermal annealing equipment. The dimensions (especially the outer diameter and length) of the flexible clamping sleeve 200 are precisely configured to enter the narrow space of the cavity 400 and operate on a single target halogen lamp 300 without interfering with other surrounding halogen lamps 300. In other words, the length and outer diameter of the entire flexible clamping sleeve 200 are carefully designed to allow it to easily extend into... Figure 4 The lamps are positioned within the gaps of the dense array of lamps, precisely fitting the exposed tail of the target halogen lamp 300 without touching adjacent halogen lamps 300 or precision components within the cavity 400.

[0051] Based on this, the present invention also provides a lamp replacement method as described above, including the following steps:

[0052] S1. Fit the clamping end of the flexible clamping sleeve 200 onto the outer surface of the halogen lamp tube 300 to be operated.

[0053] S2. Pull the piston 120 of the syringe to create a negative pressure in the flexible clamping sleeve 200 so that the external atmospheric pressure will evenly press the halogen lamp tube 300 onto the friction-enhancing structure 210 inside the flexible clamping sleeve 200.

[0054] S3. Under the clamping action of negative pressure, the lamp replacement tool is moved along the axial direction of the halogen lamp tube 300 to remove the halogen lamp tube 300 from the equipment cavity 400 or install it into the equipment cavity 400.

[0055] When replacing a halogen lamp 300 in a rapid thermal annealing device, the operator first aligns the clamping end of the flexible clamping sleeve 200 with the exposed outer surface of the target halogen lamp 300. Then, the operator holds the syringe barrel 110 and uses their fingers or palm to press against the rear baffle 130, smoothly pulling the piston 120 backward. The movement of the piston 120 draws air out of the sealed space between the flexible clamping sleeve 200 and the lamp, creating a negative pressure (or partial vacuum) within that space. At this time, the atmospheric pressure of the external environment acts evenly on the entire cylindrical surface of the enclosed portion of the halogen lamp 300, generating a radial resultant force pointing towards the axis of the flexible clamping sleeve 200. This force firmly presses the halogen lamp 300 against the inner wall of the flexible clamping sleeve 200. At the same time, the threaded protrusions on the inner wall tightly engage with the glass surface of the lamp tube, generating a large mechanical friction force. This, together with atmospheric pressure, achieves a firm and uniform clamping of the lamp tube.

[0056] After confirming that the clamping is secure (this can be judged by feel or by observing the position of piston 120), the operator only needs to apply force steadily along the axial direction (usually vertical) of the halogen lamp tube 300 to easily and straightly pull the old halogen lamp tube 300 out of the lamp holder in the equipment cavity 400 using a tool. Due to the uniform force, the halogen lamp tube 300 has almost no bending stress, and the risk of breakage is extremely low. The process for installing a new halogen lamp tube 300 is the reverse: place the tail of the new halogen lamp tube 300 into the clamping end of the lamp replacement tool, and similarly, use the piston 120 to generate negative pressure to attract and fix it. Then guide the new halogen lamp tube 300 to the installation position in the cavity 400, align it with the lamp holder, slowly push the piston 120 to release the negative pressure, and gently push forward to accurately and vertically place the new halogen lamp tube 300 into the lamp holder, completing the installation.

[0057] Since the lamp replacement method provided by this invention and the lamp replacement tool described above belong to the same inventive concept, the lamp replacement method provided by this invention has all the advantages of the lamp replacement tool described above. Therefore, the beneficial effects of the lamp replacement method provided by this invention will not be described in detail here.

[0058] In summary, the lamp replacement tool and method provided by this invention, through the synergistic design of "negative pressure adsorption generating uniform clamping force" and "friction-enhancing structure 210 providing reliable friction force," innovatively solves the long-standing problem of halogen lamp replacement 300 in the semiconductor manufacturing industry. The entire lamp replacement tool has an ingenious structure, is easy to operate, effectively protects expensive equipment components, significantly improves maintenance efficiency and safety, and has high practical value and economic benefits.

[0059] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure are within the protection scope of the present invention. Obviously, those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the present invention and its equivalents, the present invention also intends to include these modifications and variations.

Claims

1. A lamp replacement tool for replacing halogen lamps in a rapid thermal annealing equipment, characterized in that, include: A syringe, including a barrel and a piston that can reciprocate within the barrel; A flexible clamping sleeve has a connecting end and a clamping end. The connecting end is airtightly connected to the front outlet of the syringe. The clamping end is used to fit onto the outer surface of the halogen lamp tube. The inner wall of the flexible clamping sleeve is provided with a friction-enhancing structure. By pulling the piston to create a negative pressure within the flexible clamping sleeve, the flexible clamping sleeve can uniformly press the halogen lamp tube onto the friction-enhancing structure using external atmospheric pressure.

2. The lamp replacement tool according to claim 1, characterized in that, The friction-enhancing structure is a threaded protrusion formed on the inner wall of the flexible clamping sleeve.

3. The lamp replacement tool according to claim 2, characterized in that, The thread-like protrusions are either continuous spirals or discontinuously distributed protrusions.

4. The lamp replacement tool according to claim 1, characterized in that, The flexible clamping sleeve is made of fluororubber material.

5. The lamp replacement tool according to claim 1, characterized in that, The syringe barrel is made of a transparent or translucent material.

6. The lamp replacement tool according to claim 1, characterized in that, The syringe has a baffle at the rear end of its body to facilitate hand-held application of force.

7. The lamp replacement tool according to claim 6, characterized in that, The baffle is an annular flange integrally formed with the cylinder body, and its outer diameter is larger than that of the cylinder body.

8. The lamp replacement tool according to claim 1, characterized in that, The connecting end of the flexible clamping sleeve is airtightly connected to the front outlet of the syringe via a clamp.

9. The lamp replacement tool according to claim 1, characterized in that, Multiple halogen lamps are arranged in an array inside the cavity of the rapid thermal annealing equipment, and the flexible clamping sleeve is sized to allow entry into the narrow space of the cavity to replace a single halogen lamp.

10. A method for replacing a lamp tube, comprising using a lamp tube replacement tool according to any one of claims 1-9, characterized in that, Includes the following steps: The clamping end of the flexible clamping sleeve is fitted onto the outer surface of the halogen lamp tube to be operated. Pull the piston of the syringe to create a negative pressure inside the flexible clamping sleeve, so that the external atmospheric pressure will evenly press the halogen lamp tube onto the friction-enhancing structure inside the flexible clamping sleeve. Under the clamping action of the negative pressure, the lamp replacement tool is moved along the axial direction of the halogen lamp tube to remove the halogen lamp tube from the equipment cavity or install it into the equipment cavity.

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