Refining production process of high-purity electronic-grade ammonia gas

By employing a process flow of gasification, filtration, adsorption, ultrafiltration, distillation, and condensation liquefaction, and utilizing activated alumina and molecular sieve tandem adsorption and PVSQ/SiO2/PVDF ultrafiltration membranes, the problems of insufficient purity, high cost, and low efficiency in removing trace impurities in existing ammonia refining processes have been solved, achieving high-purity and low-cost ammonia production.

CN122079192APending Publication Date: 2026-05-26JIANGSU CHEM DESIGN INST CO LTD
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Patent Information

Application Number
CN202610250982.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-03
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing ammonia refining processes are unable to simultaneously meet the requirements of high purity, low cost, and high efficiency, especially in removing trace impurities, and thus cannot meet the stringent standards of the semiconductor and optoelectronic industries.

Method used

The process involves gasification, filtration, adsorption, ultrafiltration, distillation, and condensation liquefaction. It utilizes activated alumina and molecular sieves in series for alternating adsorption, combined with ultrafiltration using a PVSQ/SiO2/PVDF ultrafiltration membrane, multi-stage separation in a distillation column, and finally achieves the production of high-purity ammonia through staged cooling.

Benefits of technology

The production of high-purity electronic-grade ammonia gas has been achieved, with a purity of over 5N. This has reduced production costs, improved the removal efficiency of trace impurities, and met the purity requirements of the high-end electronics industry.

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Abstract

The invention relates to the field of gas refining production, and particularly discloses a refining production process of high-purity electronic-grade ammonia gas, which comprises the following steps: S1, pretreatment: sequentially gasifying, filtering and adsorbing raw material liquid ammonia to obtain crude ammonia gas; s2, ultrafiltration: carrying out ultrafiltration on the crude ammonia gas obtained in the step S1 under the conditions that the pressure is 0.4-0.8 MPa, the temperature is 25-45 DEG C and the flow velocity is 1.5-3.5 m / s to obtain high-purity ammonia; the high-purity ammonia obtained in the step S2 is sequentially subjected to rectification and condensation liquefaction, electronic-grade ammonia gas is obtained, and the purity reaches 5N. According to the present invention, the refining production process can simultaneously meet the requirements of high purity, low cost and high efficiency, can improve the trace impurity removal efficiency, can obtain the electronic grade ammonia gas with the purity of 5 N, and can solve the problems of insufficient purity, high impurity content, high production cost and the like of the existing ammonia gas refining process.
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