Environment-friendly internal combustion quartz heater for semiconductor processing

Abstract

This invention relates to the field of semiconductor processing technology and provides an environmentally friendly internal combustion quartz heater for semiconductor processing, comprising: a base plate, a mixing heating tube fixedly installed on the top of the base plate, a mixing chamber fixedly installed on one side of the mixing heating tube, the mixing chamber being internally connected to the mixing heating tube, and an oxygen pipe provided on one side of the mixing chamber. In this embodiment of the invention, the temperature after the hydrogen and oxygen are mixed and burned can rapidly raise the temperature of the inner and outer walls of the mixing heating tube, which can rapidly raise the temperature of the liquid inside the two mixing heating tubes. Opening the one-way valve allows the liquid inside the two mixing heating tubes to be released through the outlet pipe. At the same time, when heating inside the mixing heating tube, the combustion temperature can be controlled by limiting the amount of oxygen and hydrogen entering through the oxygen and hydrogen pipes. A sensor is used to sense the combustion temperature inside the mixing heating tube, and a display can display the temperature data.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to an environmentally friendly internal combustion quartz heater for semiconductor processing. Background Technology

[0002] In semiconductor manufacturing, high-precision heating of gases or liquids is a critical process, widely used in processes such as chemical vapor deposition (CVD), etching, and cleaning. Traditional fluid heating devices mostly use electric heating tubes. While these methods can provide a stable heat source, they have many shortcomings in heating high-purity fluids.

[0003] Disadvantages of metal heaters: Purity issues: Metal materials are prone to oxidation or corrosion at high temperatures, potentially releasing impurities and contaminating high-purity gases or liquids during semiconductor processing. Low thermal conductivity: Metal heaters have limited thermal conductivity and low heat utilization. Thermal stress issues: Metals are susceptible to thermal stress under alternating high and low temperature conditions, affecting their service life.

[0004] Disadvantages of quartz external combustion heaters: Insufficient heat exchange efficiency: External combustion flame heating easily leads to heat loss, resulting in low heat conduction efficiency and inability to fully utilize fuel. Larger size: Because the external combustion design requires separation of the flame and the quartz tube, additional insulation and protective structures are typically needed, increasing the size and complexity of the equipment. Disadvantages of resistance heating devices: low energy efficiency: resistance heating has high energy consumption and limited energy utilization efficiency; short service life: resistance wire or ceramic heating material is prone to aging in high temperature environment, requiring frequent replacement, which increases maintenance costs. Summary of the Invention

[0005] The purpose of this invention is to address the following issues in existing technologies: First, metal materials are prone to oxidation or corrosion at high temperatures, potentially releasing metallic impurities and contaminating high-purity gases or liquids during semiconductor processing. Second, metal heaters suffer from low thermal conductivity, resulting in limited heat utilization. Third, metals are susceptible to thermal stress under alternating high and low temperature conditions, affecting their service life.

[0006] To achieve the above objectives, the present invention employs the following technical solution: an environmentally friendly internal combustion quartz heater for semiconductor processing, comprising: a base plate, A mixing heating tube is fixedly installed on the top of the base plate. A mixing chamber is fixedly installed on one side of the mixing heating tube. The mixing chamber is connected to the interior of the mixing heating tube. An oxygen pipe is provided on one side of the mixing chamber, and a hydrogen pipe is provided on one side of the mixing chamber. Two liquid tubes are fixedly installed on both sides of the outer surface of the mixing heating tube. A heating block is fixedly installed on the top of the mixing heating tube. A sensor is provided on the top of the mixing heating tube. A display is fixedly installed on the top of the mixing heating tube. Two threaded heating tubes are both wrapped around the outer surface of two liquid tubes. An exhaust pipe is fixedly installed at the top of each of the two threaded heating tubes. An outer cover is fixedly installed at the top of the mixing heating tube. A motor is fixedly installed on one side of the outer cover. A fan is fixedly installed at the output end of the motor. The fan is located on the parallel side of the two exhaust pipes.

[0007] The technical effect of adopting the above-mentioned further solution is as follows: First, the heating block is started by an external power source to heat the inner wall of the mixing heating tube. Then, oxygen is injected into the mixing chamber through the oxygen pipe, and hydrogen is injected into the mixing heating tube through the hydrogen pipe. At this time, oxygen and hydrogen are mixed inside the mixing chamber and then enter the mixing heating tube, causing the inner wall of the mixing heating tube to heat up rapidly. The sensor is used to sense the combustion temperature inside the mixing heating tube, and the display can display the temperature data. At the same time, after the hydrogen and oxygen burn inside, high-temperature water vapor is formed. At this time, the water vapor enters the liquid collection tank through the second connecting pipe. At this time, there is a certain amount of high-temperature steam inside the liquid collection tank. The high-temperature steam enters the threaded heating tube through the steam pipe, and the temperature of the threaded heating tube rises. The threaded heating tube surrounds the outer surface of the liquid tube and is in contact with the outer surface of the liquid tube. At this time, it can assist the liquid tube in heating up, making the liquid tube heat up faster and improving efficiency.

[0008] In a preferred embodiment, two thick pipes are fixedly installed on one side of the outer cover, a support plate is fixedly installed on the top of the base plate, a reaction vessel is fixedly installed on the top of the support plate, a cooler is fixedly installed on one side of the reaction vessel, and one end of the two thick pipes is fixedly installed inside the reaction vessel.

[0009] The technical effect of adopting the above-mentioned further solution is that the steam inside the threaded heating tube will enter the liquid tube above through the steam outlet pipe, start the motor through the external power supply, and drive the fan to rotate, so that the steam enters the inside of the outer casing.

[0010] In a preferred embodiment, a long pipe is fixedly installed at the bottom of the reaction vessel, a collection box is fixedly installed at the top of the bottom plate, one end of the long pipe is fixedly installed inside the collection box, an outlet pipe is fixedly installed at the bottom of each of the two liquid pipes, a one-way valve is provided inside each of the two outlet pipes, and a connecting pipe is fixedly installed at the bottom of the mixing heating pipe.

[0011] The technical effect of adopting the above-mentioned further solution is that the fan rotation can quickly absorb steam into its interior and enter the interior of the reaction vessel through the thick pipe. At this time, the cooler lowers the internal temperature of the reaction vessel. After the water vapor enters the interior of the reaction vessel, it quickly forms water, and the water enters the interior of the collection box through the long pipe.

[0012] In a preferred embodiment, a liquid collection tank is fixedly installed at the bottom end of the second connecting pipe. The liquid collection tank is fixedly installed on the top of the base plate. A first connecting pipe is fixedly installed on one side of the liquid collection tank. A one-way valve is installed inside the first connecting pipe. One end of the first connecting pipe is fixedly installed on one side of the collection box. Two steam pipes are fixedly embedded on the top of the liquid collection tank for conveying steam.

[0013] The technical effect of adopting the above-mentioned further solution is that after the internal hydrogen and oxygen are burned, high-temperature water vapor will be formed. At this time, the water vapor enters the interior of the liquid collection tank through the second connecting pipe. At this time, there is a certain amount of high-temperature steam inside the liquid collection tank. The high-temperature steam enters the interior of the threaded heating tube through the steam pipe.

[0014] In a preferred embodiment, the two steam pipes are fixedly installed at the bottom ends of the two threaded heating pipes, and the tops of the two liquid pipes are fixedly installed with liquid inlet chambers. The inner walls of the two liquid inlet chambers are fixedly installed with limit rings, and the tops of the two limit rings are detachably installed with filter screens.

[0015] The technical effect of adopting the above-mentioned further solution is that the liquid is poured into the inside of the two liquid pipes through the liquid inlet chamber. At this time, the liquid is filtered by the filter screen before being poured in, thereby reducing impurities in the liquid.

[0016] Compared with the prior art, the advantages and positive effects of the present invention are as follows: 1. In this embodiment of the invention, after the liquid enters the interior of the two liquid tubes, the two liquid tubes are located on both sides of the mixing heating tube with their outer walls in contact. This allows the mixing heating tube to heat the liquid inside the mixing heating tubes on both sides after heating. The temperature after the hydrogen and oxygen are mixed and burned can rapidly raise the temperature of the inner and outer walls of the mixing heating tube, thus rapidly raising the temperature of the liquid inside the two mixing heating tubes. Opening the one-way valve allows the liquid inside the two mixing heating tubes to be released through the outlet pipe. At the same time, when heating inside the mixing heating tube, the combustion temperature can be controlled by limiting the amount of oxygen and hydrogen entering through the oxygen and hydrogen tubes. The sensor is used to sense the combustion temperature inside the mixing heating tube, and the display can display the temperature data.

[0017] 2. In this embodiment of the invention, after the internal hydrogen and oxygen are burned, a high-temperature liquid is formed. At this time, the liquid enters the inside of the liquid collection tank through the second connecting pipe. At this time, there is a certain amount of high-temperature steam inside the liquid collection tank. The high-temperature steam enters the inside of the threaded heating tube through the steam pipe. The temperature of the threaded heating tube rises. When the threaded heating tube surrounds the outer surface of the liquid tube and contacts the outer surface of the liquid tube, it can assist the liquid tube in heating up, so that the liquid tube heats up faster and improves efficiency.

[0018] 3. In this embodiment of the invention, the steam inside the threaded heating tube enters the liquid tube above it through the vent pipe. The motor is started by an external power source, and the motor output drives the fan to rotate. The steam enters the interior of the outer casing, and the fan rotation can quickly absorb the steam into its interior. It then enters the interior of the reaction tank through the thick pipe. At this time, the cooler lowers the internal temperature of the reaction tank. Water vapor enters the interior of the reaction tank and quickly forms water. The water enters the interior of the collection box through the long pipe. The one-way valve can be opened to allow the water inside the collection tank to enter the interior of the collection box through the connecting pipe. The mixing heating tube and the liquid tube are made of high-purity quartz material, which has excellent high temperature resistance and corrosion resistance, and avoids impurities from contaminating the fluid.

[0019] 4. In this embodiment of the invention, the heating block 106 is activated by an external power source to heat the inner wall of the mixing heating tube 102. Then, oxygen is injected into the mixing chamber 103 through the oxygen pipe 104, and hydrogen is injected into the mixing heating tube 102 through the hydrogen pipe 105. At this time, oxygen and hydrogen are mixed inside the mixing chamber 103 and then enter the mixing heating tube 102, causing the inner wall of the mixing heating tube 102 to heat up rapidly. Liquid is poured into the two liquid pipes 108 through the liquid inlet chamber 109. Before pouring, the filter screen 111 filters the liquid to reduce impurities in the liquid. Attached Figure Description

[0020] Figure 1 A three-dimensional structural schematic diagram of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention; Figure 2 An enlarged structural diagram of the filter screen of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention. Figure 3 A side view of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention. Figure 4 A schematic diagram of the limiting ring structure of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention; Figure 5A schematic diagram of the structure of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention; Figure 6 This is a top plan view of an environmentally friendly internal combustion quartz heater for semiconductor processing provided by the present invention.

[0021] Legend: 101. Base plate; 102. Mixing heating tube; 103. Mixing chamber; 104. Oxygen tube; 105. Hydrogen tube; 106. Heating block; 107. Sensor; 108. Liquid tube; 109. Liquid inlet chamber; 110. Limiting ring; 111. Filter screen; 112. Liquid outlet tube; 113. Threaded heating tube; 114. Gas outlet tube; 115. Collection tank; 116. Connecting pipe one; 117. One-way valve one; 118. Collection box; 119. Outer cover; 120. Fan; 121. Thick tube; 122. Reaction vessel; 123. Cooler; 124. Support plate; 125. Connecting pipe two; 126. Long tube; 127. One-way valve two; 128. Display; 1281. Steam tube; 129. Motor. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0023] Please see Figures 1 to 6 This embodiment provides a technical solution: an environmentally friendly internal combustion quartz heater for semiconductor processing, comprising: a base plate 101; a mixing heating tube 102, fixedly installed on the top of the base plate 101, a mixing chamber 103 fixedly installed on one side of the mixing heating tube 102, the mixing chamber 103 being internally connected to the mixing heating tube 102, an oxygen pipe 104 being provided on one side of the mixing chamber 103, and a hydrogen pipe 105 being provided on one side of the mixing chamber 103; two liquid pipes 108, both fixedly installed on both sides of the outer surface of the mixing heating tube 102, and the top of the mixing heating tube 102... A heating block 106 is fixedly installed. A sensor 107 is provided on the top of the mixing heating tube 102. A display 128 is fixedly installed on the top of the mixing heating tube 102. Two threaded heating tubes 113 are both wrapped around the outer surface of two liquid tubes 108. An exhaust pipe 114 is fixedly installed on the top of each of the two threaded heating tubes 113. An outer cover 119 is fixedly installed on the top of the mixing heating tube 102. A motor 129 is fixedly installed on one side of the outer cover 119. A fan 120 is fixedly installed on the output end of the motor 129. The fan 120 is located on the parallel side of the two exhaust pipes 114.

[0024] In use, the heating block 106 is first activated by an external power source to heat the inner wall of the mixing heating tube 102. Then, oxygen is injected into the mixing chamber 103 through the oxygen pipe 104, and hydrogen is injected into the mixing heating tube 102 through the hydrogen pipe 105. At this time, the oxygen and hydrogen mix inside the mixing chamber 103 and then enter the mixing heating tube 102, causing the inner wall of the mixing heating tube 102 to heat up rapidly. The sensor 107 is used to sense the combustion temperature inside the mixing heating tube 102, and the display 128 can display the temperature. The data shows that after the internal hydrogen and oxygen are burned, a high-temperature liquid is formed. At this time, the liquid enters the inside of the liquid collection tank 115 through the connecting pipe 125. At this time, there is a certain amount of high-temperature steam inside the liquid collection tank 115. The high-temperature steam enters the inside of the threaded heating tube 113 through the steam pipe 1281. The temperature of the threaded heating tube 113 rises. When the threaded heating tube 113 surrounds the outer surface of the liquid tube 108 and contacts the outer surface of the liquid tube 108, it can assist the liquid tube 108 in heating up, making the liquid tube 108 heat up faster and improving efficiency.

[0025] like Figures 1 to 6 As shown, in one embodiment, two thick pipes 121 are fixedly installed on one side of the outer cover 119, a support plate 124 is fixedly installed on the top of the base plate 101, a reaction vessel 122 is fixedly installed on the top of the support plate 124, a cooler 123 is fixedly installed on one side of the reaction vessel 122, one end of the two thick pipes 121 is fixedly installed inside the reaction vessel 122, and the steam inside the threaded heating pipe 113 enters the liquid pipe 108 above through the exhaust pipe 114. The motor 129 is started by an external power source, and the output end of the motor 129 drives the fan 120 to rotate, and the steam enters the interior of the outer cover 119.

[0026] like Figures 1 to 6 As shown, in one embodiment, a long pipe 126 is fixedly installed at the bottom of the reaction vessel 122, and a collection box 118 is fixedly installed at the top of the bottom plate 101. One end of the long pipe 126 is fixedly installed inside the collection box 118. A liquid outlet pipe 112 is fixedly installed at the bottom of each of the two liquid outlet pipes 108. A one-way valve 127 is installed inside each of the two liquid outlet pipes 112. A connecting pipe 125 is fixedly installed at the bottom of the mixing heating pipe 102. When the fan 120 rotates, it can quickly absorb steam into its interior and enter the interior of the reaction vessel 122 through the thick pipe 121. At this time, the cooler 123 lowers the internal temperature of the reaction vessel 122. When the water vapor enters the interior of the reaction vessel 122, it quickly forms water. The water enters the interior of the collection box 118 through the long pipe 126.

[0027] like Figures 1 to 6As shown, in one embodiment, a liquid collection tank 115 is fixedly installed at the bottom end of the second connecting pipe 125. The liquid collection tank 115 is fixedly installed on the top of the base plate 101. A first connecting pipe 116 is fixedly installed on one side of the liquid collection tank 115. A one-way valve 117 is provided inside the first connecting pipe 116. One end of the first connecting pipe 116 is fixedly installed on one side of the collection box 118. Two steam pipes 1281 are fixedly embedded on the top of the liquid collection tank 115 for transporting steam. After the hydrogen and oxygen inside are burned, high-temperature water vapor is formed. At this time, the water vapor enters the interior of the liquid collection tank 115 through the second connecting pipe 125. At this time, there is a certain amount of high-temperature steam inside the liquid collection tank 115. At this time, the high-temperature steam enters the interior of the threaded heating pipe 113 through the steam pipe 1281.

[0028] like Figures 1 to 6 As shown, in one embodiment, two steam pipes 1281 are fixedly installed at the bottom ends of two threaded heating pipes 113, and liquid inlet chambers 109 are fixedly installed at the top of two liquid pipes 108. Limiting rings 110 are fixedly installed on the inner walls of the two liquid inlet chambers 109. Filter screens 111 are detachably installed on the top of the two limiting rings 110. Liquid is poured into the interior of the two liquid pipes 108 through the liquid inlet chambers 109. At this time, the filter screens 111 filter the liquid before pouring, thereby reducing impurities in the liquid.

[0029] Working principle: In use, the heating block 106 is first activated by an external power source to heat the inner wall of the mixing heating tube 102. Then, oxygen is injected into the mixing chamber 103 through the oxygen pipe 104, and hydrogen is injected into the mixing heating tube 102 through the hydrogen pipe 105. At this time, the oxygen and hydrogen are mixed inside the mixing chamber 103 and then enter the mixing heating tube 102, causing the inner wall of the mixing heating tube 102 to heat up rapidly. Liquid is then poured into the two liquid pipes 108 through the liquid inlet chamber 109. Before pouring, the liquid is filtered by the filter screen 111 to reduce impurities in the liquid. Simultaneously, after the liquid enters the two liquid pipes 108, the two liquid pipes 108... 08 is located on both sides of the mixing heating tube 102, with their outer walls in contact. This allows the mixing heating tube 102 to heat the liquid inside both mixing heating tubes 102 after heating. The temperature after the hydrogen and oxygen mixture burns can rapidly raise the temperature of the inner and outer walls of the mixing heating tube 102, thus rapidly raising the temperature of the liquid inside the two mixing heating tubes 102. Opening the one-way valve 127 allows the liquid inside the two mixing heating tubes 102 to be released through the liquid outlet pipe 112. At the same time, when heating inside the mixing heating tube 102, the combustion temperature can be controlled by limiting the amount of oxygen pipe 104 and hydrogen pipe 105 entering. The sensor 107 is used to sense the combustion temperature inside the mixing heating tube 102. Display 1 28 can display temperature data. Simultaneously, after the internal combustion of hydrogen and oxygen, high-temperature water vapor is formed. This water vapor enters the liquid collection tank 115 through connecting pipe 125. The liquid collection tank 115 contains a certain amount of high-temperature steam, which then enters the threaded heating tube 113 through steam pipe 1281. The temperature of the threaded heating tube 113 rises. The threaded heating tube 113 surrounds and contacts the outer surface of the liquid tube 108, assisting in heating the liquid tube 108, thus increasing its heating speed and efficiency. The steam inside the threaded heating tube 113 then enters the upper part of the liquid tube 108 through the exhaust pipe 114, starting the motor via an external power source. 129. The output of motor 129 drives the rotation of fan 120. Steam enters the interior of outer casing 119. The rotation of fan 120 can quickly absorb steam into its interior and enter the interior of reaction tank 122 through thick pipe 121. At this time, cooler 123 lowers the internal temperature of reaction tank 122. Water vapor enters the interior of reaction tank 122 and quickly forms water. Water enters the interior of collection box 118 through long pipe 126. One-way valve 117 can be opened to allow water in collection tank 115 to enter the interior of collection box 118 through connecting pipe 116. Mixing heating tube 102 and liquid tube 108 are made of high-purity quartz material, which has excellent high temperature resistance and corrosion resistance, and avoids impurities from contaminating the fluid.

[0030] All standard parts used in this invention can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art. The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0031] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments that can be applied to other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. An environmentally friendly internal combustion quartz heater for semiconductor processing, comprising: The bottom plate (101) is characterized in that, The mixed heating pipe (102) is fixedly installed on the top of the bottom plate (101), one side of the mixed heating pipe (102) is fixedly installed with a mixing bin (103), the mixing bin (103) is connected with the inside of the mixed heating pipe (102), one side of the mixing bin (103) is provided with an oxygen pipe (104), and one side of the mixing bin (103) is provided with a hydrogen pipe (105); Two liquid pipes (108) are fixedly installed on the outer surfaces of the mixed heating pipe (102) on both sides, a heating block (106) is fixedly installed on the top of the mixed heating pipe (102), an inductor (107) is arranged on the top of the mixed heating pipe (102), and a display (128) is fixedly installed on the top of the mixed heating pipe (102); Two threaded heating pipes (113) are arranged on the outer surfaces of the two liquid pipes (108), and the top ends of the two threaded heating pipes (113) are fixedly installed with gas outlet pipes (114); an outer cover (119) is fixedly installed on the top of the mixed heating pipe (102), an electric motor (129) is fixedly installed on one side of the outer cover (119), a fan (120) is fixedly installed on the output end of the electric motor (129), and the fan (120) is located on the side parallel to the two gas outlet pipes (114).

2. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 1, characterized in that: Two thick pipes (121) are fixedly installed on one side of the outer cover (119), and a supporting plate (124) is fixedly installed on the top of the bottom plate (101).

3. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 2, characterized in that: A reaction tank (122) is fixedly installed on the top of the supporting plate (124), a cooler (123) is fixedly installed on one side of the reaction tank (122), and one end of the two thick pipes (121) is fixedly installed in the reaction tank (122).

4. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 3, characterized in that: A long pipe (126) is fixedly installed on the bottom of the reaction tank (122), a collection box (118) is fixedly installed on the top of the bottom plate (101), and one end of the long pipe (126) is fixedly installed in the collection box (118).

5. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 4, characterized in that: Liquid outlet pipes (112) are fixedly installed on the bottoms of the two liquid pipes (108), one-way valves two (127) are arranged in the two liquid outlet pipes (112), and a connecting pipe two (125) is fixedly installed on the bottom of the mixed heating pipe (102).

6. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 5, characterized in that: A liquid collecting tank (115) is fixedly installed on the bottom end of the connecting pipe two (125), the liquid collecting tank (115) is fixedly installed on the top of the bottom plate (101), and a connecting pipe one (116) is fixedly installed on one side of the liquid collecting tank (115).

7. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 6, characterized in that: A one-way valve one (117) is arranged in the connecting pipe one (116), one end of the connecting pipe one (116) is fixedly installed on one side of the collection box (118), and two steam pipes (1281) are fixedly embedded on the top of the liquid collecting tank (115) to convey steam.

8. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 7, characterized in that: The two steam pipes (1281) are fixedly installed on the bottom ends of the two threaded heating pipes (113), and liquid inlet bins (109) are fixedly installed on the tops of the two liquid pipes (108).

9. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 8, characterized in that: The inner wall of two liquid inlet bins (109) is fixedly installed with a limiting ring (110).

10. The environmentally friendly internal combustion quartz heater for semiconductor processing according to claim 9, characterized in that: The top of two limiting rings (110) is detachably installed with a filter screen (111).

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