An activated carbon adsorption device for adsorbing trichlorosilane

Abstract

The present application relates to the field of adsorption equipment, and discloses an activated carbon adsorption device for adsorbing and removing impurities of trichlorosilane, which comprises a tower body, a first mounting plate is rotatably arranged in the tower body, a connecting column is fixedly arranged on the first mounting plate, a second mounting plate is fixedly arranged at the top end of the connecting column, a second communication pipe corresponding to a second circular hole is fixedly arranged on the second mounting plate, a plurality of heating rods are fixedly arranged on the outer surface of the second communication pipe, a spraying assembly is arranged below the first mounting plate, a special-shaped sleeve ring is fixedly arranged on the outer wall of the tower body, a driving assembly cooperating with the first mounting plate is installed in the special-shaped sleeve ring, the first mounting plate and the second mounting plate are designed to be rotatable, so that the activated carbon layer can dynamically and uniformly contact with the gas to be treated, and the arc-shaped plate on the first communication pipe and the heating rods on the second communication pipe rotate synchronously, the hot gas introduced can be continuously swept in the activated carbon layer and uniformly diffused, dynamic and controllable mild heating is realized, and the adsorbate efficiency is significantly improved.

Description

Technical Field

[0001] This invention relates to the field of adsorption equipment technology, specifically to an activated carbon adsorption device for the adsorption and removal of impurities from trichlorosilane. Background Technology

[0002] The patent application with publication number CN223170629U includes a tower body with an inlet pipe and an outlet pipe at the bottom and an exhaust pipe at the top. The tower body is divided into a spray zone and an adsorption zone from bottom to top. The spray zone has a spray pipe at the top and a spherical gas distribution plate with numerous gas distribution holes at the bottom. The inlet pipe is located below the gas distribution plate. The adsorption zone includes a packing layer, which is an activated carbon layer. A heat exchange component is installed within the packing layer, including a serpentine tube connected to a medium inlet pipe and a medium outlet pipe. This invention can purify trichlorosilane by sequentially spraying and adsorption, achieving high efficiency and good results. The temperature of the packing zone can be flexibly adjusted as needed, which not only improves the adsorption effect but also purifies the packing without affecting the subsequent adsorption effect.

[0003] In the aforementioned patent, trichlorosilane is typically purified using a fixed-bed activated carbon adsorption device in traditional processes. However, this type of device has significant drawbacks: Firstly, uneven airflow distribution can easily lead to premature saturation of localized areas of the activated carbon bed, while other areas remain underutilized, resulting in a decrease in overall adsorption efficiency. Furthermore, uneven airflow distribution and poor pretreatment further increase the adsorption load on the activated carbon. Secondly, the fixed-bed structure makes it difficult to achieve uniform heating and effective regeneration, leading to low activated carbon utilization and a shortened lifespan, thereby increasing operating costs. Summary of the Invention

[0004] The purpose of this invention is to provide an activated carbon adsorption device for the adsorption and removal of impurities from trichlorosilane, so as to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the technical solution of the present invention is: an activated carbon adsorption device for trichlorosilane adsorption and impurity removal, comprising a tower body, a first mounting plate rotatably mounted inside the tower body, a connecting column fixedly mounted on the first mounting plate, a second mounting plate fixedly mounted at the top of the connecting column, the second mounting plate being hollow inside, an mounting pipe communicating with the interior of the tower body fixedly mounted on the outer wall of the tower body, and the output end of the mounting pipe being located between the first mounting plate and the second mounting plate, a plurality of first circular holes being opened through the second mounting plate, a plurality of first connecting pipes corresponding to the plurality of first circular holes being fixedly mounted on the second mounting plate, two sets of arc-shaped plates being fixedly mounted on the outer wall of the first connecting pipes, a second circular hole being opened through the second mounting plate at the center position, a second connecting pipe corresponding to the second circular hole being fixedly mounted on the second mounting plate, a plurality of heating rods being fixedly mounted on the outer surface of the second connecting pipes, and the second connecting pipe communicating with the interior of the heating rods, an exhaust assembly being provided above the second connecting pipes and the plurality of first connecting pipes, a spraying assembly being provided below the first mounting plate, a shaped collar being fixedly mounted on the outer wall of the tower body, and a driving assembly cooperating with the first mounting plate being installed inside the shaped collar.

[0006] Preferably, both the first mounting plate and the second mounting plate have multiple sets of through holes, and the through holes on the first mounting plate correspond to the through holes on the second mounting plate. The through holes on the first mounting plate and the through holes on the second mounting plate are connected by connecting pipes. The exhaust assembly includes a ring located above the second mounting plate, and the ring is fixedly connected to the top of multiple sets of first connecting pipes and the top of the second connecting pipes. A fixing rod is fixedly provided in the middle of the ring, and the fixing rod is hollow inside. An annular groove is provided on the outer wall of the ring. Multiple sets of first docking holes communicating with the annular groove are provided at the bottom of the ring. A second docking hole communicating with the inside of the fixing rod is provided at the bottom of the fixing rod. The multiple sets of first docking holes correspond one-to-one with the multiple sets of first connecting pipes, and the second docking holes correspond to the second connecting pipes. A through hole is provided through one side of the fixing rod. An exhaust pipe communicating with the inside of the tower body is fixedly provided on the tower body, and the exhaust pipe is located in the annular groove.

[0007] Preferably, the inner wall of the tower body is provided with two sets of limiting grooves, which are distributed vertically. Limiting rings are installed in the two sets of limiting grooves respectively. The upper set of limiting rings is located above the second mounting plate, and the lower set is located below the first mounting plate.

[0008] Preferably, the spraying assembly includes a mounting rod fixedly disposed at the bottom end of the first mounting plate. The mounting rod is hollow inside. A shaped plate is fixedly connected to the bottom end of the mounting rod, and the shaped plate is also hollow inside. A slot corresponding to the mounting rod is opened at the top end of the shaped plate. Multiple atomizing nozzles communicating with the interior of the shaped plate are fixedly disposed at the bottom end of the shaped plate. A water supply assembly communicating with the outside is provided on the outer wall of the mounting rod.

[0009] Preferably, the water supply assembly includes a circular collar rotatably mounted on the outer wall of the mounting rod. The circular collar is hollow inside, and the outer wall of the circular collar is provided with a water inlet pipe communicating with its interior. The input end of the water inlet pipe passes through the tower body and the irregular collar in sequence and is connected to a water pipe. The outer wall of the mounting rod is provided with a water inlet communicating with its interior, and the water inlet cooperates with the circular collar.

[0010] Preferably, the bottom of the tower body is fixedly provided with a drain pipe that communicates with its interior, and the drain pipe is provided with a one-way drain valve.

[0011] Preferably, the drive assembly includes a motor fixedly mounted on the top of the inner wall of the protruding part of the irregular collar, the output end of the motor is connected to the drive disk, and the drive disk is connected to the first mounting plate by belt drive.

[0012] Preferably, a perforated fixing plate is fixedly provided inside the lower part of the tower body, and the perforated fixing plate is located below the atomizing nozzle.

[0013] Preferably, the bottom of the tower body is fixed with an air inlet pipe that communicates with the interior, the output end of the air inlet pipe is connected to a connecting ball, the connecting ball is hollow inside, and multiple sets of openings are formed on the outer surface of the connecting ball.

[0014] Preferably, the top of the tower body is provided with an exhaust port, which is used to connect to an exhaust pipe.

[0015] Compared with the prior art, the technical solution of the present invention has the following advantages: (1) The present invention, through the design of a rotatable first mounting plate and a second mounting plate, enables the activated carbon layer filled between them to dynamically and uniformly contact the gas to be treated, effectively avoiding the airflow short-circuiting or local saturation problems that are prone to occur in fixed beds, thereby significantly improving the adsorption efficiency. At the same time, the rotating structure drives the arc plate on the first connecting pipe and the heating rod on the second connecting pipe to rotate synchronously, which can continuously sweep and uniformly diffuse the introduced hot gas in the activated carbon layer, realizing dynamic and controllable mild heating. It can maintain the optimal working temperature of activated carbon during the adsorption stage, further improving the impurity adsorption efficiency, and can also promote the uniform desorption of adsorbed substances and the regeneration of activated carbon when needed. It significantly extends the overall service life of activated carbon, reduces the replacement frequency and cost, and also comprehensively enhances the stability and operational continuity of the adsorption process by reducing flow dead zones and temperature unevenness. (2) The present invention features a connecting ball with upward-sloping openings at the bottom of the tower, which significantly improves the gas distribution effect. After the trichlorosilane gas enters the hollow connecting ball through the inlet pipe, it is guided and sprayed through multiple upward-sloping small holes, causing the gas to diffuse upward at a certain angle and initial velocity, thus achieving a uniform distribution of airflow across the cross-section of the tower. This avoids the problem of excessively high central gas velocity and weak flow at the side walls caused by the direct upward impact of the gas, allowing the gas to enter the spray area above more smoothly and evenly. The spray liquid forms a sufficient countercurrent contact with the gas rotating upward from bottom to top, effectively removing particulate matter and some soluble impurities entrained in the trichlorosilane gas, completing efficient gas pretreatment, significantly reducing the impurity load of the subsequent activated carbon adsorption section, and preventing premature clogging of the activated carbon micropores. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a cross-sectional three-dimensional structural diagram of the present invention; Figure 3 This is a schematic diagram of the planar structure of the present invention; Figure 4 This is a schematic diagram of the tower body plan structure of the present invention; Figure 5 This is a schematic diagram of the processing component structure of the present invention; Figure 6 This is a three-dimensional structural diagram of the spraying component of the present invention; Figure 7 This is a schematic diagram of the second mounting plate structure of the present invention; Figure 8 This is a schematic diagram of the first mounting plate structure of the present invention; Figure 9 This is a schematic diagram of the top structure of the first mounting plate of the present invention; Figure 10 This is a schematic diagram of the first connecting pipe and the arc-shaped plate structure of the present invention; Figure 11 This is a schematic diagram of the second connecting pipe and heating rod structure of the present invention; Figure 12 This is a schematic diagram of the three-dimensional ring structure of the present invention. Figure 1 ; Figure 13 This is a schematic diagram of the three-dimensional ring structure of the present invention. Figure 2 ; Figure 14 This is a schematic diagram of the disassembled structure of the spraying component of the present invention; Figure 15 This is a schematic diagram of the internal structure of the irregularly shaped collar of the present invention.

[0017] In the diagram: 10. Tower body; 11. Inlet pipe; 12. Connecting ball; 13. Opening; 14. Perforated fixing plate; 15. Exhaust pipe; 16. Exhaust port; 20. First mounting plate; 21. Connecting column; 22. Second mounting plate; 23. Through hole; 24. Connecting pipe; 25. Limiting groove; 26. Limiting ring; 30. Mounting pipe; 31. First round hole; 32. First connecting pipe; 33. Arc plate; 34. Second round hole; 3 5. Second connecting pipe; 36. Heating rod; 40. Circular ring; 41. Fixing rod; 42. Annular groove; 43. First docking hole; 44. Second docking hole; 45. Through hole; 46. Exhaust pipe; 50. Mounting rod; 51. Circular collar; 52. Water inlet pipe; 53. Water inlet; 54. Meter-shaped plate; 55. Groove; 56. Atomizing nozzle; 60. Irregular collar; 61. Motor; 62. Drive disc; 63. Belt. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0019] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms "comprising" or "including," and similar terms used in this disclosure, mean that an element or object preceding the term encompasses the elements or objects listed following the term and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0020] like Figures 1 to 15As shown in the figure, an activated carbon adsorption device for the adsorption and impurity removal of trichlorosilane provided by the present invention includes a tower body 10. A first mounting plate 20 is rotatably arranged inside the tower body 10. A connecting column 21 is fixedly arranged on the first mounting plate 20. The top end of the connecting column 21 is fixedly provided with a second mounting plate 22. The inside of the second mounting plate 22 is hollow. A mounting pipe 30 communicating with its inside is fixedly arranged on the outer wall of the tower body 10, and the output end of the mounting pipe 30 is located between the first mounting plate 20 and the second mounting plate 22. A plurality of first round holes 31 are penetrated through the second mounting plate 22. A plurality of first connecting pipes 32 corresponding to the plurality of first round holes 31 are fixedly arranged on the second mounting plate 22. Two arc-shaped plates 33 are fixedly arranged on the outer wall of the first connecting pipe 32, and the first connecting pipe 32 is internally communicated with the arc-shaped plates 33. A second round hole 34 is penetrated through the center position of the second mounting plate 22. A second connecting pipe 35 corresponding to the second round hole 34 is fixedly arranged on the second mounting plate 22. A plurality of heating rods 36 are fixedly arranged on the outer surface of the second connecting pipe 35, and the second connecting pipe 35 is internally communicated with the heating rods 36. The second connecting pipe 35 and the heating rods 36 are in a cross shape. An exhaust component is arranged above the second connecting pipe 35 and the plurality of first connecting pipes 32. A spraying component is arranged below the first mounting plate 20. An irregular collar 60 is fixedly arranged on the outer wall of the tower body 10, and a driving component cooperating with the first mounting plate 20 is installed inside the irregular collar 60.

[0021] A plurality of through holes 23 are opened on both the first mounting plate 20 and the second mounting plate 22, and the through holes 23 on the first mounting plate 20 correspond to the through holes 23 on the second mounting plate 22. The through holes 23 on the first mounting plate 20 and the through holes 23 on the second mounting plate 22 are communicated through a connecting pipe 24. The exhaust component includes a circular ring 40 above the second mounting plate 22, and the circular ring 40 is fixedly connected to the tops of the plurality of first connecting pipes 32 and the second connecting pipe 35 respectively. A fixing rod 41 is fixedly arranged in the middle of the circular ring 40, and the inside of the fixing rod 41 is hollow. An annular groove 42 is opened on the outer wall of the circular ring 40. A plurality of first docking holes 43 communicating with the annular groove 42 are opened at the bottom end of the circular ring 40. A second docking hole 44 communicating with its inside is opened at the bottom end of the fixing rod 41. The plurality of first docking holes 43 correspond to the plurality of first connecting pipes 32 one by one, and the second docking hole 44 corresponds to the second connecting pipe 35. A through hole 45 is penetrated through one side of the fixing rod 41, and the inside of the fixing rod 41 is communicated with the annular groove 42 through the through hole 45. An exhaust pipe 46 communicating with its inside is fixedly arranged on the tower body 10, and the exhaust pipe 46 is located in the annular groove 42. Activated carbon is filled between the first mounting plate 20 and the circular ring 40.

[0022] The inner wall of the tower body 10 is provided with two sets of limiting grooves 25, and the two sets of limiting grooves 25 are distributed vertically. Limiting rings 26 are installed in the two sets of limiting grooves 25 respectively. The upper set of the two sets of limiting rings 26 is located above the second mounting plate 22, and the lower set is located below the first mounting plate 20.

[0023] The spraying assembly includes a mounting rod 50 fixedly mounted at the bottom of the first mounting plate 20. The mounting rod 50 is hollow inside. A shaped plate 54 is fixedly connected to the bottom of the mounting rod 50. The shaped plate 54 is also hollow inside. A slot 55 corresponding to the mounting rod 50 is opened at the top of the shaped plate 54. The mounting rod 50 communicates with the interior of the shaped plate 54 through the slot 55. Multiple sets of atomizing nozzles 56 communicating with the interior of the shaped plate 54 are fixedly mounted at the bottom of the shaped plate 54. A water supply assembly communicating with the outside is provided on the outer wall of the mounting rod 50.

[0024] The water supply assembly includes a circular collar 51 rotatably mounted on the outer wall of the mounting rod 50. The circular collar 51 is hollow inside, and the outer wall of the circular collar 51 is provided with a water inlet pipe 52 communicating with its interior. The input end of the water inlet pipe 52 passes through the tower body 10 and the irregular collar 60 in sequence and is connected to a water pipe. The outer wall of the mounting rod 50 is provided with a water inlet 53 communicating with its interior, and the water inlet 53 cooperates with the circular collar 51.

[0025] The bottom end of the tower body 10 is fixedly provided with a drain pipe 15 that communicates with its interior, and the drain pipe 15 is provided with a one-way drain valve.

[0026] The drive assembly includes a motor 61 fixedly mounted on the top of the inner wall of the protruding part of the irregular collar 60. The output end of the motor 61 is connected to the drive disk 62. The drive disk 62 is connected to the first mounting plate 20 by a belt 63. Both the drive disk 62 and the outer wall of the first mounting plate 20 are provided with shallow grooves that cooperate with the belt 63.

[0027] A perforated fixing plate 14 is fixedly installed inside the lower part of the tower body 10, and the perforated fixing plate 14 is located below the atomizing nozzle 56.

[0028] The bottom end of the tower body 10 is fixed with an air inlet pipe 11 that communicates with the interior. The output end of the air inlet pipe 11 is connected to a connecting ball 12, and the connecting ball 12 is hollow inside. Multiple sets of openings 13 are opened on the outer surface of the connecting ball 12, and the openings 13 are set obliquely upward.

[0029] The top of the tower body 10 is provided with an exhaust port 16, which is used to connect to the exhaust pipe.

[0030] The working principle of this invention is as follows: Trichlorosilane gas containing impurities enters from the inlet pipe 11 at the bottom of the tower body 10, and is evenly dispersed and flows upward through the oblique opening 13 on the connecting ball 12. The gas first passes through the perforated fixing plate 14 and enters the spray zone. At this time, the spraying assembly operates, and external water enters the circular collar 51 through the water inlet pipe 52, flows into the hollow mounting rod 50 through the water inlet 53, then enters the swivel plate 54, and finally is sprayed out from the atomizing nozzle 56 as atomized spray liquid. The spray liquid comes into countercurrent contact with the rising gas, removing some soluble or particulate impurities from the gas. The waste liquid after spraying collects downward and is discharged through the one-way drain valve on the bottom drain pipe 15 of the tower.

[0031] The pre-washed gas continues to rise and reaches the first mounting plate 20. The motor 61 in the drive assembly operates, driving the first mounting plate 20 to rotate slowly via the drive disc 62 and belt 63, while simultaneously driving the second mounting plate 22 to rotate synchronously via the connecting column 21. The gas enters the connecting pipe 24 through the through-hole 23 on the first mounting plate 20, and then enters the activated carbon filling zone through the corresponding through-hole 23 on the second mounting plate 22. The activated carbon layer adsorbs and removes residual impurities in the gas. A limiting ring 26 is provided inside the tower to ensure stable rotation of the first mounting plate 20 and the second mounting plate 22.

[0032] During the adsorption process, hot gas is introduced into the tower through the mounting pipe 30. The hot gas enters the chamber located between the first mounting plate 20 and the second mounting plate 22, and then enters the first connecting pipe 32 through the first circular hole 31 and the second connecting pipe 35 through the second circular hole 34. The hot gas flow diffuses through the arc-shaped plate 33 on the outside of the first connecting pipe 32, while the heating rod 36 on the outside of the second connecting pipe 35 also provides auxiliary heating to the gas flow. Driven by the rotation of the first mounting plate 20 and the second mounting plate 22, the arc-shaped plate 33 and the heating rod 36 rotate accordingly, so that the hot gas is evenly distributed in the activated carbon layer, achieving uniform heating of the activated carbon. This heating effect can promote the regeneration of the adsorbent or maintain the optimal adsorption temperature, thereby improving the adsorption efficiency and extending the service life of the activated carbon.

[0033] The hot gas entering the first connecting pipe 32 and the second connecting pipe 35 eventually converges upwards into the annular ring 40. The hot gas from the first connecting pipe 32 enters the annular groove 42 through the first docking hole 43, while the hot gas from the second connecting pipe 35 enters the fixed rod 41 through the second docking hole 44 and then flows into the annular groove 42 through the through hole 45. The converged hot gas is then discharged through the exhaust pipe 46 on the tower body 10 for recovery or treatment. The purified trichlorosilane gas continues to rise through the activated carbon layer and is finally discharged through the exhaust pipe connected to the exhaust port 16 at the top of the tower, entering the next process.

[0034] The above embodiments are merely exemplary embodiments of the present invention and are not intended to limit the present invention. The scope of protection of the present invention is defined by the claims. Those skilled in the art can make various modifications or equivalent substitutions to the present invention within its spirit and scope of protection, and such modifications or equivalent substitutions should also be considered to fall within the scope of protection of the present invention.

Claims

1. An activated carbon adsorption device for removing impurities from trichlorosilane, comprising a tower body (10), characterized in that: The tower body (10) is rotatably provided with a first mounting plate (20), and a connecting column (21) is fixedly provided on the first mounting plate (20). A second mounting plate (22) is fixedly provided at the top of the connecting column (21). The second mounting plate (22) is hollow inside. An installation pipe (30) communicating with the inside is fixedly provided on the outer wall of the tower body (10), and the output end of the installation pipe (30) is located between the first mounting plate (20) and the second mounting plate (22). Multiple sets of first circular holes (31) are opened through the second mounting plate (22). Multiple sets of first connecting pipes (32) corresponding to the multiple sets of first circular holes (31) are fixedly provided on the second mounting plate (22). The outer wall of the first connecting pipe (32) is fixed with Two sets of arc plates (33) are provided. A second circular hole (34) is provided through the center of the second mounting plate (22). A second connecting pipe (35) corresponding to the second circular hole (34) is fixed on the second mounting plate (22). Multiple sets of heating rods (36) are fixed on the outer surface of the second connecting pipe (35). The second connecting pipe (35) is connected to the heating rods (36). An exhaust assembly is provided above the second connecting pipe (35) and multiple sets of first connecting pipes (32). A spraying assembly is provided below the first mounting plate (20). A special-shaped collar (60) is fixed on the outer wall of the tower body (10). A drive assembly that cooperates with the first mounting plate (20) is installed inside the special-shaped collar (60).

2. The activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 1, characterized in that: Both the first mounting plate (20) and the second mounting plate (22) have multiple sets of through holes (23), and the through holes (23) on the first mounting plate (20) correspond to the through holes (23) on the second mounting plate (22). The through holes (23) on the first mounting plate (20) and the through holes (23) on the second mounting plate (22) are connected by a connecting pipe (24). The exhaust assembly includes a ring (40) located above the second mounting plate (22), and the ring (40) is fixedly connected to the top ends of multiple sets of first connecting pipes (32) and second connecting pipes (35). A fixing rod (41) is fixedly provided in the middle of the ring (40), and the fixing rod is fixedly provided in the middle of the ring (40). The rod (41) is hollow inside. The outer wall of the ring (40) is provided with an annular groove (42). The bottom end of the ring (40) is provided with multiple sets of first docking holes (43) communicating with the annular groove (42). The bottom end of the fixed rod (41) is provided with a second docking hole (44) communicating with its interior. The multiple sets of first docking holes (43) correspond one-to-one with multiple sets of first connecting pipes (32). The second docking holes (44) correspond to the second connecting pipes (35). A through hole (45) is provided through one side of the fixed rod (41). An exhaust pipe (46) communicating with its interior is fixed on the tower body (10), and the exhaust pipe (46) is located in the annular groove (42).

3. The activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 1, characterized in that: The inner wall of the tower body (10) is provided with two sets of limiting grooves (25), and the two sets of limiting grooves (25) are distributed vertically. Limiting rings (26) are installed in the two sets of limiting grooves (25). The upper set of the two sets of limiting rings (26) is located above the second mounting plate (22), and the lower set is located below the first mounting plate (20).

4. The activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 1, characterized in that: The spraying assembly includes a mounting rod (50) fixedly installed at the bottom of the first mounting plate (20). The mounting rod (50) is hollow inside. A spherical plate (54) is fixedly connected to the bottom of the mounting rod (50). The spherical plate (54) is also hollow inside. A slot (55) corresponding to the mounting rod (50) is opened at the top of the spherical plate (54). Multiple atomizing nozzles (56) communicating with the interior of the spherical plate (54) are fixedly installed at the bottom of the spherical plate (54). A water supply assembly communicating with the outside is provided on the outer wall of the mounting rod (50).

5. An activated carbon adsorption device for adsorbing and removing impurities from trichlorosilane according to claim 4, characterized in that: The water supply assembly includes a circular collar (51) rotatably mounted on the outer wall of the mounting rod (50). The circular collar (51) is hollow inside. The outer wall of the circular collar (51) is provided with a water inlet pipe (52) communicating with its interior. The input end of the water inlet pipe (52) passes through the tower body (10) and the irregular collar (60) in sequence and is connected to a water pipe. The outer wall of the mounting rod (50) is provided with a water inlet (53) communicating with its interior, and the water inlet (53) cooperates with the circular collar (51).

6. An activated carbon adsorption device for adsorbing and removing impurities from trichlorosilane according to claim 5, characterized in that: The bottom end of the tower body (10) is fixedly provided with an exhaust pipe (15) that communicates with its interior, and the exhaust pipe (15) is provided with a one-way drain valve.

7. The activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 1, characterized in that: The drive assembly includes a motor (61) fixedly mounted on the top of the inner wall of the protruding part of the irregular collar (60). The output end of the motor (61) is connected to the drive disk (62). The drive disk (62) and the first mounting plate (20) are connected by a belt (63).

8. An activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 7, characterized in that: A perforated fixing plate (14) is fixedly installed inside the lower part of the tower body (10), and the perforated fixing plate (14) is located below the atomizing nozzle (56).

9. An activated carbon adsorption device for adsorbing and removing impurities from trichlorosilane according to claim 1, characterized in that: The bottom end of the tower body (10) is fixed with an air inlet pipe (11) that communicates with the interior. The output end of the air inlet pipe (11) is connected to a connecting ball (12), and the connecting ball (12) is hollow inside. Multiple sets of openings (13) are opened on the outer surface of the connecting ball (12).

10. An activated carbon adsorption device for adsorption and removal of impurities from trichlorosilane according to claim 1, characterized in that: The tower body (10) has an exhaust port (16) at the top, and the exhaust port (16) is used to connect to the exhaust pipe.

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