Multiple laser galvanometer module, multiple laser selective melting equipment and visual guidance correction method of multiple laser galvanometer

Abstract

The present application relates to the technical field of metal selective additive manufacturing, and discloses a multi-laser galvanometer module, a multi-laser selective melting device and a visual guidance correction method of a multi-laser galvanometer, which comprises a multi-beam laser galvanometer, a field lens, an electrically adjusted ring and a light path protection lens; the light path protection lens comprises a protection vertical lens and a protection horizontal lens; the multi-beam laser galvanometer is a double-beam or multi-beam module structure, the multi-beam laser galvanometer comprises an X-axis mirror and a Y-axis mirror, the X-axis mirror and the Y-axis mirror are arranged in a mirror image or a straight line array form, and the X-axis mirror and the Y-axis mirror have at least two groups; two independent motors are respectively drivenly connected with the corresponding groups of X-axis mirrors and Y-axis mirrors, and the present application can meet the processing requirements of small multi-laser in a range, improve the space utilization of the processing range and the accuracy of the overall forming of the device.

Description

Technical Field

[0001] This invention relates to the field of selective additive manufacturing technology for metals, specifically to a multi-laser galvanometer module, a multi-laser selective melting device, and a visual guidance and correction method for multi-laser galvanometers. Background Technology

[0002] Currently, the galvanometer modules used in laser selective melting equipment are single-beam galvanometer modules. These modules are equipped with only one set of X-axis and Y-axis reflectors, and each set of mirrors is matched with only one drive motor. Therefore, a single galvanometer module can only achieve single-beam output. To achieve multi-beam scanning processing, existing equipment needs to arrange single-beam galvanometers with the same number of beams within the processing area.

[0003] In existing galvanometer modules, the number of lasers that can be installed within the same processing area is limited by the space available for galvanometer arrangement, making it impossible to achieve high-density laser installation and meet the processing requirements of multiple lasers in a small area. Furthermore, the output beam form of existing galvanometer modules results in a limited number of beams output by the same number of galvanometers, leading to low overall scanning and processing efficiency. In addition, dispersing multiple existing galvanometer modules not only increases the complexity of the overall equipment structure but also increases the difficulty of adjusting the galvanometer group and reduces the overall forming accuracy of the equipment. Summary of the Invention

[0004] This invention provides a multi-laser galvanometer module, a multi-laser selective melting device, and a visual guidance and correction method for multi-laser galvanometers, in order to solve the problems of limited space for galvanometer module arrangement, low scanning and processing efficiency, and low overall forming accuracy of existing equipment.

[0005] In a first aspect, the present invention provides a multi-laser galvanometer module, comprising a multi-beam laser galvanometer, a field mirror, an electrically adjustable junction ring, and an optical path protection lens; the optical path protection lens includes a vertical protection lens and a horizontal protection lens; the multi-beam laser galvanometer is a dual-beam or multi-beam module structure, the multi-beam laser galvanometer includes an X-axis reflector and a Y-axis reflector, both of which are arranged in a mirror or linear array, and there are at least two groups of X-axis and Y-axis reflectors; each group of X-axis and Y-axis reflectors is correspondingly configured with two independent motors, and the two independent motors are respectively connected to drive the corresponding group of X-axis and Y-axis reflectors.

[0006] Beneficial effects: By employing a dual-beam or multi-beam module structure, setting at least two groups of X-axis and Y-axis reflectors in a mirror or linear array arrangement, with one X-axis reflector and one Y-axis reflector per group, and each group of X-axis and Y-axis reflectors independently configured with two drive motors, multi-beam output from a single galvanometer module is achieved. With the same number of galvanometers, twice the beam output can be achieved, thus doubling the number of lasers that can be installed within the same area, meeting the processing needs of multiple lasers in small areas. In addition, the mirror or linear array arrangement of multiple groups of X-axis and Y-axis reflectors improves the space utilization of the processing area, increases the number of beams output with the same number of galvanometers, and thus improves the overall scanning and processing efficiency of the equipment. Furthermore, by independently configuring two drive motors for the X-axis and Y-axis reflectors, the difficulty of adjusting the galvanometer group accuracy is reduced, and the overall forming accuracy of the equipment is improved.

[0007] In one optional embodiment, the multi-beam laser galvanometer is a galvanometer-type scanning structure, including an energized coil, a permanent magnet, and a reset assembly. The energized coil is linked with the X-axis reflector and the Y-axis reflector, the permanent magnet is correspondingly arranged with the energized coil, the reset component is a mechanical spring or an electronic reset structure, and the reset component is connected to the X-axis reflector and the Y-axis reflector; The working deflection stroke of the X-axis reflector and the Y-axis reflector is ±20°.

[0008] Beneficial effects: By configuring the multi-beam laser galvanometer as a galvanometer-type scanning structure, and through the electromagnetic drive method of the linkage between the energized coil and the X-axis and Y-axis reflectors, and the magnetic field provided by the permanent magnet, combined with the reset effect of the mechanical spring or electronic reset component, the deflection angle of the lens is proportional to the input current, thus realizing the rapid two-dimensional precise deflection of the laser beam, which can meet the requirements of multi-beam synchronous scanning for deflection response speed and accuracy.

[0009] Furthermore, by limiting the working deflection stroke of the X-axis and Y-axis reflectors to ±20°, this range forms the precision positioning interval of the galvanometer, enabling high-precision deflection of the laser beam within the ±20° range. This ensures the positioning accuracy of multi-beam scanning and, consequently, guarantees the high-precision forming and processing of the multi-laser galvanometer module.

[0010] In one optional implementation, the input beam is sequentially incident on an X-axis reflector and a Y-axis reflector; the mechanical limit deflection angle of the X-axis reflector is θ. x The mechanical limit deflection angle of the Y-axis reflector is θ. θ x With θ The deflection directions are perpendicular to each other, and the X-axis reflector and Y-axis reflector are used to reflect the input beam to the target coordinates (x, y, z); Where, θ x θ The value range is 0°-180°.

[0011] Beneficial effects: By limiting the input beam to be incident sequentially on the X-axis and Y-axis reflectors, the optical path of the input beam incident sequentially on the X-axis and Y-axis reflectors is formed, and the mechanical limit deflection angle θ of the X-axis reflector is limited. x The mechanical limit deflection angle θ of the Y-axis reflector The mirrors are perpendicular to each other to ensure that multiple laser beams can be accurately projected to the target coordinates (x, y, z) through the coordinated deflection of the X-axis and Y-axis mirrors, thereby ensuring the optical path stability of multi-beam scanning.

[0012] In addition, the mechanical limit deflection angle θ of the X-axis reflector x The mechanical limit deflection angle θ of the Y-axis reflector The value range is 0°-180°, which provides sufficient deflection adjustment space for the X-axis and Y-axis reflectors, and avoids repeated reflection of the light beam in the X or Y direction caused by the X-axis and Y-axis reflectors deflecting the angle beyond this range, thereby avoiding the decrease in scanning accuracy caused by optical path interference.

[0013] In one optional embodiment, a control system is also included; the control system includes a processor, a power amplifier, a photoelectric sensor, and a galvanometer calibration model, wherein the power amplifier is electrically connected to the processor and an independent motor, and the photoelectric sensor is respectively configured to correspond to the X-axis reflector, the Y-axis reflector, and the processor; The repeatability of the multi-beam laser galvanometer is 6-88 μRad.

[0014] Beneficial effects: By setting up a control system including a processor, power amplifier, photoelectric sensor, and galvanometer calibration model, the photoelectric sensor can detect the actual positions of the X-axis and Y-axis reflectors in real time and feed them back to the processor, forming a negative feedback adjustment loop. This ensures that the repeatability of the multi-beam laser galvanometer can reach 6-88 μRad, thereby guaranteeing the positioning consistency of multi-beam scanning. By setting up a power amplifier to amplify the control signal output by the processor, the stability and response speed of driving the X-axis and Y-axis reflectors can be guaranteed. Combined with the galvanometer calibration model, the position error of the X-axis and Y-axis reflectors can be pre-corrected, thereby improving the positioning accuracy of the galvanometer module. The control system of processor, power amplifier, photoelectric sensor, and galvanometer calibration model forms a closed-loop control of the multi-beam laser galvanometer, enhancing the system stability of the multi-beam laser galvanometer.

[0015] In one optional implementation, the control system is a DSP+FPGA architecture; The jumping positioning speed of the multi-beam laser galvanometer is 40,000-50,000 points / second.

[0016] Beneficial effects: The control system adopts a DSP+FPGA architecture, which can realize real-time control of the multi-beam laser galvanometer and accurately adjust the synchronous deflection of multiple X-axis and Y-axis reflectors to meet the processing requirements of simultaneous scanning of multiple beams. The jumping and positioning speed of the multi-beam laser galvanometer is limited to the range of 40,000-50,000 points / second. The rapid positioning of the multi-beam laser galvanometer improves the processing jumping efficiency of the laser beam, reduces the idle scanning time of the multi-beam laser galvanometer, and further improves the overall scanning and processing efficiency of the equipment.

[0017] In one optional embodiment, a fully automated intelligent calibration system is further included. This system comprises a high signal-to-noise ratio (SNR) signal processing module, a calibration algorithm module, a spot position detector, a high-density calibration module, a dynamic error compensation module, a multi-mirror collaborative control module, a visual guidance module, a PSD device, and a visual measurement module. The high SNR signal processing module is used to acquire laser path information. The calibration algorithm module is used to correct the laser path information in real time. The spot position detector is electrically connected to the high-density calibration module. The dynamic error compensation module includes a photosensitive sensor and an ACC controller. The multi-mirror collaborative control module has a built-in stitching scanning algorithm module. The visual guidance module includes a CCD image acquisition component and a correction algorithm module. The PSD device is used to acquire laser spot position data. The visual measurement module processes the image data from the CCD image acquisition component. Both the correction algorithm module and the visual measurement module are connected to the galvanometer correction model signal.

[0018] Beneficial effects: By setting up a fully automatic intelligent calibration system, the high signal-to-noise ratio signal processing module collects laser path information, and the calibration algorithm module corrects the path information in real time, ensuring that the calibration process requires no manual operation or printing of test samples. Calibration can be completed directly by collecting laser path information, thus reducing printing material and time costs. The PSD device can accurately collect the position data of the laser spot, the CCD image acquisition component of the vision guidance module can correct the marked image data, and the vision measurement module processes the image data. Furthermore, the correction algorithm module and the vision measurement module are both connected to the galvanometer calibration model signal, forming a vision-guided closed-loop feedback calibration system. This system can cope with dynamic interference such as optical distortion and temperature drift, thereby enhancing the robustness of the multi-beam laser galvanometer. The spot position detector is electrically connected to the high-density calibration module, and the dynamic error compensation module, combined with a photosensitive sensor and a self-developed ACC controller, ensures that the multi-beam laser galvanometer completes high-density calibration and high-precision error compensation. The multi-galvanometer collaborative control module has a built-in stitching scanning algorithm module, ensuring seamless stitching of the multi-galvanometer overlap area with algorithmic support, thus guaranteeing high-precision calibration of the multi-beam galvanometer module.

[0019] In one optional implementation, the high-density calibration module has no fewer than 1798 calibration points; And / or, the error compensation accuracy of the dynamic error compensation module is less than 0.03mm.

[0020] Beneficial effects: By limiting the number of calibration points in the high-density calibration module to no less than 1798, far exceeding the 89 calibration points of traditional manual calibration, and combined with the spot position detector, high-precision calibration control of 0.06–0.1 mm can be achieved, improving the calibration accuracy and consistency of the multi-beam laser galvanometer. Through the dynamic error compensation module, which works in conjunction with the photosensitive sensor and the self-developed ACC controller, the correction error of the multi-beam laser galvanometer is controlled within the range of less than 0.03 mm, improving the correction accuracy. This can effectively compensate for mechanical and optical path errors during the deflection process of the multi-beam laser galvanometer, thereby improving the scanning accuracy of the multi-beam laser galvanometer and further improving the forming quality of the parts.

[0021] In one optional implementation, the multi-beam overlap accuracy of the multi-mirror collaborative control module is within ±0.05mm.

[0022] Beneficial effects: The multi-galvanometer collaborative control module has a built-in stitching scanning algorithm module that ensures a high degree of overlap between adjacent galvanometer spots and keeps the multi-light overlap accuracy within ±0.05mm. This eliminates the misalignment problem in the overlapping scanning area of ​​the multi-laser system, thereby avoiding the degradation of mechanical properties and the generation of overlap marks in the overlap area of ​​the finished part, and thus improving the accuracy of the multi-laser scanning overlap area. Furthermore, the seamless stitching of the overlap area ensures the overall dimensional accuracy and mechanical property consistency of the finished part.

[0023] Secondly, the present invention also provides a multi-laser selective melting device, including the aforementioned multi-laser galvanometer module.

[0024] Beneficial effects: Applying the aforementioned multi-laser galvanometer module to multi-laser selective melting equipment enables the equipment to process multiple lasers in a small area, doubling the number of lasers installed within the same area, thus improving the overall scanning efficiency of the multi-laser selective melting equipment. Simultaneously, it simplifies the overall structure of the equipment and reduces maintenance difficulty. Furthermore, the high-precision closed-loop control system and fully automatic intelligent calibration system integrated into the multi-beam laser galvanometer improve the calibration efficiency, forming accuracy, and system stability of the multi-laser selective melting equipment, while shortening the time required for a single calibration.

[0025] Thirdly, the present invention also provides a visual guidance and correction method for multi-laser galvanometers, based on the above-mentioned multi-laser selective melting device, the method comprising the following steps: The XYZ stage control system moves the vacuum adsorption stage carrying the calibration substrate to the designated calibration position, and the laser system is activated to output a laser beam to the galvanometer assembly. The galvanometer control system drives the galvanometer assembly to deflect and scan the laser beam, so that the laser beam is projected onto the surface of the calibration substrate; The position data of the laser beam on the calibration substrate is acquired by the PSD device, and the position data is transmitted to the PSD measurement module. The CCD image acquisition component of the vision guidance module acquires images of the laser spot and correction marks on the surface of the calibration substrate and transmits the acquired image data to the vision measurement module. The visual measurement module processes and analyzes the image data, while the PSD measurement module parses the position data. Both modules synchronously transmit the processed data to the galvanometer calibration model. The galvanometer calibration model generates calibration parameters for the galvanometer assembly based on the input data from the vision measurement module and the PSD measurement module, and feeds the calibration parameters back to the galvanometer control system. The galvanometer control system adjusts the deflection angle of the galvanometer assembly according to the calibration parameters to complete the visual guidance calibration of the galvanometer assembly. During the calibration process, the output state of the laser system is synchronously controlled by the galvanometer control system.

[0026] Beneficial Effects: The vision-guided calibration method for multi-laser galvanometers of this invention is based on the aforementioned multi-laser selective melting equipment. Through the synergistic effect of the XYZ stage control system, PSD device, vision guidance module, and galvanometer calibration model, the galvanometer assembly can complete fully automatic calibration without manual intervention, reducing calibration time and improving calibration efficiency. Furthermore, by collecting position data through the PSD device and image data through the CCD image acquisition component, and analyzing the data from two different dimensions, the accuracy of the generated galvanometer calibration parameters is ensured. This allows the galvanometer control system to adjust the lens deflection angle in real time according to the calibration parameters, thereby achieving precise calibration of the galvanometer assembly and improving the processing quality of complex graphic parts. In addition, the output state of the laser system during the calibration process is synchronously controlled by the galvanometer control system, linking the calibration operation with the laser output and ensuring the safety and accuracy of the calibration process. Attached Figure Description

[0027] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of a multi-laser galvanometer module according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the optical path of the input beam through the X-axis reflector and the Y-axis reflector in an embodiment of the present invention; Figure 3 This is a flowchart illustrating another visual guidance and correction method using multiple laser galvanometers according to an embodiment of the present invention.

[0029] Explanation of reference numerals in the attached figures: 1. Multibeam laser galvanometer; 101. X-axis reflector; 102. Y-axis reflector; 2. Field mirror; 3. Electrically adjustable junction box; 401. Protective vertical mirror; 402. Protective horizontal mirror. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] The following is combined with Figures 1 to 3The following describes embodiments of the present invention.

[0032] According to an embodiment of the present invention, a multi-laser galvanometer module is provided, including a multi-beam laser galvanometer 1, a field mirror 2, an electrically adjustable junction ring 3, and an optical path protection lens; the optical path protection lens includes a vertical protection lens 401 and a horizontal protection lens 402; the multi-beam laser galvanometer 1 is a dual-beam or multi-beam module structure, the multi-beam laser galvanometer 1 includes an X-axis reflector 101 and a Y-axis reflector 102, the X-axis reflector 101 and the Y-axis reflector 102 are both arranged in a mirror or linear array, and there are at least two groups of X-axis reflectors 101 and Y-axis reflectors 102; each group of X-axis reflectors 101 and Y-axis reflectors 102 is correspondingly configured with two independent motors, and the two independent motors are respectively driven connected to the corresponding group of X-axis reflectors 101 and Y-axis reflectors 102.

[0033] This embodiment employs a dual-beam or multi-beam module structure, setting at least two groups of X-axis reflectors 101 and Y-axis reflectors 102, arranged in a mirror or linear array configuration. Each group of X-axis reflectors 101 and Y-axis reflectors 102 is configured with two independent drive motors, enabling multi-beam output from a single galvanometer module. With the same number of galvanometers, this doubles the beam output, allowing for twice the number of lasers to be installed within the same area, meeting the processing needs of multiple lasers in small areas. Furthermore, the mirror or linear array arrangement of multiple groups of X-axis reflectors 101 and Y-axis reflectors 102 improves the space utilization of the processing area, increases the number of beams output with the same number of galvanometers, and thus improves the overall scanning and processing efficiency of the equipment. Additionally, by independently configuring two drive motors for each X-axis reflector 101 and Y-axis reflector 102, the difficulty of adjusting the galvanometer group's precision is reduced, and the overall forming precision of the equipment is improved.

[0034] In one embodiment, the multi-beam laser galvanometer 1 is a galvanometer-type scanning structure, including an energized coil, a permanent magnet, and a reset component; the energized coil is linked with the X-axis reflector 101 and the Y-axis reflector 102, the permanent magnet is correspondingly arranged with the energized coil, and the reset component is a mechanical spring or an electronic reset structure, and the reset component is connected to the X-axis reflector 101 and the Y-axis reflector 102; the working deflection stroke of the X-axis reflector 101 and the Y-axis reflector 102 is ±20°.

[0035] In this embodiment, the multi-beam laser galvanometer 1 is configured as a galvanometer-type scanning structure. Through the electromagnetic drive method of the linkage between the energized coil and the X-axis reflector 101 and Y-axis reflector 102, and the magnetic field provided by the permanent magnet, combined with the reset effect of the mechanical spring or electronic reset component, the deflection angle of the lens is proportional to the input current, thereby realizing the rapid two-dimensional precise deflection of the laser beam. This can meet the requirements of multi-beam synchronous scanning for deflection response speed and accuracy.

[0036] Furthermore, by limiting the working deflection stroke of the X-axis reflector 101 and the Y-axis reflector 102 to ±20°, this range forms the precision positioning interval of the galvanometer, which can realize high-precision deflection of the laser beam within the ±20° range, ensuring the positioning accuracy of multi-beam scanning, and thus ensuring the high-precision forming and processing of the multi-laser galvanometer module.

[0037] It is understandable that the working deflection stroke of the X-axis reflector 101 and the Y-axis reflector 102 can be within the range of -20°, -15°, -10°, -5°, 0°, 5°, 10°, 15°, 20° or any value between the two.

[0038] In one embodiment, the input beam is sequentially incident on the X-axis reflector 101 and the Y-axis reflector 102; the mechanical limit deflection angle of the X-axis reflector 101 is θ. x The mechanical limit deflection angle of the Y-axis reflector 102 is θ. θ x With θ The deflection directions are perpendicular to each other. The X-axis reflector 101 and the Y-axis reflector 102 are used to reflect the input beam to the target coordinates (x, y, z); where θ x θ The value range is 0°-180°.

[0039] It is understandable that θ x θ The value range can be 0°, 45°, 90°, 135°, 180° or any value range between the two.

[0040] This embodiment defines the optical path of the input beam as it sequentially enters the X-axis reflector 101 and the Y-axis reflector 102, and limits the mechanical limit deflection angle θ of the X-axis reflector 101. x The mechanical limit deflection angle θ of the Y-axis reflector 102 The mirrors are arranged perpendicularly to each other to ensure that multiple laser beams can be accurately projected to the target coordinates (x, y, z) through the coordinated deflection of the X-axis mirror 101 and the Y-axis mirror 102, thereby ensuring the stability of the optical path for multi-beam scanning.

[0041] Furthermore, the mechanical limit deflection angle θ of the X-axis reflector 101 x The mechanical limit deflection angle θ of the Y-axis reflector 102 The value range is 0°-180°, which provides sufficient deflection adjustment space for X-axis reflector 101 and Y-axis reflector 102, and avoids repeated reflection of the light beam in the X or Y direction caused by the deflection angle of X-axis reflector 101 and Y-axis reflector 102 exceeding the range, thereby avoiding the decrease in scanning accuracy caused by optical path interference.

[0042] In one embodiment, a control system is also included; the control system includes a processor, a power amplifier, a photoelectric sensor, and a galvanometer calibration model. The power amplifier is electrically connected to the processor and an independent motor, and the photoelectric sensor is correspondingly set to the X-axis reflector 101, the Y-axis reflector 102, and the processor, respectively; the repeatability of the multi-beam laser galvanometer 1 is 6-88 μRad.

[0043] Understandably, the repeatability of the multi-beam laser galvanometer 1 can be 6μRad, 10μRad, 20μRad, 30μRad, 40μRad, 50μRad, 60μRad, 70μRad, 80μRad, 88μRad, or any value between the two.

[0044] This embodiment establishes a control system comprising a processor, a power amplifier, photoelectric sensors, and a galvanometer calibration model. The photoelectric sensors detect the actual positions of the X-axis reflector 101 and the Y-axis reflector 102 in real time and feed these positions back to the processor, forming a negative feedback adjustment loop. This ensures that the repeatability of the multi-beam laser galvanometer 1 reaches 6-88 μRad, thereby guaranteeing the positioning consistency of multi-beam scanning. The power amplifier amplifies the control signal output by the processor, ensuring the stability and response speed of driving the X-axis reflector 101 and the Y-axis reflector 102. Combined with the galvanometer calibration model, the positional errors of the X-axis reflector 101 and the Y-axis reflector 102 can be pre-corrected, thus improving the positioning accuracy of the galvanometer module. The control system, comprising the processor, power amplifier, photoelectric sensors, and galvanometer calibration model, forms a closed-loop control of the multi-beam laser galvanometer 1, enhancing its system stability.

[0045] In one embodiment, the control system is a DSP+FPGA architecture; the jumping positioning speed of the multi-beam laser galvanometer 1 is 40,000-50,000 points / second.

[0046] The control system in this embodiment adopts a DSP+FPGA architecture, which can realize real-time control of the multi-beam laser galvanometer 1. It can precisely control the synchronous deflection of multiple sets of X-axis reflectors 101 and Y-axis reflectors 102 to meet the processing requirements of simultaneous scanning of multiple beams. The jumping and positioning speed of the multi-beam laser galvanometer 1 is limited to the range of 40,000-50,000 points / second. The rapid positioning of the multi-beam laser galvanometer 1 improves the processing jumping efficiency of the laser beam, reduces the idle scanning time of the multi-beam laser galvanometer 1, and further improves the overall scanning and processing efficiency of the equipment.

[0047] In one embodiment, this embodiment further includes a fully automatic intelligent calibration system. The fully automatic intelligent calibration system includes a high signal-to-noise ratio signal processing module, a calibration algorithm module, a spot position detector, a high-density calibration module, a dynamic error compensation module, a multi-mirror collaborative control module, a visual guidance module, a PSD device, and a visual measurement module. The high signal-to-noise ratio signal processing module is used to acquire laser path information, the calibration algorithm module is used to correct the laser path information in real time, the spot position detector is electrically connected to the high-density calibration module, the dynamic error compensation module includes a photosensitive sensor and a controller ACC, the multi-mirror collaborative control module has a built-in stitching scanning algorithm module, the visual guidance module includes a CCD image acquisition component and a correction algorithm module, the PSD device is used to acquire laser spot position data, the visual measurement module is used to process the image data of the CCD image acquisition component, and both the correction algorithm module and the visual measurement module are connected to the galvanometer correction model signal.

[0048] This embodiment features a fully automated intelligent calibration system. A high signal-to-noise ratio signal processing module collects laser path information, and a calibration algorithm module corrects this information in real time. This ensures the calibration process is automated, eliminating the need for manual operation and printing test samples. Calibration is completed directly by collecting laser path information, reducing printing material and time costs. The PSD device accurately collects laser spot position data, and the CCD image acquisition component of the vision guidance module corrects the marked image data. The vision measurement module processes the image data, and both the correction algorithm module and the vision measurement module are connected to the galvanometer calibration model signal, forming a closed-loop feedback calibration system guided by vision. This system can handle dynamic interference such as optical distortion and temperature drift, enhancing the robustness of the multi-beam laser galvanometer 1. The spot position detector is electrically connected to the high-density calibration module, and the dynamic error compensation module, combined with a photosensitive sensor and a self-developed ACC controller, ensures high-density calibration and high-precision error compensation for the multi-beam laser galvanometer 1. The multi-galvanometer collaborative control module incorporates a stitching scanning algorithm module, ensuring seamless stitching of the multi-galvanometer overlap area with algorithmic support, thus guaranteeing high-precision calibration of the multi-beam galvanometer module.

[0049] In one embodiment, the high-density calibration module has no fewer than 1798 calibration points; the dynamic error compensation module has an error compensation accuracy of less than 0.03 mm.

[0050] This embodiment limits the number of calibration points in the high-density calibration module to no less than 1798, far exceeding the 89 calibration points of traditional manual calibration. Combined with the spot position detector, it can achieve high-precision calibration control of 0.06–0.1 mm, improving the calibration accuracy and consistency of the multi-beam laser galvanometer 1. Through the dynamic error compensation module, the photosensitive sensor and the self-developed controller ACC work together to control the correction error of the multi-beam laser galvanometer 1 within the range of less than 0.03 mm, improving the correction accuracy. It can effectively compensate for the mechanical and optical path errors in the deflection process of the multi-beam laser galvanometer 1, thereby improving the scanning accuracy of the multi-beam laser galvanometer 1 and further improving the forming quality of the parts.

[0051] In one embodiment, the multi-beam overlap accuracy of the multi-mirror collaborative control module is within ±0.05mm.

[0052] In this embodiment, the multi-galvanometer collaborative control module has a built-in stitching scanning algorithm module to ensure a high degree of overlap between adjacent galvanometer spots and to keep the multi-light overlap accuracy within the range of ±0.05mm. This eliminates the misalignment problem in the overlapping scanning area of ​​the multi-laser system, thereby avoiding the degradation of mechanical properties and the generation of overlap marks in the overlap area of ​​the finished part, and thus improving the accuracy of the multi-laser scanning overlap area. Furthermore, the seamless stitching of the overlap area ensures the overall dimensional accuracy and mechanical property consistency of the finished part.

[0053] According to an embodiment of the present invention, in another aspect, a multi-laser selective melting apparatus is also provided, including the multi-laser galvanometer module of the previous embodiment.

[0054] Applying the multi-laser galvanometer module from the previous embodiment to the multi-laser selective melting equipment of this embodiment enables the multi-laser selective melting equipment to process multiple lasers in a small area, doubling the number of lasers installed in the same area, improving the overall scanning efficiency of the multi-laser selective melting equipment, while simplifying the overall structure of the multi-laser selective melting equipment and reducing the maintenance difficulty of the multi-laser selective melting equipment; at the same time, the high-precision closed-loop control system and fully automatic intelligent calibration system of the multi-beam laser galvanometer 1 improve the calibration efficiency, forming accuracy and system stability of the multi-laser selective melting equipment, and shorten the calibration time of the multi-laser selective melting equipment.

[0055] According to an embodiment of the present invention, in another aspect, a vision-guided correction method using multiple laser galvanometers is also provided. Based on the multi-laser selective melting apparatus of the previous embodiment, the method includes the following steps: controlling a vacuum adsorption stage carrying a correction substrate to move to a designated correction position via an XYZ stage control system; activating a laser system to output a laser beam to a galvanometer assembly; driving the galvanometer assembly to deflect and scan the laser beam, so that the laser beam is projected onto the surface of the correction substrate; acquiring position data of the laser beam on the correction substrate via a PSD device and transmitting the position data to a PSD measurement module; and using a CCD image acquisition group of a vision-guided module. The device acquires images of the laser spot and calibration marks on the surface of the calibration substrate and transmits the acquired image data to the vision measurement module. The vision measurement module processes and analyzes the image data, while the PSD measurement module parses the position data. Both modules synchronously transmit the processed data to the galvanometer calibration model. Based on the input data from the vision measurement module and the PSD measurement module, the galvanometer calibration model generates calibration parameters for the galvanometer assembly and feeds these parameters back to the galvanometer control system. The galvanometer control system adjusts the deflection angle of the galvanometer assembly according to the calibration parameters to complete the vision-guided calibration of the galvanometer assembly. During the calibration process, the output state of the laser system is synchronously controlled by the galvanometer control system.

[0056] The vision-guided calibration method for multi-laser galvanometers in this embodiment is based on the multi-laser selective melting equipment of the previous embodiment. Through the synergistic effect of the XYZ stage control system, PSD device, vision guidance module, and galvanometer calibration model, the galvanometer assembly can complete fully automatic calibration without manual intervention, reducing calibration time and improving calibration efficiency. Furthermore, by collecting position data through the PSD device and image data through the CCD image acquisition component, and analyzing the data from two different dimensions, the accuracy of the generated galvanometer calibration parameters is ensured. This allows the galvanometer control system to adjust the lens deflection angle in real time according to the calibration parameters, thereby achieving precise calibration of the galvanometer assembly and improving the processing quality of complex graphic parts. In addition, the output state of the laser system during the calibration process is synchronously controlled by the galvanometer control system, linking the calibration operation with the laser output and ensuring the safety and accuracy of the calibration process.

[0057] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A multi-laser galvanometer module, characterized in that, The system includes a multi-beam laser galvanometer (1), a field mirror (2), an electrically adjustable junction box (3), and an optical path protection lens. The optical path protection lens includes a vertical protection lens (401) and a horizontal protection lens (402). The multi-beam laser galvanometer (1) is a dual-beam or multi-beam module structure. The multi-beam laser galvanometer (1) includes an X-axis reflector (101) and a Y-axis reflector (102). The X-axis reflector (101) and the Y-axis reflector (102) are arranged in a mirror or linear array. The X-axis reflector (101) and the Y-axis reflector (102) have at least two groups. Each group of X-axis reflectors (101) and Y-axis reflectors (102) is equipped with two independent motors. The two independent motors are respectively connected to the corresponding group of X-axis reflectors (101) and Y-axis reflectors (102).

2. The multi-laser galvanometer module according to claim 1, characterized in that, The multi-beam laser galvanometer (1) is a galvanometer-type scanning structure, including a energized coil, a permanent magnet and a reset assembly; The energized coil is linked with the X-axis reflector (101) and the Y-axis reflector (102), the permanent magnet is correspondingly arranged with the energized coil, the reset component is a mechanical spring or an electronic reset structure, and the reset component is connected to the X-axis reflector (101) and the Y-axis reflector (102); The working deflection stroke of the X-axis reflector (101) and the Y-axis reflector (102) is ±20°.

3. The multi-laser galvanometer module according to claim 1, characterized in that, The input beam is sequentially incident on the X-axis reflector (101) and the Y-axis reflector (102); the mechanical limit deflection angle of the X-axis reflector (101) is θ. x The mechanical limit deflection angle of the Y-axis reflector (102) is θ. θ x With θ The deflection directions are perpendicular to each other, and the X-axis reflector (101) and Y-axis reflector (102) are used to reflect the input beam to the target coordinates (x,y,z); Where, θ x θ The value range is 0°-180°.

4. The multi-laser galvanometer module according to claim 1, characterized in that, It also includes a control system; the control system includes a processor, a power amplifier, a photoelectric sensor and a galvanometer calibration model, the power amplifier is electrically connected to the processor and an independent motor respectively, and the photoelectric sensor is respectively set to correspond to the X-axis reflector (101), the Y-axis reflector (102) and the processor; The repeatability of the multibeam laser galvanometer (1) is 6-88 μRad.

5. The multi-laser galvanometer module according to claim 4, characterized in that, The control system adopts a DSP+FPGA architecture; The jumping positioning speed of the multi-beam laser galvanometer (1) is 40,000-50,000 points / second.

6. The multi-laser galvanometer module according to claim 1, characterized in that, It also includes a fully automated intelligent calibration system, which comprises a high signal-to-noise ratio signal processing module, a calibration algorithm module, a spot position detector, a high-density calibration module, a dynamic error compensation module, a multi-mirror collaborative control module, a visual guidance module, a PSD device, and a visual measurement module. The high signal-to-noise ratio signal processing module is used to acquire laser path information, the calibration algorithm module is used to correct the laser path information in real time, the spot position detector is electrically connected to the high-density calibration module, the dynamic error compensation module includes a photosensitive sensor and an ACC controller, the multi-mirror collaborative control module has a built-in stitching scanning algorithm module, the visual guidance module includes a CCD image acquisition component and a correction algorithm module, the PSD device is used to acquire laser spot position data, the visual measurement module is used to process image data from the CCD image acquisition component, and the correction algorithm module and the visual measurement module are both connected to the galvanometer correction model signal.

7. The multi-laser galvanometer module according to claim 6, characterized in that, The high-density calibration module has no fewer than 1798 calibration points; And / or, the error compensation accuracy of the dynamic error compensation module is less than 0.03mm.

8. The multi-laser galvanometer module according to claim 6, characterized in that, The multi-beam overlap accuracy of the multi-mirror collaborative control module is within ±0.05mm.

9. A multi-laser selective melting device, characterized in that, Includes the multi-laser galvanometer module as described in any one of claims 1-8.

10. A visual guidance and correction method using multiple laser galvanometers, characterized in that, Based on the multi-laser selective melting apparatus of claim 9, the method includes the following steps: The XYZ stage control system moves the vacuum adsorption stage carrying the calibration substrate to the designated calibration position, and the laser system is activated to output a laser beam to the galvanometer assembly. The galvanometer control system drives the galvanometer assembly to deflect and scan the laser beam, so that the laser beam is projected onto the surface of the calibration substrate; The position data of the laser beam on the calibration substrate is acquired by the PSD device, and the position data is transmitted to the PSD measurement module. The CCD image acquisition component of the vision guidance module acquires images of the laser spot and correction marks on the surface of the calibration substrate and transmits the acquired image data to the vision measurement module. The visual measurement module processes and analyzes the image data, while the PSD measurement module parses the position data. Both modules synchronously transmit the processed data to the galvanometer calibration model. The galvanometer calibration model generates calibration parameters for the galvanometer assembly based on the input data from the vision measurement module and the PSD measurement module, and feeds the calibration parameters back to the galvanometer control system. The galvanometer control system adjusts the deflection angle of the galvanometer assembly according to the calibration parameters to complete the visual guidance calibration of the galvanometer assembly. During the calibration process, the output state of the laser system is synchronously controlled by the galvanometer control system.

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