A substrate holder

Abstract

The present application relates to glass vacuum coating equipment field, disclose a kind of substrate holder, including frame main body, locking mechanism and fixed frame, frame main body has accommodating groove in one side in the first direction, accommodating groove is used to accommodate glass substrate, the groove bottom surface of accommodating groove has avoiding through-hole, avoiding through-hole is used to avoid the film to be coated surface of glass substrate, to avoid the film to be coated surface of substrate holder shielding glass substrate, locking mechanism is connected to frame main body, and the outer circumferential side of accommodating groove is equipped with multiple locking mechanisms, using the substrate holder of the present application loads glass substrate, first by staff glass substrate is placed in accommodating groove, then fixed frame is placed in accommodating groove, fixed frame and the edge of glass substrate contact, thereafter, make locking mechanism abutting fixed frame, multiple locking mechanisms make fixed frame lock the edge of glass substrate on the groove bottom surface of accommodating groove, based on this, substrate holder can stably fix glass substrate.

Description

Technical Field

[0001] This invention belongs to the field of glass vacuum coating equipment, and more specifically, relates to a substrate holder. Background Technology

[0002] The glass coating process for liquid crystal displays is a core step in improving the optical and electrical properties of the panel. It mainly involves forming specific functional films on the surface of the glass substrate through vacuum deposition, sputtering, and other methods. In this process, the glass substrate needs to be fixed by a substrate holder, which carries the glass substrate to the coating equipment to complete the coating process. Therefore, the ability of the substrate holder to stably fix the glass substrate is particularly important. Summary of the Invention

[0003] The main objective of this invention is to provide a substrate holder that can stably fix glass substrates.

[0004] According to a first aspect of the present invention, a substrate holder is provided, comprising a holder body, a locking mechanism, and a fixing frame. The holder body has a receiving groove on one side in a first direction for receiving a glass substrate. The receiving groove has a clearance through hole on its bottom surface for avoiding the coating surface of the glass substrate. The locking mechanism is connected to the holder body, and a plurality of the locking mechanisms are provided on the outer periphery of the receiving groove. The fixing frame is placed in the receiving groove, and the locking mechanism abuts against the fixing frame so that the fixing frame locks the edge of the glass substrate to the bottom surface of the receiving groove.

[0005] In a specific embodiment of the present invention, the fixing frame includes a first frame body and a first flexible column. The first flexible column is connected to one side of the first frame body perpendicular to its axis, and there are multiple first flexible columns. The multiple first flexible columns are arranged circumferentially around the axis of the first frame body, and the first flexible columns are used to contact the edge of the glass substrate.

[0006] The frame body has a support platform, which is disposed in the receiving groove, and the support platform has a plurality of holes arranged around the clearance through hole. The locking mechanism is used to press the first frame body against the support platform.

[0007] In a specific embodiment of the present invention, the fixed frame further includes a connecting rod and a second flexible column. Both ends of the connecting rod along its length are fixedly connected to the first frame body, and the connecting rod spans the inner hole of the first frame body. The connecting rod is fixedly connected to the second flexible column, and there are multiple second flexible columns. The multiple second flexible columns are arranged at intervals along the length of the connecting rod. The second flexible columns pass through the inner hole of the first frame body and are used to contact the glass substrate.

[0008] In a specific embodiment of the present invention, the two ends of the connecting rod along its length direction are respectively fixedly connected to the opposite ends of the first frame body. There are multiple connecting rods, which are arranged in parallel and spaced apart. Multiple second flexible columns are fixedly connected to each connecting rod.

[0009] In a specific embodiment of the present invention, the locking assembly includes a rotating shaft, a locking lug, a pressure post, and an elastic element. The rotating shaft is fixedly connected to the frame body, and the middle part of the locking lug is rotatably connected to the rotating shaft. One end of the locking lug is fixedly connected to the pressure post, and the opposite end is connected to the elastic element. The elastic element is used to apply force to the locking lug so that the pressure post presses against the fixed frame.

[0010] In a specific embodiment of the present invention, the frame body includes a second frame body and a limiting ring. The second frame body and the limiting ring are fixedly connected along the first direction. The second frame body and the limiting ring form the receiving groove. The side of the limiting ring facing the second frame body forms the bottom surface of the receiving groove. The annular hole of the limiting ring forms the clearance through hole.

[0011] The second frame body has the support platform, and the locking assembly is connected to the second frame body;

[0012] The limiting ring is made of ceramic, the first frame body is made of aluminum alloy, and the second frame body and the connecting rod are both made of titanium alloy.

[0013] In a specific embodiment of the present invention, the second frame body has a mounting groove, and there are multiple mounting grooves. The multiple mounting grooves are disposed on the outer periphery of the receiving groove, and the mounting grooves are in communication with the receiving groove.

[0014] Each of the locking components is provided in a corresponding manner to one of the mounting slots, and the locking components are located in the mounting slots.

[0015] In a specific embodiment of the present invention, the substrate holder further includes a magnetic guide rail and a roller guide rail, and the magnetic guide rail and the roller guide rail are respectively fixedly connected to opposite ends of the main body of the holder.

[0016] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0017] The substrate holder of the present invention is used to load glass substrates. The operator first places the glass substrate into the receiving groove, and then places the fixing frame into the receiving groove. The fixing frame contacts the edge of the glass substrate. Then, the locking mechanism abuts against the fixing frame. Multiple locking mechanisms lock the edge of the glass substrate to the bottom surface of the receiving groove. Based on this, the substrate holder can stably fix the glass substrate. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0019] Figure 1 This is a structural diagram of the substrate holder according to an embodiment of the present invention;

[0020] Figure 2 This is a structural diagram of the frame body and locking mechanism in an embodiment of the present invention;

[0021] Figure 3 This is an embodiment of the present invention. Figure 2 Enlarged diagram of A in the middle;

[0022] Figure 4 This is a structural diagram of the fixed frame in an embodiment of the present invention.

[0023] The figure labels for each figure are as follows:

[0024] 1. Frame main body; 1A. Support platform; 101. Receiving groove; 102. Clearance through hole; 11. Second frame main body; 1101. Mounting groove; 12. Limiting ring;

[0025] 2. Locking mechanism; 21. Rotating shaft; 22. Locking lug; 23. Pressure column; 24. Elastic element;

[0026] 3. Fixed frame; 31. First frame body; 32. First flexible column; 33. Connecting rod; 34. Second flexible column;

[0027] 4. Magnetic guide rail;

[0028] 5. Roller guide rail;

[0029] X, the first direction. Detailed Implementation

[0030] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0031] Reference Figures 1 to 4As shown, a preferred embodiment of this application of a substrate holder includes a holder body 1, a locking mechanism 2, and a fixing frame 3. The holder body 1 has a receiving groove 101 on one side in the first direction X. The receiving groove 101 is used to receive a glass substrate. The bottom surface of the receiving groove 101 has an avoidance through hole 102. The avoidance through hole 102 is used to avoid the coating surface of the glass substrate, so as to prevent the substrate holder from blocking the coating surface of the glass substrate. The locking mechanism 2 is connected to the holder body 1, and multiple locking mechanisms 2 are provided on the outer periphery of the receiving groove 101. The fixing frame 3 is used to be placed in the receiving groove 101. The locking mechanism 2 is used to abut against the fixing frame 3 so that the fixing frame 3 locks the edge of the glass substrate to the bottom surface of the receiving groove 101.

[0032] Specifically, when using the substrate holder of this application to load glass substrates, the operator first places the glass substrate into the receiving groove 101, and then places the fixing frame 3 into the receiving groove 101. The fixing frame 3 contacts the edge of the glass substrate. After that, the locking mechanism 2 abuts against the fixing frame 3. Multiple locking mechanisms 2 lock the edge of the glass substrate to the bottom surface of the receiving groove 101. Based on this, the substrate holder can stably fix the glass substrate. After the glass substrate is loaded, the substrate holder carries the glass substrate to the coating equipment to complete the coating process.

[0033] In one implementation of this application, the receiving groove 101 and the clearance through hole 102 are both rectangular, and the fixing frame 3 is also rectangular. Therefore, the glass substrate fixed by the substrate holder is also rectangular.

[0034] In this embodiment, the fixing frame 3 includes a first frame body 31 and first flexible columns 32. The first flexible columns 32 are connected to one side of the first frame body 31 perpendicular to its axis, and there are multiple first flexible columns 32 arranged circumferentially around the axis of the first frame body 31. The first flexible columns 32 are used to contact the edge of the glass substrate. The frame body 1 has a support platform 1A, which is disposed within the receiving groove 101. The support platform 1A has multiple supports arranged around the clearance through hole 102. The locking mechanism 2 is used to press the first frame body 31 against the support platform 1A. The advantage of this structure is that the locking force of the locking mechanism 2 acts on the first frame body 31, and the first frame body 31 abuts against the support platform 1A. The fixing frame 3 locks the glass substrate to the bottom of the receiving groove 101 through the first flexible column 32. This ensures the rigid connection stability between the substrate frame and the support platform 1A, and also buffers the locking force through the first flexible column 32. In addition, the contact area between the fixing frame 3 and the glass substrate is small, which can avoid damage such as chipping and scratches to the glass substrate due to rigid compression. It should be noted that the number of first flexible columns 32 is set according to the actual application, and this application does not limit it.

[0035] Furthermore, the fixing frame 3 also includes a connecting rod 33 and a second flexible column 34. Both ends of the connecting rod 33 are fixedly connected to the first frame body 31 along its length direction, and the connecting rod 33 spans the inner hole of the first frame body 31. The connecting rod 33 is fixedly connected to the second flexible column 34. There are multiple second flexible columns 34, which are arranged at intervals along the length direction of the connecting rod 33. The second flexible columns 34 pass through the inner hole of the first frame body 31 and are used to contact the glass substrate. Specifically, the second flexible columns 34 can support the glass substrate in areas other than the edges, thereby improving the fixing stability of the glass substrate.

[0036] Preferably, the two ends of the connecting rod 33 along its length direction are fixedly connected to the opposite ends of the first frame body 31. There are multiple connecting rods 33, which are arranged in parallel and spaced apart. Each connecting rod 33 is fixedly connected to multiple second flexible columns 34. For example, there are four connecting rods 33 and eight second flexible columns 34 in a single connecting rod 33. The advantage of this structure is that the non-edge area of ​​the glass substrate is supported by multiple connecting rods 33 and multiple second flexible columns 34, which effectively disperses the weight of the glass substrate and avoids bending deformation of the substrate due to the suspension in the middle.

[0037] As a specific implementation of this application, the first flexible pillar 32 and the second flexible pillar 34 are made of a polymer material with flexible characteristics; and the end of the first flexible pillar 32 and the second flexible pillar 34 that contacts the glass substrate is hemispherical. The advantage of this structure is that the contact area between the first flexible pillar 32 and the second flexible pillar 34 and the glass substrate is relatively small, which reduces the influence of the heat absorption of the first flexible pillar 32 and the second flexible pillar 34 on the temperature of the substrate glass and ensures the coating effect.

[0038] In this embodiment, the locking assembly includes a rotating shaft 21, a locking lug 22, a pressure post 23, and an elastic element 24. The rotating shaft 21 is fixedly connected to the frame body 1. The middle part of the locking lug 22 is rotatably connected to the rotating shaft 21. One end of the locking lug 22 is fixedly connected to the pressure post 23, and the opposite end is connected to the elastic element 24. The elastic element 24 is used to apply force to the locking lug 22 so that the pressure post 23 presses against the first frame body 31 of the fixing frame 3. The advantage of this structure is that after the glass substrate is loaded onto the substrate holder, the locking assembly always remains pressed against the fixing frame 3, which can ensure the stability of the glass substrate fixing. Let the opposite ends of the locking lug 22 be the first end and the second end, respectively, and the pressure post 23 and the first end... The fixed connection is achieved by connecting the elastic element 24 to the second end. In practical applications, when loading the glass substrate and the fixed frame 3, the tooling equipment applies force to the second end to compress the elastic element 24, thereby causing the locking ear 22 to rotate around the rotating shaft 21. The first end swings away from the bottom surface of the receiving groove 101 to prevent the locking ear 22 from blocking the assembly of the glass substrate and the fixed frame 3. After the two are assembled, the tooling equipment releases the second end. At this time, the elastic element 24 recovers its elasticity, the locking ear 22 resets, and the pressure column 23 presses against the first frame body 31. Similarly, after the glass substrate is coated, in subsequent processes, the tooling equipment applies force to the second end to prevent the locking ear 22 from blocking the glass substrate from being removed from the substrate holder.

[0039] It should be noted that the locking assembly also includes a mounting base, the rotating shaft 21 is fixedly connected to the mounting base, and the mounting base is fixedly connected to the second frame body 11 described below by screws; for example, in this embodiment, the elastic element 24 is a torsion spring, the torsion spring is at least partially sleeved on the rotating shaft 21, and the torsion arm of the torsion spring is connected to the second end.

[0040] In this embodiment, the frame body 1 includes a second frame body 11 and a limiting ring 12. The second frame body 11 and the limiting ring 12 are fixedly connected along the first direction X. The second frame body 11 and the limiting ring 12 form a receiving groove 101. The side of the limiting ring 12 facing the second frame body 11 forms the bottom surface of the receiving groove 101. The annular hole of the limiting ring 12 forms a clearance through hole 102. The limiting ring 12 is formed by connecting multiple structural segments to form a rectangular annular structure. The second frame body 11 has a support platform 1A and a lock. The fastening assembly is connected to the second frame body 11; the limiting ring 12 is made of ceramic material, specifically oxide ceramic, which has the advantage of preventing sparking between the glass substrate and the substrate holder during the process, thus preventing damage to the glass substrate or the substrate holder; the first frame body 31 is made of aluminum alloy, which has high strength and is not easily deformed; while the second frame body 11 and the connecting rod 33 are both made of titanium alloy, which is lightweight, achieving a lightweight design for the substrate holder and facilitating transportation.

[0041] Furthermore, the second frame body 11 has a mounting groove 1101, and there are multiple mounting grooves 1101. The multiple mounting grooves 1101 are located on the outer periphery of the receiving groove 101 and are connected to the receiving groove 101. Multiple locking components are provided in a one-to-one correspondence with the multiple mounting grooves 1101, and the locking components are located in the mounting grooves 1101. That is, each mounting groove 1101 is provided with a locking component. The advantage of this structure is that the substrate holder has a compact structure.

[0042] In this embodiment, the substrate holder also includes a magnetic guide rail 4 and a roller guide rail 5. The magnetic guide rail 4 and the roller guide rail 5 are fixedly connected to opposite ends of the main body 1. In practical applications, the bottom of the coating equipment is provided with multiple guide wheels, which are arranged in a straight line to form a guide track. The top of the coating equipment is provided with a magnetic rail, and the magnetic rail and the guide track extend in the same direction. When the substrate holder is transported in the coating equipment, the magnetic guide rail 4 and the magnetic rail are magnetically engaged, and the roller guide rail 5 is in contact with the guide track, resulting in low transmission resistance.

[0043] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A substrate holder, characterized in that, The device includes a frame body (1), a locking mechanism (2), and a fixing frame (3). The frame body (1) has a receiving groove (101) on one side in a first direction (X). The receiving groove (101) is used to receive a glass substrate. The bottom surface of the receiving groove (101) has a clearance through hole (102) for clearance of the surface of the glass substrate to be coated. The locking mechanism (2) is connected to the frame body (1), and multiple locking mechanisms (2) are provided on the outer periphery of the receiving groove (101). The fixing frame (3) is placed in the receiving groove (101), and the locking mechanism (2) is used to abut against the fixing frame (3) so that the fixing frame (3) locks the edge of the glass substrate on the bottom surface of the receiving groove (101).

2. The substrate holder according to claim 1, characterized in that, The fixed frame (3) includes a first frame body (31) and a first flexible column (32). The first frame body (31) is connected to the first flexible column (32) on one side perpendicular to its axis. There are multiple first flexible columns (32). The multiple first flexible columns (32) are arranged circumferentially around the axis of the first frame body (31). The first flexible column (32) is used to contact the edge of the glass substrate. The frame body (1) has a support platform (1A), which is located in the receiving groove (101) and has a plurality of holes arranged around the clearance through hole (102). The locking mechanism (2) is used to press the first frame body (31) against the support platform (1A).

3. The substrate holder according to claim 2, characterized in that, The fixed frame (3) further includes a connecting rod (33) and a second flexible column (34). Both ends of the connecting rod (33) along its length direction are fixedly connected to the first frame body (31), and the connecting rod (33) spans the inner hole of the first frame body (31). The connecting rod (33) is fixedly connected to the second flexible column (34). There are multiple second flexible columns (34). Multiple second flexible columns (34) are arranged at intervals along the length direction of the connecting rod (33). The second flexible columns (34) pass through the inner hole of the first frame body (31) and are used to contact the glass substrate.

4. The substrate holder according to claim 3, characterized in that, The two ends of the connecting rod (33) along its length direction are respectively fixedly connected to the opposite ends of the first frame body (31). There are multiple connecting rods (33), which are arranged in parallel and spaced apart. Multiple second flexible columns (34) are fixedly connected to each connecting rod (33).

5. The substrate holder according to claim 1, characterized in that, The locking assembly includes a rotating shaft (21), a locking lug (22), a pressure post (23), and an elastic element (24). The rotating shaft (21) is fixedly connected to the frame body (1). The middle part of the locking lug (22) is rotatably connected to the rotating shaft (21). One end of the locking lug (22) is fixedly connected to the pressure post (23), and the other end is connected to the elastic element (24). The elastic element (24) is used to apply force to the locking lug (22) so that the pressure post (23) presses against the fixed frame (3).

6. The substrate holder according to claim 2, characterized in that, The frame body (1) includes a second frame body (11) and a limiting ring (12). The second frame body (11) and the limiting ring (12) are fixedly connected along the first direction (X). The second frame body (11) and the limiting ring (12) form the receiving groove (101). The side of the limiting ring (12) facing the second frame body (11) forms the bottom surface of the receiving groove (101). The annular hole of the limiting ring (12) forms the clearance through hole (102). The second frame body (11) has the support platform (1A), and the locking assembly is connected to the second frame body (11); The limiting ring (12) is made of ceramic, the first frame body (31) is made of aluminum alloy, and the second frame body (11) and the connecting rod (33) are both made of titanium alloy.

7. The substrate holder according to claim 6, characterized in that, The second frame body (11) has a mounting groove (1101), and there are multiple mounting grooves (1101). The multiple mounting grooves (1101) are located on the outer periphery of the receiving groove (101), and the mounting grooves (1101) are connected to the receiving groove (101). The locking components are provided in a one-to-one correspondence with the mounting slots (1101), and the locking components are located in the mounting slots (1101).

8. The substrate holder according to claim 1, characterized in that, The substrate holder also includes a magnetic guide rail (4) and a roller guide rail (5), and the magnetic guide rail (4) and the roller guide rail (5) are fixedly connected to the opposite ends of the main body (1).

Images