Diamond dicing apparatus and method based on local gas-solid chemical reaction

Abstract

The application discloses a diamond cutting device based on local gas-solid chemical reaction and a method thereof, which comprises a reaction cavity, a clamp is slidably arranged on one side of the reaction cavity, a support is arranged on the other side of the reaction cavity, an electric heating wire is arranged on the support, one end of a driving device is connected with the reaction cavity, and the other end of the driving device is connected with the clamp, and the driving device is used for driving the clamp to move to the side of the electric heating wire, so that the diamond material clamped on the clamp is cut. By utilizing the oxidation reaction characteristics of diamond at high temperature and oxygen, the carbon elements of the diamond material in the contact part with the electric heating wire are oxidized to generate gaseous products in a directional manner by heating through the thin-diameter electric heating wire, so that accurate grooves are formed, and the cutting of the diamond is realized. The thin-diameter characteristics of the electric heating wire ensure the accuracy of the cutting path, the influence of the overall high temperature on the performance of the diamond material can be avoided, the uniform distribution of the reaction gas ensures the stability of the cutting process, the gaseous products have no residues, and the subsequent processing process is greatly simplified.

Description

Technical Field

[0001] This invention relates to the field of diamond processing technology, and in particular to a diamond cutting device and method based on localized gas-solidification chemical reaction. Background Technology

[0002] Diamond, as the hardest material in nature, possesses excellent mechanical, thermal, and electrical properties, and is widely used in cutting tools, abrasives, heat sinks for electronic devices, semiconductor substrates, and other fields. However, the high hardness and brittleness of diamond make its cutting and processing a key challenge restricting its industrial application.

[0003] Traditional diamond cutting methods mainly include mechanical cutting, laser cutting, and plasma cutting. Mechanical cutting uses diamond grinding wheels or wire saws for grinding, which has problems such as low cutting efficiency, large kerf damage, and high material costs. Although laser cutting is more efficient, it requires large equipment investment, and the cutting process is prone to generating a heat-affected zone, which can cause internal cracks in the diamond, affecting product performance, and the cut is V-shaped. Plasma cutting has the defects of low cutting precision and poor surface roughness.

[0004] To address the aforementioned issues, existing technologies have proposed diamond cutting methods based on localized liquid-phase chemical reactions. These methods achieve cutting by oxidizing and corroding diamond with a reaction solution under localized heating conditions. While these methods offer some improvement in precision and damage control, they still suffer from problems such as complex post-processing due to liquid residue, slitting stability affected by solution bubbles, and the need for circulating and maintaining the reaction solution. These limitations restrict their application in mass clean production.

[0005] Furthermore, existing vapor phase processing technologies mostly employ overall high-temperature oxidation or plasma etching, which suffer from drawbacks such as low cutting accuracy, easy oxidation damage to non-target areas, and difficulty in process control. Therefore, developing a precise, low-damage, clean, and efficient diamond cutting technology has significant practical application value. Summary of the Invention

[0006] The purpose of this invention is to provide a diamond cutting device and method based on localized gas-solidification chemical reaction, which induces a directional oxidation reaction between diamond and reactive gas through localized heating, thus taking into account cutting accuracy, processing efficiency and cleanliness, and overcoming the shortcomings of the existing technology.

[0007] To achieve the above objectives, this application provides a diamond slitting device based on localized gas-solidification chemical reaction, including a reaction chamber, a clamp slidably mounted on one side of the reaction chamber, a support mounted on the other side of the reaction chamber, a heating wire mounted on the support, a driving device connected at one end to the reaction chamber and at the other end to the clamp, the driving device being used to drive the clamp to move towards the heating wire side, so as to slitting the diamond material held on the clamp;

[0008] It also includes a vacuum pumping device and a gas control device. The vacuum pumping device is connected to the reaction chamber and is used to evacuate the reaction chamber. The gas control device is connected to the reaction chamber and is used to inject reaction gas into the reaction chamber. It also includes a control system, which is electrically connected to the drive device, heating wire, vacuum device and gas control device respectively. The control system is also electrically connected to the pressure sensor and gas concentration sensor installed in the reaction chamber.

[0009] It also includes a frame, with a partition in the middle of the frame. The reaction chamber includes a base and a cover. The base is mounted on the partition, and the clamps and supports are also mounted on the base. A lifting device is installed on the top of the frame. The power output end of the lifting device extends downward into the frame, and the cover is installed on the power output end of the lifting device. When the power output end of the lifting device moves downward, it closes and seals the cover onto the base. The lifting device is electrically connected to the control system.

[0010] The clamp includes a lower clamping plate, an upper clamping plate, guide rods, and a clamping screw. At least two guide rods are installed on the upper side of one end of the lower clamping plate. One end of the upper clamping plate is slidably connected to the two guide rods. The clamping screw is located between the guide rods. The lower end of the clamping screw is rotatably connected to the lower clamping plate. The upper end of the clamping screw passes through the upper clamping plate and is threadedly connected to the upper clamping plate. An operating handle is installed on the upper end of the clamping screw. A lower clamping block and an upper clamping block are respectively installed on the other end of the lower and upper clamping plates, on opposite sides. The lower and upper clamping blocks are used to clamp diamond materials. A linear slider is installed at the bottom of the lower clamping plate. The linear slider is slidably connected to a linear guide rail, which is installed inside the reaction chamber.

[0011] The driving device includes a sealing block, a sliding rod, a pushing screw, and a drive motor. The sealing block is fixedly installed on the outer wall of the reaction chamber. A sliding cavity is provided inside the sealing block. The sliding rod is slidably and sealingly installed in the sliding cavity. A driving cavity is provided inside the sliding rod. One end of the pushing screw extends into the driving cavity, and the other end of the pushing screw is connected to the output shaft of the drive motor for transmission. The drive motor is fixedly installed at the end of the sealing block. The pushing screw and the sliding rod are threadedly connected. The sealing block has an axial sliding hole at the position corresponding to the sealing cavity. The reaction chamber has a clearance hole at the position corresponding to the sliding hole. One end of the connecting rod is connected to the sliding rod, and the other end is connected to the clamp after passing through the sliding hole and the clearance hole. The drive motor is electrically connected to the control system.

[0012] The support includes a first crossbar, a second crossbar, and a base plate. One end of each of the first and second crossbars is fixed to one side of the base plate, which is connected to the reaction chamber. The other ends of the first and second crossbars are respectively provided with through holes. A sliding sleeve is installed in the through hole of the first crossbar, and a conductive post is installed in the sliding sleeve. A spring is fitted on the conductive post, and one end of the heating wire is inserted into the sliding sleeve and fixedly connected to the conductive post. Another conductive post is installed in the through hole of the second crossbar, and the other end of the heating wire is fixedly connected to the conductive post on the second crossbar. The two conductive posts are electrically connected to the control system.

[0013] A rotating shaft is provided on the other side of the base plate. A support base is fixedly installed inside the reaction chamber. A rotating hole is provided on the support base. The rotating shaft is inserted into the rotating hole. A pressure plate is installed at the end of the rotating shaft by screws. The length of the rotating shaft is less than the depth of the rotating hole.

[0014] The bracket is also equipped with a purging device; the purging device includes a housing with a perforation in the middle, through which a heating wire passes, and a heating chamber inside the housing. One end of the housing has an air outlet, which is arranged along the axial direction of the heating wire. Multiple layers of heat-absorbing rings are arranged inside the perforation, and multiple layers of heat-dissipating fins are arranged inside the heating chamber. An air inlet is provided on the housing and is connected to the heating chamber. The air inlet is connected to a first solenoid valve through a duct. The first solenoid valve is used to connect to a compressed gas source. The first solenoid valve is electrically connected to the control system.

[0015] The vacuum pumping device includes a vacuum pump, the pump's suction port is connected to the reaction chamber through a suction pipe, a second solenoid valve is installed on the suction pipe, a pressure balancing pipe is also installed on the suction pipe between the second solenoid valve and the reaction chamber, and a third solenoid valve is installed on the pressure balancing pipe; the vacuum pump, the second solenoid valve and the third solenoid valve are electrically connected to the control system.

[0016] The gas control device includes a gas supply pipe that is connected to the reaction chamber. A three-way connector is connected to the gas supply pipe, and a fourth solenoid valve and a fifth solenoid valve are respectively installed on the other two ports of the three-way connector. In use, the fourth solenoid valve and the fifth solenoid valve are respectively connected to an inert gas source and a pure oxygen source through pipelines. The fourth solenoid valve and the fifth solenoid valve are electrically connected to the control system.

[0017] The diamond slitting method using the aforementioned diamond slitting device based on localized gas-solidification chemical reaction is used to slit diamond materials. The slitting method includes the following steps: S1. Clamp the diamond material to be cut onto the fixture; S2. Close the reaction chamber and seal it. Use a vacuum pump to evacuate the reaction chamber. The pressure sensor detects the pressure value inside the reaction chamber. When the pressure reaches the preset value, turn off the vacuum pump. S3. Inject reaction gas into the reaction chamber through a gas control device. The reaction gas includes oxygen with a purity of not less than 99.9%; or a mixture of 50% oxygen and 50% inert gas; and control the pressure in the reaction chamber to be between 0.1 MPa and 0.2 MPa. S4. Control the heating wire to be energized, so that the heating wire is heated to 700℃~800℃; S5. The clamp is moved towards the heating wire by the drive device, so that the diamond material comes into contact with the heating wire at a uniform speed. The carbon elements at the contact area between the diamond material and the heating wire are directionally oxidized to generate gaseous products. This creates precise grooves, thereby enabling the cutting of diamond materials; S6. After the cutting is completed, turn off the power to the heating wire and use the vacuum device to remove the gas in the reaction chamber to balance the gas pressure in the reaction chamber; then open the reaction chamber.

[0018] Compared with the prior art, the above-conceptual technical solution conceived in this application has the following beneficial effects: 1. The reaction chamber of this invention provides a sealed cutting environment, the clamp is used to hold the diamond material, the drive device is used to drive the clamp to move towards the heating wire, the bracket is used to install and tension the heating wire, the vacuum device is used to evacuate the reaction chamber and balance the pressure inside the reaction chamber, the gas control device is used to inject reaction gas into the reaction chamber, and the control system is used to coordinate the operation of the drive device, the heating wire, the vacuum device, and the gas control device. Utilizing the oxidation reaction characteristics of diamond (elemental carbon) with oxygen at high temperatures, the carbon elements at the contact point between the diamond material and the heating wire are directionally oxidized to generate gaseous products by heating with a thin-diameter heating wire. This process creates precise grooves, enabling the cutting of diamond. The fine diameter of the heating wire ensures the accuracy of the cutting path, and the heating wire cutting method avoids the impact of overall high temperature on the properties of the diamond material. The uniform distribution of the reaction gas ensures the stability of the cutting process, and the absence of gaseous products greatly simplifies subsequent processing procedures.

[0019] 2. The sealing block of this invention is sealed to the base. The clearance hole of the base is connected to the sliding cavity through a sliding hole. However, a sliding plug rod is slidably and sealingly installed inside the sliding cavity, and the sliding cavity is closed by the sliding plug rod. A drive motor is installed on the open end of the sliding cavity of the sealing block. The output shaft of the drive motor is connected to a push screw through a coupling. The push screw is threadedly connected to the sliding plug rod. Since a connecting rod is fixedly installed on the sliding plug rod, and the connecting rod is guided through a sliding hole, the sliding plug rod will not rotate. Therefore, when the push screw rotates clockwise or counterclockwise, it drives the sliding plug rod to move axially, thereby driving the clamp to reciprocate through the connecting rod. The drive device can both drive the clamp and seal the reaction chamber, and the drive motor is located in a normal atmospheric pressure environment.

[0020] 3. A rotating shaft is provided on the other side of the base plate of the present invention. A support base is fixedly installed inside the reaction chamber. A rotating hole is provided on the support base. The rotating shaft is inserted into the rotating hole. A pressure plate is installed at the end of the rotating shaft by screws. The length of the rotating shaft is less than the depth of the rotating hole. This facilitates the rotation and adjustment of the bracket, thereby adjusting the angle of the heating wire.

[0021] 4. The bracket of this invention is also equipped with a blowing device to remove a small amount of oxidized dust from the cutting groove during the slitting process. The shell, heat-absorbing ring, and heat dissipation fins can all be made of copper, which provides better thermal conductivity. During use, the heating wire temperature is between 700°C and 800°C. The heating wire heats the shell and heat-absorbing ring, and the heat is absorbed by the shell and heat-absorbing ring, then transferred to the heating chamber through the shell and heat dissipation fins. When compressed gas is introduced into the air inlet, the compressed gas is rapidly heated. The heated compressed gas is then ejected in a ring from the air inlet, blowing away the small amount of oxidized dust from the cutting groove during the slitting process and improving slitting accuracy. By setting up the heat-absorbing ring, the heat absorption area is increased; by setting up the heat dissipation fins, the heat dissipation area is increased, thereby improving the heating effect of the compressed gas. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0023] Figure 1 This is a schematic diagram of the overall structure of the device of the present invention.

[0024] Figure 2 This is a schematic diagram of the fixture and drive device of the present invention.

[0025] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure of AA.

[0026] Figure 4 This is a schematic diagram of the fixture of the present invention.

[0027] Figure 5 This is a front view schematic diagram of the bracket structure of the present invention.

[0028] Figure 6 for Figure 5 Schematic diagram of the cross-sectional structure of BB.

[0029] Figure 7 for Figure 6 Enlarged structural diagram at point C.

[0030] Figure 8 This is a cross-sectional structural schematic diagram of the purging device of the present invention.

[0031] Figure 9 for Figure 8 Schematic diagram of the cross-sectional structure of DD.

[0032] Figure 10 This is a physical image of a device being cut using this invention.

[0033] Figure label: Diamond material 1; Reaction chamber 10, base 11, clearance hole 111, sealing gasket 112, cover 12, sliding wheel 13, lifting device 14; Clamp 20, lower clamping plate 21, lower clamping block 211, upper clamping plate 22, upper clamping block 221, guide rod 23, lifting spring 231, clamping screw 24, operating handle 241, bearing 25, U-shaped seat 26, linear slider 27, linear guide rail 28. Drive unit 30, sealing block 31, sliding cavity 311, sliding hole 312, sliding plug rod 32, drive cavity 321, sealing ring 322, lead screw nut 323, pushing screw 33, drive motor 34, connecting rod 35. 40 bracket, 401 through hole, 402 conductive post, 404 sliding sleeve, 403 set screw, 405 spring, 41 first crossbar, 42 second crossbar, 43 base plate, 44 rotating shaft, 45 pressure plate, 46 screw, 47 support base; 48 purging device; 481 housing, 482 through hole, 483 heating chamber, 485 air outlet, 486 heat absorption ring, 487 heat dissipation fins, 488 air inlet, 49 first solenoid valve; Heating wire 50; Vacuum device 60, vacuum pump 61, extraction pipe 62, second solenoid valve 63, air pressure balance pipe 64, third solenoid valve 65. Gas control device 70, gas pipeline 71, fourth solenoid valve 72, fifth solenoid valve 73, three-way connector 74, inert gas source 75, pure oxygen source 76; Rack 80, partition 81; Control system 90, pressure sensor 91, gas concentration sensor 92. Detailed Implementation

[0034] To more clearly illustrate the purpose, technical solution, and beneficial effects of this application, a further detailed description of this application is provided below in conjunction with illustrations and specific embodiments. It should be specifically noted that the specific embodiments described below are only for illustrating the technical content of this application and do not constitute a limitation on the scope of protection of this application.

[0035] Regarding the explanation of terminology: In this application, "and / or" is used to describe the relationship between related objects, covering three possible situations: taking "A and / or B" as an example, it can indicate the situation where only A exists, A and B exist simultaneously, or only B exists; the symbol " / " indicates the "or" relationship between related objects, such as "A / B" which refers to A or B.

[0036] Regarding the description of the embodiments: The terms "exemplary" and "for example" appearing in this application are only used to illustrate the technical solutions through specific examples. It should be particularly emphasized that any implementation method or design scheme marked as "exemplary" or "for example" should not be construed as having an advantage over other solutions. Such expressions are only used to present the technical concepts more intuitively.

[0037] Example 1: See Figure 1 The present invention provides a diamond cutting device based on localized gas-solidification chemical reaction, including a reaction chamber 10, a clamp 20 slidably mounted on one side of the reaction chamber 10, a support 40 mounted on the other side of the reaction chamber 10, a heating wire 50 mounted on the support 40, a driving device 30 connected at one end to the reaction chamber 10 and at the other end to the clamp 20, the driving device 30 being used to drive the clamp 20 to move towards the heating wire 50 to cut the diamond material 1 held on the clamp 20; It also includes a vacuum pumping device 60 and a gas control device 70. The vacuum pumping device 60 is connected to the reaction chamber 10 and is used to evacuate the reaction chamber 10. The gas control device 70 is connected to the reaction chamber 10 and is used to inject reaction gas into the reaction chamber 10. It also includes a control system 90, which is electrically connected to the drive device 30, the heating wire 50, the vacuum device 60 and the gas control device 70 respectively. The control system 90 is also electrically connected to the pressure sensor 91 and the gas concentration sensor 92 installed in the reaction chamber 10.

[0038] The reaction chamber 10 is used to provide a sealed cutting environment, the clamp 20 is used to hold the diamond material 1, the drive device 30 is used to drive the clamp 20 to move towards the heating wire 50, the bracket 40 is used to install and tension the heating wire 50, the vacuum device 60 is used to evacuate the reaction chamber 10 and balance the pressure inside the reaction chamber 10, the gas control device 70 is used to inject reaction gas into the reaction chamber 10, and the control system 90 is used to control the coordinated operation of the drive device 30, the heating wire 50, the vacuum device 60, and the gas control device 70.

[0039] Utilizing the oxidation reaction of diamond (a carbon element) with oxygen at high temperatures. By heating the diamond material 1 with a thin-diameter heating wire 50, the carbon elements at the contact point between the diamond material 1 and the heating wire 50 are directionally oxidized to generate gaseous products. This creates precise grooves, enabling the cutting of diamonds, such as... Figure 10 As shown. The fine diameter of the heating wire 50 ensures the accuracy of the cutting path. The cutting method of the heating wire 50 avoids the impact of overall high temperature on the performance of diamond material 1. The uniform distribution of the reaction gas ensures the stability of the cutting process. There is no residue of gaseous products, which greatly simplifies the subsequent processing procedures.

[0040] See Figure 1 The diamond cutting apparatus also includes a frame 80, with a partition 81 in the middle of the frame 80. The reaction chamber 10 includes a base 11 and a cover 12. The base 11 is mounted on the partition 81, and the clamp 20 and the support 40 are both mounted on the base 11. A lifting device 14 is mounted on the top of the frame 80, and the power output end of the lifting device 14 extends downward into the frame 80. The cover 12 is mounted on the power output end of the lifting device 14. When the power output end of the lifting device 14 moves downward, it covers and seals the cover 12 onto the base 11. The lifting device 14 is electrically connected to the control system 90.

[0041] Specifically, see Figure 1 The frame 80 has a frame structure, and the base 11 is mounted on the partition 81. The lifting device 14 can be a hydraulic cylinder or an SWL lift. A sealing gasket 112 is provided around the edge of the base 11. The cover 12 is a dome-shaped structure with an opening at the bottom. When the cover 12 moves downward and fits against the base 11, it forms a sealed reaction chamber 10. When the cover 12 moves upward, it opens the reaction chamber 10. To improve the stability of the cover 12, sliding wheels 13 are installed at the four corners of the cover 12. The sliding wheels 13 roll in cooperation with the longitudinal frame of the frame 80.

[0042] See Figure 4 The clamp 20 includes a lower clamping plate 21, an upper clamping plate 22, guide rods 23, and a clamping screw 24. At least two guide rods 23 are mounted on the upper side of one end of the lower clamping plate 21. One end of the upper clamping plate 22 is slidably connected to the two guide rods 23. The clamping screw 24 is located between the guide rods 23. The lower end of the clamping screw 24 is rotatably connected to the lower clamping plate 21, and the upper end of the clamping screw 24 passes through the upper clamping plate 22. The clamping screw 24 is threadedly connected to the upper clamping plate 22. An operating handle 241 is mounted on the upper end of the clamping screw 24. A lower clamping block 211 and an upper clamping block 221 are respectively mounted on opposite sides of the other ends of the lower and upper clamping plates 21 and 221. The lower clamping block 211 and upper clamping block 221 are used to clamp the diamond material 1. (See also...) Figure 2 A linear slider 27 is installed at the bottom of the lower clamping plate 21. The linear slider 27 is slidably connected to the linear guide rail 28, which is installed inside the reaction chamber 10. During installation, the power output end of the drive device 30 is connected to the lower clamping plate 21 to drive the clamp 20 to slide back and forth on the linear guide rail 28.

[0043] In this embodiment, see Figure 4 A lifting spring 231 is fitted onto the guide rod 23. The two ends of the lifting spring 231 abut against the lower clamping block 211 and the upper clamping plate 22 respectively, to improve the stability of the upper clamping plate 22's lifting and lowering. A bearing 25 is installed at the bottom of the lower clamping plate 21, and the lower end of the clamping screw 24 is fixedly connected to the inner ring of the bearing 25. In use, rotating the clamping screw 24 by operating the handle 241 drives the upper clamping plate 22 to lift and lower, thereby releasing or clamping the diamond material 1.

[0044] In this embodiment, see Figure 2 A U-shaped seat 26 is installed at the bottom of the lower clamping plate 21, and two linear sliders 27 are installed at the bottom of the two side plates of the U-shaped seat 26 respectively.

[0045] See Figure 2 The driving device 30 includes a sealing block 31, a sliding rod 32, a pushing screw 33, and a driving motor 34. The sealing block 31 is fixedly installed on the outer wall of the reaction chamber 10. A sliding cavity 311 is provided inside the sealing block 31. The sliding rod 32 is slidably and sealingly installed in the sliding cavity 311. A driving cavity 321 is provided inside the sliding rod 32. One end of the pushing screw 33 extends into the driving cavity 321, and the other end of the pushing screw 33 is connected to the output shaft of the driving motor 34 for transmission. The driving motor 34 is fixedly installed at the end of the sealing block 31. The pushing screw 33 and the sliding rod 32 are threadedly engaged. See also Figure 3 The sealing block 31 has an axial sliding hole 312 at the position corresponding to the sealing cavity 311, and the reaction cavity 10 has a clearance hole 111 at the position corresponding to the sliding hole 312. One end of the connecting rod 35 is connected to the sliding plug rod 32, and the other end is connected to the clamp 20 after passing through the sliding hole 312 and the clearance hole 111. The drive motor 34 is electrically connected to the control system 90. With the above structure, the clamp 20 can be driven while ensuring that the reaction cavity 10 can be sealed.

[0046] Specifically, see Figure 2 The sealing block 31 is sealed to the base 11, for example, by full welding. The clearance hole 111 of the base 11 is connected to the sliding cavity 311 through the sliding hole 312, but a sliding plug rod 32 is slidably and sealingly installed in the sliding cavity 311, which in turn closes the sliding cavity 311. A drive motor 34 is installed on the open end of the sealing block 31 in the sliding cavity 311. The output shaft of the drive motor 34 is connected to a push screw 33 through a coupling. The push screw 33 is threadedly connected to the sliding plug rod 32. Since a connecting rod 35 is fixedly installed on the sliding plug rod 32 and guided by the sliding hole 312, the sliding plug rod 32 will not rotate. Therefore, when the push screw 33 rotates clockwise or counterclockwise, it drives the sliding plug rod 32 to move axially, thereby driving the clamp 20 to move back and forth through the connecting rod 35.

[0047] In this embodiment, the drive motor 34 is a servo motor, and the push screw 33 and the sliding rod 32 are fitted with a precision thread structure, such as the fit between a ball screw and a screw nut. Specifically, a ball screw nut 323 is fixedly installed on the open end of the sliding rod 32 located in the drive cavity 321, and the push screw 33 is a ball screw. To improve sealing, multiple sealing rings 322 are installed on the outer wall of the sliding rod 32 on the open end side of the drive cavity 321.

[0048] With the above structure, the drive device 30 can both drive the clamp 20 and seal the reaction chamber 10, and the drive motor 34 is located in a normal atmospheric pressure environment.

[0049] See Figure 4 , 5 6. The support 40 includes a first crossbar 41, a second crossbar 42, and a base plate 43. One end of the first crossbar 41 and the second crossbar 42 are fixed to one side of the base plate 43, and the base plate 43 is connected to the reaction chamber 10. The other ends of the first crossbar 41 and the second crossbar 42 are respectively provided with through holes 401. A sliding sleeve 404 is installed in the through hole 401 of the first crossbar 41. A conductive post 402 is installed in the sliding sleeve 404. A spring 405 is fitted on the conductive post 402. One end of the heating wire 50 passes through the sliding sleeve 404 and is fixedly connected to the conductive post 402. Another conductive post 402 is installed in the through hole 401 of the second crossbar 42. The other end of the heating wire 50 is fixedly connected to the conductive post 402 on the second crossbar 42. The two conductive posts 402 are electrically connected to the control system 90.

[0050] The first crossbar 41 and the second crossbar 42 are used to mount the heating wire 50. The first crossbar 41, the second crossbar 42, and the base plate 43 can be made of insulating materials, such as bakelite. The sliding sleeve 404 is made of ceramic, which serves as heat insulation and insulation. In this embodiment, a conductive post 402 is installed inside the sliding sleeve 404 on the first crossbar 41. A spring 405 is fitted on the conductive post 402. One end of the spring 405 abuts against the flange at the end of the conductive post 402, and the other end abuts against the sliding sleeve 404, thereby tensioning the heating wire 50 and straightening it.

[0051] Specifically, the conductive post 402 is made of copper, and a set screw 403 is screwed onto the conductive post 402. The end of the heating wire 50 passes through the central hole of the conductive post 402. By tightening the set screw 403, the heating wire 50 is fixed to the conductive post 402.

[0052] See Figure 5The conductive posts 402 on the first crossbar 41 and the second crossbar 42 are connected to the preset power terminals on the support base 47 via flexible high-temperature resistant wires, and then connected to the control system 90 via wires. After the heating wire 50 is energized, the temperature of the heating wire 50 rises.

[0053] Further, see Figure 6 A rotating shaft 44 is provided on the other side of the base plate 43. A support base 47 is fixedly installed inside the reaction chamber 10. A rotating hole is provided on the support base 47. The rotating shaft 44 is inserted into the rotating hole. A pressure plate 45 is installed at the end of the rotating shaft 44 by a screw 46. The length of the rotating shaft 44 is less than the depth of the rotating hole. With the above structure, it is easy to rotate and adjust the bracket 40, thereby adjusting the angle of the heating wire 50.

[0054] In this embodiment, the support base 47 is made of insulating material. The wires connecting the power terminals are passed through and sealed inside the support base 47. These wires eventually emerge from the bottom of the support base 47 and through the holes on the base 11. The holes on the base 11 and the wires are sealed with sealant.

[0055] Further, see Figure 6 , 7 The bracket 40 is also equipped with a blowing device 48, which blows away a small amount of oxidized dust in the cutting groove during the slitting process.

[0056] Specifically, see Figure 8 , 9 The purging device 48 includes a housing 481, with a perforation 482 in the middle of the housing 481 through which the heating wire 50 passes. A heating chamber 483 is provided inside the housing 481, and an air outlet 485 is provided at one end of the housing 481. The air outlet 485 is arranged along the axial direction of the heating wire 50. Multiple layers of heat-absorbing rings 486 are provided inside the perforation 482. Multiple layers of heat dissipation fins 487 are provided inside the heating chamber 483. An air inlet 488 is provided on the housing 481 and is connected to the heating chamber 483. The air inlet 488 is connected to a first solenoid valve 49 through an air duct. The first solenoid valve 49 is used to connect to a compressed gas source. The first solenoid valve 49 is electrically connected to the control system 90.

[0057] The housing 481, heat-absorbing ring 486, and heat dissipation fins 487 can all be made of copper, providing better thermal conductivity. During operation, the heating wire 50 is heated between 700°C and 800°C, heating the housing 481 and heat-absorbing ring 486. The heat is absorbed by the housing 481 and heat-absorbing ring 486, and then transferred to the heating chamber 483 via the housing 481 and heat dissipation fins 487. When compressed gas is introduced into the air inlet 488, it is rapidly heated. The heated compressed gas is then ejected in a ring from the air outlet 485, blowing away the small amount of oxidized dust in the cutting groove during the slitting process, thus improving slitting accuracy. The heat-absorbing ring 486 increases the heat absorption area, and the heat dissipation fins 487 increase the heat dissipation area, thereby improving the heating effect of the compressed gas. During operation, the first solenoid valve 49 can be opened intermittently or continuously to inject compressed gas into the purging device 48.

[0058] See Figure 1 The vacuum pumping device 60 includes a vacuum pump 61. The suction port of the vacuum pump 61 is connected to the reaction chamber 10 through a suction pipe 62. A second solenoid valve 63 is installed on the suction pipe 62. A pressure balancing pipe 64 is also installed on the suction pipe 62 between the second solenoid valve 63 and the reaction chamber 10. A third solenoid valve 65 is installed on the pressure balancing pipe 64. The vacuum pump 61, the second solenoid valve 63, and the third solenoid valve 65 are electrically connected to the control system 90.

[0059] During vacuuming, vacuum pump 61 is turned on, second solenoid valve 63 is turned on, and third solenoid valve 65 is turned off. During cutting, vacuum pump 61 is turned off, second solenoid valve 63 is turned off, and third solenoid valve 65 is turned off. After cutting is completed, third solenoid valve 65 is turned on, and pressure balance pipe 64 is connected to the outside to balance the pressure in reaction chamber 10.

[0060] See Figure 1 The gas control device 70 includes a gas supply pipe 71, which is connected to the reaction chamber 10. A three-way connector 74 is connected to the gas supply pipe 71, and a fourth solenoid valve 72 and a fifth solenoid valve 73 are respectively installed on the other two ports of the three-way connector 74. In operation, the fourth solenoid valve 72 and the fifth solenoid valve 73 are respectively connected to an inert gas source 75 and a pure oxygen source 76 through pipelines; the fourth solenoid valve 72 and the fifth solenoid valve 73 are electrically connected to the control system 90.

[0061] In this embodiment, the inert gas source 75 is a nitrogen cylinder, and the pure oxygen source 76 is an oxygen cylinder.

[0062] In use, the fifth solenoid valve 73 is open, allowing oxygen to be injected into the reaction chamber 10 alone. When the fourth solenoid valve 72 and the fifth solenoid valve 73 are open simultaneously, a mixture of oxygen and inert gas can be injected into the reaction chamber 10.

[0063] During the gas injection process, the pressure sensor 91 and the gas concentration sensor 92 detect the gas pressure or concentration respectively to ensure that the reaction gas reaches a suitable range.

[0064] Example 2: This embodiment provides a diamond slitting method using the diamond slitting device based on localized vapor-solidification chemical reaction described in Embodiment 1, for slitting diamond materials. The slitting method includes the following steps: S1. The diamond material 1 to be cut is clamped on the fixture 20.

[0065] Before the device is installed, a pretreatment step for the diamond material 1 is included. Specifically, the diamond material 1 is ultrasonically cleaned with anhydrous ethanol for 10 minutes to remove surface oil and impurities. After air drying, a 5 μm thick coating is applied to the non-splitting areas. An antioxidant coating is fixed in a polytetrafluoroethylene clamp 20.

[0066] S2. Close the reaction chamber 10 and seal it. Use the vacuum pumping device 60 to evacuate the reaction chamber 10. The pressure sensor 91 detects the pressure value inside the reaction chamber 10. When the pressure reaches the preset value, close the vacuum pumping device 60.

[0067] S3. Inject reaction gas into reaction chamber 10 through gas control device 70. The reaction gas is oxygen with a purity of not less than 99.9%. Control the pressure in reaction chamber 10 to 0.2 MPa.

[0068] S4. A 20μm diameter tungsten wire is selected as the heating wire. The heating wire 50 is energized and heated to 800℃±5℃ by current control. Diamond material 1 is bonded to the heating wire 50 along a preset cutting path with a contact pressure of 0.5N.

[0069] S5. The driving device 30 drives the clamp 20 to move towards the heating wire 50, so that the diamond material 1 comes into contact with the heating wire 50 at a uniform speed. The carbon elements at the contact point between the diamond material 1 and the heating wire 50 are directionally oxidized to generate gaseous products. This forms precise grooves, thereby enabling the cutting of diamond material 1.

[0070] S6. After the cutting is completed, turn off the power supply of the heating wire 50, and use the vacuum device 60 to remove the gas in the reaction chamber 10 to balance the gas pressure in the reaction chamber 10; then open the reaction chamber 10 and use 0.5MPa high-pressure nitrogen to blow away the surface dust.

[0071] Tests showed that the slit width was 50 μm, the surface roughness Ra ≤ 0.3 μm, there was no oxidation damage in the non-slit area, and the diamond material 1 had no cracks.

[0072] Example 3: The difference between this embodiment and Embodiment 2 is that, in S3, a reaction gas is injected into the reaction chamber 10 via the gas control device 70. The reaction gas is a mixture of 50% oxygen and 50% inert gas. The pressure inside the reaction chamber 10 is maintained at 0.15 MPa.

[0073] S4. A tungsten wire with a diameter of 30μm is selected as the heating wire. The heating wire 50 is energized and heated to 700℃±5℃ by current control. Diamond material 1 is attached to the heating wire 50 along a preset cutting path with a contact pressure of 0.3N.

[0074] After testing using this process, the cutting kerf width was found to be 65 μm, the surface roughness Ra≤0.4 μm, the cutting path was straight, and there was no damage.

[0075] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0076] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A diamond slitting device based on localized gas-solidification chemical reaction, characterized in that: The device includes a reaction chamber (10), a clamp (20) is slidably installed on one side of the reaction chamber (10), a bracket (40) is installed on the other side of the reaction chamber (10), an electric heating wire (50) is installed on the bracket (40), one end of a driving device (30) is connected to the reaction chamber (10), and the other end is connected to the clamp (20). The driving device (30) is used to drive the clamp (20) to move towards the side of the electric heating wire (50) to cut the diamond material (1) held on the clamp (20). It also includes a vacuum pumping device (60) and a gas control device (70). The vacuum pumping device (60) is connected to the reaction chamber (10) and is used to evacuate the reaction chamber (10). The gas control device (70) is connected to the reaction chamber (10) and is used to inject reaction gas into the reaction chamber (10). It also includes a control system (90), which is electrically connected to the drive device (30), the heating wire (50), the vacuum device (60) and the gas control device (70), respectively. The control system (90) is also electrically connected to the pressure sensor (91) and the gas concentration sensor (92) installed in the reaction chamber (10).

2. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1, characterized in that: It also includes a frame (80), a partition (81) is provided in the middle of the frame (80), the reaction chamber (10) includes a base (11) and a cover (12), the base (11) is installed on the partition (81), and the clamp (20) and the bracket (40) are both installed on the base (11); a lifting device (14) is installed on the top of the frame (80), the power output end of the lifting device (14) extends downward into the frame (80), and the cover (12) is installed on the power output end of the lifting device (14); when the power output end of the lifting device (14) moves downward, it covers and seals the cover (12) on the base (11); the lifting device (14) is electrically connected to the control system (90).

3. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1, characterized in that: The clamp (20) includes a lower clamping plate (21), an upper clamping plate (22), guide rods (23), and a clamping screw (24). At least two guide rods (23) are installed on the upper side of one end of the lower clamping plate (21). One end of the upper clamping plate (22) is slidably connected to the two guide rods (23). The clamping screw (24) is located between the multiple guide rods (23). The lower end of the clamping screw (24) is rotatably connected to the lower clamping plate (21). The upper end of the clamping screw (24) passes through the upper clamping plate (22). The clamping screw (24) is threaded onto the upper clamping plate (22). The upper end of the clamping screw (24) is equipped with an operating handle (241). The other end of the lower clamping plate (21) and the upper clamping plate (22) are respectively equipped with a lower clamping block (211) and an upper clamping block (221) on opposite sides. The lower clamping block (211) and the upper clamping block (221) are used to clamp the diamond material (1). The bottom of the lower clamping plate (21) is equipped with a linear slider (27). The linear slider (27) is slidably connected to the linear guide rail (28). The linear guide rail (28) is installed in the reaction chamber (10).

4. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1 or 3, characterized in that: The driving device (30) includes a sealing block (31), a sliding rod (32), a push screw (33), and a driving motor (34). The sealing block (31) is fixedly installed on the outer wall of the reaction chamber (10). A sliding cavity (311) is provided inside the sealing block (31). The sliding rod (32) is slidably and sealingly installed inside the sliding cavity (311). A driving cavity (321) is provided inside the sliding rod (32). One end of the push screw (33) extends into the driving cavity (321), and the other end of the push screw (33) is connected to the output shaft of the driving motor (34) for transmission. The drive motor (34) is fixedly installed at the end of the sealing block (31), and the push screw (33) is threadedly connected to the sliding rod (32); the sealing block (31) is provided with an axial sliding hole (312) at the position corresponding to the sealing cavity (311), and the reaction cavity (10) is provided with a clearance hole (111) at the position corresponding to the sliding hole (312). One end of the connecting rod (35) is connected to the sliding rod (32), and the other end is connected to the clamp (20) after passing through the sliding hole (312) and the clearance hole (111); the drive motor (34) is electrically connected to the control system (90).

5. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1, characterized in that: The support (40) includes a first crossbar (41), a second crossbar (42), and a base plate (43). One end of the first crossbar (41) and the second crossbar (42) are fixed to one side of the base plate (43), and the base plate (43) is connected to the reaction chamber (10). The other ends of the first crossbar (41) and the second crossbar (42) are respectively provided with through holes (401). A sliding sleeve (404) is installed in the through hole (401) of the first crossbar (41). A conductive post (402) is installed inside the first crossbar (404), and a spring (405) is fitted on the conductive post (402). One end of the heating wire (50) is inserted into the sliding sleeve (404) and fixedly connected to the conductive post (402). Another conductive post (402) is installed in the through hole (401) of the second crossbar (42), and the other end of the heating wire (50) is fixedly connected to the conductive post (402) on the second crossbar (42). The two conductive posts (402) are electrically connected to the control system (90) respectively.

6. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 5, characterized in that: A rotating shaft (44) is provided on the other side of the base plate (43). A support seat (47) is fixedly installed in the reaction chamber (10). A rotating hole is provided on the support seat (47). The rotating shaft (44) is inserted into the rotating hole. A pressure plate (45) is installed at the end of the rotating shaft (44) by a screw (46). The length of the rotating shaft (44) is less than the depth of the rotating hole.

7. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1 or 6, characterized in that: The bracket (40) is also equipped with a purging device (48); the purging device (48) includes a housing (481), a perforation (482) is provided in the middle of the housing (481), the heating wire (50) passes through the perforation (482), a heating chamber (483) is provided inside the housing (481), an air outlet (485) is provided at one end of the housing (481), the air outlet (485) is arranged along the axial direction of the heating wire (50), a multi-layer heat absorption ring (486) is provided inside the perforation (482), a multi-layer heat dissipation fin (487) is provided inside the heating chamber (483), an air inlet (488) is provided on the housing (481), the air inlet (488) is connected to the heating chamber (483); the air inlet (488) is connected to the first solenoid valve (49) through a duct, the first solenoid valve (49) is used to connect to the compressed gas source; the first solenoid valve (49) is electrically connected to the control system (90).

8. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1 or 2, characterized in that: The vacuum pump (60) includes a vacuum pump (61), the vacuum pump (61) is connected to the reaction chamber (10) through the exhaust pipe (62), a second solenoid valve (63) is installed on the exhaust pipe (62), and a pressure balance pipe (64) is also installed on the exhaust pipe (62) between the second solenoid valve (63) and the reaction chamber (10), and a third solenoid valve (65) is installed on the pressure balance pipe (64); the vacuum pump (61), the second solenoid valve (63) and the third solenoid valve (65) are electrically connected to the control system (90).

9. The diamond slitting device based on localized gas-solidification chemical reaction according to claim 1 or 2, characterized in that: The gas control device (70) includes a gas supply pipe (71), which is connected to the reaction chamber (10). A three-way connector is connected to the gas supply pipe (71), and a fourth solenoid valve (72) and a fifth solenoid valve (73) are installed on the other two ports of the three-way connector, respectively. In use, the fourth solenoid valve (72) and the fifth solenoid valve (73) are connected to an inert gas source (75) and a pure oxygen source (76) through pipelines, respectively. The fourth solenoid valve (72) and the fifth solenoid valve (73) are electrically connected to the control system (90), respectively.

10. A diamond slitting method using the diamond slitting apparatus based on localized vapor-solidification chemical reaction as described in any one of claims 1 to 9, characterized in that: The method for cutting diamond materials includes the following steps: S1. The diamond material (1) to be cut is clamped on the fixture (20); S2. Close the reaction chamber (10) and seal the reaction chamber (10). Vacuum the reaction chamber (10) using the vacuum pumping device (60). The pressure sensor (91) detects the pressure value inside the reaction chamber (10). When the pressure reaches the preset value, close the vacuum pumping device (60). S3. Inject reaction gas into the reaction chamber (10) through the gas control device (70), the reaction gas including oxygen with a purity of not less than 99.9%; or, a mixture of 50% oxygen and 50% inert gas; and control the pressure in the reaction chamber (10) to be between 0.1 MPa and 0.2 MPa; S4. Control the heating wire (50) to be energized, so that the heating wire is heated to 700℃~800℃; S5. Drive the clamp (20) to move towards the heating wire (50) using the drive device (30), so that the diamond material (1) comes into contact with the heating wire (50) at a uniform speed. The carbon elements at the contact point between the diamond material (1) and the heating wire (50) are directionally oxidized to generate gaseous products. This forms precise grooves, thereby enabling the cutting of diamond material (1); S6. After the cutting is completed, turn off the power supply of the heating wire (50) and use the vacuum device (60) to exhaust the gas in the reaction chamber (10) to balance the gas pressure in the reaction chamber (10); then open the reaction chamber (10).

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