A detection range automatic adjustment type intelligent thickness measuring device

Abstract

The application discloses a kind of detection range automatic adjustment type intelligent thickness measuring device, it is related to thickness measuring device technical field.The device includes chamber, dust removal unit and detection unit;Dust removal unit includes dust removal cylinder, rotating part, reciprocating part, magnetic assembly and air jet unit, rotating part is rotatably installed in dust removal cylinder, vibrating part is installed at the both ends of rotating part, reciprocating part is installed on rotating part by screw assembly, magnetic assembly is installed on reciprocating part and dust removal cylinder respectively;Air jet unit includes gas storage part, air jet part and ion unit, ion unit is installed in gas storage part, detection unit uses distance sensor, and the thickness of film is detected by distance sensor.By magnetic assembly drive reciprocating part to move, and by screw assembly drive rotating part reciprocating rotation, make vibrating part to film be shaken, simultaneously utilize air jet unit to spray air to remove dust, improve film thickness measuring precision.

Description

Technical Field

[0001] This invention relates to the field of thickness measuring device technology, specifically an intelligent thickness measuring device with automatic adjustment of the detection range. Background Technology

[0002] In modern thin film production, precise control of product thickness is a crucial factor determining its optical performance, mechanical strength, and overall quality. To ensure uniform film thickness, production lines typically integrate online thickness measurement systems that utilize high-precision distance sensors to perform real-time, non-contact scanning measurements of the substrate.

[0003] However, under actual continuous production conditions, due to the triboelectric adsorption generated during high-speed unwinding and winding, coupled with the unavoidable suspended particles in the air of the production workshop, the film surface is extremely prone to adsorbing micron-sized dust, impurities, debris, and even oil mist condensates. Although these microscopic contaminants are inconspicuous, they can cause significant measurement errors when the film enters the scanning frame detection area of ​​the thickness gauge. Summary of the Invention

[0004] The purpose of this invention is to provide an intelligent thickness measuring device with automatic adjustment of the detection range to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an intelligent thickness measuring device with automatic adjustment of detection range, comprising a negative pressure system, including a chamber, a dust removal unit, and a detection unit;

[0006] The dust removal unit includes a dust removal cylinder, a rotating component, a reciprocating component, a magnetic assembly, and an air jet unit. The dust removal cylinder is installed on the chamber. The rotating component is rotatably mounted on the dust removal cylinder. Both ends of the rotating component extend out of the dust removal cylinder and are equipped with vibrating components. The reciprocating component is mounted on the rotating component via a spiral assembly. The reciprocating component is mounted on the dust removal cylinder via a guide component. The magnetic assembly is mounted on both the reciprocating component and the dust removal cylinder.

[0007] The jet unit includes a gas storage component, a jet component, and an ion unit. The two ends of the gas storage component are respectively installed on the dust collection cylinder and the reciprocating component. The jet component is connected to the gas storage component and is installed on the dust collection cylinder. The ion unit is installed inside the gas storage component.

[0008] Both the detection unit and the negative pressure system are installed in the room.

[0009] The detection unit consists of multiple thickness sensors, which are mounted on the chamber via an optical axis and a mounting base. The multiple thickness sensors are distributed alternately to allow for the use of different thickness sensors for different films, thereby enabling automatic adjustment of the detection range.

[0010] At least one negative pressure system is installed. The negative pressure system will suck up the dust that is scattered around the membrane after vibration, and prevent the dust from spreading everywhere.

[0011] The air storage component is an elastic air bladder that can contract or extend as the reciprocating component moves.

[0012] The spiral assembly includes a reversing shaft and a reversing groove. The reversing shaft is disposed on the reciprocating component, and the reversing groove is disposed on the rotating component. The reversing groove is spirally distributed. The reversing shaft is inserted into the reversing groove and slides within the reversing groove. A distance measuring element is disposed on the dust collector. The distance measuring element is electrically connected to the control system and is used to detect the displacement of the reciprocating component.

[0013] The magnetic components on the reciprocating parts are electromagnets, magnets, coils, etc., and the magnetic components on the dust collector are electromagnets, coils, etc. The magnetic components on the dust collector are electrically connected to the control system.

[0014] When a positive current is passed through the magnetic component on the dust collector, the magnetic component on the dust collector generates a positive magnetic field. This positive magnetic field repels the magnetic field generated by the magnetic component on the reciprocating part. Under the action of the repulsive force, the reciprocating part moves in the forward direction. The reversing shaft on the reciprocating part slides in the reversing groove. Due to the helical guiding effect of the reversing groove, the linear motion of the reciprocating part is converted into the rotational motion of the rotating part. The rotating part drives the vibrating part to rotate in the forward direction.

[0015] When a reverse current is applied to the magnetic component on the dust collector, the magnetic component on the dust collector generates a reverse magnetic field. This reverse magnetic field attracts the magnetic field generated by the magnetic component on the reciprocating part. Under the attraction of the magnetic field, the reciprocating part moves in the opposite direction. The commutating shaft on the reciprocating part slides in the commutating groove. Due to the helical guiding effect of the commutating groove, the linear motion of the reciprocating part is converted into the rotational motion of the rotating part. The rotating part drives the vibrating part to rotate in the opposite direction.

[0016] The control system continuously supplies positive and reverse current to the magnetic components on the dust collector to make the rotating part reciprocate and the reciprocating part reciprocate.

[0017] The control system can adjust the frequency of the current flowing through the magnetic components on the dust collector to adjust the reciprocating movement frequency of the reciprocating parts and the reciprocating rotation speed of the rotating parts, thereby precisely adjusting the vibration frequency and reciprocating rotation amplitude of the vibrating parts.

[0018] The control system can adjust the magnitude of the incoming current to adjust the magnetic field strength of the positive and negative magnetic fields, thereby changing the repulsive thrust and adsorption pull of the reciprocating parts and adapting to the dust removal rapping force requirements under different working conditions.

[0019] The vibrating component includes a cam, a rotating component, and a contact ball. The cam is mounted on the rotating component and has a track. One end of the rotating component has a follower located within the track. The middle part of the rotating component is rotatably mounted on a chamber via an elastic element. The other end of the rotating component is connected to the contact ball via a telescopic element. The elastic element is a torsion spring.

[0020] The telescopic component includes a sliding rod, a sliding cylinder, and an electromagnetic telescopic component;

[0021] The sliding rod is slidably mounted inside the sliding cylinder, which is mounted on a rotating component. An electromagnetic telescopic component connects the sliding rod and the sliding cylinder, and is electrically connected to the control system. A contact ball is mounted at one end of the sliding rod. The electromagnetic telescopic component can be an electromagnetic spring, a miniature electric cylinder, etc., which drives the sliding rod to move within the sliding cylinder to adjust the distance between the contact ball and the diaphragm, preventing damage to the diaphragm. When energized, the electromagnetic spring gradually contracts; when de-energized, it gradually lengthens due to its own elasticity. The degree of contraction of the electromagnetic spring is determined by the magnitude of the current; the greater the current, the greater the contraction.

[0022] During the reciprocating rotation of the rotating component, the rotating component drives the cam to reciprocate, and the protrusion on the cam reciprocates as well.

[0023] When the driven member moves away from the protrusion, the elastic member is released. The elastic member pushes the rotating member to rotate forward by a certain angle. The rotating member drives the sliding cylinder to rotate forward by a certain angle. The sliding cylinder drives the sliding rod to rotate synchronously by a certain angle. The sliding rod drives the contact ball away from the film. The film gradually returns to flatness through its own elasticity.

[0024] When the driven member contacts the protrusion, the protrusion pushes the rotating member to rotate in the opposite direction by a certain angle. At the same time, the rotating member compresses the elastic member. The rotating member drives the sliding cylinder to rotate in the opposite direction by a certain angle. The sliding cylinder drives the sliding rod to rotate in the opposite direction synchronously by a certain angle. The sliding rod drives the contact ball to squeeze the film.

[0025] As the rotating component continues to rotate back and forth, it drives the contact ball to squeeze the film multiple times and then release it. The film will vibrate, causing the dust on the film to be scattered into the surrounding air, so that the dust on the film can be blown towards the negative pressure system.

[0026] The air storage device is connected to an air inlet pipe and an air outlet pipe. The air inlet pipe is in communication with the outside air, and the air outlet pipe is connected to the air jet device.

[0027] Both the inlet and outlet pipes are equipped with one-way valves and flow meters, and the flow meters are electrically connected to the control system.

[0028] When the reciprocating part moves closer to the air storage unit, it squeezes the air storage unit, causing it to gradually shrink. The volume inside the air storage unit gradually decreases, and the air pressure inside the air storage unit increases, opening the one-way valve in the air outlet pipe. At this time, air is delivered to the nozzle through the air outlet pipe, and the nozzle sprays the air onto the film, blowing away the dust on the film.

[0029] As the reciprocating component moves away from the air storage component, it pulls the air storage component to gradually unfold, increasing the internal volume and reducing the air pressure. External air then pushes open the one-way valve in the air intake pipe and enters the air storage component to replenish the air supply.

[0030] The bottom of the dust collector is equipped with a fixing component;

[0031] The jetting component is provided in multiple ways. Each jetting component includes a rotating shaft and a nozzle. The rotating shaft is rotatably mounted on a fixed component. A connecting plate is installed at one end of the rotating shaft. Multiple connecting plates are rotatably mounted on an extension plate. The lower side of the reciprocating component passes through the fixed component and is connected to the extension plate.

[0032] The nozzle is mounted on a rotating shaft and is connected to an air outlet pipe.

[0033] During the reciprocating movement of the reciprocating component, the reciprocating component drives the extension plate to reciprocate. The extension plate drives the rotating shaft to swing left and right through the connecting plate. The rotating shaft drives the jetting component to swing left and right and spray air to clean the film, thereby improving the cleaning effect.

[0034] The contact ball is made of an elastic material.

[0035] The track has multiple protrusions.

[0036] The ionization unit is electrically connected to the control system and is used to ionize the air entering the gas storage unit. The ionization unit generates an ionized gas flow carrying positive and negative charges; the ionized gas flow is transported to the nozzle through the outlet pipe during the compression and exhaust process of the gas storage unit, and acts synchronously on the film surface with the swinging jet of the nozzle, neutralizing the static electricity carried by the film surface and dust.

[0037] Multiple sets of guide rollers are installed on the chamber, and these guide rollers are electric rollers that transport the film.

[0038] Compared with the prior art, the beneficial effects of the present invention are:

[0039] 1. Automated dust removal for thin films ensures normal inspection and processing. A magnetic component drives a reciprocating element to move back and forth, and a spiral component converts this reciprocating motion into the reciprocating rotation of a rotating element, which in turn drives a vibrating element to agitate the thin film. The implementation is as follows: The control system changes the direction of the current flowing into the magnetic component on the dust collection cylinder, generating a positive or negative magnetic field that repels or attracts the magnetic component on the reciprocating element, driving its reciprocating movement. The commutating shaft on the reciprocating element slides within the spiral commutating groove of the rotating element, converting linear motion into rotational motion, which in turn drives the vibrating element. This achieves the reciprocating rotation and agitation of the vibrating element through non-contact magnetic force, resulting in a compact structure and rapid response. The control system can precisely adjust the agitation frequency and force of the vibrating element by adjusting the current frequency and amplitude, adapting to thin films of different materials and thicknesses. This avoids damage to the thin film while effectively dispersing dust adhering to it, creating favorable conditions for subsequent dust removal.

[0040] 2. Removing static electricity from the membrane via an ion unit. By linking the air storage unit and the reciprocating mechanism, and utilizing the ion unit to ionize the air, integrated jet dust removal and static electricity elimination are achieved. The process is as follows: During the reciprocating movement, the reciprocating mechanism simultaneously squeezes or stretches the air storage unit, causing a change in its internal volume. A one-way valve controls the air intake and exhaust, delivering compressed air to the oscillating nozzle and spraying it onto the membrane. Simultaneously, the ion unit ionizes the air entering the storage unit, generating positive and negative ions that are ejected with the airflow. This ingenious combination of the mechanical motion of the reciprocating mechanism and the jetting action requires no additional power source, resulting in energy savings and excellent synchronization. The oscillating nozzle expands the cleaning range and improves dust removal efficiency. The ionized air effectively neutralizes the static electricity on the membrane surface, preventing dust from re-adheding due to static electricity, significantly improving the cleaning effect, ensuring a clean membrane surface, and providing an accurate measurement environment for the thickness sensor.

[0041] 3. The detection range is varied by alternating multiple sets of thickness sensors. Multiple distance sensors are mounted on the chamber via optical axes and mounting bases, and are arranged alternately. Multiple negative pressure systems are set up to remove dust dispersed and blown up by vibration. Different types of thickness sensors can be flexibly selected according to the measurement requirements of different films, automatically adjusting the detection range and improving the versatility and measurement accuracy of the device. The multiple negative pressure systems can promptly remove dispersed and blown dust, preventing it from re-drifting and re-adhering to the film within the chamber, ensuring a continuously clean environment and further enhancing the stability and reliability of thickness measurement operations. Attached Figure Description

[0042] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0043] Figure 2 This is a schematic diagram of the guide roller structure in this invention;

[0044] Figure 3 This is a schematic diagram of the dust collector cylinder in this invention;

[0045] Figure 4 This is a schematic diagram of the sliding rod in this invention;

[0046] Figure 5 This is a schematic diagram of the contact ball structure in this invention;

[0047] Figure 6 This is a schematic diagram of the reciprocating component in this invention;

[0048] Figure 7 This is a schematic diagram of the intake pipe structure in this invention;

[0049] Figure 8 This is a schematic diagram of the reversing groove in this invention;

[0050] Figure 9 yes Figure 8 A magnified view of a portion of region A in the middle;

[0051] Figure 10 This is a schematic diagram of the commutation shaft in this invention.

[0052] In the diagram: 1. Chamber; 101. Guide roller; 102. Negative pressure system; 2. Dust removal unit; 21. Dust removal cylinder; 211. Fixing component; 22. Rotating component; 23. Reciprocating component; 231. Reversing shaft; 232. Reversing groove; 24. Vibrating component; 241. Cam; 2411. Track; 242. Rotating component; 2421. Sliding rod; 2422. Sliding cylinder; 2423. Electromagnetic telescopic component; 243. Contact ball; 25. Jet unit; 251. Air storage component; 2511. Air inlet pipe; 2512. Air outlet pipe; 252. Jet component; 2521. Rotating shaft; 2522. Nozzle; 2523. Extension plate; 253. Ion unit; 3. Detection unit. Detailed Implementation

[0053] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0054] Example: Figures 1-10As shown, the present invention provides a technical solution for an intelligent thickness measuring device with automatic adjustment of detection range, including a negative pressure system 102, comprising a chamber 1, a dust removal unit 2, and a detection unit 3; the dust removal unit 2 includes a dust removal cylinder 21, a rotating component 22, a reciprocating component 23, a magnetic assembly, and an air jet unit 25. The dust removal cylinder 21 is mounted on the chamber 1, the rotating component 22 is rotatably mounted on the dust removal cylinder 21, both ends of the rotating component 22 extend out of the dust removal cylinder 21 and are equipped with vibrating components 24, and the reciprocating component 23 is mounted on the rotating component 22 via a spiral assembly. The reciprocating component 23 is mounted on the dust collector 21 via a guide component. Magnetic components are mounted on both the reciprocating component 23 and the dust collector 21. The jetting unit 25 includes a gas storage component 251, a jetting component 252, and an ionizing unit 253. The two ends of the gas storage component 251 are mounted on the dust collector 21 and the reciprocating component 23, respectively. The jetting component 252 is connected to the gas storage component 251 and is mounted on the dust collector 21. The ionizing unit 253 is mounted inside the gas storage component 251. The detection unit 3 and the negative pressure system 102 are both mounted on the chamber 1. The guide component is a spline, which is located on the top of the reciprocating component 23. The spline groove is located on the dust collector 21, and the spline and spline groove form a sliding connection. Multiple sets of guide rollers 101 are mounted on the chamber 1. These multiple sets of guide rollers 101 are electric rollers, and they convey the film.

[0055] The detection unit 3 consists of multiple thickness sensors, which are mounted on chamber 1 via an optical axis and a mounting base. The multiple thickness sensors are distributed alternately to allow for the use of different thickness sensors for different films, thereby enabling automatic adjustment of the detection range.

[0056] At least one set of negative pressure system 102 is provided. The negative pressure system 102 sucks away the dust that is scattered around the membrane after vibration, so as to prevent the dust from spreading everywhere.

[0057] The air storage component 251 is an elastic air bladder that can contract or extend as the reciprocating component 23 moves.

[0058] The spiral assembly includes a reversing shaft 231 and a reversing groove 232. The reversing shaft 231 is disposed on the reciprocating member 23, and the reversing groove 232 is disposed on the rotating member 22. The reversing groove 232 is spirally distributed. The reversing shaft 231 is inserted into the reversing groove 232 and slides within the reversing groove 232. A ranging element is disposed on the dust collector 21. The ranging element is electrically connected to the control system and is used to detect the displacement of the reciprocating member 23.

[0059] The magnetic components on the reciprocating component 23 are electromagnets, magnets, coils, etc., and the magnetic components on the dust collector 21 are electromagnets, coils, etc. The magnetic components on the dust collector 21 are electrically connected to the control system.

[0060] When a positive current is applied to the magnetic component on the dust collector 21, the magnetic component on the dust collector 21 generates a positive magnetic field. This positive magnetic field repels the magnetic field generated by the magnetic component on the reciprocating part 23. Under the action of the repulsive force, the reciprocating part 23 moves in the forward direction. The reversing shaft 231 on the reciprocating part 23 slides in the reversing groove 232. Due to the helical guiding effect of the reversing groove 232, the linear motion of the reciprocating part 23 is converted into the rotational motion of the rotating part 22. The rotating part 22 drives the vibrating part 24 to rotate in the forward direction.

[0061] When a reverse current is applied to the magnetic component on the dust collector 21, the magnetic component on the dust collector 21 generates a reverse magnetic field. This reverse magnetic field attracts the magnetic field generated by the magnetic component on the reciprocating part 23. Under the attraction of the magnetic field, the reciprocating part 23 moves in the opposite direction. The reversing shaft 231 on the reciprocating part 23 slides in the reversing groove 232. Due to the helical guiding effect of the reversing groove 232, the linear motion of the reciprocating part 23 is converted into the rotational motion of the rotating part 22. The rotating part 22 drives the vibrating part 24 to rotate in the opposite direction.

[0062] The control system continuously supplies positive and reverse currents to the magnetic components on the dust collector 21 to make the rotating part 22 reciprocate and the reciprocating part 23 reciprocate.

[0063] The control system can adjust the frequency of the current flowing through the magnetic component on the dust collector 21, thereby adjusting the reciprocating movement frequency of the reciprocating component 23 and the reciprocating rotation speed of the rotating component 22, and thus precisely adjust the rapping frequency and reciprocating rotation amplitude of the vibrating component 24.

[0064] The control system can adjust the magnitude of the input current to adjust the magnetic field strength of the positive and negative magnetic fields, thereby changing the repulsive thrust and adsorption pull of the reciprocating component 23 to adapt to the dust removal rapping force requirements under different working conditions.

[0065] The vibrating element 24 includes a cam 241, a rotating element 242, and a contact ball 243. The cam 241 is mounted on the rotating element 22 and has a track 2411 with multiple protrusions. One end of the rotating element 242 has a follower located within the track 2411. The middle part of the rotating element 242 is rotatably mounted on the chamber 1 via an elastic element. The other end of the rotating element 242 is connected to the contact ball 243 via a telescopic element. The elastic element is a torsion spring. The contact ball 243 is made of an elastic material.

[0066] The telescopic component includes a sliding rod 2421, a sliding cylinder 2422, and an electromagnetic telescopic component 2423. The sliding rod 2421 is slidably mounted inside the sliding cylinder 2422, which is mounted on the rotating component 242. The electromagnetic telescopic component 2423 connects the sliding rod 2421 and the sliding cylinder 2422 and is electrically connected to the control system. A contact ball 243 is mounted on one end of the sliding rod 2421. The electromagnetic telescopic component 2423 can be an electromagnetic spring, a miniature electric cylinder, etc., which drives the sliding rod 2421 to move within the sliding cylinder 2422 to adjust the distance between the contact ball 243 and the diaphragm, preventing damage to the diaphragm. When the electromagnetic spring is energized, it gradually contracts; when de-energized, it gradually lengthens under its own elastic force. The degree of contraction of the electromagnetic spring is determined by the magnitude of the current; the greater the current, the greater the contraction.

[0067] During the reciprocating rotation of the rotating component 22, the rotating component 22 drives the cam 241 to reciprocate as well, and the protrusion on the cam 241 reciprocates as well.

[0068] When the driven member moves away from the protrusion, the elastic member is released. The elastic member pushes the rotating member 242 to rotate forward by a certain angle. The rotating member 242 drives the sliding cylinder 2422 to rotate forward by a certain angle. The sliding cylinder 2422 drives the sliding rod 2421 to rotate synchronously by a certain angle. The sliding rod 2421 drives the contact ball 243 away from the film. The film gradually returns to flatness through its own elasticity.

[0069] When the driven member contacts the protrusion, the protrusion pushes the rotating member 242 to rotate in the opposite direction by a certain angle. At the same time, the rotating member 242 compresses the elastic member. The rotating member 242 drives the sliding cylinder 2422 to rotate in the opposite direction by a certain angle. The sliding cylinder 2422 drives the sliding rod 2421 to rotate in the opposite direction synchronously by a certain angle. The sliding rod 2421 drives the contact ball 243 to squeeze the film.

[0070] As the rotating component 22 continues to rotate back and forth, the rotating component 242 drives the contact ball 243 to squeeze the film multiple times and then release it. The film will vibrate, causing the dust on the film to be scattered in the surrounding air, so as to blow the dust on the film toward the negative pressure system 102.

[0071] The air storage unit 251 is connected to an air inlet pipe 2511 and an air outlet pipe 2512. The air inlet pipe 2511 is connected to the outside air, and the air outlet pipe 2512 is connected to the jet component 252. A one-way valve and a flow meter are installed in both the air inlet pipe 2511 and the air outlet pipe 2512. The flow meter is electrically connected to the control system.

[0072] When the reciprocating component 23 moves closer to the air storage component 251, the reciprocating component 23 squeezes the air storage component 251, causing the air storage component 251 to gradually shrink. The internal volume of the air storage component 251 gradually decreases, and the air pressure inside the air storage component 251 increases, opening the one-way valve in the air outlet pipe 2512. At this time, air is delivered to the nozzle 2522 through the air outlet pipe 2512. The nozzle 2522 sprays air onto the film and blows away the dust on the film.

[0073] When the reciprocating component 23 moves away from the air storage component 251, the reciprocating component 23 pulls the air storage component 251 to gradually unfold, the internal volume of the air storage component 251 gradually increases, the air pressure inside the air storage component 251 gradually decreases, and the external air pushes open the one-way valve in the air intake pipe 2511 to enter the air storage component 251 to achieve air replenishment.

[0074] The dust collector 21 has a fixing member 211 at the bottom; multiple jetting members 252 are provided, each jetting member 252 including a rotating shaft 2521 and a nozzle 2522. The rotating shaft 2521 is rotatably mounted on the fixing member 211. A connecting plate is installed at one end of the rotating shaft 2521. Multiple connecting plates are rotatably mounted on an extension plate 2523. The reciprocating member 23 passes through the fixing member 211 and is connected to the extension plate 2523. The nozzle 2522 is mounted on the rotating shaft 2521 and is connected to the air outlet pipe 2512.

[0075] During the reciprocating movement of the reciprocating component 23, the reciprocating component 23 drives the extension plate 2523 to reciprocate. The extension plate 2523 drives the rotating shaft 2521 to swing left and right through the connecting plate. The rotating shaft 2521 drives the jetting component 252 to swing left and right and spray air to clean the film, thereby improving the cleaning effect.

[0076] Ionizing unit 253 is electrically connected to the control system and is used to ionize the air entering the gas storage unit 251. Ionizing unit 253 generates an ionized gas flow carrying positive and negative charges; the ionized gas flow is transported to nozzle 2522 through outlet pipe 2512 during the compression and exhaust process of gas storage unit 251, and acts synchronously on the film surface with the swinging jet of nozzle 2522, neutralizing the static electricity carried on the film surface and dust.

[0077] Working Principle: After the film is conveyed by the guide roller 101, the control system first activates the dust removal unit 2. By adjusting the frequency and amplitude of the current supplied to the magnetic component, the reciprocating movement of the reciprocating component 23 and the reciprocating rotation of the rotating component 22 are controlled. This drives the contact ball 243 of the vibrating component 24 to regularly squeeze and release the film, causing the film to vibrate and disperse dust. At the same time, the movement of the reciprocating component 23 drives the gas storage component 251 to periodically compress and stretch, spraying the ionized gas flow after ionization by the ion unit 253 onto the film surface through the oscillating jet component 252 to blow away dust and neutralize static electricity. The dispersed dust is finally sucked away by the negative pressure system 102. After cleaning, the film enters the detection area. The control system automatically selects the corresponding thickness sensor according to different film types to automatically adjust the detection range, thereby completing the accurate measurement of film thickness.

[0078] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An intelligent thickness measuring device with automatic adjustment of detection range, comprising a negative pressure system (102), characterized in that: It includes a chamber (1), a dust removal unit (2), and a detection unit (3); The dust removal unit (2) includes a dust removal cylinder (21), a rotating component (22), a reciprocating component (23), a magnetic assembly, and an air jet unit (25). The dust removal cylinder (21) is installed on the chamber (1). The rotating component (22) is rotatably installed on the dust removal cylinder (21). Both ends of the rotating component (22) extend out of the dust removal cylinder (21) and are equipped with vibrating components (24). The reciprocating component (23) is installed on the rotating component (22) through a spiral assembly. The reciprocating component (23) is installed on the dust removal cylinder (21) through a guide component. The magnetic assembly is installed on the reciprocating component (23) and the dust removal cylinder (21) respectively. The jet unit (25) includes a gas storage component (251), a jet component (252), and an ion unit (253). The two ends of the gas storage component (251) are respectively installed on the dust collector (21) and the reciprocating component (23). The jet component (252) is connected to the gas storage component (251). The jet component (252) is installed on the dust collector (21). The ion unit (253) is installed inside the gas storage component (251). The detection unit (3) and the negative pressure system (102) are both installed on the chamber (1).

2. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 1, characterized in that: The spiral assembly includes a reversing shaft (231) and a reversing groove (232). The reversing shaft (231) is disposed on the reciprocating component (23), and the reversing groove (232) is disposed on the rotating component (22). The reversing groove (232) is spirally distributed. The reversing shaft (231) is inserted into the reversing groove (232) and slides within the reversing groove (232). A distance measuring element is disposed on the dust collector (21).

3. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 2, characterized in that: The vibrating element (24) includes a cam (241), a rotating element (242), and a contact ball (243). The cam (241) is mounted on the rotating element (22), and a track (2411) is provided on the cam (241). One end of the rotating element (242) is provided with a follower, which is located inside the track (2411). The middle part of the rotating element (242) is rotatably mounted on the chamber (1) through an elastic element. The other end of the rotating element (242) is connected to the contact ball (243) through a telescopic element.

4. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 3, characterized in that: The telescopic component includes a sliding rod (2421), a sliding cylinder (2422), and an electromagnetic telescopic component (2423). The sliding rod (2421) is slidably installed inside the sliding cylinder (2422), the sliding cylinder (2422) is installed on the rotating part (242), the electromagnetic telescopic part (2423) connects the sliding rod (2421) and the sliding cylinder (2422), the electromagnetic telescopic part (2423) is electrically connected to the control system, and the contact ball (243) is installed at one end of the sliding rod (2421).

5. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 4, characterized in that: The gas storage unit (251) is connected to an air inlet pipe (2511) and an air outlet pipe (2512). The air inlet pipe (2511) is in communication with the outside air, and the air outlet pipe (2512) is connected to the jet component (252). Both the air inlet pipe (2511) and the air outlet pipe (2512) are equipped with a one-way valve and a flow meter, and the flow meter is electrically connected to the control system.

6. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 5, characterized in that: The bottom of the dust collector (21) is provided with a fixing part (211); Multiple jetting components (252) are provided. Each jetting component (252) includes a rotating shaft (2521) and a nozzle (2522). The rotating shaft (2521) is rotatably mounted on a fixing member (211). A connecting plate is installed at one end of the rotating shaft (2521). Multiple connecting plates are rotatably mounted on an extension plate (2523). The reciprocating component (23) passes through the fixing member (211) and is connected to the extension plate (2523). The nozzle (2522) is mounted on the rotating shaft (2521) and is connected to the air outlet pipe (2512).

7. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 6, characterized in that: The contact ball (243) is made of an elastic material.

8. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 7, characterized in that: The track (2411) has multiple protrusions.

9. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 8, characterized in that: The ion unit (253) is electrically connected to the control system and is used to ionize the air entering the gas storage unit (251).

10. The intelligent thickness measuring device with automatic adjustment of detection range according to claim 9, characterized in that: Multiple sets of guide rollers (101) are installed on the chamber (1).

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