Electrical performance test fixture, system, and method for fcbga singulated products
By designing an electrical performance testing fixture for individual FCBGA products, and employing a rectangular test position and an L-shaped reference block combined with a sliding groove adjustment mechanism, the problems of low testing efficiency and poor versatility were solved, achieving efficient and stable electrical performance testing, increasing production capacity and reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- THINKTRANS SEMICON TECH LTD
- Filing Date
- 2026-03-23
- Publication Date
- 2026-05-29
Smart Images

Figure CN122109788A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor integrated circuit manufacturing and testing technology, specifically to electrical performance testing fixtures, systems, and testing methods for FCBGA single-chip products. Background Technology
[0002] With the rapid development of technologies such as artificial intelligence, high-performance computing, and 5G communication, electronic products are continuously evolving towards miniaturization, high integration, and high performance. FCBGA (Flip Chip Ball Grid Array) packaging technology, with its excellent electrothermal performance, high-density I / O interconnect capabilities, superior electrothermal performance, and high packaging reliability, has become the preferred packaging form for core components of high-end chips (such as CPUs, GPUs, and FPGAs). In the manufacturing process of these products, the final electrical performance testing (E-Test) is the last critical step in screening for functional defects and ensuring factory quality. Its testing efficiency and accuracy directly affect product delivery cycle and production costs.
[0003] Flying probe testing is one of the mainstream non-fixed probe testing methods for electrical performance testing of FCBGA products. It uses a program-controlled multi-axis precision moving probe (flying probe) to directly contact the product's pads or solder balls to apply and measure electrical signals. It offers advantages such as eliminating the need for expensive dedicated test fixtures and high flexibility. However, the clamping fixtures used in existing flying probe testing still have the following shortcomings in actual large-scale production: 1. Low test throughput hinders capacity expansion: Existing fixtures are mostly designed for single or small-batch (e.g., 2-4 pieces) products, with fixed test bench layouts. When facing small-batch sample demands, the testing machine needs to frequently perform "loading-testing-unloading" cycles, consuming a significant amount of time on non-testing mechanical operations, resulting in low machine utilization. This low single-test quantity cannot meet the testing efficiency requirements of production, severely restricting the overall production line's capacity expansion and becoming a bottleneck for increasing capacity.
[0004] 2. Poor versatility and complex changeover adjustments: The market offers a wide variety of FCBGA products, with varying package substrate sizes (ranging from 15mm×15mm to 50mm×50mm or even larger), shapes (square, rectangular), and BGA solder ball array layouts (ball pitch, number of rows and columns). Existing clamping fixtures often lack sufficient flexibility and adjustability, making it difficult to quickly adapt to products of different sizes and specifications. This not only increases production preparation time but also raises testing costs and fixture management complexity.
[0005] 3. Insufficient electrical contact consistency and reliability: FCBGA has a high solder ball density and small spacing, which places micron-level requirements on the positioning accuracy and contact stability of the test probe. Existing fixtures may experience micro-displacement or warping of the product within the test plane due to insufficient structural rigidity, wear of the positioning mechanism, or unreasonable clamping force design after clamping different products or long-term use. The consequence is that the probe cannot accurately and stably align with the center of the target solder ball, leading to fluctuations in contact resistance and misinterpretation of test results; it may even scratch or damage the fragile solder ball due to probe slippage or excessive pressure, causing irreversible physical damage to the product. Summary of the Invention
[0006] To address the aforementioned deficiencies in existing technologies, a fixture, system, and testing method for electrical performance testing of individual FCBGA products are provided, improving the efficiency and quality of flying probe testing and meeting the testing requirements for products of different sizes.
[0007] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows: Firstly, a fixture for testing the electrical performance of a single FCBGA product, wherein the FCBGA product has a rectangular structure; including... A fixture base plate is fixedly mounted on an external flying probe testing machine; multiple rectangular test positions are provided on the fixture base plate for placing individual FCBGA products; the size of the test positions is larger than the size of the largest rectangular FCBGA product. The L-shaped reference block is fixed at the first reference angle of the test position. The L-shaped reference block has an inner angle, which is designed to match the first angle and two sides of the FCBGA single product. A strip-shaped stop is provided at the second reference angle of the test position, where the first reference angle and the second reference angle are two opposite reference angles of the diagonal of the test position; The first corner of the FCBGA single product abuts against the L-shaped reference block, and the adjusting strip block abuts against the second corner of the FCBGA single product; the first corner and the second corner are two opposite corners on the diagonal of the FCBGA single product.
[0008] According to the above technical solution, the strip-shaped stop includes a first guide strip and a second guide strip. A transverse groove is provided on the fixture substrate. The first guide strip is arranged longitudinally and slides laterally on the transverse guide rail. A longitudinal groove is provided on the first guide strip, and the second guide strip slides longitudinally within the longitudinal groove. Based on the size of a single FCBGA product, the position of the first guide strip on the transverse groove and the position of the second guide strip on the longitudinal groove are adjusted so that the end of the second guide strip abuts against the second corner of the single FCBGA product.
[0009] According to the above technical solution, the end of the second guide strip is covered with soft rubber.
[0010] According to the above technical solution, a first micro ramp or a first chamfer is provided in the area where the L-shaped reference block contacts the FCBGA single product, and the angle between the first micro ramp and the horizontal plane, or the first chamfer, is an acute angle.
[0011] According to the above technical solution, the acute angle is 30°~60°.
[0012] According to the above technical solution, the L-shaped reference block is located at the lower left corner of the test position, and the strip-shaped stop block is located at the upper right corner of the test position.
[0013] According to the above technical solution, the multiple test positions are arranged in an array, including m columns and n rows.
[0014] According to the above technical solution, the fixture substrate is made of aluminum alloy, stainless steel or composite material.
[0015] Secondly, an electrical performance testing system for individual FCBGA products includes a flying probe tester and an electrical performance testing fixture for individual FCBGA products as described above, which is used to fix the device on the flying probe tester.
[0016] Thirdly, the electrical performance testing method for a single FCBGA product employs the electrical performance testing system for a single FCBGA product as described above; the method includes: An FCBGA single product is placed at each test position, with the first corner and two sides of the FCBGA single product attached to the inner corner of the L-shaped reference block. Adjust the strip stop so that it fits against the second corner of the FCBGA single product; The fixture base plate is fixedly mounted on the flying probe testing machine table; Conduct electrical performance tests; The fixture substrate is removed from the flying probe tester and replaced with an untested FCBGA single product for a new round of testing.
[0017] The present invention has the following beneficial effects: 1. Select two opposite angles on a diagonal of a rectangular test position, designated as the first reference angle and the second reference angle. Set a fixed L-shaped reference block at the first reference angle. Place the FCBGA single product on the test position, ensuring the first corner of the FCBGA single product aligns with the first reference angle of the test position, achieving rapid and accurate reference positioning of the FCBGA single product on the test position. A strip-shaped stop is placed at the second reference angle of the test position. Adjust the position of the strip-shaped stop on the fixture substrate so that it abuts against the second corner of the FCBGA single product. Together with the L-shaped reference block, they complete the rapid horizontal positioning of the FCBGA single product.
[0018] Furthermore, the position of the strip-shaped stop can be adjusted according to the size of a single FCBGA product, enabling the aforementioned test position to quickly and accurately position and clamp FCBGA single products of various sizes and specifications.
[0019] 2. The horizontal and vertical slides allow for flexible adjustment of the position of the second guide bar's end. When FCBGA single products of various sizes and shapes (square, rectangle) are placed in the test position, the end of the second guide bar can abut against the second corner of the FCBGA single product, improving the versatility of the device and meeting the testing requirements of products of different sizes.
[0020] 3. The micro-slope or chamfer design in the area where the L-shaped reference block contacts the product side solves the compatibility issue of FCBGA single products with different thicknesses. When an FCBGA single product is placed, the side of the FCBGA single product contacts the first micro-slope or first chamfer, which can adapt to different package thicknesses, ensuring that the FCBGA single product can also be initially restricted and stabilized in the Z-axis direction (thickness direction), preventing tilting.
[0021] 4. The multiple test positions are arranged in an array, comprising m columns and n rows. Through this matrix layout design, this fixture can simultaneously hold and test multiple FCBGA products, increasing the number of products tested at once compared to traditional single-product or small-scale testing solutions. This significantly reduces the loading and unloading frequency of the testing machine, fully utilizes its resources, effectively overcomes production bottlenecks, and substantially increases production capacity.
[0022] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it according to the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail below with reference to the accompanying drawings. Attached Figure Description
[0023] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention.
[0024] Figure 1 This is a schematic diagram of the overall structure of the test fixture provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the strip-shaped block provided in an embodiment of the present invention; Figure 3 This is a block diagram illustrating the working principle of the test fixture provided in the present invention under test conditions. In the figure, 1. Fixture substrate; 2. Test position; 3. L-shaped reference block; 4. Strip block; 4-1. First guide bar; 4-2. Second guide bar; 5. Lateral guide rail; 6. FCBGA single product. Detailed Implementation
[0025] The following is in conjunction with the appendix Figure 1-3 The principles and features of the present invention are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of the invention. The invention is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the invention will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the invention.
[0026] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.
[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0028] Reference Figures 1-3 As shown, this invention provides an electrical performance testing fixture for a single FCBGA product. The FCBGA single product 6 has a rectangular structure.
[0029] Example 1 Electrical performance testing fixtures for individual FCBGA products include The fixture base plate 1 is fixedly mounted on an external flying probe tester; multiple rectangular test positions 2 are provided on the fixture base plate for placing individual FCBGA products; the size of the test position is larger than the size of the largest rectangular FCBGA product; each test position is an area that allows a single FCBGA product to be placed.
[0030] L-shaped reference block 3 is fixed at the first reference angle of the test position. The L-shaped reference block has an inner angle designed to match the first angle and two sides of the FCBGA single product. The fixture base plate has a fixing interface for fixing the L-shaped reference block, such as a countersunk hole, threaded hole or slot. The L-shaped reference block is fixed at the first reference angle of the test position by threaded connection or snap-fit.
[0031] The strip-shaped block 4 is set at the second reference angle of the test position, where the first reference angle and the second reference angle are two opposite reference angles of the diagonal of the test position; The first corner of the FCBGA single product abuts against the L-shaped reference block, and the adjusting strip block abuts against the second corner of the FCBGA single product; the first corner and the second corner are two opposite corners on the diagonal of the FCBGA single product.
[0032] In the above structure, two opposite angles on a diagonal of a rectangular test position are selected as the first reference angle and the second reference angle. A fixed L-shaped reference block is set on the first reference angle. The FCBGA single product is placed on the test position, and the first corner of the FCBGA single product is aligned with the first reference angle of the test position, achieving rapid and accurate reference positioning of the FCBGA single product on the test position. A strip-shaped stop is set at the second reference angle of the test position. The position of the strip-shaped stop on the fixture substrate is adjusted so that the strip-shaped stop abuts against the second corner of the FCBGA single product. Together with the L-shaped reference block, the two complete the rapid horizontal positioning of the FCBGA single product.
[0033] Furthermore, the position of the strip-shaped stop can be adjusted according to the size of a single FCBGA product, enabling the aforementioned test position to quickly and accurately position and clamp FCBGA single products of various sizes and specifications.
[0034] Example 2 Based on Example 1, a preferred structure for the strip-shaped stop is provided.
[0035] The strip-shaped stop includes a first guide bar 4-1 and a second guide bar 4-2. A transverse groove is provided on the fixture base plate. The first guide bar is arranged longitudinally and slides laterally on the transverse guide rail 5. A longitudinal groove is provided on the first guide bar, and the second guide bar slides longitudinally in the longitudinal groove. Based on the size of a single FCBGA product, the position of the first guide bar on the transverse groove and the position of the second guide bar on the longitudinal groove are adjusted so that the end of the second guide bar abuts against the second corner of the single FCBGA product.
[0036] The horizontal and vertical slides allow for flexible adjustment of the position of the second guide bar's end. When FCBGA single products of various sizes and shapes (square, rectangle) are placed in the test position, the end of the second guide bar can abut against the second corner of the FCBGA single product, improving the versatility of the device and meeting the testing requirements for products of different sizes.
[0037] Preferably, the end of the second guide strip is covered with soft rubber to prevent scratching the product.
[0038] Example 3 Based on Examples 1 and 2, the area where the L-shaped reference block contacts the FCBGA single product is provided with a first micro ramp or a first chamfer, and the angle between the first micro ramp and the horizontal plane, or the first chamfer, is an acute angle.
[0039] Operators can instantly and precisely position the FCBGA unit in the horizontal plane by simply placing its two adjacent sides (usually the two lower left sides) against the inner corner of the L-shaped reference block. The micro-slope or chamfer design of the L-shaped reference block on the vertical surface where it contacts the unit's side solves the compatibility issue for FCBGA units of different thicknesses. When the FCBGA unit is placed, its side contacting the first micro-slope or chamfer adapts to different package thicknesses, ensuring initial constraint and stability in the Z-axis direction (thickness direction) and preventing tilting.
[0040] By securing the product within the three-dimensional positioning space formed by the inner corner of the L-shaped reference block and the ramp surface, a stable initial position is provided for subsequent lateral clamping, greatly improving the overall stability of the clamping. Preferably, the acute angle is 30°~60°, and 45° is selected in the figure.
[0041] In Examples 1-3, the L-shaped reference block is located at the lower left corner of the test position, and the strip-shaped stop is located at the upper right corner of the test position.
[0042] In embodiments 1-3, the plurality of test positions are arranged in an array, comprising m columns and n rows; Figure 3 In the example of the 3×2 matrix in the middle embodiment, six products can be installed simultaneously. Through the matrix layout design, this fixture can simultaneously clamp and test multiple FCBGA products, increasing the number of products tested at once compared to traditional single-product or small-scale testing solutions. This significantly reduces the loading and unloading frequency of the testing machine, fully utilizes its resources, effectively overcomes production bottlenecks, and greatly increases production capacity. With its extremely high testing efficiency, wide versatility, and extremely low changeover and maintenance costs, this fixture can significantly reduce the testing cost per product in large-scale production, resulting in a high return on investment.
[0043] In Examples 1-3, the fixture base plate, which serves as the mounting foundation and bearing platform for the entire fixture, has high flatness, high rigidity and excellent dimensional stability. It is usually made of aluminum alloy, stainless steel or composite material through precision machining, such as Invar or precision aluminum alloy. Existing high-rigidity, low coefficient of thermal expansion materials are mainly used.
[0044] The present invention also provides an electrical performance testing system for FCBGA single products, including a flying probe tester and an electrical performance testing fixture for FCBGA single products as described above, which is used to fix the device on the flying probe tester.
[0045] This invention also provides a method for testing the electrical performance of a single FCBGA product, employing the electrical performance testing system for a single FCBGA product as described above. The method includes: S1: Place an FCBGA single product at each test position, with the first corner and two sides of the FCBGA single product attached to the inner corner of the L-shaped reference block.
[0046] S2: Adjust the strip stop block so that it fits against the second corner of the FCBGA single product; at this time, the adjusting stop block and the L-shaped reference block clamp the FCBGA single product.
[0047] S3: Load the electrical performance test fixture with the product into the flying probe tester. The fixture base plate of the electrical performance test fixture is fixedly installed on the flying probe tester.
[0048] S4: Start the test program. The flying probe will contact the solder balls of each product according to the preset path and complete the electrical performance test.
[0049] S5: After the test is completed, remove the clamp, loosen the strip block, take out the tested product, and place the new product to be tested in the new test. When the new product to be tested is a product model with a new size and specification, simply readjust the position of the block.
[0050] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Those skilled in the art can readily implement the present invention based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the present invention, utilizing the disclosed technical content, are equivalent embodiments of the present invention. Furthermore, any modifications, alterations, or variations made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the present invention.
Claims
1. A fixture for testing the electrical performance of a single FCBGA product, wherein the FCBGA product has a rectangular structure; characterized in that: include A fixture base plate is fixedly mounted on an external flying probe testing machine; multiple rectangular test positions are provided on the fixture base plate for placing individual FCBGA products; the size of the test positions is larger than the size of the largest rectangular FCBGA product. The L-shaped reference block is fixed at the first reference angle of the test position. The L-shaped reference block has an inner angle, which is designed to match the first angle and two sides of the FCBGA single product. A strip-shaped stop is provided at the second reference angle of the test position, where the first reference angle and the second reference angle are two opposite reference angles of the diagonal of the test position; The first corner of the FCBGA single product abuts against the L-shaped reference block, and the adjusting strip block abuts against the second corner of the FCBGA single product; the first corner and the second corner are two opposite corners on the diagonal of the FCBGA single product.
2. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: The strip-shaped stop includes a first guide strip and a second guide strip. A transverse groove is provided on the fixture base plate. The first guide strip is arranged longitudinally and slides laterally on the transverse guide rail. A longitudinal groove is provided on the first guide strip, and the second guide strip slides longitudinally within the longitudinal groove. Based on the size of a single FCBGA product, the position of the first guide strip on the transverse groove and the position of the second guide strip on the longitudinal groove are adjusted so that the end of the second guide strip abuts against the second corner of the single FCBGA product.
3. The electrical performance testing fixture for a single FCBGA product according to claim 2, characterized in that: The end of the second guide strip is covered with soft rubber.
4. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: A first micro ramp or a first chamfer is provided in the area where the L-shaped reference block contacts the FCBGA single product. The angle between the first micro ramp and the horizontal plane, or the first chamfer, is an acute angle.
5. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: The acute angle is 30°~60°.
6. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: The L-shaped reference block is located at the lower left corner of the test position, and the strip-shaped stop block is located at the upper right corner of the test position.
7. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: The test bits are arranged in an array, consisting of m columns and n rows.
8. The electrical performance testing fixture for a single FCBGA product according to claim 1, characterized in that: The fixture base plate is made of aluminum alloy, stainless steel, or composite material.
9. An electrical performance testing system for a single FCBGA product, characterized in that: It includes a flying probe tester and an electrical performance test fixture for a single FCBGA product as described in any one of claims 1-8, which is used to fix the device on the flying probe tester.
10. A method for testing the electrical performance of a single FCBGA product, characterized in that: The electrical performance testing system for a single FCBGA product as described in claim 9 is employed; the method includes: An FCBGA single product is placed at each test position, with the first corner and two sides of the FCBGA single product attached to the inner corner of the L-shaped reference block. Adjust the strip stop so that it fits against the second corner of the FCBGA single product; The fixture base plate is fixedly mounted on the flying probe testing machine table; Conduct electrical performance tests; The fixture substrate is removed from the flying probe tester and replaced with an untested FCBGA single product for a new round of testing.