Method and apparatus for evaluating a yield analysis tool

Abstract

The application discloses a yield analysis tool evaluation method and device, and relates to the technical field of EDA. The method comprises the following steps: performing function testing on a yield analysis tool to be evaluated, obtaining a first test result, and obtaining a first evaluation result corresponding to the function testing based on the first test result and a standard function test result; performing performance testing on the yield analysis tool to be evaluated, obtaining a second test result, and obtaining a second evaluation result corresponding to the performance testing based on the second test result and a standard performance test result; obtaining a third evaluation result of the yield analysis tool to be evaluated by a user; and performing comprehensive evaluation on the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result and the third evaluation result. In the application, the function testing, the performance testing and the subjective evaluation of the user are comprehensively considered to comprehensively evaluate the yield analysis tool, the accuracy of the evaluation on the yield analysis tool is improved, and the accuracy and effectiveness of the yield analysis tool are ensured.

Description

Technical Field

[0001] This application relates to the field of EDA technology, and in particular to an evaluation method and apparatus for yield analysis tools. Background Technology

[0002] In integrated circuit design and manufacturing, yield is a crucial metric, referring to the proportion of qualified products in a batch. A high yield directly impacts production costs, product quality, and market competitiveness. With the continued advancement of Moore's Law, chip feature sizes have entered the nanometer scale or even smaller. Even minute fluctuations in process parameters, such as slight changes in temperature, pressure, and material purity, can become significant factors affecting yield.

[0003] Especially in integrated circuits, some circuit modules that are repeated a lot, such as standard cell libraries and memory arrays, have extremely high yield requirements and are more significantly affected by fluctuations in process parameters. Furthermore, the performance and reliability of these modules directly affect the yield of the entire chip.

[0004] Therefore, using yield analysis tools during the design phase enables rapid and comprehensive assessment of the impact of process parameter variations on yield. These tools can also perform sensitivity analysis to identify factors (process parameters, process conditions, etc.) that significantly affect yield, which is of great importance for improving integrated circuit yield and optimizing design.

[0005] In conclusion, a more accurate evaluation method for yield analysis tools is needed to ensure their accuracy and effectiveness. Summary of the Invention

[0006] To address the aforementioned issues, this application provides an evaluation method and apparatus for yield analysis tools, which enables comprehensive evaluation of yield analysis tools, improves the accuracy of yield analysis tool evaluation, and thus ensures the accuracy and effectiveness of yield analysis tools.

[0007] The embodiments of this application disclose the following technical solutions:

[0008] Firstly, this application discloses an evaluation method for yield analysis tools, including:

[0009] Functional testing is performed on the yield analysis tool to be evaluated to obtain a first test result. Based on the first test result and the standard functional test result, a first evaluation result corresponding to the functional test is obtained. The first evaluation result includes: functional test passed or functional test failed.

[0010] A performance test is performed on the yield analysis tool to be evaluated, and a second test result is obtained. Based on the second test result and the standard performance test result, a second evaluation result corresponding to the performance test is obtained. The second evaluation result includes: performance test passed, functional test failed.

[0011] Obtain the user's third evaluation result for the yield analysis tool to be evaluated; wherein, the third evaluation result includes: subjective test passed, subjective test failed;

[0012] Based on the first evaluation result, the second evaluation result, and the third evaluation result, the yield analysis tool to be evaluated is comprehensively evaluated.

[0013] Optionally, the yield analysis tool is divided into four levels, from high to low: Level 1, Level 2, Level 3, and Level 4; the comprehensive evaluation of the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result, and the third evaluation result includes:

[0014] If the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as level four.

[0015] If the first evaluation result is that the functional test is passed and the second evaluation result is that the performance test is failed, then the yield analysis tool to be evaluated is rated as level three.

[0016] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is failed, then the level of the yield analysis tool to be evaluated is the second level.

[0017] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is passed, then the level of the yield analysis tool to be evaluated is the first level.

[0018] Optionally, the first test results include: design input test results, yield evaluation test results, and high Sigma yield analysis test results; the functional testing of the yield analysis tool to be evaluated to obtain the first test results includes:

[0019] Based on a pre-set set of test cases, design input tests are performed on the yield analysis tool to be evaluated to obtain design input test results; wherein, the pre-set set of test cases includes: design data in various formats;

[0020] Based on a preset set of simulation conditions, the yield analysis tool to be evaluated is subjected to simulation output testing to obtain simulation output test results; wherein, the preset set of simulation conditions includes: multiple sets of simulation conditions, each set of simulation conditions is used to indicate a corresponding set of process parameter variables and simulation configuration data;

[0021] Based on the preset high sigma conditions, the yield analysis tool to be evaluated is subjected to yield analysis test, and the yield analysis test results are obtained.

[0022] Optionally, the standard functional test results include: design input standard results, yield evaluation standard results, and high Sigma yield analysis standard results; the standard functional test results are obtained in the following ways:

[0023] Based on the preset test case set, design input tests are performed on the evaluated yield analysis tool to obtain the design input standard results;

[0024] Based on the preset set of simulation conditions, the evaluated yield analysis tool is subjected to simulation output testing to obtain the simulation output standard results.

[0025] Based on the preset high sigma condition, the evaluated yield analysis tool is subjected to yield analysis test to obtain the yield analysis standard result.

[0026] Optionally, obtaining the first evaluation result corresponding to the functional test based on the first test result and the standard functional test result includes:

[0027] Based on the design input test results and the design input standard results, a design input evaluation result is obtained; wherein, the design input evaluation result includes: design input test passed, design input test failed;

[0028] Based on the simulation output test results and the simulation output standard results, a simulation output evaluation result is obtained; wherein, the simulation output evaluation result includes: simulation output test passed, simulation output test failed;

[0029] Based on the yield analysis test results and the yield analysis standard results, a yield analysis evaluation result is obtained: wherein the yield analysis evaluation result includes: yield analysis test passed, yield analysis test failed;

[0030] Based on the design input evaluation results, the simulation output evaluation results, and the yield analysis evaluation results, a first evaluation result corresponding to the functional test is determined.

[0031] Optionally, when the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is evaluated as level four, including:

[0032] If the design input evaluation result is that the design input test passes, the simulation output evaluation result is that the simulation output test passes, but the yield analysis evaluation result is that the yield analysis test fails, then the level of the yield analysis tool to be evaluated is rated as Level 4.

[0033] Optionally, the yield analysis tool may further include a fifth level, which is lower than the fourth level, and the method may further include:

[0034] If the design input evaluation result is that the design input test fails, then the level of the yield analysis tool to be evaluated is level five.

[0035] If the design input evaluation result is that the design input test passes, but the simulation output evaluation result is that the simulation output test fails, then the level of the yield analysis tool to be evaluated is level five.

[0036] Optionally, the performance test of the yield analysis tool to be evaluated, to obtain a second test result, includes:

[0037] Based on preset test cases and preset simulation conditions, the performance test of the yield analysis tool to be evaluated is carried out to obtain a second test result; wherein, the second test result includes: running speed, memory resources occupied, storage space occupied, and whether multi-core and distributed processing are supported.

[0038] Secondly, this application discloses an evaluation device for a yield analysis tool, comprising:

[0039] The functional testing module is used to perform functional tests on the yield analysis tool to be evaluated, obtain a first test result, and obtain a first evaluation result corresponding to the functional test based on the first test result and the standard functional test result; wherein, the first evaluation result includes: functional test passed, functional test failed;

[0040] The performance testing module is used to perform performance tests on the yield analysis tool to be evaluated, obtain a second test result, and based on the second test result and the standard performance test result, obtain a second evaluation result corresponding to the performance test; wherein, the second evaluation result includes: performance test passed, functional test failed;

[0041] The result acquisition module is used to acquire the user's third evaluation result for the yield analysis tool to be evaluated; wherein, the third evaluation result includes: subjective test passed, subjective test failed;

[0042] The comprehensive evaluation module is used to comprehensively evaluate the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result, and the third evaluation result.

[0043] Optionally, the yield analysis tool is divided into four levels, from highest to lowest: Level 1, Level 2, Level 3, and Level 4; the comprehensive evaluation module is specifically used for:

[0044] If the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as level four.

[0045] If the first evaluation result is that the functional test is passed and the second evaluation result is that the performance test is failed, then the yield analysis tool to be evaluated is rated as level three.

[0046] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is failed, then the level of the yield analysis tool to be evaluated is the second level.

[0047] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is passed, then the level of the yield analysis tool to be evaluated is the first level.

[0048] Compared to existing technologies, this application offers the following advantages: It integrates functional testing, performance testing, and user subjective evaluation to provide a comprehensive assessment of yield analysis tools, improving the accuracy of these assessments and ensuring their accuracy and effectiveness, thus avoiding potential design errors and performance issues. Furthermore, accurate evaluation of yield analysis tools facilitates faster iterative updates. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0050] Figure 1 An example diagram illustrating the input and output of a yield analysis tool provided in this application embodiment;

[0051] Figure 2 A flowchart illustrating an evaluation method for a yield analysis tool provided in this application embodiment;

[0052] Figure 3 A flowchart illustrating the functional testing process of a yield analysis tool provided in this application embodiment;

[0053] Figure 4 A schematic diagram of a process for obtaining a first evaluation result provided in an embodiment of this application;

[0054] Figure 5 A flowchart illustrating the comprehensive yield analysis tool provided in the embodiments of this application;

[0055] Figure 6 This is a schematic diagram of the structure of an evaluation device for a yield analysis tool provided in an embodiment of this application. Detailed Implementation

[0056] As described above, analysis using yield analysis tools (yield analysis, sensitivity analysis, etc.) during the design phase is of great significance for improving the yield of integrated circuits and optimizing the design. Therefore, verification and evaluation are crucial for the development and improvement of yield analysis tools. Verification and evaluation of yield analysis tools can ensure the accuracy and reliability of yield analysis tools in design, simulation, and analysis, and avoid potential design errors and performance problems.

[0057] This application provides an evaluation method for a yield analysis tool, comprising: performing functional testing on the yield analysis tool to be evaluated to obtain a first test result, and obtaining a first evaluation result corresponding to the functional test based on the first test result and standard functional test results; performing performance testing on the yield analysis tool to be evaluated to obtain a second test result, and obtaining a second evaluation result corresponding to the performance test based on the second test result and standard performance test results; obtaining a third evaluation result from the user regarding the yield analysis tool to be evaluated; and performing a comprehensive evaluation of the yield analysis tool based on the first evaluation result, the second evaluation result, and the third evaluation result. In this embodiment, functional testing, performance testing, and the user's subjective evaluation are integrated to conduct a comprehensive evaluation of the yield analysis tool, improving the accuracy of the yield analysis tool evaluation, thereby ensuring the accuracy and effectiveness of the yield analysis tool and avoiding potential design errors and performance problems.

[0058] Furthermore, accurate evaluation of yield analysis tools can help accelerate their iterative updates.

[0059] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0060] Example 1:

[0061] The following is combined with Figures 1-5 This paper will provide a detailed description of the evaluation method for a yield analysis tool provided in the embodiments of this application.

[0062] Before introducing the evaluation method of a yield analysis tool provided in the embodiments of this application, we will first combine... Figure 1 Let's take an example to illustrate the input and output of a yield analysis tool.

[0063] like Figure 1 As shown, the inputs to the yield analysis tool include three aspects of data: design data, process parameter variables, and simulation configuration data.

[0064] Design data is one of the basic inputs for yield analysis tools. It refers to the various data and files generated and used in the integrated circuit design process, which describe the circuit's logical function, physical results, and manufacturing requirements.

[0065] For example, design data includes: netlist files, schematic files, layout files, design rule files, etc.

[0066] Taking a netlist file as an example, a netlist file contains all the connection information and component parameters of an integrated circuit. For example, a netlist file includes: a component list, connection information, and parameter values. The component list lists all components in the integrated circuit (such as resistors, capacitors, transistors, etc.), the connection information describes the connection relationships between each component, and the parameter values ​​are the specific parameter values ​​for each component.

[0067] Process variation parameters refer to process parameters that may change during the integrated circuit manufacturing process. Changes in these parameters can affect the performance of integrated circuits and thus the yield.

[0068] Specifically, process variables include, but are not limited to: threshold voltage (Vth), bias voltage (Vbias), electron mobility (μ), and gate oxide thickness (Tox).

[0069] Threshold voltage (Vth) refers to the voltage required for a gate-controlled transistor to turn on. Fluctuations in the threshold voltage affect the transistor's turn-on and turn-off characteristics, thus impacting circuit performance and power consumption. Bias voltage (Vbias) refers to the voltage between the base and emitter and between the collector and base when the transistor is in amplification mode. Changes in bias voltage affect the transistor's gain and linearity, thus affecting amplifier performance. A correct bias voltage ensures that an amplifier composed of transistors will not distort signals during signal amplification. Electron mobility (μ) refers to the conductivity of charge carriers, determining the conductivity of a semiconductor. Changes in electron mobility affect the transistor's switching speed and current drive capability. Gate oxide thickness (Tox) refers to the thickness of the insulating layer between the transistor gate and the semiconductor substrate. Changes in gate oxide thickness affect the transistor's threshold voltage and leakage current.

[0070] The simulation configuration data includes: simulator configuration data and model configuration data.

[0071] The simulator configuration data includes: the compatible simulator type data, the simulator's simulation type data, and the simulation process corner data, etc.

[0072] The compatible emulator type data indicates the compatible emulator type. Specifically, the compatible emulator type (e.g., HSPICE, Spectre, etc.) needs to be determined based on the type of integrated circuit to be simulated and the simulation purpose.

[0073] The simulator's simulation type data indicates the type of simulation used by the simulator. Specifically, different simulation types are suitable for different simulation needs. Common simulation types include: DC simulation, AC simulation, transient simulation, and noise simulation. DC simulation is used to analyze the behavior of test cases (integrated circuits) under steady-state conditions; AC simulation is used to analyze the behavior of test cases (integrated circuits) in the frequency domain, such as frequency response; transient simulation is used to analyze the behavior of test cases (integrated circuits) in the time domain, such as signal propagation and dynamic response; and noise simulation is used to analyze the noise characteristics of test cases (integrated circuits).

[0074] Simulation process corner data is used to indicate the simulation process corner during the simulation process. A simulation process corner (ProcessCorner) refers to different conditions during manufacturing, caused by variations in process parameters, leading to fluctuations in integrated circuit performance within a certain range. These conditions are typically categorized into several typical simulation process corners, each representing a specific set of process parameter values. Specifically, common simulation process corners include: Typical-Typical (TT), Fast-Fast (FF), Slow-Slow (SS), Fast-Slow (FS), and Slow-Fast (SF), etc.

[0075] The model configuration data includes: simulation model data, sampling method data, and simulation parameter data.

[0076] Simulation model data is used to indicate the appropriate simulation model. Specifically, the appropriate simulation model is determined based on the simulation objective and resource constraints. For example, a traditional Monte Carlo simulation model can be selected if high-precision simulation results are required; a device simulation model can be selected if rapid simulation is required.

[0077] Sampling method data indicates the sampling method used. Common sampling methods include: random sampling, stratified sampling, and importance sampling.

[0078] Simulation parameter data is used to indicate the corresponding simulation parameters. Simulation parameters include: sample size, seed value, convergence criterion, simulation time step, etc.

[0079] like Figure 1 As shown, the simulation results output by the yield analysis tool include: yield value, ranking, actual number of Monte Carlo simulations, simulation time, etc.

[0080] The yield value refers to the proportion of all simulation samples that meet the performance specifications.

[0081] Ranking refers to sorting simulation results based on certain key parameters or performance indicators to identify critical factors affecting yield. In other words, ranking allows for the rapid identification of parameters with the greatest impact on yield, enabling targeted optimization.

[0082] The actual Monte Carlo simulation runs refer to the number of Monte Carlo simulations actually performed during the simulation process. The actual number of Monte Carlo simulation runs helps users understand the sample size of the simulation, thereby assessing the statistical significance of the results.

[0083] Simulation time refers to the time taken to complete the entire simulation process. Simulation time helps users evaluate the performance and efficiency of tools, especially when dealing with large-scale simulations.

[0084] The above combination Figure 1 An example was given illustrating the inputs and outputs of the yield analysis tool. The following section will combine... Figure 2 This application provides a detailed description of an evaluation method for a yield analysis tool.

[0085] like Figure 2 As shown in the embodiments of this application, the evaluation method for a yield analysis tool includes the following steps:

[0086] S201. Perform functional testing on the yield analysis tool to be evaluated, obtain the first test result, and based on the first test result and the standard functional test result, obtain the first evaluation result corresponding to the functional test.

[0087] The first evaluation result includes: functional test passed, functional test failed.

[0088] Functional testing is used to verify whether the yield analysis tool can correctly perform its designed functions, including supporting different input formats, handling various simulation conditions, and generating accurate simulation results.

[0089] In one possible implementation, functional testing includes: design input testing, yield evaluation testing, and high sigma yield analysis testing.

[0090] To make it easier to understand, the following will be combined with... Figure 3 This paper details how the yield analysis tool is tested to obtain the first test result in the embodiments of this application.

[0091] S301. Based on the preset test case set, perform design input tests on the yield analysis tool to be evaluated, and obtain the design input test results.

[0092] The preset test case set includes design data in various formats, such as schematics and netlist files in various formats.

[0093] Furthermore, the design data in the preset test case set in various formats are generally design data for integrated circuits with high yield requirements, such as integrated circuits that include modules with many repetitions (e.g., SRAM, DFF, etc.) or integrated circuits that contain devices that are sensitive to changes in process parameters (e.g., filters, comparators, etc.).

[0094] The purpose of the design input test is to verify whether the yield analysis tool supports commonly used design data input formats. For example, the design input test verifies whether the yield analysis tool being evaluated supports schematic input and netlist file input in different formats (e.g., .sp, .scs, .cdl, etc.).

[0095] The design input test results indicate the formats of the design data in the preset test case set supported by the yield analysis tool to be evaluated, as well as the total number of supported formats. For example, if the design input test results include format A and format B, it means that the yield analysis tool to be evaluated supports the formats of the design data in the preset test case set as format A and format B, and supports two formats.

[0096] Specifically, the design data from the preset test case set, along with the same process parameter variables and simulation configuration data, are input into the yield analysis tool to be evaluated to obtain the design input test results.

[0097] S302. Based on the preset set of simulation conditions, perform simulation output testing on the yield analysis tool to be evaluated, and obtain the simulation output test results.

[0098] The preset set of simulation conditions includes multiple sets of simulation conditions, each set of simulation conditions being used to indicate a corresponding set of process parameter variables and simulation configuration data.

[0099] The purpose of the yield evaluation test is to verify whether the yield analysis tool can output correct simulation results under different simulation conditions. Specifically, different simulation conditions are set to check whether the yield analysis tool can output the corresponding simulation results.

[0100] Specifically, the process parameter variables and simulation configuration data indicated by each set of simulation conditions in the preset simulation condition set, along with the same design data, are input into the yield analysis tool to be evaluated to obtain the simulation output test results. It should be noted that the simulation output test results include simulation results corresponding to multiple sets of simulation conditions.

[0101] S303. Based on the preset high sigma conditions, perform yield analysis tests on the yield analysis tool to be evaluated, and obtain the yield analysis test results.

[0102] The purpose of high Sigma yield analysis testing is to verify whether the yield analysis tool supports high Sigma yield analysis, that is, whether it can accurately assess events with extremely low failure probability under high Sigma conditions.

[0103] High sigma events refer to events with an extremely low probability of failure, and are commonly found in integrated circuits containing a large number of repeating cells (e.g., SRAM, DFF).

[0104] In one possible implementation, the yield analysis test results include whether the yield analysis tool to be evaluated supports preset high sigma analysis, and even the highest sigma condition supported by the yield analysis tool to be evaluated.

[0105] Through such Figure 3 The process shown yields the first test results, which include: design input test results, yield evaluation test results, and high Sigma yield analysis test results.

[0106] The standard functional test results serve as a benchmark for evaluating / comparing whether the functional tests have passed. Similarly, the standard functional test results include: design input standard results, yield evaluation standard results, and high Sigma yield analysis standard results.

[0107] In one possible implementation, the standard functional test results are obtained as follows:

[0108] Based on a pre-set set of test cases, the evaluated yield analysis tool is subjected to design input testing to obtain standard design input results; based on a pre-set set of simulation conditions, the evaluated yield analysis tool is subjected to simulation output testing to obtain standard simulation output results; based on pre-set high sigma conditions, the evaluated yield analysis tool is subjected to yield analysis testing to obtain standard yield analysis results.

[0109] The preset test case set, preset simulation condition set, and preset high sigma condition are the same as the preset test case set, preset simulation condition set, and preset high sigma condition used to obtain the first test result.

[0110] In another possible implementation, the standard functional test results can be pre-set, that is, pre-set design input standard results, yield evaluation standard results, and high Sigma yield analysis standard results.

[0111] To make it easier to understand, the following will be combined with... Figure 4 This section will explain in detail how to obtain the first evaluation result corresponding to the functional test.

[0112] S401. Based on the design input test results and design input standard results, obtain the design input evaluation results.

[0113] The design input evaluation results include: design input test passed, and design input test failed.

[0114] For example, when the design input test results include design data supporting formats A, B, and C, and the design input standard results include design data supporting formats A and B, the design input test results indicate that the design input of the yield analysis tool to be evaluated supports more formats than the yield analysis tools that have been evaluated. In this case, the design input evaluation result is determined to be a design input test pass.

[0115] For example, when the design input test results include design data supporting formats A and B, and the design input standard results include design data supporting formats A, B, and C, the design input test results indicate that the design input of the yield analysis tool to be evaluated supports fewer formats than the yield analysis tools that have been evaluated. In this case, the design input evaluation result is determined to be that the design input test has failed.

[0116] S402. Based on the simulation output test results and the simulation output standard results, the simulation output evaluation results are obtained.

[0117] The simulation output evaluation results include: simulation output test passed, simulation output test failed.

[0118] For example, if the relative error between the simulation output test result and the simulation output standard result is less than a threshold, the simulation output evaluation result is determined to be a simulation output test pass; if the relative error is not less than the threshold, the simulation output evaluation result is determined to be a simulation output fail.

[0119] S403. Based on the yield analysis test results and yield analysis standard results, the yield analysis evaluation results are obtained.

[0120] The yield analysis and evaluation results include: yield analysis test passed, yield analysis test failed.

[0121] Specifically, when the yield analysis test result shows that the yield analysis supports 6 sigma conditions, and the yield analysis standard result shows that the yield analysis supports 5 sigma conditions, it indicates that the high sigma conditions supported by the design input of the yield analysis tool to be evaluated are better than those of the evaluated yield analysis tools. In this case, the yield analysis evaluation result is determined to be a pass of the yield analysis test.

[0122] For example, if the yield analysis test result shows that the yield analysis supports 5 sigma conditions, and the yield analysis standard result shows that the yield analysis supports 6 sigma conditions, it indicates that the high sigma conditions supported by the design input of the yield analysis tool to be evaluated are lower than those of the evaluated yield analysis tools. In this case, the yield analysis evaluation result is determined to be that the yield analysis test has failed.

[0123] S404. Based on the design input evaluation results, simulation output evaluation results, and yield analysis evaluation results, determine the first evaluation result corresponding to the functional test.

[0124] In one possible implementation, if one or more tests fail among the design input evaluation results, simulation output evaluation results, and yield analysis evaluation results, the first evaluation result is that the functional test fails; if all three tests pass, the first evaluation result is that the functional test passes.

[0125] The above combination Figure 2 and Figure 3 The specific implementation of S201 has been detailed. The following section will continue with... Figure 2 This application introduces an evaluation method for a yield analysis tool provided in its embodiments.

[0126] S202. Perform performance testing on the yield analysis tool to be evaluated, obtain the second test results, and based on the second test results and the standard performance test results, obtain the second evaluation results corresponding to the performance test.

[0127] The second evaluation result includes: performance test passed, performance test failed.

[0128] Among them, performance testing is to verify / evaluate the efficiency, response time, resource usage, and stability of yield analysis tools under specific conditions.

[0129] In one possible implementation, performance testing is performed on the yield analysis tool to be evaluated based on preset test cases and preset simulation conditions to obtain a second test result.

[0130] The second test results include: runtime, memory usage, storage space usage, and whether multi-core and distributed processing are supported.

[0131] The running speed refers to the speed at which the yield analysis tool operates when analyzing the integrated circuit corresponding to the design data, including compilation speed and simulation speed. Specifically, compilation speed refers to the compilation time from inputting design data to starting simulation, and simulation speed refers to the time required for the yield analysis tool to complete one simulation.

[0132] Running speed can assess whether the yield analysis tool being evaluated can complete the analysis task within a reasonable time, especially when dealing with large-scale integrated circuits.

[0133] The memory resources used refer to the memory resources consumed by the yield analysis tool during operation. For example, the maximum memory usage and average memory usage of the yield analysis tool during simulation can be tested.

[0134] The memory resources used can be used to assess whether the yield analysis tool being evaluated will cause insufficient system memory resources when performing analysis tasks.

[0135] The storage space occupied refers to the storage space required by the yield analysis tool, as well as the storage space required by the intermediate files and output files generated during the analysis process. For example, it can be the disk space required for the test yield analysis installation, the size of the intermediate files generated during the simulation process, and the size of the output files generated after the simulation is completed.

[0136] Among them, whether or not multi-core and distributed processing is supported refers to whether the yield analysis tool supports multi-core processors and distributed computing to improve the processing speed of large-scale designs.

[0137] The standard performance test results serve as a benchmark for evaluating / comparing whether the performance test passed.

[0138] In one possible implementation, performance testing is performed on the evaluated yield analysis tool based on preset test cases and preset simulation conditions to obtain standard performance test results. The preset test cases and preset simulation conditions are the same as those used for performance testing of the yield analysis tool to be evaluated.

[0139] Specifically, standard performance test results include: standard runtime, standard memory usage, standard storage usage, and whether the system supports multi-core and distributed processing.

[0140] For example, if the running speed in the second test result is not slower than / longer than the standard running speed (relative error within the preset running speed range), the memory resources occupied in the second test result are not greater than the standard memory resources occupied (relative error within the preset memory resources range), the storage space occupied in the second test result is not greater than the standard storage space occupied (relative error within the preset storage space range), and the second test result is the same as the standard for whether or not multi-core and distributed processing is supported, then the second evaluation result is a performance test pass; if any of the above conditions are not met, then the second evaluation result is a performance test fail.

[0141] S203. Obtain the user's third evaluation result for the yield analysis tool to be evaluated.

[0142] The third assessment result includes whether the subjective test was passed or failed.

[0143] The third evaluation result is the subjective test / analysis result of the user (expert, technical task in the technical field) on the yield analysis tool to be evaluated.

[0144] For example, the user's third evaluation result for the yield analysis tool to be evaluated is the third evaluation result obtained by the user regarding the ease of use, scalability and maintainability of the yield analysis tool to be evaluated.

[0145] In this context, ease of use refers to whether the user interface of the yield analysis tool is intuitive and simple; whether the usage process is clear and the operation is convenient; whether it provides automatic options that meet user expectations / usage needs; and whether it provides detailed user manuals, tutorials, and examples that enable users to quickly get started with the yield analysis tool.

[0146] Among them, scalability refers to whether the yield analysis tool supports custom plugins to extend its functionality or integrate with other EDA tools; whether the yield analysis tool provides customization options or interfaces (APIs); and whether the yield analysis tool supports use on different operating systems, with attention paid to compatibility and stability during use.

[0147] Among them, maintainability refers to the ability of the yield analysis tool to handle errors or anomalies, whether the provided error messages or solutions can resolve the errors / anomalies; whether the yield analysis tool has version control and update strategies to ensure timely fixes and feature enhancements; and whether the yield analysis tool provides technical support.

[0148] S204. Based on the first evaluation result, the second evaluation result, and the third evaluation result, a comprehensive evaluation is conducted on the yield analysis tool to be evaluated.

[0149] In one possible implementation, the yield analysis tool is divided into four levels: Level 1, Level 2, Level 3, and Level 4, ranked from highest to lowest. That is, when the yield analysis tool is rated as Level 1, it indicates that the tool's performance is optimal.

[0150] For example, the first, second, third, and fourth levels can be excellent, good, satisfactory, and unsatisfactory.

[0151] In one possible implementation, if the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as Level 4; if the first evaluation result is that the functional test passes and the second evaluation result is that the performance test fails, the yield analysis tool to be evaluated is rated as Level 3; if the first evaluation result is that the functional test passes, the second evaluation result is that the performance test passes, but the third evaluation result is that the subjective test fails, the yield analysis tool to be evaluated is rated as Level 2; and if the first evaluation result is that the functional test passes, the second evaluation result is that the performance test passes, but the third evaluation result is that the subjective test passes, the yield analysis tool to be evaluated is rated as Level 1.

[0152] To make it easier to understand, the following will be combined with... Figure 5 This paper will introduce how the yield analysis tool is comprehensively evaluated in the embodiments of this application.

[0153] S501. Determine whether the first evaluation result is that the functional test has passed.

[0154] If not, that is, if the first evaluation result is that the functional test fails, then the yield analysis tool to be evaluated is rated as Level 4.

[0155] In one possible implementation, the yield analysis tool may also include a fifth level, which is lower than the fourth level.

[0156] If the design input evaluation result is that the design input test passes, the simulation output evaluation result is that the simulation output test passes, but the yield analysis evaluation result is that the yield analysis test fails, then the yield analysis tool to be evaluated is rated as Level 4.

[0157] If the design input evaluation result is that the design input test fails, the yield analysis tool to be evaluated will be rated as Level 5.

[0158] If the design input evaluation result is that the design input test passes, but the simulation output evaluation result is that the simulation output test fails, then the yield analysis tool to be evaluated is rated as Level 5.

[0159] It should be noted that if the design input evaluation result is that the design input test fails, the yield analysis tool to be evaluated will be directly rated as Level 5, and no further evaluation of the subsequent simulation output results will be conducted.

[0160] If so, that is, when the first evaluation result is that the functional test passes, then proceed to S502.

[0161] S502. Determine whether the second evaluation result is a performance test pass.

[0162] If not, that is, if the second evaluation result is that the performance test fails, then the yield analysis tool to be evaluated is rated as level three.

[0163] If so, that is, when the first evaluation result is that the performance test passes, then proceed to S503.

[0164] S503. Determine whether the third evaluation result is a passing subjective test.

[0165] If not, that is, if the third evaluation result is that the subjective test fails, then the yield analysis tool to be evaluated is rated as Level 2.

[0166] If so, that is, when the third evaluation result is that the subjective test is passed, then the level of the yield analysis tool to be evaluated is the first level.

[0167] This application provides an evaluation method for a yield analysis tool, comprising: performing functional testing on the yield analysis tool to be evaluated to obtain a first test result, and obtaining a first evaluation result corresponding to the functional test based on the first test result and standard functional test results; performing performance testing on the yield analysis tool to be evaluated to obtain a second test result, and obtaining a second evaluation result corresponding to the performance test based on the second test result and standard performance test results; obtaining a third evaluation result from the user regarding the yield analysis tool to be evaluated; and performing a comprehensive evaluation of the yield analysis tool based on the first evaluation result, the second evaluation result, and the third evaluation result. In this application embodiment, functional testing, performance testing, and the user's subjective evaluation are integrated to conduct a comprehensive evaluation of the yield analysis tool, improving the accuracy of the yield analysis tool evaluation, thereby ensuring the accuracy and effectiveness of the yield analysis tool and avoiding potential design errors and performance problems. Furthermore, accurate evaluation of the yield analysis tool helps to accelerate its iterative updates.

[0168] Example 2:

[0169] The following is combined with Figure 6 This application provides a detailed description of an evaluation device for a yield analysis tool.

[0170] like Figure 6 As shown, the evaluation device for a yield analysis tool provided in this application embodiment includes the following modules:

[0171] The functional testing module 601 is used to perform functional testing on the yield analysis tool to be evaluated, obtain a first test result, and obtain a first evaluation result corresponding to the functional test based on the first test result and the standard functional test result; wherein, the first evaluation result includes: functional test passed, functional test failed;

[0172] The performance testing module 602 is used to perform performance testing on the yield analysis tool to be evaluated, obtain a second test result, and obtain a second evaluation result corresponding to the performance test based on the second test result and the standard performance test result; wherein, the second evaluation result includes: performance test passed, functional test failed;

[0173] The result acquisition module 603 is used to acquire the user's third evaluation result for the yield analysis tool to be evaluated; wherein, the third evaluation result includes: subjective test passed, subjective test failed;

[0174] The comprehensive evaluation module 604 is used to conduct a comprehensive evaluation of the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result, and the third evaluation result.

[0175] In one possible implementation, the yield analysis tool is divided into four levels, from highest to lowest: Level 1, Level 2, Level 3, and Level 4. The comprehensive evaluation module 604 is specifically used for:

[0176] If the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated will be rated as Level 4.

[0177] If the first evaluation result is that the functional test is passed and the second evaluation result is that the performance test is failed, then the yield analysis tool to be evaluated is rated as Level 3.

[0178] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is failed, then the yield analysis tool to be evaluated is rated as Level 2.

[0179] If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is passed, then the yield analysis tool to be evaluated is rated as Level 1.

[0180] In one possible implementation, the first test results include: design input test results, yield evaluation test results, and high Sigma yield analysis test results. Functional test module 601 is specifically used for:

[0181] Based on a pre-set set of test cases, design input tests are performed on the yield analysis tool to be evaluated to obtain design input test results; the pre-set set of test cases includes design data in various formats;

[0182] Based on a preset set of simulation conditions, the yield analysis tool to be evaluated is subjected to simulation output testing to obtain simulation output test results. The preset set of simulation conditions includes multiple sets of simulation conditions, each set of simulation conditions being used to indicate a corresponding set of process parameter variables and simulation configuration data.

[0183] Based on the preset high sigma conditions, yield analysis tests are performed on the yield analysis tool to be evaluated, and the yield analysis test results are obtained.

[0184] In one possible implementation, the test module 601 is specifically used for:

[0185] Based on the design input test results and the design input standard results, the design input evaluation results are obtained; among them, the design input evaluation results include: design input test passed, and design input test failed.

[0186] Based on the simulation output test results and the simulation output standard results, the simulation output evaluation results are obtained; among them, the simulation output evaluation results include: simulation output test passed, simulation output test failed;

[0187] Based on the yield analysis test results and yield analysis standard results, the yield analysis evaluation results are obtained: the yield analysis evaluation results include: yield analysis test passed and yield analysis test failed.

[0188] Based on the design input evaluation results, simulation output evaluation results, and yield analysis evaluation results, the first evaluation result corresponding to the functional test is determined.

[0189] In one possible implementation, the comprehensive evaluation module 604 is specifically used to evaluate the yield analysis tool to be evaluated as level four when the design input evaluation result is that the design input test passes, the simulation output evaluation result is that the simulation output test passes, but the yield analysis evaluation result is that the yield analysis test fails.

[0190] In one possible implementation, the yield analysis tool's level also includes a fifth level, which is lower than the fourth level. The comprehensive evaluation module 604 is further configured to evaluate the yield analysis tool to level five if the design input evaluation result indicates that the design input test failed; and to evaluate the yield analysis tool to level five if the design input evaluation result indicates that the design input test passed, but the simulation output evaluation result indicates that the simulation output test failed.

[0191] In one possible implementation, the performance testing module 602 is specifically used to perform performance testing on the yield analysis tool to be evaluated based on preset test cases and preset simulation conditions, and obtain a second test result; wherein the second test result includes: running speed, memory resources occupied, storage space occupied, and whether multi-core and distributed processing are supported.

[0192] This application provides an evaluation device for a yield analysis tool, including: a functional testing module 601, used to perform functional testing on the yield analysis tool to be evaluated, obtain a first test result, and obtain a first evaluation result corresponding to the functional test based on the first test result and a standard functional test result; a performance testing module 602, used to perform performance testing on the yield analysis tool to be evaluated, obtain a second test result, and obtain a second evaluation result corresponding to the performance test based on the second test result and a standard performance test result; a result acquisition module 603, used to acquire a third evaluation result from the user regarding the yield analysis tool to be evaluated; and a comprehensive evaluation module 604, used to perform a comprehensive evaluation of the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result, and the third evaluation result. In this application embodiment, functional testing, performance testing, and the user's subjective evaluation are integrated to perform a comprehensive evaluation of the yield analysis tool, improving the accuracy of the yield analysis tool evaluation, thereby ensuring the accuracy and effectiveness of the yield analysis tool and avoiding potential design errors and performance problems. Furthermore, accurate evaluation of the yield analysis tool helps to accelerate its iterative updates.

[0193] It should be noted that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for the method and apparatus embodiments, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiments. The method and apparatus embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components indicated as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of the solution in this embodiment according to actual needs. Those skilled in the art can understand and implement this without creative effort.

[0194] The above description is merely one specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An evaluation method for a yield analysis tool, characterized in that, include: Functional testing is performed on the yield analysis tool to be evaluated to obtain a first test result. Based on the first test result and the standard functional test result, a first evaluation result corresponding to the functional test is obtained. The first evaluation result includes: functional test passed or functional test failed. A performance test is performed on the yield analysis tool to be evaluated, and a second test result is obtained. Based on the second test result and the standard performance test result, a second evaluation result corresponding to the performance test is obtained. The second evaluation result includes: performance test passed, functional test failed. Obtain the user's third evaluation result for the yield analysis tool to be evaluated; wherein, the third evaluation result includes: subjective test passed, subjective test failed; Based on the first evaluation result, the second evaluation result, and the third evaluation result, the yield analysis tool to be evaluated is comprehensively evaluated.

2. The method according to claim 1, characterized in that, The yield analysis tool is divided into four levels, from highest to lowest: Level 1, Level 2, Level 3, and Level 4. The comprehensive evaluation of the yield analysis tool based on the first evaluation result, the second evaluation result, and the third evaluation result includes: If the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as level four. If the first evaluation result is that the functional test is passed and the second evaluation result is that the performance test is failed, then the yield analysis tool to be evaluated is rated as level three. If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is failed, then the level of the yield analysis tool to be evaluated is the second level. If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is passed, then the level of the yield analysis tool to be evaluated is the first level.

3. The method according to claim 2, characterized in that, The first test results include: design input test results, yield evaluation test results, and high sigma yield analysis test results; the functional testing of the yield analysis tool to be evaluated, to obtain the first test results, includes: Based on a pre-set set of test cases, design input tests are performed on the yield analysis tool to be evaluated to obtain design input test results; wherein, the pre-set set of test cases includes: design data in various formats; Based on a preset set of simulation conditions, the yield analysis tool to be evaluated is subjected to simulation output testing to obtain simulation output test results; wherein, the preset set of simulation conditions includes: multiple sets of simulation conditions, each set of simulation conditions is used to indicate a corresponding set of process parameter variables and simulation configuration data; Based on the preset high sigma conditions, the yield analysis tool to be evaluated is subjected to yield analysis test, and the yield analysis test results are obtained.

4. The method according to claim 3, characterized in that, The standard functional test results include: design input standard results, yield evaluation standard results, and high Sigma yield analysis standard results; the standard functional test results are obtained in the following ways: Based on the preset set of test cases, design input tests are performed on the evaluated yield analysis tool to obtain the design input standard results; Based on the preset set of simulation conditions, the evaluated yield analysis tool is subjected to simulation output testing to obtain the simulation output standard results. Based on the preset high sigma condition, the evaluated yield analysis tool is subjected to yield analysis test to obtain the yield analysis standard result.

5. The method according to claim 4, characterized in that, The first evaluation result corresponding to the functional test is obtained based on the first test result and the standard functional test result, including: Based on the design input test results and the design input standard results, a design input evaluation result is obtained; wherein, the design input evaluation result includes: design input test passed, design input test failed; Based on the simulation output test results and the simulation output standard results, a simulation output evaluation result is obtained; wherein, the simulation output evaluation result includes: simulation output test passed, simulation output test failed; Based on the yield analysis test results and the yield analysis standard results, a yield analysis evaluation result is obtained: wherein the yield analysis evaluation result includes: yield analysis test passed, yield analysis test failed; Based on the design input evaluation results, the simulation output evaluation results, and the yield analysis evaluation results, a first evaluation result corresponding to the functional test is determined.

6. The method according to claim 5, characterized in that, When the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as level four, including: If the design input evaluation result is that the design input test passes, the simulation output evaluation result is that the simulation output test passes, but the yield analysis evaluation result is that the yield analysis test fails, then the level of the yield analysis tool to be evaluated is rated as Level 4.

7. The method according to claim 6, characterized in that, The yield analysis tool also includes a fifth level, which is lower than the fourth level, and the method further includes: If the design input evaluation result is that the design input test fails, then the level of the yield analysis tool to be evaluated is level five. If the design input evaluation result is that the design input test passes, but the simulation output evaluation result is that the simulation output test fails, then the level of the yield analysis tool to be evaluated is level five.

8. The method according to claim 1, characterized in that, The performance test of the yield analysis tool to be evaluated yields the second test results, including: Based on preset test cases and preset simulation conditions, the performance test of the yield analysis tool to be evaluated is carried out to obtain a second test result; wherein, the second test result includes: running speed, memory resources occupied, storage space occupied, and whether multi-core and distributed processing are supported.

9. An evaluation device for a yield analysis tool, characterized in that, include: The functional testing module is used to perform functional tests on the yield analysis tool to be evaluated, obtain a first test result, and obtain a first evaluation result corresponding to the functional test based on the first test result and the standard functional test result; wherein, the first evaluation result includes: functional test passed, functional test failed; The performance testing module is used to perform performance tests on the yield analysis tool to be evaluated, obtain a second test result, and based on the second test result and the standard performance test result, obtain a second evaluation result corresponding to the performance test; wherein, the second evaluation result includes: performance test passed, functional test failed; The result acquisition module is used to acquire the user's third evaluation result for the yield analysis tool to be evaluated; wherein, the third evaluation result includes: subjective test passed, subjective test failed; The comprehensive evaluation module is used to comprehensively evaluate the yield analysis tool to be evaluated based on the first evaluation result, the second evaluation result, and the third evaluation result.

10. The apparatus according to claim 9, characterized in that, The yield analysis tool is divided into four levels, from highest to lowest: Level 1, Level 2, Level 3, and Level 4; the comprehensive evaluation module is specifically used for: If the first evaluation result is that the functional test fails, the yield analysis tool to be evaluated is rated as level four. If the first evaluation result is that the functional test is passed and the second evaluation result is that the performance test is failed, then the yield analysis tool to be evaluated is rated as level three. If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is failed, then the level of the yield analysis tool to be evaluated is the second level. If the first evaluation result is that the functional test is passed, the second evaluation result is that the performance test is passed, but the third evaluation result is that the subjective test is passed, then the level of the yield analysis tool to be evaluated is the first level.

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