A workpiece transfer chamber for a magnetron sputtering coating machine

Abstract

This invention relates to the field of coating, specifically disclosing a workpiece transfer transition chamber for a magnetron sputtering coating machine. The chamber includes a coating machine body, a transition chamber body mounted on the machine body, and switch assemblies at both ends of the transition chamber body. A clamping assembly for locking the switch assemblies is also provided on the transition chamber body. When the transition chamber body is evacuated, this invention ensures that the switch assemblies on both sides form a locking and limiting effect, preventing direct opening of the switch assemblies and avoiding operational errors that could cause the main chamber of the coating machine to be emptied. Furthermore, it controls the inner switch assembly to open while the outer switch assembly closes and locks, further preventing operational errors that could cause the main chamber to be emptied. When removing the workpiece, the inner switch assembly is locked, again preventing operational errors that could cause the main chamber to be emptied. This facilitates continuous coating of the workpiece by the coating machine body, improves coating efficiency, and extends the service life of the coating machine body.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and in particular to a workpiece transfer chamber for a magnetron sputtering coating machine. Background Technology

[0002] Magnetron sputtering coating machines are physical vapor deposition equipment widely used in materials science, microelectronics, optics, photovoltaics, and decorative coating fields. They mainly utilize the interaction of magnetic and electric fields to increase plasma density, thereby achieving efficient, uniform, and dense thin film deposition at relatively low pressure. The workpiece transfer chamber, also known as the sample loading chamber, in a magnetron sputtering coating machine is a key component of modern high-vacuum coating systems. It enables rapid loading, unloading, and transfer of workpieces without disrupting the high-vacuum environment of the main chamber.

[0003] When using the transfer chamber, which has an outer and an inner door, the inner door connects to the main vacuum chamber. Transfer can only be completed when the transfer chamber is evacuated to the pressure of the main chamber to avoid cavitation in the main chamber. However, operational errors are difficult to avoid. For example, if the inner door is opened before the transfer chamber is fully evacuated, the pressure in the main chamber will increase, affecting the coating quality. Similarly, if the outer door is opened directly when removing the workpiece, it will also allow the main chamber to connect with the atmosphere, causing cavitation and increased pressure, which is detrimental to continuous coating and reduces coating quality. Efficiency is reduced, and the lifespan of the coating machine is shortened. For example, in the existing patent CN212741524U, a transition chamber for optical coating of mobile phone back cover is disclosed. The front and rear inner walls of the two square grooves are rotatably connected with rotating shafts. Rotating cylinders are fixedly connected between the two rotating shafts on the left and the two rotating shafts on the right. Two rotating rods are respectively movably inserted into the two rotating cylinders, which can facilitate the installation and disassembly of the transition chamber, improve the disassembly efficiency after coating, and is very convenient to use and highly practical. This solution can achieve the effect of installing and disassembling the transition chamber, but it still cannot solve the problem.

[0004] Therefore, how to provide a workpiece transfer transition chamber for a magnetron sputtering coating machine is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] One object of the present invention is to provide a workpiece transfer transition chamber for a magnetron sputtering coating machine. The workpiece transfer transition chamber of the present invention includes a coating machine body, a transition chamber body disposed on the coating machine body, switch assemblies disposed at both ends of the transition chamber body, a clamping assembly for locking the switch assemblies disposed on the transition chamber body, a transfer assembly for conveying workpiece disposed inside the transition chamber body, a mounting plate disposed inside the transition chamber body, an expansion assembly disposed on the mounting plate, a pressing assembly for pressing the expansion assembly disposed on the mounting plate, and a connection to the expansion assembly disposed on the expansion assembly. The device includes a push assembly, an adjustment assembly connected to the push assembly on the mounting plate, a guide assembly on the adjustment assembly, and a locking assembly between the guide assembly and the switch assembly. When the transition chamber body is evacuated, the expansion assembly expands, causing the push assembly to retract and forcing the locking assembly to engage, thus locking the switch assemblies on both sides of the transition chamber body. When the switch assembly between the transition chamber body and the coating machine body is opened, the extrusion assembly is forced to compress the corresponding expansion assembly, causing the push assembly to advance and forcing the locking assembly to unlock.

[0006] Preferably, the switch assembly includes a hydraulic lifting rod disposed on the transition chamber body, the output end of the hydraulic lifting rod is provided with a vertical rod, and a door body adapted to the transition chamber body is disposed on the vertical rod.

[0007] Preferably, the clamping assembly includes a hydraulic push rod disposed on the transition chamber body, and the output end of the hydraulic push rod is provided with a clamping block adapted to the door body. The clamping block is in close contact with the door body to form a clamping effect on the door body.

[0008] Preferably, the transfer assembly includes a hydraulic telescopic rod disposed inside the transfer chamber body, the output end of the hydraulic telescopic rod is provided with a connecting block, the connecting block is provided with a conveying plate, and the conveying plate is slidably disposed on the transfer chamber body.

[0009] Preferably, the expansion assembly includes a limiting frame disposed on the mounting plate, an expansion airbag disposed on the limiting frame, a connecting pipe disposed on the expansion airbag, a control valve installed on the connecting pipe, and a pushing cylinder disposed on the mounting plate that communicates with the connecting pipe.

[0010] Preferably, the compression assembly includes an electric push rod disposed on the mounting plate, and the output end of the electric push rod is provided with a compression plate adapted to the limiting frame, the compression plate being used to compress the inflatable airbag.

[0011] Preferably, the pushing assembly includes a pushing piston disposed within the pushing cylinder, a pushing rod disposed on the pushing piston and passing through the pushing cylinder, a pushing block disposed on the pushing rod, and a pushing spring sleeved on the outer ring of the pushing rod disposed between the pushing block and the pushing cylinder.

[0012] Preferably, the adjustment assembly includes a fixed plate disposed on the mounting plate, a shaft connected to the fixed plate by a bearing, a rotating disk disposed on the shaft, an adjustment block disposed on the shaft, an adjustment rod hinged to the adjustment block, and the adjustment rod hinged to the push block.

[0013] Preferably, the guiding assembly includes a guide plate disposed on the mounting plate, a guide rod extending through the guide plate, a connecting rod hinged to the guide rod, and the connecting rod hinged to an off-center position of the rotating disk.

[0014] Preferably, the snap-fit ​​assembly includes a snap-fit ​​block disposed on the guide rod, the door body has a snap-fit ​​groove, and the snap-fit ​​block is provided with snap-fit ​​teeth that are adapted to the snap-fit ​​groove.

[0015] The beneficial effects of this invention are as follows: In use, this invention involves opening the switch assembly connecting the transition chamber to the outside, placing the workpiece on the transfer assembly, and activating the transfer assembly. The transfer assembly then moves the workpiece into the transition chamber. The switch assemblies on both sides are closed. A vacuum system is then used to evacuate the interior of the transition chamber, reducing the internal pressure. Because gas is present inside the expansion assembly, the pressure inside the expansion assembly relatively increases, causing the expansion assembly to expand. This causes the pushing assembly to retract, moving towards the expansion assembly. The pushing assembly then moves the adjusting assembly, which in turn moves the guide assembly forward. The guide assembly then engages the locking assembly, creating a locking limit on both switch assemblies, preventing direct opening and avoiding operational errors. To prevent malfunctions and ensure the main chamber of the coating machine is emptied, after the vacuuming process is complete, the pressure inside the main chamber and the transition chamber of the coating machine should be equalized. At this point, the inner switch assembly should be opened to activate the extrusion assembly. This forces the extrusion assembly to compress the expansion assembly on one side, compressing the gas in the expansion assembly. This causes the expansion assembly to drive the push assembly forward, which in turn drives the adjusting assembly in the opposite direction. The adjusting assembly then drives the guide assembly backward, causing the guide assembly to release the locking assembly, which in turn releases the inner switch assembly. Activating the switch assembly at this point connects the main chamber of the coating machine with the transition chamber. Activating the transfer assembly then allows the workpiece to enter the main chamber of the coating machine, where it is coated. Coating treatment; after the treatment is completed, the workpiece is transferred to the interior of the transition chamber using the transfer assembly. The switch assemblies on both sides are closed, and the squeezing assembly is released, causing the expansion assembly to return to its original position, i.e., the locking assembly re-locks. At this point, both switch assemblies are closed and locked in a limited position. The expansion assembly itself locks the inner pushing assembly in a certain position to prevent accidental opening of the inner switch assembly and further prevent the main chamber of the coating machine from being emptied. The transition chamber is pressurized using the pressurization system, increasing the internal air pressure. The outer pushing assembly returns to its original position, causing the outer switch assembly to close and not lock. Once the transition chamber is pressurized to atmospheric pressure, the switch assembly is opened, and the transfer assembly is used to... Once the workpiece is conveyed out, the operator can remove the coated workpiece. In summary, the workpiece transfer transition chamber of this magnetron sputtering coating machine ensures that the switch components on both sides form a locking and limiting effect when the transition chamber body is evacuated, preventing the switch components from being directly opened and avoiding the phenomenon of the main chamber of the coating machine body being emptied due to operational errors. Furthermore, it controls the inner switch components to open while the outer switch components are closed and locked, further preventing the phenomenon of the main chamber of the coating machine body being emptied due to operational errors. When removing the workpiece, it can achieve locking and limiting of the inner switch components, again preventing the phenomenon of the main chamber of the coating machine body being emptied due to operational errors. This facilitates the continuous coating of the workpiece by the coating machine body, improves coating efficiency, and extends the service life of the coating machine body. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a structural entity diagram of the transition chamber body of the present invention; Figure 3 This is a schematic diagram of the interior of the transition chamber body of the present invention; Figure 4 This is a structural entity diagram of the switching assembly of the present invention; Figure 5 For the present invention Figure 4 Enlarged view of point A in the middle; Figure 6 This is a structural entity diagram of the transfer component of the present invention; Figure 7 This is a schematic diagram of the structure of the mounting plate of the present invention; Figure 8 This is a schematic diagram of the expansion component of the present invention; Figure 9 For the present invention Figure 7 Partial structural entity diagram; Figure 10 For the present invention Figure 9 The structural entity diagram in another direction.

[0017] In the diagram: 1. Coating machine body; 2. Transition chamber body; 3. Switch assembly; 301. Hydraulic lifting rod; 302. Vertical rod; 303. Door; 4. Pressing assembly; 401. Hydraulic push rod; 402. Pressing block; 5. Transfer assembly; 501. Hydraulic telescopic rod; 502. Connecting block; 503. Conveying plate; 6. Mounting plate; 7. Expansion assembly; 701. Limiting frame; 702. Inflatable airbag; 703. Connecting pipe; 704. Control valve; 705. Push cylinder; 8. Extrusion assembly; 801. Electric push rod; 802, extrusion plate; 9, pushing assembly; 901, pushing piston; 902, pushing rod; 903, pushing block; 904, pushing spring; 10, adjusting assembly; 1001, fixing plate; 1002, shaft; 1003, rotating disk; 1004, adjusting block; 1005, adjusting rod; 11, guiding assembly; 1101, guide plate; 1102, guide rod; 1103, connecting rod; 12, snap-fit ​​assembly; 1201, snap-fit ​​block; 1202, slot; 1203, snap-fit ​​tooth. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0019] Example 1: As Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the present invention discloses a workpiece transfer chamber for a magnetron sputtering coating machine, comprising a coating machine body 1, which is a prior art material and mainly consists of multiple systems, such as a vacuum system and a coating system. A transfer chamber body 2 is mounted on the coating machine body 1, with one end connected to the atmosphere and the other end connected to the main chamber of the coating machine body 1. Switching assemblies 3 are mounted at both ends of the transfer chamber body 2 for switching functions. A clamping assembly 4 is mounted on the transfer chamber body 2 to lock the switching assembly 3 and improve sealing. A workpiece transfer assembly 5 is mounted inside the transfer chamber body 2 for transferring the workpiece. A mounting plate 6 is mounted inside the transfer chamber body 2 and positioned above the transfer chamber body 2. An expansion assembly 7 is mounted on the mounting plate 6 for expanding the workpiece. A pressing mechanism is mounted on the mounting plate 6 for pressing the expansion assembly 7. Component 8, the extrusion component 8 is used to extrude the expansion component 7. The expansion component 7 is provided with a push component 9 that is connected to the expansion component 7. The push component 9 has a transmission function. The mounting plate 6 is provided with an adjustment component 10 that is connected to the push component 9. The adjustment component 10 has an angle adjustment function. The adjustment component 10 is provided with a guide component 11 that has a guiding function. The guide component 11 and the switch component 3 are provided with a snap-fit ​​component 12 that has a snap-fit ​​limit function. When the transition chamber body 2 is evacuated, the expansion component 7 expands, causing the push component 9 to retract and forcing the snap-fit ​​component 12 to snap into place, so that the switch components 3 on both sides of the transition chamber body 2 are locked. When the switch components 3 between the transition chamber body 2 and the coating machine body 1 are opened, the extrusion component 8 is forced to extrude the corresponding expansion component 7, causing the push component 9 to move forward and forcing the snap-fit ​​component 12 to unlock.

[0020] Working principle: In use, open the switch assembly 3 connecting the transition chamber body 2 to the outside world, place the workpiece on the transfer assembly 5, and start the transfer assembly 5. The transfer assembly 5 carries the workpiece into the transition chamber body 2. Close the switch assemblies 3 on both sides, and use the vacuum system to evacuate the interior of the transition chamber body 2. The air pressure inside the transition chamber body 2 decreases. Due to the presence of gas inside the expansion assembly 7, the air pressure inside the expansion assembly 7 relatively increases, causing the expansion assembly 7 to expand. This causes the push assembly 9 to retract, i.e., move towards the expansion assembly 7. The push assembly 9 drives the adjustment assembly 10 to move, causing the adjustment assembly 10 to move... The guide assembly 11 moves forward, causing it to engage with the locking assembly 12, thus locking the switch assemblies 3 on both sides to a stop, preventing direct opening and avoiding operational errors that could lead to incorrect opening and damage to the main chamber of the coating machine body 1. After the vacuuming operation is completed, the pressure inside the main chamber of the coating machine body 1 and the transition chamber body 2 is the same. At this point, the inner switch assembly 3 needs to be opened to activate the compression assembly 8, forcing it to compress the expansion assembly 7 on one side. This compresses the gas in the expansion assembly 7, causing it to drive the push assembly 9 forward, which in turn drives the adjustment assembly. When component 10 moves in the reverse direction, the adjusting component 10 drives the guiding component 11 to retract, causing the guiding component 11 to release the locking component 12, i.e., releasing the inner switch component 3. At this time, activating the switch component 3 connects the main chamber of the coating machine body 1 with the transition chamber body 2, activating the transfer component 5. The transfer component 5 carries the workpiece into the main chamber of the coating machine body 1, where the coating machine performs coating treatment on the workpiece. After treatment, the transfer component 5 transfers the workpiece into the transition chamber body 2. The switch components 3 on both sides are then closed, releasing the squeezing component 8, causing the expansion component 7 to recover, i.e., the locking component 12 locks in again. At this time, both sides... All switch components 3 are in a closed and locked position. The expansion component 7 locks the inner push component 9 in a certain position to prevent accidental opening of the inner switch component 3 and further prevent the main chamber of the coating machine body 1 from being emptied. The pressurization system pressurizes the transition chamber body 2, increasing the internal air pressure. At this time, the outer push component 9 returns to its original position, so that the outer switch component 3 is closed and not locked. When the internal pressure of the transition chamber body 2 reaches atmospheric pressure, the switch component 3 is opened, and the transfer component 5 is used to transport the workpiece out. The staff can then take out the coated workpiece.In summary, the workpiece transfer chamber of this magnetron sputtering coating machine ensures that the switch components 3 on both sides form a locking and limiting effect when the transfer chamber body 2 is evacuated, preventing direct opening of the switch components 3 and avoiding the possibility of the main chamber of the coating machine body 1 being emptied due to operational errors. Furthermore, it controls the inner switch component 3 to open while the outer switch component 3 closes and locks, further preventing the main chamber of the coating machine body 1 from being emptied due to operational errors. When removing the workpiece, the locking and limiting effect of the inner switch component 3 again prevents the main chamber of the coating machine body 1 from being emptied due to operational errors. This facilitates continuous coating of the workpiece by the coating machine body 1, improves coating efficiency, and extends the service life of the coating machine body 1.

[0021] Example 2: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the switch assembly 3 includes a hydraulic lifting rod 301 mounted on the transition chamber body 2. The hydraulic lifting rod 301 is existing technology. A vertical rod 302 is mounted at the output end of the hydraulic lifting rod 301. The vertical rod 302 is vertically positioned and a door 303 adapted to the transition chamber body 2 is mounted on the vertical rod 302. The door 303 is a sealing component of the transition chamber body 2 and is generally divided into an outer door and an inner door.

[0022] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the clamping assembly 4 includes a hydraulic push rod 401 disposed on the transition chamber body 2. The hydraulic push rod 401 is existing technology. The output end of the hydraulic push rod 401 is provided with a clamping block 402 adapted to the door body 303. The clamping block 402 is in close contact with the door body 303 to form a clamping effect on the door body 303. The clamping block 402 is located at the edge of the door body 303.

[0023] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown, the transfer assembly 5 includes a hydraulic telescopic rod 501 disposed inside the transition chamber body 2. The hydraulic telescopic rod 501 is the prior art. A connecting block 502 is provided at the output end of the hydraulic telescopic rod 501. The connecting block 502 is fixedly connected to the output end of the hydraulic telescopic rod 501. A conveying plate 503 is provided on the connecting block 502. The conveying plate 503 is slidably disposed on the transition chamber body 2 and penetrates the inner wall of the transition chamber body 2.

[0024] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the expansion assembly 7 includes a limiting frame 701 mounted on the mounting plate 6. The limiting frame 701 is used to support the expansion airbag 702 and compress the expansion airbag 702. The expansion airbag 702 is mounted on the limiting frame 701. The expansion airbag 702 is telescopic. A connecting pipe 703 is mounted on the expansion airbag 702. A control valve 704 is mounted on the connecting pipe 703. The control valve 704 can be configured as a solenoid valve. A push cylinder 705 is mounted on the mounting plate 6 and communicates with the connecting pipe 703. The push cylinder 705 is filled with gas.

[0025] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the extrusion assembly 8 includes an electric push rod 801 mounted on the mounting plate 6. The electric push rod 801 is a prior art technology. The output end of the electric push rod 801 is provided with an extrusion plate 802 that is adapted to the limit frame 701. The extrusion plate 802 is used to extrude the expansion airbag 702. The extrusion plate 802 is at a certain distance from the expansion cylinder to ensure the normal expansion of the expansion airbag 702.

[0026] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown, the pushing assembly 9 includes a pushing piston 901 disposed in the pushing cylinder 705. The pushing piston 901 is adapted to the pushing cylinder 705. A pushing rod 902 is disposed on the pushing piston 901 and passes through the pushing cylinder 705. The pushing rod 902 is disposed along the length direction of the pushing cylinder 705. A pushing block 903 is disposed on the pushing rod 902. A pushing spring 904 is disposed between the pushing block 903 and the pushing cylinder 705 and sleeved on the outer ring of the pushing rod 902.

[0027] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the adjustment assembly 10 includes a fixed plate 1001 mounted on the mounting plate 6. A shaft 1002 is connected to the fixed plate 1001 by a bearing. The shaft 1002 is horizontally arranged and has a rotating disk 1003 mounted on it. The rotating disk 1003 is circular. An adjustment block 1004 is mounted on the shaft 1002. An adjustment rod 1005 is hinged to the adjustment block 1004 and is hinged to the push block 903.

[0028] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10 As shown, the guide assembly 11 includes a guide plate 1101 disposed on the mounting plate 6. The guide plate 1101 is disposed perpendicular to the mounting plate 6. A guide rod 1102 is disposed on the guide plate 1101, penetrating the guide plate 1101. The guide rod 1102 is disposed perpendicular to the guide plate 1101. A connecting rod 1103 is hinged to the guide rod 1102. The connecting rod 1103 is disposed at an angle to the guide rod 1102. The connecting rod 1103 is hinged at an off-center position on the rotating disk 1003.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 and Figure 10As shown, the snap-fit ​​assembly 12 includes a snap-fit ​​block 1201 disposed on the guide rod 1102, and a snap-fit ​​groove 1202 is provided on the door body 303. Multiple snap-fit ​​grooves 1202 are provided, and snap-fit ​​blocks 1201 are provided with snap-fit ​​teeth 1203 that are adapted to the snap-fit ​​grooves 1202. The snap-fit ​​teeth 1203 correspond one-to-one with the snap-fit ​​grooves 1202.

[0030] Working principle: When in use, the outer hydraulic lifting rod 301 is activated. The output end of the hydraulic lifting rod 301 drives the vertical rod 302 to move upward. The vertical rod 302 drives the door 303 to move, so that the door 303 moves away from the entrance of the transition chamber body 2, thereby opening the connection between the transition chamber body 2 and the outside. The workpiece is placed on the processing position of the conveyor plate 503. The hydraulic telescopic rod 501 is activated. The output end of the hydraulic telescopic rod 501 drives the connecting block 502 to move synchronously, so that the connecting block 502 drives the conveyor plate 503 to move along the inner wall of the transition chamber body 2, so that the workpiece enters the interior of the transition chamber body 2. The hydraulic lifting rod 301 is activated in the reverse direction, so that the door 303 closes the entrance of the transition chamber body 2. The hydraulic push rod 401 is activated, so that the hydraulic push rod 401 drives the pressing block 402 to press the door 303, improving the sealing. At this time, both the inner and outer doors 303 are in the closed state. The interior of the transition chamber body 2 needs to be evacuated. Using a vacuum system, the interior of the transition chamber body 2 is evacuated to the same pressure as the interior of the coating machine body 1. As the pressure inside the transition chamber body 2 gradually decreases, the pressure inside the expansion bladder 702 increases relatively during evacuation due to the presence of gas in the expansion bladder 702 and the push cylinder 705. This causes the expansion bladder 702 to expand. Simultaneously, the gas in the push cylinder 705 enters the expansion bladder 702 through the connecting pipe 703, causing the push piston 901 to retract. That is, both push pistons 901 move towards the expansion bladder 702. The push pistons 901 drive the push rod 902 to move within the push cylinder 705, causing the push rod 902 to drive the push block 903 back. The retraction motion pushes the block 903 to pull the adjusting rod 1005 back. The adjusting rod 1005 drives the adjusting block 1004 to rotate, causing the adjusting block 1004 to drive the shaft 1002 to rotate. The shaft 1002 drives the rotating disk 1003 to rotate by an angle. The rotating disk 1003 drives the connecting rod 1103 to move. The connecting rod 1103 drives the guide rod 1102 to move forward along the guide plate 1101, causing the guide rod 1102 to drive the locking block 1201 to move forward. This forces the locking teeth 1203 to enter the locking groove 1202 to form a locking and limiting effect, forcing the doors 303 on both sides to form a locking and limiting effect, that is, the doors 303 cannot be opened directly, avoiding the phenomenon of opening the wrong door due to operational errors, and preventing the main compartment of the coating machine body 1 from being broken. After the vacuuming operation is completed, the pressure inside the main chamber of the coating machine body 1 and the transition chamber body 2 is the same. At this time, the inner door 303 needs to be opened. Since the door 303 is in a locked and limited state, the control valve 704 controls the push cylinder 705 on one side to connect with the expansion air bladder 702, activating the corresponding inner electric push rod 801. The output end of the electric push rod 801 drives the extrusion plate 802 to move. Under the action of the extrusion plate 802 and the limit frame 701, the extrusion plate 802 extrudes the expansion air bladder 702, forcing the gas in the expansion air bladder 702 to enter the push cylinder 705 through the connecting pipe 703. This increases the air pressure in the push cylinder 705, forcing the push piston 901 to move forward, driving the push rod 902 to move within the push cylinder 705. This causes the push rod 902 to drive the push block 903 to move forward, pulling the push block 903. When the adjusting rod 1005 moves forward, it drives the adjusting block 1004 to rotate, which in turn drives the shaft 1002 to rotate. The shaft 1002 then drives the rotating disk 1003 to rotate by an angle. The rotating disk 1003 drives the connecting rod 1103 to move, and the connecting rod 1103 drives the guide rod 1102 to retract along the guide plate 1101. This causes the guide rod 1102 to retract the locking block 1201, forcing the locking teeth 1203 to come out of the slot 1202, creating a release effect and releasing the inner door 303. At this time, the hydraulic lifting rod 301 and the hydraulic push rod 401 are activated to open the inner door 303, connecting the main chamber of the coating machine body 1 with the transition chamber body 2. The hydraulic telescopic rod 501 is activated to force the conveyor plate 503 to carry the workpiece into the main chamber of the coating machine body 1, where the coating machine is used to coat the workpiece. After processing, the workpiece is transferred to the interior of the transition chamber 2 using the conveyor plate 503. The hydraulic lifting rod 301 and hydraulic push rod 401 are activated to close the door 303. Then, the electric push rod 801 is activated, causing the pressing plate 802 to return to its original state and the expansion airbag 702 to return to its inflated state. This means the locking teeth 1203 on both sides re-enter the slots 1202 to form a locking and limiting state. The control valve 704 disconnects the connecting pipe 703, keeping the gas in the pushing cylinder 705 constant and preventing the piston 901 from changing position. This creates a locking effect on the inner door 303, preventing... If the inner door 303 is accidentally opened when the outer door 303 is opened, further preventing the main chamber of the coating machine body 1 from being emptied, the transition chamber body 2 is pressurized using a pressurization system, typically by filling it with nitrogen, etc., so that the internal air pressure of the transition chamber body 2 increases. The expansion airbag 702 gradually returns to its original state, causing the outer push component 9 to return to its original position, so that the outer door 303 is closed and not jammed. When the internal pressure of the transition chamber body 2 reaches atmospheric pressure, the outer door 303 is opened, and the workpiece is transported out using the conveyor plate 503. The operator can then remove the coated workpiece.

[0031] This solution ensures, on the one hand, that the switch components 3 on both sides form a locking and limiting effect when the transition chamber body 2 is evacuated, preventing the switch components 3 from being opened directly and avoiding the phenomenon of the main chamber of the coating machine body 1 being emptied due to operational errors; on the other hand, it controls the inner switch component 3 to open and the outer switch component 3 to close and lock and limit, further preventing the phenomenon of the main chamber of the coating machine body 1 being emptied due to operational errors; furthermore, when the workpiece is removed, it can achieve locking and limiting of the inner switch component 3, again preventing the phenomenon of the main chamber of the coating machine body 1 being emptied due to operational errors, which is conducive to the continuous coating of the workpiece by the coating machine body 1, improves coating efficiency, and extends the service life of the coating machine body 1.

[0032] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A workpiece transfer chamber for a magnetron sputtering coating machine, characterized in that, The system includes a coating machine body (1), a transition chamber body (2) on the coating machine body (1), switch assemblies (3) at both ends of the transition chamber body (2), a clamping assembly (4) for locking the switch assembly (3) on the transition chamber body (2), a transfer assembly (5) for conveying workpieces inside the transition chamber body (2), a mounting plate (6) inside the transition chamber body (2), an expansion assembly (7) on the mounting plate (6), a pressing assembly (8) for pressing the expansion assembly (7) on the mounting plate (6), a pushing assembly (9) communicating with the expansion assembly (7) on the expansion assembly (7), and a connection between the pushing assembly (9) and the mounting plate (6) on the mounting plate (6). The adjustment component (10) is provided with a guide component (11), and a snap-fit ​​component (12) is provided between the guide component (11) and the switch component (3); wherein, when the transition chamber body (2) is evacuated, the expansion component (7) expands, causing the push component (9) to retract, forcing the snap-fit ​​component (12) to snap, so that the switch components (3) on both sides of the transition chamber body (2) are locked; when the switch component (3) between the transition chamber body (2) and the coating machine body (1) is opened, the squeezing component (8) is forced to squeeze the corresponding expansion component (7), causing the push component (9) to move forward, forcing the snap-fit ​​component (12) to unlock.

2. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 1, characterized in that, The switch assembly (3) includes a hydraulic lifting rod (301) mounted on the transition chamber body (2), and a vertical rod (302) is mounted on the output end of the hydraulic lifting rod (301). A door (303) adapted to the transition chamber body (2) is mounted on the vertical rod (302).

3. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 2, characterized in that, The clamping assembly (4) includes a hydraulic push rod (401) disposed on the body of the transition chamber (2). The output end of the hydraulic push rod (401) is provided with a clamping block (402) adapted to the door body (303). The clamping block (402) is in close contact with the door body (303) to form a clamping effect on the door body (303).

4. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 3, characterized in that, The transfer assembly (5) includes a hydraulic telescopic rod (501) disposed inside the transition chamber body (2). The output end of the hydraulic telescopic rod (501) is provided with a connecting block (502). A conveying plate (503) is disposed on the connecting block (502). The conveying plate (503) is slidably disposed on the transition chamber body (2).

5. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 4, characterized in that, The expansion assembly (7) includes a limiting frame (701) disposed on the mounting plate (6), an expansion airbag (702) disposed on the limiting frame (701), a connecting pipe (703) disposed on the expansion airbag (702), a control valve (704) installed on the connecting pipe (703), and a push cylinder (705) connected to the connecting pipe (703) disposed on the mounting plate (6).

6. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 5, characterized in that, The extrusion assembly (8) includes an electric push rod (801) disposed on the mounting plate (6). The output end of the electric push rod (801) is provided with an extrusion plate (802) adapted to the limiting frame (701). The extrusion plate (802) is used to extrude the inflatable airbag (702).

7. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 6, characterized in that, The pushing assembly (9) includes a pushing piston (901) disposed in the pushing cylinder (705), a pushing rod (902) passing through the pushing cylinder (705) is disposed on the pushing piston (901), a pushing block (903) is disposed on the pushing rod (902), and a pushing spring (904) sleeved on the outer ring of the pushing rod (902) is disposed between the pushing block (903) and the pushing cylinder (705).

8. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 7, characterized in that, The adjustment assembly (10) includes a fixed plate (1001) disposed on the mounting plate (6), a shaft (1002) is connected to the fixed plate (1001) by a bearing, a rotating disk (1003) is disposed on the shaft (1002), an adjustment block (1004) is disposed on the shaft (1002), an adjustment rod (1005) is hinged to the adjustment block (1004), and the adjustment rod (1005) is hinged to the push block (903).

9. The workpiece transfer chamber for a magnetron sputtering coating machine according to claim 8, characterized in that, The guide assembly (11) includes a guide plate (1101) disposed on the mounting plate (6), a guide rod (1102) passing through the guide plate (1101) is disposed on the guide plate (1101), a connecting rod (1103) is hinged to the guide rod (1102), and the connecting rod (1103) is hinged to the rotating disk (1003) at an off-center position.

10. A workpiece transfer chamber for a magnetron sputtering coating machine according to claim 9, characterized in that, The snap-fit ​​assembly (12) includes a snap-fit ​​block (1201) disposed on the guide rod (1102), a snap-fit ​​groove (1202) is provided on the door body (303), and a snap-fit ​​tooth (1203) is provided on the snap-fit ​​block (1201) that is adapted to the snap-fit ​​groove (1202).

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