A 2D grid exposure unit display and interactive device based on a scene graph architecture.

Abstract

This application provides a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture, comprising: an application layer for providing a user interface and business logic interface; a component layer for providing the main control and function controller of the exposure unit graph; a scene layer for managing display interaction functions through a node-tree-based scene graph to perform graphics-accelerated hardware-based display interaction rendering, where each node in the node tree corresponds to a variable display interaction function as an independent geometric node; and a rendering framework layer for providing basic graphics display functions for the display interaction functions. This provides a cross-platform, high-performance, fully functional, smooth-operating, and easily integrated two-dimensional grid exposure unit display and interaction device.

Description

Technical Field

[0001] This application relates to the field of display technology, and more specifically, to a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture. Background Technology

[0002] In various semiconductor process equipment such as lithography machines, measurement equipment, and inspection equipment, there is a need to visualize and interact with large-scale exposure units (Shots) through a human-machine interface. For example, in semiconductor lithography in the front-end process of semiconductor manufacturing.

[0003] Currently, the main technical solutions adopted are as follows: traditional CPU-based mesh drawing solutions use traditional Qt Widgets or QPainter for CPU drawing and update the displayed content through redraw events; web-based mesh display solutions use HTML5 Canvas or SVG technology to implement mesh display in the browser; and game engine-based display solutions use game engines such as Unity and Unreal for mesh rendering.

[0004] However, these solutions all have significant drawbacks in practical applications. Firstly, they suffer from severe performance bottlenecks. For example, CPU-based rendering solutions experience frame rates dropping significantly to below 10 frames per second (FPS) when handling large-scale meshes (above 100×100), failing to meet real-time interaction requirements. Secondly, the interactive experience is inadequate. Most existing solutions only support simple click selection, lacking smooth zooming, panning, and focusing interactions, resulting in a poor user experience. Furthermore, they are functionally limited and lack scalability, making it difficult to support complex data annotation, real-time status feedback, and dynamic prompts. The components are tightly coupled with the application, making them difficult to integrate as general-purpose components. Finally, the coordinate systems are complex and error-prone. The mesh exposure unit component uses multiple different coordinate systems. If different coordinate systems are used simultaneously to define the same coordinate position and perform calculations, the conversion logic between viewport coordinates, content coordinates, and mesh coordinates becomes extremely complex, prone to errors, and increases development and maintenance difficulty.

[0005] Based on this, we aim to provide an improved display and interaction scheme for two-dimensional grid exposure units. Summary of the Invention

[0006] This application provides a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture, which can provide cross-platform, high-performance, fully functional, smooth operation, and easy integration of two-dimensional grid exposure unit display and interaction through the scene graph architecture.

[0007] According to one aspect of this application, a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture is provided, comprising: an application layer for providing a user interface and business logic interface; a component layer for providing the main control and function controller of the exposure unit graph; a scene layer for performing graphics-accelerated hardware-based display interaction rendering by managing display interaction functions through a scene graph based on a node tree, wherein each node in the node tree corresponds as an independent geometric node to a variable display interaction function; and a rendering framework layer for providing basic graphics display functions for the display interaction functions.

[0008] In the above-mentioned two-dimensional mesh exposure unit display and interaction device based on scene graph architecture, the scene layer is used to create a geometric buffer for the geometric nodes in the graphics acceleration hardware, and to convert the mesh data of the two-dimensional mesh into vertex data that can be recognized by the graphics acceleration hardware.

[0009] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, the component layer includes a main control that serves as a top-level container to coordinate the child nodes of each layer, an interaction controller for managing user input and selection states, and a viewport controller for managing viewport operations such as zooming, panning, and focusing.

[0010] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, the viewport controller includes a coordinate transformation unit for transforming the viewport coordinate system, content coordinate system and grid coordinate system.

[0011] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, the node tree of the scene layer includes, in order of node hierarchy: a base layer node for rendering the base background, a grid layer node for rendering grid lines, a grid unit content layer node for rendering grid unit content, a selection highlight layer node for rendering the selected state, a hover feedback layer node for rendering the hover effect, a dynamic prompt box layer node for rendering the prompt box, and a menu layer node for rendering the context menu.

[0012] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, the interaction controller includes a selection state management unit, which is used to store the coordinates of the selected grid unit using a set data structure, provide a selection state query interface to support quick determination of whether the grid unit is selected, and provide a signal slot mechanism to notify of changes in the selection state.

[0013] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, a search algorithm is used to match specified conditions by traversing all exposure unit objects based on the selected highlight layer node, a hash table index is used to perform a precise search based on the exposure unit ID, a batch search is performed based on the condition ID based on condition matching and result aggregation, and the enclosing area of ​​the search results is calculated and the viewport is adjusted to automatically focus on the selected exposure unit.

[0014] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on scene graph architecture, based on the dynamic prompt box node, in response to the detection of the hover state by listening to mouse movement events based on the hover feedback layer node, the detailed information of the target exposure unit is extracted, the optimal display position of the prompt box is calculated, and the prompt box content is dynamically created and updated.

[0015] In the above-mentioned two-dimensional grid exposure unit display and interaction device based on the scene graph architecture, based on the menu layer node, user click events are listened to to obtain the trigger position, menu items are generated according to the current selection state, menu item selection events are processed in batches to apply settings, and the menu is automatically located.

[0016] The two-dimensional grid exposure unit display and interaction device based on scene graph architecture provided in this application embodiment can provide cross-platform, high-performance, fully functional, smooth operation, and easy integration of two-dimensional grid exposure unit display and interaction through scene graph architecture. Attached Figure Description

[0017] Various other advantages and benefits of this application will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. Furthermore, the same reference numerals denote the same parts throughout the drawings.

[0018] Figure 1 The illustration shows a schematic block diagram of a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0019] Figure 2 The illustration shows a schematic hierarchical block diagram of a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0020] Figure 3 The illustration shows a schematic diagram of coordinate transformation in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0021] Figure 4 The illustration shows a schematic diagram of the scene graph layered rendering structure in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0022] Figure 5 The illustration shows a schematic diagram of the actual rendering effect after different layers are mixed in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0023] Figure 6 The illustration shows a flowchart of a positive selection process in a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0024] Figure 7 The illustration shows a flowchart of reverse selection in a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0025] Figure 8 The illustration shows a flowchart of a dynamic prompt in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0026] Figure 9 The illustration shows a flowchart of a two-dimensional grid exposure unit display and menu display in an interactive device based on a scene graph architecture according to an embodiment of this application.

[0027] Figure 10 The illustration shows a schematic diagram of a large-scale mesh rendering effect in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. Detailed Implementation

[0028] Hereinafter, exemplary embodiments according to this application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this application, and not all embodiments of this application. It should be understood that this application is not limited to the exemplary embodiments described herein.

[0029] Figure 1 The illustration shows a schematic diagram of a scene graph architecture in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. For example... Figure 1 As shown, in the scene graph architecture of the two-dimensional mesh exposure unit display and interaction device based on the scene graph architecture according to the embodiments of this application, the core display interaction functions, such as GPU hardware acceleration, incremental update, viewport clipping and batch rendering, are managed through a node tree structure.

[0030] Specifically, in this embodiment, the scene graph is an architecture pattern that manages display and interactive functions through a node tree structure. Each node represents a visual element, and the hierarchical relationship between nodes determines the rendering order and spatial transformations. In the scene graph architecture, transformations (translation, rotation, scaling) of parent nodes are automatically passed to all child nodes, and when the node tree needs to be incrementally updated, only the changed nodes need to be re-rendered.

[0031] Here, the display interaction functionality includes hardware technology features, such as using graphics APIs like OpenGL / Vulkan to utilize accelerated hardware, such as GPUs. Furthermore, graphics data, such as geometric data, is stored in buffers within the accelerated hardware, such as the GPU, enabling parallel rendering. Additionally, viewport clipping can be optimized using Level of Detail (LOD) to ensure rendering performance, and batch rendering can reduce the number of draw calls to improve overall performance.

[0032] In this embodiment, the two-dimensional grid exposure unit display and interaction device based on a scene graph architecture mainly includes a four-layer architecture: the application layer provides the user interface and business logic interface; the component layer provides the main control and function controller of the exposure unit graph; the scene layer manages the display interaction functions through a node tree structure to achieve display interaction rendering based on graphics acceleration hardware; and the rendering framework layer provides the basic graphics display functions for display interaction functions, such as... Figure 2 As shown. Here, Figure 2 The diagram illustrates a schematic hierarchical block diagram of a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. For example, the component layer includes a main control (ShotMapItem) serving as a top-level container to coordinate the child nodes of each layer, an interaction controller (InteractionController) for managing user input and selection states, and a viewport controller (ViewportController) for managing viewport operations such as zooming, panning, and focusing. The scene layer is based on a node tree, including, for example, wafer layer nodes, mesh layer nodes, mesh unit content layer nodes, selection highlight layer nodes, hover feedback layer nodes, dynamic tooltip layer nodes, and right-click menu layer nodes, to achieve hardware-accelerated rendering for different display and interaction tasks. Finally, the rendering framework layer provides basic support for graphics APIs such as OpenGL / Vulkan.

[0033] In this embodiment of the application, when the scene layer manages the display interaction function through the node tree structure to realize the display interaction rendering, it can directly operate the rendering node tree based on the scene graph architecture. Each node in the node tree is an independent geometric node corresponding to a variable display interaction function. In this way, the node tree structure can support incremental updates instead of overall redrawing, and can realize viewport clipping and LOD optimization, so that only the content of the visible area is rendered.

[0034] In other words, in existing CPU-based rendering schemes, because the CPU is primarily responsible for computation—each pixel requires CPU calculation, and each rendering requires redrawing the entire screen—when processing large-scale meshes (100x100 or larger) and needing to render the image content of a single cell, the CPU must redraw. As the number of image pixels increases, the number of redraws increases exponentially, exceeding the CPU's processing capacity. This causes the CPU to wait for previous redraws to complete before executing subsequent redraws, resulting in screen lag and stuttering. Therefore, considering that the CPU's redrawing mechanism (redrawing the entire screen with each refresh) cannot solve the lag and stuttering caused by instantaneous exponential redraws, it is clear that the CPU's rendering performance is inherently limited. Hence, graphics acceleration hardware, such as GPUs, is used to handle component rendering, freeing the CPU to focus solely on logical operations and human-computer interaction. Scene graph architecture, on the other hand, avoids redrawing the entire screen space with each rendering, saving resources.

[0035] Therefore, according to the embodiments of this application, a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture is provided, including: an application layer for providing a user interface and business logic interface; a component layer for providing the main control and function controller of the exposure unit graph; a scene layer for performing display interaction rendering based on graphics acceleration hardware by managing display interaction functions through a scene graph based on a node tree, wherein each node in the node tree is an independent geometric node corresponding to a variable display interaction function; and a rendering framework layer for providing basic graphics display functions for the display interaction functions.

[0036] Specifically, the scene layer utilizes the basic graphics display functions of the graphics acceleration hardware provided by the rendering framework layer through graphics APIs such as OpenGL / Vulkan. Upon system startup, a geometry buffer for geometry nodes can be created in the graphics acceleration hardware. This involves creating rendering elements using geometry nodes and converting the 2D mesh data into vertex data recognizable by the graphics acceleration hardware. At this point, rendering attributes can be defined through the material system. Thus, during interactive rendering based on the graphics acceleration hardware, the hardware can directly read data from the buffer for parallel rendering, and the scene layer can update the buffer content only when the data changes, based on the scene graph architecture.

[0037] That is, in the two-dimensional mesh exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the scene layer is used to create a geometric buffer for the geometric nodes in the graphics acceleration hardware, and convert the mesh data of the two-dimensional mesh into vertex data recognizable by the graphics acceleration hardware.

[0038] In this embodiment, the scene layer can be implemented using the Qt scene graph framework or the Open scene graph toolkit. For example, when using the Qt scene graph framework, Qt Quick provides the QML interface and business logic interface, directly manipulating the Qt scene graph node tree to achieve GPU hardware-accelerated rendering, using QSGGeometryNode to create geometry nodes, QSGMaterial to define rendering materials, using QTransform transformation matrix for precise coordinate transformation, and using QSGClipNode, QSGGeometryNode, and QSGTextNode to render user interface elements.

[0039] Here, the Qt scene graph framework is technically mature and highly stable, supports multiple platforms such as Windows, Linux, and macOS, and natively supports GPU hardware acceleration. Its rich APIs and comprehensive development tools can improve development efficiency.

[0040] Among them, the node tree architecture of the Qt scene graph can support layered rendering design. Its underlying layer supports graphics APIs such as OpenGL / Vulkan / Metal to provide GPU hardware acceleration capabilities. The QML interface layer and C++ rendering layer are separated, which conforms to the layered architecture of application layer, component layer, scene layer and rendering framework layer of this application.

[0041] In addition, in the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the component layer includes a main control that serves as a top-level container for coordinating the child nodes of each layer, an interaction controller for managing user input and selection states, and a viewport controller for managing viewport operations such as zooming, panning, and focusing.

[0042] As mentioned above, the coordinate system in existing solutions is complex and error-prone due to the lack of a unified coordinate transformation framework. Various coordinate transformation logics are scattered across different modules, and different modules using different coordinate systems are like different languages ​​without translation, leading to computational errors. Therefore, in the two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to embodiments of this application, a unified transformation of three coordinate systems is provided. That is, since the grid exposure unit component may have multiple different coordinate systems, using different coordinate systems to define the same coordinate position and then performing calculations will result in errors. Therefore, the viewport controller includes a coordinate transformation unit for transforming the viewport coordinate system, content coordinate system, and grid coordinate system. Here, the user sees the viewport coordinate system, the content coordinate system handles logical coordinates, and the grid coordinate system provides row and column indices. The origin of the viewport coordinate system is at the top left corner, and the unit is pixels, used for screen display; the origin of the content coordinate system is at the center of the content, and the unit is pixels, used by the rendering engine; while the origin of the grid coordinate system is at the top left corner of the grid, and the unit is a grid cell, used for business logic. Specifically, the coordinate transformation unit performs bidirectional transformation between viewport coordinates and content coordinates using a transformation matrix. This involves designing a transformation matrix calculation method and implementing coordinate transformation from viewport to content through translation and scaling operations. The coordinate transformation unit also performs a linear mapping between content coordinates and grid coordinates based on the grid cell size, implementing a linear mapping algorithm from content to grid and calculating the grid coordinate position according to the grid size. This provides mutual conversion between the viewport coordinate system, content coordinate system, and grid coordinate system. Figure 3 As shown. Here, Figure 3 The illustration shows a schematic diagram of coordinate transformation in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application.

[0043] In addition, in this embodiment, the coordinate transformation unit may also include a coordinate transformation caching mechanism for storing transformation results to avoid repeated calculations, a coordinate precision control mechanism for ensuring the numerical accuracy and stability during the transformation process, and a coordinate verification mechanism for detecting and handling abnormal situations during the transformation process.

[0044] Therefore, in the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the viewport controller includes a coordinate transformation unit for transforming the viewport coordinate system, the content coordinate system and the grid coordinate system.

[0045] Because the graphic management and interactive event handling of the exposure unit are complex, if it cannot support interactive feedback from multiple display elements, it is difficult to achieve smooth multi-touch and gesture operations, resulting in an insufficient interactive experience. Therefore, in this embodiment, the scene layer can divide the node tree into seven levels of nodes according to the node hierarchy direction, such as the Z-axis direction, as follows: Figure 4 As shown. Here, Figure 4 The illustration shows a schematic diagram of the scene graph layered rendering structure in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. Specifically, Z=0 corresponds to the base layer node, used to render the base, such as the background of a silicon wafer; Z=1 corresponds to the mesh layer node, used to render the mesh lines; Z=2 corresponds to the mesh cell content layer node, used to render the mesh cell content; Z=3 corresponds to the selection highlight layer node, used to render the selected state; Z=4 corresponds to the hover feedback layer node, used to render the hover effect; Z=5 corresponds to the dynamic tooltip layer node, used to render the tooltip; and Z=6 corresponds to the menu layer node, used to render the context menu. Here, each layer uses a dedicated node class to handle a specific type of rendering task, and the nodes are arranged in Z-axis order. For example, the node hierarchy can be managed through a node tree management interface to ensure correct occlusion relationships, such as... Figure 5 As shown. Here, Figure 5 The illustration shows a schematic diagram of the actual rendering effect after different layers are mixed in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. Furthermore, when updates are required, a dirty marking mechanism can be used to mark the nodes that need updating, and only the dirty-marked nodes are updated to support incremental updates.

[0046] Therefore, in the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the node tree of the scene layer includes, in order of node hierarchy: a base layer node for rendering the base background, a grid layer node for rendering grid lines, a grid unit content layer node for rendering grid unit content, a selection highlight layer node for rendering the selected state, a hover feedback layer node for rendering the hover effect, a dynamic prompt box layer node for rendering the prompt box, and a menu layer node for rendering the context menu.

[0047] For example, in the Qt scene graph framework, base layer nodes, such as wafer nodes, inherit from QSGNode to render the wafer background, use QSGGeometryNode to create circular geometry, define wafer material properties through QSGMaterial, and support dynamic color and transparency adjustments.

[0048] The GridNode inherits from QSGNode, implements the rendering of grid lines, uses QSGGeometryNode to create line segment geometry, and supports dynamic grid density adjustment and implementation of grid line display / hiding control.

[0049] The CellNode, which inherits from QSGNode, renders the content of the cell, uses QSGGeometryNode to create rectangular geometry, and supports different types of exposure cells to display and manage the lifecycle of all exposure cell child nodes within the cell.

[0050] The ShotNode, which is an exposure unit rendering node, inherits from QSGNode and implements the rendering of specific exposure units. It uses QSGGeometryNode to create the geometry of the exposure unit (rectangle, circle, etc.), defines the color and material of the exposure unit through QSGMaterial, and supports the transformation of the exposure unit (translation, rotation, scaling).

[0051] The SelectionNode inherits from QSGNode to render the selected state, uses QSGGeometryNode to create a highlight border, and supports visual feedback for various selection states and implements selection animation effects.

[0052] The HoverNode inherits from QSGNode to implement mouse hover effects. It uses QSGGeometryNode to create hover highlights and implements real-time updates of the hover state.

[0053] The FlowTipsNode layer node inherits from QSGNode to implement dynamic tooltip rendering. It uses QSGGeometryNode to create the tooltip background and QSGTextNode to create the text content, and supports intelligent positioning and dynamic display of the tooltip.

[0054] The menu layer node (ShotTypeMenuNode) inherits from QSGNode to implement menu rendering. It uses QSGGeometryNode to create the menu item background and QSGTextNode to create the menu text. It also supports checkboxes and state management for menu items.

[0055] All nodes are organized in Z-axis order to ensure correct occlusion relationships. Transformations of parent nodes are automatically passed to child nodes. Dynamic addition, deletion, and reordering of nodes are supported, and a dirty marking mechanism is implemented to update only changed nodes.

[0056] In this way, by setting different levels of rendering nodes, the problem of limited interaction methods that cannot meet the needs of complex data operations can be solved. Furthermore, for specialized nodes, such as the selection highlight layer node used to render the selected state, multiple selection modes can be supported, such as single selection, multiple selection (Ctrl+click), and bounding box selection (dragging a rectangle), and forward selection (user-initiated selection) and reverse positioning (search positioning) can be supported. Moreover, combined with the control functions of the component layer, unified management and visual feedback of the selection state can be achieved, and batch operations on selection results can be supported.

[0057] For example, in the component layer, the interaction controller manages all interaction events in a unified manner. Through the coordinate transformation unit of the viewport controller, it can determine the target grid unit of the user's operation, support complex selection logic by maintaining a list of selection states, and update visual feedback in real time to provide immediate response.

[0058] Specifically, the interaction controller may include a selection state management unit for storing the coordinates of selected grid cells using a set data structure. For single selection, it can directly select and clear previous selections; for bounding selection, it can calculate the range of grid cells included in the rectangular area; and for multiple selection, it can support an incremental selection mode through control key modifiers. Simultaneously, the selection state management unit can provide a selection state query interface to quickly determine whether a grid cell is selected, and provide a signal slot mechanism to notify changes in the selection state, triggering visual feedback updates.

[0059] Therefore, in the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the interaction controller includes a selection state management unit, which is used to store the coordinates of the selected grid unit using a set data structure, provide a selection state query interface to support quick determination of whether the grid unit is selected, and provide a signal slot mechanism to notify of changes in the selection state.

[0060] As mentioned above, to support both forward and reverse selection, an exposure unit search and positioning function can be provided to address the inefficiency of manual selection when users need to quickly locate and select exposure units with specific attributes. Specifically, it allows for precise searches based on exposure unit IDs and batch searches based on condition IDs, while also supporting automatic selection and highlighting of search results, as well as automatic focusing and zooming of search results.

[0061] Specifically, in the embodiments of this application, the search algorithm improves query efficiency by traversing all exposure unit objects and matching specified conditions, using hash table indexes to perform precise searches based on exposure unit IDs, performing batch searches based on condition IDs based on condition matching and result aggregation, designing a search result processor to automatically add matching exposure units to the selection list, calculating the enclosing area of ​​the search results and adjusting the viewport to achieve automatic focusing, and displaying the results in order of relevance or position to achieve search result sorting.

[0062] Figure 6 The illustration shows a flowchart of a positive selection process in a two-dimensional grid exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. Figure 7 The illustration shows a flowchart of a reverse selection process in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. For example... Figure 6 and Figure 7 As shown, users can make positive selections by actively selecting exposure units (Shots) through box selection / multi-selection, and make reverse selections by quickly locating exposure units through search criteria.

[0063] Therefore, in the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application, the selected highlight layer node is used to use a search algorithm to match the specified conditions by traversing all exposure unit objects, a hash table index is used to perform a precise search based on the exposure unit ID, a batch search is performed based on the condition ID based on condition matching and result aggregation, and the enclosing area of ​​the search results is calculated and the viewport is adjusted to automatically focus on the selected exposure unit.

[0064] The dynamic tooltip node provides interactive tooltips to address the issue of static displays consuming space and affecting display quality when users need to quickly access detailed information about the exposure unit. Specifically, the dynamic tooltip node can display a tooltip based on the hover feedback layer node when it detects a user's mouse hover, and uses an intelligent positioning algorithm to avoid exceeding the viewport boundary while dynamically updating the tooltip content.

[0065] That is, based on the dynamic tooltip node, in response to the detection of a hover state by listening to mouse movement events based on the hover feedback layer node, detailed information of the target exposure unit is extracted, the optimal display position of the tooltip is calculated, and the tooltip content is dynamically created and updated, such as... Figure 8 As shown. Here, Figure 8 The illustration shows a flowchart of a dynamic prompt in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. For example, rectangular nodes can be used to create the prompt box background, text nodes can be used to create the text content, and a position adjustment algorithm can be used to avoid boundary overflow.

[0066] Therefore, in the two-dimensional grid exposure unit display and interaction device based on the scene graph architecture according to the embodiments of this application, based on the dynamic prompt box node, in response to the detection of the hover state by listening to mouse movement events based on the hover feedback layer node, the detailed information of the target exposure unit is extracted, the optimal display position of the prompt box is calculated, and the prompt box content is dynamically created and updated.

[0067] The menu layer nodes provide menu interaction to address the inefficiency of traditional menu bars or toolbars when users need quick access to frequently used functions. For example, based on the menu layer nodes, a context menu can be displayed when right-clicking, and multi-selection mode exposure unit type settings and menu item checkbox display can be supported, while intelligent menu positioning can also be performed.

[0068] That is, based on the menu layer nodes, user click events are listened to to obtain the trigger location, menu items are generated according to the current selection state, and menu item selection events are processed to apply settings in batches, and menus are automatically positioned to avoid exceeding the viewport, such as... Figure 9 As shown. Figure 9 The illustration shows a flowchart of a two-dimensional mesh exposure unit display and menu display in an interactive device based on a scene graph architecture according to an embodiment of this application. For example, multiple rectangular nodes can be used to create menu items, enabling checkbox state management and supporting the dynamic display and hiding of menu items.

[0069] Therefore, in the two-dimensional grid exposure unit display and interaction device based on the scene graph architecture according to the embodiments of this application, based on the menu layer nodes, user click events are listened to to obtain the trigger position, menu items are generated according to the current selection state, menu item selection events are processed in batches to apply settings, and the menu is automatically located.

[0070] In addition, in this embodiment, snapshot mode and text optimization can be implemented to address the performance degradation caused by frequent text updates and complex nodes during interaction. Specifically, when an interaction state (zooming, panning, etc.) is detected during interaction, the system switches to snapshot mode, uses a pre-rendered snapshot image, dynamically adjusts the text display strategy based on the scaling factor to determine the text display density, adopts a single text node mode to reduce the number of nodes, and performs LOD (Level of Detail) control.

[0071] Therefore, by setting nodes in the scene layer and reserving extension interfaces based on modular thinking, it is possible to adapt to the needs of different application scenarios, solve the problems of difficulty in supporting complex data annotation, real-time status feedback, dynamic prompts and other functions, as well as the problem of tight coupling between components and applications, making it difficult to integrate them as general components.

[0072] For example, in the Qt scene graph framework, the mouse event handling mechanism of QQuickItem is used, user input is obtained through QMouseEvent, and state binding is performed using QProperty. Communication between components is achieved through the signal and slot mechanism, and QState is used to manage the interaction state transition.

[0073] In summary, the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application improves performance by more than 10 times compared with the traditional CPU rendering method by using graphics acceleration hardware. It can support smooth display of large-scale grids of 100×100 or more (60 frames per second), and the rendering performance does not increase linearly with the number of display elements. Figure 10 The illustration shows a schematic diagram of a large-scale mesh rendering effect in a two-dimensional mesh exposure unit display and interaction device based on a scene graph architecture according to an embodiment of this application. For example... Figure 10 As shown, for rendering a large number of exposure units, it supports a grid size of up to 1000*1000 and can support exposure units with nanometer-level precision, which can meet the needs of most photolithography processes.

[0074] In addition, the two-dimensional grid exposure unit display and interaction device based on scene graph architecture according to the embodiments of this application also has the following advantages.

[0075] Significantly improved interaction response speed: coordinate transformation time <1ms, a substantial improvement compared to the existing solution's 10-50ms; interaction response latency <50ms, providing a near real-time user experience; viewport clipping and LOD optimization ensure stable rendering performance.

[0076] The interaction methods are flexible and diverse: it supports multiple selection modes such as single selection, multiple selection, and box selection, breaking through the single selection limitation of existing solutions; it supports two interaction methods, forward selection and reverse positioning, providing a more efficient operation process; and its batch operation capability significantly improves work efficiency.

[0077] Rich and real-time information feedback: Dynamic prompts provide real-time detailed feedback on exposure unit information; right-click menus offer quick batch operation methods; visual feedback system provides instant status confirmation.

[0078] The display is clear and professional: the layered rendering architecture supports complex display effects; text optimization ensures readability at different scaling levels; and snapshot mode guarantees smooth interaction.

[0079] The coordinate system is unified and clear: the three-layer coordinate transformation system has a clear logic, is easy to understand and maintain; the coordinate transformation accuracy reaches the sub-pixel level, improving positioning accuracy; and the unified transformation framework reduces development complexity.

[0080] The architecture is modular and scalable: each subsystem is independent and scalable, easy to maintain and upgrade; a complete API interface and event system facilitate integration and expansion; the layered architecture supports the incremental development of functions.

[0081] Significant industrial application value: It supports visualization and interactive operation of complex process flows in photolithography; it supports accurate display and data analysis of measurement results in measurement equipment; and it supports the marking and rapid location of defect positions in inspection equipment.

[0082] Reduced development and maintenance costs: Component-based design reduces redundant development; a unified technology stack reduces learning costs; abundant documentation and examples reduce integration difficulty.

[0083] In other words, the embodiments of this application provide a cross-platform, high-performance, fully functional, smooth-operating, and easy-to-integrate two-dimensional grid exposure unit display and interaction device, which can support smooth display of large-scale grids of 100×100 or more, provide smooth zooming, panning, focusing and other interaction methods similar to map applications, support multiple selection modes such as single selection, multiple selection, box selection, and conditional selection, and support a variety of exposure unit types, complex data annotation, real-time status feedback, dynamic prompt boxes, right-click menus and other rich functions.

[0084] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0085] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0086] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0087] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0088] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A two-dimensional grid exposure unit display and interaction device based on a scene graph architecture, comprising: The application layer provides user interface and business logic interface; The component layer provides the main control and function controller for the exposure unit diagram; A scene layer is used to manage display interaction functions through a node-tree-based scene graph for graphics-accelerated hardware-based display interaction rendering, where each node in the node tree serves as an independent geometric node corresponding to a variable display interaction function; and, The rendering framework layer provides the basic graphics display functionality for the aforementioned display and interactive features.

2. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 1, wherein, The scene layer is used to create a geometry buffer for the geometry nodes in the graphics acceleration hardware and to convert the mesh data of the two-dimensional mesh into vertex data that can be recognized by the graphics acceleration hardware.

3. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 1, wherein, The component layer includes a main control that serves as a top-level container to coordinate the child nodes of each layer, an interaction controller that manages user input and selection states, and a viewport controller that manages viewport operations such as zooming, panning, and focusing.

4. The two-dimensional grid exposure unit display and interaction device based on scene graph architecture as described in claim 3, wherein, The viewport controller includes a coordinate transformation unit for converting the viewport coordinate system, content coordinate system, and grid coordinate system.

5. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 1, wherein, The node tree of the scene layer includes, in order of node hierarchy: The base layer node is used to render the base background, the grid layer node is used to render the grid lines, the grid cell content layer node is used to render the grid cell content, the selection highlight layer node is used to render the selected state, the hover feedback layer node is used to render the hover effect, the dynamic tooltip layer node is used to render the tooltip, and the menu layer node is used to render the context menu.

6. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 3, wherein, The interactive controller includes a selection state management unit, which uses a set data structure to store the coordinates of the selected grid cell, provides a selection state query interface to support quick determination of whether a grid cell is selected, and provides a signal slot mechanism to notify changes in the selection state.

7. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 5, wherein, Based on the selected highlight layer node, a search algorithm is used to match the specified conditions by traversing all exposure unit objects. A hash table index is used for precise search based on the exposure unit ID. Based on condition matching and result aggregation, a batch search is performed based on the condition ID. The enclosing area of ​​the search results is calculated and the viewport is adjusted to automatically focus on the selected exposure unit.

8. The two-dimensional grid exposure unit display and interaction device based on scene graph architecture as described in claim 5, wherein, Based on the dynamic tooltip node, in response to the detection of a hover state by listening to mouse movement events based on the hover feedback layer node, detailed information of the target exposure unit is extracted, the optimal display position of the tooltip is calculated, and the tooltip content is dynamically created and updated.

9. The two-dimensional grid exposure unit display and interaction device based on a scene graph architecture as described in claim 5, wherein, Based on the menu layer nodes, listen for user click events to obtain the trigger location, generate menu items according to the current selection state, process menu item selection events to apply settings in batches, and automatically locate the menu.

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