Adaptive driver-based integrated vibration isolation and alignment platform

Abstract

This invention relates to an integrated vibration isolation and attitude adjustment platform based on an adaptive actuator, belonging to the field of actuator design technology, and solving the technical problem of the contradiction and difficulty in making trade-offs between "high bandwidth" and "high torque" in existing technologies. This integrated vibration isolation and attitude adjustment platform based on an adaptive actuator includes, from bottom to top: a base fixing platform, multiple adaptive output drive units, a three-degree-of-freedom guide unit, and a motion output platform. Through the rigid integration design of the adaptive output drive unit and the three-degree-of-freedom guide unit, this invention's integrated vibration isolation and attitude adjustment platform based on an adaptive actuator simultaneously achieves two core functions—high-bandwidth active vibration isolation and high-torque precise attitude adjustment—within a single compact unit. This hardware platform lays the physical foundation for the coordinated operation of these two functions, solving the fundamental problems of large size, strong coupling, and performance trade-offs caused by the separate systems in traditional solutions.

Description

Technical Field

[0001] This invention relates to the field of actuator design technology, and in particular to an integrated vibration isolation and attitude adjustment platform based on an adaptive actuator. Background Technology

[0002] In the field of ultra-precision manufacturing, ensuring nanometer-level relative positional stability and alignment accuracy requires minimizing the impact of environmental vibration disturbances, especially at low frequencies where they severely degrade. This necessitates the development of high-performance vibration isolation tables to guarantee the relative stability of the inertial space between two subsystems within precision equipment. Vibration isolation tables are categorized into passive, semi-active, and active types. Passive vibration isolation tables consist of mass, springs, and dampers, requiring no external energy input. However, since the parameters are fixed, they can only operate at frequencies higher than the operating frequency. A semi-active vibration isolation table (with a natural frequency several times higher than the passive vibration isolation table) also has vibration isolation performance. It also consists of mass, springs, and dampers. However, without sensors, it cannot automatically adjust its parameters according to changes in external conditions. An active vibration isolation table, building upon passive vibration isolation, incorporates sensors and actuators. By monitoring changes in external conditions, it adjusts its parameters (stiffness and damping) in real time and outputs active control force to counteract external environmental vibrations. Through continuous external energy input, it effectively suppresses low-frequency environmental vibrations, greatly compensating for the shortcomings of passive control and significantly increasing the system's vibration isolation bandwidth.

[0003] Even after suppressing the effects of environmental vibrations, pointing and attitude adjustment errors still affect the machining and measurement accuracy of precision equipment. High-precision pose compensation for workpieces, lenses, etc., eliminates pointing or attitude adjustment errors, ensuring machining and inspection results. To meet the attitude adjustment function of precision equipment, an additional attitude adjustment mechanism is often selected. However, connecting two systems in series complicates the overall system structure, and because the two systems are independent of each other, it significantly affects the effectiveness of vibration isolation and attitude adjustment.

[0004] In platform designs that integrate attitude adjustment and vibration isolation functions, if a single actuator is to perform both tasks, the issue of fixed performance characteristics of a single actuator needs to be addressed. Specifically, actuators used for efficient vibration isolation require extremely high dynamic response speed (high bandwidth) and good force control resolution, which typically necessitates characteristics such as low inertia and low inductance. On the other hand, actuators used for wide-range attitude adjustment require high output torque (or high thrust), which often contradicts the design requirements of high dynamic response. This inherent contradiction between "high bandwidth" and "high force" in traditional actuator design makes it difficult for a single actuator to achieve optimal performance in both tasks, often requiring compromises and thus limiting the overall performance ceiling of the integrated platform. Summary of the Invention

[0005] This invention aims to solve the technical problem of the contradiction and difficulty in choosing between "high bandwidth" and "high force" in the prior art, and provides a vibration isolation and attitude adjustment integrated platform based on an adaptive driver.

[0006] To solve the above-mentioned technical problems, the technical solution of the present invention is as follows:

[0007] An integrated vibration isolation and attitude adjustment platform based on an adaptive actuator includes, from bottom to top: a base fixing platform, multiple adaptive output drive units, a three-degree-of-freedom guide unit, and a motion output platform;

[0008] Among them, multiple adaptive output drive units are mounted on the base fixed platform, the three-degree-of-freedom guide unit is fixed to the upper end of the multiple adaptive output drive units, and the lower end of the motion output platform is fixed to the upper end of the three-degree-of-freedom guide unit.

[0009] The vibration isolation and attitude adjustment integrated platform also includes a vibration isolation and attitude adjustment control unit; the vibration isolation and attitude adjustment control unit includes: a main controller, a drive control module, multiple vibration sensors and multiple attitude sensors; each vibration sensor is fixed on an adaptive output drive unit, and each attitude sensor is fixed on a motion output platform; the main controller is electrically connected to multiple vibration sensors, multiple attitude sensors and the drive control module respectively; the drive control module is electrically connected to the adaptive output drive unit;

[0010] Vibration sensors are used to detect vibration signals;

[0011] Attitude sensors are used to detect attitude signals;

[0012] The main controller is used to analyze the vertical translational displacement and velocity information of the motion output platform based on the vibration signals measured by the vibration sensor, and to determine the vibration control strategy. The main controller is also used to analyze the rotational angular displacement and angular velocity information of the two mutually perpendicular horizontal directions of the motion output platform based on the attitude signals measured by the attitude sensor, and to determine the attitude control strategy.

[0013] The drive control module is used to adjust the output force of the adaptive output drive unit according to the vibration control strategy and attitude control strategy of the main controller to counteract the vibration force and attitude tilt angle on the motion output platform.

[0014] The three-degree-of-freedom guide unit is used to provide elastic guidance in the vertical direction, allowing the motion output platform to achieve linear displacement under the drive of the adaptive output drive unit.

[0015] In the above technical solution, on the upper surface of the motion output platform, in the projection area directly opposite each adaptive output drive unit, there is a sensor mounting space; each vibration sensor and an attitude sensor are mounted in the same sensor mounting space, so that the measurement points of the vibration sensor and the attitude sensor are close to the force application point of the corresponding adaptive output drive unit.

[0016] In the above technical solution, the sensor mounting space is a sunken or recessed structure.

[0017] In the above technical solution, the three-degree-of-freedom guide unit includes two layers arranged in parallel opposite directions: plate-type spring sheets;

[0018] The outer contour of each layer of plate spring sheets matches the corresponding mounting surface on the base fixing platform;

[0019] Each layer of plate-type spring sheet has a flexible deformation section at its center;

[0020] Each layer of plate-type spring sheet has a rigid frame around its outer edge;

[0021] Between the two layers of plate spring sheets, there is a limiting device that passes through the two layers of plate spring sheets; the limiting device is equipped with a locking element.

[0022] In the above technical solution, the adaptive output drive unit includes: a multi-layer coil wound axially; the multi-layer coil is divided into an upper working area, a middle working area and a lower working area from top to bottom;

[0023] The central working area occupies one-third to one-half of the total height of the multi-layer coil;

[0024] The number of turns and layers is the same in the upper and lower working areas.

[0025] The ratio of the number of turns and layers in the middle working area to the number of turns and layers in the upper or lower working area is 1:2 to 1:50.

[0026] In the above technical solution, the material of the three-degree-of-freedom guiding unit is manganese steel.

[0027] In the above technical solution, the material of the base fixing platform is:

[0028] Non-magnetic or weakly magnetic aluminum alloys, or

[0029] Titanium alloys that are non-magnetic or weakly magnetic.

[0030] The present invention has the following beneficial effects:

[0031] The vibration isolation and attitude adjustment integrated platform based on adaptive actuators of this invention achieves two core functions—high-bandwidth active vibration isolation and high-torque precise attitude adjustment—within a single compact unit through the rigid integration design of an adaptive output drive unit and a three-degree-of-freedom guide unit. This hardware platform lays the physical foundation for the coordinated operation of these two functions, solving the fundamental problems of large size, strong coupling, and performance trade-offs caused by the discrete nature of traditional solutions.

[0032] The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator of this invention adopts dual vibration / attitude sensor feedback, enabling the controller to determine in real time and accurately whether the platform is in a "micro-vibration" or "large tilt" state. Based on this, the control system dynamically and seamlessly switches control strategies: the outputs of the two control modes are adaptively fused and distributed in the current loop to achieve optimal performance under all operating conditions.

[0033] This invention presents an integrated vibration isolation and attitude adjustment platform based on an adaptive actuator. It employs an "adaptive output actuator with adjustable displacement-force characteristics," intelligently linking the actuator's output force constant to its own displacement. This resolves the fundamental contradiction inherent in traditional actuators, which must balance high dynamic response and high torque output. The platform exhibits a low force constant and low inductance in the central region, optimizing high-frequency dynamic response; and a high force constant in the two end regions, optimizing high torque output. Large displacements automatically trigger high-torque attitude adjustment, while small displacements automatically maintain high-bandwidth vibration isolation. Attached Figure Description

[0034] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0035] Figure 1 This is an assembly diagram of the vibration isolation and attitude adjustment integrated platform based on an adaptive driver according to the present invention.

[0036] Figure 2 This is a schematic diagram of the motion output platform structure in the vibration isolation and attitude adjustment integrated platform based on an adaptive driver of the present invention.

[0037] Figure 3 This is a schematic diagram of the plate-type spring sheet in the three-degree-of-freedom guide unit of the integrated vibration isolation and attitude adjustment platform based on adaptive actuator of the present invention.

[0038] Figure 4 This is a schematic diagram of the electromagnetic implementation of the adaptive output drive unit in the vibration isolation and attitude adjustment integrated platform based on adaptive driver of the present invention.

[0039] The reference numerals in the figure are:

[0040] 1-Base fixed platform; 2-Motion output platform; 3-Adaptive output drive unit; 4-Three-degree-of-freedom guide unit; 5-Vibration isolation and attitude adjustment control unit;

[0041] 21 - Sensor mounting space; 41 - Plate-shaped spring sheet; 411 - Flexible deformable part; 412 - Rigid frame. Detailed Implementation

[0042] The inventive concept of this invention is as follows:

[0043] The vibration isolation and attitude adjustment integrated platform based on adaptive actuator of the present invention introduces an intelligent actuator with adjustable displacement-force characteristics as a unified functional driving unit, so that the vibration isolation function and attitude adjustment function are adaptively switched according to the actual motion state of the load platform, suppressing low-frequency vibration of the environment while having excellent attitude adjustment performance.

[0044] The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator of this invention has core physical characteristics (equivalent force constant and dynamic response) that can intelligently change with its own output displacement. Using the adaptive actuator as the sole core driving unit, it constructs a physically unified and architecturally extremely simple vibration isolation and attitude adjustment integrated platform. This achieves a smooth adaptive transition from large displacement attitude adjustment to micro-amplitude vibration isolation, providing both vibration isolation performance and excellent attitude adjustment performance.

[0045] The present invention will now be described in detail with reference to the accompanying drawings.

[0046] like Figure 1 As shown, the vibration isolation and attitude adjustment integrated platform based on adaptive actuator of the present invention includes, from bottom to top, the following components arranged in sequence: base fixed platform 1, three adaptive output drive units 3, three-degree-of-freedom guide unit 4, and motion output platform 2; the three adaptive output drive units 3 are mounted on the base fixed platform 1, the three-degree-of-freedom guide unit 4 is fixed to the upper end of the three adaptive output drive units 3, and the lower end of the motion output platform 2 is fixed to the upper end of the three-degree-of-freedom guide unit 4.

[0047] The integrated vibration isolation and attitude adjustment platform also includes a vibration isolation and attitude adjustment control unit 5, which is electrically connected to the adaptive output drive unit 3. Specifically, the vibration isolation and attitude adjustment control unit 5 includes: a main controller, a drive control module, three vibration sensors, and three attitude sensors; each vibration sensor is fixed on an adaptive output drive unit 3, and each attitude sensor is fixed on the motion output platform 2; the main controller's first end is electrically connected to the three vibration sensors and the three attitude sensors respectively, and its last end is electrically connected to the drive control module; the drive control module is also electrically connected to the three adaptive output drive units 3. The vibration sensors are used to detect vibration signals; the attitude sensors are used to detect attitude signals.

[0048] The main controller analyzes the vibration signals measured by the vibration sensors to determine the Z-axis (vertical) translational displacement and velocity information of the motion output platform 2, and then determines the vibration control strategy for the integrated platform. The main controller also analyzes the X-axis and Y-axis (two mutually perpendicular horizontal directions) rotational angular displacement and angular velocity information of the motion output platform 2 based on the attitude signals measured by the attitude sensors, and then determines the attitude control strategy for the integrated platform. The drive control module adjusts the output force of the adaptive output drive unit 3 according to the vibration control strategy and attitude control strategy of the main controller to counteract the vibration force and attitude tilt angle on the motion output platform 2.

[0049] The vibration control strategy adopted by the main controller is as follows: based on the translational relative displacement of the motion output platform 2, a positive position feedback control strategy is adopted to adjust the stiffness of the integrated platform. Combined with the absolute velocity, an absolute velocity feedback control strategy is adopted to adjust the damping force of the integrated platform and suppress the vertical vibration of the motion output platform 2.

[0050] The attitude control strategy adopted by the main controller is as follows: the attitude of the integrated platform is adjusted by a proportional-integral control strategy based on the rotational angular displacement information of the X and Y directions of the motion output platform 2.

[0051] To ensure the accuracy of the measurement reference and signal quality, the upper surface of the motion output platform 2 has dedicated sensor mounting slots 21 in the projection area directly opposite each adaptive output drive unit 3 (see [reference]). Figure 2 The sensor mounting slot 21 is a recessed or recessed design. The vibration sensor and attitude sensor are integrated into one unit; each integrated vibration sensor and attitude sensor is mounted together in the same sensor mounting slot 21. This layout aims to bring the measurement points of the vibration sensor and attitude sensor as close as possible to the force application point of the corresponding adaptive output drive unit 3. In other embodiments, the vibration sensor and attitude sensor may also be set separately and independently.

[0052] The three-degree-of-freedom guiding unit 4 provides low-stiffness, long-stroke elastic guidance in the vertical direction (Z-axis), allowing the motion output platform 2 to achieve precise linear displacement under the drive of the adaptive output drive unit 3. Simultaneously, it provides low-stiffness rotational freedom in the rotational directions (Rx, Ry) around the two horizontal axes (X-axis and Y-axis), allowing the motion output platform 2 to adjust its pitch and yaw attitude. Conversely, it possesses high stiffness in the two horizontal translational directions (X-axis and Y-axis) and the rotational direction around the Z-axis, strictly constraining the horizontal parasitic motion of the motion output platform 2 and ensuring motion decoupling and system stability. Specifically, in this embodiment, the three-degree-of-freedom guiding unit 4 is implemented as a double parallel leaf spring flexible hinge. The core of this double parallel leaf spring flexible hinge consists of two identical layers of leaf spring plates 41 arranged in parallel opposite directions. The structure of a single layer of leaf spring plate 41 is as follows... Figure 3 As shown. The overall outer contour of the plate spring sheet 41 is designed to fit the corresponding mounting surface on the base fixing platform 1 to ensure stable peripheral fixation. The "smiley face" or approximately U-shaped hollow area at the center of the plate spring sheet 41 constitutes its flexible deformation part 411. This area, through a precisely calculated thin-walled beam structure, ensures the required vertical and rotational stiffness while becoming the part where elastic deformation occurs in a concentrated manner, thereby realizing the freedom of Z-axis translation and Rx, Ry rotation. Between the upper and lower plate spring sheets 41, at the rigid frame 412 on their outer edge, a limiting device consisting of a limiting post or sleeve is provided. These limiting devices pass through the corresponding positioning holes on the two plate spring sheets 41 and are supplemented with locking parts to strictly ensure the parallel alignment of the two plate spring sheets 41 throughout the entire movement process, prevent interlayer misalignment or tilting, and ensure guidance accuracy and motion decoupling.

[0053] The core of the adaptive output drive unit 3 is an intelligent actuator with adjustable displacement-force characteristics. This intelligent actuator is specially designed so that its output force constant (i.e., the output force generated per unit input) can change nonlinearly according to a predetermined law with the axial displacement of its mechanical output end. Specifically, when the output end is near the center of the stroke, the intelligent actuator exhibits a low equivalent force constant and dynamic damping, thus possessing superior high-frequency dynamic response capabilities, particularly suitable for suppressing micro-amplitude vibrations; when the output end moves towards both ends of the stroke, the equivalent force constant of the intelligent actuator increases significantly, thus enabling the output of a large-scale force with relatively low input, particularly suitable for driving large-range attitude corrections. Specifically, the adaptive output drive unit 3 used in this embodiment is an axial variable turns density electromagnetic actuator. The coil winding method of this axial variable turns density electromagnetic actuator adopts a non-uniform axial turns density distribution. Specifically, the winding density of the coil in the axial direction presents a symmetrical distribution pattern of 'dense at both ends and sparse in the middle'. Within the central working region, which occupies one-third to one-half of the total travel, the coil employs a single-layer or few-layer sparse winding. Extending towards both ends of the coil, the number of turns and layers increases, forming a multi-layer dense winding region. This unique winding process causes the coil's force constant (BL value) to vary with its axial position within the linear magnetic gap: when the coil is in the center of the gap, its effective number of turns is small, resulting in a lower force constant; as the coil moves towards the ends of the gap, the effective number of turns in the strong magnetic field increases significantly, leading to a substantial increase in the force constant. Specifically, the coil, occupying one-third to one-half of the total axial travel of the axially variable turn density electromagnetic actuator, […]. Figure 4 The number of turns and layers in the sparsely wound region shown is related to the upper or lower working region of the coil. Figure 4 The ratio of the number of turns to the number of layers in the densely wound area shown is 1:2 to 1:50.

[0054] The material of the three-degree-of-freedom guiding unit 4 is 65 manganese steel, which has a certain degree of flexibility and plasticity after heat treatment; the material of the base fixing platform 1 is non-magnetic or weakly magnetic aluminum alloy or titanium alloy.

[0055] In other specific embodiments, any actuation principle that can make the output force and the output end displacement exhibit the above-mentioned correlation change through material properties (such as piezoelectric stacking), fluid properties (such as magnetorheological fluid) or structural design can be applied to the driver of the present invention, and will not be elaborated here.

[0056] The vibration isolation and attitude adjustment integrated platform based on adaptive actuators of this invention achieves two core functions—high-bandwidth active vibration isolation and high-torque precise attitude adjustment—within a single compact unit through the rigid integration design of an adaptive output drive unit and a three-degree-of-freedom guide unit. This hardware platform lays the physical foundation for the coordinated operation of these two functions, solving the fundamental problems of large size, strong coupling, and performance trade-offs caused by the discrete nature of traditional solutions.

[0057] The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator of this invention adopts dual vibration / attitude sensor feedback, enabling the controller to determine in real time and accurately whether the platform is in a "micro-vibration" or "large tilt" state. Based on this, the control system dynamically and seamlessly switches control strategies: the outputs of the two control modes are adaptively fused and distributed in the current loop to achieve optimal performance under all operating conditions.

[0058] This invention presents an integrated vibration isolation and attitude adjustment platform based on an adaptive actuator. It employs an "adaptive output actuator with adjustable displacement-force characteristics," intelligently linking the actuator's output force constant to its own displacement. This resolves the fundamental contradiction inherent in traditional actuators, which must balance high dynamic response and high torque output. The platform exhibits a low force constant and low inductance in the central region, optimizing high-frequency dynamic response; and a high force constant in the two end regions, optimizing high torque output. Large displacements automatically trigger high-torque attitude adjustment, while small displacements automatically maintain high-bandwidth vibration isolation.

[0059] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A vibration isolation and attitude adjustment integrated platform based on an adaptive actuator, characterized in that, It includes, from bottom to top, the following components: a base fixing platform (1), multiple adaptive output drive units (3), a three-degree-of-freedom guide unit (4), and a motion output platform (2); Among them, multiple adaptive output drive units (3) are installed on the base fixed platform (1), the three-degree-of-freedom guide unit (4) is fixed to the upper end of the multiple adaptive output drive units (3), and the lower end of the motion output platform (2) is fixed to the upper end of the three-degree-of-freedom guide unit (4); The vibration isolation and attitude adjustment integrated platform also includes a vibration isolation and attitude adjustment control unit (5); the vibration isolation and attitude adjustment control unit (5) includes: a main controller, a drive control module, multiple vibration sensors and multiple attitude sensors; each vibration sensor is fixed on an adaptive output drive unit (3), and each attitude sensor is fixed on a motion output platform (2); the main controller is electrically connected to multiple vibration sensors, multiple attitude sensors and the drive control module respectively; the drive control module is electrically connected to the adaptive output drive unit (3); Vibration sensors are used to detect vibration signals; Attitude sensors are used to detect attitude signals; The main controller is used to analyze the translational displacement and velocity information of the motion output platform (2) in the vertical direction based on the vibration signal measured by the vibration sensor, and to determine the vibration control strategy; the main controller is also used to analyze the rotational angular displacement and angular velocity information of the two mutually perpendicular horizontal directions of the motion output platform (2) based on the attitude signal measured by the attitude sensor, and to determine the attitude control strategy. The drive control module is used to adjust the output force of the adaptive output drive unit (3) according to the vibration control strategy and attitude control strategy of the main controller to counteract the vibration force and attitude tilt angle on the motion output platform (2); The three-degree-of-freedom guiding unit (4) is used to provide elastic guidance in the vertical direction, allowing the motion output platform (2) to achieve linear displacement under the drive of the adaptive output driving unit (3).

2. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to claim 1, characterized in that, On the upper surface of the motion output platform (2), in the projection area directly opposite each adaptive output drive unit (3), there is a sensor mounting space (21); each vibration sensor and an attitude sensor are mounted in the same sensor mounting space (21), so that the measurement points of the vibration sensor and the attitude sensor are close to the force application point of the corresponding adaptive output drive unit (3).

3. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to claim 2, characterized in that, The sensor mounting space (21) is a recessed or grooved structure.

4. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to claim 1, characterized in that, The three-degree-of-freedom guide unit (4) includes two layers arranged in parallel opposite directions: plate-type spring sheets (41); The outer contour of each plate spring sheet (41) matches the corresponding mounting surface on the base fixing platform (1); Each layer of plate-type spring sheet (41) has a flexible deformation part (411) at its center. Each layer of plate-type spring sheet (41) has a rigid frame (412) on its outer edge; Between the two layers of plate spring sheets (41), there is a limiting device that passes through the two layers of plate spring sheets (41); the limiting device is provided with a locking element.

5. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to claim 1, characterized in that, The adaptive output drive unit (3) includes: a multi-layer coil wound in the axial direction; the multi-layer coil is divided into an upper working area, a middle working area and a lower working area from top to bottom; The central working area occupies one-third to one-half of the total height of the multi-layer coil; The number of turns and layers is the same in the upper and lower working areas. The ratio of the number of turns and layers in the middle working area to the number of turns and layers in the upper or lower working area is 1:2 to 1:

50.

6. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to any one of claims 1-5, characterized in that, The material of the three-degree-of-freedom guide unit (4) is manganese steel.

7. The vibration isolation and attitude adjustment integrated platform based on an adaptive actuator according to any one of claims 1-5, characterized in that, The material of the base fixing platform (1) is: Non-magnetic or weakly magnetic aluminum alloys, or Titanium alloys that are non-magnetic or weakly magnetic.

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