Separated connecting rod substrate conveying device

Abstract

A transfer device includes a frame forming a sealed chamber housing a processing vacuum; and a hinged arm connected to the frame, the hinged arm having an end joint about which it rotates and extends, and having a movable arm link and an end effector, with a substrate holding stage located on the end effector. The movable arm link has a housing containing at least one rotary joint. The housing is an assembly of multiple housing components sealed to maintain a sealing atmosphere within the processing vacuum of the sealed chamber; and these sealed housing components are interconnected via at least one mechanical joint to form a sealing interface through which the sealing atmosphere communicates between each sealed housing component of the housing.

Description

[0001] Cross-reference of related applications This application is a non-provisional patent application filed on September 8, 2023, in U.S. Provisional Patent Application No. 63 / 581,509, the entire disclosure of which is incorporated herein by reference. This application also claims the rights of U.S. Provisional Patent Application No. 63 / 581,512, filed on September 8, 2023, and No. 63 / 685,401, filed on August 21, 2024, the entire disclosure of which is incorporated herein by reference. Background Technology 1. Technical Field This disclosure generally relates to robotic systems, and more specifically, to robotic conveying systems.

[0003] 2. Brief overview of relevant progress Typically, transport robots used in high-vacuum semiconductor manufacturing environments are driven by a motor housed within the transport robot. This motor house is mounted to, for example, a vacuum transport chamber, where a coaxial drive shaft extends from the motor house into the vacuum environment. Here, the entire motor house can be sealed off from the vacuum environment (where the coaxial drive shaft extends through a seal), or the motor stator can be sealed off from the vacuum environment via, for example, a "canister" seal (such as those known in the art) and / or a magnetohydrodynamic seal. The robot arm is connected to the coaxial drive shaft, where one or more arm links of the robot arm are driven by belt and pulley drives. This arrangement allows each arm link to have the same vacuum environment as the vacuum transport chamber inside.

[0004] In other respects, the arm links of the transport robot can be directly driven, with the motor located at the joint of the arm link's axis of rotation. Here, an atmospheric environment is maintained within the arm link to help protect the motor and its encoder from corrosion caused by the vacuum environment. Furthermore, the range of large vacuum transport robots is increasingly longer than that of smaller robots, which has become a trend. In these large vacuum transport robots, the arm links are over approximately 400 mm long; maintaining an atmospheric environment within such arm links when the transport robot operates in a vacuum generates significant forces on the arm link walls (e.g., greater than approximately 3500 psi), which in turn necessitates increasing the thickness (and mass) of the arm link structure to support the increased forces acting on the arm link walls. Increasing the mass of the arm link also increases its inertia, thus requiring a larger motor to drive its rotation.

[0005] Elevated process temperatures are also a trend in semiconductor manufacturing. These rising process temperatures place higher demands on the performance of vacuum transport robots. As is recognized, the end effector, exposed to hot substrates and the interior of hot process module chambers, is the part of the transport robot that experiences the highest temperatures. For example, the end effector can experience temperatures of approximately 150°C when picking up / placing substrates into process chambers constructed for typical deposition processes. Such process temperatures are detrimental to the optimal operation of motors located at the joints of vacuum transport arms with direct-drive joints, and these temperatures often exceed the operating temperature of the motor encoders. As mentioned above, the motor stator and encoder must be isolated from the vacuum environment. Typically, ferrofluidic seals are used to seal the rotating joints of vacuum transport robots; however, the reliability of ferrofluidic seals decreases proportionally with increasing operating temperature.

[0006] Therefore, this disclosure resolves several of these problems. Attached Figure Description

[0007] The foregoing aspects and other features of this disclosure are described in the following description in conjunction with the accompanying drawings, wherein: Figure 1A-1I This is a schematic diagram of a substrate processing apparatus according to the present disclosure; Figure 2A-2H This is a schematic diagram of an exemplary substrate delivery device according to the present disclosure, which can be used in... Figure 1A-1I In any substrate processing device; Figures 3A-3H This is a schematic diagram of a portion of an exemplary substrate delivery device according to the present disclosure, which can be used for... Figure 1A-1I In any substrate processing device; Figures 4A-4F This is a schematic diagram of the partitioned arm linkage structure of the substrate transport device according to the present disclosure; Figure 5 Based on this disclosure Figures 4A-4F A schematic diagram of a part of the arm linkage structure; Figure 6 Based on this disclosure Figures 4A-4F A schematic diagram of a part of the arm linkage structure; Figure 7 , 7A 7B is in accordance with this disclosure. Figures 4A-4F A schematic diagram of each part of the arm linkage structure; Figures 8A-8C Based on this disclosure Figures 4A-4F A schematic diagram illustrating exemplary connections between the various parts of the arm linkage structure; Figure 9This is an exemplary illustration of the Gray code pattern of the encoder of the substrate delivery apparatus described herein according to this disclosure; Figure 10 It is an exemplary dial of an encoder for a substrate delivery apparatus as described herein according to this disclosure; Figure 11A-11C These are schematic diagrams of various portions of an exemplary substrate delivery apparatus according to the present disclosure, which can be used in... Figure 1A-1I In any substrate processing device; Figure 12 Based on this disclosure Figure 11A-11C A schematic diagram of a portion of the partitioned arm linkage structure of the substrate delivery device; Figure 13A Based on this disclosure Figure 11A-11C A schematic diagram of a portion of the partitioned arm linkage structure of the substrate delivery device; Figure 13B Based on this disclosure Figure 3A-4F A schematic diagram of a portion of the partitioned arm linkage structure of the substrate delivery device; Figure 13C Based on this disclosure Figure 3A-4F A schematic diagram of a portion of the substrate delivery device; and Figure 14 , 15 16 and 17 are example flowcharts of the methods according to this disclosure. Detailed Implementation

[0008] The following detailed description is intended to help those skilled in the art to understand and is not intended to unduly limit the claims related to or relating to this disclosure in any way.

[0009] The following detailed description references various figures, where the same reference numerals indicate the same parts and features in various figures, regardless of whether a specific figure is referenced.

[0010] The word “each” as used in this article refers to a single item (i.e., the item) when referring to a single item, or each item when referring to multiple items. The words “a,” “one,” and “the” as used in this article all include “at least one” and “one or more,” and therefore do not restrict the nouns mentioned to their “singular” form.

[0011] Figure 1A-1I This is a schematic diagram of a substrate processing apparatus according to the present disclosure. Although the present disclosure will be described with reference to the accompanying drawings, it should be understood that the present disclosure can be implemented in many forms. Furthermore, any suitable size, shape, or type of element or material can be used.

[0012] This disclosure provides a vacuum transport robot whose reliability, accuracy, and throughput at high temperatures are comparable to or higher than those of conventional vacuum robot architectures.

[0013] This disclosure provides a method for Figure 1A-1I Vacuum substrate transport apparatus 104 (which can also be used in atmospheric environments) of substrate processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G. Transport apparatus 104 can be configured to operate at high process temperatures (e.g., about 70°C, about 100°C, about 150°C, or higher, according to the semiconductor processes described herein). Substrate transport apparatus 104 includes a hybrid rotary sealing method in which a ferrofluidic seal is placed in a cooler location within the substrate transport apparatus (e.g., away from the end effector and wrist joint, at temperatures of about 70°C or below), which improves the reliability of the substrate transport apparatus compared to conventional transport apparatuses. The wrist axis WX includes at least one vacuum isolation wall and is encapsulated with a rotor and a magnetic encoder for cleanliness and corrosion resistance (the magnetic encoder allows for higher operating temperatures of substrate transport apparatus 104, such as the high process temperatures described herein).

[0014] The various parts of the electrically driven joint, which houses at least the motor stator and motor encoder, share a common pressurized environment that is sealed and isolated from a vacuum or depressurized environment. The sealing method of the various parts of the electrically driven joint affects the operation of the substrate transport device 104 when exposed to high process temperatures. This disclosure provides a large transport device with a lighter arm link compared to conventional large transport devices (e.g., with an arm link longer than 400 mm). The arm link can be divided into multiple compartments such that only the parts requiring pressurization are isolated from the vacuum environment (also referred to herein as a depressurized environment or a static internal environment), while other parts are in a depressurized state (e.g., having substantially the same vacuum / process pressure as the vacuum environment). The compartments of the arm link can provide a pressurized atmospheric environment for the isolated parts, wherein the volume of the pressurized atmospheric environment minimizes the surface area of ​​the respective arm link exposed to the vacuum environment (and the resulting pressure differential). The remaining portion of the arm link volume located outside the atmospheric compartment can be in a depressurized state and located in a vacuum / depressurized environment.

[0015] The segmented boom linkage provides active forced convection cooling to each boom joint through a shared, co-pressurized environment. This active forced convection cooling cools the boom and extends the life of bearings and / or lubricants. Compared to traditional large conveyor systems, the segmented boom linkage allows for thinner structural components, reducing the boom linkage's mass and inertia. This reduced mass and inertia decreases the motor torque requirements for rotating the boom linkage, resulting in lower motor power consumption, smaller power cables, and reduced heat generated by the motor. The reduced forces on the boom linkage minimize deformation and stress, which benefits the planarity of the boom's motion trajectory.

[0016] Still referencing Figure 1A-1I The present disclosure illustrates substrate processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G, such as semiconductor tool tables. Although semiconductor tool tables are shown, the present disclosure is applicable to any tool table or application employing a robotic arm. Processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G are shown with a clustered tool arrangement (e.g., a substrate holding stage connected to a central chamber); however, the processing apparatus may be a linearly arranged tool, or the present disclosure may be applicable to any suitable tool table. Apparatuses 100A, 100B, 100C, 100D, 100E, 100F, and 100G generally include an atmospheric front end 101, at least one vacuum loading lock 102, 102A, or 102B, and a vacuum back end 103. At least one vacuum loading lock 102, 102A, 102B can be connected to any suitable port or opening of the front end 101 and / or the rear end 103 in any suitable arrangement. For example, one or more loading locks 102, 102A, 102B can be arranged side-by-side in a common horizontal plane, such as... Figure 1B , 1D Visible in -1H. One or more load locks can be arranged in a grid pattern, such that at least two load locks 102A, 102B, 102C, 102D are arranged in rows (e.g., with spaced horizontal planes) and columns (e.g., with spaced vertical planes), as shown. Figure 1I As shown. One or more load locks can be as follows: Figure 1A The single in-line loading lock 102 is shown. At least one loading lock 102, 102E can be as follows: Figure 1CThe load locks are arranged in a stacked, in-line configuration. Although the load locks are illustrated as being located on the end 100E1 or face 100F1 of the transport chambers or transfer devices 125A, 125B, 125C, 125D, 125E, 125F, 125G (each transport chamber or transfer device has a frame TCF forming a sealed chamber configured to maintain a process vacuum (e.g., high vacuum) therein), one or more load locks may be arranged on any number of sides 100S1, 100S2, ends 100E1, 100E2, or faces 100F1-100F8 of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G. Each of at least one load lock may also include one or more wafer / substrate support planes (WRPs). Figure 1C The substrate is held on a suitable support within the respective loading lock in the substrate support plane. The tool table can have any suitable configuration. Components of each of the front end 101, at least one loading lock 102, 102A, 102B, and the rear end 103 can be connected to a controller 110, which can be part of any suitable control architecture, such as a cluster architecture control. The control system can be a closed-loop controller having a master controller, a cluster controller, and an autonomous remote controller, such as the controller disclosed in U.S. Patent No. 7,904,182, entitled “Scalable Motion Control System,” issued March 8, 2011, the entire disclosure of which is incorporated herein by reference. Any suitable controller and / or control system can be used.

[0017] Front end 101 typically includes a loading port module 105 and a micro-environment 106, such as a device front-end module (EFEM). The loading port module 105 can be a BOLTS (Board Opener to Tool Standard) interface conforming to SEMI standards E15.1, E47.1, E62, E19.5, or E1.9, for a 300 mm loading port, front-opening or bottom-opening box / chamber, or cassette. The loading port module can be configured as a 200 mm wafer / substrate interface, a 450 mm wafer / substrate interface, or any other suitable substrate interface, such as larger or smaller semiconductor wafers / substrates, flat panel displays, solar panels, photomasks, or any other suitable object. Although in Figure 1A , 1BThree loading port modules 105 are shown in 1D, 1E, 1F, 1G, and 1H, but any suitable number of loading port modules can be incorporated into the front end 101. Loading port modules 105 can be configured to receive substrate carriers or cassettes C from overhead transport systems, automated guided vehicles, personnel-guided vehicles, rail-guided vehicles, or any other suitable transport method. Loading port modules 105 can be connected to the microenvironment 106 via loading port 107. Loading port 107 allows the substrate to pass between the substrate cassette and the microenvironment 106.

[0018] The microenvironment 106 may typically include any suitable handling robot 108, which may incorporate one or more features of this disclosure as described herein. Robot 108 may be a track-mounted robot, such as those described in U.S. Patents 6,002,840 (issued December 14, 1999), 8,419,341 (issued April 16, 2013), and 7,648,327 (issued January 19, 2010), the entire contents of which are incorporated herein by reference. Robot 108 with respect to rear end 103 may be substantially similar to the robot described herein. The microenvironment 106 may provide a controlled clean area for transferring substrates between multiple loading port modules.

[0019] At least one vacuum loading lock 102, 102A, 102B may be located between and connected to the microenvironment 106 and the rear end 103. However, the loading port 105 may be substantially directly connected to at least one loading lock 102, 102A, 102B or transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, wherein the substrate carrier C is evacuated to the vacuum of the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, and the substrate is transferred directly between the substrate carrier C and the loading lock or transport chamber. The substrate carrier C may act as a loading lock, such that the processing vacuum of the transport chamber extends into the substrate carrier C. Where the substrate carrier C is substantially directly connected to the loading lock via a suitable loading port, any suitable transfer device may be located within the loading lock or otherwise accessible to the carrier C for transferring the substrate to and from the substrate carrier C. The term "vacuum" as used in this article can refer to a high vacuum, such as 1 × 10⁻⁶, in which the substrate is processed. - 5Torr or lower. At least one loading lock 102, 102A, 102B may typically include an atmospheric valve and a vacuum slit valve. The slit valves of loading locks 102, 102A, 102B (and for the processing stage 130) provide environmental isolation for evacuating the loading locks after loading the substrate from the atmospheric front end and for maintaining a vacuum in the delivery chamber when the loading locks are vented with an inert gas (e.g., nitrogen). The slit valves of the processing devices 100A, 100B, 100C, 100D, 100E, 100F, and 100G may be located in the same plane, in different vertical stacking planes, or in a combination of slit valves located in the same plane and slit valves located in different vertical stacking planes (as described above regarding the loading ports) to facilitate the transfer of substrates to at least processing stage 130 and loading locks 102, 102A, and 102B connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G, and from at least processing stage 130 and loading locks 102, 102A, and 102B connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G. At least one loading lock 102, 102A, 102B (and / or front end 101) may also include an aligner ALN for aligning the substrate reference marks to the location required for processing, or any other suitable substrate metrology device. The vacuum loading lock may be located in any suitable location of the processing apparatus and may have any suitable configuration.

[0020] The vacuum backend 103 typically includes transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, one or more processing stages 130, and any suitable number of transfer unit modules 104 (also referred to herein as substrate transport devices), which contain one or more handling robots that may include one or more features of this disclosure as described herein. The transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G may have any suitable shape and size, for example, conforming to SEMI Standard E72 Guide. The transfer unit modules 104 and one or more handling robots, which may be at least partially located within the transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G, are described below for transferring substrates between loading locks 102, 102A, 102B (or cassette C located at the loading port) and the respective processing stages 130. The transmission unit module 104 can be detached from the transmission chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G as a modular unit, making the transmission unit module 104 compliant with SEMI standard E72 guidelines.

[0021] Stage 130 can operate on a substrate using various deposition, etching, or other types of high-vacuum processes to form circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin-film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), metrology, rapid thermal processing (RTP), dry lift-off atomic layer deposition (ALD), oxidation / diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonding, and evaporation or other thin-film processes using vacuum pressure. Stage 130 is communicatively connected to transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G in any suitable manner (e.g., via a slot valve SV), thereby allowing substrates to be transferred from transport chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G to stage 130 and vice versa. The slot valves SV of transport chambers 125A, 125B, 125C, 125D, 125E, 125F, and 125G can be arranged to allow connection of dual processing stages (e.g., more than one substrate processing chamber located within a common housing) or side-by-side processing stages 130T1, 130T2, single processing stage 130S, and / or stacked process modules / loading locks. Figure 1C and 1I ).

[0022] It should be noted that when one or more arms of the transfer unit module 104 are aligned with the predetermined processing stage 130, transfer of substrates to and from the processing stage 130 and to the loading locks 102, 102A, 102B (or cassette C) connected to the transfer chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G can occur. According to this disclosure, one or more substrates can be transferred individually or substantially simultaneously to the respective predetermined processing stage 130 (e.g., as shown in the image). Figure 1B , 1D As shown in 1H, for example when picking up / placing a substrate from a side-by-side or tandem processing stage). The transfer unit module 104 can be mounted on the arm 143 (e.g., see 1H). Figure 1E , 1F , 1H) or linear carriage 144 (e.g., see Figure 1C The disclosures of, for example, those described in U.S. Patent No. 10,777,438 (titled “Processing Apparatus,” issued September 15, 2020) and International Patent Application No. PCT / US13 / 25513 (titled “Substrate Processing Apparatus,” filed February 11, 2013) are incorporated herein by reference in their entirety.

[0023] refer to Figure 2A and 2BAn exemplary boom arm configuration will be described, to which the transfer unit module 104 can be coupled. The boom arm 143 and the transfer unit module 104 can be collectively referred to as a substrate delivery device (however, if the transfer unit module 104 is used without the boom arm 143, then as described herein, the transfer unit module can be referred to as a substrate delivery device). The boom arm 143 can be a single non-hinged linkage boom 220 ( Figure 2A ), or articulated boom 222 ( Figure 2B ).

[0024] refer to Figure 2A A single non-hinged linkage boom 220 is rotatably connected to the frame or base 201 of the conveyor. The base 201 includes a drive section 200 configured to rotate the boom 220 about a boom rotation axis BSX. A transfer unit module 104 is connected to the distal end of the boom 143 (opposite to the boom rotation axis BSX). Although the transfer unit module 104 is illustrated as having a SCARA arm 210 (or dual SCARA arms 210, 210A), the transfer unit module 104 can have any suitable arm configuration, including but not limited to the configurations described herein.

[0025] refer to Figure 2B The articulated boom 220 includes an upper boom link 220, the proximal end of which is rotatably connected to the frame or base 201 of the conveyor (at the boom rotation axis BAX). The other or distal end of the upper boom link 220 is rotatably connected at the proximal end of the front boom link 221 at the boom joint rotation axis BEX, wherein the transmission unit module 104 is connected to and supported by the front boom link 221 at its distal end. The drive unit is configured to drive rotation of the upper boom link 220 about axis BSX and the front boom link 221 about axis BEX in any suitable manner. For example, the upper boom link 220 may be driven by a motor of the drive section 20, while the front boom link 221 is driven to rotate (e.g., a belt and pulley drive causes the rotation of the front boom link 221 to be driven by the frame 201), but the front boom link 221 and the upper boom link 220 may also be driven independently by their respective motors of the drive section 200. Although the articulated boom 222 is illustrated as having two links, the articulated boom 222 may have any suitable number of links connected in series with each other. Suitable examples of booms that may be used with this disclosure are described in U.S. Patent Application No. 15 / 215,143, filed July 20, 2016, entitled “Substrate Processing Apparatus,” the entire disclosure of which is incorporated herein by reference.

[0026] Although Figure 2A and Figure 2BThe transmission unit module 104 is illustrated as having a SCARA arm 210 (or dual SCARA arms 210, 210A) configuration, but the transmission unit module 104 can have any suitable transmission arm configuration, including but not limited to the configurations described herein. For example, the transmission unit module 104 can have any other desired arrangement, such as a frog leg arm 216 ( Figure 2C Configuration, jumping frog arm 217 ( Figure 2D ) configuration, double symmetrical arms 218 ( Figure 2E Configuration, etc. As another example, see [reference needed]. Figure 2F The transmission unit module 104 can be configured as a transmission arm 219. The transmission arm 219 includes at least first and second articulated SCARA arms 210 and 210A, wherein each arm 210 and 210A includes an end effector 211 configured to hold at least two substrates S1, S2 side-by-side in a common transmission plane (each substrate holding position of the end effector 211 shares a common actuator for picking up and placing substrates S1, S2), wherein the spacing DX between substrates S1, S2 corresponds to a fixed spacing between the side-by-side substrate holding positions. Reference Figure 2F and 2GThe SCARA arm 210 (and arm 210A) includes an upper arm 213, a forearm 212, and an end effector 211, which are connected in series to form an articulated chain arm link. The end effector 211 described herein has at least one substrate holding stage 211S, each substrate holding stage 211S having a predetermined center point or end effector reference point 211C. The end effector 211 is configured to hold a substrate S (also referred to herein as a wafer) at the substrate holding stage 211S and to transport the substrate within the substrate processing apparatus. At least one of the arm links 213, 212, and 211 is driven by a respective drive motor of a drive section. One or more of the arm links, such as the forearm 212 and / or the end effector 211, can be driven to rotate via any suitable belt and pulley drive (or other suitable transmission) to extend and retract the SCARA arm. Suitable examples of transmission arms that may be used in this disclosure can be found in U.S. Patents 6,231,297 (issued May 15, 2001), 5,180,276 (issued January 19, 1993), 6,464,448 (issued October 15, 2002), 6,224,319 (issued May 1, 2001), 5,447,409 (issued September 5, 1995), 7,578,649 (issued August 25, 2009), 5,794,487 (issued August 18, 1998), 7,946,800 (issued May 24, 2011), and 6,485,250 (issued November 26, 2002). U.S. Patent Application No. 13 / 293,717, filed November 10, 2011, entitled “Dual-Arm Robot”, and U.S. Patent Application No. 13 / 270,844, filed October 11, 2011, entitled “Coaxial Driven Vacuum Robot”, the entire contents of which are incorporated herein by reference. Suitable examples of belt / pulley drives that may be employed in this disclosure are described in U.S. Patent Nos. 5,682,795 (issued November 4, 1997), 5,778,730 (issued July 14, 1998), and 11,201,073 (issued December 14, 2021), the entire contents of which are incorporated herein by reference.

[0027] refer to Figure 2H The diagram illustrates another transmission unit module 104. Figure 2H The transmission unit module, like other transmission unit modules described herein, can be connected to boom 143 (e.g., see...). Figure 1H , 2A (and 2B), so that it can be transported by boom 143; it can be connected to linear carriage 144 (e.g., see 2B). Figure 1G ), so that it can be conveyed by linear carriage 144; or it can be fixed to the frame TFC of conveying chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G (e.g., Figure 1A-1I (as shown) (or the frame of the micro-environment 106). Here, the transmission unit module 104 includes a frame 266F to which the turret 266 is rotatably connected for rotation about the turret rotation axis TAX. The drive section 200 includes a turret driver 200R disposed on the turret rotation axis TAX for driving the turret 266 to rotate in the direction T3. The turret 266 includes transmission arm supports 270A and 270B extending from opposite sides of the turret 266, with each transmission arm 210, 210A, 216, 217, and 218 connected to these two transmission arm supports. The transmission arm supports 270A and 270B are spaced apart from each other such that the transmission arms are supported by the turret 266 in a side-by-side arrangement, wherein each of the side-by-side transmission arms includes an end effector 211 configured to hold at least one substrate side-by-side in a common transmission plane, wherein the spacing DX between substrates S1 and S2 corresponds to a fixed spacing between the side-by-side substrate holding positions (e.g., similar to the spacing between the substrates S1 and S2 in the micro-environment 106). Figure 2F The manner in which it is described, and the entire disclosure of U.S. Patent No. 10,134,621, issued November 20, 2018, are incorporated herein by reference.

[0028] The turret 266 may include one or more linear motors 200LM connected to respective transfer arm supports 270A, 270B for moving the respective transfer arm supports 270A, 270B along directions 271A, 271B to achieve adjustment of distance DX (or independent adjustment of respective distances DX1, DX2 from axis TAX) to take into account variability between substrate holding stages and to automatically center the independent wafers relative to the transfer arms held on the respective transfer arm supports 270A, 270B. Here, turret 266 provides individual or independent Cartesian coordinate adjustments for each respective transfer arm support 270A, 270B (and the respective transfer arms connected thereto) to maintain substrate alignment and reduce substrate change time, because the position correction achieved by Cartesian coordinate (e.g., XY) positioning of the end effector 211 of at least one transfer arm connected to transfer arm support 270A is performed in parallel with the Cartesian coordinate positioning of the end effectors 211, 211DS, 211DE, 211DT, 211DQ of at least one other transfer arm connected to transfer arm support 270B. Each transfer arm support 270A, 270B may include a respective Z-axis driver for moving the corresponding transfer arm held on that transfer arm support 270A, 270B independently of the Z-axis movement of the corresponding transfer arm held on the other transfer arm support 270A, 270B. Another Z-axis driver may be provided for moving turret 266 and any transfer arms connected thereto as a whole in the Z-direction.

[0029] refer to Figures 3A-3CAn exemplary vacuum substrate delivery device is illustrated having a base or frame 201 and a hinged arm 333 connected to the base 201. The base 201 may be connected to the frame of a substrate processing device (e.g., the frame of delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G). The hinged arm 333 has an end or shoulder (rotational) joint 309 (e.g., located at the shoulder axis SX) about which the hinged arm 333 rotates and extends. The hinged arm 333 may include at least one movable arm link 213, 212 and at least one end effector 211A, 211B connected to at least one movable arm link 213, 212. The hinged arm 333 is illustrated as a SCARA arm extending from the end joint 309 about which it rotates and extends, but the arm may have any suitable configuration, such as the configuration described herein. The SCARA arm has more than one arm link 213, 212 and at least one end effector 211A, 211B attached thereto. Each arm link 213, 212 is connected in series with the end effector 211A, 211B at the distal end of the SCARA arm. At least one movable arm link of the SCARA arm includes an upper arm link 213 and a forearm link 212. The proximal end of the upper arm link 213 is rotatably connected to a base 201 at a shoulder joint 309. The proximal end of the forearm link 212 is rotatably connected to the distal end of the upper arm link 213 at an elbow joint 310. At least one end effector is rotatably connected to the distal end of the forearm link 212 at a wrist joint 311. At least one end effector 211A, 211B is illustrated in relation to each other. Figure 2F The end effector 211DS consists of two end effectors 211A and 211B that are substantially similar; however, the at least one end effector may have any suitable configuration. Each end effector 211A and 211B includes at least one substrate holding stage SHS located thereon.

[0030] At least one movable arm link 213, 212 has a housing 213H, 212H, which includes at least one rotary joint (e.g., a corresponding one of shoulder joint 309 and elbow joint 310, with elbow joint 310 distal to shoulder joint 309) having a rotation axis. The at least one movable arm link 213, 212 is hingedly rotated about this rotary joint to achieve extension and retraction of the articulated arm 333. As described herein, at least one movable arm link 213, 212 has at least one circulating cooling cavity (also referred to herein as a cavity or pressure chamber ACH1-ACH5, PT1-PT3, the cavity or pressure chamber, and other features of the arm segment described herein may be formed in the arm as described herein, including but not limited to additive manufacturing, such as by additive manufacturing of the individual arm segments). At least one circulating cooling recess and an adjacent space in the outer casing 213H, 212H adjacent to the circulating cooling recess (e.g., such as...) Figure 3C The space shown is separate from and distinct from the space maintaining a vacuum or reduced pressure environment. At least one circulating cooling cavity is configured to house one or more electromechanical components (e.g., motors 200M1, 200M2, 200M3A, 200M3B, encoders 388, 389, 389A, and other electromechanical components described herein), wherein the one or more electromechanical components are disposed in a circulating cooling atmosphere within the circulating cooling cavity, which is separate from and distinct from the internal static environment (e.g., vacuum environment) of the housing (213H, 212) abutting against the circulating cooling cavity. The at least one circulating cooling cavity or pressurized chamber ACH1-ACH5 is located at the rotary joint of the hinge arm 333.

[0031] The circulating cooling cavities or pressure chambers ACH1-ACH5 house and cool one or more of the following: at least a portion of at least one sensor (e.g., drive motor encoders 388, 389, 389A or other suitable sensors); at least the stator of the arm drive motors 200M1, 200M2, 200M3A, 200M3B disposed at one or more of the end joints (e.g., shoulder joint) and at least one rotary joint (e.g., at least one elbow joint and wrist joint) of the articulated arm 333; and cables CBL (including but not limited to power cables and data communication cables). Pressure chambers ACH1-ACH5 can be cooled by conductive means (e.g., by cooling the articulated arm structure surrounding each pressure chamber ACH1-ACH5) via pulleys and / or motor bearings disposed at their respective end joints or rotary joints.

[0032] Each housing 213H, 212H is an assembly formed by housing components 370-375, which are sealed to maintain a sealed atmosphere within each housing 213H, 212H. Each housing 213H, 212H is located within a vacuum within a sealed chamber (e.g., delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G). The housings 213H, 212H are configured such that at least one movable arm link 213, 212 forms a pressure vessel (as described herein and as...). Figure 3C As shown), its axis of rotation (e.g., the axis of rotation of the shoulder and elbow joints) extends from the pressure vessel. Figure 3C As shown, the outer casings 213H and 212H are at least partially depressurized (see pressure vessels or pipes / conduits PT1-PT3) such that the walls 213W and 212W of the depressurized portions of the outer casings 213H and 212H are in pressure equilibrium within the wall thickness WTH range (e.g., the vacuum pressure on one side of the walls 213W and 212W is substantially the same as the vacuum pressure on the other side of the walls 213W and 212W). The depressurized portions of the outer casings 213H and 212H are configured to be proportionate to the static and dynamic loads applied to at least one movable arm link 213 and 212 by the corresponding static and dynamic operating conditions of the articulated arm 333, and are unaffected by differential pressure loads.

[0033] The sealing housing components 370-375 of the respective outer shells 213H and 212H are interconnected by at least one mechanical or fastening joint MJ to form a sealed or pressure-load-bearing interface (see...). Figure 3B The sealing atmosphere is communicated through this interface between each sealing housing component of the outer casings 213H and 212H and between each other sealing housing component (e.g., the sealing housing components share a common pressurized environment, wherein pressure chambers ACH1-ACH5 in one arm link 213, 212 can receive supplied coolant from other pressure chambers ACH1-ACH5 in the other arm link 213, 212). The sealing housing components 370-375 are connected to each other to achieve pressure balance between the vacuum or depressurized environment inside the outer casings 213H and 212H and the vacuum or depressurized environment on the outer walls of the outer casings 213H and 212H (see...). Figure 3C —For example, the interior portions of the outer casings 213H and 212H are under essentially the same pressure as a vacuum environment. Figure 3B In this configuration, a sealing interface divides at least one movable arm link 213, 212 in two between one end portion 370, 372, 373, 375 of the movable arm link 213, 212 and another end portion 370, 372, 373, 375. Figure 3BIn this configuration, the sealing interface divides the outer wall of the outer casing 213H, 212H or the outer casing 213W, 212W into two parts. The sealing interface forms a pressure load-bearing compartment, space, or cavity (PSBC). The PSBC includes more than one pressure load-bearing compartment, space, or cavity (e.g., a cavity, pressurization chamber, or circulating cooling cavity ACH1-ACH5, PT1-PT3) distributed via at least one movable arm link 213, 212, wherein each pressurization chamber ACH1-ACH5, PT1-PT3 is in communication with each other pressurization chamber ACH1-ACH5, PT1-PT3. At least in Figure 3C In the case of at least one of the movable arm links 212, 213, at least one pressurized chamber ACH1-ACH5, PT1-PT3 (also referred to herein as a circulating cooling cavity) is connected via at least one rotary joint (e.g., a rotary joint such as an elbow joint / axis) to another pressurized chamber ACH1-ACH5, PT1-PT3 of the other of the at least one movable arm link 212, 213 of the articulated arm 333, such that the sealing atmosphere ATM is shared or otherwise connected between at least one pressurized chamber ACH1-ACH5, PT1-PT3 of the at least one movable arm link 212, 213 and another pressurized chamber ACH1-ACH5, PT1-PT3 of the other of the at least one movable arm link 212, 213 via a rotary joint.

[0034] Figure 3C An exemplary schematic diagram of the sealed communication between each housing component is provided, wherein the pressurized environment within the sealed atmosphere (compared to the vacuum or depressurized environment of the chamber in which the substrate transfer arm is placed) extends from the base 201 to the wrist housing component 375 with a minimized volume, thereby minimizing the exposure of the sealed boundary of the sealed atmosphere to the vacuum environment. When a ferrofluidic seal FFS is used between the drive shafts 200M1D, 200M2D and the corresponding motor housings, at the shoulder axis SX and elbow axis EX, the motor stator and motor rotor (see...) Figure 3D Both can be placed in an atmospheric environment. For example, at the wrist axis WX, when no ferrofluid seal is used, the stator is isolated from the vacuum by an isolation wall (as described herein, so that one or more pressurized chambers ACH1-ACH5 accommodate at least the stator of the arm drive motor located at the rotary joint), and the rotor is in a vacuum environment.

[0035] At least one sealed housing component 370, 372, 373, 375 is an end portion or coupling of at least one movable arm link 213, 212. At least one sealed housing component 370, 372, 373, 375 accommodates at least one rotary joint 309, 310, 311 (or at least a portion thereof), wherein at least one rotary joint 309, 310, 311 is contained within at least one sealed housing component 370, 372, 373, 375 of at least one movable arm link 213, 212. See also, for example, [reference needed]. Figures 4A-4E The movable arm links 213 and 212 may be reconfigurable arm links 213R and 212R, having modular composite arm link housings or shells 213H and 212H, formed by link housing modules rigidly connected to each other. The rigidly connected link housing modules may include end couplings 370, 372, 373, and 375 (also referred to herein as link housing end modules or shell components), which are connected via at least one central arm segment 371 and 374 (also referred to herein as interchangeable link housing extension modules or extruded arm housing components), the central arm segment having predetermined features for determining the length OAL of the movable arm links 213 and 212. At least one central arm segment 371, 374 is optional for connection to end couplings 370, 372, 373, 375, and forms reconfigurable arm links 213R, 212R from multiple different central arm segments (interchangeable link housing extension modules) 371A1-371An, 374B1-374Bn, each central arm segment having different corresponding predetermined features for determining corresponding different lengths of movable arm links 213, 212, thereby selectively configuring modular composite arm link housings 213H, 212H and reconfiguring arm links 213R, 212R from multiple predetermined arm link lengths OALn to a single predetermined arm link length OAL (each different length OALn corresponds to a different length CAL1-CALn of the different central arm segments 371A1-371An, 374B1-374Bn).

[0036] As an example, each of the upper arm link 213 and the forearm link 212 is a modular arm link, each having a respective central arm segment 371, 374 and a respective end coupling 370-375. For example, the upper arm link 213 includes a proximal end coupling 370 that forms the proximal end 213E1 of the upper arm link 213. The central arm segment 371 is connected to the proximal end coupling 370 in any suitable manner, such as by any suitable removable fastener. The distal end coupling 372 is connected to the central arm segment 371 opposite to the proximal end coupling 370, thereby forming the distal end 213E2 of the upper arm 213. Similarly, the forearm link 212 includes a proximal end coupling 373 that forms the proximal end 212E1 of the forearm link 212. The center arm segment 374 is connected to the proximal end coupling 370 in any suitable manner, such as using any suitable removable fastener. The distal end coupling 375 is connected to the center arm segment 374 opposite to the proximal end coupling 373, thereby forming the distal end 212E2 of the forearm link 212.

[0037] As described herein, the central arm segments 371, 374 have a closed cross-section (e.g., a closed box shape). For example, the central arm segments 371, 374 include an integral tubular frame 410F, which can have any suitable cross-section. Figures 4A-4E In the example shown, the tubular frame 410F has a rectangular cross-section; however, its cross-section can be square, circular, oval, I-beam shaped, slotted C-shaped, or U-shaped, or any combination thereof. The central arm segments 371, 374 are mechanically fastened to each of the end couplings 370, 372, 373, 375, thereby forming the modular composite arm link housings 213H, 212H. The central arm segments 371, 374 are mechanically fastened to each of the end couplings 370, 372, 373, 375 via mechanical fastener joints (including removable mechanical fasteners described below) to form the modular composite arm link housings 213H, 212H.

[0038] The tubular frame 410F includes end flanges 540 and 541 configured to connect any one of end couplings 370, 372, 373, and 375 to the tubular frame 410F. Flanges 540 and 541 may be integrally formed with the tubular frame 410F or connected to the tubular frame 410F in any suitable manner. For example, flanges 540 and 541 may be forged, cast, or molded together with the tubular frame 410F; however, flanges 540 and 541 may also be connected to the tubular frame by welding, mechanical fasteners, adhesives, friction fits (e.g., shrinkage fits, press fits, etc.), clamps, or any other suitable manner. End flanges 540 and 541 may include locating features (e.g., holes 545 and slots 546), and end couplings 370, 372, 373, and 375 may include mating locating features (e.g., pins 547 or other protrusions that engage with the locating features of end flanges 540 and 541—see Figure 5 (c) These positioning features orient / position each end coupling 370, 372 (or end couplings 373, 375 relative to the forearm link 212) of the upper arm link 213 to the center arm segment 371 (or center arm segment 374 relative to the forearm link 212) and relative to each other in at least two degrees of freedom. The positioning features and mating positioning features can be asymmetrical, thereby providing error-proofing to the connection (e.g., asymmetrical positioning features significantly prevent assembly errors when the end couplings are connected to the corresponding center arm segments). See also... Figure 8AThe positioning features may include protrusions 4100 and grooves 4110 formed in the central arm segments 371, 374 and the end couplings 370, 372, 373, 375, wherein the protrusions 4100 and grooves 4110 are configured to position the end couplings 370, 372, 373, 375 relative to the respective central arm segments 371, 374 in predetermined positions. For example, the central arm segments 371, 374 may include grooves 4110, and the end couplings 370, 372, 373, 375 may include protrusions 4100, wherein the grooves 4110 receive the respective protrusions 4100 to position the end couplings 370, 372, 373, 375 relative to the respective central arm segments 371, 374 in predetermined positions, but the end couplings may include grooves and the central arm segments may include protrusions. The grooves and protrusions can be continuous and extend around the entire peripheral edge of the respective end coupling and the central arm segment; however, they can also be discontinuous, extending around a predetermined portion of the peripheral edge of the respective end coupling and the central arm segment. The protrusions and grooves can mate with one or more pins / holes / slots such that when the grooves and protrusions position the end coupling relative to the central arm segment in a predetermined position, the pins / holes / slots define the directional assembly orientation of the end coupling relative to the central arm segment (e.g., which surface of the end coupling is the top, bottom, etc.). End couplings 370, 372, 373, 375 can be connected to the respective central arm segments 371, 374 without positioning features, wherein the end coupling and central arm segment assemblies are secondary-machined to achieve predetermined dimensional tolerances from one end coupling to the other.

[0039] End flanges 540, 541 may include fastener connectors 560-563, and end couplings 370, 372, 373, 375 include mating fastener connectors 560A-563A. These connectors together enable connection of end couplings 370, 372, 373, 375 to center arm segments 371, 374. For example, fastener connectors 560-563 and mating fastener connectors 560A-563A may be in the form of threaded holes and bores into which bolts / screws can be inserted, or in the form of any other removable fastener system. See also... Figure 8B As described herein, the figures illustrate that end couplings 370, 372, 373, and 375 are connected to center arm segments 371 and 374 via clamps 4200, wherein each clamp simultaneously engages both end couplings 370, 372, 373, and 375 and center arm segments 371 and 374, thereby forming a compression connection between the end couplings 370, 372, 373, and 375 and the center arm segments 371 and 374. See also... Figure 8CAs described herein, the figures illustrate the connection of end couplings 370, 372, 373, and 375 to center arm segments 371 and 374 via frictional fits (e.g., contraction fits, press fits, etc.). The protrusions 4300 on the end couplings 370, 372, 373, and 375 frictionally engage with the grooves 4310 (or their inner or outer surfaces) on the center arm segments 371 and 374 (and vice versa), thereby connecting the end couplings 370, 372, 373, and 375 to the center arm segments 371 and 374. The grooves 4310 and protrusions 4300 can be substantially similar to the grooves 4110 and protrusions 4100 described above, except that they have a frictional fit (also known as a press fit or interference fit, which refers to the fastening between two parts through friction after they are forcibly pushed together—there is no gap between the assembled parts) Figure 8C ), rather than a sliding fit (e.g., the end coupling and the center arm section can easily slide relative to each other during assembly—there are gaps between the assembled parts) (e.g. Figure 8A (As shown).

[0040] The central arm segments 371, 374 may have a length CAL, which, together with the corresponding end couplings 370, 372, 373, 375, defines the total length OAL (from joint center to joint center - see [link]) of the corresponding upper arm link 213 or forearm link 212. Figure 4CThe articulated arm 333 (and other arms described herein) can be constructed / reconstructed by changing the length CAL of the central arm segments 371 and 374. The central arm segments 371 and 374 can be manufactured as described herein to have different predetermined lengths CAL, CAL1-CALn. Each central arm segment 371 and 374 can be selected from a plurality of central arm segments 371A1-371An and 374B1-374Bn, where “n” is an integer representing the upper limit of the number of central arm segments. The lengths CAL1-CALn of each optional central arm segment 371A1-371An and 374B1-374Bn may differ from the length of another optional central arm segment 371A1-371An and 374B1-374Bn. Here, for installation in the corresponding upper arm link 213 or forearm link 212, the selection of optional arm segments 371A1-371An, 374B1-374Bn, together with the corresponding end couplings 370, 372, 373, 375, defines the variable length of the upper arm link 213 or forearm link 212 (i.e., achieved by selecting the center arm segments 371A1-371An, 374B1-374Bn). This variable length is freely selectable (e.g., independent of the drive transmission via the arm) and customized for any given transmission chamber configuration (e.g., shape and size). As can be appreciated, by selecting the optional center arm segments 371A1-371An, 374B1-374Bn, the total length OAL of one or more of the upper arm link 213 and forearm link 212 can be increased or decreased.

[0041] Also refer to Figure 7AOne or more of the central arm segments 371, 374 may be telescopic central arm segments 510T (e.g., in a manner similar to a segmented optical telescope, where the individual arm segments of the telescopic arm slide relative to each other to change length). The telescopic central arm segment 510T may include a first frame portion 510T1 and a second frame portion 510T2. The shape and dimensions of the first frame portion 510T1 are designed to receive the second frame portion 510T2 in a sliding fit, such that either the first frame portion 510T1 or the second frame portion 510T2 slides linearly in the longitudinal direction relative to the other of the first frame portion 510T1 or the second frame portion 510T2, thereby increasing or decreasing the length CAL of the telescopic central arm segment 510T. The telescopic central arm segment 510T may include any suitable removable or non-removable fasteners 4000 (e.g., screws, bolts, pins, clips, welds, etc.) to lock the movement of the first frame portion 510T1 relative to the second frame portion 510T2, thereby setting / fixing the length CAL of the telescopic central arm segment 510T. If the fasteners are removable, the length of the arm link can be adjusted as needed to accommodate additional or removed substrate processing modules or transfer chamber sections (e.g., the reach of the arm can be increased or decreased as needed).

[0042] refer to Figure 7B One or more of the central arm segments 371, 374 can be segmented arm segments 510S, wherein each segment 4020 has a fixed length CAS and is connected to each other in an adjacent manner (e.g., end-to-end), such that when connected end-to-end, each segment has the length CAL of the central arm segments 371, 374. The fixed length CAS of different segments 4020 can be the same, but the fixed lengths of each segment 4020 can also be different.

[0043] The center arm segments 371, 374, 371A1-371An, 374B1-374Bn of different lengths can be manufactured from any suitable material and in any suitable manner, as described in the text. For example, each of at least one interchangeable center arm segment 371, 374 and several different interchangeable center arm segments 371A1-371An, 374B1-374Bn has a corresponding box-shaped cross section 598, and is characterized in that each of the interchangeable center arm segments 371, 374 and several different interchangeable center arm segments 371A1-371An, 374B1-374Bn has a different corresponding length CAL, CAL1-CALn.

[0044] The box-shaped cross-section 598 provides the tubular shape of the tubular frame 410F and facilitates the manufacture of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn at a lower cost and / or in higher-volume production. For example, the central arm segments 371, 374, 371A1-371An, 374B1-374Bn can be manufactured by extrusion or casting (e.g., forming extrusions with the box-shaped cross-section 598), thereby reducing machining requirements (e.g., compared to conventional arm links machined from blanks). Other possible manufacturing methods include, but are not limited to, additive manufacturing, conventional machining, folding and welding sheet metal, forging, and injection molding. The tubular form of the tubular frame 410F can be achieved through the aforementioned manufacturing processes, producing extrusions with an integral box-shaped cross-section 598, which has significantly higher stiffness compared to conventionally machined arm links. This more rigid box-shaped cross section 598 allows for longer arm lengths and enables the fabrication of tubular frames 410F with thinner sidewalls 510W, a thickness that conventionally machined arm links cannot achieve. This reduces the weight of the arm links and increases the operating speed of the substrate delivery device 130.

[0045] The dimensions and shape of the corresponding box-shaped cross-section 598 are designed to correspond to different corresponding lengths CAL, CAL1-CALn, so as to maintain a predetermined stiffness (end-to-end) for each different interchangeable center arm segment 371, 371A1-371An, 374, 374B1-374Bn, although the dimensions and shape of the corresponding box-shaped cross-section 598 can be designed to correspond to different corresponding lengths CAL, CAL1-CALn, so as to maintain a predetermined stiffness (end-to-end) for each different optional predetermined arm link length OAL, OALn. For example, regarding the predetermined stiffness, as the lengths CAL, CAL1-CALn of the center arm segments 371, 371A1-371An, 374, 374B1-374Bn increase, the thickness THK of one or more walls 510W of the box-shaped cross-section 598 ( Figure 5 E) The thickness THK of one or more walls 510W can gradually decrease along their respective lengths CAL, CAL1-CALn, with the wall being thickest at the proximal end of the arm link (relative to the shoulder axis SX) and thinnest at the distal end of the arm link (relative to the shoulder axis SX) (e.g., for arm link 212, the wall thickness can be greatest near the elbow axis AX and thinnest near the wrist axis WX). For example, reinforcing ribs can be formed in the box-shaped cross-section 598 during extrusion. The material of at least one interchangeable center arm segment 371, 374 and each of several different interchangeable center arm segments 371A1-371An, 374B1-374Bn can have a higher stiffness (spring modulus) than the material of the end couplings 370, 372, 373, 375.

[0046] Modular boom linkage structures simplify the manufacturing of boom linkage ends. For example, in conventional boom linkages, the boom linkage ends (to which the boom pulleys and pulley shafts connect) and the central boom section are machined from a single piece of blank as a whole. According to this disclosure, the modular form of the boom linkage allows for separate manufacturing techniques for the end couplings 370, 372, 373, 375 and the central boom sections 371, 374, 371A1-371An, 374B1-374Bn. For example, while the central arm segments 371, 374, 371A1-371An, 374B1-374Bn can be extruded (or manufactured using other methods described herein), the end couplings 370, 372, 373, and 375 can be manufactured by casting, forging, additive manufacturing, conventional machining, and injection molding. This allows the end couplings 370, 372, 373, and 375 to be cast or forged in a near-net-shape manner (i.e., the initial production of the end couplings is very close to the final (net) shape of the end couplings, reducing the need for surface finishing), thereby reducing the amount of machining and cost of the end couplings 370, 372, 373, and 375, and consequently reducing the overall cost of the substrate conveying device 130. End couplings 370, 372, 373, and 375 can be provided as pre-assembled / manufactured arm joints 4700, wherein at least a portion of a drive component (e.g., at least one pulley of one or more of drive components 490, 492, 493, 494, and 495) has been pre-installed in the pre-assembled arm joint 4700. Pre-assembled arm joints 4700 can reduce manufacturing costs and shorten delivery time for transport arm assemblies.

[0047] One or more of the center boom segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 may be made of metal components, such as aluminum, stainless steel, Inconel or other metal alloys, or any other suitable material, although one or more of the center boom segments 371, 374, 371A1-371An, 374B1-374Bn and end couplings 370, 372, 373, 375 may be made of any suitable material, including non-metallic materials, such as, but not limited to, ceramics, polymers, composites and carbon fibers. One or more of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn and the end couplings 370, 372, 373, 375 can be manufactured using mass production methods (e.g., molding, casting, forging, extrusion, etc.) to achieve near-net-shape or rough shape (rough shape requires more extensive secondary machining operations compared to near-net-shape casting, forging, molding, etc.). It should be noted that the interior of one or more of the central arm segments 371, 374, 371A1-371An, 374B1-374Bn and the end couplings 370, 372, 373, 375 can be forged, cast, etc., to achieve a near-net-shape, while the exterior can be forged, cast, etc., to achieve a rough shape. Secondary machining operations may include, but are not limited to, conventional machining, cutting, grinding, and electromagnetic discharge machining. Figure 5-7 The illustration shows an example of an arm component with shaped surfaces (e.g., cast, forged, extruded, etc.) and machined surfaces / features. Figure 5 The illustrations show shaped (e.g., near-net-shape or rough-shape) end couplings 370, 373 and corresponding finished end couplings 370, 373 with machined (using the methods described herein) surfaces / features. Figure 6 The illustrations show shaped (e.g., near-net-shape or rough-shape) end couplings 372, 375 and corresponding finished end couplings 372, 375 with machined (using the methods described herein) surfaces / features. Figure 7 The illustration shows shaped (e.g., near-net-shape or rough-shape) center arm segments 371, 374 and corresponding finished center arm segments 371, 374 with machined (using the methods described herein) surfaces / features.

[0048] like Figures 4A-4CAs can be seen, the upper arm link 213 and the forearm link 212 each have their own height AH. The height AH1 of the forearm link 212 may be less than the height AH2 of the upper arm link 213 (and vice versa), although the height AH1 of the forearm link 212 may also be substantially the same as the height AH2 of the upper arm link 213. The respective heights AH1 and AH2 may depend on the number of pressure vessels or pressure pipes PT1-PT3 extending through the arm links (as described herein—see Figure 3B , 3C (and 4E), or depending on the position of the arm link in the tandem arm link (e.g., where the height of the arm link decreases as it moves away from the shoulder axis SX).

[0049] Refer again Figures 3A-3C The delivery arm may include at least one end effector 211A, 211B (also referred to herein as a substrate holder). For illustrative purposes, two end effectors 211A, 211B are shown in the figures, but as described herein, the delivery arm may have any suitable number of end effectors, each with any suitable structure for holding one or more substrates. Each end effector 211A, 211B is rotatably connected to a joint at a common end of the forearm link 212, such that each end effector 211A, 211B rotates relative to the forearm link 212 about the joint or the common axis of rotation formed therefrom (e.g., see wrist axis or joint WX).

[0050] Refer again Figures 3A-3C 3E and 4E, the outer housings 213H and 212H of at least one movable arm link 213, 212 are configured such that at least one movable arm link 213, 212 forms a pressure vessel, and their respective axes of rotation (or multiple axes of rotation) SX, EX, WX extend from the pressure vessel. For example, each of the end couplings 370, 372, 373, 375 and the arm center segments 371, 374 includes at least one atmospheric or pressurized chamber (also referred to herein as a pressure vessel or pressure load-bearing compartment, space or cavity) ACH1-ACH5, PT1-PT3, which are sealed or vacuum (e.g., depressurized) environments with which the conveying arm is located, in any suitable manner. For example, at the shoulder axis SX and elbow axis EX, pressure chambers ACH1-ACH3 may be at least partially sealed by cover plate 386 and corresponding annular seals 386S (e.g., O-rings or other suitable static seals) and one or more ferrofluid seals FFS. At the wrist axis, which is exposed to higher temperatures than the elbow and shoulder axes, pressure chambers ACH4 and ACH5 are at least partially sealed by cover plates 387, 387E, and 387EA (see also...). Figure 3Eand 3F ) and the corresponding annular seal 387S seal.

[0051] like Figure 3B , 3C As shown in Figure 4E, the respective pressure chambers ACH1-ACH2 of the end couplings 370 and 372 of the movable arm link 213 are interconnected via at least one pressure pipe PT1. The shoulder rotation axis SX of the movable arm link 213 extends from the shoulder pressure chamber ACH1 into the interior of the base 201, for example, via the hollow drive shaft 200M1D of the direct-drive shoulder motor 200M1 (also known as a brushless motor) of the drive section 200 (which is directly connected to and directly drives the movable arm link 213 to rotate about the shoulder axis SX). At least one sealed housing component 370 accommodates at least a portion of the brushless motor 200M1 (e.g., the pressure chamber ACH1 accommodates at least the stator of the direct-drive shoulder motor 200M1 at the end joint). The elbow rotation axis EX of the movable arm link 212 extends from the pressure chamber ACH2 of the elbow end coupling 372 to the pressure chamber ACH3 of the elbow end coupling 373, for example, via the hollow drive shaft 200M2D of the direct-drive elbow motor 200M2 of the drive section 200 (the direct-drive elbow motor 200M2 (also referred to herein as a brushless motor) is directly connected to the movable arm link 212 and directly drives it to rotate about the elbow axis EX). At least one sealed housing component 372, 373 houses at least a portion of the brushless motor 200M2 (e.g., pressure chamber ACH2 houses at least the stator of the direct-drive shoulder motor 200M2 at the rotation joint). The pressure chambers ACH4, ACH5 of the wrist end coupling 375 are respectively connected in communication with the pressure chamber ACH3 of the end coupling 373 via at least one pressure pipe PT2, PT3.

[0052] refer to Figure 3D , 4EAnd 8C, pressure tubes PT1-PT3 are sealed against their respective end couplings 370, 372, 373, 375 in any suitable manner. For example, each end coupling 370, 372, 373, 375 has at least one bore 555, 555A, 555B into which at least a portion of the respective pressure tube PT1-PT3 is inserted. The bores 555, 555A, 555B may be arranged in a row or a two-dimensional array. Each pressure tube PT1-PT3 may include at least one annular seal 801A, 801B (e.g., an O-ring or any other suitable static seal) that engages both the outer surface of the pressure tube PT1-PT3 and the surface of the corresponding bore 555, 555A, 555B to at least partially seal and isolate the pressurized chambers ACH1-ACH5 from the vacuum environment. Inserting pressure tubes PT1-PT3 into holes 555, 555A, and 555B compresses annular seals 801A and 801B, thereby sealing and isolating pressure chambers ACH1-ACH5 from the vacuum environment. Each pressure tube PT1-PT3 may include an annular flange 810 and an annular seal 811 abutting the annular flange 810. When pressure tubes PT1-PT3 are inserted into holes 555, 555A, and 555B, the annular flange 810 presses the annular seal 811 against the machined surfaces of the corresponding end couplings 370, 372, 373, and 375, thereby sealing and isolating pressure chambers ACH1-ACH5 from the vacuum environment. The compressive force applied to the annular seal 811 is due to the end couplings 370, 372, 373, and 375 being fastened to the corresponding central arm segments 371 and 374. Pressure tubes PT1-PT2 may include either or any suitable combination of annular flange 810 and annular seals 801A, 801B, 811.

[0053] Each pressure tube PT1-PT3 has a minimized internal volume to minimize the surface area of ​​the corresponding arm link exposed to the vacuum environment (and the resulting pressure difference). At least one pressure tube enables power transmission and data communication through the sealed atmosphere ATM of the articulated arm 333. For example, hollow drive shafts 200M1D, 200M2D and pressure tubes PT1-PT3 are configured for passage of one or more of the following from, for example, base 201 to wrist axis WX (e.g., wrist end coupling 375) or any other location within the articulated arm 333 (e.g., ACH1-ACH5), cable CBL (including but not limited to electrical cables or power cables and data communication cables / buses (e.g., fiber optic cables, coaxial cables, twisted-pair cables, etc.)), cooling (inlet or supply) fluid tube CLTB, and discharge (outlet or return) fluid tube EXL. The cooling fluid in the pressurization chambers ACH1-ACH5 and PT1-PT3 can be, but is not limited to, controlled air, any suitable inert gas (e.g., nitrogen), and / or any suitable liquid. One or more of the pressure pipes PT1-PT3 can be designed such that the cable CBL, cooling fluid pipe CLTB, and discharge fluid pipe EXL extending through them occupy the internal space of the pressure pipes PT1-PT3, minimizing the empty space within the pressure pipes PT1-PT3.

[0054] Figure 13A and 13B The middle diagram shows an example of a cooling fluid inlet pipe CLTB and an outlet pipe EXL. Figure 13A In this configuration, the cooling fluid inlet pipe CLTB is substantially continuous within the movable arm link 212L, thus forming inlet and outlet piping (e.g., as a circulating fluid pipe). Figure 13BIn this configuration, at least one of the pressure lines PT1-PT3 enables the sealing atmosphere ATM through which the fluid lines CLTB and EXL pass through the hinged arm 333 (as described herein). Here, for example, the fluid inlet is formed by the cooling fluid inlet line CLTB, and the outlet is formed by the discharge fluid line EXL, wherein the fluid outlet or return is separate and distinct from the fluid inlet or supply. Here, fluid can be supplied to the pressurization chamber ACH4 via the cooling fluid line CLTB (which passes through the pressure line PT3A) (although fluid can also be supplied to any of the pressurization chambers ACH1-ACH5 in a similar manner) to pressurize the pressurization chamber to a pressure greater than that of the discharge fluid line EXL (which passes through the pressure line PT3B). This pressure can be provided by a pressurized fluid source at the facility where the processing unit is located, wherein the pressurized fluid source provides fluid at a pressure of approximately 60 psi (although the pressure may be greater or less than approximately 60 psi), a flow rate of approximately 29 CFM (821 lpm) (although the flow rate may be greater or less than approximately 29 CFM), and a temperature less than or equal to approximately 28ºC (although the outlet temperature may be greater or less than approximately 28ºC). A pressure differential causes fluid to flow from pressure chamber ACH4 to (and through) discharge fluid pipe EXL. The fluid flow through pipes CLTB, EXL, and pressure chamber ACH4 (or any other pressure chambers ACH1-ACH5) can be forced fluid flow (e.g., achieved by a fan rather than a pressure differential). One or more pressure pipes PT1-PT3 may be used solely for fluid transfer (e.g., inlet or outlet), wherein the pressure pipes PT1-PT3 have minimized dimensions to provide a predetermined fluid volumetric flow rate, for example, to achieve cooling of the delivery arm components. For illustrative purposes only, at the inlet of pressure chamber ACH4 (and pressure chamber ACH5), the fluid may have a temperature of approximately 40ºC, an air velocity of approximately 151 m / s (although the air velocity may be greater or less than approximately 151 m / s), and a flow rate of approximately 8.5 CFM (239 lpm) (although the flow rate may be greater or less than approximately 8.5 CFM). At the outlet of pressure chamber ACH4, the fluid may have a temperature of approximately 51ºC (although the outlet temperature may be greater or less than approximately 51ºC). The dimensions of pressure tubes PT1-PT3 can be designed such that the pressures in each chamber ACH1, ACH2, ACH3, ACH4, ACH5 are substantially the same, but the dimensions can also be designed such that the pressure in the upstream (relative to fluid flow) chamber is higher than that in the downstream chamber (e.g., the pressure in pressure chamber ACH1 is higher than that in pressure chamber ACH2, the pressure in pressure chamber ACH2 is higher than that in pressure chamber ACH3, and so on). At least one of the pressurized chambers ACH1-ACH5 and PT1-PT3 enables fluid transfer through the sealed atmosphere ATM of the articulated arm 333. Fluid can be discharged from the articulated arm 333 through frame 201 (which may be referred to as a lifting column, wherein the frame forms a slide that can be vertically moved to raise or lower the arm 333). For example, the discharge cooling fluid tube CLTB (see...) Figure 13CIt can extend through the drive shaft 200M1D, through the frame 201, and to any suitable fluid container / tank (e.g., one of the pressure chambers ACH1-ACH5, PT1-PT3) to supply or inject cooling fluid to that fluid container / tank. Figure 13C As shown, the cooling fluid conduit CLTB can be wound around one or more joints at the rotation axes SX and EX in a manner similar to a clockwork spring to accommodate the rotation of arm links 213 and 212. The cooling fluid discharge conduit CLTB can extend to one of the fluid containers / reservoirs (e.g., a pressurized chamber at the wrist axis WX or any other suitable location within the articulated arm 333) to provide cooling fluid, wherein the cooling fluid is discharged from the articulated arm 333 through at least one of the pressurized chambers ACH1-ACH5 and PT1-PT3 (i.e., not through a flexible tube, such that at least one of the pressurized chambers ACH1-ACH5 and PT1-PT3 forms a cooling fluid discharge channel).

[0055] In the manner described above, the central arm segments 371 and 374 (excluding the minimized volume of pressure tubes PT1-PT3) can be depressurized to the process (high) vacuum of the transfer chamber, thereby achieving pressure balance between the depressurized environment inside the articulated arm 333 and the depressurized environment outside the articulated arm 333, and within the transfer chambers 125A, 125B, 125C, 125D, 125E, 125F, 125G (or other chambers accommodating the depressurized environment).

[0056] refer to Figure 3A , 3CIn conjunction with 3E, the wrist axis WX may include one or more radial flux motors 200M3A, 200M3B (also referred to as brushless motors), each having a stator 391, a rotor 392, and an output shaft or drive shaft 300M3AD, 300M3BD connected to its respective rotor 392. At least one sealed housing component 375 (e.g., a pressurized chamber ACH4, ACH5 of the sealed housing component 375) houses at least a portion of the brushless motors 200M3A, 200M3B. End effectors 211, 211A, 211B are connected to the corresponding drive shafts 300M3AD, 300M3BD for rotation about the wrist axis WX. Each stator 391 of the motors 200M3A, 200M3B may be sealed and isolated from the vacuum environment in which the delivery arm operates by any suitable isolation wall 395. Suitable examples of radial flux motors and isolation walls that can be integrated into the wrist axis WX are described in U.S. Patent No. 9,948,155, issued April 17, 2018, and U.S. Patent No. 9,186,799, issued November 17, 2015, the entire disclosure of which is incorporated herein by reference. As an example, referring to motor 200M3A (motor 200M3B is substantially similar), a stator 391 (and its stator coils) is disposed within a pressure chamber ACH4, wherein the pressure chamber ACH4 is sealed by a cover plate 387 (and its corresponding seals 387S) and an isolation wall 395. The isolation wall 395 is substantially in contact with the cover plate 387, wherein any suitable static seal (e.g., an O-ring) 395S is compressed (at least by the pressure difference between atmospheric pressure and vacuum pressure) between the isolation wall 395 and the cover plate 387. The isolation wall 395 may be a thin film mounted to or otherwise overlapping with the magnetic poles or core of the stator 391, such that the stator substantially supports the isolation wall. The isolation wall 395 may be structurally bonded to, for example, the inner diameter of the stator 391 (or any other suitable portion thereof) using any suitable adhesive in any suitable manner, thereby forming an integral part (e.g., forming a single integral structure or assembly with the stator 391) and / or attached to the stator 391, although the isolation wall 395 may also be a coating formed on or otherwise attached to the magnetic poles or core of the stator 391. The isolation wall 395 may extend beyond the stator 391 to engage with the cover plate 387. Figure 3E As can be seen, the isolation wall 395 can not support any additional structural loads other than the pressure difference load between the vacuum and atmospheric environments (i.e., the pressure difference load is borne by the isolation wall and the stator).

[0057] Motors 200M3A and 200M3B may have rotors employing magnets, which may be affected by gases used in semiconductor manufacturing processes. The motor rotors of elbow motor 200M2 and shoulder motor 200M1 are sealed and isolated from the vacuum environment by at least a ferrofluidic seal (FFS). For the wrist position, which is subject to temperatures that may be too high for ferrofluidic seals to be used, the rotor magnet 392M of rotor 392 is encapsulated to isolate or otherwise seal the magnet 392M (and rotor 392) from the vacuum environment and pressure chambers ACH1-ACH5. For example, at least a portion of rotor 392 is encapsulated by a sealed nonferrous housing 392H that substantially seals and isolates the magnet 392M from the vacuum environment without degrading motor performance. The nonferrous housing 392H may extend to cover the magnet 392M for encapsulation and provide an hermetically sealed connection to rotor 392 by any suitable means, such as any suitable vacuum-compatible sealant, adhesive, epoxy, etc.

[0058] One or more sensors may be disposed within the articulated arm 333. These sensors (e.g., encoders or other suitable sensors) are housed in one or more of the pressurization chambers ACH1-ACH5 and PT1-PT3. For example, refer to... Figure 3B-3E Each direct-drive motor 200M1, 200M2, 200M3A, and 200M3B includes its own encoder 388, 389, and 389A. At least one sealed housing component 372 and 375 houses at least a portion of the respective encoder 388, 389, and 389A. The encoder 388, 389, and 389A includes any suitable readhead ENH and any suitable encoder track or dial ENT (e.g., one or more absolute position tracks / dials and incremental tracks / dials). At the elbow and shoulder joints of the conveyor arm, the encoder 388 may be exposed to temperatures of approximately 70ºC and below. This encoder can be an optical encoder, a magnetic encoder, or any other suitable encoder constructed for operation in a vacuum environment. At the shoulder and elbow joints, the readhead ENH is located in the corresponding pressurized chambers ACH1 and ACH2, while the encoder track ENT is located in the process vacuum (although the encoder track can also be isolated from the vacuum environment in a manner similar to that described herein). Suitable examples of encoders that can be used at least at the wrist and shoulder joints as described in this disclosure are described in U.S. Patent No. 10,742,092 (issued August 11, 2020), the entire contents of which are incorporated herein by reference.

[0059] As an example, also refer to Figure 3F-3HThe encoder track ENT is positioned on or otherwise connected to the motor rotor 200MR of the respective motors 200M1 and 200M2. The encoder track ENT defines at least two scales for measuring the position of the rotor 200MR. These at least two scales include an incremental position scale and an absolute position scale. The absolute position scale may contain additional position information required to uniquely determine the position of the rotor 200MR. Absolute position encoders typically provide a unique position without any reference motion. Typically, such encoders may require several scales, each of which can be read by an independent sensor system. The number of scales determines the number of bits in the absolute position encoder, and thus its resolution. If a digital absolute position scale is available, the digital absolute position can be read by multiple independent sensors, each facing its respective scale. Each sensor can provide the state of a corresponding bit in the word defining the digital position. Figure 9 The image shows a classic example of pattern 905, known as 5-bit Gray code. Each line of pattern 905 contains a 5-bit word indicating an absolute position, which can be represented as an angular position in degrees. S4 represents the most significant bit of each 5-bit word, and each word differs from the next by only one bit, a typical characteristic of Gray code sequences.

[0060] Absolute position can be obtained via a single digital dial attached to the rotor 200MR. To read the absolute digital position, a set of sensors (e.g., the read head ENH) can be positioned relative to each other at specific intervals, facing the absolute position dial. The number of sensors determines the number of bits used for the absolute position. The advantage of using a single dial design is that it allows for a smaller footprint in the absolute encoder design. The bit pattern sequence of the single dial can also be in Gray code form, i.e., changing only one bit at a time.

[0061] Figure 10 An example of a single dial 1005 used to indicate absolute position is shown. The single dial 1005 has analog... Figure 9 The pattern shown in S4 is represented by five sensors S0 1010, S1 1015, S2 1020, S3 1025, and S4 1030, positioned around the dial 1005 in a specific location. The sensors generate patterns as the pattern rotates. Figure 9 The sequence of numbers thus generates an absolute position indication for the connected rotor. It is important to understand that a dial can be constructed using any number of bits to provide the desired position resolution. A single absolute dial can be coupled with an incremental dial (e.g., Figure 10 The scale 1035 and the incremental scale sensor 1040 are used together.

[0062] Figure 10The single absolute dial 1005 can be used independently to simultaneously generate a digital absolute position and an interpolated incremental position within the resolution of the digital absolute position. The sensor can provide digital or analog output. When the sensor can provide analog output, a digital output pattern of the absolute position scale can be generated from the analog output signal by setting a threshold to determine when a bit in the pattern changes. Simultaneously, the analog value of the changing signal can be measured, and these changing analog values ​​can be used to determine a position with additional resolution compared to that provided by the single absolute dial. For example, a digital signal processor can be used to measure the sensor's output, sensing both the sensor's digital output according to a set threshold and the instantaneous analog output of the sensor undergoing a single bit change. This instantaneous analog output can be used to generate the interpolated position between the current digital absolute position and the next digital absolute position.

[0063] like Figure 3E and 3F As best observed, at the wrist joint, encoders 389 and 389A can withstand substrate temperatures exceeding approximately 70°C (e.g., the process described herein), which may be the operating limit for optical encoders. At the wrist joint, encoders 389 and 389A are magnetic encoders, wherein the magnetic encoder dial ENT (which may have a Gray code configuration, having information about...) Figure 9 and Figure 10 The encoder readhead (similar to the absolute and incremental scales described herein) is mounted on the motor rotor 392, and the encoder readhead ENH is mounted within the wrist motor housing (e.g., within pressurized chambers ACH4, ACH5). A suitable nonferrous isolation wall 399 is provided between the readhead ENH and the vacuum environment to isolate the readhead ENH from the vacuum environment (and at least partially seal the pressurized chambers ACH4, ACH5 from the vacuum environment). Placing the encoder readhead ENH within the pressurized chamber allows the magnetic flux from the magnetic encoder dial ENT to be sensed by the readhead ENH behind the isolation wall 399, and places the electronic components of the encoders 389, 389A in an atmospheric environment that can be actively cooled (e.g., cooled at least by the cooling fluid pipe CLTB as described herein).

[0064] Also refer to Figure 3G and 3H The pressurized chambers ACH4 and ACH5 are at least partially sealed by cover plates 387, 387E, and 387EA (and corresponding seals 387S) (see Figure 3E and 3F The encoder isolation wall 399 can be integrally formed with the corresponding cover plates 387E and 387EA, as a single integral or monolithic component. For example... Figure 3FAs can be seen, to facilitate sealing of the corresponding pressure chambers ACH4 and ACH5 via cover plates 387, 387E, and 387EA, the wrist end coupling 375 can be a two-part coupling, wherein one end coupling component 375A of the wrist end coupling houses the wrist motor 200M3A, and the other end coupling component 375B houses the wrist motor 200M3B. The two end coupling components 375A, 375B (or more end coupling components of the wrist axis including more than two motors) are connected to each other in any suitable manner (e.g., using mechanical fasteners) to form the wrist end coupling 375. Each end coupling component 375A, 375B can be connected to the components described above regarding... Figure 6 The descriptions are essentially similar. Here, encoders 389 and 389A (and corresponding cover plates 387E and 387EA) are arranged adjacent to each other in a mirror-image configuration at the mid-plane of the wrist end coupling 375 to protect encoders 389 and 389A from the high-temperature environment acting on the outer surface of the wrist end coupling 375. Each of the cover plates 387E and 387EA (and encoder dial ENT) includes a central hole 361 through which the drive shaft 200M3BD passes.

[0065] The encoder dial ENT can be a magnetic dial placed in a vacuum environment. Here, the magnetic dial is encapsulated within a sealed housing 396. For example... Figure 3G and 3H Best viewed (also see) Figure 3E and 3F The sealed housing 396 includes a ferromagnetic backing or frame 396F containing a connector 396C configured to connect the frame 396F to the corresponding motor rotor 392 (or drive shaft), for example, via any suitable mechanical fastener. The frame 396F is configured to extend radially outward relative to the axis of rotation WX to position the encoder dial ENT in communication with the read head ENH; however, the frame 396F may also have any suitable configuration in which the encoder track is positioned in communication with the read head. The frame 396F includes a recess 396R in which the encoder dial ENT is placed. A non-ferrous isolation wall 396W is positioned above the encoder dial ENT and seals it to the frame 396F (e.g., by welding, epoxy resin, or any other vacuum-compatible fastening method that can form an hermetically tight seal), thereby encapsulating the encoder dial ENT within the frame 396F. The frame 396S or stator 391 may include a ferromagnetic shield 397 configured to magnetically isolate the motor rotor 392 and stator 391 from the interface between the read head ENH and the encoder dial ENT.

[0066] The encoder dial ENT may include an absolute position scale that provides the absolute position of the rotor 392 without the need for an origin marker or reference motion. The absolute zero point (or any suitable reference position) of the absolute position scale can be mechanically aligned with the frame 396F in any suitable manner. The corresponding rotor 392 and stator 391 can also be positioned in a consistent electrical position relative to the encoder assemblies 389, 389A (e.g., rotationally aligned about the wrist axis WX), thereby producing a consistent motor phase angle from substrate transport device to substrate transport device within a predetermined tolerance (e.g., less than about 5 electrical angles) to eliminate the need for measurement operations of the corresponding phase angle during substrate transport device assembly.

[0067] Although encoders 389 and 389A described herein are located at the wrist axis WX, instead of encoder 388, encoders 389 and 389A may also be placed at one or more of the elbow axis EX and shoulder axis SX. The center bore 361 provides a passage for one or more of the cable CBL, cooling fluid conduit CLTB, and drain fluid conduit EXL to enter through and pass through the drive shafts and rotors of the respective motors 200M1 and 200M2 via the encoder 389 and 389A assembly.

[0068] While the above features of this disclosure are described with regard to a conveyor arm having a direct-drive motor at each of the shoulder axis SX, elbow axis EX, and wrist axis WX, this disclosure can also be applied to conveyor arms having at least one follower arm link or at least one follower end effector. For example, Figure 11A A substrate transport robot with follow-up end effectors 211A and 211B is shown. The substrate transport arm is a dual SCARA arm, comprising separated arm links 213, 212L, and 212R that are substantially similar to those described herein. The dual SCARA transport arm includes an upper arm 213 (which is separated in a similar manner to the upper arm 213, wherein the upper arm 213 may include a central housing portion 370A and two housing portions 372, the housing portion 370A being substantially similar to the housing portion 370), and two forearms 212R and 212L extending from the opposing ends 213R and 213L (e.g., relative to the shoulder axis SX) of the common (substantially rigid and non-hinged) upper arm 213. The forearm 212R is connected to the end 213R of the upper arm 213 at the elbow axis EXR. The forearm 212L is connected to the end 213L of the upper arm 213 at the elbow axis EXL. Each forearm 212R, 212L has at least one end effector 211A, 211B connected to it at its respective wrist axis WXR, WXL. (Brief Reference) Figure 11AThe rotation of end effectors 211A and 211B is followed by the corresponding upper arm portions 213L and 213R; however, drive motors can also be provided at wrist axes WXL and WXR (e.g., in a manner similar to that described herein) to directly drive the rotation of end effectors 211A and 211B. Providing drive motors at each axis SX, EXR, EXL, WXR, and WXL enables nonlinear or offset extension of end effectors 211A and 211B, wherein the drive motors are driven substantially simultaneously to cause end effectors 211, 211DS, 211DE, 211DT, and 211DQ to extend along radial or non-radial paths or trajectories; however, the following end effectors are restricted to traveling along radial extension and retraction lines.

[0069] The upper arm 213 is connected to the frame 201 and is directly driven by the drive motor 200M1 in a manner similar to that described herein. In this example, each forearm 212R, 212L is directly driven by its respective drive motor 200M2A, 200M2B in a manner similar to that described herein; however, the rotation of the end effectors 211A, 211B can follow the movement of the corresponding upper arm portions 213L, 213R. Elbow drive pulleys 1110 at each elbow axis EXL, EXR are mounted on a corresponding strut 1110S, which is fixedly (e.g., non-rotatably) connected to the upper surface of the corresponding upper arm portion 213L, 213R (the term "upper" is used here for convenience, although any spatial identifier can be used to refer to the so-called upper surface). The struts 1110S (and the elbow drive pulleys 1110) can be hollow to surround the hollow drive shaft 200M2D of the corresponding motors 200M2A, 200M2B. As can be seen in Figure 11, the strut 1110S can have any suitable height or length depending on the arm configuration, such that at least a portion of the forearms 212R, 212L and the corresponding end effectors 211A, 211B are stacked on top of each other (e.g., at least in...). Figure 11A (The forearm and end effector shown are in the retracted configuration).

[0070] Also refer to Figure 11B , 11C12 and 13A, forearms 212R and 212L are configured to accommodate an elbow (driving) pulley 1110, a wrist (driven) pulley 1150, a belt 1160 connecting the elbow driving pulley 1110 and the wrist driven pulley 1150, and one or more pressure tubes PT. Elbow and wrist end couplings 373 and 375 can be substantially similar to the couplings described herein; however, each elbow and wrist end coupling 373 and 375 can be formed with a pulley cavity, a pressure chamber recess, a bore 1200 leading to the interior of the hollow drive shaft 200M2D, and a drive belt channel. During assembly of forearms 212L and 212R, the pulley cavity and drive belt channel are exposed to a vacuum environment. The central arm portion 374 has a box-shaped or channel-shaped cross-section (as described above) that opens to a vacuum environment and is configured to connect with end couplings 373, 375 (e.g., during forearm assembly), such that elbow and wrist pulleys 1110, 1150 are interconnected by a belt 1160 passing through the central arm portion 374. One or more pressure tubes also pass through the central arm portion 374 between the respective pressure chambers ACH3-ACH5 of the end couplings 373, 375.

[0071] like Figure 11B and 11C As best seen in the middle, each of the elbow and wrist end couplings 373, 375 is bifurcated to form its own pressure chamber ACH3-ACH5 (which is similar to...) Figure 3C The diagram shows connections to pressure chambers ACH2 and ACH1, and their respective pulley chambers (which are exposed to vacuum pressure). One or more pressure tubes PT, PT2, PT3 extend between elbow and wrist end couplings 373, 375, such that one or more of the cable CBL, cooling fluid tube CLTB, and drain fluid tube EXL extend to the wrist axis WX to provide fluid transfer to / from pressure chambers ACH4 and ACH5 and / or to supply power to pressure chambers ACH4 and ACH5. Fluid transfer to pressure chambers ACH4 and ACH5 (e.g., forced convection cooling fluid) can provide cooling for the wrist pulley bearings (e.g., through a heat conduction path between the pressure chamber and the bearing coupling to the end coupling 375), which can cool the bearing mounting area by about 50% to about 60% of the ambient temperature of the process vacuum (e.g., above about 70ºC or above about 100ºC), thereby increasing the service life of the bearing lubricant for the wrist pulley 1150 (or, in the case of a direct-drive end actuator, the rotor / drive shaft bearing).

[0072] refer to Figure 1A-1I Documents 125A, 125B, 125C, 125D, 125E, 125F, and 125G will describe an exemplary substrate processing method. This method includes providing a transport device 125A, 125B, 125C, 125D, 125E, 125F, or 125G with a frame TCF. Figure 14A frame 1400), the frame TCF forming a sealed chamber, the sealed chamber being arranged to maintain a processing vacuum therein. A hinged arm 333 is also provided. Figure 14 (Block 1410), the articulated arm is connected to the frame TCF via an end joint 309 within the sealed chamber. The articulated arm rotates and extends about the end joint. The articulated arm has at least one movable arm link 213, 212 and end actuators 211A, 211B connected to the at least one movable arm link. The substrate holding stage SHS is located on the end actuator. This enables the extension and retraction of the articulated arm 333. Figure 14 The frame 1420 (e.g., via one or more motors 200M1-200M3B) contains at least one movable arm link 213, 212 having a housing 213H, 212H that includes at least one rotary joint (e.g., at least one of a shoulder joint, elbow joint, and wrist joint) having a rotation axis (e.g., at least one of a shoulder axis, elbow axis, and wrist axis), and at least one movable arm link 213, 212 hingedly rotating about the rotary joint to achieve extension and retraction of the hinged arm 333. As described herein, the outer shells 213H and 212H are assemblies composed of shell components 370-375, which are sealed to maintain a sealing atmosphere within the outer shells 213H and 212H in the processing vacuum of the sealed chamber, and the sealed shell components 370-375 are interconnected by at least one mechanical joint MJ to form a sealing interface through which the sealing atmosphere communicates between each sealed shell component 370-375 and each other sealed shell component 370-375.

[0073] refer to Figure 1A-1I 1, 2-3H, 11A-11C, and 15 will describe an exemplary substrate processing method. This method includes providing a substrate transport device 104 ( Figure 15 (Block 1500), the device has a base 201 and a hinged arm 333. The hinged arm 333 is connected to the base 201 via an end joint 309, about which the hinged arm 333 rotates and extends. The hinged arm 333 has at least one movable arm link 213, 212 and end effectors 211A, 211B connected to the at least one movable arm link 213, 212, on which the substrate holding stage SHS is located. The extension and retraction of the hinged arm 333 are achieved (…). Figure 15Block 1510, as described herein, for example by one or more motors 200M1-200M3B), wherein at least one movable arm link 213, 212 has a housing 213H, 212H, the housing 213H, 212H including at least one rotary joint (e.g., at least one of a shoulder joint, elbow joint, and wrist joint) having a rotation axis (e.g., at least one of a shoulder axis, elbow axis, and wrist axis), the at least one movable arm link 213, 212 rotating articulatedly about the rotary joint.

[0074] refer to Figure 1A-1I 125A, 125B, 125C, 125D, 125E, 125F, and 125G will describe an exemplary substrate processing method. This method includes providing transfer devices 125A, 125B, 125C, 125D, 125E, 125F, and 125G. Figure 16 (Block 1600). As described herein, the transfer devices 125A, 125B, 125C, 125D, 125E, 125F, and 125G include a frame TCF and a hinged arm 333. The frame TCF forms a sealed chamber configured to maintain a depressurized environment therein. Within the sealed chamber, the hinged arm 333 is connected to the frame TCF and rotates and extends about an end joint 309. The hinged arm 333 has at least one movable arm link 213, 212 and end effectors 211A, 211B connected to the at least one movable arm link, on which a substrate holding stage SHS is located. The extension and retraction of the hinged arm 333 are achieved (…). Figure 16 Block 1610, as described herein, for example via one or more motors 200M1-200M3B), wherein at least one movable arm link 213, 212 has a housing 213H, 212H, the housing containing at least one rotary joint (e.g., at least one of an end joint, elbow joint, and wrist joint) having rotation axes SX, EX, WX, the at least one movable arm link 213, 212 being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm 333. According to the method, the housing 213H, 212H is an assembly of housing components 370-375, which are sealed to maintain a sealed atmosphere ATM within the housing 213H, 212H in a depressurized environment of a sealed chamber. As described herein, the sealed housing components 370-375 are interconnected via at least one fastening joint MJ to form a pressure load bearing interface (see Figure 3B The sealed atmosphere ATM communicates between each sealed housing component 370-375 and each other sealed housing component 370-375 through this interface in order to achieve pressure balance between the interior of the housing 213H, 212H and the depressurized environment on the outer wall of the housing 213H, 212H.

[0075] refer to Figure 1A-1I 125A, 125B, 125C, 125D, 125E, 125F, and 125G will describe an exemplary substrate processing method. This method includes providing transfer devices 125A, 125B, 125C, 125D, 125E, 125F, and 125G. Figure 17 (Block 1700). As described herein, the transfer devices 125A, 125B, 125C, 125D, 125E, 125F, 125G include: a frame TCF forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm 333 connected to the frame TCF within the sealed chamber. The hinged arm 333 has an end joint (e.g., a shoulder joint) about which it rotates and extends, and has at least one movable arm link 213, 212 and end effectors 211A, 211B connected to the at least one movable arm link 213, 212, on which a substrate holding stage SHS is located. The extension and retraction of the hinged arm 333 are achieved (…). Figure 17 (Box 1710), wherein at least one movable arm link 213, 212 has a housing 213H, 212H, the housing containing at least one rotary joint (e.g., at least one of a shoulder joint, elbow joint, and wrist joint) having rotation axes SX, EX, WX, the at least one movable arm link 213, 212 being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm 333. The method further includes accommodating one or more electromechanical components (e.g., motors 200M1, 200M2, 200M3A, 200M3B, encoders 388, 389, 389A, and other electromechanical components described herein) within the housing 213H, 212H of at least one movable arm link 213, 212. Figure 17 (block 1720), the circulating cooling cavity and the adjacent space in the outer casing 213H, 212H adjacent to the circulating cooling cavity (e.g., such as Figure 3C The space shown contains a vacuum or reduced pressure environment and is separate from and different from the internal static environment (e.g., vacuum environment) of the outer casing (213H, 212) that is located against the circulating cooling cavity.

[0076] The following features are provided pursuant to this disclosure and may be used individually, in any combination with each other, and / or in any combination with the foregoing features: According to this disclosure, a transfer device includes: a frame forming a sealed chamber configured to maintain a processing vacuum therein; a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, the hinged arm having at least one movable arm link and an end effector connected to the at least one movable arm link, a substrate holding stage located on the end effector; wherein the at least one movable arm link has a housing body including at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the housing body being an assembly of housing components sealed to maintain a sealing atmosphere within the housing body inside the processing vacuum of the sealed chamber; and wherein the sealing housing components are interconnected via at least one mechanical joint to form a sealing interface through which the sealing atmosphere communicates between each sealing housing component of the housing body and each other sealing housing component.

[0077] In the transmission device, one or more of the following are provided individually or in any suitable combination: At least one sealed housing component is the end portion of at least one movable arm link, the at least one sealed housing component housing at least one rotary joint, wherein the at least one rotary joint is contained within at least one sealed housing component of at least one movable arm link; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. Processing vacuum is high vacuum that is compatible with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The sealing interface divides at least one movable arm link in two between one end portion and the other end portion of the at least one movable arm link; The sealing interface divides the outer wall or outer shell of the housing into two parts; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel. The outer casing is at least partially depressurized, such that the wall of the depressurized portion of the outer casing is in pressure equilibrium over the entire wall thickness; The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads. At least one sealed housing component accommodates at least a portion of the brushless motor; and At least one sealed housing component houses at least a portion of the encoder.

[0078] According to this disclosure, a method includes: providing: a transfer device having a frame forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which the hinged arm rotates and extends, the hinged arm having at least one movable arm link and an end effector connected to the at least one movable arm link, a substrate holding stage being located thereon; and achieving extension and retraction of the hinged arm, wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm; wherein the housing is an assembly of housing components sealed to maintain a sealing atmosphere within the housing within the processing vacuum of the sealed chamber, and the sealed housing components are interconnected by at least one mechanical joint to form a sealing interface through which the sealing atmosphere communicates between each sealed housing component of the housing and each other sealed housing component.

[0079] In this method, one or more of the following are provided individually or in any suitable combination: At least one sealed housing component is an end portion of at least one movable arm link, the at least one sealed housing component housing at least one rotary joint, wherein the at least one rotary joint is contained within at least one sealed housing component of the at least one movable arm link; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. Processing vacuum is high vacuum that is compatible with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The sealing interface divides at least one movable arm link in two between one end portion and the other end portion of the at least one movable arm link; The sealing interface divides the outer wall or outer shell of the housing into two parts; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel. The outer casing is at least partially depressurized, such that the wall of the depressurized portion of the outer casing is in pressure equilibrium over the entire wall thickness; The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads. At least one sealed housing component houses at least a portion of the brushless motor; At least one sealed housing component houses at least a portion of the encoder.

[0080] According to this disclosure, a substrate delivery device includes: a base; and an articulated arm connected to the base via an end joint, the articulated arm rotating and extending about the end joint, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the articulated arm, and the housing is an assembly of housing components sealed to maintain a sealing atmosphere within the housing, the articulated arm being subjected to a processing vacuum within a sealed chamber against the processing vacuum of the housing; wherein the sealed housing components are interconnected via at least one mechanical joint to form a sealing interface that seals and isolates the sealing atmosphere from the processing vacuum and maintains the integrity of the processing vacuum, the sealing atmosphere communicating between each sealed housing component of the housing via a flexible tube passing through the sealing interface, the flexible tube being configured to accommodate rotation of the at least one movable arm link about a rotation axis.

[0081] In the substrate delivery apparatus, one or more of the following are provided individually or in any suitable combination: At least one sealed housing component is the end portion of at least one movable arm link, the at least one sealed housing component housing at least one rotary joint, wherein the at least one rotary joint is contained within at least one sealed housing component of the at least one movable arm link; and the flexible tube communicates with a pressurized chamber within the at least one movable arm link to provide cooling fluid to the pressurized chamber, wherein the cooling fluid is discharged from the articulated arm through at least one other pressurized chamber within the at least one movable arm, wherein the at least one other pressurized chamber forms a fluid passage for the discharged cooling fluid; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. Processing vacuum is high vacuum that is compatible with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The sealing interface divides at least one movable arm link in two between one end portion and the other end portion of the at least one movable arm link; The sealing interface divides the outer wall or outer shell of the housing into two parts; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel. The outer casing is at least partially depressurized, such that the wall of the depressurized portion of the outer casing is in pressure equilibrium over the entire wall thickness; The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads. At least one sealed housing component accommodates at least a portion of the brushless motor; and At least one sealed housing component houses at least a portion of the encoder.

[0082] According to this disclosure, a method includes: providing a substrate delivery device having: a base; and an articulated arm connected to the base via an end joint, the articulated arm rotating and extending about the end joint, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; and enabling the extension and retraction of the articulated arm, wherein the at least one movable arm link has a housing body, the housing body including at least one rotary joint having a rotation axis, the at least one movable arm link rotating articulatedly about the at least one rotary joint; wherein the housing body is an assembly of housing components sealed to maintain a sealing atmosphere within the housing body, the articulated arm resisting a processing vacuum within a sealed chamber against the processing vacuum of the housing body, and the sealed housing components being interconnected via at least one mechanical joint to form a sealing interface that seals and isolates the sealing atmosphere from the processing vacuum and maintains the integrity of the processing vacuum, and the sealing atmosphere communicating between each sealed housing component of the housing body and each other through the sealing interface.

[0083] In this method, one or more of the following are provided individually or in any suitable combination: At least one sealed housing component is an end portion of at least one movable arm link, the at least one sealed housing component housing at least one rotary joint, wherein the at least one rotary joint is contained within at least one sealed housing component of the at least one movable arm link; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. Processing vacuum is high vacuum that is compatible with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The sealing interface divides at least one movable arm link in two between one end portion and the other end portion of the at least one movable arm link; The sealing interface divides the outer wall or outer shell of the housing into two parts; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel. The outer casing is at least partially depressurized, such that the wall of the depressurized portion of the outer casing is in pressure equilibrium over the entire wall thickness; The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads. At least one sealed housing component accommodates at least a portion of the brushless motor; and At least one sealed housing component houses at least a portion of the encoder.

[0084] According to this disclosure, a transmission device includes: a frame forming a sealed chamber configured to maintain a depressurized environment therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hinged about the rotary joint to achieve extension and retraction of the hinged arm, and the housing is an assembly of housing components sealed to maintain a sealed atmosphere within the housing within the depressurized environment of the sealed chamber; and wherein the sealed housing components are interconnected by at least one fastening joint to form a pressure load-bearing interface through which the sealed atmosphere communicates between each sealed housing component and each other, so as to achieve pressure balance between the depressurized environment inside the housing and on the outer wall of the housing.

[0085] In the transmission device, one or more of the following are provided individually or in any suitable combination: The pressure load bearing interface forms a pressure load bearing compartment; The pressure load bearing compartment includes more than one pressure load bearing cavity, which are distributed by at least one movable arm link, wherein each pressure load bearing cavity is in communication with each other pressure load bearing cavity; At least one pressure load bearing cavity in one of the at least one movable arm links of the articulated arm is connected to another pressure load bearing cavity in the other movable arm link of the at least one movable arm link via at least one rotary joint, such that a sealing atmosphere is shared between at least one pressure load bearing cavity in one of the at least one movable arm links and another pressure load bearing cavity in the other movable arm link of the at least one movable arm link via the rotary joint. At least one pressure-load-bearing cavity enables fluid transfer of a sealed atmosphere through the articulated arm; Fluid transport includes one or more of fluid supply and fluid return, wherein fluid return is separate and distinct from fluid supply; At least one pressure-load-bearing cavity allows the passage of a sealed atmosphere through the fluid tube through the hinged arm; At least one pressure load-bearing cavity enables the transmission of electricity through a sealed atmosphere that permeates the articulated arm. At least one pressure load bearing cavity enables data communication through a sealed atmosphere that penetrates the hinged arm; At least one pressure-load-bearing cavity accommodates one or more sensors; At least one pressure load bearing cavity accommodates at least one stator of an arm drive motor, which is disposed at one or more of the end joint and at least one rotary joint; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. A reduced vacuum environment is a high vacuum environment that is appropriate for at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel. The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads.

[0086] According to this disclosure, a method includes: providing a transfer device comprising: a frame forming a sealed chamber configured to maintain a depressurized environment therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; and enabling extension and retraction of the hinged arm, wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hinged about the rotary joint to enable extension and retraction of the hinged arm; wherein the housing is an assembly of housing components sealed to maintain a sealing atmosphere within the housing within the depressurized environment of the sealed chamber, and the sealing housing components are interconnected via at least one fastening joint to form a pressure load-bearing interface through which the sealing atmosphere communicates between each sealing housing component and each other sealing housing component to achieve pressure balance between the interior of the housing and the depressurized environment on the outer wall of the housing.

[0087] In this method, one or more of the following are provided individually or in any suitable combination: The pressure load bearing interface forms a pressure load bearing compartment; The pressure load bearing compartment includes more than one pressure load bearing cavity, which are distributed by at least one movable arm link, wherein each pressure load bearing cavity is in communication with each other pressure load bearing cavity; At least one pressure load bearing cavity in one of the at least one movable arm links of the articulated arm is connected to another pressure load bearing cavity in the other movable arm link of the at least one movable arm link via at least one rotary joint, such that a sealing atmosphere is shared between at least one pressure load bearing cavity in one of the at least one movable arm links and another pressure load bearing cavity in the other movable arm link of the at least one movable arm link via the rotary joint. At least one pressure-load-bearing cavity enables fluid transfer of a sealed atmosphere through the articulated arm; Fluid transport includes one or more of fluid supply and fluid return, wherein fluid return is separate and distinct from fluid supply; At least one pressure-load-bearing cavity allows the passage of a sealed atmosphere through the fluid tube through the hinged arm; At least one pressure load-bearing cavity enables the transmission of electricity through a sealed atmosphere that permeates the articulated arm. At least one pressure load bearing cavity enables data communication through a sealed atmosphere that penetrates the hinged arm; At least one pressure-load-bearing cavity accommodates one or more sensors; At least one pressure load bearing cavity accommodates at least one stator of an arm drive motor, which is disposed at one or more of the end joint and at least one rotary joint; The articulated arm is a SCARA arm that extends from the end joint, rotates and extends about the end joint, and has more than one movable arm link to which the end effector is attached. Each movable arm link is connected in series with the end effector, which is located at the distal end of the SCARA arm. A reduced vacuum environment is a high vacuum environment that is appropriate for at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes. At least one rotary joint having an axis of rotation is distal to the distal joint; The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel; and The pressure-reducing portion of the housing is configured to be commensurate with the static and dynamic loads applied to at least one movable arm link by the corresponding static and dynamic operating conditions of the articulated arm, and is unaffected by differential pressure loads.

[0088] According to this disclosure, a transfer device includes: a frame forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to achieve extension and retraction of the hinged arm, and the at least one movable arm link having a circulating cooling recess included within the housing, the circulating cooling recess being separate from and distinct from an adjacent space within the housing adjacent to the circulating cooling recess, the circulating cooling recess being configured to house one or more electromechanical components within a circulating cooling atmosphere separate from and distinct from the internal static environment of the housing abutting the circulating cooling recess.

[0089] In the transmission device, one or more of the following are provided individually or in any suitable combination: The circulating cooling cavity is located at at least one rotary joint; A circulating cooling cavity accommodates and cools at least a portion of at least one sensor; At least one sensor includes a drive motor encoder, wherein the encoder read head is housed and cooled within a circulating cooling cavity, and the encoder track is a sealed and isolated encoder track from the circulating cooling cavity and the static internal environment. A circulating cooling cavity accommodates and cools at least the stator of an arm drive motor located at one or more of the end joint and at least one rotary joint; The arm drive motor includes an encapsulated rotor that is hermetically isolated from the circulating cooling cavity and the stationary internal environment; The circulating cooling cavity houses and cools the power cables; The circulating cooling cavity houses and cools the data communication cable; The circulating cooling cavity cools one or more pulleys and motor bearings located at at least one rotating joint via conduction. The circulating cooling cavity receives a circulating supply of coolant from another of at least one movable arm link.

[0090] According to this disclosure, a method includes: providing a transfer device comprising: a frame forming a sealed chamber configured to maintain a processing vacuum therein; and a hinged arm connected to the frame within the sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, on which a substrate holding stage is located; enabling extension and retraction of the hinged arm, wherein the at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link being hingedly rotated about the rotary joint to enable extension and retraction of the hinged arm; and accommodating one or more electromechanical components in a circulating cooling recess contained in the housing of the at least one movable arm link, the circulating cooling recess being separate from and distinct from an adjacent space in the housing adjacent to the circulating cooling recess, wherein the one or more electromechanical components are accommodated within a circulating cooling atmosphere of the circulating cooling recess being separate from and distinct from the internal static environment of the housing against the circulating cooling recess.

[0091] In this method, one or more of the following are provided individually or in any suitable combination: The circulating cooling cavity is located at at least one rotary joint; A circulating cooling cavity accommodates and cools at least a portion of at least one sensor; At least one sensor includes a drive motor encoder, wherein the encoder read head is housed and cooled within a circulating cooling cavity, and the encoder track is a sealed and isolated encoder track from the circulating cooling cavity and the static internal environment. A circulating cooling cavity accommodates and cools at least the stator of the arm drive motor located at one or more of the end joint and at least one rotary joint; The arm drive motor includes an encapsulated rotor that is hermetically isolated from the circulating cooling cavity and the stationary internal environment; The circulating cooling cavity houses and cools the power cables; The circulating cooling cavity houses and cools the data communication cable; The circulating cooling cavity cools one or more pulleys and motor bearings located at at least one rotating joint via conduction. The circulating cooling cavity receives a circulating supply of coolant from another of at least one movable arm link.

[0092] It should be understood that the above description is illustrative only. Those skilled in the art can devise various alternatives and modifications without departing from this disclosure. Therefore, this disclosure is intended to cover all such alternatives, modifications, and variations that fall within the scope of any of the appended claims. Furthermore, the fact that different features are described only in mutually different dependent or independent claims does not mean that combinations of these features cannot be advantageously used, and such combinations remain within the scope of this disclosure.

[0093] What needs protection is:

Claims

1. A transmission device, comprising: A frame forming a sealed chamber, wherein the sealed chamber is configured to maintain a processing vacuum therein; and A hinged arm connected to a frame within a sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, with a substrate holding stage located on the end effector; The at least one movable arm link has a housing, the housing includes at least one rotary joint having a rotation axis, the at least one movable arm link rotates hingedly about the rotary joint to achieve the extension and retraction of the hinged arm, and the housing is an assembly of housing components that are sealed to maintain a sealed atmosphere inside the housing within a sealed chamber under a processing vacuum. The sealed housing components are interconnected by at least one mechanical joint to form a sealed interface, through which the sealing atmosphere communicates between each sealed housing component of the outer shell and each other sealed housing component.

2. The transmission device of claim 1, wherein at least one sealed housing component is an end portion of at least one movable arm link, the at least one sealed housing component housing the at least one rotary joint, wherein the at least one rotary joint is contained within the at least one sealed housing component of the at least one movable arm link.

3. The transmission device as claimed in claim 1, wherein, The articulated arm is a SCARA arm extending from the end joint, the SCARA arm rotating and extending about the end joint, and having more than one movable arm link, to which an end effector is attached, each movable arm link being connected in series with an end effector, wherein the end effector is located at the distal end of the SCARA arm.

4. The transmission device as claimed in claim 1, wherein, The processing vacuum is a high vacuum commensurate with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes.

5. The transmission device of claim 1, wherein at least one rotary joint having a rotation axis is distal to the end joint.

6. The transmission device as claimed in claim 1, wherein the sealed interface: At least one movable arm link is split in two between said end portion of at least one movable arm link and another end portion; or Divide the outer wall or outer shell of the outer casing into two parts.

7. The transmission device as claimed in claim 1, wherein, The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel.

8. The transmission device as claimed in claim 1, wherein, The outer casing is at least partially depressurized, such that the walls of the depressurized portion of the outer casing are in pressure equilibrium over the entire wall thickness.

9. The transmission device as claimed in claim 1, wherein, The at least one sealed housing component accommodates: At least a portion of a brushless motor; or At least a part of the encoder.

10. A method comprising: Provide a transmission device, including: A frame forming a sealed chamber, the sealed chamber being configured to maintain a processing vacuum within it, and A hinged arm connected to a frame within a sealed chamber, the hinged arm having an end joint about which it rotates and extends, and having at least one movable arm link and an end effector connected to the at least one movable arm link, with a substrate holding stage located on the end effector; and The articulated arm extends and retracts, wherein at least one movable arm link has a housing containing at least one rotary joint having a rotation axis, the at least one movable arm link rotating articulatedly about the rotary joint, thereby extending and retracting the articulated arm. The outer shell is an assembly of shell components that are sealed to maintain a sealing atmosphere within the outer shell in the process vacuum of a sealed chamber. The sealed shell components are interconnected by at least one mechanical joint to form a sealing interface through which the sealing atmosphere communicates between each sealed shell component of the outer shell and each other sealed shell component.

11. The method of claim 10, wherein at least one sealed housing component is an end portion of at least one movable arm link, the at least one sealed housing component housing the at least one rotary joint, wherein the at least one rotary joint is contained within the at least one sealed housing component of the at least one movable arm link.

12. The method of claim 10, wherein, The articulated arm is a SCARA arm extending from the end joint, the SCARA arm rotating and extending about the end joint, and having more than one movable arm link, the end effector being attached to the movable arm link, each movable arm link being connected in series with the end effector, wherein the end effector is located at the distal end of the SCARA arm.

13. The method of claim 10, wherein, The processing vacuum is a high vacuum commensurate with at least one of the following processes: etching, plasma etching, chemical vapor deposition, plasma vapor deposition, implantation, ion implantation, metrology, rapid thermal processing, dry stripping atomic layer deposition, oxidation, diffusion, nitride formation, vacuum lithography, epitaxy, wire bonding and evaporation, and vacuum thin film processes.

14. The method of claim 10, wherein, At least one rotary joint having a rotation axis is distal to the distal joint.

15. The method of claim 10, wherein the sealing interface: At least one movable arm link is split in two between said end portion of at least one movable arm link and another end portion; or Divide the outer wall or outer shell of the outer casing into two parts.

16. The method of claim 10, wherein, The outer shell forms a pressure vessel, and the axis of rotation extends from the pressure vessel.

17. The method of claim 10, wherein, The outer casing is at least partially depressurized, such that the walls of the depressurized portion of the outer casing are in pressure equilibrium over the entire wall thickness.

18. The method of claim 10, wherein the at least one sealed housing component accommodates: At least a portion of a brushless motor; or At least a part of the encoder.

19. A substrate delivery device, comprising: Base; and A hinged arm connected to the base via an end joint, the hinged arm rotating and extending about the end joint, and having at least one movable arm link and an end effector connected to the at least one movable arm link, with a substrate holding stage located on the end effector; Wherein, the at least one movable arm link has a housing, the housing includes at least one rotary joint having a rotation axis, the at least one movable arm link rotates hingedly about the rotary joint to realize the extension and retraction of the articulated arm, and the housing is an assembly composed of housing components that are sealed to maintain a sealed atmosphere within the housing, the articulated arm being subjected to a processing vacuum within the sealed chamber resisting the processing vacuum of the housing; The sealed housing components are interconnected by at least one mechanical joint to form a sealed interface that isolates the sealing atmosphere from the processing vacuum and maintains the integrity of the processing vacuum. The sealing atmosphere is communicated between each sealed housing component of the housing body and each other through a flexible tube passing through the sealed interface. The flexible tube is configured to accommodate the rotation of at least one movable arm link about a rotation axis.

20. The substrate delivery apparatus of claim 19, wherein: At least one sealed housing component is the end portion of at least one movable arm link, the at least one sealed housing component housing the at least one rotary joint, wherein the at least one rotary joint is included within the at least one sealed housing component of the at least one movable arm link; and The flexible tube communicates with a pressurized chamber within at least one movable arm link to provide cooling fluid to the pressurized chamber, wherein the cooling fluid is discharged from the articulated arm through at least one other pressurized chamber within at least one movable arm, wherein the at least one other pressurized chamber forms a fluid passage for the discharged cooling fluid.

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