Leak detection system and cleaning apparatus

Abstract

The application discloses a leakage detection system and a cleaning device. The leakage detection system comprises a chemical tank, a liquid leakage pipeline, a detection element and a switch element. The chemical tank comprises an inner tank and an outer tank. The inner tank is used for containing chemical liquid. The outer tank is arranged around the outer periphery of the inner tank and forms a gap with the inner tank. The liquid leakage pipeline is in communication with the gap and located outside the outer tank. The detection element and the switch element are both arranged in the liquid leakage pipeline. When the inner tank leaks, the chemical liquid in the inner tank flows into the gap, and then flows into the liquid leakage pipeline through the gap. The detection element sends a trigger signal when detecting the chemical liquid in the liquid leakage pipeline. The trigger signal is used to open the switch element, so that the chemical liquid in the gap is discharged. The chemical tank is designed as a double-layer design of the inner tank and the outer tank. When the inner tank leaks, the leaked chemical liquid is discharged from the liquid leakage pipeline in time through the detection element. Therefore, double protection is realized, and the safety is high.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a leak detection system and cleaning equipment. Background Technology

[0002] In single-wafer high-temperature SPM cleaning equipment, SPM (Sulfuric Acid Hydrogen Peroxide Mixture) solution is used to remove photoresist from the substrate surface. The SPM solution is typically formed by mixing high-temperature sulfuric acid at 170°C with room-temperature hydrogen peroxide. The single-wafer high-temperature SPM cleaning equipment includes a sulfuric acid chemical tank and a hydrogen peroxide chemical tank. The sulfuric acid and hydrogen peroxide chemical tanks are respectively connected to nozzles to supply high-temperature sulfuric acid and hydrogen peroxide to the nozzles, which are then supplied to the substrate surface.

[0003] Currently, the sulfuric acid tank is a single-layer tank. High-temperature sulfuric acid is a hazardous chemical with strong corrosive and irritating properties. This sulfuric acid tank is not equipped with a leak detection system. If the tank ruptures and leaks, causing high-temperature sulfuric acid to flow out, it will pose a serious hazard to operators and the process environment. Therefore, the safety of this sulfuric acid tank is low.

[0004] Therefore, it is necessary to propose a leak detection system and cleaning equipment to solve the problem of how to detect chemical tank leaks and improve the safety of chemical tanks. Summary of the Invention

[0005] The purpose of this application is to solve the problem of how to detect chemical tank leaks in the prior art and improve the safety of chemical tanks.

[0006] To address the aforementioned problems, one embodiment of this application proposes a leak detection system, comprising:

[0007] A chemical tank includes an inner tank and an outer tank. The inner tank is used to contain chemical liquids, and the outer tank surrounds the outer periphery of the inner tank and forms a gap between them.

[0008] The leakage pipeline is connected to the gap and is located outside the outer tank;

[0009] Both the detection element and the switching element are located in the leakage pipeline, with the detection element positioned upstream of the switching element along the flow direction of the chemical liquid in the leakage pipeline.

[0010] The leak detection system is configured such that when a leak occurs in the inner tank, the chemical liquid in the inner tank flows into the gap and then into the leak pipeline. When the detection element detects the chemical liquid in the leak pipeline, it sends a trigger signal. The trigger signal is used to open the switching element so that the chemical liquid in the gap can be drained away.

[0011] Another embodiment of this application provides a cleaning device, comprising:

[0012] A chamber for accommodating the substrate;

[0013] Nozzles for supplying chemical solutions to a substrate; and

[0014] In the aforementioned leak detection system, the chemical tank is used to supply chemical liquid to the nozzle.

[0015] The chemical tank in this application comprises an inner tank and an outer tank, featuring a double-layer design. The outer tank surrounds the outer periphery of the inner tank, forming a gap between them. A leakage pipeline connects to this gap, and both a detection element and a switching element are located in the leakage pipeline. When the detection element detects a leak in the inner tank, the switching element is activated, promptly draining the leaked chemical liquid from the leakage pipeline. This achieves dual protection and high safety.

[0016] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a leakage detection system according to an embodiment of this application; and

[0018] Figure 2 This is a schematic diagram of the structure of a cleaning device according to an embodiment of this application. Detailed Implementation

[0019] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.

[0020] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0021] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0025] Figure 1 This is a schematic diagram of a leakage detection system according to an embodiment of this application.

[0026] refer to Figure 1 The leakage detection system 100 proposed in this application includes a chemical tank 10, a leakage conduit 20, a detection element 30, and a switching element 40. The chemical tank 10 includes an inner tank 11 and an outer tank 12. The inner tank 11 contains a chemical liquid, and the outer tank 12 surrounds the outer periphery of the inner tank 11, forming a gap 101 between them. The leakage conduit 20 communicates with this gap 101 and is located outside the outer tank 12. Both the detection element 30 and the switching element 40 are disposed on the leakage conduit 20. Along the flow direction of the chemical liquid in the leakage conduit 20, the detection element 30 is located upstream of the switching element 40.

[0027] When the inner tank 11 leaks, the chemical liquid in the inner tank 11 flows from the inner tank 11 into the gap 101, and then into the leakage pipe 20. When the detection element 30 detects the chemical liquid in the leakage pipe 20, it sends a trigger signal. The trigger signal is used to open the switching element 40 so that the chemical liquid in the gap 101 can be drained. The initial state of the switching element 40 can be closed, and when the detection element 30 sends the trigger signal, it switches the switching element 40 to the open state.

[0028] In this embodiment, the outer tank 12 serves two purposes: firstly, it insulates the chemical liquid in the inner tank 11; secondly, it acts as a leak catcher. When the inner tank 11 is intact, the outer tank 12 and the inner tank 11 are not interconnected. If the inner tank 11 ruptures and leaks, the leaked chemical liquid can be completely caught by the outer tank 12, preventing it from flowing outside the leak detection system 100. This double-layer design of the inner tank 11 and outer tank 12 prevents chemical liquid from leaking outside the chemical tank 10. Furthermore, in conjunction with the leak line 20 and the switching element 40, even if the inner tank 11 leaks, it can be detected by the detection element 30 and promptly drained through the leak line 20. This achieves dual protection, avoiding serious harm to operators and the process environment, ensuring high safety.

[0029] Furthermore, if the detection element is located inside the outer tank 12, between the inner tank 11 and the outer tank 12, it imposes space requirements on the detection element, making installation and maintenance inconvenient. Moreover, if the inner tank 11 leaks, the detection element will be immersed in the leaking liquid between the inner tank 11 and the outer tank 12, thus requiring corrosion protection. This application designs the detection element 30 outside the outer tank 12, which can detect whether the inner tank 11 is leaking without occupying the overall space of the chemical tank 10, facilitating installation and maintenance. Furthermore, this application can choose not to provide special corrosion protection for the detection element 30; the detection element 30 can be placed outside the leaking pipe 20 to avoid being immersed in the leaking liquid, and a standard detection element 30 can meet the detection requirements. Therefore, the leak detection system 100 proposed in this application also has the advantages of simple structure and reliability.

[0030] In some embodiments, reference Figure 1 The leakage pipe 20 is connected to the lower part of the outer tank 12. If the inner tank 11 ruptures and leaks, the chemical liquid will flow from the rupture point of the inner tank 11 to the lower part of the gap 101, and then flow from the lower part of the gap 101 into the leakage pipe 20. In this embodiment, the leakage pipe 20 can be specifically connected to the bottom wall of the outer tank 12 or to a lower position on the side wall of the outer tank 12, wherein the height of the connection position between the leakage pipe 20 and the outer tank 12 can be less than half the height of the side wall of the outer tank 12.

[0031] In this application, since the detection element 30 does not occupy the overall space of the chemical tank 10, the gap 101 between the inner tank 11 and the outer tank 12 can be small. A smaller gap 101 is beneficial for improving detection sensitivity and also allows for flexible placement of the connection position between the leakage pipe 20 and the outer tank 12. When the inner tank 11 leaks, the liquid level of the chemical liquid in the gap 101 may quickly rise to a higher position. Therefore, the leakage pipe 20 can also be connected to the upper part of the side wall of the outer tank 12. For example, the height of the connection position between the leakage pipe 20 and the outer tank 12 can be greater than half the height of the side wall of the outer tank 12. Thus, the chemical liquid at the higher position in the gap 101 flows into the leakage pipe 20, achieving the same detection effect.

[0032] In some embodiments, the gap 101 between the inner groove 11 and the outer groove 12 can be in the range of 5mm-15mm, and the gap 101 can be, for example, 8mm, 10mm, or 12mm.

[0033] In some embodiments, the inner tank 11 is made of quartz, which has high temperature resistance. The outer tank 12 is made of one or any combination of polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), ethylene-tetrafluoroethylene copolymer (ETFE), or ethylene-chlorotrifluoroethylene copolymer (ECTFE).

[0034] In some embodiments, reference Figure 1 The detection element 30 is either a leak sensor or a level sensor. If the detection element 30 is a leak sensor, the leak sensor is triggered when the chemical liquid in the leak pipe 20 flows past it, at which point the switching element 40 is opened to drain the leaked chemical liquid. If the detection element 30 is a level sensor, the level sensor detects when the level of the chemical liquid in the leak pipe 20 reaches a predetermined level, triggering the level sensor, at which point the switching element 40 is opened to drain the leaked chemical liquid. The predetermined level is set according to actual needs. This application does not impose any particular limitation on the type of detection element; for example, the leak sensor and the level sensor can be capacitive, resistive, photoelectric, or ultrasonic, etc.

[0035] In some embodiments, reference Figure 1 The switching element 40 can be a manual valve or an automatic control valve, such as a pneumatic valve. When the switching element 40 is a manual valve, it is manually opened according to the trigger signal from the detection element 30. When the switching element 40 is an automatic control valve, it can be opened by the controller according to the trigger signal from the detection element 30.

[0036] In some embodiments, reference Figure 1The leak detection system 100 also includes a drain pipe 50 and a drain valve 51. The drain pipe 50 is connected to the inner tank 11 of the chemical tank 10. The drain valve 51 is located in the drain pipe 50. When a leak occurs in the inner tank 11, the drain valve 51 is opened to drain the chemical liquid in the inner tank 11 from the drain pipe 50. In this embodiment, the connection between the drain pipe 50 and the inner tank 11 can be welded or integrally formed to ensure that the chemical liquid in the inner tank 11 does not leak from the connection point between the drain pipe 50 and the inner tank 11.

[0037] In some embodiments, reference Figure 1 The drain pipe 50 penetrates the wall of the outer tank 12. The drain pipe 50 is sealed to the outer tank 12 by a seal (not shown). The seal is, for example, a sealing ring. Those skilled in the art will understand that the chemical tank 10 may also be equipped with other components, such as a level pipe (not shown) with a level gauge for observing the level of the chemical solution in the inner tank 11. These components need to pass through the outer tank 12 and connect to the inner tank 11. In this case, the connection between these components and the inner tank 11 can be welding or integral molding, and a seal can be used to prevent leakage of the chemical solution from the connection point into the inner tank 11 and the gap 101.

[0038] Figure 2 This is a schematic diagram of the structure of a cleaning device according to an embodiment of this application.

[0039] refer to Figure 2 The cleaning equipment 1000 proposed in this application includes a chamber 200, a nozzle 300, a liquid supply pipeline 60, and the aforementioned leak detection system 100. The chamber 200 is used to accommodate a substrate 400. The first end of the liquid supply pipeline 60 is connected to an inner tank 11, and the second end of the liquid supply pipeline 60 is connected to the nozzle 300 to supply the chemical liquid from the inner tank 11 to the nozzle 300. The nozzle 300 then supplies the chemical liquid to the surface of the substrate 400. In this embodiment, the first end of the liquid supply pipeline 60 is connected to a drain pipeline 50 via a T-connector, and the first end of the liquid supply pipeline 60 is connected to the inner tank 11 via the drain pipeline 50. When the chemical liquid is high-temperature sulfuric acid, it can be cooled first in a cooling tank before being discharged to the plant, avoiding adverse effects on some components at the plant due to excessively high sulfuric acid temperature.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A leak detection system, characterized in that, include: A chemical tank includes an inner tank and an outer tank. The inner tank is used to contain a chemical liquid, and the outer tank surrounds the outer periphery of the inner tank and forms a gap with the inner tank. The leakage pipeline is connected to the gap and is located outside the outer tank; Both the detection element and the switching element are disposed in the leakage pipeline, and the detection element is located upstream of the switching element along the flow direction of the chemical liquid in the leakage pipeline; The leakage detection system is configured such that when a leak occurs in the inner tank, the chemical liquid in the inner tank flows into the gap and then into the leakage pipeline. When the detection element detects the chemical liquid in the leakage pipeline, it sends a trigger signal. The trigger signal is used to activate the switching element so that the chemical liquid in the gap is drained away.

2. The leak detection system according to claim 1, characterized in that, The inner groove is made of quartz, and the outer groove is made of one or any combination of polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, ethylene-tetrafluoroethylene copolymer, or ethylene-chlorotrifluoroethylene copolymer.

3. The leak detection system according to claim 1, characterized in that, The detection element is a leakage sensor or a liquid level sensor.

4. The leak detection system according to claim 1, characterized in that, The switching element is a manual valve or an automatic control valve.

5. The leak detection system according to claim 1, characterized in that, The leakage pipeline is connected to the lower part of the outer tank.

6. The leak detection system according to claim 1, characterized in that, Also includes: A drain pipe is connected to the inner tank; A drain valve is installed in the drain pipeline to control the opening and closing of the drain pipeline; The leak detection system is configured as follows: When the inner tank leaks, the drain valve is opened to drain the chemical liquid in the inner tank from the drain pipe.

7. The leak detection system according to claim 6, characterized in that, The connection between the drain pipe and the inner tank is either welded or integrally formed.

8. The leak detection system according to claim 6, characterized in that, The drain pipe runs through the wall of the outer tank.

9. The leakage detection system according to claim 8, characterized in that, Also includes: A sealing element is used to seal the drain pipe from the outer tank.

10. A cleaning device, characterized in that, include: A chamber for accommodating the substrate; Nozzles are used to supply chemical liquid to the substrate; as well as The leak detection system according to any one of claims 1 to 9, wherein the chemical tank in the leak detection system is used to supply chemical liquid to the nozzle.

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