Anti-wire breakage pulling device for wire bonding pulling process

By using high-purity dry nitrogen in a wire drawing machine to remove microparticles through forward and reverse swirling, combined with filter plate filtration and a stable flow field design, the problem of bonded wire breakage caused by static electricity and oxidation in a cleanroom environment is solved, achieving the effect of preventing bonded wire breakage.

CN122142118AActive Publication Date: 2026-06-05CHANGZHOU RUNXIANG ELECTRON TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHANGZHOU RUNXIANG ELECTRON TECH CO LTD
Filing Date
2026-05-08
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

Existing wire drawing machines, in cleanroom environments, suffer from electrostatic effects and humid air, causing bonded wires to break during the drawing process. This is especially true for sensitive materials such as silver alloy wires, where microparticle adsorption and oxidation damage are severe.

Method used

High-purity dry nitrogen is used as the dust removal medium. Through the design of the cooling component, the microparticles on the surface of the wire are stripped off by forward and reverse swirling flow. The material is then filtered through a filter plate. Combined with a stable flow field design, electrostatic adsorption and oxidation are avoided, forming an inert protective environment.

Benefits of technology

It effectively prevents the bonding wire from breaking during the drawing process, improves the cleanliness and integrity of the wire surface, avoids wire breakage problems caused by static electricity and oxidation, and enhances grain boundary strength.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of bonding wire production, in particular to a wire breakage prevention traction device for a bonding wire drawing process, which comprises a wire drawing traction machine and a wire drawing die and is used for cooperating with a drawn wire, further comprises a mounting box and a cooling assembly, the mounting box is fixedly arranged on the wire drawing traction machine, the wire drawing die is arranged in the mounting box, the cooling assembly is arranged on the mounting box and comprises an air inlet pipe, the air inlet pipe is used for conveying nitrogen, the nitrogen is high-purity dry nitrogen, the cooling assembly is coaxially arranged with the wire, after the nitrogen enters the inside of the mounting box through the air inlet pipe, the nitrogen is first accelerated in a forward cyclone on the surface of the wire, and then the nitrogen is reversely cycloned to separate the microparticles on the surface of the wire from the wire. Through the cooling assembly, the conveyed high-purity dry nitrogen can avoid the oxidation of the bonding wire caused by humid air on the basis of eliminating electrostatic interference, and the breakage of the bonding wire in the drawing process is effectively avoided.
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Description

Technical Field

[0001] This invention relates to the field of bonding wire production technology, specifically to a wire breakage prevention traction device for the bonding wire drawing process. Background Technology

[0002] The drawing process refers to the process of drawing metal wires or similar flexible metal materials using a wire drawing machine or wire drawing device, where the drawing action is achieved using a spool. As a key microelectronic interconnect material connecting the internal circuitry of a chip to its external pins, the quality of bonding wires directly determines the electrical performance and long-term reliability of integrated circuits. The core production step for bonding wires lies in the drawing process.

[0003] The traction device, as the core of the bonding wire drawing process, is susceptible to breakage of the fine bonding wires due to instantaneous tension pulses, mechanical vibrations, or uneven surface friction. Existing technologies offer effective solutions to these problems. For example, CN223394053U discloses an anti-breakage traction device for bonding wire drawing equipment. This device adjusts the traction position of the feed block according to the position of the bonding wire on the unwinding coil, adjusts the position of the output block according to the position of the drawing equipment, and adjusts the position of each guide block according to the bottom positions of the feed and output blocks, as well as the rotation direction of the guide blocks. This reduces traction resistance and improves the anti-breakage traction effect. However, the following problems still exist: Existing wire drawing machines usually ignore the effects of electrostatics. For environmentally sensitive materials such as silver alloy wires, in a cleanroom environment, the static electricity generated by the friction between the extremely fine wire and the guide can cause the wire to adsorb microparticles from the air. These microparticles can cause instantaneous pressure changes when they enter the mold. Furthermore, humid air can cause oxidation or chlorination damage to the wire during the drawing process, weakening the grain boundary strength of the wire and making it easier for the bond wire to break.

[0004] Therefore, in order to solve the above problems, a wire breakage prevention traction device for the bonding wire pulling process is proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a wire breakage prevention traction device for the wire drawing process, which solves the problem of wire breakage caused by static electricity and humid air during the drawing process. Through the addition of a cooling component and the use of high-purity dry nitrogen gas, static interference is eliminated while also preventing oxidation of the wire caused by humid air, effectively avoiding wire breakage during the drawing process.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A wire breakage prevention traction device for bonding wire drawing process includes a wire drawing traction machine and a wire drawing die for drawing wire. It also includes a mounting box and a cooling component. The mounting box is fixedly mounted on the wire drawing traction machine, the wire drawing die is disposed inside the mounting box, and the cooling component is disposed on the mounting box and includes an air inlet pipe for conveying nitrogen gas, which is high-purity dry nitrogen gas. The cooling component is coaxially arranged with the wire. After the nitrogen gas enters the interior of the mounting box through the air inlet pipe, it first swirls and contracts on the surface of the wire to accelerate, and then swirls in the opposite direction to carry away the microparticles on the surface of the wire and separate them from the wire.

[0007] Preferably, the cooling component further includes a hollow column, a first tube, and a second tube. The hollow column is fixedly disposed outside the mounting box, and the air inlet pipe extends through the interior of the hollow column. The mounting box has an air inlet. The hollow column is open and connected to the air inlet. The first tube is fixedly disposed inside the mounting box and connected to the air inlet. The second tube is coaxially fixedly connected to the first tube and sleeved with a wire. The inner wall of the first tube is provided with a spiral guide vane, and the inner wall of the second tube is provided with a spiral guide groove. The spiral direction of the spiral guide vane and the spiral guide groove are opposite.

[0008] Preferably, the pipe wall of the second pipe is provided with a connecting rod, and a filter plate is fixedly connected to it through the connecting rod. The filter plate has a through hole in the middle and is coaxially sleeved with the wire through the through hole. The distance between the inner wall of the through hole and the wire is greater than or equal to the distance between the inner wall of the second pipe and the wire.

[0009] Preferably, the first tube is tapered and its inner diameter decreases along the direction of nitrogen flow. The inner walls of the first tube and the second tube are smoothly connected, and the spiral guide groove extends to the connection between the first tube and the second tube.

[0010] Preferably, the inner wall of the outlet end of the second pipe is provided with a rounded chamfer, the spiral guide groove extends to the rounded chamfer of the outlet end of the second pipe, and there are multiple spiral guide vanes and spiral guide grooves arranged in an equal number along the center line of the first pipe.

[0011] Preferably, the taper of the first tube is set to 20° to 40°.

[0012] Preferably, the spiral angle of the spiral guide vane is set to 60° to 75°, and the inner ring of the spiral guide vane is evenly spaced from the central axis of the tube.

[0013] Preferably, the depth of the spiral guide groove is set to 5μm to 20μm, and increases along the flow axis of nitrogen.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. By using the cooling components and high-purity dry nitrogen introduced through the air inlet pipe as the dust removal medium, the non-polar molecular properties of the high-purity dry nitrogen can effectively suppress the charge transfer generated at the gas-solid interface during high-speed collisions, thus weakening the adsorption effect of electrostatics on microparticles at the source. At the same time, in conjunction with the guide vanes of the forward swirling flow in pipe one and the spiral guide grooves of the reverse swirling flow in pipe two, the nitrogen airflow generates violent reversal shearing and high-intensity turbulence, which can powerfully peel off the microparticles adsorbed on the surface of the ultra-fine wire, effectively solving the problem of wire breakage caused by sudden pressure changes in the drawing die due to the inability of traditional blowing or pumping methods to overcome electrostatic adsorption forces.

[0015] 2. By using spiral guide vanes inside tube one and spiral guide grooves on the inner wall of tube two, the high-speed rotating airflow generates centrifugal force, which throws the stripped microparticles radially toward the external filter plate for filtration, preventing the microparticles from suspending in the airflow and entering the drawing die. In addition, the safety distance design between the perforation in the center of the filter plate and the wire ensures that the wire will not come into contact with the edge of the perforation even when the wire vibrates slightly during high-speed drawing. While ensuring the dust removal effect, it avoids scratches on the wire surface caused by mechanical contact, improves the surface cleanliness and integrity of the wire before entering the die, and further avoids wire breakage during the drawing process.

[0016] 3. By designing the taper of tube one, the chamfer of the outlet end of tube two, and the spiral rise angle, a continuous and stable centripetal pressure gradient flow field can be constructed, effectively suppressing the slight vibration of the wire caused by airflow pulsation and edge eddies, and avoiding fatigue fracture of the bond wire due to high-frequency vibration. In addition, the continuously flowing high-purity dry nitrogen forms an inert protection and cooling barrier around the wire, which, while preventing oxidation or chlorination damage to the wire and enhancing grain boundary strength, avoids the breakage of the bond wire during the drawing process. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 For the present invention Figure 1 A cross-sectional view of the connection structure between the wiring harness, the mounting box, and the cooling components; Figure 3 For the present invention Figure 2 Schematic diagram of the connection structure between tube 1, tube 2 and filter plate; Figure 4 For the present invention Figure 3 A partial cross-sectional view of the structure of tube 1 and tube 2; Figure 5 For the present invention Figure 4 A magnified view of part A in the middle section; Figure 6This is a perspective connection diagram of the pipe one and pipe two of the present invention; Figure 7 This is a schematic diagram of the planar cross-sectional connection structure of the wire, tube one, and tube two of the present invention.

[0018] In the diagram: 1. Wire drawing traction machine; 2. Wire drawing die; 3. Wire; 4. Mounting box; 41. Air inlet; 5. Cooling component; 51. Air inlet pipe; 52. Hollow column; 53. Pipe 1; 531. Spiral guide vane; 54. Pipe 2; 541. Spiral guide groove; 542. Connecting rod; 543. Filter plate; 5431. Perforation. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Please see Figures 1 to 7 This invention provides a wire breakage prevention traction device for the bonding wire drawing process, the technical solution of which is as follows: For details, please refer to Figure 1 and Figure 2 A wire breakage prevention traction device for bonding wire drawing process includes a wire drawing traction machine 1 and a wire drawing die 2 for drawing wire 3. It also includes a mounting box 4 and a cooling component 5. The mounting box 4 is fixedly mounted on the wire drawing traction machine 1 and has a flexible sealing ring embedded in its side wall. The wire 3 passes through the flexible sealing ring. The flexible sealing ring can effectively reduce nitrogen leakage, allowing nitrogen to flow in the direction of wire 3 within the mounting box 4. The wire drawing die 2 is located inside the mounting box 4. The cooling component 5 is located on the mounting box 4 and includes an air inlet pipe 51 for conveying nitrogen, which is high-purity dry nitrogen.

[0021] Because air contains polar molecules such as oxygen, moisture, and carbon dioxide, electron transfer easily occurs during friction, leading to electrostatic adsorption on the surface of wire 3. High-purity dry nitrogen, on the other hand, is a non-polar molecule with an extremely stable electron cloud distribution, making it difficult for it to lose or gain electrons during high-speed collisions with metals. By utilizing its non-polar molecular properties, the charge transfer rate at the gas-solid interface during high-speed collisions is reduced, thereby suppressing the generation of static electricity and preventing microparticles from adsorbing onto the surface of wire 3 due to electrostatics. At the same time, the flow of nitrogen gas can also be used to cool and isolate the drawing die 2, preventing high-temperature oxidation at the drawing die 2 during the drawing of wire 3.

[0022] As one embodiment of the present invention, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The cooling component 5 is coaxially arranged with the wire 3. Nitrogen gas enters the mounting box 4 through the air inlet pipe 51 and first swirls and contracts on the surface of the wire 3 to accelerate, and then swirls in the opposite direction to carry microparticles on the surface of the wire 3 and separate them from the wire 3. The cooling component 5 also includes a hollow column 52, a first tube 53 and a second tube 54. The hollow column 52 is fixedly arranged outside the mounting box 4. The air inlet pipe 51 passes through the interior of the hollow column 52. The mounting box 4 has an air inlet 41. The hollow column 52 is open and connected to the air inlet 41. The first tube 53 is fixedly arranged inside the mounting box 4 and connected to the air inlet 41. The second tube 54 is coaxially fixedly connected to the first tube 53 and sleeved with the wire 3. The inner wall of the first tube 53 is provided with a spiral guide vane 531. The inner wall of the second tube 54 is provided with a spiral guide groove 541. The spiral direction of the spiral guide vane 531 and the spiral guide groove 541 is opposite.

[0023] Existing dust removal methods for wire drawing devices typically employ simple blowing or extraction. However, in cleanroom environments, the electrostatic adsorption force generated by high-speed friction of the ultra-fine wire 3 is very strong. Straight airflow or simple negative pressure cannot overcome this electrostatic adsorption force, causing microparticles to adhere to the surface of the wire 3 under electrostatic action and move synchronously with the wire 3. If the microparticles on the surface of the wire 3 do not detach from the wire 3 body before the wire 3 enters the drawing die 2, they will cause a sudden pressure change inside the drawing die 2, leading to the wire 3 breaking. By using the set tube 1 53 and tube 2 54, and utilizing the spiral guide vane 531 inside tube 1 53 and the spiral guide groove 541 inside tube 2 54, since the spiral directions of the spiral guide vane 531 and the spiral guide groove 541 are opposite, nitrogen gas will generate violent reversal shear when entering tube 2 54 from tube 1 53. The instantaneous change of direction can generate extremely high turbulence intensity, thereby peeling off the microparticles electrostatically adsorbed on the surface of wire 3, thus avoiding the situation where the surface of wire 3 has microparticles when entering the drawing die 2, which would cause instantaneous pressure change and breakage during the drawing process.

[0024] As one embodiment of the present invention, refer to Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 The pipe wall of the second pipe 54 is provided with a connecting rod 542, and a filter plate 543 is fixedly connected to it through the connecting rod 542. A through hole 5431 is opened in the middle of the filter plate 543 and is coaxially sleeved with the wire 3 through the through hole 5431. The distance between the inner wall of the through hole 5431 and the wire 3 is greater than or equal to the distance between the inner wall of the second pipe 54 and the wire 3.

[0025] After nitrogen gas removes microparticles from the surface of wire 3 through forward and reverse swirling, if it is not cleaned in time, the stripped microparticles will still be suspended in the airflow and enter the interior of the drawing die 2. Through the filter plate 543, when the high-speed rotating nitrogen gas flow carrying microparticles flows out from the outlet end of the tube 2 54, the microparticles will be thrown radially outward under the action of centrifugal force, thereby impacting and staying on the filter screen of the filter plate 543, thus achieving filtration of microparticles in the nitrogen gas flow; at the same time, since the distance between the inner wall of the perforation 5431 and the wire 3 is greater than or equal to the distance between the inner wall of the tube 2 54 and the wire 3, it can be ensured that even if the wire 3 vibrates slightly when passing through the filter plate 543, it will not come into contact with the edge of the perforation 5431 of the filter plate 543, thereby preventing the surface of the wire 3 from being scratched and further avoiding the wire 3 from breaking during the drawing process.

[0026] As one embodiment of the present invention, refer to Figure 6 and Figure 7 Pipe 53 is tapered and its inner diameter decreases along the direction of nitrogen flow. The inner walls of pipe 53 and pipe 54 are smoothly connected, and the spiral guide groove 541 extends to the connection between pipe 53 and pipe 54.

[0027] By adopting the above scheme, after the nitrogen gas flow reaches high speed at the end of tube 1 53, it can immediately enter the spiral guide groove 541 of tube 2 54. The smooth connection between the inner walls of tube 1 53 and tube 2 54 can reduce the kinetic energy loss of the nitrogen gas flow. At the same time, the spiral guide groove 541 extending to the connection between tube 1 53 and tube 2 54 can force the nitrogen gas flow into the spiral guide groove 541 when the nitrogen gas flow speed is the fastest and the peeling force is the strongest, ensuring the continuity of the pressure distribution of the nitrogen gas flow field and avoiding the occurrence of airflow pulsation. At the same time, for bonded wires that are extremely sensitive to tension, the stable flow field can also prevent the wire 3 from undergoing microscopic physical vibration, further reducing the risk of wire breakage.

[0028] As one embodiment of the present invention, refer to Figure 7 The inner wall of the outlet end of pipe 2 54 is set with a rounded chamfer. The spiral guide groove 541 extends to the rounded chamfer of the outlet end of pipe 2 54. There are multiple spiral guide vanes 531 and spiral guide grooves 541 arranged in a circular array along the center line of pipe 1 53, and the number is equal. The taper of pipe 1 53 is set to 20° to 40°.

[0029] When nitrogen gas flows from the narrow pipe of tube 54 into the open space, if the outlet end of tube 54 is straight, it will cause severe edge eddies and pressure changes in the nitrogen gas flow. Therefore, the rounded chamfer at the outlet end of tube 54 can buffer the fluid, allowing the high-speed rotating airflow to diffuse smoothly outward, avoiding turbulent pulses at the outlet of tube 54. This protects the wire 3, which is removed from tube 54 and is in a suspended state, from breaking due to violent end swinging. At the same time, since the number of spiral guide vanes 531 and spiral guide grooves 541 is equal, each swirling branch generated by the spiral guide vane 531 can enter a corresponding spiral guide groove 541, reducing collision losses and ineffective turbulence when the airflow enters tube 54, thus improving the kinetic energy conversion efficiency of nitrogen and The efficiency of microparticle stripping is greatly improved. However, if the taper of tube 53 is less than 20°, the contraction of tube 53 along the nitrogen flow direction will be relatively gentle, resulting in an excessively long axial length of tube 53. This increases the frictional resistance between the nitrogen and the tube wall, causing the final nitrogen flow velocity in contact with the wire 3 surface to fall short of the effective speed for microparticle stripping. If the taper of tube 53 is greater than 40°, the contraction of tube 53 along the nitrogen flow direction will be more violent. During high-speed movement, the nitrogen flow is prone to detaching from the inner wall of tube 53, resulting in boundary layer separation, severe turbulence and backflow, and consequently, uneven pressure distribution in the flow field. By limiting the taper of tube 53 to between 20° and 40°, the contraction process of the nitrogen flow is smoother, forming a stable centripetal pressure gradient, thus smoothly guiding the wire 3 to the center position.

[0030] As one embodiment of the present invention, refer to Figure 7 The spiral rise angle of the spiral guide vane 531 is set to 60° to 75°. The inner ring of the spiral guide vane 531 is evenly spaced with the central axis of the tube 53. The depth of the spiral guide groove 541 is set to 5μm to 20μm and increases along the flow axis of nitrogen.

[0031] By adopting the above scheme, the nitrogen gas flow can generate a large centrifugal force during the flow process. Under the strong swirling action, the microparticles are peeled off from the surface of the wire 3 by electrostatic adsorption and guided to the inner wall of the tube 53. Furthermore, by setting the inner ring of the spiral guide vane 531 at equal intervals with the central axis of the tube 53, a uniform pressure field can be formed around the wire 3 by the nitrogen gas flow, thereby avoiding fatigue or direct breakage of the wire 3.

[0032] In a high-speed airflow, an extremely thin boundary layer with a very slow flow velocity forms close to the inner wall of tube 54 and the surface of wire 3. Micron-sized particles can easily enter this boundary layer, making it impossible for ordinary swirling flow to effectively remove them. By limiting the depth of the spiral guide groove 541 to 5μm to 20μm, this boundary layer can be effectively disturbed, thereby generating a small vortex effect. At the same time, by utilizing the depth variation of the spiral guide groove 541 along the flow direction of nitrogen gas, combined with the rounded chamfer at the outlet end of tube 54, the airflow can be further diffused outward when it flows out of the outlet end of tube 54, thereby effectively entraining tiny particles of 1μm to 10μm, further preventing the wire 3 from breaking due to the influence of microparticles when it enters the drawing die 2.

[0033] Working principle: In use, high-purity dry nitrogen is first continuously supplied to the cooling component 5 through the air inlet pipe 51. The nitrogen passes through the hollow column 52 fixed to the outside of the mounting box 4 and enters the tube 53 located inside the mounting box 4 through the air inlet 41 on the mounting box 4. Since the tube 53 is tapered and its inner diameter decreases along the direction of nitrogen flow, the nitrogen is accelerated and contracted in the tube 53. At the same time, guided by the spiral guide vanes 531 inside, the nitrogen forms a high-speed positive swirling flow on the surface of the wire 3 and forms a centripetal pressure gradient. It then immediately enters the tube 54 coaxially connected to the tube 53. The spiral guide grooves 541 on the inner wall of the tube 54 are used to instantly change the direction and generate high-intensity turbulence. Combined with the non-polar molecular characteristics of high-purity dry nitrogen, the charge transfer rate of the gas-solid interface is reduced, thereby forcibly stripping the microparticles that are electrostatically adsorbed on the surface of the wire 3 due to high-speed friction. Subsequently, the nitrogen gas carrying the microparticles is discharged from the outlet end of tube 2 54. The centrifugal force generated by the high-speed rotation throws the stripped microparticles radially outward, causing them to collide with and remain on the filter plate 543, thereby filtering and intercepting the 1μm to 10μm microparticles carried in the nitrogen gas flow. Meanwhile, the wire 3 passes smoothly through the center of the slightly larger inner diameter perforation 5431 in the middle of the filter plate 543, avoiding mechanical scratches. Next, the rounded chamfer design of the inner wall of the outlet end of tube 2 54 makes the high-speed airflow diffuse smoothly outward in the radial direction, eliminating the pulsation and shaking caused by edge eddies and pressure changes. In addition, the flexible sealing ring embedded in the inner wall of the mounting box 4 effectively prevents nitrogen leakage and guides the nitrogen airflow to flow in the direction of wire 3. Finally, the nitrogen gas filling the mounting box 4 continuously cools and isolates the drawing die 2, suppressing static electricity and removing microparticles, while providing an oxygen-free, dry, inert protective environment for the wire 3, avoiding the risk of wire breakage caused by oxidation damage due to environmental moisture and sudden pressure changes within the die.

[0034] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wire breakage prevention traction device for bonding wire drawing process, comprising a wire drawing traction machine (1) and a wire drawing die (2) for cooperating in drawing wire (3), characterized in that: It also includes an installation box (4) and a cooling component (5). The installation box (4) is fixedly installed on the wire drawing traction machine (1). The wire drawing die (2) is installed inside the installation box (4). The cooling component (5) is installed on the installation box (4) and includes an air inlet pipe (51). The air inlet pipe (51) is used to transport nitrogen gas, and the nitrogen gas is high-purity dry nitrogen gas. The cooling component (5) is coaxially arranged with the wire (3). After the nitrogen gas enters the installation box (4) through the air inlet pipe (51), it first swirls and contracts on the surface of the wire (3) to accelerate, and then swirls in the opposite direction to carry the microparticles on the surface of the wire (3) and separate them from the wire (3).

2. The anti-breakage traction device for bonding wire pulling process according to claim 1, characterized in that: The cooling component (5) also includes a hollow column (52), a first tube (53) and a second tube (54). The hollow column (52) is fixedly installed outside the mounting box (4). The air inlet pipe (51) passes through the interior of the hollow column (52). The mounting box (4) has an air inlet (41). The hollow column (52) is open and connected to the air inlet (41). The first tube (53) is fixedly installed inside the mounting box (4) and connected to the air inlet (41). The second tube (54) is coaxially fixedly connected to the first tube (53) and sleeved with the wire (3). The inner wall of the first tube (53) is provided with a spiral guide vane (531). The inner wall of the second tube (54) is provided with a spiral guide groove (541). The spiral direction of the spiral guide vane (531) and the spiral guide groove (541) are opposite.

3. The anti-breakage traction device for bonding wire pulling process according to claim 2, characterized in that: The tube 2 (54) is provided with a connecting rod (542) on its wall, and a filter plate (543) is fixedly connected to it through the connecting rod (542). The filter plate (543) has a perforation (5431) in the middle and is coaxially sleeved with the wire (3) through the perforation (5431). The distance between the inner wall of the perforation (5431) and the wire (3) is greater than or equal to the distance between the inner wall of the tube 2 (54) and the wire (3).

4. The anti-breakage traction device for bonding wire pulling process according to claim 3, characterized in that: The first tube (53) is tapered and its inner diameter decreases along the direction of nitrogen flow. The inner walls of the first tube (53) and the second tube (54) are smoothly connected. The spiral guide groove (541) extends to the connection between the first tube (53) and the second tube (54).

5. The anti-breakage traction device for bonding wire pulling process according to claim 4, characterized in that: The inner wall of the outlet end of the second pipe (54) is provided with a rounded chamfer. The spiral guide groove (541) extends to the rounded chamfer of the outlet end of the second pipe (54). There are multiple spiral guide vanes (531) and spiral guide grooves (541) arranged in a circular array along the center line of the first pipe (53), and the number is equal.

6. The anti-breakage traction device for bonding wire pulling process according to claim 3, characterized in that: The taper of the tube (53) is set to 20° to 40°.

7. The anti-breakage traction device for bonding wire pulling process according to claim 3, characterized in that: The spiral angle of the spiral guide vane (531) is set to 60° to 75°, and the inner ring of the spiral guide vane (531) is equally spaced from the central axis of the tube (53).

8. The anti-breakage traction device for bonding wire pulling process according to claim 4, characterized in that: The depth of the spiral guide groove (541) is set to 5μm to 20μm and increases along the flow axis of nitrogen.