Carrier boat, carrier device, semiconductor process equipment and film coating method for a piece to be coated

Abstract

The application relates to a carrier boat, a carrier device, a semiconductor process equipment and a film coating method for a piece to be coated, the carrier boat comprising a first insulating connecting piece, a conductive partition block and a plurality of stacked and spaced boat leaves; the boat leaves are divided into odd-layer boat leaves and even-layer boat leaves; the polarities of the odd-layer boat leaves and the even-layer boat leaves are opposite; the adjacent boat leaves are mutually insulated and supported and fixed by the first insulating connecting pieces to form intervals; the odd-layer boat leaves and the even-layer boat leaves are respectively connected with a radio frequency power source in conduction through part of the conductive partition blocks; at least part of the boat leaves are provided with hollow regions, and edges of the hollow regions are provided with support structures for placing the pieces to be coated. The scheme greatly reduces the process time, improves the process efficiency, realizes double-sided simultaneous film coating by using one film coating equipment, and reduces the equipment cost and the equipment floor area.

Description

Technical Field

[0001] This invention relates to the field of solar photovoltaic technology, and in particular to a carrier boat, a carrier device, semiconductor process equipment, and a coating method for a workpiece. Background Technology

[0002] In photovoltaic cell manufacturing, plasma-enhanced chemical vapor deposition (PECVD) is a mature and stable thin film deposition technology that can deposit high-quality thin films on the surface of the workpiece and precisely control their properties. For coating workpieces, a graphite boat is often used to support the workpiece within the chamber of a reaction furnace to complete the coating process.

[0003] Currently, PECVD involves two coating processes: a front coating and a back coating. This results in a time-consuming and energy-intensive process, low production efficiency, and a high risk of debris generation. Furthermore, the two coating machines required for both the front and back coatings are costly and require a large floor space. Summary of the Invention

[0004] In view of this, the present invention proposes a carrier boat, a carrier device, semiconductor process equipment, and a coating method for the workpiece to be coated, aiming to partially or completely solve the technical problems of existing processes being time-consuming, energy-intensive, having low production efficiency, being prone to generating debris, and requiring two coating devices for the front and back films, which are costly and occupy a large area.

[0005] To achieve the above objectives, the technical solution of the present invention is implemented as follows: In a first aspect, embodiments of the present invention provide a carrier boat, the carrier boat comprising: The first insulating connector, the conductive spacer, and a plurality of stacked and spaced boat blades; The scaphoid blade is divided into odd-numbered layers and even-numbered layers; the odd-numbered layers of scaphoid blades have opposite polarities to the even-numbered layers. Adjacent boat blades are insulated from each other and supported and fixed to form a gap through the first insulating connector; the odd-numbered layers of boat blades and the even-numbered layers of boat blades are respectively connected to the radio frequency power supply through a portion of the conductive spacers; At least a portion of the boat blades are provided with a hollowed-out area, and the edge of the hollowed-out area is provided with a support structure for placing the workpiece to be plated.

[0006] Secondly, embodiments of the present invention provide a support device, comprising: Boat support and multiple aforementioned carrying boats; The boat support includes a first polarity connection part, a second polarity connection part, and a second insulating connector; The first polarity connection portion and the second polarity connection portion are fixedly connected by the second insulating connector, and the first polarity connection portion and the second polarity connection portion are insulated from each other; The first polarity connection portion and the second polarity connection portion are respectively connected to an radio frequency power supply; a plurality of the carrier boats are arranged at intervals on the boat support along the length direction of the boat support; the radio frequency power supply is used to control the polarity switching of the first polarity connection portion and the second polarity connection portion respectively; The first polarity connection portion and the second polarity connection portion are respectively connected to the conductive spacers of the boat blades of the carrying boat.

[0007] Thirdly, embodiments of the present invention provide a semiconductor process apparatus, including: the aforementioned carrier device, reactor, and radio frequency power supply; The reactor has a reaction chamber, and the support device is disposed in the reaction chamber; the boat support of the support device is electrically connected to the radio frequency power supply; the reactor is used to provide process gas, and under the control of the radio frequency power supply, to form an alternating positive and negative electric field at the interval between adjacent boat blades, so as to complete the simultaneous double-sided coating of the workpiece.

[0008] Fourthly, embodiments of the present invention provide a coating method for a workpiece, applied to semiconductor process equipment, comprising: The carrier device holding the workpiece to be plated is transported into the reaction chamber of the reactor. Process gas is delivered into the reaction chamber, and the pressure inside the reaction chamber is set to a first value; By controlling the radio frequency power supply, the process gas is simultaneously deposited on both sides of the workpiece. After the dual-sided synchronous deposition operation is completed, the support device is removed from the reaction chamber.

[0009] In this embodiment of the invention, the two sides of the workpiece to be coated are simultaneously exposed through the hollowed-out area on the blade of the carrier boat, and the films on both sides of the workpiece are deposited at one time by the control of the radio frequency power supply, thus completing the coating of both sides at once. In this way, the two processes of front film and back film of the workpiece to be coated in the related technology are reduced to a single double-sided simultaneous coating process. This greatly reduces the process time, improves the process efficiency, and can achieve double-sided simultaneous coating with a single coating equipment, reducing equipment cost and equipment footprint.

[0010] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0012] Figure 1 A front view of a support boat structure according to an embodiment of the present invention is shown; Figure 2 A top view of a boat blade structure according to an embodiment of the present invention is shown; Figure 3 A partial cross-sectional schematic diagram of a boat blade according to an embodiment of the present invention is shown; Figure 4 This invention illustrates a schematic diagram of the fit between a workpiece to be plated and a supporting structure in an embodiment of the invention. Figure 5 A schematic diagram of the cooperation between the workpiece to be plated and the supporting structure in another embodiment of the present invention is shown; Figure 6 A top view of another boat blade structure in an embodiment of the present invention is shown; Figure 7 A schematic diagram of a load-bearing structure according to an embodiment of the present invention is shown; Figure 8 A schematic diagram of the assembly of a boat support and a carrying boat according to an embodiment of the present invention is shown; Figure 9 A schematic diagram of a boat support structure according to an embodiment of the present invention is shown; Figure 10 A schematic diagram of the appearance of a carrier boat according to an embodiment of the present invention is shown; Figure 11 A schematic diagram of the appearance of a first boat blade according to an embodiment of the present invention is shown; Figure 12 A schematic flowchart of a coating method for a workpiece according to an embodiment of the present invention is shown. Detailed Implementation

[0013] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0014] Reference Figure 1The diagram shows a schematic representation of the structure of a carrier boat provided in an embodiment of the present invention. The carrier boat includes a first insulating connector 20, conductive spacers 30, and multiple stacked and spaced-apart boat blades 10. The boat blades 10 are divided into odd-numbered layers and even-numbered layers. The odd-numbered layers and even-numbered layers have opposite polarities. Adjacent boat blades 10 are insulated from each other and supported and fixed by the first insulating connector 20 to form a gap. The odd-numbered layers and even-numbered layers of boat blades 10 are respectively connected to a radio frequency power supply (RF power supply) through a portion of the conductive spacers 30. Figure 1 (Not shown in the diagram) Conductive connections are used to create alternating positive and negative electric fields within the interval; further refer to... Figure 2 At least a portion of the boat blades 10 are provided with a hollowed-out area 11, and a support structure 12 is provided at the edge of the hollowed-out area 11; the workpiece to be plated is placed on the support structure 12, and its two surfaces are exposed through the hollowed-out area 11; the boat blades 10 are connected to an RF power supply; the RF power supply is used to control the switching of the positive and negative electrodes of the odd-numbered layer boat blades 10 and the even-numbered layer boat blades 10, thereby completing the simultaneous double-sided coating of the workpiece. For example, the workpiece to be plated can be a silicon wafer.

[0015] The coating of a part to be plated refers to depositing a film on the surface of the part by means of thin film deposition. The coating plays a very important role. The coating can serve as a masking film for the volatilization and diffusion of non-primary dopants in high-temperature processes, as an interlayer insulating film, and also as a protective layer, anti-reflection film and passivation film on the surface of the part to be plated.

[0016] In this embodiment of the invention, the coating process can be implemented in a PECVD reactor. The reactor has an internal process chamber and is equipped with a radio frequency power supply. Process gases can be introduced into the process chamber of the reactor for temperature control, and an electric field can be formed by the radio frequency power supply. Multiple parts to be coated can be carried by a carrier boat, and the carrier boat is supported by a boat support before being placed inside the process chamber, so that the parts to be coated are in the PECVD process environment.

[0017] Specifically, the support boat structure of this embodiment of the invention is composed of multiple stacked and spaced boat blades 10. A first insulating connector 20 supports and fixes the multiple boat blades 10 to form a spaced area, and the multiple boat blades 10 are mutually insulated. The boat blades 10 can serve to support the workpiece to be plated. For example... Figure 2 As shown, the hollow area 11 on the boat blade 10 can be used to place the workpiece to be plated, and the support structure 12 set at the edge of the hollow area 11 provides support for the edge of the workpiece to be plated. After multiple workpieces to be plated carried by a boat are placed on the support structure 12, the two surfaces of the workpiece to be plated can be exposed through the hollow area 11 on each boat blade 10. This lays the foundation for the simultaneous coating of the two surfaces of the workpiece to be plated.

[0018] In some embodiments, the area of ​​the cutout region is larger than the area of ​​the workpiece to be plated. This minimizes the obstruction of the boat blades on the surface of the workpiece and improves the coating effect.

[0019] In addition, the multiple stacked boat blades 10 can be divided into odd-numbered boat blades 10 and even-numbered boat blades 10. The odd-numbered boat blades 10 and even-numbered boat blades 10 are respectively connected to the radio frequency power supply through a portion of the conductive spacer 30. The radio frequency power supply is used to control the switching of the positive and negative poles of the odd-numbered boat blades and even-numbered boat blades, so as to form an alternating positive and negative electric field in the interval, thereby providing the electric field environment required for coating on both sides of the workpiece.

[0020] During the coating process, the carrier boat and boat support are connected to the radio frequency (RF) power supply. The process gas is ionized into positive and negative plasmas under the high-frequency electric field of the RF power supply, causing the positive and negative electrodes of the odd-numbered and even-numbered boat layers to alternate at high frequency. Positive ions move towards the positive electrode of the electric field, and negative ions move towards the negative electrode. By simultaneously adjusting parameters such as the RF power supply power, process time, thermal field temperature, gas flow rate, and furnace pressure, the films on both sides of the workpiece can be deposited in one go, completing a one-time coating on both sides. Furthermore, the carrier boat of this application can also be matched with the surface morphology of the workpiece, for example, forming different surface structures (including different structure types and / or different structure sizes) on the front and back sides of the workpiece. By adjusting parameters such as the RF power supply power, process time, thermal field temperature, gas flow rate, and furnace pressure, the films on both sides of the workpiece can be deposited simultaneously, and different coatings can be formed on the two sides.

[0021] In related technologies, PECVD coating is completed in two processes: a front coating and a back coating, each using independent coating equipment. A guide process exists between the front and back coating processes. Specifically, a carrier boat removes the front-coated part from the process chamber and places it temporarily in an external basket. The carrier boat then flips the part over and moves it into the back coating equipment. Firstly, the two-process PECVD coating leads to a long coating time, low efficiency, and high equipment cost and size. Furthermore, the guide process further increases the processing time and the fragility of the part during guide operation.

[0022] This invention exposes both sides of the workpiece to be coated simultaneously through the hollowed-out area on the boat blade of the carrier boat. By controlling the radio frequency power supply, the films on both sides of the workpiece are deposited in one go, completing the coating on both sides in one process. This reduces the two-step process of coating the front and back films of the workpiece in related technologies to a single double-sided coating process. This significantly reduces the process time, improves the process efficiency, and allows for double-sided coating to be achieved with a single coating equipment, reducing equipment costs and floor space.

[0023] In addition, by reducing the two coating processes to one, the guide plate step between the two coating processes is eliminated, thereby further improving coating efficiency, reducing coating time, and reducing the fragility of the parts to be coated.

[0024] The embodiments described in this application are based on a horizontal support boat, but are not limited thereto. The support boat of this application is also applicable to the case of a vertical support boat.

[0025] Optional, refer to Figure 1 The first insulating connector 20 includes an insulating connecting ring 21 and a first insulating connecting rod 22; the conductive spacer 30 includes a first polarity conductive spacer 31 and a second polarity conductive spacer 32; the first insulating connecting rod 22 passes through the alternately arranged boat blades 10 and the insulating connecting ring 21; the odd-numbered layers of boat blades 10 are electrically connected to the first polarity conductive spacer 31 and are insulated from the second polarity conductive spacer 32 through the insulating connecting ring 21; the even-numbered layers of boat blades 10 are electrically connected to the second polarity conductive spacer 32 and are insulated from the first polarity conductive spacer 31 through the insulating connecting ring 21.

[0026] In this embodiment of the invention, the carrier boat and the boat holder make positive and negative contact. Under the action of the radio frequency power supply, the entire carrier boat and the workpiece to be coated form a conductive circuit, generating the electric field required for coating. Figure 1 As shown, among the boat blades excluding the top and bottom boat blades 10 (which do not carry the workpiece to be plated), from top to bottom they are boat blade 1, boat blade 2, boat blade 3, boat blade 4... The left side of the carrying boat is provided with a first polar conductive spacer 31, and the right side of the carrying boat is provided with a second polar conductive spacer 32. The odd-numbered layers of boat blades 10 (boat blades 1 and 3) are electrically connected to the first polar conductive spacer 31 and are insulated from the second polar conductive spacer 32 through an insulating connecting ring 21; the even-numbered layers of boat blades 10 (boat blades 2 and 4) are electrically connected to the second polar conductive spacer 32 and are insulated from the first polar conductive spacer 31 through an insulating connecting ring 21. This ensures that at the same time, the positive and negative poles of the odd-numbered layers of boat blades 10 are opposite to those of the even-numbered layers of boat blades 10, and the electric field directions formed by the odd-numbered layers of boat blades 10 and the even-numbered layers of boat blades 10 are opposite.

[0027] Among them, the insulating connecting ring 21 and the first insulating connecting rod 22 can be made of ceramic material.

[0028] For example, at time t1, the first polarity conductive spacer 31 is connected to the positive terminal of the radio frequency power supply, and the second polarity conductive spacer 32 is connected to the negative terminal of the radio frequency power supply. Then, the odd-numbered layer boat leaf 10 is connected to the positive terminal, and the even-numbered layer boat leaf 10 is connected to the negative terminal.

[0029] At time t2, the positive and negative terminals are switched by the radio frequency power supply, so that the first polarity conductive block 31 is connected to the negative terminal of the radio frequency power supply and the second polarity conductive block 32 is connected to the positive terminal of the radio frequency power supply. Then, the odd-numbered layer boat blades 10 are connected to the negative terminal and the even-numbered layer boat blades 10 are connected to the positive terminal.

[0030] ... Throughout the coating process, the radio frequency (RF) power supply outputs pulse signals. The positive and negative poles of the odd-numbered and even-numbered boat layers switch frequently under the control of the RF power supply's pulse signals. This means that the positive and negative poles of each boat layer are not fixed over time. The positive and negative poles of a single boat layer switch back and forth continuously according to the frequency and waveform changes of the RF power supply. The process gas is ionized into positive and negative plasmas under the high-frequency electric field of the RF power supply. Under the high-frequency alternation of the positive and negative poles of the odd-numbered and even-numbered boat layers, positive ions move towards the positive pole of the electric field, and negative ions move towards the negative pole of the electric field. By simultaneously adjusting parameters such as the RF power supply power, process time, thermal field temperature, gas flow rate, and furnace pressure, the front and back films of the workpiece are deposited in one go, completing the front and back film coating in one pass.

[0031] Optional, refer to Figure 1 In the multiple stacked boat blades 10: the first boat blade 111 has no hollow area, and the second boat blade 112 has a hollow area 11; the first boat blade 111 does not carry the part to be plated; the first boat blade 111 is the boat blade 10 in the first and last layers; the second boat blade 112 is the boat blade 10 in the multiple stacked boat blades other than the first boat blade; the distance between the first boat blade 111 and the adjacent second boat blade 112 is greater than the distance between the adjacent second boat blades 112.

[0032] In this embodiment of the invention, the boat blades 10 located in the first layer and the last layer are the first boat blades 111. Considering that the front surface of the first boat blade 111 in the first layer and the lower surface of the first boat blade 111 in the last layer are exposed surfaces (i.e. there are no other boat blades on the opposite side to form a gap), an effective electric field between the boat blades cannot be formed. If the workpiece to be plated is placed on it for coating, only a single-sided film can be plated. In order to maintain the consistency of the process rhythm, the workpiece to be plated is not placed on the first boat blade 111 for coating, and the first boat blade 111 may not have a hollow area. This can ensure the structural strength of the supporting boat on the one hand, and provide a suitable electric field strength on the other hand.

[0033] Furthermore, the distance between the first boat blade 111 and the adjacent second boat blade 112 is greater than the distance between the adjacent second boat blades 112. Since the first boat blade 111 does not have a hollowed-out area, the electric field strength between the first boat blade and the adjacent second boat blade is relatively high. In order to ensure the uniformity of the coating thickness of the workpiece to be coated at this location and between the workpiece to be coated in the middle adjacent boat blade, increasing the distance between the first boat blade 111 and the adjacent second boat blade 112 can reduce the difference in electric field strength between this location and the middle adjacent boat blade, thereby improving the inter-piece uniformity of the coating.

[0034] In some embodiments, the distance between the first boat blade 111 and the adjacent second boat blade 112 is greater than or equal to 11 mm. If the distance between the first boat blade 111 and the adjacent second boat blade 112 is too close, the electric field strength formed by the distance will be too large, which will affect the coating effect.

[0035] In some embodiments, the spacing between adjacent second boat blades 112 is 4mm-15mm. In practical applications, the spacing between adjacent second boat blades 112 can be selected according to actual needs. For example, the spacing between adjacent second boat blades 112 can be any value among 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 11mm, 12mm, 13mm, 14mm, and 15mm.

[0036] In some embodiments, the thickness of the boat blade 10 is 1mm-5mm. In practical applications, the thickness of the boat blade 10 can be selected according to actual needs. For example, the thickness of the boat blade 10 can be any value among 1mm, 2mm, 3mm, 4mm and 5mm.

[0037] Optional, refer to Figure 3 The distance between the support surface S of the support structure 12 and the surface of the boat blade 10 is less than or equal to 3 mm. The surface of the boat blade 10 can be the target surface A of the boat blade that is away from the direction of gravity x.

[0038] In some embodiments, the distance between the support surface S of the support structure 12 of the boat blade 10 and the surface A of the boat blade 10 is less than or equal to 3 mm, and the surface A is the side of the boat blade 10 facing away from the gravity direction x.

[0039] In practical applications, the distance between the support surface S of the support structure 12 of the boat blade 10 and the surface A of the boat blade 10 can be selected according to actual needs. For example, the distance between the support surface S of the support structure 12 of the boat blade 10 and the surface A of the boat blade 10 can be any value among 0mm, 1mm, 2mm and 3mm.

[0040] In the actual process, the support structure 12 is generally set on the side of the hollow area 11. When the part to be plated is placed on the support structure 12, the edge area of ​​the part to be plated comes into contact with the support structure 12, which results in a larger electric field intensity at the edge area of ​​the part to be plated, which in turn results in a thicker coating at the edge area of ​​the part to be plated. This makes the coating on the surface of the part to be plated exhibit an uneven distribution pattern with a thin center and a thick periphery. This unevenness of the coating affects the coating quality.

[0041] In addition, the contact area between the part to be plated and the boat blade also affects the coating thickness at the edge area of ​​the part to be plated. The larger the contact area between the part to be plated and the boat blade, the greater the battery strength at the edge area of ​​the part to be plated, and the greater the coating thickness at the edge area of ​​the part to be plated.

[0042] To solve the above problems, in this embodiment of the invention, the distance between the support surface S of the support structure 12 and the surface A of the boat blade 10 can be less than or equal to 3 mm.

[0043] On the one hand, assuming the thickness of the part to be plated is 1.5mm, when the above-mentioned interval distance is less than or equal to 1.5mm, the front surface of the part to be plated is flush with the surface A of the boat blade 10 (when the interval distance is 1.5mm), or the front surface of the part to be plated is higher than the surface A of the boat blade 10 (when the interval distance is greater than or equal to 0 and less than 1.5mm). At this time, the part to be plated only contacts the support surface S of the support structure 12, or the part to be plated contacts the support surface S of the support structure 12 and a small part of the edge of the hollow area. At this time, the contact area is small, the battery strength in the edge area of ​​the part to be plated is small, so the coating in the edge area of ​​the part to be plated is thinned, which can improve the uniformity of the film layer in the plane and improve the coating quality.

[0044] On the other hand, assuming the thickness of the part to be plated is 1.5mm, when the above-mentioned interval distance is set in the range of 1.5-3mm, although the part to be plated is in contact with the support surface S of the support structure 12 and a large part of the edge of the hollow area when the part to be plated is placed on the support structure 12, the front side of the part to be plated is lower than the surface A of the boat blade 10. The higher surface A of the boat blade 10 obstructs the process airflow, which will reduce the flow rate of the process gas in the edge area of ​​the front side of the part to be plated, and reduce the film thickness at the edge position of the front side of the part to be plated. By thinning the originally thicker film at the edge position of the part to be plated, the uniformity of the film distribution can be improved, and the coating quality can be improved.

[0045] In this embodiment of the invention, the uniformity of the coating on the front side of the solar cell is more important because it affects not only the electrical performance of the cell but also its appearance. Therefore, it is prioritized to ensure that the distance between the support surface and the surface A of the boat blade 10 is less than or equal to 3 mm to ensure that the distance between adjacent parts to be coated is large enough to avoid the flow field and electric field being affected by too small a distance, and to ensure the uniformity of the coating on the front side as much as possible.

[0046] In addition, the back of the component to be coated is polished, while the front is textured. Since a smooth surface is easier to deposit a thin film on, the coating on the back of the component is thicker than the coating on the front. Of course, for double-glass modules, the uniformity of the coating on the back is equally important.

[0047] When the aforementioned interval is set to less than or equal to 3mm, the back side of the workpiece to be plated is lower than the other surface of the boat blade 10 (the opposite side of surface A). The other protruding surface of the boat blade 10 will obstruct the process airflow, which will reduce the flow rate of the process gas in the edge area of ​​the back side of the workpiece to be plated, and reduce the film thickness at the edge position of the back side of the workpiece to be plated. By thinning the originally thicker film at the edge position of the workpiece to be plated, the uniformity of the film distribution can be improved, and the coating quality can be improved.

[0048] In some embodiments, the contact area between the support structure and the workpiece to be plated is 1 mm. 2 -9mm 2 In practical applications, the contact area can be selected according to actual needs; for example, a contact area of ​​1 mm. 2 2mm 2 3mm 2 4mm 2 5mm 2 6mm 2 7mm 2 8mm 2 9mm 2 The contact area can be any value. Different contact areas can generate electric fields of varying intensities near the workpiece to be plated, supported by the boat blade. A larger contact area results in a stronger electric field, but also leaves a larger imprint on the workpiece. This invention allows for flexible process control by adjusting the electric field strength and reducing imprints through different contact areas, based on actual process requirements.

[0049] In some embodiments, the contact surface between the support structure and the workpiece to be plated is square.

[0050] In some embodiments, the support structure and the boat blade can be an integrated structure, which can reduce the processing cost of the graphite boat. However, from a long-term perspective, the support structure and the boat blade can also be separate structures. That is, the support structure can be designed to be detachable, which facilitates individual replacement and cleaning. Because the support structure is a consumable item and is replaced more frequently than the boat blade, a separate structure helps reduce maintenance costs, allowing for replacement of only the support structure without the need for frequent boat blade replacements.

[0051] Reference Figure 2 When the support structure 12 is a detachable structure, the edge of the hollow area 11 of the boat blade 10 is provided with an installation structure 70 (such as a slot), and the support structure 12 can be detached and installed through the installation structure 70.

[0052] Optionally, multiple stacked and spaced boat blades 10 are placed horizontally. That is, the plane in which the boat blades 10 are located is parallel to the horizontal plane. In this case, the support structure of the boat blades 10 can provide support only to the back of the workpiece to be plated, thereby avoiding leaving support marks on the front of the workpiece and improving the quality of the workpiece.

[0053] Optionally, multiple stacked and spaced boat blades 10 are placed vertically. That is, the plane in which the boat blades 10 are located is perpendicular to the horizontal plane.

[0054] Optional, refer to Figure 4 When multiple stacked and spaced boat blades 10 are placed horizontally, the support structure 12 includes: multiple locking points, which are spaced apart at the edge of the hollow area 11. Each locking point includes: a first limiting block 121 and a bearing block 122 having a bearing surface for bearing the workpiece to be plated; one end of the first limiting block 121 and one end of the bearing block 122 are fixedly connected; wherein, the bearing surface of the bearing block 122 for bearing the workpiece to be plated can be a horizontal plane, and the first limiting block 121 protrudes from the surface A of the boat blade 10, where surface A is the side of the boat 10 away from the direction of gravity.

[0055] In one embodiment of the present invention, when multiple stacked and spaced boat blades 10 are horizontally placed, the support structure 12 includes: multiple locking points, which are spaced apart at the edge of the hollow area 11. Each locking point consists of a first limiting block 121 and a bearing block 122. The bearing block 122 provides a supporting surface to support the boat blades 10. When the boat blades 10 are horizontally placed, this support method can avoid leaving support marks on the front of the workpiece to be plated, thus improving the quality of the workpiece. The area of ​​the supporting surface of the bearing block 122 is the contact area between the support structure and the workpiece to be plated.

[0056] The first limiting block 121 protrudes from surface A of the boat blade 10, serving to limit and block the edge of the workpiece to be plated, preventing slippage. Furthermore, the first limiting block 121 and the support block 122 can be integrated, or even formed as a single unit with the boat blade 10, reducing the manufacturing cost of the support boat. Alternatively, the support structure can be a separate structure from the boat blade. Since the support structure is a consumable item and is replaced more frequently than the boat blade, a separate structure helps reduce maintenance costs, allowing for replacement of only the support structure without frequent boat blade replacements.

[0057] Optional, refer to Figure 5 , Figure 6 , Figure 7The support structure 12 includes: a plurality of second limiting blocks 123, and a sloped structure 124 disposed on the edge of the hollow area 11; the sloped structure 124 covers the entire edge of the hollow area 11, or a plurality of sloped structures 124 are disposed at intervals on the edge of the hollow area 11; a plurality of second limiting blocks 123 are disposed at intervals on the edge of the hollow area 11; the sloped structure 124 on the edge of the hollow area 11 is used to generate line-surface contact with the workpiece to be plated, and the second limiting blocks 123 protrude from the surface A of the boat blade 10, the surface A being the side of the boat blade 10 facing away from the direction of gravity.

[0058] In another implementation of this invention, the support structure 12 includes a plurality of second limiting blocks 123 and an inclined structure 124 disposed on the edge of the hollow area 11. The second limiting blocks 123 protrude from the surface A of the boat blade 10, serving to limit and block the edge of the workpiece to be plated, preventing slippage. Furthermore, the second limiting blocks 123 and the inclined structure 124 can be integral, and further, the second limiting blocks 123 and the inclined structure 124 can form an integral structure with the boat blade 10, reducing the processing cost of the support boat. Alternatively, the second limiting blocks 123 and the inclined structure 124 can also form a separate structure, and the second limiting blocks 123 and the inclined structure 124 can form a separate structure with the boat blade 10.

[0059] It should be noted that the structural form of the first limiting block 121 and the second limiting block 123 is not limited to the limiting column, and can also be designed as a sloping boss or other structural form for limiting.

[0060] Specifically, refer to Figure 5 The inclined structure 124 provides an inclined support surface B, which can make line-to-surface contact with the edge of the workpiece 60 to be plated. For the surface of the workpiece to be plated, this line-to-surface contact can eliminate contact marks on the surface of the workpiece to be plated, improve the cleanliness of the surface of the workpiece to be plated, and thus improve the quality of the workpiece to be plated. At the same time, the line contact can also improve the contact area between the edge of the workpiece to be plated and the support surface, and improve the uniformity of the film thickness at the edge and in the middle of the workpiece to be plated.

[0061] It should be noted that, as Figure 6 , Figure 7 The beveled structure 124 can cover the entire edge of the hollow area 11. Alternatively, multiple independent and shorter beveled structures 124 can be provided, with the multiple beveled structures 124 spaced apart on the edge of the hollow area 11.

[0062] Reference Figure 8 and Figure 9This invention provides a support device, comprising: a boat support 2 and multiple support boats 1; the boat support 2 includes a first polarity connection portion 211, a second polarity connection portion 212, and a second insulating connector 213; the first polarity connection portion 211 and the second polarity connection portion 212 are fixedly connected by the second insulating connector 213, and the first polarity connection portion 211 and the second polarity connection portion 212 are insulated from each other; the first polarity connection portion 211 and the second polarity connection portion 212 are respectively connected to a radio frequency power supply (not shown in the figure); the multiple support boats 1 are arranged at intervals along the length direction of the boat support 2; the radio frequency power supply is used to control the polarity switching of the first polarity connection portion 211 and the second polarity connection portion 212; the first polarity connection portion 211 and the second polarity connection portion 212 are respectively connected to the conductive spacers of the boat blades 10 of the support boats 1.

[0063] Optionally, the second insulating connector 213 includes a second insulating connecting rod 2131 and an insulating isolation block 2132; the first polarity connecting part 211 and the second polarity connecting part 212 are fixedly connected by the second insulating connecting rod 2131, and the first polarity connecting part 211 and the second polarity connecting part 212 are also insulated from each other by the insulating isolation block 2132.

[0064] In this embodiment of the invention, the carrier device is used to carry multiple parts to be coated and is connected to an RF power supply. After carrying the parts to be coated, the carrier device can be placed in the reaction chamber of the reactor for the coating process. Figure 8 As shown, boat support 2 carries multiple support boats 1 ( Figure 8 One boat support 2 carries three carrier boats 1. In addition to its load-bearing function, the boat support also serves as the connection between the carrier boat and the radio frequency power supply. The boat support 2 is electrically connected to the electrode seat or electrode rod, and the electrode seat or electrode rod is electrically connected to the radio frequency power supply. The carrier boat 1 and the boat support 2 make positive and negative contact and then form a conductive circuit with the workpiece to be coated, thereby forming the electric field environment required for coating.

[0065] Specifically, the boat support 2 includes a first polarity connecting portion 211, a second polarity connecting portion 212, and a second insulating connector 213; the second insulating connector 213 is disposed between the first polarity connecting portion 211 and the second polarity connecting portion 212, forming an insulating barrier between the first polarity connecting portion 211 and the second polarity connecting portion 212, and the second insulating connector 213 specifically includes a second insulating connecting rod 2131 and an insulating barrier block 2132; as shown Figure 9As shown, the second insulating connecting rod 2131 can be a ceramic rod, used to connect and fix the first polarity connecting part 211 and the second polarity connecting part 212, and maintain insulation between them. The insulating isolation block 2132 can be a ceramic block, serving as an isolation and insulation unit. The first polarity connecting part 211 and the second polarity connecting part 212 are respectively connected to the conductive spacers of the boat blade 10 supporting the boat 1. For example, the first polarity connecting part 211 is connected to the first polarity conductive spacer 31 of the boat blade, and the first polarity conductive spacer 31 is connected to the second polarity conductive spacer 32 of the boat blade.

[0066] Under the action of the radio frequency power supply, the polarity of the first polarity connection part 211 and the second polarity connection part 212 can be continuously switched, thereby changing the polarity of the first polarity conductive spacer 31 and the second polarity conductive spacer 32 of the boat blade. This allows the pulse signal output by the radio frequency power supply to control the positive and negative poles of the odd-numbered and even-numbered boat blades to switch at high frequency under the control of the pulse signal of the radio frequency power supply. The process gas is ionized into positive and negative plasmas under the high-frequency electric field of the radio frequency power supply. Under the high-frequency alternation of the positive and negative poles of the odd-numbered and even-numbered boat blades, positive ions move towards the positive pole of the electric field, and negative ions move towards the negative pole of the electric field, so that the front and back films of the workpiece to be coated are deposited at one time, completing the front and back film coating at one time.

[0067] For example, at time t1, the first polarity connection 211 is the positive terminal, the second polarity connection 212 is the negative terminal, the first polarity conductive spacer 31 is connected to the positive terminal of the RF power supply through the first polarity connection 211, and the second polarity conductive spacer 32 is connected to the negative terminal of the RF power supply through the second polarity connection 212. Thus, the odd-numbered layer boat blades 10 are connected to the positive terminal, and the even-numbered layer boat blades 10 are connected to the negative terminal.

[0068] At time t2, the positive and negative terminals are switched by the radio frequency power supply, so that the first polarity connection part 211 is the negative terminal and the second polarity connection part 212 is the positive terminal. The first polarity conductive spacer 31 is connected to the negative terminal of the radio frequency power supply through the first polarity connection part 211, and the second polarity conductive spacer 32 is connected to the positive terminal of the radio frequency power supply through the second polarity connection part 212. Thus, the odd-numbered layer boat blades 10 are connected to the negative terminal, and the even-numbered layer boat blades 10 are connected to the positive terminal.

[0069] ... It should be noted that for a tubular reactor, two boat supports 2, or more boat supports 2, can be placed inside the reaction chamber, with the multiple boat supports 2 arranged back and forth along the axial direction of the reactor.

[0070] Optionally, the boat blades 10 and the boat support 2 are arranged parallel to each other. Specifically, multiple stacked and spaced-apart boat blades 10 are also placed horizontally relative to each other. That is, the plane on which the boat blades 10 are located is parallel to the horizontal plane. In this case, the support structure of the boat blades 10 can provide support only by contacting the back side of the workpiece to be plated, thereby avoiding leaving support marks on the front side of the workpiece and improving the quality of the workpiece.

[0071] Reference Figure 10 It shows a schematic diagram of the appearance of a carrier boat, and references Figure 11 The first leaf 111 is located on the first and last layers of the ship.

[0072] This invention also provides a semiconductor process apparatus, including: a carrier device, a reactor, and a radio frequency power supply; the reactor has a reaction chamber, and the carrier device is disposed in the reaction chamber; the boat support of the carrier device is electrically connected to the radio frequency power supply; the reactor is used to provide process gas, and under the control of the radio frequency power supply, to form an alternating positive and negative electric field at the interval between adjacent boat blades, so as to complete the simultaneous double-sided coating of the workpiece.

[0073] In this embodiment of the invention, the reactor can be a tubular PECVD reactor. The reactor tube is designed with the following structures in sequence along the axial direction: furnace opening, gas inlet device, carrier boat, flow equalization plate, furnace tail, etc. The following structures are designed in sequence along the direction perpendicular to the axial direction: lower auxiliary heating structure, ceramic tube, support device, upper auxiliary heating structure, etc. The gas inlet device adopts a "Y" shape and is designed at the furnace opening position to introduce process gas. The ceramic tube and the upper and lower auxiliary heating structures pass through the furnace tube, and the support device is supported on the ceramic tube.

[0074] In the coating process, the boat blades spaced apart in the carrier device are connected to the first polarity connection part and the second polarity connection part of the boat support through conductive spacers. The first polarity connection part and the second polarity connection part are then connected to the radio frequency power supply. Under the control of the radio frequency power supply, positive and negative electric fields are formed between adjacent boat blades. During the coating process, the process gas is ionized into positive and negative plasmas under the high frequency electric field of the radio frequency power supply. The positive and negative poles of the odd-numbered layers of boat blades alternate at high frequency with the even-numbered layers of boat blades. Positive ions move towards the positive pole of the electric field, and negative ions move towards the negative pole of the electric field. By simultaneously adjusting parameters such as the power of the radio frequency power supply, process time, thermal field temperature, gas flow rate, and furnace pressure, the front and back films of the workpiece to be coated are deposited in one go, completing the front and back coating in one pass.

[0075] Reference Figure 12 This invention also provides a coating method for a workpiece, applied to semiconductor process equipment, the method comprising: Step 101: Transport the carrier device carrying the workpiece to be plated to the reaction chamber of the reactor.

[0076] Step 102: Transport the carrier device carrying the workpiece to be plated to the reaction chamber of the reactor, transport the process gas into the reaction chamber, and set the pressure in the reaction chamber to a first value.

[0077] Step 103: By controlling the radio frequency power supply, perform the double-sided synchronous deposition operation of the process gas on the workpiece to be plated.

[0078] Step 104: After completing the dual-sided synchronous deposition operation, remove the support device from the reaction chamber.

[0079] In this embodiment of the invention, steps 101-104 can be implemented using semiconductor process equipment. Specifically, a PECVD reactor provides the reaction environment. The reactor has an internal process chamber and is equipped with a radio frequency (RF) power supply. Process gases can be introduced into the process chamber of the reactor for temperature control, and an electric field can be formed by the RF power supply. Multiple parts to be coated can be carried by a carrier boat, and the carrier boat is placed inside the process chamber after being supported by a boat support, so that the parts to be coated are in the PECVD process environment. The boat support is electrically connected to the RF power supply, and the carrier boat is electrically connected to the boat support. Under the control of the RF power supply, the positive and negative electric fields required for coating are formed between adjacent boat blades.

[0080] Specifically, in the process, after the carrier device holding the workpiece to be plated is transported into the reaction chamber of the reactor, the process gas is introduced into the reaction chamber through the reactor's gas inlet device, and the pressure inside the reaction chamber is set to a first value. Then, by controlling the radio frequency power supply, a simultaneous double-sided deposition operation of the process gas is performed on the workpiece. After the simultaneous double-sided deposition operation is completed, the carrier device is removed from the reaction chamber.

[0081] During the coating process, several factors can affect the coating thickness, such as the power of the RF power supply, the process time, the thermal field temperature, and the gas flow rate. By adjusting the power of the RF power supply, the electric field strength between the positive and negative electrodes of the boat blade will change. By matching appropriate gas flow rate, process time, and thermal field temperature, simultaneous coating of the front and back can be achieved.

[0082] In addition, as mentioned in the above embodiments, parameters such as the distance between the edge of the hollow area on the boat blade and the edge of the workpiece to be plated, the contact area between the support structure at the hollow area on the boat blade and the workpiece to be plated, and the contact length between the workpiece to be plated and a single support structure will affect the magnitude of the generated electric field strength, thereby affecting the coating thickness. According to the actual process requirements, the above parameters can be adjusted to achieve the purpose of adjusting the electric field strength, thus realizing the flexibility of the process.

[0083] In some embodiments, the first value is 180Pa-280Pa. In practical applications, the first value can be selected according to actual needs. For example, the first value can be any value among 180Pa, 190Pa, 200Pa, 210Pa, 220Pa, 230Pa, 240Pa, 250Pa, 260Pa, 270Pa, and 280Pa.

[0084] Optionally, step 103 may specifically include: Sub-step 1031: In each process cycle, control the duty cycle of the RF power supply to a second value so that the RF power supply outputs RF pulses to control the switching of positive and negative poles of the odd-numbered and even-numbered layers of the carrier boat, thereby completing the double-sided synchronous deposition operation of the workpiece to be plated.

[0085] The second value is 10%-60%, and the total operating time of the radio frequency power supply is 200s-800s.

[0086] In this embodiment of the invention, the most critical influencing factor in the coating process is the duty cycle of the radio frequency (RF) power supply. The duty cycle of the RF power supply refers to the proportion of the RF power supply's on-time within a single process cycle to the total duration of that process cycle. Since the RF power supply outputs RF pulse signals, the duty cycle is the proportion of the RF pulse on-time within a single process cycle to the entire process cycle.

[0087] The duty cycle of the radio frequency power supply directly affects the deposition rate and refractive index. By adjusting the duty cycle of the radio frequency power supply, the film thickness and refractive index can be adjusted.

[0088] During the process, the process gas is ionized into positive and negative plasmas under the high-frequency electric field of the radio frequency power supply. The positive and negative poles of the odd-numbered and even-numbered boat layers alternate at high frequency. Positive ions move towards the positive pole of the electric field, and negative ions move towards the negative pole of the electric field. The duty cycle of the radio frequency power supply, process time, thermal field temperature, gas flow rate, furnace pressure and other parameters are adjusted synchronously to allow the front and back films of the workpiece to be coated to be deposited in one go, thus completing the front and back coating in one go.

[0089] In some embodiments, the second value of the duty cycle is 20%-90%, which leads to the conclusion that the total operating time of the RF power supply during the entire coating process is 200s-800s.

[0090] In some embodiments, the second value of the duty cycle is 50%-80%.

[0091] The larger the duty cycle, the slower the deposition rate and the better the compactness. Conversely, the smaller the duty cycle, the faster the deposition rate and the worse the compactness. Considering both film compactness and process time, a smaller duty cycle range should be selected.

[0092] It should be noted that sub-step 1031 can be repeated 2 to 8 times to achieve multiple depositions and improve the uniformity of the film layer, as long as the total RF power supply operating time and duty cycle meet the above requirements.

[0093] Optionally, prior to step 102, the following steps are also included: Step 105: Evacuate the reaction chamber.

[0094] Step 106: Inert gas is introduced into the reaction chamber, and the temperature of the reaction chamber is maintained at the third value.

[0095] Step 107: After evacuating the reaction chamber again, check whether the reaction chamber leaks by measuring the pressure inside the reaction chamber.

[0096] Step 108: If there is no air leakage in the reaction chamber, proceed to step 102.

[0097] In this embodiment of the invention, before performing the coating process, the reaction chamber can be evacuated, an inert gas (such as nitrogen) can be introduced into the reaction chamber, and the reaction chamber can be evacuated again. The pressure inside the reaction chamber is then used to detect whether the reaction chamber is leaking. Only if the reaction chamber is not leaking can the coating process be started in step 102. The pre-emptive leak detection operation can reduce the interference of leaks on the process quality and improve the overall coating quality.

[0098] In addition, after completing the double-sided synchronous deposition operation, the furnace tubes of the reactor can be purged to remove the residual process gas. After purging, the vacuum pump is turned off and nitrogen is introduced to make the pressure inside the furnace the same as the atmospheric pressure. Then the furnace door is opened, the support device is moved out of the reaction chamber, and the coated parts are unloaded.

[0099] Optional, refer to Figure 6 and Figure 7 If multiple independent and relatively short inclined structures 124 are set, and these inclined structures 124 are spaced apart on the edge of the hollow area 11, the total contact length between the workpiece to be plated and the inclined structure is 1mm-10mm. In practical applications, the total contact length can be selected according to actual needs. For example, the total contact length can be any value among 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, and 10mm. Different total contact lengths can generate electric fields of different intensities near the workpiece to be plated carried by the boat blade. The larger the total contact length, the stronger the generated electric field. This embodiment of the invention can adjust the electric field strength by setting different contact lengths according to actual process requirements, thus achieving process flexibility.

[0100] In addition, when the beveled structure 124 can cover the entire edge of the hollow area 11, all four sides of the workpiece to be plated are in line contact.

[0101] Optional, refer to Figure 2 The distance between the edge of the hollow area 11 and the edge of the part to be plated is less than or equal to 10mm. In practical applications, the distance between the edge of the hollow area 11 and the edge of the part to be plated can be selected according to actual needs. For example, the distance between the edge of the hollow area 11 and the edge of the part to be plated can be any value among 0mm, 1mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, and 10mm.

[0102] In this embodiment of the invention, the distance between the edge of the hollow area 11 and the edge of the workpiece to be plated is less than or equal to 3 mm. Different distances result in different electric field strengths between adjacent boat blades 10. This distance, together with the spacing between the support surface of the support structure and the surface A of the boat blade 10 mentioned below, works to adjust the electric field strength between adjacent workpieces to be plated. Since the spacing between the support surface of the support structure and the surface A of the boat blade 10 must take into account the issue of the imprint on the workpiece to be plated, the adjustment of this spacing is limited. At this time, the distance between the edge of the hollow area 11 and the edge of the workpiece to be plated is used to make supplementary adjustments to achieve the electric field strength required by the actual process. By setting different distances, the purpose of adjusting the electric field strength is achieved, thus realizing the flexibility of the process.

[0103] It should be noted that if the edge of the hollow area 11 is the edge of the beveled structure, then the edge refers to the maximum hollow edge of the hollow area 11.

[0104] In summary, the embodiments of the present invention expose both sides of the workpiece to be coated simultaneously by hollowing out the boat blades of the carrier boat, and by controlling the radio frequency power supply, the films on both sides of the workpiece to be coated are deposited in one go, completing the coating of both sides in one go. In this way, the two processes of front film and back film of the workpiece to be coated in the related technology are reduced to a single double-sided simultaneous coating process. This greatly reduces the process time, improves the process efficiency, and can achieve double-sided simultaneous coating with a single coating equipment, reducing equipment cost and equipment footprint.

[0105] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0106] The various embodiments in this specification are described in a related manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. For embodiments of devices, electronic devices, computer-readable storage media, and computer program products containing instructions, the descriptions are relatively simple because they are basically similar to the method embodiments; relevant parts can be referred to the descriptions of the method embodiments.

[0107] The above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A carrier boat, characterized in that, The carrier boat includes: The first insulating connector, the conductive spacer, and a plurality of stacked and spaced boat blades; The scaphoid blade is divided into odd-numbered layers and even-numbered layers; the odd-numbered layers of scaphoid blades have opposite polarities to the even-numbered layers. Adjacent boat blades are insulated from each other and supported and fixed to form a gap through the first insulating connector; the odd-numbered layers of boat blades and the even-numbered layers of boat blades are respectively connected to the radio frequency power supply through a portion of the conductive spacers; At least a portion of the boat blades are provided with a hollowed-out area, and the edge of the hollowed-out area is provided with a support structure for placing the workpiece to be plated.

2. The carrier boat according to claim 1, characterized in that, The first insulating connector includes: an insulating connecting ring and a first insulating connecting rod; the conductive spacer includes a first polar conductive spacer and a second polar conductive spacer. The first insulating connecting rod passes through the alternately arranged boat blades and the insulating connecting rings; The odd-numbered layer of boat blades is electrically connected to the first polar conductive spacer and is insulated from the second polar conductive spacer through an insulating connecting ring; The even-numbered layers of boat blades are electrically connected to the second polar conductive spacer and are insulated from the first polar conductive spacer through an insulating connecting ring.

3. The carrier boat according to claim 1, characterized in that, In a plurality of stacked boat blades: the first boat blade does not have the hollowed-out area, and the second boat blade has the hollowed-out area; the first boat blade is the boat blade in the first layer and the last layer; the second boat blade is the boat blade in the plurality of stacked boat blades other than the first boat blade; The distance between the first boat blade and the adjacent second boat blade is greater than the distance between the adjacent second boat blades.

4. The carrier boat according to claim 1, characterized in that, The distance between the support surface of the support structure and the surface of the boat blade is less than or equal to 3 mm.

5. The carrier boat according to claim 4, characterized in that, The support structure includes: multiple locking points, which are spaced apart at the edge of the hollow area. Each locking point includes: a first limiting block and a bearing block having a bearing surface for bearing the workpiece to be plated. One end of the first limiting block is fixedly connected to one end of the bearing block; the first limiting block protrudes from the surface of the boat blade.

6. The carrier boat according to claim 1, characterized in that, The support structure includes: a plurality of second limiting blocks, and a sloped structure disposed on the edge of the hollow area; the sloped structure covers the entire edge of the hollow area, or a plurality of the sloped structures are disposed at intervals on the edge of the hollow area; Multiple second limiting blocks are spaced apart at the edge of the hollow area; the beveled structure of the edge of the hollow area is used to make line-to-surface contact with the workpiece to be plated, and the second limiting blocks protrude from the surface of the boat blade.

7. A supporting device, characterized in that, include: Boat support and multiple carrying boats as described in any one of claims 1-6; The boat support includes a first polarity connection part, a second polarity connection part, and a second insulating connector; The first polarity connection portion and the second polarity connection portion are fixedly connected by the second insulating connector, and the first polarity connection portion and the second polarity connection portion are insulated from each other; The first polarity connection portion and the second polarity connection portion are respectively connected to an radio frequency power supply; a plurality of the carrier boats are arranged at intervals on the boat support along the length direction of the boat support; the radio frequency power supply is used to control the polarity switching of the first polarity connection portion and the second polarity connection portion respectively; The first polarity connection portion and the second polarity connection portion are respectively connected to the conductive spacers of the boat blades of the carrying boat.

8. The bearing device according to claim 7, characterized in that, The second insulating connector includes a second insulating connecting rod and an insulating isolation block; The first polarity connection part and the second polarity connection part are fixedly connected by the second insulating connecting rod, and the first polarity connection part and the second polarity connection part are also insulated from each other by the insulating isolation block.

9. The bearing device according to claim 7, characterized in that, The boat blade and the boat support are arranged parallel to each other.

10. A semiconductor process apparatus, characterized in that, include: The support device, reactor, and radio frequency power supply as described in any one of claims 7-9; The reactor has a reaction chamber, and the supporting device is disposed in the reaction chamber; The boat support of the bearing device is electrically connected to the radio frequency power supply; The reactor is used to provide process gas and, under the control of the radio frequency power supply, to form an alternating positive and negative electric field at the interval between adjacent boat blades, so as to complete the simultaneous double-sided coating of the workpiece.

11. A method for coating a workpiece, applied to the semiconductor process equipment as described in claim 10, characterized in that, include: The carrier device holding the workpiece to be plated is transported into the reaction chamber of the reactor. Process gas is delivered into the reaction chamber, and the pressure inside the reaction chamber is set to a first value; By controlling the radio frequency power supply, the process gas is simultaneously deposited on both sides of the workpiece. After the dual-sided synchronous deposition operation is completed, the support device is removed from the reaction chamber.

12. The method according to claim 11, characterized in that, The step of controlling the radio frequency power supply to perform the double-sided synchronous deposition operation of the process gas on the workpiece includes: In each process cycle, the duty cycle of the RF power supply is controlled to a second value so that the RF power supply outputs RF pulses to control the switching of positive and negative poles of the odd-numbered and even-numbered layers of the carrier boat, thereby completing the double-sided synchronous deposition operation of the workpiece to be plated. The second value is 20%-90%, and the total operating time of the radio frequency power supply is 200s-800s.

13. The method according to claim 11, characterized in that, Before delivering the process gas into the reaction chamber and setting the pressure within the reaction chamber to a first value, the process further includes: Evacuate the reaction chamber; An inert gas is introduced into the reaction chamber, and the temperature of the reaction chamber is maintained at the third value. After evacuating the reaction chamber again, the pressure inside the reaction chamber is used to detect whether the reaction chamber is leaking. If there is no air leakage in the reaction chamber, proceed to the step of delivering process gas into the reaction chamber and setting the pressure in the reaction chamber to a first value.

14. The method according to claim 11, characterized in that, The distance between the edge of the hollowed-out area of ​​the boat blade in the carrier boat of the semiconductor process equipment and the edge of the workpiece to be plated is less than or equal to 10 mm.

15. The method according to claim 11, characterized in that, The total contact length between the workpiece to be plated and the inclined structure of the boat blade in the carrier boat of the semiconductor process equipment is 1mm-10mm.

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