Vacuum plug valve with diamond window function

Abstract

The application discloses a vacuum plug valve with diamond window function, characterized in that the vacuum plug valve comprises an ultrahigh vacuum plug valve and a non-water-cooled window; the ultrahigh vacuum plug valve comprises a cylinder assembly, a valve plate shell and a lifting valve body; the lifting valve body is provided with a window for mounting the non-water-cooled window; the valve plate shell is a hollow structure, is internally provided with a guide rail and is provided with a light hole for passing through a bundle line on the lower side; the lifting valve body is inserted into the valve plate shell along the guide rail; the lifting shaft of the cylinder assembly is connected with the lifting valve body and is used for controlling the non-water-cooled window on the lifting valve body to cut into or cut out the bundle line light path, thereby controlling the bundle line in the light path and isolating the vacuum. The optical window part of the diamond window is welded to the vacuum plug valve, so that the device has the functions of the diamond window and the vacuum plug valve.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation technology and relates to a vacuum gate valve that also functions as a diamond window, which is applied to synchrotron radiation beamlines and used in an ultra-high vacuum environment. Background Technology

[0002] A diamond window is a vacuum optical device that mainly consists of several components: a vacuum flange, a diamond sheet, a diamond tray, and copper connectors. The diamond window is typically installed in a beamline, allowing X-rays to pass through the diamond sheet in a vacuum tube and interact with the sample to obtain various experimental data. A vacuum slide gate valve mainly consists of the following components: a vacuum flange, a pneumatic or manual actuator, a movable valve plate, and a valve housing. Its function is to control the up-and-down movement of the movable valve plate via the actuator to achieve vacuum isolation.

[0003] Because beamline stations require a large number of devices and are located in a compact space, it is expensive to install multiple types of optical equipment within the limited space, especially when two types of equipment are installed simultaneously in the beamline. Although the two types of equipment have different functions, they share some common functions. Furthermore, the diamond window installed in the beamline can block the propagation intensity of X-rays, affecting the experimental results. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention aims to provide a vacuum gate valve that also functions as a diamond window. The present invention welds the optical window portion of the diamond window to the vacuum gate valve, thus enabling the device to function as both a diamond window and a vacuum gate valve.

[0005] The solution for welding diamond windows in the vacuum slide gate valve of the present invention mainly includes an ultra-high vacuum slide gate valve and a non-water-cooled diamond window; the ultra-high vacuum slide gate valve includes a cylinder assembly, a valve plate shell, a lifting valve body, and a connecting flange; the non-water-cooled diamond window includes a diamond sheet, a diamond sheet tray, and a copper heat sink.

[0006] This invention can reduce manufacturing costs and installation size while satisfying the functions of two original components, and can install as many devices as possible in a space-constrained beamline.

[0007] The original diamond window was installed in the wire bundle and could not be cut in and out at any time. The diamond sheet would absorb energy and affect the experimental results. The slide valve of the present invention can carry the diamond window up and down, while meeting the requirement of vacuum isolation.

[0008] The technical solution of this invention is as follows: A vacuum gate valve that also functions as a diamond window is characterized by comprising an ultra-high vacuum gate valve and a non-water-cooled window; the ultra-high vacuum gate valve comprises a cylinder assembly, a valve plate housing, and a lifting valve body; The lifting valve body is provided with a window for installing the non-water-cooled window; The valve plate housing is a hollow structure with an internal guide rail and a light-transmitting hole on the lower side for the beam to pass through. The lifting valve body is inserted into the valve plate housing along the guide rail. The lifting shaft of the cylinder assembly is connected to the lifting valve body and is used to control the non-water-cooled window on the lifting valve body to enter or exit the beam optical path, thereby controlling the beam emphasis in the optical path and isolating the vacuum.

[0009] Preferably, the valve plate housing includes a top plate and a housing; wherein the top plate and the housing are connected by valve plate connecting bolts, the top plate and the non-water-cooled window are connected by welding, and the housing is provided with a guide rail for inserting the lifting valve body.

[0010] Preferably, the ultra-high vacuum slide gate valve further includes two connecting flanges, which are respectively installed on both sides of the valve plate housing for connecting upstream and downstream equipment.

[0011] Preferably, the light-transmitting hole is located at the center of the connecting flange.

[0012] Preferably, the non-water-cooled window is a non-water-cooled diamond window, comprising a diamond sheet, a diamond sheet tray, and a copper heat sink; the diamond sheet and the diamond sheet tray are welded together by brazing, and the copper heat sink is welded onto the diamond sheet tray.

[0013] Preferably, the non-water-cooled window is a non-water-cooled beryllium window or a non-water-cooled aluminum window.

[0014] The advantages of this invention are as follows: The vacuum gate valve device of the present invention, which also functions as a diamond window, is applied to the beamline station of a high-energy synchrotron radiation source. By adding a non-water-cooled diamond window device to the gate valve, the two processes are combined, reducing the cost of use while improving the quality of synchrotron radiation light at the beamline station.

[0015] The present invention has the following main aspects: First, for beamline stations with limited space, combining the two components into one reduces the size of the equipment and allows for the installation of more critical equipment.

[0016] Secondly, combining the two components can significantly reduce usage costs without altering the original functions.

[0017] Third, diamond windows installed in beamlines absorb X-rays, affecting X-ray transmission efficiency and thus experimental results. By combining ultra-high vacuum gate valves with diamond windows, the diamond windows can be switched in and out of the optical path according to the usage, meeting different experimental needs. Attached Figure Description

[0018] Figure 1 This is a structural diagram of the vacuum gate valve that also functions as a diamond window according to the present invention.

[0019] Figure 2 This is a structural diagram of an ultra-high vacuum slide gate valve.

[0020] Figure 3 This is a structural diagram of a non-water-cooled diamond window. Detailed Implementation

[0021] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0022] like Figure 1 The following is an example of a vacuum gate valve device with diamond window functionality, which mainly includes an ultra-high vacuum gate valve 1 and a non-water-cooled diamond window 2. The ultra-high vacuum gate valve 1 and the non-water-cooled diamond window 2 are connected by welding.

[0023] like Figure 2 As shown, the ultra-high vacuum slide gate valve 1 mainly consists of a cylinder 101, a valve plate housing 102, valve plate connecting bolts 103, front and rear connecting flanges 104, and a lifting valve body 105. The valve plate housing 102 has a hollow internal structure with internal guide rails. First, the lifting valve body 105 is installed into the guide rails of the valve plate housing 102. The valve plate housing 102 includes a top plate and a shell, wherein the top plate and the shell are connected by valve plate connecting bolts 103, and the top plate is connected to the non-water-cooled diamond window 2 by welding. The lifting valve body 10 is inserted into the shell, and then the lifting shaft of the cylinder 101 is connected to the lifting valve body 105. Finally, the front and rear connecting flanges 104 are welded to the main body to form the entire ultra-high vacuum slide gate valve; the valve plate housing 102 has connecting flanges 104 on the left and right sides respectively.

[0024] like Figure 3 As shown, the non-water-cooled diamond window 2 mainly consists of a diamond sheet tray 201, a diamond sheet 202, and a copper heat sink. The diamond sheet 202 and the diamond sheet tray 201 are brazed to form the non-water-cooled diamond window 2. The lifting valve body 105 has a window for installing the non-water-cooled diamond window 2. The copper heat sink is directly welded into the window of the lifting valve body 105 and welded together with the lifting valve body 105. Finally, the non-water-cooled diamond window 2 is welded to the lifting valve body 105 in the ultra-high vacuum slide gate valve 1 by electron beam welding to form the final vacuum slide gate valve device that also functions as a diamond window.

[0025] In actual use, the inlet and outlet of cylinder 101 are connected to compressed air or other gas. When the non-water-cooled diamond window 2 needs to be inserted into the optical path or when the vacuum isolation equipment needs to be replaced, the lifting valve body 105 is lowered. When the non-water-cooled diamond window 2 does not need to be inserted into the optical path, it can be raised to maintain the intensity of synchrotron radiation.

[0026] This device greatly improves the time required for use in beamline stations, and its mass production and application in beamline stations can significantly reduce operating costs. The diamond window can be replaced with other types of windows, such as beryllium windows or aluminum windows. After connecting flange 104, when used as a beamline end window, it can also be used in series with other windows, which is very helpful for experiments with different functions in beamline stations.

[0027] The device can also be used in two components: an ultra-high vacuum gate valve and a non-water-cooled diamond window. However, this is more expensive, and the diamond window cannot be switched in or out of the optical path at any time when installed in the beamline. The ultra-high vacuum gate valve only lowers its lifting body when the equipment is being replaced or when vacuum isolation is required, and it needs to be raised when conducting light transmission experiments at the beamline station.

[0028] The above are preferred embodiments of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A vacuum slide gate valve that also functions as a diamond window, characterized in that, It includes an ultra-high vacuum slide gate valve and a non-water-cooled window; the ultra-high vacuum slide gate valve includes a cylinder assembly, a valve plate housing, and a lifting valve body; The lifting valve body is provided with a window for installing the non-water-cooled window; The valve plate housing is a hollow structure with an internal guide rail and a light-transmitting hole on the lower side for the beam to pass through. The lifting valve body is inserted into the valve plate housing along the guide rail. The lifting shaft of the cylinder assembly is connected to the lifting valve body and is used to control the non-water-cooled window on the lifting valve body to enter or exit the beam optical path, thereby controlling the beam emphasis in the optical path and isolating the vacuum.

2. The vacuum slide gate valve according to claim 1, characterized in that, The valve plate housing includes a top plate and a housing; wherein the top plate and the housing are connected by valve plate connecting bolts, the top plate is connected to the non-water-cooled window by welding, and the housing is provided with a guide rail for inserting the lifting valve body.

3. The vacuum slide gate valve according to claim 1 or 2, characterized in that, The ultra-high vacuum slide gate valve also includes two connecting flanges, which are respectively installed on both sides of the valve plate housing for connecting upstream and downstream equipment.

4. The vacuum slide gate valve according to claim 3, characterized in that, The light-transmitting hole is located at the center of the connecting flange.

5. The vacuum slide gate valve according to claim 1, characterized in that, The non-water-cooled window is a non-water-cooled diamond window, comprising a diamond sheet, a diamond sheet tray, and a copper heat sink; the diamond sheet and the diamond sheet tray are welded together by brazing, and the copper heat sink is welded onto the diamond sheet tray.

6. The vacuum slide gate valve according to claim 1, 2, or 3, characterized in that, The non-water-cooled window is either a non-water-cooled beryllium window or a non-water-cooled aluminum window.

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