A stable sealed vacuum pump motor

By employing a dual mechanical seal structure and buffer chamber design, the problem of unstable sealing in the vacuum pump motor wiring is solved, achieving stable sealing in high-specification vacuum systems and reducing the risk of seal failure and leakage probability.

CN122159568APending Publication Date: 2026-06-05XIAMEN CENTTO SERVO-MOTOR TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XIAMEN CENTTO SERVO-MOTOR TECH CO LTD
Filing Date
2026-03-18
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

The existing wiring seal of vacuum pump motors has leakage gaps, resulting in unstable sealing and making them unsuitable for high-specification vacuum systems.

Method used

It adopts a dual mechanical seal structure, including a first seal and a second seal. Through the design of buffer chamber and micropore, combined with pressure detection device, it can achieve pressure balance of the sealing ring and vibration reduction, timely detection of leakage and alarm.

Benefits of technology

It improves the sealing performance and stability of the vacuum pump motor, reduces the risk of seal failure, avoids sudden leakage accidents, and extends the service life of the equipment.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The application provides a stable sealed vacuum pump motor, comprising: a body located in a vacuum environment and used for further vacuumizing and provided with a wiring hole penetrating one side; a wiring mechanism arranged in the wiring hole, the wiring mechanism comprising a first sealing piece and a second sealing piece distributed inside and outside and forming a buffer cavity therebetween, a wiring post penetrating the first sealing piece and the second sealing piece in an axial direction, a first sealing ring and a second sealing ring respectively sealingly arranged between the outer wall of the first sealing piece and the second sealing piece and the inner wall of the wiring hole, a plurality of first micropores penetrating the inner side wall of the first sealing piece and connecting the first sealing groove and the buffer cavity, a plurality of second micropores penetrating the outer side wall of the second sealing piece and connecting the second sealing groove and the buffer cavity, the inner and outer ends of the wiring post being respectively used for connecting an external wire and an internal wire of the body, and a pressure detection device being arranged in the buffer cavity. Double sealing and graded pressure difference can be realized, so that the sealing stability is improved.
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Description

Technical Field

[0001] This invention relates to the field of vacuum pump motors, specifically to a stable and sealed vacuum pump motor. Background Technology

[0002] High-specification vacuum systems typically employ two or more vacuum pumps connected in series to work collaboratively, achieving ultra-high vacuum levels that a single pump cannot reach, such as Roots vacuum units. When two vacuum pumps are connected in series, the lower pump acts as the backing pump, used to create a primary vacuum gas by evacuating from atmospheric pressure. The upper pump is the main pump, used to create a secondary vacuum gas by evacuating the primary vacuum gas delivered by the lower pump. To improve sealing, the upper pump body and motor are directly integrated into the primary vacuum environment created by the lower pump. Therefore, sealing the wiring of the upper pump motor presents a significant challenge.

[0003] The wiring seals of existing vacuum pump motors are mainly achieved through potting. However, during the potting resin solidification process, due to factors such as wire displacement or roughness of the wire outer wall, leakage gaps can easily occur between the wire and the potting resin. Furthermore, the upper pump motor is in a high vacuum state during operation, which causes the leakage gap to be subjected to a huge pressure difference between the external atmospheric pressure and the internal high vacuum, further aggravating the leakage. Therefore, in the field of vacuum pump motors, the potting sealing method has the defect of unstable sealing and is not suitable for sealing the wiring of upper pump motors in high-specification vacuum systems.

[0004] The research objective of this invention is to design a stable and sealed vacuum pump motor to address the problems existing in the prior art. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention provides a stable and sealed vacuum pump motor, which can effectively solve the problems existing in the prior art.

[0006] The technical solution of this invention is: A stable, sealed vacuum pump motor, comprising: The main body is located in a vacuum environment and is used for further vacuuming; a wiring hole is provided through one side. A wiring mechanism is disposed within the wiring hole. The wiring mechanism includes a first sealing element and a second sealing element distributed internally and externally, forming a buffer cavity between them, and a terminal block that axially seals through the first sealing element and the second sealing element. The outer walls of the first sealing element and the second sealing element are respectively recessed with a first sealing groove and a second sealing groove. The first sealing groove and the second sealing groove are respectively sealed and embedded with a first sealing ring and a second sealing ring between them and the inner wall of the wiring hole. The inner side wall of the first sealing element is provided with a plurality of first micro-holes that connect the first sealing groove and the buffer cavity. The outer side wall of the second sealing element is provided with a plurality of second micro-holes that connect the second sealing groove and the buffer cavity. The inner and outer ends of the terminal block are respectively used to connect external wires and internal wires of the machine body. A pressure detection device is provided inside the buffer cavity.

[0007] Furthermore, the number of terminals is set to three, the first seal and the second seal are arranged vertically, and a number of buffer sleeves are sequentially spaced from the inside to the outside along the transverse direction of each terminal. The sidewall of each buffer sleeve is wavy from top to bottom. The upper and lower ends of the buffer sleeves are respectively fixedly connected to the bottom of the first seal and the top of the second seal. The first microhole and the second microhole are also respectively connected to the upper and lower ends of the adjacent buffer sleeves.

[0008] Furthermore, the upper and lower parts of the terminal block are respectively sealed to the first sealing element and the second sealing element through the upper sealing ring and the lower sealing ring, and the innermost buffer sleeve is spaced around the outer periphery of the terminal block and filled with highly elastic damping particles between the terminal block and the terminal block.

[0009] Furthermore, the top of the first sealing member and the bottom of the second sealing member are respectively provided with a plurality of first limiting posts and a plurality of second limiting posts surrounding the upper and lower ends of the three terminals. The plurality of first limiting posts are connected to the upper end of the terminals through a first elastic member, and the plurality of second limiting posts are connected to the lower end of the terminals through a second elastic member. The plurality of first elastic members are used to circumferentially elastically pull the upper end of the terminals to be centered, and the plurality of second elastic members are used to circumferentially elastically pull the lower end of the terminals to be centered.

[0010] Furthermore, the terminal block includes an outer portion and an inner portion screwed together. The upper annular recess of the outer portion is provided with an upper limit groove, and the lower annular recess of the inner portion is provided with a lower limit groove. The upper part of the outer portion and the lower part of the inner portion are respectively sealed against the top of the first sealing member and the bottom of the second sealing member by the upper sealing ring and the lower sealing ring, respectively. The number of the first limit post and the second limit post is three. The first elastic member includes a first limit ring sleeved in the upper limit groove and a first tension ring connected to the first limit ring and respectively limited and sleeved on the outer periphery of the three first limit posts. The second elastic member includes a second limit ring sleeved in the lower limit groove and a second tension ring connected to the second limit ring and respectively limited and sleeved on the outer periphery of the three second limit posts.

[0011] Furthermore, the top of the first sealing member and the bottom of the second sealing member are respectively recessed with a plurality of first operating grooves and a plurality of second operating grooves, and the inner end of the wiring hole is provided with a limiting step that abuts against the inner side of the second sealing member.

[0012] Furthermore, the machine body includes a housing with the wiring holes, a stator and a rotor disposed within the housing.

[0013] Therefore, the beneficial effects of the present invention are: 1. By setting up the first and second sealing elements, and the first and second sealing rings, a double mechanical seal is achieved for the wiring hole from the outside to the inside, replacing the existing potting wiring method, thereby improving the sealing performance. However, since the vacuum pump motor operates in a vacuum environment, this results in a huge pressure difference between the inner and outer sides of the first and second sealing rings (vacuum and atmospheric pressure respectively), which can easily cause the sealing rings to be squeezed into gaps and fail (i.e., an extrusion effect occurs; the extrusion effect refers to the phenomenon where, under pressure, some material of the sealing ring is squeezed into the gap between its mating parts, leading to seal failure or even damage). Therefore, by forming a buffer chamber connecting the first sealing groove and the second sealing groove between the first sealing element and the second sealing element, the air pressure in the buffer chamber after the wiring structure is installed is maintained at an intermediate pressure value between atmospheric pressure and vacuum due to the slight leakage of the first sealing ring and the second sealing ring. This reduces the pressure difference between the inner and outer sides of the first sealing ring and the second sealing ring, thereby decomposing the huge pressure difference between the inside and outside of the housing into two smaller pressure differences, which are then shared by the first sealing ring and the second sealing ring respectively. This greatly reduces the burden and failure risk of the first sealing ring and the second sealing ring. Furthermore, the pressure detection device allows for real-time monitoring of pressure changes within the buffer chamber. When a significant pressure change occurs within the buffer chamber in a short period, it indicates a leak in either the first or second sealing ring. When the first sealing ring leaks, the increased pressure in the buffer chamber widens the pressure difference between the inner and outer sides of the second sealing ring, further tightening it to prevent further leakage and triggering a leak alarm. This allows maintenance personnel time to detect and repair the leak before the pressure in the buffer chamber slowly rises to atmospheric pressure. Conversely, when the second sealing ring leaks, the decreased pressure in the buffer chamber approaches vacuum, increasing the pressure difference between the inner and outer sides of the first sealing ring, further tightening it to prevent further leakage and triggering a leak alarm. This slows the leakage process, allowing for early detection and timely repair of leaks in either the first or second sealing ring, preventing sudden leaks and significantly improving the sealing stability of the vacuum pump motor.

[0014] 2. With the buffer chamber in place, several buffer sleeves can be installed. Through the installation of these buffer sleeves, most of the vibration transmitted from the machine body to the first and second seals can be consumed by the elastic damping of the buffer sleeves. This avoids the first and second seals from undergoing minor vertical displacement, which would cause long-term wear of the first and second seals and improves the sealing stability of the first and second seals.

[0015] 3. By filling with damping particles, the vibrations experienced by the first and second seals are transmitted through the innermost buffer sleeve to several damping particles and then consumed by the friction between the damping particles. This reduces the amount of vibration transmitted from the first and second seals to the terminal, reduces the probability of polarization or offset of the terminal, and reduces the burden on the upper and lower sealing rings.

[0016] 4. With the first and second seals relatively stable through several buffer sleeves, the arrangement of several first limiting posts, several second limiting posts, first elastic elements, and second elastic elements ensures that the first elastic elements are used to circumferentially elastically pull the upper end of the terminal block to the center, and the second elastic elements are used to circumferentially elastically pull the lower end of the terminal block to the center. This circumferential elastic pull on the upper and lower ends of the terminal block improves its stability after installation, preventing excessive displacement and compression of the upper or lower sealing ring due to machine vibration, reducing the sealing burden on the upper and lower sealing rings, and improving their sealing stability. Furthermore, if leakage occurs on one side of the upper or lower sealing ring, causing the terminal block to shift, the first and second elastic elements still tend to pull the terminal block to the center, thus preventing further leakage. Monitoring the air pressure changes in the buffer chamber allows for timely maintenance.

[0017] 5. By setting the first elastic element to include a first limiting ring and three first traction rings, and setting the second elastic element to include a second limiting ring and three second traction rings, the three first traction rings and the three second traction rings can be uniformly stretched circumferentially on the outer and inner parts respectively on the same plane, thereby improving the stability of the first elastic element and the second elastic element in uniformly stretching circumferentially on the outer and inner parts. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a stable, sealed vacuum pump motor.

[0019] Figure 2 This is a cross-sectional structural diagram of a stable and sealed vacuum pump motor.

[0020] Figure 3 for Figure 2 A magnified view of a portion of the image.

[0021] Figure 4 This is a schematic diagram of the wiring mechanism.

[0022] Figure 5 This is a schematic diagram of the elastic element. Detailed Implementation

[0023] To facilitate understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings: refer to Figure 1-5 A stable, sealed vacuum pump motor, comprising: The body 8 is located in a vacuum environment and is used for further vacuuming. A wiring hole 811 is provided through one side. Specifically, the vacuum pump motor in this embodiment is the main pump motor of a high-specification vacuum system. The high-specification vacuum system includes a back pump and a main pump. Both the main pump and the main pump motor work in the primary vacuum environment created by the back pump and are used to perform secondary vacuum on the primary vacuum gas in the primary vacuum environment. A wiring mechanism is disposed within the wiring hole 811. The wiring mechanism includes a first sealing element 1 and a second sealing element 2 distributed internally and externally, forming a buffer cavity 3 between them, and a terminal post 4 that axially seals and penetrates the first sealing element 1 and the second sealing element 2. The outer walls of the first sealing element 1 and the second sealing element 2 are respectively recessed with a first sealing groove 11 and a second sealing groove 21. A first sealing ring 12 and a second sealing ring 22 are respectively sealed and embedded between the first sealing groove 11 and the second sealing groove 21 and the inner wall of the wiring hole 811. The inner side wall of the first sealing element 1 is provided with a plurality of first sealing grooves 11 and the buffer cavity 3. A micro-hole 13 is provided, and a plurality of second micro-holes 23 are provided through the outer wall of the second sealing member 2 to connect the second sealing groove 21 and the buffer cavity 3. The inner and outer ends of the terminal 4 are respectively used to connect the external wire 5 and the internal wire 6 of the body 8. The buffer cavity 3 is provided with a pressure detection device 7 (not shown in the figure). Specifically, the first sealing member 1 and the second sealing member 2 can both be made of plastic material. The pressure detection device 7 can be set as a wireless pressure sensor, which is used to send pressure data to an external receiver through wireless signals, thereby eliminating the need for physical leads and avoiding additional leakage risks. The specific structure is referred to the prior art and will not be described in detail here.

[0024] The above structure, through the arrangement of the first sealing element 1 and the second sealing element 2, the first sealing ring 12 and the second sealing ring 22, achieves a double seal from the outside to the inside for the wiring hole 811, thereby improving the sealing performance. However, since the vacuum pump motor operates in a vacuum environment, this results in a significant pressure difference between the inner and outer sides of the first sealing ring 12 and the second sealing ring 22, which is equivalent to vacuum and atmospheric pressure respectively. This can easily cause the sealing rings to be squeezed into gaps and fail (i.e., an extrusion effect occurs; the extrusion effect refers to the phenomenon where, under pressure, some material of the sealing ring is squeezed into the gap between its mating parts, leading to sealing failure or even damage). Therefore, by using the first sealing element 1 and the second sealing element 2, and the first sealing ring 12 and the second sealing ring 22, a double seal is achieved for the wiring hole 811 from the outside to the inside, thereby improving the sealing performance. A buffer chamber 3 is formed between the two sealing elements 2, connecting the first sealing groove 11 and the second sealing groove 21. After the wiring structure is installed, the air pressure in the buffer chamber 3 is maintained at an intermediate pressure value between atmospheric pressure and vacuum due to the slight leakage of the first sealing ring 12 and the second sealing ring 22. This reduces the pressure difference between the inner and outer sides of the first sealing ring 12 and the second sealing ring 22, thereby decomposing the huge pressure difference between the inside and outside of the housing 81 into two smaller pressure differences, which are then shared by the first sealing ring 12 and the second sealing ring 22 respectively. This greatly reduces the burden and failure risk of the first sealing ring 12 and the second sealing ring 22. Furthermore, the pressure detection device 7 can monitor the pressure changes in the buffer chamber 3 in real time. When the pressure in the buffer chamber 3 changes significantly in a short period of time, it is determined that there is a leak in the first sealing ring 12 or the second sealing ring 22. When the first sealing ring 12 leaks, the pressure increase in the buffer chamber 3 will increase the pressure difference between the inner and outer sides of the second sealing ring 22, thereby further tightening the second sealing ring 22 to prevent further leakage and triggering a leak alarm. Before the pressure in the buffer chamber 3 slowly rises to atmospheric pressure, it gives maintenance personnel time to detect the leak and carry out maintenance. Conversely, when the second sealing ring 22 leaks, the pressure decrease in the buffer chamber 3 and approaches a vacuum will increase the pressure difference between the inner and outer sides of the first sealing ring 12, thereby further tightening the first sealing ring 12 to prevent further leakage and triggering a leak alarm. This delays the leakage process, detects the leak of the first sealing ring 12 or the second sealing ring 22 in advance, and arranges maintenance in a timely manner, avoiding sudden leakage accidents and greatly improving the sealing wiring stability of the vacuum pump motor.

[0025] The vacuum pump motor generates significant vibrations during operation, which can cause slight vertical displacement of the first seal 1 and the second seal 2. This can lead to long-term wear and failure of the first sealing ring 12 and the second sealing ring 22. Therefore, to improve the sealing stability of the first sealing ring 12 and the second sealing ring 22, three terminals 4 are provided. The first seal 1 and the second sealing ring 2 are arranged vertically. Each terminal 4 has several buffer sleeves 31 spaced out horizontally from the inside to the outside. The sidewall of each buffer sleeve 31 is wavy from top to bottom. The upper and lower ends of the buffer sleeves 31 are fixedly connected to the bottom of the first seal 1 and the top of the second seal 2, respectively. The first microholes 13 and the second microholes 23 are also connected to the upper and lower ends of adjacent buffer sleeves 31. Specifically, the buffer sleeves 31 can be corrugated pipes. With the buffer cavity 3 provided, the above structure can be equipped with several buffer sleeves 31. Through the arrangement of several buffer sleeves 31, most of the vibration transmitted from the body 8 to the first seal 1 and the second seal 2 can be consumed by the elastic damping of several buffer sleeves 31. This avoids the first seal 1 and the second seal 2 from undergoing slight vertical displacement, which would cause the first sealing ring 12 and the second sealing ring 22 to be worn for a long time, thereby improving the sealing stability of the first sealing ring 12 and the second sealing ring 22.

[0026] To prevent excessive vibration transmitted to the first and second seals 1 and 2, which could cause polarization or misalignment of the terminal 4, the upper and lower parts of the terminal 4 are respectively sealed to the first and second seals 1 and 2 via an upper sealing ring 17 and a lower sealing ring 27. The innermost buffer sleeve 31 is spaced around the outer periphery of the terminal 4, and highly elastic damping particles 32 are filled between the terminal 4 and the buffer sleeve 31. Specifically, the damping particles 32 can be made of highly elastic nylon particles with a filling rate of 60%-75%. Nylon particles have high elasticity, preventing compression of the buffer sleeve 31 and the terminal 4, and also have insulating and antistatic effects. Through the filling of damping particles 32, the vibration transmitted to the first and second seals 1 and 2 is absorbed by the friction between the damping particles 32 after being transmitted through the innermost buffer sleeve 31 to the damping particles 32. This reduces the amount of vibration transmitted from the first and second seals 1 and 2 to the terminal 4, reduces the probability of polarization or misalignment of the terminal 4, and reduces the burden on the upper sealing ring 17 and lower sealing ring 27.

[0027] Because there is an assembly gap between the terminal block 4 and the first seal 1 and the second seal 2, and the upper sealing ring 17 and the lower sealing ring 27 are interference-fitted between the terminal block 4 and the first seal 1 and the second seal 2, when the vibration of the machine body 8 is transmitted to the terminal block 4, it is easy to cause the terminal block 4 to shift and frequently over-press one side of the upper sealing ring 17 and the lower sealing ring 27, resulting in a decrease in sealing stability. Therefore, in order to improve the stability of the terminal block 4, the top of the first sealing member 1 and the bottom of the second sealing member 2 are respectively provided with a plurality of first limiting posts 14 and a plurality of second limiting posts 24 surrounding the upper and lower ends of the three terminal blocks 4. The plurality of first limiting posts 14 are connected to the upper end of the terminal block 4 through a first elastic member 15, and the plurality of second limiting posts 24 are connected to the lower end of the terminal block 4 through a second elastic member 25. Specifically, the first elastic member 15 and the second elastic member 25 can both be made of spring steel sheet, PU or nylon material. With the above structure making the first sealing member 1 and the second sealing member 2 relatively stable through the plurality of buffer sleeves 31, the arrangement of the plurality of first limiting posts 14, the plurality of second limiting posts 24, the first elastic member 15 and the second elastic member 25 makes the plurality of first elastic members 15 used to circumferentially elastically pull the upper end of the terminal block 4 to be centered, and the plurality of second elastic members 25 used to circumferentially elastically pull the lower end of the terminal block 4 to be centered. This system uses circumferential elastic tension on the upper and lower ends of the terminal block 4 to center it, improving the stability of the terminal block 4 after installation. This prevents excessive displacement and compression of the upper sealing ring 17 or lower sealing ring 27 due to vibration of the machine body 8, reducing the sealing burden on the upper and lower sealing rings 17 and 27, and improving their sealing stability. Furthermore, if leakage occurs on one side of the upper sealing ring 17 or lower sealing ring 27, causing the terminal block 4 to shift, the first elastic element 15 and the second elastic element 25 still tend to pull the terminal block 4 to center it, thus preventing further leakage. Furthermore, timely maintenance can be performed by monitoring the air pressure changes in the buffer chamber 3.

[0028] To improve the stability of the first elastic element 15 and the second elastic element 25, the terminal block 4 includes an outer portion 41 and an inner portion 42 screwed together. The upper part of the outer portion 41 has an annular recess with an upper limit groove 411, and the lower part of the inner portion 42 has an annular recess with a lower limit groove 421. The upper part of the outer portion 41 and the lower part of the inner portion 42 are respectively sealed against the top of the first sealing element 1 and the bottom of the second sealing element 2 by the upper sealing ring 17 and the lower sealing ring 27. The number of the first limit post 14 and the second limit post 24 is set to three. The first elastic element 15 includes a first limit ring 151 sleeved in the upper limit groove 411 and a first tension ring 152 connected to the first limit ring 151 and respectively limited and sleeved on the outer periphery of the three first limit posts 14. The second elastic element 25 includes a second limit ring sleeved in the lower limit groove 421 and a second tension ring connected to the second limit ring and respectively limited and sleeved on the outer periphery of the three second limit posts 24. The above structure improves the stability of the first elastic member 15 and the second elastic member 25 in uniformly pulling the outer part 41 and the inner part 42 in a circumferential direction by setting the first elastic member 15 to include the first limiting ring 151 and the three first pulling rings 151 and the three second pulling rings 25 to include the second limiting ring and the three second pulling rings 25 to include the second elastic member ...

[0029] To improve the stability of the wiring mechanism after installation, the top of the first sealing member 1 and the bottom of the second sealing member 2 are respectively recessed with a plurality of first operating grooves 16 and a plurality of second operating grooves 26. The inner end of the wiring hole 811 has an annular protrusion with a limiting step 812 that abuts against the inner side of the second sealing member 2. Specifically, the first operating grooves 16 and the second operating grooves 26 can be screwed with screws or other parts for easy operation. With the setting of the limiting step 812, after the wiring mechanism is inserted into the wiring hole 811, it can grab a plurality of the second operating grooves 26 from inside the body 8 through the inner end of the wiring hole 811 and pull the second sealing member 2 down to abut against the limiting step 812. Then, it can grab a plurality of the first operating grooves 16 from the upper end of the wiring hole 811 and press the first sealing member 1 into place, thus completing the installation of the wiring structure and improving the stability of the wiring mechanism after installation.

[0030] Specifically, the machine body 8 includes a housing 81 with the wiring hole 811, a stator 82 and a rotor (not shown in the figure) disposed in the housing 81.

[0031] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the invention by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the invention should be included within the scope of protection of the invention.

Claims

1. A stable and sealed vacuum pump motor, characterized in that, include: The body (8) is located in a vacuum environment and is used for further vacuuming, with a wiring hole (811) through one side. A wiring mechanism is provided inside the wiring hole (811). The wiring mechanism includes a first sealing element (1) and a second sealing element (2) distributed inside and outside and forming a buffer cavity (3) between them, and a terminal post (4) that seals through the first sealing element (1) and the second sealing element (2) along the axial direction. The outer walls of the first sealing element (1) and the second sealing element (2) are respectively recessed with a first sealing groove (11) and a second sealing groove (21). The first sealing groove (11) and the second sealing groove (21) are respectively sealed and embedded with the inner wall of the wiring hole (811). The device is provided with a first sealing ring (12) and a second sealing ring (22). The inner wall of the first sealing member (1) is provided with a plurality of first micro holes (13) that connect the first sealing groove (11) and the buffer cavity (3). The outer wall of the second sealing member (2) is provided with a plurality of second micro holes (23) that connect the second sealing groove (21) and the buffer cavity (3). The inner and outer ends of the terminal block (4) are respectively used to connect the external wire (5) and the internal wire (6) of the body (8). The buffer cavity (3) is provided with a pressure detection device (7).

2. The stable and sealed vacuum pump motor as described in claim 1, characterized in that, The number of terminals (4) is set to three. The first seal (1) and the second seal (2) are arranged vertically. A number of buffer sleeves (31) are sequentially sleeved on the outer side of each terminal (4) from the inside to the outside. The sidewall of each buffer sleeve (31) is wavy from top to bottom. The upper and lower ends of the buffer sleeves (31) are respectively fixedly connected to the bottom of the first seal (1) and the top of the second seal (2). The first microholes (13) and the second microholes (23) are also respectively connected to the upper and lower ends of the adjacent buffer sleeves (31).

3. The stable and sealed vacuum pump motor as described in claim 2, characterized in that, The upper and lower parts of the terminal (4) are respectively sealed to the first sealing element (1) and the second sealing element (2) through the upper sealing ring (17) and the lower sealing ring (27). The innermost buffer sleeve (31) is spaced around the outer periphery of the terminal (4) and is filled with highly elastic damping particles (32) between it and the terminal (4).

4. The stable and sealed vacuum pump motor as described in claim 3, characterized in that, The top of the first sealing member (1) and the bottom of the second sealing member (2) are respectively provided with a plurality of first limiting posts (14) and a plurality of second limiting posts (24) surrounding the upper and lower ends of the three terminals (4). The plurality of first limiting posts (14) are connected to the upper end of the terminal (4) through a first elastic member (15), and the plurality of second limiting posts (24) are connected to the lower end of the terminal (4) through a second elastic member (25). The plurality of first elastic members (15) are used to circumferentially elastically pull the upper end of the terminal (4) to be centrally located, and the plurality of second elastic members (25) are used to circumferentially elastically pull the lower end of the terminal (4) to be centrally located.

5. A stable and sealed vacuum pump motor as described in claim 4, characterized in that, The terminal block (4) includes an outer part (41) and an inner part (42) connected by upper and lower screws. The upper annular recess of the outer part (41) is provided with an upper limit groove (411), and the lower annular recess of the inner part (42) is provided with a lower limit groove (421). The upper part of the outer part (41) and the lower part of the inner part (42) are respectively sealed against the top of the first sealing member (1) and the bottom of the second sealing member (2) by the upper sealing ring (17) and the lower sealing ring (27), respectively. The first limit post (14) and the second limit post (2) are respectively sealed against the top of the first sealing member (1) and the bottom of the second sealing member (2). The number of columns (24) is set to three. The first elastic element (15) includes a first limiting ring (151) sleeved in the upper limit groove (411) and a first traction ring (152) connected to the first limiting ring (151) and respectively limited and sleeved on the outer periphery of the three first limiting columns (14). The second elastic element (25) includes a second limiting ring sleeved in the lower limit groove (421) and a second traction ring connected to the second limiting ring and respectively limited and sleeved on the outer periphery of the three second limiting columns (24).

6. A stable and sealed vacuum pump motor as described in claim 2, characterized in that, The top of the first sealing element (1) and the bottom of the second sealing element (2) are respectively provided with a plurality of first operating grooves (16) and a plurality of second operating grooves (26). The inner end of the wiring hole (811) is provided with a limiting step (812) that is limited and abuts against the inner side of the second sealing element (2).

7. A stable and sealed vacuum pump motor as described in claim 1, characterized in that, The body (8) includes a housing (81) with the wiring hole (811), a stator (82) and a rotor disposed in the housing (81).