A radio frequency filter and carrier device

Abstract

The embodiment of the present application provides a radio frequency filter and a bearing device, which comprises a native inductance and a native capacitance, a first end of the native inductance is used for being connected with a filter input end, a second end of the native inductance is connected with a first end of the native capacitance as a filter output end, a second end of the native capacitance is used for being grounded, and the native inductance and the native capacitance are used for filtering a first target frequency together; the native inductance comprises a multi-turn coil, the turn spacing of the multi-turn coil is the same, and the turn spacing is adjusted to a predetermined value, so as to be used for filtering a second target frequency, and the second target frequency is greater than the first target frequency. Through the embodiment of the present application, dual-frequency filtering can be realized.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a radio frequency filter and a carrier device. Background Technology

[0002] The current trend in semiconductor chip etching technology is towards larger wafer sizes and narrower etching linewidths. Faced with this significant challenge, dual-frequency plasma etching has emerged as a means to achieve these goals. High-frequency and low-frequency plasma etching are used to control the plasma flux and energy bombarding the wafer surface, respectively. In the design of semiconductor etching equipment, to improve RF coupling efficiency and prevent RF signals applied to the electrostatic chuck from coupling to the AC heating power supply (or DC adsorption power supply) and causing power supply damage, an RF filter is often installed between the AC power supply (or DC power supply) and the electrostatic chuck. For dual-frequency RF bias, the required RF filter needs to filter out both frequencies simultaneously. Current RF filters typically employ single-order or double-order filtering. Single-order filtering is relatively simple in principle but difficult to implement for dual-frequency filtering. Double-order filtering, on the other hand, has a more complex structure, and the first-order capacitor has a potential voltage withstand risk under high-voltage conditions, which can easily lead to equipment damage. Summary of the Invention

[0003] In view of the above problems, embodiments of the present invention are proposed to provide a radio frequency filter and a carrier device that overcome or at least partially solve the above problems.

[0004] To address the aforementioned problems, in a first aspect of the present invention, an embodiment of the present invention discloses a radio frequency filter, comprising: a native inductor and a native capacitor.

[0005] The first end of the native inductor is used to connect to the filter input terminal, the second end of the native inductor is connected to the first end of the native capacitor as the filter output terminal, the second end of the native capacitor is used to ground, and the native inductor and the native capacitor are used together to filter out the first target frequency;

[0006] The native inductor includes a multi-turn coil with the same turn spacing, the turn spacing being adjusted to a predetermined value to filter out a second target frequency, which is greater than the first target frequency.

[0007] Optionally, the native inductor includes: a single toroidal magnetic core and two sets of inductor coils, and the native capacitor is multiple;

[0008] One of the two sets of inductor coils is wound around one side of the toroidal magnetic core, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core.

[0009] The first ends of the two sets of inductor coils are used to connect to the filter input terminals respectively, and the second ends of the two sets of inductor coils are connected to each of the original capacitors respectively.

[0010] Optionally, the two sets of inductor coils have the same number of turns but are wound in opposite directions.

[0011] Optionally, each of the two sets of inductor coils includes N inductor coils, which are insulated from each other and wound together; where N is a positive integer not less than 1.

[0012] Optionally, the annular magnetic core is a rectangular annular magnetic core;

[0013] The rectangular annular magnetic core is enclosed by two opposing first magnetic rods and two opposing second magnetic rods;

[0014] One of the two sets of inductor coils is wound around one of the two first magnetic rods; the other set of the two sets of inductor coils is wound around the other of the two first magnetic rods.

[0015] Optionally, the length of the first magnetic rod is greater than the length of the second magnetic rod; or

[0016] The first magnetic rod has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or

[0017] The second magnetic rod has a rectangular cross-section, with a length ranging from 2-5 cm and a width ranging from 1.5-3 cm; or

[0018] The relative permeability of the first magnetic rod is 20-40; or

[0019] The relative permeability of the second magnetic rod is 20-40.

[0020] Optionally, the rectangular annular magnetic core further includes: a resin adhesive located between the first magnetic rod and the second magnetic rod; or

[0021] A gap is provided between the first magnetic rod and the second magnetic rod.

[0022] Optionally, the length of the resin adhesive is the same as the cross-sectional width of the second magnetic rod, and the thickness of the resin adhesive ranges from 0.1 to 0.5 cm.

[0023] Optionally, the native inductor includes a grounded housing.

[0024] The rectangular annular magnetic core is located inside the grounded outer casing;

[0025] One end of the native capacitor is connected to the grounded outer casing.

[0026] Optionally, the distance between the first magnetic rod and the grounded outer casing is greater than 30 mm.

[0027] In a second aspect of the invention, an embodiment of the invention discloses a carrier device, including a chuck body, a power supply and a radio frequency filter as described above;

[0028] The chuck body has at least one electrode, and the radio frequency filter is connected between the electrode and the power supply.

[0029] Optionally, the operating power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or,

[0030] The working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

[0031] The embodiments of the present invention have the following advantages:

[0032] In this embodiment of the invention, the first end of a native inductor is connected to the filter input terminal, and the second end of the native inductor is connected to the first end of a native capacitor as the filter output terminal. The second end of the native capacitor is grounded. The native inductor and the native capacitor are used together to filter out a first target frequency. The native inductor includes a multi-turn coil with the same turn spacing, which is adjusted to a predetermined value to filter out a second target frequency, which is greater than the first target frequency. By utilizing the parasitic effect of the inductor coil to generate parasitic capacitance and the parallel resonance of the inductor and capacitor, an inductor-capacitor filter circuit composed of the native inductor and the native capacitor is used to filter out the first target frequency. Then, by adjusting the turn spacing of the inductor coil to generate parasitic capacitance, another inductor-capacitor filter circuit composed of the native inductor and the parasitic capacitance is used to filter out the second target frequency, thus achieving dual-frequency filtering. Moreover, the entire RF filter only requires a native inductor and a native capacitor, resulting in a simple overall structure. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of an embodiment of the radio frequency filter of the present invention;

[0034] Figure 2 This is a schematic diagram of a resonant circuit according to an embodiment of the radio frequency filter of the present invention;

[0035] Figure 3 An equivalent schematic diagram of the resonant circuit of an embodiment of the radio frequency filter of the present invention;

[0036] Figure 4 This is an impedance-frequency response curve of an embodiment of the radio frequency filter of the present invention;

[0037] Figure 5This is a schematic diagram of a magnetic core inductor according to an embodiment of the radio frequency filter of the present invention;

[0038] Figure 6 This is a schematic diagram of inductor winding according to an embodiment of the radio frequency filter of the present invention;

[0039] Figure 7 This is a schematic diagram of a cross-section of a magnetic rod according to the present invention;

[0040] Figure 8 This is a schematic diagram of temperature change in an embodiment of the radio frequency filter of the present invention;

[0041] Figure 9 This is a schematic diagram of a radio frequency filter according to an embodiment of the carrier device of the present invention.

[0042] Explanation of reference numerals in the attached diagram: 100-original inductor, 200-original capacitor, 300-ring core, 310-first magnetic rod, 320-second magnetic rod, 400-resin glue, 500-casing. Detailed Implementation

[0043] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0044] Reference Figure 1 The diagram illustrates an embodiment of the radio frequency filter of the present invention, which may specifically include the following parts:

[0045] The first end of the native inductor 100 is used to connect to the filter input terminal, the second end of the native inductor 100 is connected to the first end of the native capacitor 200 as the filter output terminal, the second end of the native capacitor 200 is used to ground, and the native inductor 100 and the native capacitor 200 are used together to filter out the first target frequency.

[0046] The native inductor 100 includes a multi-turn coil with the same turn spacing, the turn spacing being adjusted to a predetermined value for filtering out a second target frequency, which is greater than the first target frequency.

[0047] In this embodiment of the invention, the radio frequency filter may include a native inductor 100 and a native capacitor 200. The native inductor 100 and the native capacitor 200 form a resonant circuit. See also... Figure 2The first terminal of the native inductor 100 is connected to the filter input terminal, and the second terminal of the native inductor 100 is connected to the first terminal of the native capacitor 200 as the filter output terminal. The second terminal of the native capacitor 200 is grounded. The resonant circuit composed of the native inductor 100 and the native capacitor 200 filters out the signal at the first target frequency. That is, the resonant effect of the native inductor 100 and the native capacitor 200 is used to filter out the interference signal at the first target frequency in the radio frequency signal. The first target frequency is related to the inductance value of the native inductor 100 and the capacitance value of the native capacitor 200. The specific range of the first target frequency that can be filtered out is not limited.

[0048] The native inductor 100 includes a multi-turn coil with identical turn spacing. This turn spacing is adjusted to a predetermined value to generate a parasitic capacitance related to the turn spacing between the multi-turn coils due to parasitic currents when the native inductor 100 is operating at high frequencies. That is, it can be... Figure 3 As shown, parasitic capacitance is generated between the turns of the inductor under high-frequency conditions. That is, the original inductor 100 can be equivalent to an inductor and capacitor connected in parallel. The parasitic capacitance, together with the original inductor 100, forms another resonant circuit, which can filter out the second target frequency. In other words, by adjusting the turn spacing of the inductor, the capacitance value of the parasitic capacitance can be adjusted, and the resonant position can be further adjusted. The second target frequency is greater than the first target frequency. For example, if the first target frequency is 2MHz, the second target frequency can be 13.56MHz. Furthermore, to achieve filtering at the 13.56MHz frequency point, the inductor turn spacing can be in the range of 1mm to 1.5mm.

[0049] At the same time from Figure 4 As can be seen from the experimentally obtained impedance modulus and phase angle versus frequency response curves, where the solid line represents the impedance modulus and the dashed line represents the phase angle, there are two resonant points at 3MHz and 7.3MHz, used to filter out RF signals of 2MHz and 13.56MHz. Within 2MHz and its sweep frequency range (1.8~2.2MHz), the impedance exhibits inductive characteristics. Figure 4 With a phase angle greater than zero, the impedance modulus can reach 4kΩ. The impedance is capacitive at 13.56MHz and its sweep frequency range (12.882~14.238MHz). Figure 4With a phase angle less than zero, the impedance modulus can reach 1KΩ. Since process equipment such as etching machines operates capacitively at 13.56MHz, if the RF filter is inductive, the parallel resonance between the two poses a risk of voltage increase, raising the withstand voltage requirement by 10 to 100 orders of magnitude. However, at 2MHz, the filter's impedance is much higher, and the resonance effect has a smaller impact. Under these impedance conditions, the impedance change of the back-end chamber caused by the RF filter can be approximately ignored. Furthermore, the attenuation at 2MHz and 13.56MHz exceeds 60dB, meaning that when the RF current is 10A, the leakage current of the RF filter to ground is less than 10mA.

[0050] Furthermore, one can refer to Figure 1 The native inductor 100 includes a grounded housing 500, and a rectangular annular magnetic core 300 is located inside the grounded housing 500; one end of the native capacitor 200 is connected to the grounded housing 500. Thus, the grounded housing 500 can protect the native inductor 100 and the native capacitor 200 while fulfilling the corresponding grounding requirements, allowing for a more compact structure.

[0051] Furthermore, the native inductor 100 includes: a single ring-shaped magnetic core 300 and two sets of inductor coils, and the native capacitor 200 is multiple;

[0052] One of the two sets of inductor coils is wound around one side of the annular magnetic core 300, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the annular magnetic core 300.

[0053] The first ends of the two sets of inductor coils are respectively connected to the filter input terminals, and the second ends of the two sets of inductor coils are respectively connected to each of the original capacitors 200.

[0054] One set of the two sets of inductor coils is wound on one side of the toroidal magnetic core 300, and the other set of the two sets of inductor coils is symmetrically wound on the other side of the toroidal magnetic core 300, as can be seen from... Figure 1 One set of the two sets of inductor coils is wound on the left side of the toroidal core 300, and the other set is symmetrically wound on the right side of the toroidal core 300.

[0055] The two sets of inductor coils have identical structures. The first end of each set of inductor coils is connected to the filter input terminal, and the second end of each set of inductor coils is connected to the respective native capacitor 200. That is, one end of each set of inductor coils is connected to the filter input terminal, and each inductor coil in each set is connected to the corresponding native capacitor 200.

[0056] Specifically, you can refer to Figure 5 The two sets of inductor coils have the same number of turns but are wound in opposite directions. This avoids generating interference signals themselves.

[0057] In an optional embodiment of the present invention, each of the two sets of inductor coils includes N inductor coils, which are insulated from each other and wound together; wherein N is a positive integer not less than 1.

[0058] N is a positive integer not less than 1; such as 1, 2, 3, 4, etc., which can be set according to requirements, and this embodiment of the invention does not impose any limitations. For inductors, refer to... Figure 5 Each group has N inductor coils wound around one side of the same single toroidal magnetic core 300. The two groups each have N inductor coils wound around opposite sides of the single toroidal magnetic core 300.

[0059] For a native inductance of 100, an inductor with a toroidal core of 300 can be used. For the same inductance value, the toroidal core inductor has a relatively smaller volume compared to an air-core inductor because the permeability of air is much lower than that of ferromagnetic materials. For a uniform, constant magnetic field, according to Ampere's circuital law and Gauss's law: It can be calculated Where B is the magnetic flux density, ψ is the magnetic flux, N is the number of turns of the inductor, S is the cross-sectional area of ​​the magnetic flux, μ is the permeability, l is the length of the inductor, L is the inductance, and I is the current. Under the same conditions of number of turns, length, and cross-section, L is directly proportional to μ, and materials with higher permeability are more likely to produce larger inductances. To obtain the same inductance value, the volume of a magnetic core inductor can be made smaller than that of an air core inductor. That is, the three-dimensional dimensions of a filter made of a magnetic core inductor can be made very small. One set of inductor wires in two sets of inductors is wound around the first side of a single toroidal magnetic core 300; the other set of inductor wires is wound around the second side of the single toroidal magnetic core 300. For example, as... Figure 6 The magnetic core inductor contains 8 channels. Among them, the inductor coil adopts a common mode inductor, and the inductor wires of the four channels are first twisted together like "twisting a rope" to form a strand, and then wound around the first side of a single ring magnetic core 300.

[0060] In an optional embodiment of the present invention, the annular magnetic core 300 is a rectangular annular magnetic core 300;

[0061] The rectangular annular magnetic core 300 is enclosed by two opposing first magnetic rods 310 and two opposing second magnetic rods 320.

[0062] One of the two sets of inductor coils is wound around one of the two first magnetic rods 310; the other set of the two sets of inductor coils is wound around the other of the two first magnetic rods 310.

[0063] In this embodiment of the invention, the annular magnetic core 300 can be a rectangular annular magnetic core 300, which includes two opposing first magnetic rods 310 and two opposing second magnetic rods 320 enclosing each other, with the first magnetic rods 310 and the second magnetic rods 320 forming a magnetic ring. Figure 5 As shown, the rectangular ring magnetic core 300, that is, the magnetic ring includes a first magnetic rod 310 (magnetic rod I) and a second magnetic rod 320 (magnetic rod II), and the first magnetic rod 310 and the second magnetic rod 320 surround each other to form a magnetic core.

[0064] One set of inductor coils is wound around one of the two first magnetic rods 310, while the other set is wound around the other of the two second magnetic rods 320. This confines the magnetic circuit within the magnetic ring, reducing magnetic leakage. The filter housing 500 (boundary) has minimal impact on the filtering performance of the filter circuit, thus resolving electromagnetic compatibility issues.

[0065] Wherein, the length of the first magnetic rod 310 is greater than the length of the second magnetic rod 320, such as Figure 5 As shown, the length of the first magnetic rod 310 is greater than that of the second magnetic rod 320, forming a rectangular annular magnetic core 300. The distance between the first magnetic rod 310 and the grounded outer shell 500 is greater than 30 mm to avoid interference.

[0066] Furthermore, considering the risk of air breakdown between the high-voltage terminals of components and ground under high voltage conditions, the insulation distance between the high-voltage terminals and ground is greater than 30mm. Therefore, the RF filter with this design can withstand voltages exceeding 3KV. Figure 5 As shown, if the current in the coil is along direction i in the diagram, then the main magnetic flux is along... Figure 5 The direction of Φ in the middle confines the magnetic field inside the magnetic ring, reducing magnetic leakage. In practical applications, an AC (alternating current) heating power supply is used, with a maximum allowable current of 20A (amps). This is based on the relationship between resistivity, power, and resistance. and P=I 2 R), where R is resistance, ρ is resistivity, L is length, S is area, P is power, and I is current.

[0067] The single-channel inductor uses copper enameled wire with a diameter of 1.6mm to 2.5mm. The inductance L, coil N, and inductance coefficient A are used as the reference values. L The relationship between L=A L N 2 The selected magnetic core has an inductance coefficient of 100nH / turn and an inductance value of 40uH, so the number of coil turns can be calculated to be greater than 20 turns.

[0068] For a uniform and constant magnetic field, according to Faraday's law of electromagnetic induction and Ampere's circuital law: ∮B·dl=μNI, where A is the magnetic flux cross-sectional area (i.e., the cross-section of the magnetic core; in this example, the cross-section of the magnetic core is rectangular), and N is the number of turns of the inductor coil, which can be approximately estimated. If the magnetic induction intensity B = 20 Gs, V0 = 3 kV, and N = 20, then 8.8 cm can be calculated. -2 <A<12.5cm -2 This is because the cross-section of the magnetic core is less than 8.8 cm. -2 At that time, the risk of core heat is greater, and considering that the filter size cannot be too large (it can meet the wave requirements while keeping the filter size relatively small).

[0069] The rectangular annular magnetic core 300 also includes:

[0070] The resin adhesive 400 is located between the first magnetic rod 310 and the second magnetic rod 320; the cross-sections of the first magnetic rod 310 and the second magnetic rod 320 are rectangular.

[0071] Due to the inherent characteristics of magnetic materials, it is difficult to achieve consistency even with the same magnetic material (affected by factors such as compositional consistency, sintering density, and magnet orientation consistency). In the example, the rectangular magnetic ring can be made by bonding four cylindrical magnetic rods with rectangular cross-sections together, with the bonding part using resin glue 400 (or by increasing the hollow gap, etc.). This method can reduce the influence of the magnetic material on the inductance value, thereby making the magnetic material more consistent, which further improves the consistency between multiple filters.

[0072] Alternatively, a gap may be provided between the first magnetic rod 310 and the second magnetic rod 320, and the gap may be increased in a certain way.

[0073] According to Ampere's circuital law for n segments of different types of magnetic media connected in series, assuming each segment has a uniform cross-section, then the integral along any closed curve... Let the current in the entire circuit be denoted as I, and the permeabilities of the magnetic material and the added resin glue 400 be denoted as μ0 and μ2, respectively. Assuming that the magnetic induction intensity B is continuous in both media, the above formula can be transformed into: Where d and l are the equivalent integral paths of the magnetic material and the resin adhesive 400, respectively. The magnetic flux density can be obtained from the above equation. Where μ r1 and μ r2 Here, μ0 represents the relative permeability of the magnetic material and the resin adhesive 400, respectively, and μ0 represents the vacuum permeability. If resin bonding is not used, the above equation becomes: Comparing B0 and B, it can be found that the magnetic induction intensity B after adding resin glue 400 is less affected by the magnetic material.

[0074] Furthermore, the first magnetic rod 310 has a relative permeability of 20-40; or the second magnetic rod 320 is made of a material with a relative permeability of 20-40. For example, an iron-nickel alloy with a relative permeability of 30.

[0075] The first magnetic rod 310 has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or

[0076] The second magnetic rod 320 has a rectangular cross-section, with a length ranging from 2-5 cm and a width ranging from 1.5-3 cm. The cross-section can be referenced... Figure 7 The long end of the rectangle is the length, and the short end is the width.

[0077] Furthermore, the length of the resin adhesive 400 is the same as the cross-sectional width of the second magnetic rod 320, so that the resin adhesive 400 can be flush with the second magnetic rod 320 within the rectangular annular magnetic core 300. The thickness of the resin adhesive 400 ranges from 0.1 to 0.5 cm.

[0078] For example, the relevant parameters are shown in Table 1 in one example:

[0079]

[0080] Assuming a current of 10A, using the parameters in Table 1, we can calculate Table 2, showing the effect of changing the relative permeability of the magnetic rod (i.e., changing the magnetic material) on the magnetic induction intensity. Here, Δ represents the difference in magnetic induction intensity calculated under relative permeability conditions of 50 and 30. By comparing the Δ values, we can see that the effect of adding resin 400 on the change in the relative permeability of the magnetic material on the magnetic induction intensity is greatly reduced. Of course, the magnetic induction intensity is relatively greater without resin, so the required technical parameters can be achieved by adjusting the material type and geometry of resin 400. For example, to increase the magnetic induction intensity, the width of resin 400 can be reduced from 0.25cm to 0.125cm; for Table 2, with a relative permeability of 50, B = 2.23Gs (Gauss) can be calculated. Alternatively, the resin material can be changed to one with higher permeability, which can also increase the magnetic induction intensity. In other words, by adding resin 400 or increasing the air gap, key technical parameters can be flexibly adjusted to achieve our desired results. Specifically, Table 1 shows the recommended optimal parameters for the rectangular magnetic ring. Considering air breakdown and heat dissipation, the distance between the two magnetic rods I on the left and right is recommended to be greater than or equal to 3cm. Considering the magnitude of the magnetic induction intensity, the width of the resin glue 400 is recommended to be less than or equal to 0.25cm.

[0081]

[0082] As can be seen from the above analysis, the RF filter of this embodiment adopts a resonant circuit, which can reduce the geometric size of the filter while meeting the dual-band filtering requirements. Furthermore, the use of a rectangular magnetic ring inductor can significantly reduce the three-dimensional size of the filter, and this magnetic ring structure can confine the magnetic field inside the ring, reducing leakage flux and solving electromagnetic compatibility issues. The use of differential-mode inductors avoids the generation of opposite magnetic fields in the inductor coils wound in the same phase when DC current flows through, thus preventing them from canceling each other out and suppressing the differential-mode signal while enhancing the common-mode signal. Considering hysteresis loss and eddy current loss, strict limitations are placed on the selection of magnetic materials and inductor coils, allowing the filter to withstand voltage and current of 3KV and 20A, respectively. In addition, by using resin glue 400 or air gaps to add to the magnetic ring, the influence of magnetic materials on the entire filter is relatively small, thereby improving the filter's stability.

[0083] In an alternative embodiment of the invention, the single annular magnetic core 300 is made of a soft magnetic material.

[0084] Considering the hysteresis loss of ferromagnetic materials in alternating magnetic fields, there is a risk of heat (i.e., the ferromagnetic material will be repeatedly magnetized along the hysteresis loop, and the magnetization process consumes energy, which is released from the ferromagnetic material as heat). Furthermore, the hysteresis loss is proportional to the area enclosed by the hysteresis loop. Therefore, to avoid heat problems, the inductor core in this technical solution needs to be made of a ferromagnetic material with a narrow hysteresis loop, i.e., a soft magnetic material, and the permeability should be as low as possible. Figure 8 The experimental results show the temperature rise of magnetic cores under relative permeability conditions of 30 and 300. It can be observed that the core with a relative permeability of 30 maintains a relatively stable temperature of around 40℃, while the core with a relative permeability of 300 exhibits a significant heating effect, indicating severe hysteresis loss. Long-term use may lead to a substantial decrease in the core permeability, further affecting the filter's performance. Therefore, it is recommended to select magnetic materials with a relative permeability of 20–40 for inductor cores.

[0085] The radio frequency filter of this invention utilizes a single-stage harmonic filter circuit and employs a toroidal magnetic core inductor. This increases the inductor's self-resonance, ensuring the filtering of dual radio frequency signals while reducing the filter's three-dimensional size, saving space and meeting current miniaturization requirements. The rectangular toroidal magnetic core inductor confines the magnetic field within the magnetic ring, reducing magnetic leakage and resolving electromagnetic compatibility issues. Furthermore, considering hysteresis and eddy current losses, strict limitations are placed on the selection of magnetic materials and inductor coils, allowing the filter's withstand voltage to be increased to 3KV and its withstand current to 20A. Additionally, resin adhesive or heated air gaps are used at the magnetic rod bonding points. By adjusting the geometry of the resin adhesive or changing the type of resin adhesive (i.e., using resin adhesives with different permeabilities), differences in filtering performance due to variations in magnetic materials can be reduced, thereby improving the consistency between different filters.

[0086] This invention discloses a carrier device, including a chuck body, a power supply, and a radio frequency filter as described above;

[0087] The chuck body has at least one electrode, and the radio frequency filter is connected between the electrode and the power supply.

[0088] In this embodiment of the invention, a radio frequency filter connects the electrodes and the operating power supply, filtering the signal emitted by the operating power supply before sending it to the electrodes. That is, the operating power supply can energize the electrodes in the chuck body, and the electrodes, based on the electromagnetic force generated by the energization, perform corresponding processing on the items to be carried.

[0089] Furthermore, the operating power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or,

[0090] The working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

[0091] In a specific example, when the working power source is a heating power source and the electrode is at least one heating electrode in the heating layer of the chuck body, the heating electrode heats the item to be carried on the chuck body when the heating power source supplies power to the heating electrode.

[0092] When the working power source is an adsorption power source and the electrode is at least one adsorption electrode in the heating layer of the chuck body, the adsorption electrode adsorbs and fixes the item to be carried on the chuck body when the adsorption power source supplies power to the adsorption electrode.

[0093] You can refer to Figure 9The RF filter, connected to the operating power supply (AC / DC heating power supply) and the chuck body, is divided into eight channels, each connected to a heating wire in zone four of the chuck body (ESC). Channels 1 and 8 form a loop acting on zone IV of the ESC; channels 2 and 7 form a loop acting on zone III of the ESC; and so on, forming four loops acting on the four zones of the ESC.

[0094] It should be noted that, for the sake of simplicity, the above embodiments are all described as a series of actions. However, those skilled in the art should understand that the embodiments of the present invention are not limited to the described order of actions, because according to the embodiments of the present invention, some steps can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions involved are not necessarily essential to the embodiments of the present invention.

[0095] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0096] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, apparatus, or computer program products. Therefore, embodiments of the present invention can take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, embodiments of the present invention can take the form of computer program products implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0097] This invention is described with reference to flowchart illustrations and / or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0098] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing terminal device to operate in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0099] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal equipment, causing a series of operational steps to be performed on the computer or other programmable terminal equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable terminal equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0100] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present invention.

[0101] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0102] The present invention has been described in detail above. Specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only for the purpose of helping to understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A radio frequency filter, characterized in that, include: Native inductors and native capacitors, The first end of the native inductor is used to connect to the filter input terminal, the second end of the native inductor is connected to the first end of the native capacitor as the filter output terminal, the second end of the native capacitor is used to ground, and the native inductor and the native capacitor are used together to filter out the first target frequency; The native inductor includes a multi-turn coil with the same turn spacing, the turn spacing being adjusted to a predetermined value to filter out a second target frequency, which is greater than the first target frequency.

2. The radio frequency filter according to claim 1, characterized in that, The native inductor includes: a single ring-shaped magnetic core and two sets of inductor coils; the native capacitor is multiple. One of the two sets of inductor coils is wound around one side of the toroidal magnetic core, and the other set of the two sets of inductor coils is symmetrically wound around the other side of the toroidal magnetic core. The first ends of the two sets of inductor coils are used to connect to the filter input terminals respectively, and the second ends of the two sets of inductor coils are connected to each of the original capacitors respectively.

3. The radio frequency filter according to claim 2, characterized in that, The two sets of inductor coils have the same number of turns but are wound in opposite directions.

4. The radio frequency filter according to claim 2, characterized in that, Each of the two groups of inductor coils includes N inductor coils, which are insulated from each other and wound together; where N is a positive integer not less than 1.

5. The radio frequency filter according to any one of claims 2-3, characterized in that, The ring-shaped magnetic core is a rectangular ring-shaped magnetic core; The rectangular annular magnetic core is enclosed by two opposing first magnetic rods and two opposing second magnetic rods; One of the two sets of inductor coils is wound around one of the two first magnetic rods; the other set of the two sets of inductor coils is wound around the other of the two first magnetic rods.

6. The radio frequency filter according to claim 4, characterized in that, The length of the first magnetic rod is greater than the length of the second magnetic rod; or The first magnetic rod has a rectangular cross-section, with a length ranging from 10-15 cm and a width ranging from 2-3.5 cm; or The second magnetic rod has a rectangular cross-section, with a length ranging from 2-5 cm and a width ranging from 1.5-3 cm; or The relative permeability of the first magnetic rod is 20-40; or The relative permeability of the second magnetic rod is 20-40.

7. The radio frequency filter according to claim 4, characterized in that, The rectangular annular magnetic core further includes: a resin adhesive located between the first magnetic rod and the second magnetic rod; or A gap is provided between the first magnetic rod and the second magnetic rod.

8. The radio frequency filter according to claim 7, characterized in that, The length of the resin adhesive is the same as the cross-sectional width of the second magnetic rod, and the thickness of the resin adhesive ranges from 0.1 to 0.5 cm.

9. The radio frequency filter according to claim 4, characterized in that, The native inductor includes a grounded casing. The rectangular annular magnetic core is located inside the grounded outer casing; One end of the native capacitor is connected to the grounded outer casing.

10. The radio frequency filter according to claim 9, characterized in that, The distance between the first magnetic rod and the grounded outer shell is greater than 30 mm.

11. A supporting device, characterized in that, Includes a chuck body, a power supply, and an RF filter as described in any one of claims 1-10; The chuck body has at least one electrode, and the radio frequency filter is connected between the electrode and the power supply.

12. The bearing device according to claim 11, characterized in that, The operating power source is a heating power source, and the electrode is at least one heating electrode in the heating layer of the chuck body; or, The working power source is an adsorption power source, and the electrode is at least one adsorption electrode.

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