Chemical mechanical polishing apparatus and method for additive manufacturing lattice skin parts

Abstract

This invention discloses a chemical mechanical polishing (CMP) apparatus for additive manufacturing lattice skin components, comprising two vertical wall plates, a slide table moving along the Y-axis, a slide saddle moving along the X-axis, a slide ram moving vertically along the Z-axis, a double swing head, a clamp driver, a flexible clamp, a bed, and a polishing barrel assembly. The double swing head drives the clamp driver to rotate around the Z-axis and swing around the X-axis; the clamp driver drives the flexible clamp to rotate; the flexible clamp is used to grip the component; the polishing barrel assembly has a rotatable polishing barrel containing polishing fluid; during polishing, the flexible clamp grips the component and immerses it in the polishing fluid in the polishing barrel, with the rotation direction of the flexible clamp opposite to the rotation direction of the polishing barrel. This invention can improve the polishing efficiency and quality of additive manufacturing lattice skin components. This application also discloses a CMP method for additive manufacturing lattice skin components, enabling the polishing of additive manufacturing lattice skin components using CMP equipment.

Description

Technical Field

[0001] This invention relates to the field of metal manufacturing polishing technology, and in particular to a chemical mechanical polishing equipment and method for additive manufacturing lattice skin parts. Background Technology

[0002] With the continuous development of the industrial manufacturing sector, the requirements for the surface roughness of additively manufactured lattice skin components are becoming increasingly stringent. This not only affects the appearance quality of the product but also directly impacts its performance, corrosion resistance, and lifespan. Therefore, polishing technology for additively manufactured lattice skin components has become an important technology in the manufacturing industry.

[0003] Additively manufactured lattice skin components possess high rigidity, lightweight, and complex structure, making them widely used in high-precision fields such as aerospace, shipbuilding, automotive, and electronic equipment. Surface defects directly affect the product's lifespan, mechanical properties, and overall performance. While traditional polishing methods such as hand grinding and mechanical wheel polishing can improve the roughness of additively manufactured lattice skin components to some extent, their inherent characteristics still result in polishing dead spots, poor polishing roughness precision, and uneven polishing. Furthermore, they cannot remove structural defects such as "semi-molten powder," "powder adhesion," and "sintering nodules" on the inner and outer surfaces of the components.

[0004] Existing polishing methods severely restrict the promotion and use of additive manufacturing lattice skin components, making it difficult to meet the needs of various industries. In order to obtain high-quality additive manufacturing lattice skin components and improve polishing efficiency, it is necessary to design a new device to improve the grinding and polishing efficiency and quality of additive manufacturing lattice skin components. Summary of the Invention

[0005] This invention provides a chemical mechanical polishing equipment and method for additive manufacturing lattice skin parts to solve the above-mentioned technical problems.

[0006] To achieve the above objectives, the technical solution of the present invention is as follows: A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts includes: two opposing vertical wall plates, a slide table that moves along the Y-axis direction and is mounted on the top of the two vertical wall plates, a slide saddle that moves along the X-axis direction and is mounted on the slide table, a slide ram that moves vertically along the Z-axis direction and is mounted on the slide saddle, a double swing head mounted on the slide ram, a clamping driver mounted on the double swing head, a flexible clamp mounted on the clamping driver, a bed fixed between the two vertical wall plates, and a polishing barrel component mounted on the bed. The double swivel head drives the clamp driver to rotate around the Z-axis and oscillate around the X-axis; The clamp driver drives the flexible clamp to rotate around its own axis; Flexible clamps are used to grip components; The polishing bucket component has a rotatable polishing bucket containing polishing liquid; During polishing, the flexible clamp holds the component and immerses it in the polishing liquid in the polishing barrel. The rotation direction of the flexible clamp is opposite to the rotation direction of the polishing barrel.

[0007] Preferably, the flexible clamp and the polishing barrel rotate synchronously in opposite directions.

[0008] Preferably, the flexible clamp includes: a shell, an annular air capsule, several metal sheets, and a reset assembly corresponding to each of the metal sheets. The annular air capsule is disposed in the inner cavity of the shell, and the several metal sheets are disposed in the central hole of the annular air capsule and arranged layer by layer from the inside to the outside, with each layer of metal sheets arranged in an annular array. The reset assembly is used for the metal sheets to float independently along the axis of the shell.

[0009] Preferably, the flexible fixture further includes a limiting plate, on which a plurality of guide grooves are formed, and the plurality of guide grooves are arranged in a circular array; the limiting plate is located in the inner cavity of the outer shell and below the annular air bladder, and the corresponding metal sheets of each layer are inserted into the same guide groove and arranged radially along the outer shell, and the thickness of the metal sheets matches the width of the guide groove; the reset assembly is located between the limiting plate and the inner bottom of the outer shell.

[0010] Preferably, the reset assembly is a miniature piston or elastic element. The metal sheet is subjected to axial pressure, causing the reset assembly to contract. After the axial pressure is removed, the reset assembly extends to reset the metal sheet.

[0011] Preferably, it also includes an ultrasonic vibration system, which includes an ultrasonic transducer and an ultrasonic generator. The housing is connected to the output shaft of the clamp driver via a connecting shaft. The ultrasonic transducer is disposed on the housing and located between the clamp driver and the housing.

[0012] Preferably, there are at least two ultrasonic transducers, which are evenly distributed around the connecting shaft.

[0013] Preferably, the polishing barrel component includes: a polishing barrel, a barrel rotating shaft, a slewing bearing, a transmission assembly, and a barrel drive motor. The barrel rotating shaft is coaxially fixed to the bottom of the polishing barrel, and the barrel rotating shaft is rotatably connected to the bed through the slewing bearing. The barrel drive motor drives the barrel rotating shaft and the polishing barrel to rotate through the transmission assembly.

[0014] Preferably, it also includes an intelligent heating system, which includes a heating module and a temperature sensor. The heating module is installed on the outer wall of the polishing barrel and heats the polishing barrel, while the temperature sensor is used to detect the temperature of the polishing liquid in the polishing barrel.

[0015] A chemical mechanical polishing method for additive manufacturing lattice skin parts includes the following steps: S1. Install the flexible fixture onto the fixture driver and clamp the component onto the flexible fixture; S2. Control the double swing head to drive the clamp driver to rotate around the Z-axis and swing around the X-axis to adjust the posture of the component; then control the movement of the slide, saddle, and ram to immerse the flexible clamp and the component in the polishing liquid in the polishing bucket. S3. Control the fixture driver to drive the flexible fixture and component to rotate, and control the polishing barrel to rotate in the opposite direction; S4. After a preset time, the fixture driver switches the rotation direction, and the polishing barrel also switches the rotation direction. S5. Repeat steps S3 and S4 until the polishing accuracy meets the requirements, then stop polishing and remove the component. If there are dead angles in the polishing, control the double swing head to adjust the posture of the component and repeat steps S3 and S4 until the polishing is qualified.

[0016] Beneficial effects: First, the chemical mechanical polishing (CMP) equipment disclosed in this application for additive manufacturing lattice skin parts achieves linear motion in the X, Y, and Z axes by setting up a vertical wall plate, a sliding table, a sliding saddle, and a sliding ram; then, it achieves rotation around the Z axis and oscillation around the X axis by setting up a double swing head; furthermore, it uses a fixture driver to drive a flexible fixture to rotate, using the flexible fixture to clamp the structurally complex component; the above-mentioned driving structure adjusts the spatial position and spatial posture of the component to ensure that the component is in the optimal polishing position, meeting the requirements of high-precision displacement control. A polishing barrel component is also set on the bed, and the polishing barrel rotates; the polishing barrel and the fixture driver are set to rotate in opposite directions, and the polishing fluid forms a fluid vortex in the polishing barrel. The component and the polishing barrel form a motion vector angle, creating a flow field with a certain velocity and dynamic change. The fluid drives the abrasive particles to move, and the surface roughness peaks of the workpiece are removed through the flow pressure and shear removal action. In summary, the CMP equipment of this application can improve the polishing efficiency and polishing quality of additive manufacturing lattice skin components.

[0017] Second, the chemical mechanical polishing method disclosed in this application for additive manufacturing lattice skin parts can use chemical mechanical polishing equipment to polish additive manufacturing lattice skin parts, avoiding polishing dead spots, poor polishing roughness precision, uneven polishing, and can remove structural defects such as "semi-molten powder", "powder sticking" and "sintering nodules" on the inner and outer surfaces of the parts. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 2 This is a schematic diagram of the structure behind the cabinet door of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 1 ; Figure 3 This is a schematic diagram of the structure behind the cabinet door of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 2 ; Figure 4 This is a front view of the hidden cabinet door of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 5 This is a schematic diagram of the structure of a flexible fixture for a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, as disclosed in this invention. Figure 1 ; Figure 6 This is a schematic diagram of the structure of a flexible fixture for a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, as disclosed in this invention. Figure 2 ; Figure 7 This is a bottom view of a flexible fixture for a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, as disclosed in this invention. Figure 8 This is a cross-sectional view of a flexible fixture for a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, as disclosed in this invention. Figure 9 for Figure 8 A magnified view of part I; Figure 10 This is a schematic diagram of the bed and polishing barrel assembly of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 11 This is a cross-sectional view of the bed and polishing barrel assembly of a chemical mechanical polishing equipment for additive manufacturing lattice skin parts disclosed in this invention. Figure 12 This invention discloses a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, comprising a slide, a double swing head, a clamping driver, and a flexible clamping assembly. Figure 1 ; Figure 13 This invention discloses a chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, comprising a slide, a double swing head, a clamping driver, and a flexible clamping assembly. Figure 2 .

[0020] In the diagram: 1. Vertical wall panel; 2. Slide table; 3. Slide saddle; 4. Slide bolster; 5. Double swing head; 6. Fixture driver; 7. Flexible fixture; 71. Housing; 72. Annular air sac; 73. Metal sheet; 74. Reset assembly; 8. Bed; 9. Polishing barrel assembly; 91. Polishing barrel; 92. Barrel rotation shaft; 93. Slewing bearing; 94. Transmission assembly; 95. Barrel drive motor; 10. Ultrasonic vibrator; 20. Heating module. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Example 1 A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, combined with Figures 1-13 As shown, it includes: two opposing wall panels 1, a slide table 2 that moves along the Y-axis and is mounted on the top of the two wall panels 1, a slide saddle 3 that moves along the X-axis and is mounted on the slide table 2, a slide bolster 4 that moves vertically along the Z-axis and is mounted on the slide saddle 3, a double swing head 5 mounted on the slide bolster 4, a clamping driver 6 mounted on the double swing head 5, a flexible clamp 7 mounted on the clamping driver 6, a bed 8 fixed between the two wall panels 1, and a polishing barrel component 9 mounted on the bed 8; the X-axis and Y-axis are perpendicular to each other and are horizontal, and the Z-axis is perpendicular to the X-axis and Y-axis.

[0023] The double swing head 5 drives the clamp driver 6 to rotate around the Z-axis (i.e., the rotation axis C-axis) and swing around the X-axis (i.e., the rotation axis A-axis). The clamp driver 6 drives the flexible clamp 7 to rotate around its own axis; Flexible clamp 7 is used to clamp components; The polishing bucket 91 of the polishing bucket component 9 is rotatable and contains polishing liquid; During polishing, the flexible clamp 7 grips the component and immerses it in the polishing liquid in the polishing barrel 91. The rotation direction of the flexible clamp 7 is opposite to the rotation direction of the polishing barrel 91.

[0024] This application achieves linear motion in the X, Y, and Z axes by setting up a vertical wall plate 1, a sliding table 2, a sliding saddle 3, and a sliding ram 4; it also achieves rotation around the Z axis and oscillation around the X axis by setting up a double swing head 5; and it uses a clamping driver 6 to drive a flexible clamp 7 to rotate, which clamps the structurally complex components. The above driving structure adjusts the spatial position and attitude of the components, ensuring they are in the optimal polishing position and meeting high-precision displacement control requirements. A polishing barrel component 9 is set on the bed 8, and its polishing barrel 91 rotates. The polishing barrel 91 and the clamping driver 6 are set to rotate in opposite directions, forming a fluid vortex in the polishing barrel 91. The component and the polishing barrel 91 form a motion vector angle, creating a flow field with a certain velocity and dynamic change. The fluid drives the abrasive particles to move, and the surface roughness peaks of the workpiece are removed through flow pressure and shear removal. In summary, the chemical mechanical polishing equipment of this application can improve the polishing efficiency and quality of additive manufacturing lattice skin components.

[0025] Specifically, the two ends of the slide table 2 are respectively mounted on the top of the two vertical wall plates 1 via linear guides and ball screw modules; the slide saddle 3 is vertically mounted on the front side of the slide table 2 and is suspended on the front side of the slide table 2 via linear guides and ball screw modules; the slide ram 4 is located on the front side of the slide saddle 3 and is suspended on the front side of the slide saddle 3 via linear guides and ball screw modules, and the slide ram 4 extends forward to provide a larger free rotation space after the double swing head 5 is installed. The clamp driver 6 is mounted on the end of the double swing head 5, and includes a connecting seat, a drive motor, and a reducer, for connecting the flexible clamp 7 and driving the flexible clamp 7 to rotate. This application forms a transmission chain structure of "five-axis system - main spindle - flexible clamp".

[0026] Preferably, the flexible clamp 7 and the polishing barrel 91 rotate synchronously in opposite directions, and the motion control is uniformly coordinated by the control system to ensure the matching of motion parameters and the coordination of actions of each component.

[0027] Preferably, the flexible clamp 7 includes: a housing 71, an annular air sac 72, a plurality of metal sheets 73, and a reset assembly 74 corresponding to each of the metal sheets 73. The annular air sac 72 is disposed in the inner cavity of the housing 71, and the plurality of metal sheets 73 are disposed in the central hole of the annular air sac 72 and arranged layer by layer from the inside to the outside, with each layer of metal sheets 73 arranged in a ring array. The reset assembly 74 is used for the metal sheets 73 to float independently along the axis of the housing 71. The metal sheets 73 are slender, high-rigidity, and smooth-surfaced metal sheets (thickness 1-2 mm), and the plurality of metal sheets 73 are arranged closely together. In the free state, under the action of the reset assembly 74, the metal sheets 73 extend to the front opening position of the housing 71, and the metal sheets 73 are loosely arranged. In the clamped state, the component is pushed in through the front opening of the outer shell 71, and the metal sheet 73, which is in axial contact with the component's contour, is pushed back, forming a three-dimensional negative mold that perfectly fits the component's shape. A radial force is applied from the periphery through the annular air sac 72. The friction and mutual compression between the metal sheets 73 form a rigid body, generating a uniform clamping force to clamp the component, providing a 360° uniform clamping force even for asymmetrical parts. The flexible fixture 7 of this application uses metal sheets 73 instead of continuous jaws or elastic sleeves, theoretically allowing it to fit any complex shape (i.e., non-rotating bodies, those with bosses, and irregular curved surfaces are all applicable). The flexible fixture 7 switches between a free state and a clamped state, possessing both flexible and rigid clamping forces, overcoming the limitations of insufficient clamping force in traditional flexible fixtures. Furthermore, the metal sheets 73 can be quickly replaced while the outer shell 71 and the annular air sac 72 remain unchanged, achieving cross-scale compatibility from precision micro-parts to heavy large workpieces. After the annular bladder 72 is depressurized, the metal sheet 73 resumes free movement, allowing the parts to be easily removed.

[0028] Preferably, the flexible clamp 7 further includes a limiting plate, on which a plurality of guide grooves are formed, and the plurality of guide grooves are arranged in a circular array; the limiting plate is located in the inner cavity of the outer shell 71 and below the annular air sac 72, and the corresponding metal sheets 73 of each layer are inserted into the same guide groove and arranged radially along the outer shell 71, and the thickness of the metal sheets 73 matches the width of the guide groove; the reset assembly 74 is located between the limiting plate and the inner bottom of the outer shell 71.

[0029] The core principle of existing flexible clamps (such as soft grippers and pneumatic clamps) is "overall flexible deformation." Although the clamping force is uniform, the clamping stiffness is low, making it difficult to withstand large cutting forces. This application adopts a dual-state switching form of "discrete thin sheet bundle + peripheral pneumatic clamping," which allows the metal sheet 73 to float independently and achieve adaptive fitting during clamping. After locking, the peripheral pressure makes the metal sheet 73 a rigid body to withstand larger cutting forces.

[0030] Preferably, the reset assembly 74 is a miniature piston or an elastic element. The metal sheet 73 is subjected to axial pressure, causing the reset assembly 74 to contract. After the axial pressure is removed, the reset assembly 74 extends to reset the metal sheet 73.

[0031] Preferably, the system further includes an ultrasonic vibration system, which comprises an ultrasonic transducer 10 and an ultrasonic generator. The housing 71 is connected to the output shaft of the clamp driver 6 via a connecting shaft 75. The ultrasonic transducer 10 is mounted on the housing 71 and located between the clamp driver 6 and the housing 71. During the polishing process, the ultrasonic vibration system provides an ultrasonic vibration energy field, which enhances the abrasive activity and removal efficiency, significantly improving the polishing effect.

[0032] Preferably, there are at least two ultrasonic transducers 10, which are evenly distributed around the connecting shaft 75. In this application, the ultrasonic transducers 10 are integrated into the flexible fixture 7, and the ultrasonic vibration acts directly on the metal sheet 73, causing micron-level high-frequency vibrations at the front end of the metal sheet 73, thus reducing the cutting force on the metal sheet 73. However, existing ultrasonic systems apply ultrasound to components or polishing fluids.

[0033] Existing adaptive fixtures rely on passive compression during workpiece insertion to achieve fit, resulting in gaps between the fixture and the component that cannot be eliminated even after locking. This application introduces ultrasonic vibration, where high-frequency micro-vibration induces a "micro-motion effect" at the front end of the metal sheet 73, actively pushing it to achieve a tight fit with the component contour—something impossible with passive compression alone. Simultaneously, the gaps in the metal sheet 73 are natural dead zones for chip accumulation, leading to decreased clamping accuracy and even jamming of the metal sheet 73. Ultrasonic vibration helps actively remove fine chips from these gaps, achieving a self-cleaning function during clamping. This application maintains ultrasonic vibration throughout the machining process, simultaneously providing "aided chip removal" and "reduced cutting force impact," achieving a fusion of clamping and machining functions. This deep synergy between the ultrasonic vibration system and the flexible fixture 7 results in superior polishing performance.

[0034] Preferably, the polishing barrel component 9 includes: a polishing barrel 91, a barrel rotation shaft 92, a slewing bearing 93, a transmission assembly 94, and a barrel drive motor 95. The barrel rotation shaft 92 is coaxially fixed to the bottom of the polishing barrel 91. The barrel rotation shaft 92 is rotatably connected to the bed 8 through the slewing bearing 93. The barrel drive motor 95 drives the barrel rotation shaft 92 and the polishing barrel 91 to rotate through the transmission assembly 94. The barrel drive motor 95 precisely controls the rotation direction and rotation speed of the polishing barrel 91.

[0035] Specifically, the barrel drive motor 95 is a servo motor, and the transmission component 94 is a belt drive. The polishing slurry can be formulated with different components depending on the material and structure of the component. The slurry contains abrasives, pH adjusters, corrosion inhibitors, complexing agents, and other weakly acidic and weakly alkaline green chemical components to improve polishing efficiency through chemical action. Each component is required to be environmentally friendly, free of strong acids and alkalis, and will not cause harm to the environment or human body. In this embodiment, the polishing abrasive particles in the slurry are relatively large, such as zirconium oxide, cerium oxide, white corundum, chromium corundum, brown corundum, single-crystal corundum, boron carbide, and silicon carbide. One or more abrasives are selected for polishing, and appropriate abrasive particle sizes are chosen to enhance the mechanical removal of protrusions on the surface of the additively manufactured lattice skin component.

[0036] Preferably, the system also includes an intelligent heating system, comprising a heating module 20 and a temperature sensor. The heating module 20 is disposed on the outer wall of the polishing tank 91 and heats the polishing tank 91. The temperature sensor is used to detect the temperature of the polishing liquid in the polishing tank 91. The temperature sensor is an infrared temperature sensor and is located on the upper side of the polishing tank 91. The intelligent heating system monitors the temperature of the polishing liquid in real time, achieving precise temperature control of the polishing liquid and improving the efficiency of the chemical reaction.

[0037] During the polishing process, based on the different properties of the components to be polished, the ultrasonic vibration system and intelligent heating system are controlled to set the corresponding ultrasonic vibration energy field and temperature field, thereby improving the abrasive activity and removal efficiency and significantly improving the polishing effect.

[0038] Specifically, a control system is also set up to control the equipment. The control system includes a transmission control module, a circuit control module, and a hydraulic control module. A touchscreen is provided for setting the motion of the five axes, the rotation of the clamp driver, the rotation of the polishing barrel, the ultrasonic vibration system, the intelligent heating system, and CNC programming. Operating handles are also provided for movement control of the X, Y, and Z axes and rotation control of the A and C axes. The control system also has monitoring and alarm functions, capable of real-time detection of motion and timely shutdown alarms for abnormal equipment operation.

[0039] Cabinet doors are installed on the front of the two wall panels 1, and cabinet panels are installed on the rear for safety protection and to prevent splashing. The electrical control cabinet is located on the rear side of the wall panel 1, and the touch screen is located on the right side of the front of the wall panel 1.

[0040] This application achieves automated polishing. Except for the manual clamping of components, all other actions can be controlled by pre-programmed procedures. This application couples chemical etching and mechanical removal, using a polishing slurry to oxidize and soften the surface material of the component. The component and the polishing slurry form a motion vector angle, and a fluid-assisted flexible loading mechanism allows the fluid to carry abrasive particles, impacting the component surface. This is further compounded by ultrasonic and thermal energy fields, ultimately forming a flat surface. Simultaneously, the fluid acts as a coolant and cleaner during the polishing process, preventing thermal impact.

[0041] This application utilizes a composite polishing technology combining five-axis attitude control, component and polishing barrel rotation direction control, chemical etching, mechanical polishing, ultrasonic vibration, and heating to achieve an ultra-precise smooth surface on components. It is flexible, versatile, and widely applicable, meeting the polishing needs of most complex additive manufacturing lattice skin components. It effectively solves current polishing problems such as polishing dead spots, poor polishing roughness accuracy, uneven polishing, and the inability to remove structural defects like "semi-molten powder," "powder adhesion," and "sintering nodules" on the inner and outer surfaces of additive manufacturing lattice skin components. Therefore, it can be widely promoted in the polishing of various additive manufacturing lattice skin components.

[0042] Example 2 This embodiment provides a polishing method using the method described in Embodiment 1, including the following steps: S1. Install the flexible clamp 7 onto the clamp driver 6, and clamp the component onto the flexible clamp 7; S2. Control the double swing head 5 to drive the clamp driver 6 to rotate around the Z-axis and swing around the X-axis to adjust the posture of the component; then control the movement of the slide table 2, slide saddle 3, and slide ram 4 to immerse the flexible clamp 7 and the component in the polishing liquid of the polishing bucket 91. S3. Control the clamp driver 6 to drive the flexible clamp 7 and the component to rotate, and control the polishing barrel 91 to rotate in the opposite direction; S4. After a preset time, the clamp driver 6 switches the rotation direction, and the polishing barrel 91 also switches the rotation direction. The specific preset time varies depending on the properties of the component to be polished. The specific time can be formed into a database through experiments, and the relevant parameters can be preset in the system. S5. Repeat steps S3 and S4 until the polishing accuracy meets the requirements, then stop polishing and remove the component. If there are dead angles in the polishing, control the double swing head 5 to adjust the posture of the component to eliminate the dead angles and improve the polishing efficiency. Then repeat steps S3 and S4 until the polishing is qualified.

[0043] This application enables the use of chemical mechanical polishing equipment to polish additively manufactured lattice skin components, avoiding polishing dead spots, poor polishing roughness precision, uneven polishing, and removing structural defects such as "semi-molten powder," "powder adhesion," and "sintering nodules" on the inner and outer surfaces of the components.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts, characterized in that, include: Two opposing wall panels (1), a slide table (2) that moves along the Y-axis and is located on the top of the two wall panels (1), a slide saddle (3) that moves along the X-axis and is located on the slide table (2), a slide bolster (4) that moves vertically along the Z-axis and is located on the slide saddle (3), a double swing head (5) located on the slide bolster (4), a clamp driver (6) located on the double swing head (5), a flexible clamp (7) located on the clamp driver (6), a bed (8) fixed between the two wall panels (1), and a polishing barrel component (9) located on the bed (8); The double swing head (5) drives the clamp driver (6) to rotate around the Z-axis and swing around the X-axis; The clamp driver (6) drives the flexible clamp (7) to rotate around its own axis; The flexible clamp (7) is used to clamp the component; The polishing barrel (91) of the polishing barrel component (9) is rotatable and contains polishing liquid; During polishing, the flexible clamp (7) grips the component and immerses it in the polishing liquid of the polishing barrel (91). The rotation direction of the flexible clamp (7) is opposite to the rotation direction of the polishing barrel (91).

2. The chemical mechanical polishing equipment for additive manufacturing lattice skin parts according to claim 1, characterized in that, The flexible clamp (7) and the polishing barrel (91) rotate synchronously in opposite directions.

3. A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts according to claim 1 or 2, characterized in that, The flexible clamp (7) includes: a shell (71), an annular air bladder (72), a plurality of metal sheets (73), and a reset assembly (74) corresponding to each of the metal sheets (73). The annular air bladder (72) is located in the inner cavity of the shell (71). The plurality of metal sheets (73) are located in the central hole of the annular air bladder (72) and are arranged layer by layer from the inside to the outside. Each layer of metal sheets (73) is arranged in an annular array. The reset assembly (74) is used to allow the metal sheets (73) to float independently along the axis of the shell (71).

4. The chemical mechanical polishing equipment for additive manufacturing lattice skin parts according to claim 3, characterized in that, The flexible clamp (7) also includes a limiting plate, which has several guide grooves arranged in a circular array. The limiting plate is located in the inner cavity of the outer shell (71) and below the annular air bladder (72). The corresponding metal sheets (73) of each layer are inserted into the same guide groove and arranged radially along the outer shell (71). The thickness of the metal sheets (73) matches the width of the guide groove. The reset assembly (74) is located between the limiting plate and the inner bottom of the outer shell (71).

5. The chemical mechanical polishing equipment for additive manufacturing lattice skin parts according to claim 4, characterized in that, The reset assembly (74) uses a miniature piston or elastic element. The metal sheet (73) is subjected to axial pressure, causing the reset assembly (74) to contract. After the axial pressure is removed, the reset assembly (74) extends to reset the metal sheet (73).

6. The chemical mechanical polishing equipment for additive manufacturing lattice skin parts according to claim 3, characterized in that, It also includes an ultrasonic vibration system, which includes an ultrasonic transducer (10) and an ultrasonic generator. The housing (71) is connected to the output shaft of the clamp driver (6) via a connecting shaft (75). The ultrasonic transducer (10) is disposed on the housing (71) and located between the clamp driver (6) and the housing (71).

7. A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts according to claim 6, characterized in that, There are at least two ultrasonic transducers (10), and the two ultrasonic transducers (10) are evenly distributed around the connecting shaft (75).

8. The chemical mechanical polishing equipment for additive manufacturing lattice skin parts according to claim 1, characterized in that, The polishing barrel component (9) includes: a polishing barrel (91), a barrel rotating shaft (92), a slewing bearing (93), a transmission assembly (94), and a barrel drive motor (95). The barrel rotating shaft (92) is coaxially fixed to the bottom of the polishing barrel (91). The barrel rotating shaft (92) is rotatably connected to the bed (8) through the slewing bearing (93). The barrel drive motor (95) drives the barrel rotating shaft (92) and the polishing barrel (91) to rotate through the transmission assembly (94).

9. A chemical mechanical polishing apparatus for additive manufacturing lattice skin parts according to claim 1, characterized in that, It also includes an intelligent heating system, which includes a heating module (20) and a temperature sensor. The heating module (20) is set on the outer wall of the polishing barrel (91) and heats the polishing barrel (91). The temperature sensor is used to detect the temperature of the polishing liquid in the polishing barrel (91).

10. A polishing method using the chemical mechanical polishing equipment for additive manufacturing lattice skin parts as described in any one of claims 1-9, characterized in that, Includes the following steps: S1. Install the flexible clamp (7) on the clamp driver (6) and clamp the component onto the flexible clamp (7); S2. Control the double swing head (5) to drive the clamp driver (6) to rotate around the Z-axis and swing around the X-axis to adjust the posture of the component; then control the movement of the slide table (2), slide saddle (3), and slide ram (4) to immerse the flexible clamp (7) and the component in the polishing liquid of the polishing bucket (91); S3. Control the clamp driver (6) to drive the flexible clamp (7) and the component to rotate, and control the polishing barrel (91) to rotate in the opposite direction; S4. After a preset time, the clamp driver (6) switches the rotation direction, and the polishing barrel (91) also switches the rotation direction. S5. Repeat steps S3 and S4 until the polishing accuracy meets the requirements, stop polishing, and remove the component; if there are dead angles in the polishing, control the double swing head (5) to adjust the posture of the component and then repeat steps S3 and S4 until the polishing is qualified.

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