A silicon ring step detection device

Abstract

This invention relates to the field of silicon carbide focusing ring inspection technology, and discloses a silicon ring step inspection device, comprising: a worktable; a clamping plate; a lifting assembly and a moving assembly; an inspection mechanism; a marking assembly and a mounting ring; and a second driving component, which is mounted on a base and drives the inspection mechanism to move along the silicon ring step. By setting a flexible lower conductive sheet to fit against the surface of the silicon ring step, and utilizing the resistance change caused by the change in contact area between the conductive wheel and the upper and lower conductive sheets to detect the flatness, a non-rigid contact scanning of the step surface is achieved. This effectively avoids the scratches and contamination that traditional contact measuring tools may cause to the high-precision polished surface, greatly reduces the risk of secondary damage to the focusing ring, and ensures its final service life and process performance.

Description

Technical Field

[0001] This invention relates to the field of silicon carbide focusing ring detection technology, and specifically to a silicon ring step detection device. Background Technology

[0002] In semiconductor manufacturing processes, especially plasma etching, the focusing ring is a key component placed around the substrate and surrounding the wafer. Typically, this focusing ring is made of silicon carbide (SiC) and has steps in its structure to support the wafer. During operation, the wafer is placed on these steps, and by applying a voltage to the focusing ring, the plasma within the reaction chamber can be controlled and focused, thereby confining the plasma above the wafer to improve the uniformity of the etching process.

[0003] As the feature size of semiconductor devices continues to shrink, the precision requirements of etching processes have reached the atomic level. Process control at the wafer edges has become a major challenge, placing extremely stringent demands on the performance of the focusing ring, particularly the flatness of its supporting surface. As the area in direct contact with or adjacent to the wafer, the surface condition of the focusing ring step directly affects the process results. Microscopic unevenness, scratches, or other defects on the step surface may affect the final etching result or even damage the wafer.

[0004] Therefore, during the manufacturing process of the focusing ring, strict flatness testing of its step surface is essential. Currently, the industry's testing methods for such ring-shaped components are relatively traditional, mainly employing two approaches: one is using contact measuring tools such as micrometers, where a probe is manually moved along the step for point measurement; the other is using a combination of roller pressing and sensors for contact scanning. However, these existing testing methods have significant drawbacks: firstly, manual or mechanical contact measurement is inefficient and cannot meet the needs of large-scale production; secondly, the output results of existing methods are mostly discrete data or simple pass / fail judgments, failing to form a visualized, comprehensive inspection image. This makes it difficult for quality inspectors to intuitively and comprehensively assess the morphology and distribution of defects, causing significant inconvenience to subsequent precision reprocessing and process optimization. Furthermore, both the sliding contact of the micrometer probe and the rolling contact of the roller pressing method are contact measurements. For high-purity, high-hardness silicon carbide materials, although their hardness is very high, their step surfaces are extremely sensitive to scratches and contamination after precision polishing. Point contact, multi-point contact, or rolling contact between the measuring tool and the step surface may introduce minor scratches or bring external particles into the detection area, thereby causing secondary damage to the originally intact focusing ring and directly affecting its service life and process performance. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by providing a silicon ring step detection device, so as to achieve efficient, accurate, and visual detection of silicon ring steps and avoid damage to the step surface.

[0006] The objective of this invention can be achieved through the following technical solutions: A silicon ring step detection device includes a base, and the device further includes: A worktable is mounted on a base, and a ring-shaped platform is provided in the middle area of ​​the worktable, on which the silicon ring to be tested is placed. Clamping plates are installed on the worktable, and the clamping plates clamp the silicon ring from the outside of the silicon ring. A lifting assembly and a moving assembly are provided, wherein a lifting assembly is mounted on the worktable and a moving assembly is mounted on the output end of the lifting assembly; The testing mechanism includes a mounting plate, an upper conductive sheet, a lower conductive sheet, and several conductive wheels. The mounting plate is installed at the output end of the moving component. Two sets of mounting strips are symmetrically installed on the mounting plate. The upper conductive sheet and the lower conductive sheet are respectively installed on the upper and lower surfaces of the two sets of mounting strips. Several conductive wheels are elastically installed on the mounting plate and are located between the upper and lower conductive sheets. The conductive wheels abut against and are electrically connected to the upper and lower conductive sheets respectively. The lower conductive sheet is in contact with the surface of the silicon ring step. The marking components and mounting ring are provided. Several marking components are mounted on the mounting plate, and the mounting ring is mounted on the lifting component. A paper ring is installed inside the mounting ring, and the marking components are used to mark the paper ring. The second driving component is mounted on the base and drives the detection mechanism to move along the silicon ring step.

[0007] As a further aspect of the present invention: the mounting plate is provided with a plurality of sliding grooves, the conductive wheel is provided with a fixed rod, the fixed rod moves along the sliding groove, and an elastic element is connected between the fixed rod and the sliding groove; a plurality of sets of airbag rollers are mounted on the mounting plate, the airbag rollers are located between the upper conductive sheet and the lower conductive sheet, and the airbag rollers abut against the connection between the upper or lower conductive sheet and the mounting strip; the airbag rollers keep the upper and lower conductive sheets in a taut state; the upper and lower conductive sheets are fan-shaped, and an insulating layer is provided at the top of the upper conductive sheet and the bottom of the lower conductive sheet.

[0008] As a further aspect of the present invention: the conductive wheels are distributed at equal intervals along the moving direction of the detection mechanism and the length direction of the mounting strip; the marking components are divided into upper and lower groups and are symmetrical along the surface of the paper ring; two marking components correspond to one conductive wheel; and the two marking components and their corresponding conductive wheels are located on a straight line in the longitudinal direction.

[0009] As a further embodiment of the present invention: the marking assembly includes a fixed cylinder, a movable rod, an electromagnetic block, and a magnetic block. The fixed cylinder is connected to the mounting plate via a support plate. The movable rod is longitudinally movably installed inside the fixed cylinder. A ring plate is provided around the movable rod. Several elastic elements are connected between the ring plate and one end of the inner cavity of the fixed cylinder. A retaining ring is provided inside the fixed cylinder. A striking pin is provided at one end of the movable rod facing the paper ring. A magnetic block is provided at the other end of the movable rod. An electromagnetic block is provided at the end of the inner cavity of the fixed cylinder opposite to the magnetic block. The magnetism of the electromagnetic block is the same as that of the magnetic block. An electronic amplifier is mounted on the mounting plate. The electronic amplifier is separately connected to the circuits containing the upper and lower conductive plates. The electromagnetic block is connected to the electronic amplifier.

[0010] As a further aspect of the present invention: a marking element is provided at one end of the movable rod facing the paper ring. The marking element includes several annular cotton and annular sleeves. Several equidistant annular grooves are opened from the inside to the outside at this end of the movable rod. The dimensions of the several annular cotton and annular sleeves match the dimensions of the several annular grooves. The annular cotton is installed inside the annular sleeve, and the annular sleeve is movably installed inside the annular groove. The several annular cottons are distributed in a stepped manner, with the innermost annular cotton being the most protruding. The annular sleeve corresponding to the outermost annular cotton is located at the innermost end of the corresponding annular groove. Several elastic elements are connected between the annular sleeves corresponding to the other annular cottons and the corresponding annular grooves. Several equidistant liquid storage cavities are opened from the inside to the outside inside the movable rod. The number of liquid storage cavities is the same as the number of annular grooves. Several leakage holes are opened between the liquid storage cavities and the annular grooves.

[0011] As a further embodiment of the present invention: the mounting ring includes a lower outer ring, a lower inner ring, a connecting ring, an upper outer ring, and an upper inner ring. The lower outer ring is connected to the lifting assembly. A connecting ring is rotatably embedded between the lower outer ring and the lower inner ring. The paper ring is on top of the lower outer ring and the lower inner ring. The upper outer ring and the upper inner ring are respectively fitted onto the tops of the lower outer ring and the lower inner ring and press down on the paper ring. A distance is maintained between the paper ring and the connecting ring, and there is a notch on the connecting ring. Several marking components are located at this notch.

[0012] As a further embodiment of the present invention: the lifting assembly includes a telescopic component, a connecting plate, a connecting rod, and a rotating shaft. The telescopic component is mounted on a workbench. The output end of the telescopic component is provided with a connecting plate, which is U-shaped. One end of the connecting plate is fixed to the lower outer ring, and the other end is connected to a connecting rod, which is L-shaped and has a rotating shaft rotatably mounted on its other end. The bottom end of the rotating shaft is polygonal. The output end of the second driving component is provided with a connector, and a polygonal groove is formed on the connector. The rotating shaft is fitted into the polygonal groove. The moving assembly includes a longitudinal moving component and a transverse moving component. The longitudinal moving component is fixed around the rotating shaft. The transverse moving component is movably mounted on the output end of the longitudinal moving component. The mounting plate is movably mounted on the output end of the transverse moving component.

[0013] As a further embodiment of the present invention: a turntable is rotatably mounted on the bottom of the workbench, and a plurality of arc-shaped grooves are provided on the turntable. A guide rod is provided at the bottom of the clamping plate, and the guide rod passes through the arc-shaped grooves. A driving component is installed on the base, and the driving component is connected to the turntable in a transmission manner. A plurality of suction holes are provided on the top of the annular platform, and a negative pressure pipe is installed on the side of the annular platform. The plurality of suction holes are connected to the negative pressure pipe.

[0014] The beneficial effects of this invention are: (1) The present invention sets a flexible lower conductive sheet to fit the silicon ring step surface, and uses the resistance change caused by the change in the contact area between the conductive wheel and the upper and lower conductive sheets to detect the flatness, thereby realizing non-rigid contact scanning of the step surface. This effectively avoids the scratches and contamination that traditional contact measuring tools may cause to the high-precision polished surface, greatly reduces the risk of secondary damage to the focusing ring, and ensures its final service life and process performance.

[0015] (2) This invention converts the unevenness of the step surface into electrical signals and drives the marking component to punch and color marks on a synchronously rotating paper ring, transforming abstract flatness data into an intuitive and visual overall inspection image. Quality inspectors can clearly judge the location, shape, and severity of defects by observing the distribution of holes and the depth of color on the paper ring, greatly facilitating subsequent precision reprocessing and process optimization.

[0016] (3) By distributing multiple conductive wheels at equal intervals along the moving direction and radial direction of the detection mechanism, the present invention achieves continuous and comprehensive scanning detection of the entire ring surface (different radius areas) of the silicon ring step, overcoming the defects of traditional point measurement or simple scanning methods that result in discrete data and inability to cover the whole picture, and significantly improving the accuracy and comprehensiveness of the detection. Attached Figure Description

[0017] The invention will now be further described with reference to the accompanying drawings.

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the driving structure of the clamping plate of the present invention; Figure 3 This is a schematic diagram of the lifting component and the moving component in this invention; Figure 4 This is a schematic diagram of the detection mechanism structure in this invention; Figure 5 This is a schematic diagram of the conductive wheel structure in this invention; Figure 6 This is a schematic diagram of the marking component structure in this invention; Figure 7 This is a schematic diagram of the marker structure in this invention; Figure 8 This is a schematic diagram of the mounting ring structure in this invention; Figure 9 This is a schematic diagram of the mounting ring cross-section structure in this invention; Figure 10 This is a schematic diagram of the mounting platform structure in this invention.

[0019] In the picture: 1. Base; 2. Workbench; 21. Circular platform; 211. Suction hole; 212. Negative pressure pipe; 3. Clamping plate; 31. Guide rod; 32. Turntable; 321. Arc groove; 33. Drive component one; 4. Lifting assembly; 41. Telescopic component; 42. Connecting plate; 43. Connecting rod; 44. Rotating shaft; 5. Moving assembly; 51. Longitudinal moving component; 52. Lateral moving component; 6. Detection mechanism; 61. Mounting plate; 611. Slide groove; 612. Elastic component one; 613. Support plate; 62. Mounting strip; 63. Upper conductive sheet; 64. Lower conductive sheet; 65. Airbag roller; 66. Conductive wheel ; 661, Fixed rod; 7, Marking assembly; 71, Fixed cylinder; 711, Retaining ring; 712, Elastic component two; 72, Movable rod; 721, Ring plate; 722, Strike pin; 723, Liquid storage chamber; 724, Ring groove; 725, Leakage hole; 73, Electromagnetic block; 74, Magnetic block; 75, Marking component; 751, Annular cotton; 752, Annular sleeve; 753, Elastic component three; 8, Mounting ring; 81, Lower outer ring; 82, Lower inner ring; 83, Connecting ring; 84, Paper ring; 85, Upper outer ring; 86, Upper inner ring; 9, Electronic amplifier; 10, Driving component two; 101, Connector. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] like Figures 1-10 As shown, a silicon ring step detection device includes a base 1, and the device further includes: Workbench 2 is mounted on base 1. A ring stage 21 is provided in the middle area of ​​workbench 2, and the silicon ring to be tested is placed on the ring stage 21. Clamping plate 3, several clamping plates 3 are installed on the workbench 2, and the clamping plates 3 clamp the silicon ring from the outside of the silicon ring. Lifting component 4 and moving component 5 are provided. Lifting component 4 is installed on the worktable 2, and moving component 5 is installed at the output end of lifting component 4. The testing mechanism 6 includes a mounting plate 61, an upper conductive sheet 63, a lower conductive sheet 64, and several conductive wheels 66. The mounting plate 61 is installed at the output end of the moving component 5. Two sets of mounting strips 62 are symmetrically installed on the mounting plate 61. The upper conductive sheet 63 and the lower conductive sheet 64 are respectively installed on the upper and lower surfaces of the two sets of mounting strips 62. Several conductive wheels 66 are elastically mounted on the mounting plate 61, and the conductive wheels 66 are located between the upper conductive sheet 63 and the lower conductive sheet 64. The conductive wheels 66 abut against and are electrically connected to the upper conductive sheet 63 and the lower conductive sheet 64 respectively. The lower conductive sheet 64 is in contact with the surface of the silicon ring step. Marking component 7 and mounting ring 8: Several marking components 7 are mounted on the mounting plate 61, and the mounting ring 8 is mounted on the lifting component 4. A paper ring 84 is installed inside the mounting ring 8. The marking components 7 are used to mark on the paper ring 84. Drive component 2 10 is mounted on base 1 and drives detection mechanism 6 to move along silicon ring steps.

[0022] A turntable 32 is rotatably mounted on the bottom of the workbench 2. Several arc-shaped grooves 321 are opened on the turntable 32. A guide rod 31 is provided at the bottom of the clamping plate 3. The guide rod 31 passes through the arc-shaped grooves 321. A driving component 33 is installed on the base 1. The driving component 33 is connected to the turntable 32 for transmission. Several suction holes 211 are opened on the top of the annular platform 21. A negative pressure pipe 212 is installed on the side of the annular platform 21. The suction holes 211 are connected to the negative pressure pipe 212.

[0023] The lifting assembly 4 includes a telescopic component 41, a connecting plate 42, a connecting rod 43, and a rotating shaft 44. The telescopic component 41 is installed on the workbench 2. The output end of the telescopic component 41 is provided with the connecting plate 42, which is U-shaped. One end of the connecting plate 42 is fixed to the lower outer ring 81, and the other end is connected to the connecting rod 43. The connecting rod 43 is L-shaped, and the other end is rotatably mounted with the rotating shaft 44. The bottom end of the rotating shaft 44 is polygonal. The output end of the drive component 10 is provided with a connector 101, which has a polygonal groove. The rotating shaft 44 is fitted into the polygonal groove. The moving assembly 5 includes a longitudinal moving component 51 and a transverse moving component 52. The longitudinal moving component 51 is fixed around the rotating shaft 44, and the transverse moving component 52 is movably installed on the output end of the longitudinal moving component 51. The mounting plate 61 is movably installed on the output end of the transverse moving component 52.

[0024] In one embodiment, the surfaces of the upper conductive sheet 63 and the lower conductive sheet 64 that contact the conductive wheel 66 are made of conductive material, and both the upper conductive sheet 63 and the lower conductive sheet 64 are flexible materials that can easily recover after deformation. The upper conductive sheet 63 and the lower conductive sheet 64 can use a PDMS film as a substrate, and conductive polymers such as PEDOT:PSS can be made into ink and attached to the PDMS film by printing, spin coating, or other methods, so that the upper conductive sheet 63 and the lower conductive sheet 64 form a conductive sheet structure that can easily recover after deformation. The conductive wheel 66 can be considered as a resistor. Both the longitudinal moving part 51 and the transverse moving part 52 can be composed of a lead screw and a motor.

[0025] In practical application of this embodiment, before testing, the silicon ring is first placed on the annular stage 21. Then, the drive component 33 is activated to rotate the turntable 32. Under the constraint of the arc groove 321, several guide rods 31 drive several clamping plates 3 to move inward synchronously to clamp the silicon ring, making the silicon ring coaxial with the output shaft of the drive component 10. Then, the external air pump and negative pressure pipe 212 are used to put several suction holes 211 into a negative pressure state, thereby sucking the silicon ring onto the annular stage 21, so that the silicon ring is fixed before testing, avoiding the movement of the silicon ring during testing from affecting the test results. Then, the telescopic component 41 is activated to retract, so that the connecting plate 42 drives the connecting rod 43 to move down, so that the rotating shaft 44 is sleeved in the connector 101. At the same time, the mounting ring 8 moves down to a certain height, and a paper ring 84 is installed in the mounting ring 8. Then, the position of the testing mechanism 6 is adjusted by the longitudinal moving component 51 and the transverse moving component 52, so that the lower conductive sheet 64 is completely attached to the step. At this time, the preparation work is completed. During testing, the driving component 10 is activated, causing the connector 101 to rotate the shaft 44. This, in turn, causes the longitudinal moving component 51 and the transverse moving component 52 to rotate the testing mechanism 6 around the shaft 44, allowing the testing mechanism 6 to move along the step to test its flatness. Specifically, during testing, the mounting plate 61 moves the upper conductive plate 63 and the lower conductive plate 64 along the step. If there is a protrusion on the step, the lower conductive plate 64 will partially bulge upwards, causing the conductive wheel 66 to move upwards a short distance. This causes the conductive wheel 66 to press against the upper conductive plate 63, increasing the contact area between the conductive wheel 66 and the upper conductive plate 63, while the contact area between the conductive wheel 66 and the lower conductive plate 64 remains unchanged (the contact surface is still a line). This results in a decrease in the contact resistance in the circuit formed by the conductive wheel 66 and the upper conductive plate 63, thus increasing the current in the circuit. If there is a depression on the step, the conductive wheel 66 will move downwards to press against the lower conductive plate 64. As the contact area between the conductive plates 64 increases, the conductive wheel 66 separates from the upper conductive plate 63, and the circuit between the two sets is broken. This results in a decrease in the contact resistance in the circuit formed by the conductive wheel 66 and the lower conductive plate 64, thereby increasing the current in the circuit formed by the conductive wheel 66 and the lower conductive plate 64. The change in current in the circuit can be used to determine whether there are protrusions or depressions on the step. At the same time, the signal generated by the change in current will cause the marking component 7 to mark on the paper ring 84, thus making the test results visible. Quality inspectors can intuitively judge the uneven areas on the step, which is convenient for subsequent reprocessing. In addition, since the lower conductive plate 64 is in contact with the step surface and is made of flexible material, scratches on the step can be effectively avoided during the test.

[0026] Furthermore, the mounting plate 61 is provided with several sliding grooves 611, and the conductive wheel 66 is provided with a fixing rod 661. The fixing rod 661 moves along the sliding groove 611, and an elastic element 612 is connected between the fixing rod 661 and the sliding groove 611. Several sets of airbag rollers 65 are installed on the mounting plate 61. The airbag rollers 65 are located between the upper conductive sheet 63 and the lower conductive sheet 64, and the airbag rollers 65 abut against the connection between the upper conductive sheet 63 or the lower conductive sheet 64 and the mounting strip 62. The airbag rollers 65 keep the upper conductive sheet 63 and the lower conductive sheet 64 in a taut state. The upper conductive sheet 63 and the lower conductive sheet 64 are fan-shaped, and an insulating layer is provided at the top of the upper conductive sheet 63 and the bottom of the lower conductive sheet 64.

[0027] Several conductive wheels 66 are distributed at equal intervals along the moving direction of the detection mechanism 6 and the length direction of the mounting strip 62. Several marking components 7 are divided into upper and lower groups and are symmetrical along the surface of the paper ring 84. Two marking components 7 correspond to one conductive wheel 66. The two marking components 7 and their corresponding conductive wheels 66 are located on a straight line in the longitudinal direction.

[0028] In one embodiment, when the step surface is flat or has protrusions, the elastic element 612 is in a tensioned state; when there is a depression in the step, the elastic element 612 rebounds, causing the conductive wheel 66 to move downwards. The insulating layer can be a plastic film or other film material with insulating properties.

[0029] In practical application, the upper conductive sheet 63 and the lower conductive sheet 64 are detachably installed on the upper and lower sides of the two sets of mounting strips 62, respectively. Several sets of air-cushion rollers 65, after inflation, keep the upper conductive sheet 63 and the lower conductive sheet 64 taut. This ensures that the contact area between the conductive wheel 66 and the upper and lower conductive sheets 63 and 64 changes promptly when the conductive wheel 66 moves up and down, thus ensuring the accuracy of the detection results. The several sets of equally spaced conductive wheels 66 can detect areas of different radii on the step. Compared to current point contact and overall surface contact detection methods, the detection method of this invention can detect the flatness of all areas on the step, further ensuring the accuracy of the detection results.

[0030] Furthermore, the marking assembly 7 includes a fixed cylinder 71, a movable rod 72, an electromagnetic block 73, and a magnetic block 74. The fixed cylinder 71 is connected to the mounting plate 61 via a support plate 613. The movable rod 72 is longitudinally movably installed inside the fixed cylinder 71. A ring plate 721 is provided around the movable rod 72. Several elastic elements 712 are connected between the ring plate 721 and one end of the inner cavity of the fixed cylinder 71. A retaining ring 711 is provided inside the fixed cylinder 71. A striking pin 722 is provided at one end of the movable rod 72 facing the paper ring 84. A magnetic block 74 is provided at the other end of the movable rod 72. An electromagnetic block 73 is provided at the end of the inner cavity of the fixed cylinder 71 opposite to the magnetic block 74. The magnetism of the electromagnetic block 73 is the same as that of the magnetic block 74. An electronic amplifier 9 is installed on the mounting plate 61. The electronic amplifier 9 is separately connected to the circuits containing the upper conductive sheet 63 and the lower conductive sheet 64. The electromagnetic block 73 is connected to the electronic amplifier 9.

[0031] In one embodiment, two sets of electronic amplifiers 9 are provided, each corresponding to one of the two sets of marking components 7. The electronic amplifier 9 may consist of an operational amplifier (e.g., an LM358 dual operational amplifier), a power transistor, a sampling resistor, a diode, and a DC power supply. The sampling resistor is connected in series in the detection circuit formed by the conductive wheel 66 and the upper conductive plate 63 or the lower conductive plate 64. Its two ends are connected to the two input terminals of the operational amplifier, the output terminal of the operational amplifier is connected to the base of the power transistor, the collector of the power transistor is connected to one end of the electromagnetic block 73, the other end of the electromagnetic block 73 is connected to the positive terminal of the power supply, and the emitter of the power transistor is connected to the negative terminal of the power supply. Simultaneously, a freewheeling diode is connected in reverse parallel across the electromagnetic block 73. When there is a protrusion on the step... When the conductive wheel 66 is raised or lowered, the contact area between it and the upper conductive plate 63 or the lower conductive plate 64 increases, resulting in a decrease in contact resistance and a change in the loop current. This current flows through the sampling resistor, generating a small voltage fluctuation across its terminals. The operational amplifier linearly amplifies this weak voltage difference, outputting a stronger voltage signal to drive the power transistor. The power transistor acts as a current controller, with its base current controlled by the operational amplifier's output voltage, thereby linearly changing the large current flowing through the coil of the electromagnetic block 73. The magnetic force of the electromagnetic block 73 is proportional to the coil current. Therefore, even a slight up-and-down movement of the conductive wheel 66 can cause a significant change in the magnetic force of the electromagnetic block 73. The freewheeling diode is used to absorb the reverse induced electromotive force generated when the electromagnetic block 73 is de-energized, protecting the power transistor.

[0032] In practical application of this embodiment, the magnetic force of the electromagnetic block 73 is relatively small. Combined with the rebound force of the elastic element 712, the movable rod 72 remains stable. When there is a protrusion on the step, the contact area between the conductive wheel 66 and the upper conductive plate 63 increases, resulting in a smaller contact resistance and a larger loop current between the conductive wheel 66 and the upper conductive plate 63. Meanwhile, the contact area between the conductive wheel 66 and the lower conductive plate 64 remains unchanged, so the current remains constant. At this time, the output of the electronic amplifier 9 increases the magnetic force of the electromagnetic block 73 in the corresponding upper marking assembly 7. Because the electromagnetic block 73 and the magnetic suction block 74 repel each other, the magnetic suction block 74 drives the movable rod 72 downwards, causing the striking pin 722 to move downwards and punch a hole in the paper ring 84, with the annular edge of this hole facing downwards. At this time, the lower marking assembly 7 remains stationary. When there is a depression on the step, the contact area between the conductive wheel 66 and the lower conductive plate 64 increases, resulting in a larger contact resistance and a larger loop current between the conductive wheel 66 and the upper conductive plate 63. As the contact resistance decreases, the loop current between the conductive wheel 66 and the lower conductive plate 64 increases, and the conductive wheel 66 separates from the upper conductive plate 63, breaking the loop between the two sets. The upper marking component 7 remains stationary, and the magnetic force of the electromagnetic block 73 in the corresponding lower marking component 7 increases, causing the impact pin 722 to move upward and punch a hole in the paper ring 84, with the annular edge formed by the edge of this hole facing upward. When the step is flat, the contact resistance and current recover, and the impact pin 722 returns to its original position under the rebound force of the elastic element 712. By punching a hole in the paper ring 84, the detection result is visualized, which facilitates subsequent reprocessing of the silicon ring. At the same time, the annular edge formed by the edge of the hole on the paper ring 84 may face downward or upward. If it faces downward, it indicates that there is a protrusion on the step, and if it faces upward, it indicates that there is a depression on the step. This allows the defect morphology on the step to be distinguished by the orientation of the annular edge of the hole, which facilitates subsequent precision processing of the silicon ring.

[0033] Furthermore, a marking element 75 is provided at the end of the movable rod 72 facing the paper ring 84. The marking element 75 includes several annular cotton balls 751 and annular sleeves 752. Several equidistant annular grooves 724 are opened from the inside to the outside at this end of the movable rod 72. The dimensions of the several annular cotton balls 751 and annular sleeves 752 match the dimensions of the several annular grooves 724. The annular cotton balls 751 are installed inside the annular sleeves 752, and the annular sleeves 752 are movably installed inside the annular grooves 724. The several annular cotton balls 751 are distributed in a stepped manner. The innermost annular cotton 751 protrudes the most, and the annular sleeve 752 corresponding to the outermost annular cotton 751 is located at the innermost end of the corresponding annular groove 724. Several elastic elements 753 are connected between the annular sleeve 752 corresponding to the other annular cotton 751 and the corresponding annular groove 724. Several equidistant liquid storage chambers 723 are opened from the inside to the outside inside the movable rod 72. The number of liquid storage chambers 723 is the same as the number of annular grooves 724. Several leakage holes 725 are opened between the liquid storage chambers 723 and the annular grooves 724.

[0034] In one embodiment, pigment is stored in the liquid storage chamber 723, and the pigment stored in each liquid storage chamber 723 has a different color. For example, the color of the pigment in several liquid storage chambers 723 becomes darker from the inside to the outside.

[0035] In practical application, if the protrusions or depressions on the step are minor, the contact area between the conductive wheel 66 and the upper conductive plate 63 or lower conductive plate 64 will not change significantly, resulting in a small change in contact resistance. Consequently, the magnetic force of the electromagnetic block 73 will not change significantly, and the moving distance of the movable rod 72 will be small, thus limiting the distance the striking pin 722 will move towards the paper ring 84. Therefore, only one hole will exist on the paper ring 84. However, if the protrusions or depressions on the step are significant, the moving distance of the movable rod 72 will be larger, causing the innermost annular cotton 751 to contact the paper ring 84. This will result in a larger hole on the paper ring. Not only will there be holes on the paper ring 84, but there will also be color markings. The greater the degree of protrusion or indentation, the greater the movement distance of the movable rod 72. When the innermost annular cotton 751 contacts the paper ring 84, the innermost annular cotton 751 will retract into the annular groove 724, so that the outer annular cotton 751 also contacts the paper ring 84, thus printing a darker color mark on the paper ring 84. Similarly, the greater the degree of protrusion or indentation, the more color marks there are on the paper ring 84, and the darker the color. This can further assist quality inspectors in judging the location of defects on the step, which is convenient for subsequent reprocessing of the silicon ring.

[0036] Furthermore, the mounting ring 8 includes a lower outer ring 81, a lower inner ring 82, a connecting ring 83, an upper outer ring 85, and an upper inner ring 86. The lower outer ring 81 is connected to the lifting assembly 4. The connecting ring 83 is embedded and rotatably mounted between the lower outer ring 81 and the lower inner ring 82. The paper ring 84 is on top of the lower outer ring 81 and the lower inner ring 82. The upper outer ring 85 and the upper inner ring 86 are respectively fitted onto the top of the lower outer ring 81 and the lower inner ring 82 and press down on the paper ring 84. A distance is maintained between the paper ring 84 and the connecting ring 83, and there is a notch on the connecting ring 83. Several marking assemblies 7 are located at this notch.

[0037] In practical application, magnetic components are provided at both ends of the notch of the mounting plate 61 and the connecting ring 83 in this embodiment. This ensures that the connecting ring 83 rotates when the mounting plate 61 rotates, thereby ensuring that the marking component 7 is always located at the notch. This facilitates the upper and lower sets of marking components 7 to mark the surface of the paper ring 84 normally. A distance is maintained between the paper ring 84 and the connecting ring 83 to prevent the connecting ring 83 from damaging the annular edge of the hole when it rotates, thus making it easier for quality inspectors to judge the defect morphology on the step.

[0038] Working Principle: Before testing, the silicon ring to be tested is first placed on the annular stage 21. The drive unit 33 is activated, causing the turntable 32 to rotate. The arc-shaped groove 321 on the turntable 32 drives multiple clamping plates 3 to move inward synchronously via the guide rod 31, clamping and positioning the silicon ring from the outside. Simultaneously, negative pressure is generated in the suction hole 211 through the negative pressure pipe 212, firmly adsorbing the silicon ring onto the annular stage 21, ensuring it is coaxial with the output shaft of the drive unit 10. Then, the telescopic component 41 is activated to retract, causing the rotating shaft 44 to move downward via the connecting plate 42 and connecting rod 43, allowing the bottom end of the rotating shaft 44 to connect with the connector 101 at the output end of the drive unit 10. Simultaneously, the mounting ring 8 moves downward to the predetermined height and the paper ring 84 is installed. Next, the position of the testing mechanism 6 is adjusted by the longitudinal moving component 51 and the transverse moving component 52, ensuring the flexible lower conductive sheet 64 is completely attached to the stepped surface of the silicon ring. The preparation work is then complete.

[0039] During testing, the second driving component 10 drives the entire testing mechanism 6 to rotate around the center of the silicon ring via the connector 101 and the rotating shaft 44. The mounting plate 61 drives the taut upper conductive plate 63 and lower conductive plate 64 to move along the step. When there is a protrusion on the step surface, it will lift a part of the lower conductive plate 64, causing the corresponding conductive wheel 66 to move upward and squeeze the upper conductive plate 63, resulting in a decrease in the contact resistance between the conductive wheel 66 and the upper conductive plate 63, and an increase in the current of the testing circuit. When there is a depression on the step surface, the conductive wheel 66 moves downward under the action of the elastic component 612, squeezing the lower conductive plate 64 and separating it from the upper conductive plate 63, resulting in a decrease in the contact resistance between the conductive wheel 66 and the lower conductive plate 64, and an increase in the current of the circuit.

[0040] The current change signal is collected and amplified by the electronic amplifier 9, which then controls the upper and lower sets of marking components 7 corresponding to the conductive wheel 66. When a convexity generates a signal, the electromagnetic block 73 in the upper marking component 7 strengthens its magnetic force, overcoming the elastic force of the elastic element 712, and pushes the movable rod 72 downward, causing the striking pin 722 to punch a hole with the edge of the hole facing downward on the paper ring 84. When a concaveness generates a signal, the lower marking component 7 moves, causing the striking pin 722 to punch a hole with the edge of the hole facing upward on the paper ring 84. If the degree of concavity or convexity is large, the displacement of the conductive wheel 66 is also large, and the movable rod 72 will drive the marking component 75 to extend further, so that the annular cotton 751 of different colors inside will contact the paper ring 84 in sequence, imprinting color marks around the holes. The greater the degree of concavity or convexity, the more layers of annular cotton 751 are in contact, and the darker the color. As the detection mechanism 6 rotates, the connecting ring 83 inside the mounting ring 8 rotates synchronously, ensuring that the marking component 7 is always aligned with the same radial area of ​​the paper ring 84 for marking, thereby forming a complete visual map on the paper ring 84 that reflects the location, shape and degree of unevenness and convexity defects on the step surface.

Claims

1. A silicon ring step detection device, comprising a base (1), characterized in that, The device further includes: Workbench (2), the workbench (2) is mounted on base (1), and a ring platform (21) is provided in the middle area of ​​the workbench (2), and the silicon ring to be tested is placed on the ring platform (21); Clamping plate (3), several clamping plates (3) are installed on the workbench (2), and several clamping plates (3) clamp the silicon ring from the outside of the silicon ring; Lifting assembly (4) and moving assembly (5), the lifting assembly (4) is installed on the worktable (2), and the moving assembly (5) is installed at the output end of the lifting assembly (4); The testing mechanism (6) includes a mounting plate (61), an upper conductive sheet (63), a lower conductive sheet (64), and several conductive wheels (66). The mounting plate (61) is installed at the output end of the moving component (5). Two sets of mounting strips (62) are symmetrically installed on the mounting plate (61). The upper conductive sheet (63) and the lower conductive sheet (64) are respectively installed on the upper and lower surfaces of the two sets of mounting strips (62). Several conductive wheels (66) are elastically installed on the mounting plate (61), and the conductive wheels (66) are located between the upper conductive sheet (63) and the lower conductive sheet (64). The conductive wheels (66) abut against and are electrically connected to the upper conductive sheet (63) and the lower conductive sheet (64) respectively. The lower conductive sheet (64) is in contact with the surface of the silicon ring step. Marking components (7) and mounting rings (8), a plurality of marking components (7) are mounted on the mounting plate (61), the mounting rings (8) are mounted on the lifting components (4), and paper rings (84) are mounted inside the mounting rings (8). The marking components (7) are used to mark the paper rings (84). Drive component two (10) is mounted on base (1) and drives detection mechanism (6) to move along silicon ring steps.

2. The silicon ring step detection device according to claim 1, characterized in that, The mounting plate (61) is provided with several sliding grooves (611), and the conductive wheel (66) is provided with a fixing rod (661). The fixing rod (661) moves along the sliding groove (611). An elastic element (612) is connected between the fixing rod (661) and the sliding groove (611). Several sets of airbag rollers (65) are installed on the mounting plate (61). The airbag rollers (65) are located between the upper conductive sheet (63) and the lower conductive sheet (64), and the airbag rollers (65) abut against the connection between the upper conductive sheet (63) or the lower conductive sheet (64) and the mounting strip (62). The airbag rollers (65) keep the upper conductive sheet (63) and the lower conductive sheet (64) in a taut state. The upper conductive sheet (63) and the lower conductive sheet (64) are fan-shaped. The top of the upper conductive sheet (63) and the bottom of the lower conductive sheet (64) are provided with an insulating layer.

3. The silicon ring step detection device according to claim 2, characterized in that, The conductive wheels (66) are distributed at equal intervals along the moving direction of the detection mechanism (6) and the length direction of the mounting strip (62). The marking components (7) are divided into upper and lower groups and are symmetrical along the surface of the paper ring (84). Two marking components (7) correspond to one conductive wheel (66). The two marking components (7) and their corresponding conductive wheels (66) are located on a straight line in the longitudinal direction.

4. The silicon ring step detection device according to claim 3, characterized in that, The marking assembly (7) includes a fixed cylinder (71), a movable rod (72), an electromagnetic block (73), and a magnetic block (74). The fixed cylinder (71) is connected to the mounting plate (61) via a support plate (613). The movable rod (72) is longitudinally movably installed inside the fixed cylinder (71). A ring plate (721) is provided around the movable rod (72). Several elastic elements (712) are connected between the ring plate (721) and one end of the inner cavity of the fixed cylinder (71). A retaining ring (711) is provided inside the fixed cylinder (71). The movable rod (72)... 2) A striking pin (722) is provided at one end facing the paper ring (84), a magnetic block (74) is provided at the other end of the movable rod (72), an electromagnetic block (73) is provided at the end of the cavity of the fixed cylinder (71) opposite to the magnetic block (74), the magnetism of the electromagnetic block (73) is the same as that of the magnetic block (74), an electronic amplifier (9) is installed on the mounting plate (61), the electronic amplifier (9) is connected separately to the circuit where the upper conductive plate (63) and the lower conductive plate (64) are located, and the electromagnetic block (73) is connected to the electronic amplifier (9).

5. The silicon ring step detection device according to claim 4, characterized in that, The movable rod (72) has a marker (75) at one end facing the paper ring (84). The marker (75) includes several annular cotton (751) and annular sleeve (752). Several equally spaced annular grooves (724) are opened from the inside to the outside at this end of the movable rod (72). The size of the several annular cotton (751) and annular sleeve (752) matches the size of the several annular grooves (724). The annular cotton (751) is installed in the annular sleeve (752), and the annular sleeve (752) is movably installed in the annular groove (724). The several annular cotton (751) are distributed in a stepped manner. The innermost annular cotton (751) protrudes the most, and the annular sleeve (752) corresponding to the outermost annular cotton (751) is located at the innermost end of the corresponding annular groove (724). The annular sleeve (752) corresponding to the other annular cotton (751) is connected to the corresponding annular groove (724) by several elastic elements (753). The movable rod (72) has several equidistant liquid storage chambers (723) from the inside to the outside. The number of liquid storage chambers (723) is the same as the number of annular grooves (724). Several leakage holes (725) are opened between the liquid storage chambers (723) and the annular grooves (724).

6. The silicon ring step detection device according to claim 5, characterized in that, The mounting ring (8) includes a lower outer ring (81), a lower inner ring (82), a connecting ring (83), an upper outer ring (85), and an upper inner ring (86). The lower outer ring (81) is connected to the lifting assembly (4). The connecting ring (83) is embedded and rotatably mounted between the lower outer ring (81) and the lower inner ring (82). The paper ring (84) is on top of the lower outer ring (81) and the lower inner ring (82). The upper outer ring (85) and the upper inner ring (86) are respectively fitted onto the top of the lower outer ring (81) and the lower inner ring (82) and press down on the paper ring (84). A distance is maintained between the paper ring (84) and the connecting ring (83), and there is a notch on the connecting ring (83). Several marking components (7) are located at this notch.

7. The silicon ring step detection device according to claim 6, characterized in that, The lifting assembly (4) includes a telescopic component (41), a connecting plate (42), a connecting rod (43), and a rotating shaft (44). The telescopic component (41) is mounted on the workbench (2). The output end of the telescopic component (41) is provided with a connecting plate (42). The connecting plate (42) is U-shaped. One end of the connecting plate (42) is fixed to the lower outer ring (81), and the other end is connected to a connecting rod (43). The connecting rod (43) is L-shaped, and the other end is rotatably mounted with a rotating shaft (44). The bottom end of the rotating shaft (44) is polygonal. The output end of the drive component 2 (10) is provided with a connector (101), and a polygonal groove is provided on the connector (101). The rotating shaft (44) is fitted in the polygonal groove. The moving component (5) includes a longitudinal moving component (51) and a transverse moving component (52). The longitudinal moving component (51) is fixed around the rotating shaft (44). The transverse moving component (52) is movably installed on the output end of the longitudinal moving component (51). The mounting plate (61) is movably installed on the output end of the transverse moving component (52).

8. The silicon ring step detection device according to claim 1, characterized in that, The workbench (2) has a turntable (32) rotatably mounted on its bottom. The turntable (32) has several arc-shaped grooves (321) on it. The clamping plate (3) has a guide rod (31) at its bottom. The guide rod (31) passes through the arc-shaped grooves (321). The base (1) has a drive component (33) installed on it. The drive component (33) is connected to the turntable (32) in a transmission connection. The annular platform (21) has several suction holes (211) on its top. The annular platform (21) has a negative pressure pipe (212) installed on its side. The suction holes (211) are connected to the negative pressure pipe (212).

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