A two-degree-of-freedom forced vibration system and fluid generating device

Abstract

The application relates to the technical field of fluid pumps, in particular to a bidirectional freedom forced vibration system and a fluid generating device. The system comprises a first vibration piece, a second vibration piece, a spacer and a driving unit. The spacer is located between the two vibration pieces and encloses a fluid volume space. The driving unit applies periodic excitation to the first vibration piece to make it vibrate, and forms pressure alternation in the fluid volume space, which acts on the second vibration piece to make it forcedly vibrate; in a set working frequency band, the two vibration pieces reversely vibrate with a 180-degree phase difference in the action area. The device comprises a jet flow plate, an annular support, a vibration plate and a piezoelectric ceramic which are stacked in sequence, and the three enclose a pump cavity; the vibration plate is provided with a sealed first cavity corresponding to the projection of the piezoelectric ceramic, the jet flow plate is provided with a second cavity corresponding to the first cavity and is provided with a jet flow hole which is communicated with the outside. The scheme has the advantages of compact structure, no need of mechanical valve and enhanced pressure alternation and fluid exchange capacity.

Description

Technical Field

[0001] This invention relates to the field of fluid pump technology, and more particularly to a two-way degree-of-freedom forced vibration system and a fluid generating device. Background Technology

[0002] The demand for microfluidic generators is growing in fields such as consumer electronics heat dissipation, confined space ventilation, and microfluidic transport. Among existing micro-drive solutions, piezoelectric actuators are widely used due to their small size, fast response, low energy consumption, and lack of motor wear. Common valveless piezoelectric structures typically use a piezoelectric actuator attached to a single vibrating plate. AC excitation causes the vibrating plate to flex normally, resulting in periodic pressure changes within the cavity. This pressure is then connected to the outside environment through through-holes / nozzles, creating suction and discharge.

[0003] However, existing technologies still have significant shortcomings: First, the displacement amplitude of piezoelectric actuators is limited within acceptable sizes and driving voltages. The single-diaphragm structure restricts cavity volume changes and results in insufficient pressure alternation intensity, leading to lower output flow rates. Second, methods to increase flow rates, such as increasing diaphragm area, driving voltage, frequency, or adding complex valve structures, often lead to increased thickness, power consumption and noise, decreased reliability, and increased manufacturing and assembly complexity. Traditional structures are mostly driven by a single vibrating element and lack a mechanism to introduce a second vibrating element into forced vibration using fluid domain coupling. This makes it difficult to significantly improve the effective cavity volume change and fluid exchange capacity without increasing the piezoelectric drive displacement amplitude. Summary of the Invention

[0004] This invention provides a two-way degree-of-freedom forced vibration system and a fluid generating device, which can effectively solve the problems in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A two-way forced vibration system includes: a first vibrating element, a second vibrating element, a spacer, and a driving unit; The spacer is disposed between the first vibrating element and the second vibrating element, and together with the first vibrating element and the second vibrating element, they enclose a fluid volume space. The drive unit applies periodic excitation to the first vibrating element to make it vibrate, so that the first vibrating element transmits the vibration to the second vibrating element through the fluid volume space, and causes the second vibrating element to generate forced vibration.

[0006] Furthermore, the driving unit includes a piezoelectric driving element, which drives the first vibrating element to generate normal flexural vibration under the excitation of a set electrical signal operating frequency band. The first vibrating element and the second vibrating element vibrate in opposite directions with a 180° phase difference within the effective area of ​​the fluid volume space.

[0007] Furthermore, the piezoelectric actuator is located on the outside or inside of the fluid volume space.

[0008] A fluid generating device includes a deformation unit and a piezoelectric ceramic, wherein the deformation unit includes a jet plate, a pump base and a vibrating plate stacked sequentially; The pump base is set as an annular support, and together with the jet plate and vibrating plate set on both sides of it, a pump chamber is formed; Piezoelectric ceramics are used to drive the vibration of a vibrating plate. At least one sealed first cavity is provided inside the vibrating plate, and the first cavity is provided in accordance with the planar projection of the piezoelectric ceramic on the vibrating plate. Multiple second cavities are provided on the jet plate corresponding to the first cavity, and multiple jet holes are opened on the jet plate corresponding to the second cavities. The pump chamber is connected to the outside through the jet holes.

[0009] Furthermore, within the set operating frequency band of the piezoelectric ceramic, the vibrating plate and the jet plate vibrate in opposite directions with a 180° phase difference within the effective working area of ​​the corresponding pump chamber.

[0010] Furthermore, the jet plate includes an outer support ring, an inner elastic ring, and an elastic sheet and an elastic plate located inside the elastic ring. The elastic sheet and the elastic plate are stacked along the vibration direction of the jet plate, and the elastic sheet or the elastic plate serves as the inner wall of the pump cavity. An opening is provided on the elastic sheet, the second cavity is formed on the elastic plate, and the jet hole is formed on the elastic sheet. During the deformation of the jet plate, the elastic sheet and the elastic plate are in contact, and the elastic plate blocks the opening.

[0011] Furthermore, two deformation units are provided and are located opposite each other on the upper and lower sides of the piezoelectric ceramic, and the piezoelectric ceramic drives the vibrating plates on the two deformation units to vibrate synchronously in opposite directions.

[0012] Furthermore, the piezoelectric ceramic is connected to a vibrating plate on a deformation unit via several columns. The columns are distributed around the circumference of the piezoelectric ceramic, and a core column is provided at the center of the upper and lower surfaces of the piezoelectric ceramic. The core column is connected to the corresponding vibrating plate.

[0013] Furthermore, the several first cavities in the vibrating plate are interconnected through several air passages, and the vibrating plate is provided with a sleeve communicating with one of the first cavities. A piston is slidably disposed inside the sleeve, and the piston is connected to the corresponding core column.

[0014] Furthermore, the piezoelectric ceramic is circular in shape and consists of a core disk, a shear ceramic ring, a buffer ring, and a diameter-variable ceramic ring arranged sequentially from the inside to the outside. The diameter-variable ceramic ring is connected to several of the columns, and the core disk is connected to the core columns. The shear ceramic ring is composed of several ceramic panels and several partitions arranged in a ring, with the partitions located between two adjacent ceramic panels.

[0015] The technical solution of this invention can achieve the following technical effects: In the bidirectional forced vibration mechanism disclosed in this invention, the driving unit excites the first vibrating element to vibrate, creating pressure alternation within the fluid volume space. This pressure alternation acts on the second vibrating element, causing it to vibrate under pressure, thus achieving coupling between the structural domain and the fluid domain. Periodic fluid exchange can be achieved without relying on mechanical valves. Within the operating frequency band set by the driving unit, the first and second vibrating elements vibrate in opposite directions with a 180° phase difference in the fluid volume space, causing the two side boundaries to synchronously participate in volume changes. This enhances the pressure alternation and the reciprocating flow capability of the nozzle, improving output capability without increasing the displacement amplitude of the piezoelectric driving element. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of a forced vibration system with two degrees of freedom. Figure 2 This is a schematic diagram of a forced vibration system with two degrees of freedom expanding outwards. Figure 3 This is a schematic diagram of a forced vibration system with two degrees of freedom contracting inward. Figure 4 This is a schematic diagram showing the piezoelectric actuator located inside the fluid volume space. Figure 5 This is a schematic diagram of a fluid generating device; Figure 6 This is a schematic cross-sectional view of the fluid generating device; Figure 7 This is a schematic diagram of a double-deformation element; Figure 8 This is a schematic diagram of the cross-section of a double-deformation unit; Figure 9 A schematic diagram of a piezoelectric ceramic; Figure 10 This is a schematic diagram of the outward expansion of a fluid generating device; Figure 11This is a schematic diagram of the fluid generating device contracting inward.

[0018] Reference numerals: 1. First vibrating element; 11. First cavity; 2. Second vibrating element; 21. Second cavity; 22. Through hole; 3. Spacer; 31. Fluid volume space; 4. Drive unit; 41. Piezoelectric drive element; 5. Jet plate; 51. Second cavity; 52. Jet hole; 53. Support ring; 54. Elastic ring; 55. Elastic sheet; 56. Elastic plate; 57. Through port; 6. Pump base; 61. Pump cavity; 7. Vibrating plate; 71. First cavity; 72. Air passage; 8. Piezoelectric ceramic; 81. Variable diameter ceramic ring; 82. Buffer ring; 83. Core disk; 84. Shear ceramic ring; 841. Ceramic panel; 842. Partition; 9. Column; 91. Core column; 92. Piston; 93. Sleeve. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0021] like Figures 1 to 3 As shown, the present invention discloses a bidirectional forced vibration system with two degrees of freedom, comprising: a first vibrating element 1, a second vibrating element 2, a spacer 3, and a driving unit 4; the spacer 3 is disposed between the first vibrating element 1 and the second vibrating element 2, and together with the first vibrating element 1 and the second vibrating element 2, forms a fluid volume space 31; the driving unit 4 applies periodic excitation to the first vibrating element 1 to cause it to vibrate, so that the first vibrating element 1 transmits the vibration to the second vibrating element 2 through the fluid volume space 31, and causes the second vibrating element 2 to generate forced vibration.

[0022] The first vibrating element 1 and the second vibrating element 2 can be thin-plate vibrating components, such as thin metal plates, metal diaphragms, thin engineering plastic plates, or composite plates. The spacer 3 is configured as an annular support or a frame support, and the fluid volume space 31 is located in the inner region of the annular support or the frame support. The first vibrating element 1 and the second vibrating element 2 can be connected to the spacer 3 by welding, gluing, or pressure sealing, respectively, to ensure that the fluid volume space 31 has the expected sealing boundary conditions.

[0023] The two-way forced vibration system couples two vibrating elements through a fluid volume space 31 via a spacer 3, converting the mechanical vibration of a single vibrating element into pressure alternation in the fluid domain. The pressure alternation then drives the second vibrating element 2, realizing energy interaction and coupling response between the structural domain and the fluid domain, thus providing a foundation for the subsequent formation of a reverse vibration working state.

[0024] Furthermore, based on the operating frequency band set by the drive unit 4, the first vibrating element 1 and the second vibrating element 2 vibrate in opposite directions with a 180° phase difference within the effective area of ​​the fluid volume space 31.

[0025] The effective area of ​​the fluid volume space 31 is the region on the inner surface of the two vibrating elements that can effectively participate in volume changes and pressure alternations, corresponding to the inner envelope range of the spacer 3. The 180° phase difference reverse vibration can be achieved by matching the structural parameters with the operating frequency band. For example, adjusting the equivalent stiffness and equivalent mass of the first vibrating element 1, the equivalent stiffness and equivalent mass of the second vibrating element 2, the equivalent compliance of the volume space formed by the height of the spacer 3, and the fluid inertia and damping of the external connecting channel can stably obtain the anti-phase coupling response in the target frequency band.

[0026] For example, when the first vibrating element 1 moves towards the inside of the fluid volume space 31, the fluid in the fluid volume space 31 is squeezed out, and the fluid exerts an outward thrust on the second vibrating element 2, causing it to move outward. At this time, the first vibrating element 1 moves outward, and the second vibrating element 2 also moves outward due to inertia, thereby making the first vibrating element 1 and the second vibrating element 2 move outward synchronously, realizing the opposite coupling response.

[0027] Under the same excitation conditions, reverse vibration causes the volume change of the fluid volume space 31 to be greater within one cycle, and the pressure alternation becomes more concentrated, which is conducive to converting more driving energy into the periodic transport capacity of the fluid domain.

[0028] Furthermore, the drive unit 4 includes a piezoelectric drive element 41, which drives the first vibrating element 1 to generate normal flexural vibration under the excitation of an electrical signal.

[0029] The piezoelectric actuator 41 can be an equivalent driving structure consisting of eight piezoelectric ceramic sheets, a ring-shaped piezoelectric sheet, or a multi-layer piezoelectric stack, and can be fixed by adhesive bonding or composite lamination. Under the action of an electric field, the piezoelectric actuator 41 generates in-plane strain, causing the first vibrating element 1 to produce a planar normal displacement.

[0030] Piezoelectric drives offer fast response, controllable stroke, and minimal structural wear, making them suitable for achieving high-frequency, low-noise periodic excitation within small structures and providing a stable source term for pressure alternation in the fluid domain.

[0031] Furthermore, the piezoelectric drive 41 is located on the outside or inside of the fluid volume space 31.

[0032] like Figure 1 As shown, when the piezoelectric drive 41 is located outside the fluid volume space 31 and connected to the first vibrating element 1, the above-mentioned bidirectional forced vibration motion can be achieved by utilizing the vibration of the piezoelectric drive 41 and the motion inertia of the second vibrating element 2. The piezoelectric drive 41 is disc-shaped.

[0033] like Figure 4 As shown, when the piezoelectric drive 41 is located inside the fluid volume space 31, the piezoelectric drive 41 is cylindrical, and its deformation direction is along the normal of the first vibrating element 1. The two ends of the piezoelectric drive 41 are connected to the first vibrating element 1 and the second vibrating element 2 respectively. When the piezoelectric drive 41 is energized, it performs telescopic movement. The piezoelectric drive 41 will directly drive the first vibrating element 1 and the second vibrating element 2 to expand outward or contract inward synchronously, realizing bidirectional forced vibration with two degrees of freedom.

[0034] Furthermore, a first cavity 11 is provided inside the first vibrating element 1. The first cavity 11 is provided in multiple ways corresponding to the planar projection of the driving unit 4 on the first vibrating element 1, and the multiple first cavities 11 are independently provided.

[0035] The first cavity 11 is configured as a sealed cavity, located within the inner layer of the first vibrating element 1. It can be formed by welding multiple layers of metal thin films, or by etching, stamping to create a recess, and then encapsulating it. Multiple first cavities 11 can be arranged in an array, corresponding to the projected area of ​​the piezoelectric drive element 41, so that the first vibrating element 1 forms multiple relatively independent flexible units within this area. Furthermore, the first cavities 11 can be filled with atmospheric pressure air, inert gas, or evacuated to low pressure to alter the local equivalent compliance and damping characteristics.

[0036] Secondly, the first cavity 11 can be designed to adjust the stiffness and mass distribution of the first vibrating element 1, so as to shape the desired modal shape in the target frequency band, so that the normal deflection is more concentrated in the effective working area, while reducing unnecessary energy dissipation.

[0037] Furthermore, a second cavity 21 is provided on the second vibrating element 2, and multiple second cavities 21 are provided corresponding to the first cavity 11; a through hole 22 is provided on the second vibrating element 2 at the second cavity 21, and the fluid volume space 31 is connected to the outside through the through hole 22.

[0038] The second cavity 21 is located on the side of the second vibrating element 2 facing the fluid volume space 31 or on the side away from the fluid volume space 31. Multiple second cavities 21 correspond one-to-one with multiple first cavities 11, forming a local coupling unit in each corresponding area. The through hole 22 can be a circular hole, elongated hole, slit hole, or a composite hole array, penetrating the second vibrating element 2 and communicating with the outside. The periphery of the through hole 22 can be chamfered or rounded to reduce flow loss; a dustproof mesh or porous membrane can be optionally installed on the outside to meet the particle protection requirements of the application environment.

[0039] The second cavity 21 and the through hole 22 provide a defined communication path for the fluid domain, enabling pressure alternation to be transformed into periodic intake and exhaust; the second cavity 21 generates forced vibration under pressure alternation, further participating in volume change and forming a stronger coupled response.

[0040] like Figures 5 to 11 As shown, the present invention further discloses a fluid generating device, including a deformation unit and a piezoelectric ceramic 8. The deformation unit includes a jet plate 5, a pump base 6, and a vibrating plate 7 stacked sequentially. The pump base 6 is configured as an annular support and forms a pump chamber 61 with the jet plate 5 and the vibrating plate 7 arranged on both sides thereon. The piezoelectric ceramic 8 is used to drive the vibrating plate 7 to vibrate. At least one sealed first cavity 71 is provided inside the vibrating plate 7, and the first cavity 71 is corresponding to the planar projection of the piezoelectric ceramic 8 on the vibrating plate 7. A plurality of second cavities 51 are provided on the jet plate 5 corresponding to the first cavity 71, and a plurality of jet holes 52 are opened on the jet plate 5 corresponding to the second cavities 51. The pump chamber 61 is connected to the outside through the jet holes 52.

[0041] The inner wall of the pump chamber 61 can be formed by three parts: the inner wall of the annular support, the surface of the vibrating plate 7 facing the annular support, and the surface of the jet plate 5 facing the annular support. The first cavity 71 is the internal sealing structure of the vibrating plate 7, but its corresponding outer surface belongs to the boundary surface of the pump chamber 61 and will directly participate in the volume change and pressure loading of the pump chamber 61. The pump chamber 61 is connected to the outside through the second cavity 51 and the jet hole 52. The jet hole 52 can simultaneously serve as the suction and discharge channel. The fluid flow direction is automatically determined by the instantaneous pressure difference, without the need for a mechanical valve. The one-to-one correspondence between the first cavity 71 and the second cavity 51 is conducive to forming a multi-unit parallel local coupling structure.

[0042] The fluid generator has a compact structure and a valveless design that reduces mechanical wear and jamming risks, making it suitable for long-term operation in scenarios such as heat dissipation in consumer electronics, ventilation in confined spaces, and microfluidic transport.

[0043] Furthermore, within the set operating frequency band of the piezoelectric ceramic 8, the vibrating plate 7 and the jet plate 5 vibrate in opposite directions with a 180° phase difference within the effective working area of ​​the corresponding pump chamber 61.

[0044] The formation of reverse vibration can be achieved by matching parameters such as the height of the vibrating plate 7, the jet plate 5, the pump chamber 61, the volume of the second cavity 51, and the equivalent orifice length and diameter of the jet orifice 52. The gas in the pump chamber 61 exhibits acoustic elasticity during compression and expansion, while the gas column in the jet orifice 52 exhibits fluid inertia accompanied by damping loss. These two factors, together with the dynamics of the two-plate structure, determine the antiphase operating point of the system, allowing the operating frequency to be locked in the frequency band where the antiphase response is more significant.

[0045] In the reverse phase state, both plates participate in the volume change of the pump chamber 61, the pressure fluctuation corresponding to a unit driving displacement is more concentrated, the reciprocating flow of the jet orifice 52 is more obvious, and a stronger fluid exchange capacity can be achieved in a small-sized structure.

[0046] Furthermore, the jet plate 5 includes a support ring 53 located on the outer side, an elastic ring 54 located on the inner side of the support ring 53, and an elastic sheet 55 and an elastic plate 56 located on the inner side of the elastic ring 54. The elastic sheet 55 and the elastic plate 56 are stacked along the vibration direction of the jet plate 5, and the elastic sheet 55 or the elastic plate 56 serves as the inner wall of the pump cavity 61. An opening 57 is provided on the elastic sheet 55, the second cavity 51 is formed on the elastic plate 56, and the jet hole 52 is formed on the elastic sheet 55. During the deformation of the jet plate 5, the elastic sheet 55 and the elastic plate 56 are in contact, and the elastic plate 56 blocks the opening 57.

[0047] The support ring 53 serves as the external foundation structure of the jet plate 5, providing support for its internal structure. The support ring 53 can be connected to the pump base 6. During the deformation of the jet plate 5, the support ring 53 will not deform. The elastic ring 54 is mainly used to provide buffer for the elastic sheet 55 and the elastic plate 56, so that the elastic sheet 55 and the elastic plate 56 can be softly connected to the support ring 53 through the elastic ring 54, which facilitates the deformation of the elastic sheet 55 and the elastic plate 56.

[0048] When the elastic plate 55 is located on the side closest to the pump chamber 61, the elastic plate 56 is located on the outside. The jet plate 5 protrudes outward and deforms, drawing external fluid into the pump chamber 61. At this time, the force of the fluid in the second cavity 51 on the elastic plate 55 will push the elastic plate 55 and the elastic plate 56 to separate, so that the elastic plate 56 no longer blocks the opening 57. The fluid quickly enters the pump chamber 61 through the opening 57, realizing the rapid suction of the fluid. At this time, the deformation of the elastic plate 56 will drive the elastic ring 54 to deform synchronously. The elastic ring 54 provides a certain auxiliary force to the elastic plate 55, causing the elastic plate 55 to deform synchronously with the elastic plate 56. The force of the fluid will overcome the auxiliary force and separate the elastic plate 55 from the elastic plate 56. When the jet plate 5 contracts inward, the elastic plate 55 and the elastic plate 56 re-adhere. The elastic plate 56 blocks the opening 57, and the fluid in the pump chamber 61 can only be discharged through the jet hole 52. At this time, this structure can facilitate the fluid in the pump chamber 61 to push the elastic plate 55 and the elastic plate 56 to expand and deform outward again.

[0049] When the elastic plate 56 is located on the side close to the pump chamber 61, the elastic sheet 55 is located on the outside. When the fluid enters the pump chamber 61, it will push the elastic sheet 55 and the elastic plate 56 to fit together. When the fluid flows out of the pump chamber 61, the fluid will push the elastic sheet 55 and the elastic plate 56 to separate. The elastic plate 56 stops blocking the opening 57, so that the fluid in the pump chamber 61 can be quickly discharged through the opening 57.

[0050] It should be noted that since both the elastic sheet 55 and the elastic plate 56 are mounted on the elastic ring 54, when the deformation directions of the elastic sheet 55 and the elastic plate 56 are different, the forces exerted by the elastic sheet 55 and the elastic plate 56 on the elastic ring 54 are opposite, and the elastic ring 54 will deform in two directions. In order to ensure that the deformation can more easily act on the elastic sheet 55, the thickness of the elastic sheet 55 can be reduced, making the elastic sheet 55 easier to deform.

[0051] Furthermore, such as Figure 7 and Figure 8 As shown, there are two deformation units located opposite each other on the upper and lower sides of the piezoelectric ceramic 8. The piezoelectric ceramic 8 drives the vibrating plates 7 on the two deformation units to vibrate synchronously in opposite directions.

[0052] When an alternating current is applied to the piezoelectric ceramic 8, it generates a planar normal displacement. This displacement is transmitted to the vibrating plates 7 on the two deformation units on its upper and lower sides, thereby driving the two vibrating plates 7 to move synchronously in opposite directions. That is, when the piezoelectric ceramic 8 bulges upward, the lower vibrating plate 7 bulges upward and the lower deformation unit expands, while the upper vibrating plate 7 bulges upward and the upper deformation unit compresses. In this way, the synchronous forced vibration of the two deformation units is achieved by utilizing one deformation cycle of the piezoelectric ceramic 8, and the vibration modes of the two deformation units are opposite, which improves the full utilization of the movement stroke of the piezoelectric ceramic 8.

[0053] Furthermore, the piezoelectric ceramic 8 is connected to a vibrating plate 7 on a deformation unit via several columns 9. The columns 9 are distributed around the circumference of the piezoelectric ceramic 8. A core column 91 is provided in the middle of the upper and lower surfaces of the piezoelectric ceramic 8, and the core column 91 is connected to the corresponding vibrating plate 7.

[0054] The piezoelectric ceramic 8 and the two deformation units on its upper and lower sides are in a separated state. Compared with the state in which the piezoelectric ceramic 8 is attached to the vibrating plate 7, this can avoid the reverse constraint of the vibrating plate 7 on the piezoelectric ceramic 8, and make it easier to set the force transmission point at the edge of the piezoelectric ceramic 8. This allows all the local deformations of the piezoelectric ceramic 8 from the middle to the edge to be accumulated, significantly increasing the amount of deformation.

[0055] When the piezoelectric ceramic 8 is energized and deformed, several columns 9 support and guide it. That is, when the piezoelectric ceramic 8 increases in its radial direction, it will push the columns 9 to tilt. At this time, since the bottom of the columns 9 is fixed, the columns 9 will open outward, so that the piezoelectric ceramic 8 changes from a planar shape to an outward convex umbrella shape. This deformation method of the piezoelectric ceramic 8 can be achieved by using the columns 9 to drive the vibrating plate 7 connected to the columns 9 to convex outward.

[0056] Since the piezoelectric ceramic 8 is connected to the corresponding vibrating plate 7 through the core column 91, the displacement of the middle part of the piezoelectric ceramic 8 is the largest when it deforms. Thus, the core column 91 can pull or push the corresponding vibrating plate 7 to deform synchronously, thereby realizing the synchronous reverse movement of the two deformation units.

[0057] Furthermore, such as Figure 8 As shown, a plurality of first cavities 71 in the vibrating plate 7 are interconnected by a plurality of air passages 72. A sleeve 93 communicating with one of the first cavities 71 is provided on the vibrating plate 7. A piston 92 is slidably disposed in the sleeve 93 and is connected to the corresponding core column 91.

[0058] When the piezoelectric ceramic 8 expands and deforms, it will synchronously drive the piston 92 to move in the sleeve 93 through the core column 91. Taking the lower deformation unit as an example, when the piston 92 moves upward, the air in the first cavity 71 will be replenished into the sleeve 93 through the air passage 72, thereby causing the lower inner wall of the first cavity 71 to be concave inward, achieving the purpose of actively driving the deformation of the first cavity 71. This can avoid calculating the coupling timing when the first cavity 71 deforms, making it easier to control. At the same time, it avoids the ineffective offsetting range between the deformation fluctuation of the first cavity 71 and the deformation fluctuation of the vibrating plate 7 when using inertia to control the deformation of the first cavity 71.

[0059] It should be noted that since the upper deformation unit is only connected to the piezoelectric ceramic 8 through the corresponding core post 91, when the core post 91 moves and pushes the corresponding piston 92 to move, the expansion of the first cavity 71 in the upper deformation unit will synchronously drive the corresponding vibration plate 7 to be concave, so that the upper deformation unit can also achieve the dual coupling effect.

[0060] Furthermore, such as Figure 9 As shown, the piezoelectric ceramic 8 is circular in shape and consists of a core disk 83, a shear ceramic ring 84, a buffer ring 82, and a diameter-variable ceramic ring 81 arranged sequentially from the inside to the outside. The diameter-variable ceramic ring 81 is connected to several of the columns 9, and the core disk 83 is connected to the core column 91. The shear ceramic ring 84 is composed of several ceramic panels 841 arranged in a ring and several partitions 842. The partitions 842 are located between two adjacent ceramic panels 841.

[0061] When energized, the radially variable ceramic ring 81 expands and contracts radially. This deformation of the ceramic ring 81 drives the corresponding vibrating plate 7 to deform via several columns 9. When energized, the ceramic panel 841 generates tangential vibration along the axial direction of the piezoelectric ceramic 8. That is, the vibration direction of the ceramic panel 841 is consistent with the vibration direction of the vibrating plate 7. Thus, when the radially variable ceramic ring 81 drives the vibrating plate 7 to deform, several ceramic panels 841 can be used to further increase the displacement of the core column 91 and the deformation of the vibrating plate 7. This allows for a combination of vibrations using radial and axial deformation, simultaneously driving the movement of the vibrating plate 7. The buffer ring 82 and the partition 842 can be used to buffer and connect the deformation of the radially variable ceramic ring 81 and the ceramic panel 841. The core disk 83 can be used to connect the piezoelectric ceramic 8 and the core column 91.

[0062] Furthermore, the vibrating plate 7 is formed by stacking and welding multiple layers of metal films, and the first cavity 71 is formed between the multiple layers of metal films.

[0063] Secondly, the geometry of the first cavity 71 can be circular, elliptical, racetrack-shaped, square, or rectangular to suit the shape and modal design requirements of the piezoelectric ceramic 8. The thickness and uniformity of the adhesive layer between the piezoelectric ceramic 8 and the vibrating plate 7 affect the modal and phase relationships, and consistency can be ensured through processes such as dispensing fixtures or film thickness control.

[0064] The jet plate 5 is formed by stacking and welding multiple layers of metal films. The second cavity 51 is formed between the multiple layers of metal films. Multiple jet holes 52 are opened on the metal films corresponding to the second cavity 51.

[0065] The jet orifices 52 can be fabricated using laser drilling, micro-drilling, stamping, or photolithography. The orifice array can form one or more jet orifices 52 within each second cavity 51. The jet orifices 52 can be designed as straight holes, stepped holes, or orifices with converging / expanding sections to accommodate different flow resistances and jetting characteristics. The connection between the jet plate 5 and the annular support can be achieved through welding or sealing adhesive to ensure stable boundary conditions in the pump cavity 61 and prevent leakage that could lead to phase and pressure mismatch. The combination of the jet orifice array 52 and the second cavity 51 makes the external communication path more controllable, facilitating trade-offs between flow rate and noise in different application environments by adjusting the number, diameter, and shape of the orifices, while maintaining the reliability of the valveless structure.

[0066] Although this application has been described in conjunction with specific features and embodiments, it is obvious that various modifications and combinations can be made thereto without departing from the spirit and scope of this application. Accordingly, this specification and drawings are merely exemplary illustrations of the application as defined herein, and are to be considered as covering any and all modifications, variations, combinations, or equivalents within the scope of this application. Clearly, those skilled in the art can make various alterations and modifications to this application without departing from its scope. Thus, if such modifications and modifications fall within the scope of this application and its equivalents, this application intends to include such modifications and modifications.

Claims

1. A fluid generating device, characterized in that, It includes a deformation unit and a piezoelectric ceramic, wherein the deformation unit includes a jet plate, a pump base and a vibrating plate stacked in sequence; The pump base is set as an annular support, and together with the jet plate and vibrating plate set on both sides of it, a pump chamber is formed; Piezoelectric ceramics are used to drive the vibration of a vibrating plate. At least one sealed first cavity is provided inside the vibrating plate, and the first cavity is provided in accordance with the planar projection of the piezoelectric ceramic on the vibrating plate. Multiple second cavities are provided on the jet plate corresponding to the first cavity, and multiple jet holes are opened on the jet plate corresponding to the second cavities. The pump cavity is connected to the outside through the jet holes. Within the set operating frequency band of the piezoelectric ceramic, the vibrating plate and the jet plate vibrate in opposite directions with a 180° phase difference within the effective working area of ​​the corresponding pump chamber. The jet plate includes an outer support ring, an inner elastic ring, and an elastic sheet and an elastic plate located inside the elastic ring. The elastic sheet and the elastic plate are stacked along the vibration direction of the jet plate, and the elastic sheet or the elastic plate serves as the inner wall of the pump cavity. An opening is provided on the elastic sheet, the second cavity is formed on the elastic plate, and the jet hole is formed on the elastic sheet. During the deformation of the jet plate, the elastic sheet and the elastic plate are in contact, and the elastic plate blocks the opening. The deformation unit is provided in two and is located opposite each other on the upper and lower sides of the piezoelectric ceramic. The piezoelectric ceramic drives the vibrating plates on the two deformation units to vibrate synchronously in opposite directions. The piezoelectric ceramic is connected to a vibrating plate on a deformation unit via several columns. The columns are distributed around the circumference of the piezoelectric ceramic. A core column is provided in the middle of the upper and lower surfaces of the piezoelectric ceramic, and the core column is connected to the corresponding vibrating plate. The vibrating plate has several first cavities that are interconnected by several air passages. The vibrating plate is provided with a sleeve that communicates with one of the first cavities. A piston is slidably disposed inside the sleeve and is connected to the corresponding core column.

2. The fluid generating device according to claim 1, characterized in that, The piezoelectric ceramic is circular in shape and consists of a core disk, a shear ceramic ring, a buffer ring, and a diameter-variable ceramic ring arranged sequentially from the inside to the outside. The diameter-variable ceramic ring is connected to several of the columns, and the core disk is connected to the core columns. The shear ceramic ring is composed of several ceramic panels and several partitions arranged in a ring. The partitions are located between two adjacent ceramic panels.

Images