Filtering device for purifying electronic-grade ultra-pure ammonia

Abstract

This invention relates to the field of ammonia purification technology and discloses a filtration device for purifying electronic-grade ultrapure ammonia. The device includes a base and a filtration mechanism located on top of the base. The filtration mechanism includes an outer box containing a semi-permeable membrane filter plate. Support plates are located on both sides of the bottom of the semi-permeable membrane filter plate, and discs are located on both sides of the top of the filter plate. Rotating rods are located on the sides of the two support plates that are close to each other. First motors are fixed to both sides of the outer box. When gas is introduced into the outer box, the semi-permeable membrane filter plate separates ammonia from hydrogen. Starting the first motor drives the discs to rotate. The rotation of the discs causes a cylindrical pin to move in a circular motion. Through the sliding of the cylindrical pin against the square slot, the pin actuates the rotating rod, which in turn moves the support plate vertically via a connecting rod. This causes the semi-permeable membrane filter plate to shake, causing impurities adhering to the filter plate to roll, reducing the probability of clogging the filter pores and ensuring smooth ammonia purification.

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