A cleaning fluid purification and regeneration system and method based on micromotor magnetic field programming

Abstract

This invention provides a cleaning fluid purification and regeneration system and method based on micromotor magnetic field programming. The system includes a cleaning unit, a purification tank, an in-situ regeneration tank, a magnetic field transmission channel, and a programmable magnetic field device. The cleaning unit cleans the workpiece and contains the cleaning fluid to be purified. The purification tank is connected to the cleaning unit to form a cleaning fluid circulation loop, and contains a functionalized micromotor. The in-situ regeneration unit receives and regenerates the functionalized micromotor that has captured contaminants. The magnetic field transmission channel connects the purification tank and the in-situ regeneration unit. The programmable magnetic field device is disposed in at least a portion of the purification tank, the magnetic field transmission channel, and the in-situ regeneration unit to generate a programmable magnetic field environment. This invention achieves efficient removal of contaminants, allows for the recycling of cleaning fluid consumables, and enables zero-residue recovery of the functionalized micromotor that has captured contaminants, achieving closed-loop regeneration.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, and in particular relates to a cleaning fluid purification and regeneration system and method based on micro-motor magnetic field programming. Background Technology

[0002] In wet cleaning processes for semiconductor manufacturing, the purity of the cleaning solution directly determines the chip yield. For example, in the RCA cleaning process, the cleaning solution is used to remove particles, metal ions, and organic contaminants from the silicon wafer surface to ensure the quality of subsequent oxide layer or thin film growth; while in the subsequent copper interconnect process, the cleaning solution is used to remove residues from the copper interconnect process. During the above cleaning processes, the cleaning solution (such as SC1, SC2 solutions, or organic solvents) will continuously accumulate three main types of contaminants, including submicron / nanoscale particulate contaminants, metal ion contaminants (such as Cu²⁺, Fe³⁺, Al³⁺, etc.), and organic and molecular residues (such as surfactant or photoresist residues).

[0003] To reduce production costs and hazardous waste emissions, a cleaning solution recycling system is typically used. See [link to relevant documentation]. Figure 1 This is a schematic diagram of the structure of a cleaning fluid recycling device in the prior art. The device mainly includes a cleaning tank 1, a recycling storage tank 2, a filter 3, and a cleaning fluid circulation pipeline 4. The recycling and reuse of high-concentration chemical solutions mainly depends on the filter 3, that is, the filter 3 intercepts pollutants, so that the cleaning fluid can be regenerated and reused. However, the above-mentioned filter-based cleaning fluid purification methods have the following significant technical drawbacks: 1) Existing filtration, centrifugation, or adsorption technologies are all passive processes. For submicron or nanoscale particulate pollutants smaller than 100 nm, their filtration efficiency is low. At the same time, due to the deposition of pollutants on the filter membrane surface, the filter membrane is easily clogged, which in turn affects the flow rate and circulation efficiency of the cleaning fluid; 2) Single physical treatment technologies usually only target a specific type of pollutant. In actual cleaning processes, the cleaning fluid often contains a complex pollution system with "particles-metal ions-organic matter" coexisting. Existing technologies are difficult to achieve the synergistic removal of multiple types of pollutants; 3) Physical filtration methods produce saturated filter cartridges. These saturated filter cartridges are classified as solid hazardous waste, which not only increases the cost of hazardous waste treatment but also requires downtime for filter cartridge replacement, seriously affecting the continuity of semiconductor production; 4) They cannot adaptively respond according to the type, concentration distribution, and spatial location of pollutants. Their treatment process lacks "intelligence" and "targeting," and cannot actively find and remove pollutants, resulting in limited purification effects.

[0004] Therefore, there is a need to provide an improved technical solution that addresses the shortcomings of the existing technology.

[0005] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Summary of the Invention

[0006] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a cleaning fluid purification and regeneration system and method based on micro-motor magnetic field programming, which solves the problems of low pollutant removal efficiency, easy clogging, inability to co-process compound pollutants and generation of solid hazardous waste caused by passive filtration in the prior art cleaning fluid circulation technology.

[0007] To achieve the above and other related objectives, the present invention provides a cleaning fluid purification and regeneration system based on micromotor magnetic field programming, the system comprising:

[0008] A cleaning unit, which is used to clean the workpiece and contain the cleaning solution to be purified;

[0009] A purification tank is connected to the cleaning unit via a first pipeline and a second pipeline to form a cleaning fluid circulation loop. The cleaning fluid to be purified in the cleaning unit is transported to the purification tank via the first pipeline. The purification tank contains a functional micromotor, which is used to actively capture contaminants in the cleaning fluid.

[0010] An in-situ regeneration unit is used to receive and regenerate the functionalized micromotor that has captured contaminants.

[0011] A magnetic field transmission channel, wherein the magnetic field transmission channel connects the purification tank and the in-situ regeneration unit;

[0012] A programmable magnetic field device is disposed in at least a portion of the purification tank, the magnetic field transmission channel, and the in-situ regeneration unit to generate a programmable magnetic field environment.

[0013] The programmable magnetic field device controls the functionalized micromotor to move within the purification tank to capture pollutants. The programmable magnetic field device drives the functionalized micromotor, which has captured pollutants, to transfer and collect the pollutants through the magnetic field transmission channel to the in-situ regeneration unit.

[0014] Preferably, a pump and a pre-filter are sequentially installed on the first pipeline. The pump delivers the cleaning solution to be purified to the purification tank, and the pre-filter is used to perform preliminary filtration on the cleaning solution to be purified.

[0015] Preferably, the functionalized micromotor is a magnetic Janus micromotor, comprising a symmetrically arranged driving surface and a functional bearing surface;

[0016] The driving surface includes a magnetically responsive material that responds to an external magnetic field to drive the functionalized micromotor to move, and the functional bearing surface layer is used to specifically bind contaminants in the cleaning fluid.

[0017] Preferably, the magnetically responsive material is at least one of Fe3O4 or Ni.

[0018] Preferably, the functional bearing surface includes: a positively charged polymer layer modified for capturing particulate pollutants, a specific chelating ligand modified for capturing metal ion pollutants, a hydrophobic region modified for capturing organic pollutants, or a conjugated structure molecule with π-π stacking ability.

[0019] Preferably, the programmable magnetic field device includes at least one of an electromagnetic coil assembly and a magnet assembly; the electromagnetic coil assembly includes a triaxial Helmholtz coil for generating a three-dimensional controllable magnetic field by adjusting the current; the magnet assembly includes a permanent magnet array for generating a rotating magnetic field.

[0020] Preferably, a magnetic medium component is provided in the magnetic field transmission channel; the magnetic field generated by the programmable magnetic field device acts on the magnetic medium component, causing it to generate a directional strong gradient magnetic field, which rapidly separates and collects the functionalized micromotor that captures pollutants into the in-situ regeneration unit.

[0021] Preferably, the system further includes an environmental regulation mechanism connected to the in-situ regeneration unit, which regulates the solution environment within the in-situ regeneration unit to achieve the dissociation of pollutants from the functionalized micromotor.

[0022] Preferably, a regeneration circulation pipeline is also provided between the in-situ regeneration unit and the purification tank. One end of the regeneration circulation pipeline is connected to the in-situ regeneration tank, and the other end is connected to the purification tank, for transporting the regenerated functionalized micromotor back to the purification tank.

[0023] This invention also provides a method for purifying and regenerating cleaning fluid based on micromotor magnetic field programming, comprising the following steps:

[0024] S1. The above-mentioned cleaning fluid purification and regeneration system is provided, in which a functional micro motor is injected into a purification tank that is circulated with the cleaning unit. Under the control of a programmable magnetic field device, the functional micro motor forms a cluster and actively searches for and captures contaminants in the cleaning fluid to be purified.

[0025] S2. The programmable magnetic field device applies a strong gradient magnetic field to the magnetic field transmission channel, which quickly separates the functionalized micromotor loaded with pollutants and collects it into the in-situ regeneration unit through the magnetic field transmission channel.

[0026] S3. In the in-situ regeneration unit, by changing the solution environment within the in-situ regeneration unit, the surface binding force between the pollutants and the functionalized micromotor is disrupted, causing the pollutants to be released in a concentrated manner, and the functionalized micromotor is regenerated and its activity is restored.

[0027] S4. The regenerated functionalized micromotor is transported back to the purification tank, and the purified cleaning solution is recycled back to the cleaning tank for continued use, for the next round of purification cycle.

[0028] As described above, the cleaning fluid purification and regeneration system and method based on micro-motor magnetic field programming of the present invention has the following beneficial effects:

[0029] The system of this invention includes a cleaning unit, a purification tank, an in-situ regeneration tank, a magnetic field transmission channel, and a programmable magnetic field device. The functional micromotor in the purification tank, under the synergistic effect of the rotating magnetic field and the navigation magnetic field generated by the external programmable magnetic field device, achieves accurate identification and active capture of pollutants. At the same time, the functional bearing surface of the functional micromotor can specifically bind to complex pollutant types such as particulate pollutants, metal ions, and organic pollutants in the cleaning fluid, achieving efficient removal of pollutants, significantly extending the purification cycle of the cleaning fluid, improving the capture efficiency of pollutants, and realizing the recycling of cleaning fluid consumables.

[0030] This invention utilizes a programmable magnetic field device to generate a directional high-gradient magnetic field at the magnetic field transmission channel, applying a strong magnetic driving force to the functionalized micromotors that have captured contaminants. This rapidly and precisely separates the contaminants from the flowing cleaning liquid and collects them in the in-situ regeneration unit. This magnetic separation method is fast and thorough, achieving zero-residue recovery of the functionalized micromotors with captured contaminants. By adjusting the solution environment in the in-situ regeneration unit, the contaminants are dissociated from the surface of the functionalized micromotors, achieving in-situ regeneration of the functionalized micromotors and recycling them back to the purification tank, thus realizing a closed-loop regeneration system and reducing solid waste emissions. Furthermore, this system can be adapted to the purification needs of different contaminants simply by replacing different types of functionalized micromotors, without the need to replace other equipment, demonstrating strong versatility and scalability. Attached Figure Description

[0031] Figure 1 The diagram shown is a structural schematic of a cleaning fluid recovery and circulation device in the prior art.

[0032] Figure 2 The diagram shown is a structural schematic of the cleaning fluid purification and regeneration system in a specific embodiment of the present invention.

[0033] Component designation explanation

[0034] 1 cleaning tank 2 Recycling storage tanks 3 Filter 4 Cleaning fluid circulation pipeline 11 Cleaning inner tank 12 Cleaning outer tank 13 workpiece 20 purification pool 21 Functionalized micro motors 30 Magnetic field transmission channel 40 In-situ regeneration unit 50 Programmable magnetic field device 61 First pipeline 62 Second pipeline 63 Self-circulation pipeline 64 Regeneration circulation pipeline 65 backup pipeline 66 Waste liquid discharge pipeline 71 pump 72 control valve 73 Pre-filter Detailed Implementation

[0035] The following description, in conjunction with the accompanying drawings of the embodiments of this application, outlines various embodiments of this application. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this application. For ease of explanation, when detailing the embodiments of this application, the cross-sectional views illustrating the device structure are partially enlarged, not according to general proportions, and the schematic diagrams are merely examples and should not limit the scope of protection of this application. Furthermore, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0036] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixed connection" refers to a connection where the relative positional relationship remains unchanged after connection. It should be understood that when component A is fixedly connected to component C via component B, changes in the relative positional relationship due to deformation of components A, B, and C are permissible. "Rotary connection" refers to a connection where the components can rotate relative to each other after connection. "Sliding connection" refers to a connection where the components can slide relative to each other after connection. The phrase "two components forming an integrated structure through a one-piece molding process" means that during the formation of one of the two components, that component is connected to the other component, without requiring further processing (such as bonding, welding, snap-fit ​​connections, or screw connections) to connect the two components.

[0037] The directional terms mentioned in the embodiments of this application, such as "upper", "lower", "side", "top", "bottom", etc., are only for reference to the direction of the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this application, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0038] The term "multiple" refers to at least two. The term "more than" includes the stated number. The term "and / or" describes a relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0039] Please refer to the following: Figure 2 This invention provides a cleaning fluid purification and regeneration system based on micromotor magnetic field programming, the system comprising:

[0040] A cleaning unit is used to clean the workpiece 13 and contain the cleaning solution to be purified.

[0041] Purification tank 20 is connected to the cleaning unit through a first pipe 61 and a second pipe 62 to form a cleaning liquid circulation loop. The cleaning liquid to be purified in the cleaning unit is transported to the purification tank 20 through the first pipe 61. The purification tank 20 contains a functional micro motor 21, which is used to actively capture contaminants in the cleaning liquid.

[0042] In-situ regeneration unit 40, the in-situ regeneration unit 40 being used to receive and regenerate the functionalized micromotor 21 that has captured contaminants;

[0043] Magnetic field transmission channel 30, the magnetic field transmission channel 30 connects the purification tank 20 and the in-situ regeneration unit 40;

[0044] A programmable magnetic field device 50 is disposed in at least a portion of the purification tank 20, the magnetic field transmission channel 30, and the in-situ regeneration unit 40 to generate a programmable magnetic field environment.

[0045] The programmable magnetic field device 50 controls the functionalized micromotor 21 to move within the purification tank 20 to capture pollutants. The programmable magnetic field device 50 drives the functionalized micromotor 21, which has captured pollutants, to transfer and collect them in the in-situ regeneration unit 40 via the magnetic field transmission channel 30.

[0046] Specifically, the functional micromotor 21 in the purification tank 20, under the synergistic effect of the rotating magnetic field and the navigation magnetic field generated by the external programmable magnetic field device 50, achieves precise identification and active capture of pollutants. Simultaneously, the functional bearing surface of the functional micromotor 21 can specifically bind to complex pollutant types such as particulate pollutants, metal ions, and organic pollutants in the cleaning fluid, achieving efficient removal of pollutants, significantly extending the purification cycle of the cleaning fluid, improving pollutant capture efficiency, and enabling the recycling of cleaning fluid consumables. The programmable magnetic field device 50 generates a directional high-gradient magnetic field at the magnetic field transmission channel 30, applying a magnetic field to the functional micromotor 21 that has captured pollutants. The strong magnetic driving force quickly and accurately separates the pollutants from the flowing cleaning liquid and collects them in the in-situ regeneration unit 40. This magnetic separation method is rapid and thorough, achieving zero-residue recovery of the functional micromotor 21 that has captured pollutants. By adjusting the solution environment in the in-situ regeneration unit 40, the pollutants are dissociated from the surface of the functional micromotor 21, realizing the in-situ regeneration of the functional micromotor 21 and circulating it back to the purification tank 20, thus achieving a closed-loop regeneration system and reducing solid waste emissions. In addition, this system can be adapted to the purification needs of different pollutants simply by replacing different types of functional micromotors 21, without the need to replace other equipment, and has strong versatility and scalability.

[0047] In a specific embodiment of the present invention, the cleaning unit includes an inner cleaning tank 11 and an outer cleaning tank 12. A self-circulating pipeline 63 connects the inner cleaning tank 11 and the outer cleaning tank 12. The inner cleaning tank 11 is used to clean the workpiece 13. The cleaning fluid used to clean the workpiece 13 can flow between the inner cleaning tank 11 and the outer cleaning tank 12 through the self-circulating pipeline 63 to ensure the uniformity of the cleaning fluid mixing. A pump 71 is provided on the self-circulating pipeline 63.

[0048] In a specific embodiment of the present invention, the workpiece 13 to be cleaned is a wafer, and the cleaning solution to be purified after cleaning the wafer mainly contains particulate contaminants, metal ion contaminants, organic contaminants, etc.

[0049] As an example, a pump 71 and a pre-filter 73 are sequentially installed on the first pipeline 61. The pump 71 delivers the cleaning liquid to be purified to the purification tank 20, and the pre-filter 73 is used to perform preliminary filtration on the cleaning liquid to be purified.

[0050] Specifically, pump 71 can be a magnetic pump 71 or a pneumatic diaphragm pump 71, with no particular limitation; the aperture of the pre-filter device 73 needs to be selected according to actual needs, with no limitation here, the main purpose being to perform preliminary filtration of the cleaning solution. In a specific embodiment of the present invention, the purified cleaning solution in the purification tank 20 is returned to the cleaning unit for recycling through the second pipeline 62, and a pump 71 is also installed on the second pipeline 62.

[0051] As an example, the functionalized micromotor 21 is a magnetic Janus micromotor, including a driving surface and a functional bearing surface arranged symmetrically; the driving surface includes a magnetically responsive material, which is used to respond to an external magnetic field to drive the functionalized micromotor 21 to move, and the functional bearing surface layer is used to specifically bind contaminants in the cleaning fluid.

[0052] Specifically, a magnetic Janus micromotor is a micro-nano scale (typically a few micrometers to tens of micrometers) artificial device that can convert chemical energy, light energy, or other forms of energy from the surrounding environment into its own kinetic energy in a liquid. The substrate of the driving surface is composed of catalytic materials, such as manganese dioxide; the substrate of the functional carrier surface is composed of non-catalytic materials, such as silica, polymer microspheres, or gold microspheres. The functional carrier surface does not participate in the driving process and is mainly used to carry functional molecules, provide space, or perform surface modification. By modifying specific materials or molecules, the magnetic Janus micromotor can selectively capture or remove corresponding contaminants.

[0053] As an example, the magnetically responsive material is at least one of Fe3O4 or Ni.

[0054] Specifically, the functionalized micromotor 21 utilizes the magnetic response material of the driving surface to achieve the purification and regeneration of the cleaning fluid by relying on the rotation, oscillation, and navigation capabilities of the magnetic field under the action of an external magnetic field. This functionalized micromotor 21 integrates autonomous movement capability and surface functionalization, and can actively swim towards pollutants, greatly improving the collision and capture efficiency with pollutants.

[0055] As an example, the functional bearing surface includes: a positively charged polymer layer modified for capturing particulate pollutants, a specific chelating ligand modified for capturing metal ion pollutants, a hydrophobic region modified for capturing organic pollutants, or a conjugated structural molecule with π-π stacking capability.

[0056] In a specific embodiment of the present invention, the modified positively charged polymer layer is polyallylamine hydrochloride, and the specific chelating ligand is IDA (iminodiacetic acid) or DTPA (diethylenetriaminepentaacetic acid).

[0057] As an example, the programmable magnetic field device 50 includes at least one of an electromagnetic coil assembly and a magnet assembly; the electromagnetic coil assembly includes a triaxial Helmholtz coil for generating a three-dimensional controllable magnetic field by adjusting the current; the magnet assembly includes an array of permanent magnets for generating a rotating magnetic field.

[0058] Specifically, the triaxial Helmholtz coil includes three sets of coils, each of which transmits a current of a specific magnitude and direction, thereby drawing a specific magnetic field at the center of space. This magnetic field can both control the motion trajectory of the functionalized micromotor 21 and drive the spin of the functionalized micromotor 21; the permanent magnet array drives the functionalized micromotor 21 by generating a rotating magnetic field.

[0059] As an example, a magnetic medium component is provided in the magnetic field transmission channel 30; the magnetic field generated by the programmable magnetic field device 50 acts on the magnetic medium component, causing it to generate a directional strong gradient magnetic field, which rapidly separates and collects the functionalized micromotor 21 that captures pollutants into the in-situ regeneration unit 40.

[0060] Specifically, the magnetic medium component is used to assist in generating a strong gradient magnetic field to apply a magnetic driving force to the functionalized micromotor 21, so as to guide it to move along the magnetic field transmission channel 30; wherein, the gradient value of the strong gradient magnetic field is greater than a preset threshold to generate a magnetic driving force sufficient to overcome fluid resistance, so as to adsorb or guide the functionalized micromotor 21 to the in-situ regeneration unit 40.

[0061] As an example, the system also includes an environmental regulation mechanism (not shown in the figure), which is connected to the in-situ regeneration unit 40. The environmental regulation mechanism adjusts the solution environment within the in-situ regeneration unit 40 to achieve the dissociation of pollutants from the functionalized micromotor 21.

[0062] Specifically, by changing the pH value and ionic strength of the solution environment in the in-situ regeneration unit 40 through an environmental regulation mechanism, or by adding competing agents or reducing agents, the binding force between pollutants and the surface of the functionalized micromotor 21 is destroyed, causing the pollutants to dissociate from the surface of the functionalized micromotor 21 and be released into the waste liquid chamber. Correspondingly, the dissociated functionalized micromotor 21 is recycled back to the purification tank 20. The dissociated functionalized micromotor 21 also needs to be rinsed or its conditions reset before being transported back to the purification area for the next round of purification.

[0063] In a specific embodiment of the present invention, the in-situ regeneration unit 40 includes a waste liquid chamber, which is used to collect and discharge the dissociated pollutants. When a certain concentration of pollutant waste liquid accumulates in the waste liquid chamber, it is periodically discharged in small amounts through the waste liquid discharge pipeline 66 or subjected to offline deep treatment, which greatly reduces the discharge of hazardous solid waste. The waste liquid discharge pipeline 66 is equipped with a control valve 72. The dissociated functionalized micro motor 21 is controlled by the programmable magnetic field device 50 and will not be discharged, and then transported to the purification tank 20.

[0064] As an example, a regeneration circulation pipeline 64 is also provided between the in-situ regeneration unit 40 and the purification tank 20. One end of the regeneration circulation pipeline 64 is connected to the in-situ regeneration tank, and the other end is connected to the purification tank 20, for transporting the regenerated functionalized micromotor 21 back to the purification tank 20.

[0065] Specifically, a pump 71 is also installed on the regeneration circulation pipeline 64, which pumps the dissociated functionalized micro motor 21 into the purification tank 20 for recycling.

[0066] In a specific embodiment of the present invention, a backup pipeline 65 is also provided between the in-situ regeneration unit 40 and the cleaning unit. A pump 71 is also installed on this backup pipeline 65. After the waste liquid in the waste liquid chamber is discharged, the remaining recyclable cleaning liquid can be transported back to the cleaning unit through the backup pipeline 65. Furthermore, see... Figure 2 Control valves 72 are installed on the self-circulation pipeline 63, the first pipeline 61, the second pipeline 62, the regeneration circulation pipeline 64, and the standby pipeline 65.

[0067] In addition, the present invention also provides a method for purifying and regenerating cleaning fluid based on micro-motor magnetic field programming, comprising the following steps:

[0068] S1. The above-mentioned cleaning fluid purification and regeneration system is provided. The functional micro motor 21 is injected into the purification tank 20 which is circulated with the cleaning unit. Under the control of the programmable magnetic field device 50, the functional micro motor 21 forms a cluster and actively searches for and captures the contaminants in the cleaning fluid to be purified.

[0069] S2. The programmable magnetic field device applies a strong gradient magnetic field to the magnetic field transmission channel 30, so that the functionalized micro motor 21 loaded with pollutants is quickly separated and collected into the in-situ regeneration unit 40 through the magnetic field transmission channel 30.

[0070] S3. In the in-situ regeneration unit 40, by changing the solution environment within the in-situ regeneration unit 40, the surface binding force between the pollutants and the functionalized micromotor 21 is disrupted, causing the pollutants to be released in a concentrated manner, and the functionalized micromotor 21 is regenerated and restored to its activity.

[0071] S4. The regenerated functionalized micromotor 21 is transported back to the purification tank 20, and the purified cleaning solution is recycled back to the cleaning tank for continued use, for the next round of purification cycle.

[0072] Specifically, the cleaning fluid purification and regeneration method is based on the cleaning fluid purification and regeneration system based on micro-motor magnetic field programming mentioned above. Of course, other devices can also be used to achieve this, and no further restrictions are imposed here.

[0073] In summary, the system of this invention includes a cleaning unit, a purification tank, an in-situ regeneration tank, a magnetic field transmission channel, and a programmable magnetic field device. Under the synergistic effect of the rotating magnetic field and the navigation magnetic field generated by the external programmable magnetic field device, the functional micromotor in the purification tank achieves accurate identification and active capture of pollutants. At the same time, the functional bearing surface of the functional micromotor can specifically bind to complex pollutant types such as particulate pollutants, metal ions, and organic pollutants in the cleaning fluid, achieving efficient removal of pollutants, significantly extending the purification cycle of the cleaning fluid, improving the capture efficiency of pollutants, and realizing the recycling of cleaning fluid consumables. This invention utilizes a programmable magnetic field device to generate a directional high-gradient magnetic field at the magnetic field transmission channel. This field applies a strong magnetic driving force to functionalized micromotors that have captured contaminants, rapidly and precisely separating them from the flowing cleaning fluid and collecting them in an in-situ regeneration unit. This magnetic separation method is fast and thorough, achieving zero-residue recovery of the functionalized micromotors with captured contaminants. By adjusting the solution environment in the in-situ regeneration unit, contaminants are dissociated from the surface of the functionalized micromotors, enabling in-situ regeneration of the micromotors and their recycling back to the purification tank. This creates a closed-loop regeneration system, reducing solid waste emissions. Furthermore, this system can be adapted to different contaminant purification needs simply by replacing different types of functionalized micromotors, without requiring replacement of other equipment, demonstrating strong versatility and scalability. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0074] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. The structural materials, dimensions, shapes, etc., mentioned in the embodiments of this application are all illustrative descriptions and do not constitute strict or absolute limitations. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A cleaning fluid purification and regeneration system based on micro-motor magnetic field programming, characterized in that, The system comprises: a cleaning unit for cleaning workpieces and containing cleaning liquid to be purified; a purification tank in communication with the cleaning unit through a first pipeline and a second pipeline to form a cleaning liquid circulation loop, the cleaning liquid to be purified in the cleaning unit being transported to the purification tank through the first pipeline, and the purification tank containing functionalized micro-motors for actively capturing pollutants in the cleaning liquid; an in-situ regeneration unit for receiving and regenerating the functionalized micro-motors with captured pollutants; a magnetic field transmission channel communicating the purification tank and the in-situ regeneration unit; a programmable magnetic field device arranged in at least part of the areas of the purification tank, the magnetic field transmission channel and the in-situ regeneration unit to generate a programmable magnetic field environment; wherein the programmable magnetic field device controls the functionalized micro-motors to move in the purification tank to capture pollutants, and drives the functionalized micro-motors with captured pollutants to be transferred and collected to the in-situ regeneration unit through the magnetic field transmission channel at the magnetic field transmission channel.

2. The cleaning fluid purification and regeneration system of claim 1, wherein: A pump and a pre-filter device are sequentially arranged on the first pipeline, the pump transports the cleaning liquid to be purified to the purification tank, and the pre-filter device is used for preliminary filtering of the cleaning liquid to be purified.

3. The cleaning fluid purification and regeneration system of claim 1, wherein: The functionalized micro-motor is a magnetic Janus micro-motor, which includes symmetrically arranged driving surfaces and functional bearing surfaces. The driving surface includes a magnetic response material for responding to an external magnetic field to drive the functionalized micro-motor to move, and the functional bearing surface layer is used for specific binding of pollutants in the cleaning liquid.

4. The cleaning fluid purification and regeneration system of claim 3, wherein: The magnetic response material is at least one of Fe3O4 or Ni.

5. The cleaning fluid purification and regeneration system of claim 3, wherein: The functional bearing surface includes a positively charged polymer layer modified for capturing particulate pollutants, a specific chelate ligand modified for capturing metal ion pollutants, a hydrophobic region or a conjugated structure molecule with π-π stacking ability formed for capturing organic pollutants.

6. The cleaning fluid purification and regeneration system of claim 1, wherein: The programmable magnetic field device includes at least one of an electromagnetic coil assembly and a magnet assembly; the electromagnetic coil assembly includes a three-axis Helmholtz coil for generating a three-dimensional controllable magnetic field by adjusting current; and the magnet assembly includes a permanent magnet array for generating a rotating magnetic field.

7. The cleaning fluid purification and regeneration system of claim 1, wherein: A magnetic medium assembly is arranged in the magnetic field transmission channel; the magnetic field generated by the programmable magnetic field device acts on the magnetic medium assembly to generate a directional strong gradient magnetic field, which rapidly separates and collects the functionalized micro-motors with captured pollutants to the in-situ regeneration unit.

8. The cleaning fluid purification and regeneration system of claim 1, wherein: The system further comprises an environment adjusting mechanism connected with the in-situ regeneration unit, which adjusts the solution environment in the in-situ regeneration unit to achieve the dissociation of pollutants from the functionalized micro-motors.

9. The cleaning fluid purification and regeneration system of claim 1, wherein: A regeneration circulation pipeline is also provided between the in-situ regeneration unit and the purification tank. One end of the regeneration circulation pipeline is connected to the in-situ regeneration tank, and the other end is connected to the purification tank, for transporting the regenerated functionalized micromotor back to the purification tank.

10. A method for purifying and regenerating cleaning fluid based on micro-motor magnetic field programming, characterized in that: Includes the following steps: S1. A cleaning fluid purification and regeneration system according to any one of claims 1 to 9 is provided, wherein a functionalized micromotor is injected into a purification tank that is circulated and connected to the cleaning unit, and under the control of a programmable magnetic field device, the functionalized micromotor forms a cluster and actively searches for and captures contaminants in the cleaning fluid to be purified. S2. The programmable magnetic field device applies a strong gradient magnetic field to the magnetic field transmission channel, which quickly separates the functionalized micromotor loaded with pollutants and collects it into the in-situ regeneration unit through the magnetic field transmission channel. S3. In the in-situ regeneration unit, by changing the solution environment within the in-situ regeneration unit, the surface binding force between the pollutants and the functionalized micromotor is disrupted, causing the pollutants to be released in a concentrated manner, and the functionalized micromotor is regenerated and its activity is restored. S4. The regenerated functionalized micromotor is transported back to the purification tank, and the purified cleaning solution is recycled back to the cleaning tank for continued use, for the next round of purification cycle.

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