Parity-time symmetry exceptional point optical sensing structure and temperature sensor
By employing electro-optic thin films and electrode modulation in the optical sensing structure, the problem of difficult-to-control coupling strength between optical modes was solved, achieving narrow linewidth spectral response and high-sensitivity temperature sensing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HANGZHOU INST FOR ADVANCED STUDY UCAS
- Filing Date
- 2026-05-09
- Publication Date
- 2026-07-07
AI Technical Summary
In existing antiparity-time symmetric singular point optical sensing structures, the imaginary coupling strength between optical modes is difficult to control freely and precisely, which limits the improvement of sensing resolution and sensitivity.
By etching a thin film with electro-optic effect to form a coupled waveguide and a micro-ring resonator in an on-chip integrated structure, and by using two sets of electrodes to control the coupling strength between optical modes, the stable formation of anti-parity time-symmetric singularities can be achieved.
It achieves narrow linewidth spectral response between optical modes, significantly improving sensing resolution and sensitivity, and its compact structure is suitable for on-chip integration.
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Figure CN122345441A_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of integrated optical sensing technology, specifically relating to an antiparity time-symmetric singularity optical sensing structure and a temperature sensor. Background Technology
[0002] Currently, optical sensing structures based on parity-time (PT) symmetric singularities have inherent drawbacks: the eigenvalues of the structure are complex, resulting in large output spectral linewidths and making it difficult to further improve sensing resolution and sensitivity. In contrast, anti-parity-time (Anti-PT) symmetric singularity optical sensing structures possess true eigenvalues, enabling them to output narrow linewidths and true spectral responses, significantly improving sensing sensitivity and thus overcoming the bottlenecks in traditional sensing performance.
[0003] However, realizing antiparity-time symmetric singularities requires imaginary coupling strength between optical modes. This parameter is difficult to control freely and precisely in existing on-chip optical structures, which limits the practical application of antiparity-time symmetric singularities in integrated optical sensing. Summary of the Invention
[0004] In view of this, this application provides an antiparity-time symmetric singularity optical sensing structure and a temperature sensor. The main purpose is to construct an on-chip integrated sensing structure that can stably form an antiparity-time symmetric singularity. This structure can achieve free control of the imaginary coupling strength between optical modes through electrode modulation and thin-film electro-optic effect.
[0005] To achieve the above objectives, this application mainly provides the following technical solutions: One aspect of this application provides an antiparity-time symmetric singularity optical sensing structure, comprising two coupled waveguides, two microring resonators, and two sets of electrodes. The two coupled waveguides and the two microring resonators are formed by etching optically functional thin films with electro-optic effects; The two microring resonant cavities are adjacent to each other and spaced apart, and the two microring resonant cavities have different sizes; The two coupled waveguides are of the same size and are located on opposite sides of the arrangement direction of the two micro-ring resonators, respectively, and are evanescently coupled to the two micro-ring resonators. The two sets of electrodes are located between the two microring resonators, and the two sets of electrodes are respectively disposed on both sides of the two coupled waveguides.
[0006] Optionally, the two microring resonators include a first microring resonator and a second microring resonator, wherein the first microring resonator and the second microring resonator have different perimeters, with a difference of 10. -15 m to 10 -6 m.
[0007] Optionally, the first microring resonator and the second microring resonator have the same loss value, ranging from 1 Hz to 1 × 10⁻⁶. 9 Hz.
[0008] Optionally, the extension directions of the two coupled waveguides intersect the arrangement directions of the two microring resonators, and the coupling spacing between each microring resonator and each coupled waveguide is the same, with a coupling spacing of 10. -9 m to 10 -5 m.
[0009] Optionally, the two coupled waveguides include a first coupled waveguide and a second coupled waveguide, wherein the first coupled waveguide and the second coupled waveguide are straight transmission waveguides.
[0010] Optionally, the heights of the first and second coupled waveguides are 10. -9 m to 10 -6 m; the widths of the first and second coupled waveguides are 10 m. -8 m to 10 -6 m; the lengths of the first and second coupled waveguides are 10 m. -9 m to 10 -2 m.
[0011] Optionally, the two sets of electrodes include a first electrode group and a second electrode group, wherein the first electrode group includes two first sub-electrodes and the second electrode group includes two second sub-electrodes. When the two coupled waveguides include a first coupled waveguide and a second coupled waveguide, the two first sub-electrodes are respectively disposed on both sides of the first coupled waveguide, and the two first sub-electrodes are respectively disposed on both sides of the second coupled waveguide; The spacing between the first sub-electrode and the first coupled waveguide, and the spacing between the second sub-electrode and the second coupled waveguide, are both 10. -8 m to 10 -4 m.
[0012] Optionally, the height of both the first sub-electrode and the second sub-electrode is 10. -8 m to 10 -2 m; the width of both the first sub-electrode and the second sub-electrode is 10 m. -8 m to 10 -4 m; the lengths of both the first and second sub-electrodes are 10 m. -7 m to 5×10 -1 m.
[0013] Optionally, the optical functional thin film is a lead zirconate titanate thin film, and the center wavelength of the light coupled into the microring resonant cavity is 500 nm to 1800 nm.
[0014] In another aspect of this application, a temperature sensor is provided, comprising the antiparity-time symmetric singularity optical sensing structure described in any one of the preceding claims.
[0015] By employing the above technical solution, this application has at least the following beneficial effects: The anti-parity time-symmetric singularity optical sensing structure and temperature sensor provided in this application are formed by etching an optical functional thin film with electro-optic effect to create two coupled waveguides and two micro-ring resonators. The two micro-ring resonators of different sizes are arranged adjacently and spaced apart. The two coupled waveguides of the same size are respectively arranged on both sides of the arrangement direction of the two micro-ring resonators and form evanescent coupling with both micro-ring resonators. Two sets of electrodes are respectively arranged on both sides of the two coupled waveguides and located between the two micro-ring resonators. By means of the electro-optic effect of the optical functional thin film and the phase modulation effect of the two sets of electrodes, the coupling strength of the optical modes between the two micro-ring resonators can be freely and accurately adjusted, and the imaginary coupling strength between the optical modes can be stably obtained. This reliably realizes the anti-parity time-symmetric singularity, making the structure output a narrower linewidth and a more realistic spectrum, thereby improving the resolution and sensitivity of the optical sensing. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of an antiparity-time symmetric singularity optical sensing structure according to an optional embodiment of this application. Figure 2 The curve showing the relationship between coupling strength and optical phase is provided for the embodiments of this application; Figure 3 The response curve of the normalized output spectrum as a function of detuning amount is provided for the embodiments of this application; Figure 4 The frequency splitting response curve provided in this application embodiment is a relationship curve of the center frequency drift caused by temperature. Figure 5 The response curve of the normalized output spectrum under the disturbed state as a function of the detuning amount is provided in the embodiments of this application.
[0017] The reference numerals in the attached figures are as follows: 1. First coupling waveguide; 2. First coupling waveguide; 3. First microring resonator; 4. Second microring resonator; 5. First electrode group; 6. Second electrode group. Detailed Implementation
[0018] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0020] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0021] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.
[0022] See Figure 1 As shown, an embodiment of the first aspect of this application provides an anti-parity time-symmetric singularity optical sensing structure, and an embodiment of the second aspect of this application provides a temperature sensor.
[0023] Among them, the anti-parity time-symmetric singular point optical sensing structure is used in temperature sensors.
[0024] Specifically, the temperature sensor includes, but is not limited to, the aforementioned anti-parity time-symmetric singular point optical sensing structure, optical input unit, optical output detection unit, and signal processing unit. The optical input unit is used to input a stable optical signal, such as a narrow-linewidth monochromatic coherent laser in the near-infrared band, into the anti-parity time-symmetric singular point optical sensing structure. The anti-parity time-symmetric singular point optical sensing structure senses changes in external temperature and generates a corresponding optical response signal. The optical output detection unit is used to acquire and detect the optical response signal output by the anti-parity time-symmetric singular point optical sensing structure. The signal processing unit is used to analyze and process the detected optical response signal and output the corresponding temperature value.
[0025] Further, see Figure 1 As shown, the anti-parity time-symmetric singularity optical sensing structure provided in the first aspect of this application includes two coupled waveguides, two microring resonators, and two sets of electrodes; the two coupled waveguides and the two microring resonators are formed by etching optically functional thin films with electro-optic effects; the two microring resonators are adjacent and spaced apart, and the sizes of the two microring resonators are different; the two coupled waveguides are of the same size and are located on both sides of the arrangement direction of the two microring resonators, and are evanescently coupled to the two microring resonators; the two sets of electrodes are located between the two microring resonators, and the two sets of electrodes are respectively disposed on both sides of the two coupled waveguides.
[0026] This anti-parity time-symmetric singularity optical sensing structure uses an optically functional thin film with electro-optic effect as a substrate. Two micro-ring resonators of different sizes and two coupling waveguides of the same size are etched to form the structure. This creates a frequency difference between the optical resonant modes of the two micro-ring resonators and enables indirect coupling, providing a structural basis for anti-parity time-symmetric singularity temperature sensing. Simultaneously, by placing two sets of electrodes on both sides of the two coupling waveguides and performing electrochemical polarization treatment, the optical phase can be freely controlled within the range of 0 to 2π using an applied voltage, thereby obtaining the imaginary coupling strength between the optical modes and stably realizing the anti-parity time-symmetric singularity on the chip. Based on this, the nonlinear enhanced response of the singularity to temperature perturbations enables the structure to output a true narrow linewidth spectrum and significant frequency splitting, thereby improving the temperature sensing sensitivity.
[0027] It should be noted that the anti-parity time symmetric singularity optical sensing structure is an on-chip integrated sensing structure. The two coupled waveguides and two micro-ring resonators are integrally etched from an optically functional thin film with electro-optic effect. The two sets of electrodes are fabricated on the chip at designated locations through a deposition process. The overall structure is compact and can realize on-chip integrated optical sensing function.
[0028] Among them, lead zirconate titanate (PZT) films are preferred for optical functional films. These films have good electro-optic effects and can undergo linear changes in refractive index under the action of an external electric field, which can provide a reliable physical basis for optical phase modulation. At the same time, their high electro-optic coefficient can achieve efficient modulation of the phase of optical signal transmission, and they are compatible with semiconductor photolithography, dry etching and metal deposition processes. They can be integrated to form a coupled waveguide and micro-ring resonator structure, which meets the fabrication requirements of on-chip integrated optical sensing structures.
[0029] The two coupling waveguides are both straight strip structures, located on opposite sides of the alignment direction of the two micro-ring resonators, and are evanescently coupled to the two micro-ring resonators. They are used to realize the input and output transmission of optical signals and provide a common evanescent coupling channel for the two micro-ring resonators. At the same time, they carry the phase modulation function to establish indirect coupling between the optical modes of the two micro-ring resonators, providing the basis for optical field transmission and coupling for the construction of anti-parity time symmetric singularities.
[0030] Specifically, the two coupled waveguides are designated as first coupled waveguide 1 and second coupled waveguide 2, and both have the same dimensions. The height of both first coupled waveguide 1 and second coupled waveguide 2 is 10. -9 m to 10 -6 m; the widths of the first coupled waveguide 1 and the second coupled waveguide 2 are 10 m. -8 m to 10 -6 m; the lengths of the first coupled waveguide 1 and the second coupled waveguide 2 are 10 m. -9 m to 10 -2 m. By setting the first coupling waveguide 1 and the second coupling waveguide 2 to have the same size, the optical signal can have consistent transmission loss, transmission phase and coupling efficiency in the two coupling waveguides. This avoids the introduction of additional phase deviation and coupling strength asymmetry due to the size difference between the two coupling waveguides, and ensures that the indirect coupling between the two micro-ring resonators is stable and symmetrical. This provides structural protection for controlling the imaginary coupling strength between optical modes and realizing anti-parity time symmetric singularities.
[0031] Two microring resonators are arranged side-by-side between a first coupling waveguide 1 and a second coupling waveguide 2. The two microring resonators have different dimensions. The first coupling waveguide 1 and the second coupling waveguide 2 extend along a direction intersecting the arrangement direction of the two microring resonators, ensuring that each microring resonator maintains the same coupling distance with each coupling waveguide. Specifically, the distances between the first microring resonator 3 and the first coupling waveguide 1, between the first microring resonator 3 and the second coupling waveguide 2, between the second microring resonator 4 and the first coupling waveguide 1, and between the second microring resonator 4 and the second coupling waveguide 2 are all identical. This coupling distance ranges from 10. -9 m to 10 -5By setting the two microring resonators to have different sizes, an inherent resonant frequency difference can be formed between the two microring resonators, providing initial mode splitting conditions for subsequent construction of antiparity-time symmetric singularities. At the same time, by ensuring that the coupling spacing between each microring resonator and each coupled waveguide is consistent, the evanescent coupling strength at all points can be made uniform, avoiding the introduction of additional phase perturbations by coupling differences, ensuring the symmetrical and stable optical coupling state of the two microring resonators, which is beneficial for constructing antiparity-time symmetric singularities.
[0032] Specifically, the two micro-ring resonators are a first micro-ring resonator 3 and a second micro-ring resonator 4, respectively. The perimeters of the first micro-ring resonator 3 and the second micro-ring resonator 4 are different, with a perimeter difference ranging from 10. -15 m to 10 -6 m; the first micro-ring resonator 3 and the second micro-ring resonator 4 have the same loss value, ranging from 1Hz to 1×10. 9 The optical signals coupled into the first micro-ring resonator 3 and the second micro-ring resonator 4 have center wavelengths in the range of 500nm to 1800nm.
[0033] The two sets of electrodes are located between two micro-ring resonators and are respectively set on both sides of two coupled waveguides. The electrode material is a conductive metal such as gold or aluminum, which is deposited by sputtering process. The two sets of electrodes can be applied with independent external voltages. By utilizing the electro-optic effect of the optical functional thin film, the refractive index of the corresponding coupled waveguide is changed, thereby controlling the transmission phase of the optical signal in the coupled waveguide and realizing the control of the coupling strength between the optical modes of the two micro-ring resonators.
[0034] Specifically, the two sets of electrodes are a first electrode group 5 and a second electrode group 6. The first electrode group 5 includes two first sub-electrodes, and the second electrode group 6 includes two second sub-electrodes. The two first sub-electrodes are respectively disposed on opposite sides of the first coupling waveguide 1, with one side closer to the two micro-ring resonators and the other side farther away from the two micro-ring resonators. The two second sub-electrodes are respectively disposed on opposite sides of the second coupling waveguide 2, with the other side also being closer to the two micro-ring resonators and the other side farther away from the two micro-ring resonators. Thus, a symmetrical electric field can be formed on both the inner and outer sides of each coupling waveguide. When an external voltage is applied, it can act uniformly on the optical functional thin film where the coupling waveguide is located. By means of electro-optic effect, the refractive index of the waveguide and the phase of light transmission are modulated, thereby controlling the coupling strength between the optical modes of the two micro-ring resonators.
[0035] Specifically, the first sub-electrode and the second sub-electrode are the same size. The height of the first sub-electrode and the second sub-electrode ranges from 10. -8 m to 10 -2 m; the width of the first and second sub-electrodes ranges from 10. -8 m to 10-4 m; the lengths of the first and second sub-electrodes range from 10 m. -7 m to 5×10 -1 m; the spacing between the first sub-electrode and the first coupling waveguide 1, and the spacing between the second sub-electrode and the second coupling waveguide 2 are the same, and the spacing value ranges from 10. -8 m to 10 -4 m. By setting the first sub-electrode and the second sub-electrode to have the same size, the electric field distribution can be ensured to be uniform and consistent. Maintaining the same distance between the electrodes and the corresponding coupled waveguides allows the electric field formed after applying voltage to act stably and symmetrically on the optical functional film where the coupled waveguide is located. The electro-optic effect of the optical functional film can be used to achieve balanced control of the light transmission phase, which is beneficial for accurately adjusting the coupling strength between the optical modes of the two micro-ring resonators.
[0036] Furthermore, in a specific example, the center wavelength of the optical signals coupled into the first microring resonator 3 and the second microring resonator 4 is 1550 nm, and the perimeter of the first microring resonator 3 is 1.00001 × 10⁻⁶. -6 m, the perimeter of the second micro-ring resonator 4 is 10 m. -6 m, the loss value of the first micro-ring resonator 3 and the second micro-ring resonator 4 is 1×10 6 Hz; the heights of the first coupled waveguide 1 and the second coupled waveguide 2 are 3 × 10 Hz. -7 m, the width of the first coupled waveguide 1 and the second coupled waveguide 2 is 10 -6 m, the lengths of the first coupled waveguide 1 and the second coupled waveguide 2 are 10. -3 m, the coupling spacing between each microring resonator and each coupled waveguide is 10 m. -8 m; the height of the first and second sub-electrodes is 8×10 m. -7 m, the width of the first sub-electrode and the second sub-electrode is 5×10 m. -6 m, the lengths of the first and second sub-electrodes are 10 m. -4 m, the spacing between the first sub-electrode and the first coupled waveguide 1, and the spacing between the second sub-electrode and the second coupled waveguide 2 are 5×10 m. -8m. During operation, the input optical signal is introduced into the first coupling waveguide 1. The optical signal is coupled into the first micro-ring resonator 3 via ephemeris coupling and forms a counterclockwise (CCW) optical mode within the cavity. After the counterclockwise optical mode propagates around the first micro-ring resonator 3, it is coupled back to the first coupling waveguide 1 and optically phase-modulated by the first electrode group 5. The modulated optical signal continues to propagate in the first coupling waveguide 1 and is coupled into the second micro-ring resonator 4 via ephemeris coupling, forming a counterclockwise optical mode within the second micro-ring resonator 4. After the counterclockwise optical mode propagates around the second micro-ring resonator 4, it is coupled back to the second coupling waveguide 2 and optically phase-modulated by the second electrode group 6. The phase-modulated optical signal continues to propagate in the second coupling waveguide 2 and is coupled back into the first micro-ring resonator 3 via ephemeris coupling, thus forming a closed-loop optical path cycle. In this specific example, see [link to example]. Figure 1 As shown, the left end of the first coupling waveguide 1 is the optical signal input terminal, and the right end is the detection terminal. The imaginary coupling between the counterclockwise optical mode in the first microring resonator 3 and the counterclockwise optical mode in the second microring resonator 4, and the relationship between the imaginary coupling strength and the optical phase, are as follows: ; In the formula, For imaginary coupling strength, The amplitude coefficients of the optical signal transmission in the first coupled waveguide 1 and the second coupled waveguide 2 are given. The coupling coefficient between the first microring resonator 3 and the first coupled waveguide 1 and the second coupled waveguide 2 is given. The coupling coefficient between the second micro-ring resonator 4 and the first coupled waveguide 1 and the second coupled waveguide 2. This represents the optical phase. It should be noted that, according to the Euler formula expansion, the real part of the coupling strength is... The imaginary part is See also Figure 2 As shown, Figure 2 The above specific examples show the response curves of coupling strength as a function of optical phase, used to verify the feasibility of achieving pure imaginary coupling and constructing anti-parity time-symmetric singularities through electro-optic phase modulation. The solid line represents the relationship between the imaginary part of the coupling strength and the optical phase. When the optical phase is modulated to π, sinα=0 and cosα=-1, the real part of the coupling strength is 0, and the imaginary part reaches its maximum value of 0.5MHz, thus achieving pure imaginary coupling between the counterclockwise optical modes of the first microring resonator 3 and the second microring resonator 4.
[0037] Furthermore, in the specific example above, the Hamiltonian of the anti-parity time-symmetric singularity optical sensing structure is: ; In the formula, This is the center resonant frequency of the first micro-ring resonant cavity 3. This is the center resonant frequency of the second micro-ring resonant cavity 4. This represents the total loss of the first micro-ring resonator 3 and the second micro-ring resonator 4. See here. Figure 3 As shown, Figure 3 The response curves of the normalized output spectrum as a function of detuning for the specific examples above are used to characterize the optical resonance properties at the anti-parity time-symmetric singularity state. From Figure 3 As can be seen, the anti-parity time-symmetric singularity optical sensing structure operates in an anti-parity time-symmetric singularity state, exhibiting a single resonant peak in its output spectrum. (See also...) Figure 4 As shown, Figure 4 The graph showing the relationship between the frequency splitting response and the center frequency drift caused by temperature for the specific examples above is used to characterize the temperature sensing sensitivity of the anti-parity time-symmetric singularity optical sensing structure. Figure 4 As can be seen, changes in the ambient temperature can alter the center resonant frequency of the first microring resonator 3, thereby disrupting the mode degeneracy between the two microring resonators and causing the frequency splitting response of the antiparity-time symmetric singularity optical sensing structure to exhibit enhanced characteristics of sub-square divergence. (See also...) Figure 5 As shown, Figure 5 The above specific example shows the response curves of the normalized output spectrum under the disturbed state as a function of detuning, used to characterize the frequency splitting characteristics of the anti-parity time-symmetric singularity optical sensing structure under temperature perturbation. Figure 5 As can be seen, when the anti-parity time symmetric singularity optical sensing structure is subjected to temperature perturbation, the originally degenerate single-peak resonant spectrum splits into two independent resonant peaks, and the spacing between these frequency splits increases with the increase of temperature change. By detecting the amount of peak splitting in the output spectrum, quantitative temperature detection can be achieved, and this detection method relies on the enhancement effect of singularities to improve the sensitivity of temperature sensing.
[0038] It will be readily understood by those skilled in the art that the aforementioned advantageous methods can be freely combined and superimposed without conflict.
[0039] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application. The above are merely preferred embodiments of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of this application, and these improvements and modifications should also be considered within the protection scope of this application.
Claims
1. An anti-parity time-symmetric singularity optical sensing structure, characterized in that, It includes two coupled waveguides, two micro-ring resonators, and two sets of electrodes; The two coupled waveguides and the two microring resonators are formed by etching optically functional thin films with electro-optic effects; The two microring resonant cavities are adjacent to each other and spaced apart, and the two microring resonant cavities have different sizes; The two coupled waveguides are of the same size and are located on opposite sides of the arrangement direction of the two micro-ring resonators, respectively, and are evanescently coupled to the two micro-ring resonators. The two sets of electrodes are located between the two microring resonators, and the two sets of electrodes are respectively disposed on both sides of the two coupled waveguides.
2. The anti-parity time-symmetric singularity optical sensing structure according to claim 1, characterized in that, The two microring resonators include a first microring resonator and a second microring resonator, the first microring resonator and the second microring resonator having different perimeters, with a difference of 10. -15 m to 10 -6 m.
3. The anti-parity time-symmetric singularity optical sensing structure according to claim 2, characterized in that, The first microring resonator and the second microring resonator have the same loss value, ranging from 1 Hz to 1 × 10⁻⁶. 9 Hz.
4. The anti-parity time-symmetric singularity optical sensing structure according to claim 1, characterized in that, The extension directions of the two coupled waveguides intersect the arrangement directions of the two microring resonators, and the coupling spacing between each microring resonator and each coupled waveguide is the same, with a coupling spacing of 10. -9 m to 10 -5 m.
5. The anti-parity time-symmetric singularity optical sensing structure according to claim 1, characterized in that, The two coupled waveguides include a first coupled waveguide and a second coupled waveguide, and the first coupled waveguide and the second coupled waveguide are straight transmission waveguides.
6. The anti-parity time-symmetric singularity optical sensing structure according to claim 5, characterized in that, The heights of the first and second coupled waveguides are 10. -9 m to 10 -6 m; the widths of the first and second coupled waveguides are 10 m. -8 m to 10 -6 m; the lengths of the first and second coupled waveguides are 10 m. -9 m to 10 -2 m.
7. The anti-parity time-symmetric singularity optical sensing structure according to claim 1, characterized in that, The two sets of electrodes include a first electrode group and a second electrode group. The first electrode group includes two first sub-electrodes, and the second electrode group includes two second sub-electrodes. When the two coupled waveguides include a first coupled waveguide and a second coupled waveguide, the two first sub-electrodes are respectively disposed on both sides of the first coupled waveguide, and the two first sub-electrodes are respectively disposed on both sides of the second coupled waveguide; The spacing between the first sub-electrode and the first coupled waveguide, and the spacing between the second sub-electrode and the second coupled waveguide, are both 10. -8 m to 10 -4 m.
8. The anti-parity time-symmetric singularity optical sensing structure according to claim 7, characterized in that, The height of both the first sub-electrode and the second sub-electrode is 10. -8 m to 10 -2 m; the width of both the first sub-electrode and the second sub-electrode is 10 m. -8 m to 10 -4 m; the lengths of both the first and second sub-electrodes are 10 m. -7 m to 5×10 -1 m.
9. The anti-parity time-symmetric singularity optical sensing structure according to claim 1, characterized in that, The optical functional thin film is a lead zirconate titanate thin film, and the center wavelength of the light coupled into the microring resonant cavity is 500nm to 1800nm.
10. A temperature sensor, characterized in that, Including the antiparity-time symmetric singularity optical sensing structure as described in any one of claims 1-9.