A method for preparing a rare earth oxide / gallium oxide polycrystalline thin film having a magnetoresistance effect

By using core-shell structured composite particles and thermal resistance evaporation combined with oxygen-enriched flash calcination, the problems of uniform co-deposition and crystallization quality of rare earth oxide/gallium oxide polycrystalline thin films were solved, realizing efficient and low-cost polycrystalline thin film preparation, which is suitable for magnetic storage, magnetic sensing and spintronic devices.

CN122358124APending Publication Date: 2026-07-10KUNMING UNIV OF SCI & TECH
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Patent Information

Application Number
CN202610537467.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-04-22
Publication Date
2026-07-10

AI Technical Summary

Technical Problem

Existing technologies struggle to achieve uniform co-deposition growth of rare-earth oxide/gallium oxide polycrystalline thin films, resulting in poor film crystal quality, insignificant magnetoresistance effect, high preparation costs, and incompatibility with existing semiconductor processes.

Method used

Using core-shell structured rare earth oxide/gallium oxide composite particles as evaporation raw materials, combined with thermal resistance evaporation and oxygen-enriched flash calcination, uniform co-deposition of the two materials and improved crystal quality are achieved. By controlling evaporation and high-temperature treatment, a polycrystalline thin film with tight interfacial bonding is obtained.

Benefits of technology

It achieves uniform co-deposition and high-quality crystallization of rare earth oxide/gallium oxide polycrystalline thin films, significantly improves the magnetoresistance effect, and reduces the preparation cost. It has good process controllability and semiconductor process compatibility, making it suitable for large-scale production.

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Abstract

This invention discloses a method for preparing rare-earth oxide / gallium oxide polycrystalline thin films with magnetoresistance effect. The method includes: preparing a deposition raw material, wherein the deposition raw material is a rare-earth oxide / gallium oxide composite particle with a core-shell structure, the core of which is composed of La... 1‑x Ca x TmO3 rare earth oxide precursor powder; substrate pretreatment; composite particles placed in the evaporation boat of a thermal resistance evaporation apparatus, allowing the evaporation raw material to melt and evaporate, depositing on the substrate surface to form a wet film; finally, flash calcination under oxygen-rich conditions of 50%~95% to obtain a polycrystalline thin film. This invention uses a single core-shell structure composite particle as the evaporation source, achieving synergistic evaporation of rare earth oxides and gallium oxide, solving the problems of component fractionation of multi-component materials and evaporation source explosion and splashing. The resulting thin film has high crystal quality and significant magnetoresistance effect, and the equipment is simple, low-cost, and conducive to large-scale production.
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