Workpiece conveying system for large-diameter full-automatic multi-slot wet etching machine
By using fluorine-coated guide rails and rolling guide rails in the workpiece transfer system, combined with a stainless steel cantilever robotic arm, the problem of hydrofluoric acid corrosion in the large-diameter mega-acoustic wet etching process was solved, achieving high-precision, stable, and long-life workpiece transfer, and adapting to the complex motion requirements of multi-slot cascaded layouts.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Filing Date
- 2026-05-09
- Publication Date
- 2026-07-17
AI Technical Summary
Existing workpiece transfer and handling systems have failed to effectively adapt to the highly corrosive environment of hydrofluoric acid in large-diameter mega-acoustic wet etching processes, resulting in insufficient equipment stability and positioning accuracy, and failing to meet the complex motion requirements under multi-slot cascaded layouts.
The system employs a fluorine-coated guide rail and rolling guide rail structure, combined with a stainless steel cantilever robotic arm, to achieve corrosion resistance and high-precision transmission of hydrofluoric acid. The servo motor-driven gear rack and ball screw assembly ensures the system's stability and positioning accuracy under high load conditions.
This improved the system's corrosion resistance and service life in a hydrofluoric acid environment, ensured high-precision workpiece transfer and positioning, met the stringent requirements of mega-acoustic wet etching processes, reduced maintenance costs and frictional heat generation, and avoided the risk of workpiece shaking and falling.
Smart Images
Figure CN122403097A_ABST