A dual-axis multi-jet OVD deposition apparatus and deposition method

By using a biaxial multi-torch OVD deposition device with a closed annular guide rail and clamping mechanism below the mandrel, the problem of non-uniform preform diameter was solved, achieving uniformity in the diameter of the porous body and the preform, and improving the production yield.

CN122406187APending Publication Date: 2026-07-17ZHUHAI YIYUAN TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHUHAI YIYUAN TECHNOLOGY CO LTD
Filing Date
2026-05-22
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In the existing technology, the single-core rod multi-torch array causes uneven diameter of the preform during the deposition process, resulting in large fluctuations in the diameter of the preform after sintering and low yield.

Method used

The dual-axis multi-torch OVD deposition device uses a closed annular guide rail set below the mandrel to make the torch mechanism circulate along the annular guide rail. A clamping mechanism is set on the mandrel to realize rotation and vertical movement. With the adjustment of the jet flow rate, the deposition uniformity is ensured.

Benefits of technology

It effectively reduced the diameter fluctuation of the loose material and preform, improved the production yield of the preform, ensured the diameter uniformity of the deposited loose material in the axial and radial directions, and reduced the defect rate.

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Abstract

This invention relates to the field of synthetic quartz technology, and provides a biaxial multi-torch OVD deposition apparatus and method. The deposition apparatus includes at least one guide rail mechanism, at least one set of clamping mechanisms, and a torch mechanism. Each guide rail mechanism has an annular guide rail. The at least one set of clamping mechanisms includes a first rotating shaft and a second rotating shaft, which are parallel to each other above the annular guide rail and correspond to the linear guide rail of the annular guide rail. The first and second rotating shafts are respectively used to clamp and drive a first mandrel and a second mandrel to rotate. The torch mechanism is mounted on the annular guide rail and drives the torch mechanism to circulate along the axial direction of the annular guide rail, so that the torch mechanism sequentially passes through the deposition zones of the first and second mandrels. This effectively ensures the uniformity of the deposited porous body diameter, reduces preform diameter fluctuations, and improves the yield of preforms.
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