A power device of field plate substrate structure and a manufacturing method thereof

By introducing single-layer, double-layer, or multi-layer field plate structures into GaN high electron mobility transistor devices and adjusting the electrical connection method, the problem of difficult capacitance control under high voltage and high frequency of traditional devices is solved, thereby improving the stability and withstand voltage of the devices.

CN122421384APending Publication Date: 2026-07-17WUXI NCE POWER

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
WUXI NCE POWER
Filing Date
2026-04-02
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Traditional GaN high electron mobility transistors are difficult to effectively control the gate-related capacitance and electric field distribution under high voltage and high frequency operating conditions, which leads to instability of the device in the off state and may cause problems such as abnormal turn-on and current surge.

Method used

By employing single-layer, double-layer, or multi-layer field plate structures and changing the electrical connection between the field plate and the gate and substrate, the potential stability of the device in the off state can be increased by adjusting the gate-related capacitance.

Benefits of technology

It improves the stability and reliability of the device under complex voltage operating conditions, enhances its withstand voltage capability, and reduces the sensitivity of the gate potential to external voltage changes.

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Abstract

本发明涉及一种场板衬底结构的功率器件及其制作方法。包括:衬底、外延层、栅极结构、场板结构、源极、漏极和过孔结构,外延层设置于衬底之上,源极、漏极、栅极结构均设置于外延层之上,源极、漏极分别位于栅极结构的两侧,场板结构设置于栅极结构之上,场板结构与栅极结构之间设置第一绝缘层,第一绝缘层覆盖栅极结构的表面以及外延层的表面,场板结构与源极和漏极未电连接并且与栅极结构电连接。本发明通过改变器件中场板结构与栅极及衬底的电连接方式,实现对栅极相关电容的有效调控,以提高器件在复杂电压工作条件下的稳定性,进而提升功率器件及其应用系统的整体可靠性。
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