A combined cantilever beam high-frequency underwater acoustic sensor and a manufacturing method thereof

By combining a cantilever beam structure and a static pressure balance design, the problems of decreased sensitivity in the high-frequency band and deformation in deep water of traditional underwater acoustic sensors have been solved, achieving wideband coverage and improved stability in deep water. It is suitable for underwater target detection, marine scientific research, industrial inspection and non-destructive evaluation and other fields.

CN122429905APending Publication Date: 2026-07-21QINGDAO INNOVATION & DEV CENT OF HARBIN ENG UNIV +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
QINGDAO INNOVATION & DEV CENT OF HARBIN ENG UNIV
Filing Date
2026-06-24
Publication Date
2026-07-21

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Abstract

The application is a kind of combined cantilever beam high-frequency underwater acoustic sensor and its manufacturing method. The application relates to the field of sensing and detecting technology, and comprises a frame structure and a combined cantilever beam structure arranged inside the frame structure. The combined cantilever beam structure is a vibrating diaphragm composed of a support layer, a lower electrode layer, at least one piezoelectric layer and an upper electrode layer stacked in sequence. The support layer, the lower electrode layer, the piezoelectric layer and the upper electrode layer are composed of a plurality of single-end fixed cantilever beams with different sizes and beam bridge structures. One end of the single-end fixed cantilever beam is fixed to the inside of the frame structure, and the other end is a free end. The beam bridge structure connects the free ends of two or more single-end fixed cantilever beams. The application widens the overall working bandwidth of the sensor and improves the sensitivity of the sensor through the cantilever beam structure containing the beam bridge.
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