Wear-resistant needle pushing test module device

Abstract

The application discloses a wear-resistant needle pushing test module device, which comprises a mounting base and a needle body, and further comprises: an axial driving mechanism arranged on the mounting base and used for driving a moving carrier carrying the needle body to make reciprocating linear motion along a first axis; a rotating cleaning mechanism comprising a cleaning assembly arranged on the mounting base and a reversing transmission assembly arranged between the moving carrier and the mounting base; during the motion of the moving carrier along the first axis, the reversing transmission assembly is mechanically linked with a fixed structural member on the mounting base. The application aims to realize continuous automatic test with high cleaning degree and zero residual chip interference by means of a passive mechanical linkage mechanism, only relying on the linear motion of the driving assembly, adaptively switching between the "locking detection" and "passive self-rotation cleaning" states in different stroke segments, and cooperating with an innovative elastic self-closing micro-environment sealing gas path.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and more particularly to a wear-resistant pin-pulling test module device. Background Technology

[0002] In the mass production packaging and testing phase of semiconductor integrated circuits, test probes (such as pins, cantilever pins, or vertical pins) are required to make high-frequency contact with test pads on wafers or chips to complete electrical performance testing. In order to penetrate the insulating oxide layer naturally formed on the surface of the metal pads and establish a stable low-resistance electrical connection, the probe tip is usually designed to produce a horizontal scraping at a distance of micrometers on the pad surface when subjected to vertical downward pressure (overdrive).

[0003] However, in industrialized mass production lines that pursue high throughput, the needles must undergo millions or even tens of millions of repeated needle insertion and scraping actions at extremely high frequencies. This demanding working condition leads to the following unavoidable industry pain points: When the probe makes a hard-on-hard contact with the oxide layer, the tip gradually flattens and coarses. Simultaneously, the trace metal oxide fragments scraped off easily adhere to the tip. This not only causes abnormally high contact resistance, leading to misinterpretations of electrical test results, but the adhered hard particles also act as abrasive particles in subsequent reciprocating motions, further accelerating abnormal wear of the tip and severely shortening the probe card's lifespan.

[0004] Therefore, it is necessary to design a wear-resistant needle-pulling test module device to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a wear-resistant needle-pulling test module device. This invention aims to achieve continuous automated testing with high cleanliness and zero debris interference by using a passive mechanical linkage mechanism that relies solely on the linear motion of the drive component to adaptively switch between "locking detection" and "passive self-rotating cleaning" states at different stroke segments. Combined with an innovative elastic self-closing microenvironment sealing air path, it achieves this.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: The wear-resistant needle-pulling test module device includes a mounting base and a needle-pulling body, and further includes: an axial drive mechanism, disposed on the mounting base, for driving a moving carrier carrying the needle-pulling body to reciprocate linearly along a first axis; a rotation cleaning mechanism, including a cleaning component disposed on the mounting base, and a reversing transmission component disposed between the moving carrier and the mounting base; during the movement of the moving carrier along the first axis, the reversing transmission component mechanically links with a fixed structural member on the mounting base to drive the needle-pulling body to rotate around its own axis, so that the needle tip of the needle-pulling body is rotated and wiped clean within the cleaning component; and a locking and limiting mechanism, disposed on the mounting base, for limiting the rotational freedom of the needle-pulling body when it moves to the testing position.

[0007] Preferably, the reversing transmission assembly includes a rotating rod rotatably mounted on a moving carrier, with the shift needle body located at the lower end of the rotating rod; the reversing transmission assembly also includes a transmission gear train disposed on the moving carrier, and a helical rack fixed on a mounting base; during the process of the moving carrier moving down or up, the transmission gear train meshes with the helical rack, thereby converting linear motion into rotational motion of the rotating rod.

[0008] Preferably, the transmission gear system includes a second helical gear fixed on a rotating rod, a rotating shaft rotatably mounted on a moving carrier, and a first helical gear fixed on the rotating shaft and meshing with the second helical gear, wherein the first helical gear meshes with a helical rack.

[0009] Preferably, the helical rack has teeth only distributed in its middle travel region, so as to make the pin body rotate within a specific travel segment in a non-detection position.

[0010] Preferably, the cleaning component includes a fixing plate fixed on a mounting base, and a cylinder is connected to the front side of the fixing plate via a connecting component. Two fixing rings are fixedly connected inside the cylinder, and a polishing film is fixedly connected to the inner wall of each of the two fixing rings.

[0011] Preferably, it further includes a pneumatic cleaning assembly, which includes a circulating pump and a filter box mounted on a mounting base. The air inlet of the circulating pump is connected to the bottom space of the filter box, and the air outlet of the circulating pump is connected to an air inlet pipe. The top space of the filter box is connected to an air outlet pipe. The upper space of the cylinder is connected to a first short pipe, and the lower space of the cylinder is connected to a second short pipe. The first short pipe, the air outlet pipe, and the second short pipe are all connected to the air inlet pipe via spiral joints. Multiple air holes are distributed in an array on the upper part of the two fixed rings, and the upper end of each air hole is connected to an inclined spray pipe.

[0012] Preferably, the upper and lower ends of the cylinder are fixedly connected to conical hoppers, the tips of the two conical hoppers are facing inwards towards the inside of the cylinder, and the inner walls of the two conical hoppers are provided with elastic silicone sealing rings that are inwardly tapered. The tapered end face of the elastic silicone sealing ring is provided with an elastic self-closing slit. When the pin body passes through, the slit is elastically opened by force and adheres to the outer wall of the pin body. When the pin body is disengaged, the slit rebounds and closes under its own elastic restoring force to maintain the sealed state inside the cylinder.

[0013] Preferably, the locking and limiting mechanism includes a disc mounted on a rotating rod, the disc having a limiting groove, two second slide rails fixedly connected to the mounting base, and a fine-tuning block slidably connected to the two second slide rails, with a limiting rod fixed on the fine-tuning block; the locking and limiting mechanism also includes a spring for driving the fine-tuning block to move upward and reset when the pin body is reset.

[0014] Preferably, the connecting assembly includes a guide groove on a fixed plate, a plurality of threaded holes on the fixed plate, the plurality of threaded holes passing through the guide groove, a connecting plate fixedly connected to the cylinder, the connecting plate having a plurality of through holes, bolts threaded into the plurality of threaded holes, and the plurality of bolts passing through the corresponding through holes.

[0015] The present invention has the following beneficial effects: This invention utilizes the partial meshing of the first helical gear, the second helical gear, and the helical rack to directly convert the linear reciprocating stroke of the cylinder into a 360-degree rotational motion of the pin. The entire process does not require the addition of any electric motor, reducing the weight of the end slider and lowering energy consumption, control costs, and failure rate. During the rotation of the probe body, the surface of the probe is polished by setting two polishing films to remove metal debris adhering to the probe and ensure the accuracy of electrical test results. By modifying the elastic silicone sealing ring into an inverted conical duckbill structure with elastic cuts, a negative pressure environment inside the cylinder can be ensured regardless of the stroke of the needle. Combined with the push-pull airflow of the array of inclined nozzles, metal debris is completely captured in the filter box, further improving the cleaning effect on the needle and preventing wear on the surrounding precision guide rails. By utilizing the limiting groove and limiting rod with wedge-shaped inclined surface contact in the locking and limiting mechanism, the needle is instantly aligned and its rotational freedom is locked when it moves down to the detection point, which improves the mechanical movement under micron-level high-frequency detection conditions and ensures detection accuracy.

[0016] In summary, this invention utilizes gear and rack transmission to convert the linear motion of the cylinder into the rotation of the needle, simplifying the structure and reducing energy consumption and failure rate. The addition of polishing, negative pressure dust collection, and airflow dust removal structures ensures needle cleaning, preventing debris from causing component wear and test failure. A wedge-shaped limiting structure locks the needle's posture, eliminating mechanical movement during testing. The overall structure of the device is reasonable and functionally complete, improving testing accuracy and equipment reliability. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the wear-resistant needle-pulling test module device proposed in this invention; Figure 2 This is a schematic diagram of the wear-resistant needle-pulling test module device proposed in this invention from another perspective. Figure 3 This is a schematic diagram of the cleaning component. Figure 4 for Figure 3 A sectional view; Figure 5 This is a schematic diagram of the disk structure; Figure 6 for Figure 1 Enlarged structural diagram at point A; Figure 7 This is a schematic diagram of the structure of an elastic silicone sealing ring.

[0018] In the diagram: 1. Mounting base, 2. First slide rail, 3. Mounting bracket, 4. Cylinder, 5. Slider, 6. Mounting block, 7. Rotating rod, 8. Ball bearing, 9. Vertical plate, 10. Rotating shaft, 11. First helical gear, 12. Second helical gear, 13. Disc, 14. Pin body, 15. Horizontal plate, 16. Helical rack, 17. Fixing plate, 18. Air outlet pipe, 19. Air inlet pipe, 20. Cylinder, 21. Spiral joint, 22. Bolt, 23. Circulating pump, 24. Filter box, 25. First short pipe, 26. Second short pipe, 27. Conical bucket, 28. Elastic silicone sealing ring, 29. Fixing ring, 30. Nozzle, 31. Polishing film, 32. Limiting groove, 33. Second slide rail, 34. Fine adjustment block, 35. Limiting rod, 36. Rectangular block, 37. Spring, 38. Connecting plate, 39. Through hole. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0020] Reference Figures 1-7 The wear-resistant pin-pulling test module device includes a mounting base 1 and a pin-pulling body 14, and also includes: An axial drive mechanism is mounted on the mounting base 1 and is used to drive a moving carrier carrying the pin body 14 to reciprocate linearly along the first axis. The axial drive mechanism includes two first slide rails 2 that are vertically fixed on the mounting base 1, and a slider 5 is slidably connected to the two first slide rails 2.

[0021] At the very top of the mounting base 1, two sets of cylinders 4, which serve as axial drive mechanisms, are fixed by two mounting brackets 3. The output extension and retraction ends of the cylinders 4 are fixedly connected to the top surface of the slider 5, thereby driving the slider 5 to make vertical reciprocating linear motion along the first slide rail 2.

[0022] The mobile carrier is the mounting block 6, which has a cavity inside.

[0023] The rotating cleaning mechanism includes a cleaning component disposed on the mounting base 1 and a reversing transmission component disposed between the moving carrier and the mounting base 1. During the movement of the moving carrier along the first axis, the reversing transmission component generates mechanical linkage with the fixed structure on the mounting base 1 to drive the needle body 14 to rotate around its own axis, so that the needle tip of the needle body 14 is rotated and wiped clean within the cleaning component. A locking and limiting mechanism is provided on the mounting base 1 to limit the rotational freedom of the needle body 14 when it moves to the detection position.

[0024] The reversing transmission assembly includes a rotating rod 7 vertically rotatably mounted inside the mounting block 6 via a pair of ball bearings 8, with a shift needle body 14 located at the lower end of the rotating rod 7. The reversing transmission assembly also includes a transmission gear train mounted on the moving carrier. During the downward or upward movement of the moving carrier, the transmission gear train meshes with a helical rack 16, thereby converting linear motion into rotational motion of the rotating rod 7. The transmission gear train includes two symmetrically distributed vertical plates 9 fixed vertically downward on the lower end face of the mounting block 6. A rotating shaft 10 is horizontally rotatably connected between the two vertical plates 9. A first helical gear 11 from the transmission gear train is fixedly mounted on the rotating shaft 10, while a second helical gear 12 is fixedly mounted on the waist of the rotating rod 7. The first helical gear 11 and the second helical gear 12 are spatially staggered at 90 degrees and deeply meshed with each other.

[0025] A horizontal plate 15 is fixed to the front center of the mounting base 1. A section of helical rack 16 is fixedly connected to the upper end face of the horizontal plate 15. It is worth noting that the helical rack 16 has toothed edges only in its middle stroke area.

[0026] When the cylinder 4 drives the slider 5 to lift upwards during its large stroke, the first helical gear 11 moves upwards and cuts into the intermediate area, meshing with the helical rack 16. This passively converts the linear upward stroke into the horizontal rotation of the shaft 10. Through the 90-degree interleaved transmission of the second helical gear 12, it forcibly drives the rotating rod 7 and the dial needle body 14 into a high-speed rotation state. In the low-position test state, the first helical gear 11 disengages from the tooth edge area and no transmission occurs.

[0027] The cleaning component includes a fixing plate 17 fixed on the mounting base 1. A cylinder 20 is connected to the front side of the fixing plate 17 via a connecting component. Two fixing rings 29 are fixedly connected inside the cylinder 20. A nano-scale polishing film 31 (polymer flexible abrasive pad) is fixedly connected to the inner wall of each of the two fixing rings 29.

[0028] The system also includes a pneumatic cleaning assembly, which consists of a circulation pump 23 and a filter box 24 mounted on the mounting base 1. The air inlet of the circulation pump 23 is connected to the bottom space of the filter box 24, and the air outlet of the circulation pump 23 is connected to an air inlet pipe 19. The top space of the filter box 24 is connected to an air outlet pipe 18. The upper space of the cylinder 20 is connected to a first short pipe 25, and the lower space of the cylinder 20 is connected to a second short pipe 26. The first short pipe 25 is sealed and connected to the air outlet pipe 18 through a spiral joint 21 with a sealing ring. The second short pipe 26 is also sealed and connected to the air inlet pipe 19 through a spiral joint 21, thus forming a closed fluid circulation system of "pumping air inlet → purging inside the chamber → suction negative pressure → filter box descaling". Both of the fixed rings 29 have an array of circumferential air holes on their ring walls, and the outlet of each air hole is connected to an inclined nozzle 30. After the airflow enters from the second short pipe 26, it forms a high-speed laminar flow through these inclined nozzles 30 and is sprayed onto the tip of the retracting and rotating needle body 14 to perform online chip removal.

[0029] The cylinder 20 has two conical buckets 27 fixedly connected to its upper and lower ends. The tips of the two conical buckets 27 face the inside of the cylinder 20. The inner walls of the two conical buckets 27 are provided with elastic silicone sealing rings 28 that are inwardly tapered. The tapered end face of the elastic silicone sealing rings 28 is provided with elastic self-closing slits. When the pin body 14 passes through, the slits are elastically opened by force and stick to the outer wall of the pin body 14. When the pin body 14 is disengaged, the slits rebound and close under its own elastic restoring force to maintain the sealed state inside the cylinder 20.

[0030] The elastic silicone sealing ring 28 has an overall inverted conical or duckbill-shaped thin-walled structure with an inward opening. A self-closing "cross-shaped" or "single-shaped" cut slit is provided on the closed end face of its tip.

[0031] When the needle body 14 moves downward to the detection position, the needle bar forcibly overcomes the elasticity of the material and opens the gap between the upper and lower elastic silicone sealing rings 28. The elastic memory of the silicone makes it firmly "clamped" to the outer wall of the needle, maintaining the sliding seal inside the cylinder 20.

[0032] When the high-frequency detection is completed, the needle body 14 retracts upwards for cleaning, and the needle tip is completely pulled upwards from the conical hopper 27 at the bottom of the cylinder 20. At this time, the elastic silicone sealing ring 28 at the bottom loses the support of the needle body, and its cut gap instantly achieves 100% rebound self-closing and locking under the combined action of its own high elastic recovery force and the suction force of the circulating negative pressure inside the cylinder 20. This cuts off the microscopic channel between the bottom of the cylinder 20 and the chip test area below, ensuring that the metal particles inside will never leak downwards under any cleaning conditions.

[0033] The locking and limiting mechanism includes a disc 13 mounted on a rotating rod 7. The lower end of the disc 13 is equipped with a piezoelectric ceramic drive module (this is prior art, used for micron-level high-frequency vibration of the pin body 14). The pin body 14 is fixed to the drive end of the piezoelectric ceramic drive module. The disc 13 is provided with a limiting groove 32. The lower edge of the opening of the limiting groove 32 is rounded. Two second slide rails 33 are fixedly connected to the mounting base 1. A fine adjustment block 34 is slidably connected to the two second slide rails 33. A limiting rod 35 is fixed on the fine adjustment block 34. A rectangular block 36 is also fixed to the front side of the mounting base 1. A spring 37 is clamped between the rectangular block 36 and the fine adjustment block 34.

[0034] The connecting component includes a guide groove on a fixed plate 17. The fixed plate 17 has multiple threaded holes that pass through the guide groove. A connecting plate 38 is fixedly connected to the cylinder 20. The connecting plate 38 has multiple through holes 39. Bolts 22 are threaded into the multiple threaded holes, and the multiple bolts 22 pass through the corresponding through holes 39.

[0035] The functional principle of this invention can be explained through the following operational methods: When the device transitions from the waiting state to the testing state, cylinder 4 drives slider 5 and mounting block 6 to move downwards by a large stroke. As disk 13 moves downwards, the rounded opening at the lower end of limiting groove 32 directly aligns with and fits onto the relatively fixed limiting rod 35. Under the forced drive of the downward stroke of disk 13, limiting rod 35 smoothly enters the limiting groove 32, and the circumferential rotational freedom of rotating rod 7 is instantly locked.

[0036] As slider 5 continues to move down to the detection point, disc 13 continues to press down, and the top wall of limit groove 32 begins to press down on limit rod 35, thereby pushing fine adjustment block 34 to overcome the resistance of spring 37 and slide slightly downward along second slide rail 33. At this time, spring 37 is compressed and stores energy.

[0037] At this point, the dial pin body 14 has completely penetrated the cylinder 20 and contacted the chip below. The piezoelectric ceramic drive module begins to perform micron-level high-frequency reciprocating vibration. Since the limiting rod 35 remains within the limiting groove 32, its rotation is completely restricted. During the micro-amplitude up-and-down movement of the slider 5, the fine-tuning block 34 and the limiting rod 35, driven by the real-time elastic force of the energy storage spring 37, closely follow the disc 13 in a gapless vertical micro-amplitude reciprocating motion, ensuring that the locked state does not dislodge from the groove and avoiding hard impacts.

[0038] Once the high-frequency detection count reaches the preset threshold, cylinder 4 switches to a large-stroke upward movement, driving slider 5 and mounting block 6 to lift significantly upward, initiating the online cleaning process. As the disc 13 begins to move upwards with a large stroke, the previously compressed spring 37 releases its elasticity, pushing the fine-tuning block 34 and the limit rod 35 upwards along the second slide rail 33 to return to their original positions. When the fine-tuning block 34 moves upwards to its initial mechanical position and stops moving, the spring 37 has completed its reset function.

[0039] At this point, the fine-tuning block 34 and the limiting rod 35 stop moving upward in space, while the cylinder 4 continues to drive the disc 13 to jump upward significantly. As the disc 13 continues to move upward, the limiting groove 32 completely disengages from the limiting rod 35. Thus, the rotating rod 7 and the dial needle body 14 automatically release their circumferential restraints instantly, regaining 360 degrees of rotational freedom.

[0040] As mounting block 6 continues upward, the first helical gear 11, which was originally in its idle stroke, engages with the tooth distribution area of ​​the helical rack 16 fixed on the horizontal plate 15. Through the engagement of the linear stroke with the rack, the drive gear train is forced to rotate, and through the reversal of the second helical gear 12, the needle body 14 is forcibly driven into a high-speed rotation state. At this time, the needle tip just retracts into the fixed ring 29 area inside the cylinder 20, and in conjunction with the convection air passage of the polishing film 31 and the circulation pump 23, a full-range, chip-free rotational wiping is completed in a completely sealed microenvironment.

[0041] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A wear-resistant needle-pulling test module device, comprising a mounting base (1) and a needle-pulling body (14), characterized in that, Also includes: An axial drive mechanism is provided on the mounting base (1) and is used to drive the moving carrier carrying the pin body (14) to reciprocate linearly along the first axis. The rotating cleaning mechanism includes a cleaning component disposed on the mounting base (1) and a reversing transmission component disposed between the moving carrier and the mounting base (1); during the movement of the moving carrier along the first axis, the reversing transmission component generates mechanical linkage with the fixed structure on the mounting base (1) to drive the dial needle body (14) to rotate around its own axis, so that the tip of the dial needle body (14) is rotated and wiped clean in the cleaning component; A locking and limiting mechanism is provided on the mounting base (1) to limit the rotational freedom of the pin body (14) when the pin body (14) moves to the detection position.

2. The wear-resistant needle-pulling test module device according to claim 1, characterized in that: The reversing transmission assembly includes a rotating rod (7) rotatably mounted on a moving carrier, and the dial pin body (14) is located at the lower end of the rotating rod (7); the reversing transmission assembly also includes a transmission wheel system disposed on the moving carrier, and a helical rack (16) fixed on the mounting base (1); during the process of the moving carrier moving down or up, the transmission wheel system meshes with the helical rack (16), thereby converting linear motion into rotational motion of the rotating rod (7).

3. The wear-resistant needle-pulling test module device according to claim 2, characterized in that: The transmission gear system includes a second helical gear (12) fixed on a rotating rod (7), a rotating shaft (10) rotatably mounted on a moving carrier, and a first helical gear (11) fixed on the rotating shaft (10) and meshing with the second helical gear (12). The first helical gear (11) meshes with a helical rack (16).

4. The wear-resistant needle-pulling test module device according to claim 3, characterized in that: The helical rack (16) has teeth distributed only in its middle travel region, so that the pin body (14) can rotate in a specific travel segment in a non-detection position.

5. The wear-resistant needle-pulling test module device according to claim 1, characterized in that: The cleaning assembly includes a fixing plate (17) fixed on the mounting base (1). A cylinder (20) is connected to the front side of the fixing plate (17) via a connecting assembly. Two fixing rings (29) are fixedly connected inside the cylinder (20). A polishing film (31) is fixedly connected to the inner wall of each of the two fixing rings (29).

6. The wear-resistant needle-pulling test module device according to claim 5, characterized in that: It also includes a pneumatic cleaning assembly, which includes a circulation pump (23) and a filter box (24) mounted on a mounting base (1). The air inlet of the circulation pump (23) is connected to the bottom space of the filter box (24). The air outlet of the circulation pump (23) is connected to an air inlet pipe (19). The top space of the filter box (24) is connected to an air outlet pipe (18). The upper space of the cylinder (20) is connected to a first short pipe (25). The lower space of the cylinder (20) is connected to a second short pipe (26). The first short pipe (25) and the air outlet pipe (18) and the second short pipe (26) and the air inlet pipe (19) are all connected by a spiral joint (21). Multiple air holes are distributed in an array on the upper part of the two fixed rings (29). The upper end of each air hole is connected to an inclined nozzle (30).

7. The wear-resistant needle-pulling test module device according to claim 6, characterized in that: The upper and lower ends of the cylinder (20) are fixedly connected with conical buckets (27), the tips of the two conical buckets (27) are facing the inside of the cylinder (20), and the inner walls of the two conical buckets (27) are provided with elastic silicone sealing rings (28) that are inwardly tapered. The tapered end face of the elastic silicone sealing rings (28) is provided with elastic self-closing slits. When the pin body (14) passes through, the slits are elastically opened by force and stick to the outer wall of the pin body (14). When the pin body (14) is disengaged, the slits rebound and close under their own elastic restoring force to maintain the sealed state inside the cylinder (20).

8. The wear-resistant needle-pulling test module device according to claim 2, characterized in that: The locking and limiting mechanism includes a disc (13) mounted on a rotating rod (7), a limiting groove (32) on the disc (13), two second slide rails (33) fixedly connected to the mounting base (1), and a fine adjustment block (34) slidably connected to the two second slide rails (33). A limiting rod (35) is fixed on the fine adjustment block (34). The locking and limiting mechanism is also provided with a spring (37) to drive the fine adjustment block (34) to move upward and reset when the pin body (14) is reset.

9. The wear-resistant needle-pulling test module device according to claim 5, characterized in that: The connecting assembly includes a guide groove on a fixed plate (17), a plurality of threaded holes on the fixed plate (17), the plurality of threaded holes passing through the guide groove, a connecting plate (38) fixedly connected to the cylinder (20), the connecting plate (38) having a plurality of through holes (39), bolts (22) threadedly connected to the plurality of threaded holes, and the plurality of bolts (22) passing through the corresponding through holes (39).

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