A gas cabinet fire extinguishing system for semiconductor manufacturing

Abstract

The application belongs to the technical field of semiconductor manufacturing, and is especially a gas cabinet fire extinguishing system for semiconductor manufacturing, which comprises a cabinet body, a storage cavity and a working cavity are arranged in the cabinet body, a storage assembly for storing foam is arranged in the storage cavity, and an induction spraying mechanism is arranged in the working cavity. The induction spraying mechanism comprises a foam tank arranged in the storage cavity, a conveying pipe extending into the working cavity is communicated with the foam tank, a collecting pipe communicated with the conveying pipe is installed on the top cavity wall of the working cavity, a spraying nozzle is installed on one end of the collecting pipe, and an electromagnetic valve is arranged between the foam tank and the conveying pipe. A impeller is arranged in the venturi tube to realize automatic stirring and mixing of foam liquid without power, a conical cover is driven to rotate by a pneumatic linkage rotating mechanism to automatically adjust the spraying range, and the problems of uneven mixing of foam, additional power, limited spraying range and insufficient linkage control in the prior art are solved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a fire extinguishing system for a gas holder used in semiconductor manufacturing. Background Technology

[0002] In semiconductor manufacturing, gas holders, as critical gas storage and transportation equipment, are widely used to store various specialty gases, including many flammable, explosive, and highly corrosive hazardous gases. Because semiconductor manufacturing processes have extremely high requirements for environmental cleanliness and equipment stability, gas holders are typically in a closed or semi-closed state. Their compact internal space and densely packed components mean that if a gas leak causes a fire, the fire can spread rapidly, damaging the gas holder and its precision components, resulting in severe economic losses. Furthermore, the increased leakage could lead to secondary explosions, the spread of toxic gases, and other safety accidents, posing a significant threat to the production environment and personnel safety.

[0003] Currently, fire suppression systems for gas cabinets used in semiconductor manufacturing mainly employ two methods: gas extinguishing and dry powder extinguishing. While gas extinguishing systems can achieve total flooding, they require extremely high sealing of the enclosed space, and some extinguishing gases are corrosive or have a greenhouse effect, potentially interfering with semiconductor manufacturing processes. Furthermore, gas extinguishing systems have poor coverage of localized fire points, making it difficult to quickly suppress reignition. Dry powder extinguishing systems, on the other hand, suffer from large residues after extinguishing the fire, which are difficult to clean up. Residual dry powder can easily contaminate the clean environment required for semiconductor manufacturing, damage precision components, and disrupt subsequent production. Therefore, both of these fire suppression methods have significant limitations.

[0004] To address the aforementioned issues, foam fire suppression systems have been increasingly explored for use in gas holder fire suppression. Foam forms a dense, high-temperature-resistant covering layer that effectively envelops the fire, isolating it from air and suffocating it. Furthermore, the residue is easily cleaned up after extinguishing the fire, resulting in minimal environmental and component pollution, thus meeting the cleanliness requirements of semiconductor manufacturing. However, existing foam fire suppression systems still exhibit several technical shortcomings when applied to gas holders used in semiconductor manufacturing: On the one hand, in existing foam fire extinguishing systems, the foam concentrate and dilution medium are prone to stratification and sedimentation when left to stand for a long time, resulting in uneven mixing, poor foaming effect, and inability to effectively encapsulate the fire point; existing technologies require additional power devices to shake and stir the storage tank, which not only increases the complexity and energy consumption of the system, but also poses a risk of failure, making it difficult to meet the high-efficiency and stable requirements of gas holder fire extinguishing.

[0005] On the other hand, existing foam spraying structures are mostly fixed, with limited spray range and uneven diffusion. They are prone to creating fire extinguishing blind spots due to obstruction inside the gas holder, and lack a linkage control mechanism, making it impossible to automatically adjust the diffusion effect according to the foam delivery status. As a result, their adaptability and fire extinguishing efficiency are low.

[0006] In addition, the linkage control of existing foam fire extinguishing systems relies on manual or complex detection devices, resulting in slow response and low accuracy. It cannot achieve automated linkage of foam mixing and spray diffusion, making it difficult to meet the rapid response requirements for extinguishing gas tank fires.

[0007] In summary, existing foam fire extinguishing systems for semiconductor gas holders suffer from problems such as uneven foam mixing, the need for additional power to shake the storage tank, limited spray range, and insufficient linkage control. There is an urgent need for a fire extinguishing system that can automatically and evenly mix foam, requires no additional power, can automatically adjust spray diffusion, and has rapid linkage to meet the special needs of semiconductor gas holders. Summary of the Invention

[0008] To address the aforementioned problems, this invention proposes a fire extinguishing system for a gas holder used in semiconductor manufacturing, which more precisely solves the problems mentioned in the background art.

[0009] This invention is achieved through the following technical solution: This invention proposes a fire extinguishing system for a gas holder used in semiconductor manufacturing, comprising a cabinet, wherein the cabinet has a storage chamber and a working chamber, the storage chamber contains a storage component for storing foam, and the working chamber contains a sensor-activated spray mechanism, the sensor-activated spray mechanism comprising: A foam tank is disposed in the storage cavity. A delivery pipe extending into the working cavity is connected to the foam tank. A central pipe connected to the delivery pipe is installed on the top wall of the working cavity. A nozzle is installed at one end of the central pipe. A solenoid valve is provided between the foam tank and the delivery pipe. A foam delivery pump is provided on the central pipe for outputting foam liquid from the foam tank to the nozzle. A fire detector is installed inside the working chamber for real-time fire detection; A fixed base is installed inside the working chamber. A conical cover is rotatably mounted on the fixed base. The top of the conical cover has a hole for accommodating the spray nozzle. A spiral blade is provided inside the conical cover to guide the foam liquid entering the conical cover to flow along a spiral path to evenly diffuse the foam. A conical column is connected to the spiral blade and coaxially arranged with the conical cover.

[0010] Preferably, it further includes a pneumatic linkage rotation mechanism, which is used to automatically adjust the rotation of the conical hood according to the flow state of the foam liquid to change the foam spray range.

[0011] Preferably, the pneumatic linkage rotation mechanism includes the venturi tube, the impeller, and the Hall sensor; The Venturi tube is disposed at least a distance from the central tube, and the impeller is rotatably disposed inside the Venturi tube for being driven to rotate and stir the foam liquid as it flows through the Venturi tube. The Hall sensor is mounted on the outside of the throat of the venturi tube and is used to generate a sensing signal when the impeller rotates.

[0012] Preferably, the pneumatic linkage rotation mechanism further includes a rotating cavity, a turntable, and blades; The rotating cavity is disposed within the fixed base, the turntable is rotatably disposed within the rotating cavity, and the turntable is connected to the conical cover; The blades are multiple and arranged in a circular array on the peripheral wall of the turntable.

[0013] Preferably, the pneumatic linkage rotation mechanism further includes a miniature air pump, an air pipe, and a starter; The miniature air pump is mounted on the fixed base, and the air pipe connects the miniature air pump to the rotating cavity. The air nozzle of the air pipe corresponds to the rotating chamber, and the orientation of the air nozzle corresponds to the windward side of the blade, so as to drive the blade to rotate. The starter is mounted on the miniature air pump and is connected to the Hall sensor signal to receive the sensing signal and start the miniature air pump.

[0014] Preferably, a fixing hoop is installed inside the storage cavity, and the foam tank is mounted on the fixing hoop.

[0015] Preferably, the top and bottom of the turntable are both fixed with ring plates, and the top and bottom walls of the rotating cavity are both provided with ring grooves for the ring plates to slide.

[0016] Preferably, a left cabinet door and a right cabinet door are installed on the cabinet body corresponding to the exterior of the storage cavity and the working cavity, respectively.

[0017] Preferably, an operation panel is installed on the cabinet, and the operation panel is signal-connected to the Hall sensor, the starter, and the fire detector.

[0018] Preferably, an alarm connected to the control panel signal is installed on the cabinet.

[0019] Compared with the prior art, the present invention provides a fire extinguishing system for a gas holder used in semiconductor manufacturing, which has the following advantages: This fire suppression system for semiconductor manufacturing gas holders utilizes a venturi tube within the working chamber, with a rotatable impeller mounted inside. As the foam liquid flows through the venturi tube, the impeller's passive rotation is driven by the liquid's own kinetic energy, generating shearing and turbulent flow to achieve dynamic mixing. This effectively prevents the foam concentrate and dilution medium from separating and settling due to prolonged static conditions. Compared to existing technologies that require additional power units (such as motors or cylinders) to shake and stir the storage tank, this invention achieves automatic and uniform mixing without an additional power source, significantly reducing system complexity, energy consumption, and failure risks. It is well-suited to the stringent requirements of semiconductor manufacturing gas holders for equipment stability and cleanliness.

[0020] This fire extinguishing system for a semiconductor manufacturing gas holder utilizes a rotatable conical hood mounted on a fixed base. Inside the hood, spiral blades and a conical column are arranged, forming a spiral channel that allows the foam liquid entering the hood to flow orderly along a spiral path before being sprayed out, achieving uniform foam diffusion. Simultaneously, a pneumatically linked rotating mechanism uses a Hall effect sensor to detect the impeller's rotation and an automatic start / stop device to control a micro-pump. The micro-pump sprays air through an air pipe into the blades within the rotating chamber, driving the turntable and conical hood to rotate synchronously, thereby changing the foam spray direction and diffusion range. Compared to existing fixed spray structures, this invention achieves dynamic adjustment of the spray range, effectively eliminating fire extinguishing blind spots caused by obstructions from components inside the gas holder. Furthermore, the entire linkage process requires no manual intervention or complex detection devices, offering rapid response and high accuracy. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a fire extinguishing system for a gas holder used in semiconductor manufacturing, as proposed in this invention. Figure 2 This is a schematic diagram of the oblique cross-sectional structure of a fire extinguishing system for a semiconductor manufacturing gas holder proposed in this invention; Figure 3 This invention proposes a fire extinguishing system for a gas holder used in semiconductor manufacturing. Figure 2 A schematic diagram of the AA section structure; Figure 4 This is a cross-sectional structural schematic diagram of a fire extinguishing system for a semiconductor manufacturing gas holder proposed in this invention; Figure 5 This is a schematic diagram of the structure of the fixed base, nozzle, conical cover, rotating chamber, turntable, ring plate, and blades of a fire extinguishing system for a semiconductor manufacturing gas holder proposed in this invention. Figure 6 This is a schematic diagram of the bottom structure of the fixing base and conical cover of a fire extinguishing system for a semiconductor manufacturing gas holder proposed in this invention; Figure 7This is a cross-sectional schematic diagram of the Venturi tube in a fire extinguishing system for a gas holder used in semiconductor manufacturing, as proposed in this invention. Figure 8 This invention proposes a fire extinguishing system for a gas holder used in semiconductor manufacturing. Figure 6 A schematic diagram of the BB section in the diagram.

[0022] In the diagram: 1. Cabinet; 2. Storage chamber; 201. Fixing clamp; 202. Foam tank; 203. Delivery pipe; 204. Central pipe; 2040. Foam delivery pump; 205. Venturi tube; 2050. Support plate; 2051. Impeller; 206. Hall sensor; 207. Fixing plate; 208. Nozzle; 209. Fixing base; 210. Miniature air pump; 2101. Air pipe; 211. Starter; 212. Conical hood; 213. Rotating chamber; 214. Turntable; 215. Ring plate; 2150. Ring groove; 216. Blade; 217. Spiral blade; 218. Conical column; 3. Working chamber; 4. Left cabinet door; 5. Right cabinet door; 6. Control panel; 7. Fire detector. Detailed Implementation

[0023] To more clearly and completely illustrate the technical solution of the present invention, the present invention will be further described below with reference to the accompanying drawings. Example

[0024] like Figures 1-8 As shown in the figure, an embodiment of the present invention provides a fire extinguishing system for a semiconductor manufacturing gas holder, comprising a cabinet 1, wherein the cabinet 1 is provided with a storage chamber 2 and a working chamber 3. The storage chamber 2 is provided with a storage component for storing foam, and the working chamber 3 is provided with a sensor-activated spray mechanism.

[0025] Specifically, the storage assembly includes a foam tank 202, which is installed inside the storage cavity 2. To further secure the foam tank 202, a fixing clamp 201 is installed inside the storage cavity 2. The foam tank 202 is tightly secured to the bottom of the storage cavity 2 by the fixing clamp 201 to prevent displacement during transportation or use. A delivery pipe 203 extending into the working cavity 3 is connected to the foam tank 202. A solenoid valve is provided between the foam tank 202 and the delivery pipe 203 to control the flow of the foam liquid.

[0026] A central pipe 204 is installed on the top wall of the working chamber 3, and the central pipe 204 is connected to the delivery pipe 203. A foam delivery pump 2040 is installed on the central pipe 204 to pump foam liquid from the foam tank 202 through the delivery pipe 203 into the central pipe 204 and establish delivery pressure. A nozzle 208 is installed at one end of the central pipe 204 to spray out the foam liquid.

[0027] A fire detector 7 is installed inside the working chamber 3 to monitor the fire situation inside the gas holder in real time.

[0028] The working chamber 3 is also provided with a fixing seat 209, which is installed on the side wall or bottom wall of the working chamber 3. A conical cover 212 is rotatably installed on the fixing seat 209. The top of the conical cover 212 has a hole for accommodating the spray nozzle 208. The spray nozzle 208 passes through the hole and extends into the interior of the conical cover 212 or seals with the edge of the hole.

[0029] A spiral blade 217 is provided inside the conical shroud 212. The spiral blade 217 extends spirally along the inner wall of the conical shroud 212 to guide the foam liquid entering the conical shroud 212 to flow along a spiral path for uniform foam diffusion. A conical column 218 is also provided inside the conical shroud 212. The conical column 218 is connected to the spiral blade 217 and is coaxially arranged with the conical shroud 212. The conical column 218 and the spiral blade 217 together form a spiral channel, allowing the foam liquid to flow orderly within the spiral channel.

[0030] A stable foam delivery pressure is provided by the foam delivery pump 2040. Through the spiral channel formed by the spiral vane 217 and the conical column 218, the foam liquid is evenly diffused along the spiral path within the conical shroud 212 before being sprayed out. Compared to existing direct-spray structures, this results in a wider and more uniform foam coverage area, effectively reducing blind spots in fire suppression. Simultaneously, the solenoid valve is linked to the fire detector 7, enabling automatic liquid supply and rapid response in the event of a fire. The foam delivery pump 2040 can be replaced by a diaphragm pump, gear pump, or peristaltic pump; the conical column 218 and spiral vane 217 can be integrally molded, or they can be manufactured separately and then welded or threaded together; the rotation drive of the conical shroud 212, in addition to this embodiment, can also be driven directly by an electric motor or hydraulically.

[0031] The system also includes a pneumatic linkage rotation mechanism. The pneumatic linkage rotation mechanism is located in the working chamber 3 and is in drive cooperation with the central pipe 204 and the conical hood 212 respectively. It is used to automatically adjust the rotation of the conical hood 212 according to the flow state of the foam liquid to change the foam spray range.

[0032] Specifically, the pneumatic linkage rotation mechanism includes a detection part and an execution part. The detection part is installed on the central pipe 204 to sense the flow status of the foam liquid, and the execution part is installed on the fixed base 209 to drive the conical cover 212 to rotate.

[0033] By setting up a pneumatic linkage rotation mechanism, the foam spraying range can be automatically adjusted according to the flow state of the foam liquid without manual intervention, thus solving the technical problems of insufficient linkage control and slow response in the existing system.

[0034] In addition to pneumatic methods, the drive source for the pneumatic linkage rotary mechanism can also be electric, such as setting a micro motor to directly drive the cone cover 212 to rotate and controlling the motor to start and stop through the flow sensor signal; or it can be mechanically linked, such as using the flow pressure of foam liquid to drive the impeller to drive the worm gear mechanism to drive the cone cover 212.

[0035] The detection component of the pneumatic linkage rotary mechanism includes a venturi tube 205, an impeller 2051, and a Hall sensor 206.

[0036] The venturi tube 205 is installed over at least a distance of the concentrator 204, and its two ends are connected to the upstream and downstream sections of the concentrator 204, respectively. The venturi tube 205 has a throat structure that is wide at both ends and narrow in the middle, with the middle throat section having the smallest inner diameter and the largest flow velocity.

[0037] Impeller 2051 is rotatably mounted inside Venturi tube 205. Specifically, impeller 2051 is mounted on the axis of Venturi tube 205 via support plate 2050 or rotating shaft. The blades of impeller 2051 are arranged in a spiral or radially radial pattern, so that the foam liquid can impact the impeller to rotate when it flows through. Impeller 2051 is driven to rotate when the foam liquid flows through Venturi tube 205, generating shearing and turbulent effects on the foam liquid, thereby stirring and mixing the foam liquid and preventing the foam concentrate and dilution medium from separating and settling.

[0038] The Hall sensor 206 is mounted on the outside of the throat section of the Venturi tube 205. Specifically, the Hall sensor 206 is embedded in the outer wall of the Venturi tube 205 or fixed to the outer surface of the tube wall by a bracket, with its sensing end close to the inside of the Venturi tube 205. A magnet is embedded in the impeller 2051. When the impeller 2051 rotates, the Hall sensor 206 senses the change in magnetic field and generates a pulse sensing signal to indicate that the impeller 2051 is rotating.

[0039] By placing the impeller 2051 inside the venturi tube 205, the impeller rotation is driven by the kinetic energy of the foam liquid's own flow to achieve stirring, eliminating the need for an additional power unit. This solves the problems of existing technologies that require additional power to shake the storage tank, leading to system complexity, high energy consumption, and a high risk of failure. Simultaneously, the throat structure of the venturi tube 205 accelerates the foam liquid flow rate, enhancing the stirring effect. The Hall sensor 206 provides non-contact sensing of the impeller rotation, offering sensitive response and eliminating wear.

[0040] In addition to Hall sensors, photoelectric sensors (such as infrared photocells) or magnetic reed switches can also be used to detect impeller rotation. In addition to support plate, impeller 2051 can also be supported by bearings at both ends or suspended installation. Venturi tube 205 can be integrally formed with central tube 204, or it can be connected to central tube 204 as an independent pipe fitting through flange or thread.

[0041] The actuator of the pneumatic linkage rotary mechanism includes a rotating cavity 213, a turntable 214, and a blade 216.

[0042] The rotating cavity 213 is disposed within the fixed base 209. Specifically, the fixed base 209 is a hollow shell structure, and the cylindrical cavity formed inside is the rotating cavity 213. Both the top and bottom walls of the rotating cavity 213 are provided with annular grooves 2150.

[0043] A turntable 214 is rotatably disposed within a rotating cavity 213. The turntable 214 is disc-shaped, with annular plates 215 fixedly mounted on its top and bottom. The annular plates 215 are slidably fitted within annular grooves 2150 on the top and bottom walls of the rotating cavity 213, respectively, forming a sliding sealing structure. The turntable 214 is fixedly connected to a conical cover 212. Specifically, the central axis of the turntable 214 is connected to the top of the conical cover 212 by bolts, welding, or integral molding, so that the turntable 214 and the conical cover 212 rotate synchronously.

[0044] Multiple blades 216 are arranged in a circumferential array on the peripheral wall of the turntable 214. The blades 216 can be flat or curved plate-shaped structures, with their windward surfaces facing the tangential direction of the rotating cavity 213 to receive the impact of the airflow.

[0045] The sliding fit between the annular plate 215 and the annular groove 2150 enables the turntable 214 to rotate stably within the rotating cavity 213, while simultaneously forming a labyrinth seal to prevent leakage of foam liquid or gas. The circumferential array arrangement of the blades 216 can evenly receive the airflow impact, ensuring smooth rotation of the turntable 214.

[0046] In addition to the sliding fit of the ring plate, the support between the turntable 214 and the rotating cavity 213 can also be ball bearings or roller bearings; in addition to the flat plate shape, the blade 216 can also be curved blades or turbine blades to improve aerodynamic efficiency; in addition to rigid connection, the connection between the turntable 214 and the conical cover 212 can also be achieved through coupling or gear transmission.

[0047] The actuator of the pneumatic linkage rotation mechanism also includes a micro air pump 210, an air pipe 2101, and a starter 211.

[0048] The miniature air pump 210 is mounted on the mounting base 209. Specifically, the miniature air pump 210 is fixed to the outer wall or inner cavity of the mounting base 209 by screws or clips. The air inlet of the miniature air pump 210 is connected to the outside atmosphere or the inside of the working chamber 3, and the air outlet is connected to the air pipe 2101.

[0049] The air pipe 2101 connects the miniature air pump 210 and the rotating chamber 213. One end of the air pipe 2101 is connected to the air outlet of the miniature air pump 210, and the other end passes through the fixed base 209 and communicates with the rotating chamber 213. The air outlet of the air pipe 2101 is located inside the rotating chamber 213. Specifically, the air outlet is located on the side wall of the rotating chamber 213, and the direction of the air outlet corresponds to the windward side of the blade 216, so that the ejected gas directly impacts the blade 216 to drive its rotation.

[0050] The starter 211 is mounted on the miniature air pump 210 and is connected to the Hall sensor 206 for signal transmission. The starter 211 is used to receive the sensing signal generated by the Hall sensor 206 and control the power supply of the miniature air pump 210 according to the signal. That is, the miniature air pump 210 is started when the sensing signal is received and the miniature air pump 210 is turned off when the sensing signal disappears.

[0051] By connecting the starter 211 to the Hall sensor 206, the micro air pump 210 automatically starts and stops according to the impeller rotation status, without manual intervention or complex controllers, and responds quickly. The air nozzle of the air pipe 2101 faces the windward side of the blade 216, ensuring gas driving efficiency and enabling the conical shroud 212 to respond quickly to changes in the flow state of the foam liquid.

[0052] The micro air pump 210 can be replaced by a micro diaphragm air pump, a micro turbine air pump, or a micro piston air pump; the starter 211 can be integrated inside the micro air pump 210 or installed as an independent module on the cabinet 1; in addition to switch control, the control method can also adopt proportional control, that is, adjust the output air volume of the micro air pump 210 according to the impeller speed, thereby adjusting the rotation speed of the conical cover 212.

[0053] A fixing hoop 201 is installed inside the storage cavity 2. The fixing hoop 201 has a semi-circular or circular structure and is fixed to the bottom or side wall of the storage cavity 2 by bolts or welding. The foam tank 202 is installed on the fixing hoop 201, and the fixing hoop 201 holds the foam tank 202 tightly and fixes it.

[0054] The fixing hoop 201 can prevent the foam tank 202 from shaking or shifting during transportation, installation or use, and ensure the sealing reliability of the connection between the delivery pipe 203 and the foam tank 202.

[0055] The fixing hoop 201 can be replaced by an elastic strap, a snap-on bracket, or a bottom tray pressure bar.

[0056] like Figure 5 and Figure 6As shown, the top and bottom of the turntable 214 are both fixed with annular plates 215. The annular plates 215 are circular protrusions and are integrally formed with the turntable 214 or connected separately. The top and bottom walls of the rotating cavity 213 are provided with annular grooves 2150 for the annular plates 215 to slide. The annular grooves 2150 are annular recesses that match the annular plates 215. The annular plates 215 are either clearance-fitted or slidably fitted within the annular grooves 2150.

[0057] The engagement between the ring plate 215 and the ring groove 2150 serves two purposes: firstly, it acts as a guide, ensuring that the turntable 214 rotates smoothly around the axis; secondly, it forms a tortuous sealing gap, preventing foam liquid or gas from leaking along the edge of the turntable 214.

[0058] A sealing ring or grease can be added between the ring plate 215 and the ring groove 2150 to enhance the sealing and lubrication effect; the number of ring plates 215 is not limited to two, and a single ring or multi-ring structure can be set as needed.

[0059] like Figure 1 As shown, a left cabinet door 4 and a right cabinet door 5 are respectively installed on the front side of the cabinet body 1, corresponding to the storage cavity 2 and the working cavity 3. The left cabinet door 4 corresponds to the storage cavity 2, and the right cabinet door 5 corresponds to the working cavity 3. The left cabinet door 4 and the right cabinet door 5 are rotatably connected to the cabinet body 1 by hinges and are equipped with door locks.

[0060] The left cabinet door 4 and the right cabinet door 5 correspond to the storage chamber 2 and the working chamber 3, respectively, which facilitates zoned maintenance and repair. Staff can open the door of the corresponding chamber individually for operation without exposing the entire interior of the gas holder, thus reducing the risk of contamination.

[0061] The cabinet doors can be sliding or flip-up instead of rotating ones; the number of cabinet doors can be increased depending on the number of chambers.

[0062] like Figure 1 As shown, an operation panel 6 is installed on the cabinet 1, which is mounted on the outer surface of the right cabinet door 5 or on the side wall of the cabinet 1. The operation panel 6 is connected to the Hall sensor 206, the starter 211 and the fire detector 7 via a wired cable or a wireless communication module.

[0063] The control panel 6 serves as a terminal device, used to receive fire signals from the fire detector 7, sensing signals from the Hall sensor 206, and operating status signals from the starter 211. It can also send control commands to the solenoid valve, foam delivery pump 2040, and starter 211.

[0064] The operation panel 6 centrally displays the working status of each component and enables remote or local control, making it convenient for operators to monitor the system's operation.

[0065] The control panel 6 can be replaced with a touch screen, or connected to the superior fire control system for centralized monitoring; signal connection can be achieved via RS485, CAN bus, or wireless methods such as Wi-Fi and Bluetooth.

[0066] An alarm is installed on cabinet 1, and the alarm is connected to the control panel 6. The alarm can be installed on the top or side of cabinet 1, and uses an audible and visual alarm method, including a buzzer and a flashing light.

[0067] When the fire detector 7 detects a fire, the control panel 6 sends a trigger signal to the alarm, which then emits an audible and visual alarm to remind on-site personnel to evacuate immediately or take emergency measures.

[0068] Alarms can provide timely warnings in the event of a fire, improving safety.

[0069] The alarm can be a voice alarm, broadcasting the specific location and type of fire; or the alarm signal can be remotely transmitted to the control room.

[0070] In this invention, during operation, a fire detector installed in the working chamber 3 monitors the fire situation inside the gas holder in real time. When the fire detector detects a fire signal, it transmits the signal to the operation panel 6. The operation panel 6, acting as a terminal, receives the signal and sends instructions to open the solenoid valve between the foam tank 202 and the delivery pipe 203, and simultaneously activates the pump installed on the central pipe 204, allowing the foam liquid to enter the central pipe 204 through the delivery pipe 203.

[0071] When the foam liquid flows through the Venturi tube 205 installed on the central pipe 204, the increased flow velocity and decreased pressure at the throat of the Venturi tube 205 create a turbulent effect. Simultaneously, the impeller 2051, rotatable within the Venturi tube 205, passively rotates under the impact of the foam liquid, dynamically stirring and mixing the foam liquid. This prevents the foam concentrate and dilution medium from separating and settling, ensuring uniform mixing of the foam liquid. When the impeller 2051 rotates, the Hall sensor 206, installed outside the throat of the Venturi tube 205, senses the rotation, generates a signal, and sends it to the starter 211. Upon receiving the signal, the starter 211 immediately activates the micro air pump 210.

[0072] The uniformly mixed foam liquid continues to flow along the concentrator 204 and is finally sprayed out through the nozzle 208 into the conical shroud 212. After entering the conical shroud 212, the foam liquid flows along a spiral path under the guidance of the spiral blades 217, allowing the foam liquid to spread evenly. It is then sprayed out from the bottom of the conical shroud 212 to cover the fire point. The conical column 218 is connected to the spiral blades 217 and is coaxially arranged with the conical shroud 212, which is used to make the spiral blades 217 form a spiral channel.

[0073] Simultaneously, after the miniature air pump 210 is started, it delivers gas into the rotating chamber 213 through the air pipe 2101. The nozzle of the air pipe 2101 is located inside the rotating chamber 213 and faces the windward side of the blades 216. The gas ejected through the nozzle directly drives the circumferentially arrayed blades 216 to rotate. The blades 216 drive the turntable 214 to rotate within the rotating chamber 213. Since the turntable 214 is connected to the conical shroud 212, it drives the conical shroud 212 to rotate synchronously. The rotation of the conical shroud 212 changes the spray direction and diffusion range of the foam liquid, achieving dynamic coverage of the fire point and eliminating blind spots in fire suppression.

[0074] During the fire, the foam liquid continues to flow, the impeller 2051 continues to rotate, the Hall sensor 206 continuously generates a sensing signal, the miniature air pump 210 remains operational, and the conical shroud 212 continues to rotate, achieving automated linkage of foam mixing, spraying, and diffusion. When the fire detector detects that the fire has been extinguished, the control panel 6 automatically closes the solenoid valve between the foam tank 202 and the delivery pipe 203 and stops the pump. The foam liquid stops flowing, the impeller 2051 stops rotating, the Hall sensor 206's sensing signal disappears, the starter 211 shuts down the miniature air pump 210, and the system automatically returns to standby mode.

[0075] Finally, it should be noted that the basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification, and therefore remain within the spirit and scope of the exemplary embodiments of this specification. Furthermore, this specification uses specific terms to describe embodiments of this specification. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a feature, structure, or characteristic associated with at least one embodiment of this specification. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this specification can be appropriately combined. Moreover, unless expressly stated in the claims, the order of processing elements and sequences, the use of numbers and letters, or other names described in this specification are not intended to limit the order of the processes and methods of this specification.

[0076] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A fire extinguishing system for a gas-fired cabinet used in semiconductor manufacturing, comprising a cabinet, characterized in that, The cabinet contains a storage chamber and a working chamber. The storage chamber contains a storage component for storing foam, and the working chamber contains a sensor-activated spraying mechanism, which includes: A foam tank is disposed in the storage cavity. A delivery pipe extending into the working cavity is connected to the foam tank. A central pipe connected to the delivery pipe is installed on the top wall of the working cavity. A nozzle is installed at one end of the central pipe. A solenoid valve is provided between the foam tank and the delivery pipe. A foam delivery pump is provided on the central pipe for outputting foam liquid from the foam tank to the nozzle. A fire detector is installed inside the working chamber for real-time fire detection; A fixed base is installed inside the working chamber. A conical cover is rotatably mounted on the fixed base. The top of the conical cover has a hole for accommodating the spray nozzle. A spiral blade is provided inside the conical cover to guide the foam liquid entering the conical cover to flow along a spiral path to evenly diffuse the foam. A conical column is connected to the spiral blade and coaxially arranged with the conical cover.

2. The fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 1, characterized in that, It also includes a pneumatic linkage rotation mechanism, which is used to automatically adjust the rotation of the conical hood according to the flow state of the foam liquid to change the foam spray range.

3. The fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 2, characterized in that, The pneumatic linkage rotation mechanism includes the venturi tube, the impeller, and the Hall sensor; The Venturi tube is disposed at least a distance from the central tube, and the impeller is rotatably disposed inside the Venturi tube for being driven to rotate and stir the foam liquid as it flows through the Venturi tube. The Hall sensor is mounted on the outside of the throat of the venturi tube and is used to generate a sensing signal when the impeller rotates.

4. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 2, characterized in that, The pneumatic linkage rotary mechanism also includes a rotating cavity, a turntable, and blades; The rotating cavity is disposed within the fixed base, the turntable is rotatably disposed within the rotating cavity, and the turntable is connected to the conical cover; The blades are multiple and arranged in a circular array on the peripheral wall of the turntable.

5. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 2, characterized in that, The pneumatic linkage rotation mechanism also includes a miniature air pump, an air pipe, and a starter; The miniature air pump is mounted on the fixed base, and the air pipe connects the miniature air pump to the rotating cavity. The air nozzle of the air pipe corresponds to the rotating chamber, and the orientation of the air nozzle corresponds to the windward side of the blade, so as to drive the blade to rotate. The starter is mounted on the miniature air pump and is connected to the Hall sensor signal to receive the sensing signal and start the miniature air pump.

6. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 1, characterized in that, A fixing hoop is installed inside the storage cavity, and the foam tank is installed on the fixing hoop.

7. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 1, characterized in that, The top and bottom of the turntable are both fixed with ring plates, and the top and bottom walls of the rotating cavity are provided with ring grooves for the ring plates to slide.

8. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 1, characterized in that, The cabinet body is equipped with a left cabinet door and a right cabinet door, respectively, corresponding to the exterior of the storage cavity and the working cavity.

9. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 3 or 5, characterized in that, An operation panel is installed on the cabinet, and the operation panel is connected to the Hall sensor, the starter and the fire detector via signal connection.

10. A fire extinguishing system for a gas holder used in semiconductor manufacturing according to claim 9, characterized in that, An alarm is installed on the cabinet and connected to the control panel signal.

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