A bidirectional flow switching device

Abstract

The application discloses a bidirectional flow transfer device, which comprises a loading platform, which bears a material sheet; upper and lower double-layer buffer positions; two ends of the upper and lower double-layer buffer positions are respectively provided with lifting platform one and lifting platform two, the lifting platform one is flush with the upper layer or the lower layer of the upper and lower double-layer buffer positions, and the lifting platform two is flush with the upper layer or the lower layer of the upper and lower double-layer buffer positions; a material sheet transfer mechanism is used for transferring the material sheet to be worked on the loading platform to the lifting platform one or transferring the worked material sheet on the lifting platform one to the loading platform; a displacement mechanism is used for simultaneously transferring the material sheet between the lifting platform one and the upper and lower double-layer buffer positions or between the upper and lower double-layer buffer positions and the lifting platform two; an receiving platform is used for transferring the material sheet between the lifting platform two and the receiving platform by an external transfer mechanism; the whole structure is reasonable and compact, the automatic flow transfer of the material sheet to be worked and the worked material sheet is realized, the feeding efficiency and effect are greatly improved, and the stringing is met.

Description

Technical Field

[0001] This invention relates to the field of chip manufacturing equipment technology, and in particular to a bidirectional transfer device. Background Technology

[0002] In the automated chip testing and production process, the accurate and efficient transfer of wafers is the key to ensuring the continuous and stable operation of the testing process.

[0003] The wafer loading and unloading equipment used in chip testing across the industry generally suffers from low levels of automation. Traditional operation modes rely heavily on manual assistance for transfer or stand-alone loading and unloading, and only provide simple unidirectional wafer transport, failing to simultaneously achieve bidirectional flow of full wafer loading and empty wafer unloading, resulting in severe disconnects in process connections. Furthermore, existing equipment lacks automated linkage, requiring manual intervention throughout the process for handling and sorting wafers. This not only leads to high labor intensity and costs but also significantly increases the risk of chip damage and contamination due to human error, resulting in product defects. The overall low level of automation integration and the simplistic flow mode make it difficult to meet the demands of high-precision, unmanned, large-scale chip testing and production. Summary of the Invention

[0004] To address the aforementioned issues, this application provides a structurally sound bidirectional transfer device, thereby enabling automated transfer of both the work-to-be-processed and work-processed work sheets, significantly improving feeding efficiency and effectiveness, and meeting the requirements of fully automated production lines.

[0005] The technical solution adopted in this invention is as follows: A bidirectional flow device, comprising The loading platform receives the material boxes transferred by the overhead crane, and the material boxes contain multiple material sheets; The upper and lower layers of buffer positions are used to buffer the material pieces to be processed, and the lower layer of buffer positions is used to buffer the material pieces that have already been processed. Lifting platform one and lifting platform two are respectively arranged at opposite ends of the upper and lower layers of buffer positions. Lifting platform one is flush with the upper or lower layer of the upper and lower layers of buffer positions, and lifting platform two is flush with the upper or lower layer of the upper and lower layers of buffer positions. The material transfer mechanism transfers the material pieces to be processed from the loading platform to the lifting platform one, or transfers the processed material pieces from the lifting platform one to the loading platform; The shifting mechanism simultaneously shifts the material sheet between the first lifting platform and the upper and lower double-layer buffer positions, and between the upper and lower double-layer buffer positions and the second lifting platform; The receiving platform is used by an external transfer mechanism to transfer material sheets between the lifting platform and the receiving platform.

[0006] As a further improvement to the above technical solution: The loading platform includes a support platform that carries a material box containing stacked material sheets. The support platform is mounted on a lifting assembly.

[0007] The material transfer mechanism is located between the loading platform and the lifting platform. The material transfer mechanism includes a support frame that supports the bottom of the material piece. A clamping seat is provided above the support frame. The clamping seat is equipped with clamping components, which clamp and straighten the circumferentially upward edge of the material piece. The support frame and the clamping components perform transfer actions synchronously.

[0008] The sheet transfer mechanism includes a Y-axis transfer module, a rotating module mounted on the Y-axis transfer module, a Z-axis transfer module mounted on the rotating module, an X-axis transfer module mounted on the Z-axis transfer module, and a support frame and clamping components mounted on the X-axis transfer module.

[0009] The upper buffer position is provided with centering mechanisms on both sides. The two centering mechanisms move towards each other and exert force to make the workpieces on the upper buffer position center.

[0010] The shifting mechanism is provided in two sets. The two sets of shifting mechanisms operate independently and correspond to the upper buffer bit and the lower buffer bit respectively. The shifting directions of the two sets of shifting mechanisms are opposite.

[0011] The shifting mechanism includes a material shifting module arranged along the direction of the first lifting platform, the upper and lower double-layer buffer positions, and the second lifting platform. The material shifting module is equipped with a lifting module. The output part of the lifting module faces upward and is equipped with a material shifting frame. The material shifting frame has two material shifting positions.

[0012] The dimensions of the lifting platform one, the upper and lower double-layer buffer positions, and the lifting platform two are consistent in the arrangement direction.

[0013] The external transfer mechanism is configured with the same structure as the sheet transfer mechanism, or the external transfer mechanism is a six-axis robot.

[0014] The receiving platform includes an X-axis receiving module, a Y-axis receiving module installed on the X-axis receiving module, and a receiving platform installed on the Y-axis receiving module, which carries the material sheet.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention, through the setting of upper and lower double-layer buffer positions, combined with the front-end loading platform, the material transfer mechanism, the first lifting platform, the second rear lifting platform and the transfer mechanism, realizes the automated flow of the materials to be processed and the materials that have been processed, which greatly helps to improve the material loading efficiency and effect. Moreover, the overall structure is reasonable and the layout is compact, which meets the requirements of fully automated line connection. The present invention also includes the following advantages: By using the support frame and clamping components on the clamping seat in the wafer transfer mechanism, the support frame supports the wafer from the bottom while the clamping components assist in clamping it at the upward edge for straightening. This is especially suitable for transferring fully loaded wafers, effectively ensuring the stability and reliability of wafer and internal chip transfer. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the layout of the present invention (front view).

[0017] Figure 2 This is a schematic diagram of the layout of the present invention (top view).

[0018] The components include: 1. Loading platform; 2. Material transfer mechanism; 3. Lifting platform one; 4. Upper buffer position; 5. Lower buffer position; 6. Shifting mechanism; 7. Centering mechanism; 8. Lifting platform two; 9. Receiving platform; 11. Lifting assembly; 12. Support platform; 21. Clamping seat; 22. Support bracket; 23. Y-axis transfer module; 24. X-axis transfer module; 25. Rotation module; 26. Z-axis transfer module; 27. Clamping component; 61. Material feeding and translation module; 62. Lifting module; 63. Material feeding rack; 91. Y-axis receiving module; 92. X-axis receiving module; 93. Receiving platform. Detailed Implementation

[0019] The specific embodiments of the present invention will now be described with reference to the accompanying drawings.

[0020] like Figure 1 and Figure 2 As shown, a bidirectional transfer device according to this embodiment includes... Loading platform 1 is used to stack and receive material boxes transferred by overhead cranes, with each material box containing multiple material sheets; The upper and lower double-layer buffer positions are used to buffer the material pieces to be processed, and the lower buffer position 5 is used to buffer the material pieces that have been processed. Lifting platform 1 3 and lifting platform 2 8 are respectively arranged at opposite ends of the upper and lower double-layer buffer positions. Lifting platform 1 3 is flush with the upper or lower layer of the upper and lower double-layer buffer positions, and lifting platform 2 8 is flush with the upper or lower layer of the upper and lower double-layer buffer positions. The material transfer mechanism 2 transfers the material pieces to be processed on the loading platform 1 to the lifting platform 3, or transfers the processed material pieces on the lifting platform 3 to the loading platform 1; The shifting mechanism 6 simultaneously shifts the material sheet between the lifting platform 1 3 and the upper and lower double-layer buffer positions, and between the upper and lower double-layer buffer positions and the lifting platform 2 8; The receiving platform 9 is used by an external transfer mechanism to transfer material sheets between the lifting platform 2 8 and the receiving platform 9.

[0021] In this embodiment, by setting up upper and lower double-layer buffer positions, combined with the front-end loading platform 1, the material transfer mechanism 2, the lifting platform 1 3, the rear-end lifting platform 2 8 and the transfer mechanism 6, the automated flow of the materials to be processed and the materials that have been processed is realized.

[0022] In practical use, an overhead crane places the material box onto loading platform 1, where it is stacked with fully loaded wafers. Wafer transfer mechanism 2 transfers the fully loaded wafers one by one from loading platform 1 to lifting platform 3. The shifting mechanism 6 then moves the fully loaded wafers from lifting platform 3 to the upper buffer 4 and lifting platform 8 of the dual-layer buffer system. An external transfer mechanism then transfers the fully loaded wafers from lifting platform 8 to receiving platform 9. External testing equipment then removes chips one by one from the fully loaded wafers on receiving platform 9 for testing, until the wafers are received. Platform 9, fully loaded with wafers, gradually becomes a processed wafer, i.e., an empty wafer from which the chip is removed. An external transfer mechanism transfers the processed wafers from receiving platform 9 to lifting platform 2 8. Lifting platform 2 8 descends to be level with the lower cache position 5 in the upper and lower double-layer cache positions. Transfer mechanism 6 gradually moves the processed wafers from lifting platform 2 8 to the lower cache position 5 and lifting platform 1 3. Lifting platform 1 3 rises to be level with the upper cache position 4 in the upper and lower double-layer cache positions. The wafer transfer mechanism 2 then transfers the processed wafers from lifting platform 1 3 to loading platform 1.

[0023] In one embodiment, two sets of loading platforms 1 can be arranged side by side at the end of the lifting platform 3. One set is used to carry the already processed material pieces, which are placed in the material box and moved away by the crane. The other set is used to receive the material box transferred by the crane. The material box is full of material pieces. The two sets of loading platforms 1 are used alternately.

[0024] The loading platform 1 includes a support platform 12, which carries a material box containing stacked material pieces. The support platform 12 is mounted on the lifting assembly 11.

[0025] In actual use, as the material pieces in the material box on the carrier platform 12 are gradually removed or stacked, the action of the lifting component 11 can drive the carrier platform 12 to move up or down by the height of one material piece, so that each time a material piece is removed or placed, it is at the same height.

[0026] In this embodiment, the lifting component 11 can be a general standard linear drive power such as a cylinder or an electric cylinder, or it can be a general component consisting of a motor combined with a lead screw drive, as long as it can realize and meet the lifting requirements of the support platform 12.

[0027] The material transfer mechanism 2 is located between the loading platform 1 and the lifting platform 3. The material transfer mechanism 2 includes a support frame 22 supporting the bottom of the material piece. A clamping seat 21 is provided above the support frame 22. The clamping seat 21 is equipped with a clamping member 27. The clamping member 27 clamps and straightens the circumferentially upward edge of the material piece. The support frame 22 and the clamping member 27 perform transfer actions synchronously.

[0028] In this embodiment, by setting the support frame 22 and the clamping member 27 on the clamping seat 21 in the sheet transfer mechanism 2, while the support frame 22 supports the sheet from the bottom, the clamping member 27 can assist in clamping the sheet at the upward edge for straightening. This is especially suitable for transferring fully loaded sheets, effectively ensuring the transfer stability and reliability of the sheet and internal chip.

[0029] The sheet transfer mechanism 2 includes a Y-axis transfer module 23, a rotating module 25 is installed on the Y-axis transfer module 23, a Z-axis transfer module 26 is installed on the rotating module 25, an X-axis transfer module 24 is installed on the Z-axis transfer module 26, and a support frame 22 and a clamping member 27 are installed on the X-axis transfer module 24.

[0030] In this embodiment, the X-axis transfer module 24, Y-axis transfer module 23, and Z-axis transfer module 26 enable the support frame 22 and clamping member 27 to move up and down, left and right, and forward and backward in space, facilitating the position movement during material handling. The rotation module 25 allows for quick switching between facing the loading platform 1 and the lifting platform 3.

[0031] In this embodiment, the X-axis transfer module 24, Y-axis transfer module 23, and Z-axis transfer module 26 can be general linear modules, and the rotating module 25 can be a general rotating cylinder, turntable, or general rotating assembly, as long as it can meet the transfer requirements of the material transfer mechanism 2.

[0032] The upper buffer position 4 is provided with centering mechanisms 7 on both sides. The two centering mechanisms 7 move towards each other and exert force to make the workpieces on the upper buffer position 4 centered, effectively ensuring the consistency of the position of the workpieces on the upper buffer position 4.

[0033] In this embodiment, the centering mechanism 7 can be composed of a cylinder and a centering plate, which can push from both sides to make the workpiece be centered on the upper buffer position 4.

[0034] The shifting mechanism 6 is provided in two sets. The two sets of shifting mechanisms 6 operate independently and correspond to the upper buffer position 4 and the lower buffer position 5 respectively. The shifting directions of the two sets of shifting mechanisms 6 are opposite, thus adapting to bidirectional flow.

[0035] The shifting mechanism 6 includes a material shifting module 61 arranged along the direction of the first lifting platform 3, the upper and lower double-layer buffer positions, and the second lifting platform 8. The material shifting module 61 is equipped with a lifting module 62. The output part of the lifting module 62 faces upward and is equipped with a material shifting frame 63. The material shifting frame 63 is provided with two material shifting positions.

[0036] In actual use, the lifting module 62 moves upward, causing the material feeder 63 to extend upward into the gap between the lifting platform 1 3, the upper and lower double-layer buffer positions, and the lifting platform 2 8. Then, in conjunction with the action of the material feeder translation module 61, the material tray is moved. After the material is moved into place, the lifting module 62 moves downward, causing the material feeder 63 to move downward and disengage from the lifting platform 1 3, the upper and lower double-layer buffer positions, and the lifting platform 2 8, thus completing one movement.

[0037] The dimensions of the lifting platform 1 (3), the upper and lower double-layer buffer positions, and the lifting platform 2 (8) are consistent in the arrangement direction, matching the movement operation of the shifting mechanism 6.

[0038] The external transfer mechanism is set to have the same structure as the material transfer mechanism 2, or the external transfer mechanism is a six-axis robot that can transfer the material between the receiving platform 9 and the lifting platform 8.

[0039] The receiving platform 9 includes an X-axis receiving module 92, on which a Y-axis receiving module 91 is installed. The Y-axis receiving module 91 is equipped with a receiving platform 93, which carries the material sheet.

[0040] In this embodiment, the X-direction receiving module 92 and the Y-direction receiving module 91 can be existing general-purpose linear modules.

[0041] This invention enables the automated flow of both the work-ready and work-ready material sheets, greatly improving feeding efficiency and effectiveness. Furthermore, its overall structure is reasonable and its layout is compact, meeting the requirements of fully automated wiring.

[0042] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0043] The above description is an explanation of the present invention and not a limitation thereof. The scope of the present invention is defined by the claims. Within the scope of protection of the present invention, any form of modification may be made.

Claims

1. A bidirectional circulation device, characterized in that: include Loading platform (1) receives the material box transferred by the overhead crane, and the material box contains multiple material pieces; The upper and lower double-layer buffer positions are used to buffer the material pieces to be processed and the lower buffer position (5) is used to buffer the material pieces that have been processed. Lifting platform one (3) and lifting platform two (8) are respectively arranged at opposite ends of the upper and lower double-layer buffer positions. Lifting platform one (3) is flush with the upper or lower layer of the upper and lower double-layer buffer positions, and lifting platform two (8) is flush with the upper or lower layer of the upper and lower double-layer buffer positions. The material transfer mechanism (2) transfers the material to be worked on the loading platform (1) to the lifting platform (3), or transfers the already worked material on the lifting platform (3) to the loading platform (1). The shifting mechanism (6) simultaneously shifts the material between the lifting platform one (3) and the upper and lower double-layer buffer positions, and between the upper and lower double-layer buffer positions and the lifting platform two (8); The receiving platform (9) is used by an external transfer mechanism to transfer the material between the lifting platform (8) and the receiving platform (9).

2. The bidirectional transfer device as described in claim 1, characterized in that: The loading platform (1) includes a support platform (12) which carries a material box. Material pieces are stacked in the material box. The support platform (12) is installed on the lifting assembly (11).

3. The bidirectional circulation device as described in claim 1, characterized in that: The material transfer mechanism (2) is located between the loading platform (1) and the lifting platform (3). The material transfer mechanism (2) includes a support frame (22) supporting the bottom of the material piece. A clamping seat (21) is provided above the support frame (22). A clamping member (27) is installed on the clamping seat (21). The clamping member (27) clamps and straightens the circumferential upward edge of the material piece. The support frame (22) and the clamping member (27) perform transfer actions simultaneously.

4. A bidirectional circulation device as described in claim 1 or 3, characterized in that: The sheet transfer mechanism (2) includes a Y-axis transfer module (23), a rotating module (25) is installed on the Y-axis transfer module (23), a Z-axis transfer module (26) is installed on the rotating module (25), an X-axis transfer module (24) is installed on the Z-axis transfer module (26), and a support frame (22) and a clamping member (27) are installed on the X-axis transfer module (24).

5. The bidirectional transfer device as described in claim 1, characterized in that: The upper buffer position (4) is provided with centering mechanisms (7) on both sides. The centering mechanisms (7) on both sides move towards each other and exert force to make the workpiece to be processed on the upper buffer position (4) center.

6. The bidirectional transfer device as described in claim 1, characterized in that: The shifting mechanism (6) is provided in two sets. The two sets of shifting mechanisms (6) operate independently and correspond to the upper buffer position (4) and the lower buffer position (5) respectively. The shifting directions of the two sets of shifting mechanisms (6) are opposite.

7. The bidirectional transfer device as described in claim 1, characterized in that: The shifting mechanism (6) includes a material shifting module (61) arranged along the direction of the first lifting platform (3), the upper and lower double-layer buffer positions, and the second lifting platform (8). The material shifting module (61) is equipped with a lifting module (62). The output part of the lifting module (62) faces upward and is equipped with a material shifting frame (63). The material shifting frame (63) has two material shifting positions.

8. The bidirectional transfer device as described in claim 1, characterized in that: The lifting platform one (3), the upper and lower double-layer buffer positions, and the lifting platform two (8) have the same dimensions in the arrangement direction.

9. A bidirectional transfer device as described in claim 1, characterized in that: The external transfer mechanism is configured with the same structure as the sheet transfer mechanism (2), or the external transfer mechanism is a six-axis robot.

10. A bidirectional transfer device as described in claim 1, characterized in that: The receiving platform (9) includes an X-direction receiving module (92), a Y-direction receiving module (91) is installed on the X-direction receiving module (92), and a receiving platform (93) is installed on the Y-direction receiving module (91), which carries the material sheet.

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