Vacuum motor, motor assembly and electric appliance

Abstract

The application provides a vacuum motor, a motor assembly and an electric device. The vacuum motor comprises a magnetic steel, a coil assembly and a temperature sensor. The coil assembly comprises a coil unit, a coil support, a filling body and two oppositely arranged positioning bosses. The coil support comprises an inner groove. The coil unit comprises two oppositely arranged coils. The two positioning bosses are protruded from the groove bottom wall of the inner groove and located on two opposite surfaces of the groove bottom wall of the inner groove. Each coil is sleeved and connected with the outer periphery of one positioning boss. The temperature sensor is located in the inner groove and associated with the two coils. The filling body fills the inner groove and wraps the two coils. The filling body is sealed in the inner groove together with the two coils and the temperature sensor. The magnetic steel cover is arranged on the coil support and opposite to and spaced from the coil support. The magnetic steel can move relative to the coil support. The application can accurately control the temperature of multiple vacuum motors working together, and simultaneously meet the vacuum applicability of the vacuum motor.

Description

Technical Field

[0001] This application relates to the field of electrical equipment technology, and in particular to a vacuum motor, motor assembly and electrical equipment. Background Technology

[0002] With the advancement of technology, the requirements for electrical equipment in fields such as scientific research, medicine, and high-precision manufacturing are becoming increasingly stringent, demanding higher performance in vacuum environments. Motors used in these equipment are called vacuum motors. Because there is no gas convection in vacuum motors, those requiring heat dissipation generally require a cooling structure added around the coils inside the motor. When multiple vacuum motors requiring heat dissipation operate together, they typically share a single cooling system. In high-precision, high-vacuum (generally referring to a vacuum level less than 10⁻⁵) applications… -3 In environments with Pa, the temperature of vacuum motors is difficult to control precisely. Summary of the Invention

[0003] Embodiments of this application provide a vacuum motor, a motor assembly, and an electrical device that can precisely control the temperature of multiple vacuum motors operating simultaneously while satisfying the vacuum applicability of the vacuum motors.

[0004] In a first aspect, embodiments of this application provide a vacuum motor, the vacuum motor comprising:

[0005] magnetic steel;

[0006] A coil assembly, comprising a coil unit, a coil support, and a filler, wherein the coil support includes an inner groove, and the coil unit includes coils, all of which are located within the inner groove; and

[0007] A temperature sensor, used to detect the temperature of the coil inside the vacuum motor;

[0008] Multiple temperature sensors are located within the inner groove. The temperature sensors are mounted on or adjacent to the coil. The filler fills the inner groove and wraps the coil. The filler, the coil, and the temperature sensors are sealed within the inner groove.

[0009] The magnet is mounted on one side of the coil support in the height direction. The magnet is opposite to and spaced apart from the coil support, and the magnet is movable relative to the coil support.

[0010] In existing vacuum motor assemblies, the coil is mounted on a coil support without the use of other coil fixing materials. This results in poor reliability of the connection between the coil and the coil support during operation. While the coil support contains channels for gas flow, allowing the airflow to directly cool the coil and reduce thermal resistance along the heat dissipation path, the coil is not sealed, which can lead to poor vacuum performance in a vacuum environment.

[0011] In this embodiment, the coil can be fixedly connected to the coil support by the filler, as long as the working stability of the coil assembly is satisfied. Moreover, the vacuum motor uses a coil support to seal the coil and filler within the inner groove of the coil support, so that the coil and filler are completely isolated from the outside of the vacuum motor, ensuring the vacuum performance of the vacuum motor in a high vacuum environment.

[0012] In one embodiment, the number of coils is two, and the two coils are arranged opposite to each other. The coil support also includes two positioning bosses, which are arranged opposite to each other and protrude from the bottom wall of the inner groove. The two positioning bosses are located on two opposite sides of the bottom wall of the inner groove. Each coil is sleeved on the outer periphery of one of the positioning bosses and connected to the outer periphery of the positioning boss.

[0013] In this embodiment, the coil support also includes a positioning boss. The coil can be initially fixed to the coil support by the positioning boss. The coil can also be wrapped with filler and filled into the remaining sealed inner groove to further fix the coil to the coil support, thereby improving the connection reliability between the coil and the coil support and ensuring the stability of the coil assembly.

[0014] In one embodiment, the vacuum motor is a flat vacuum motor; the coil support includes a support body and two sealing plates, the support body has two inner grooves, the two inner grooves are arranged opposite each other along the thickness direction of the support body, the openings of the two inner grooves are arranged opposite each other, and the two positioning bosses are respectively protruding from the bottom wall of the two inner grooves.

[0015] The number of fillers is two, and the two fillers are respectively located in the two inner grooves. The two sealing plates are respectively sealed and connected to the openings of the two inner grooves, and the two sealing plates are respectively connected to the two fillers located in the two inner grooves.

[0016] In this embodiment, the vacuum motor is a flat-plate type. The coil support has two inner grooves, each containing a positioning boss. Two coils are located within the two inner grooves and are fitted around the outer periphery of the positioning bosses within those grooves. Two fillers are also located within the two inner grooves, enclosing the coils within those grooves. This embodiment uses two sealing plates to seal the openings of the two inner grooves, respectively, to seal the two coils and two fillers within the two inner grooves, ensuring the vacuum performance of the vacuum motor in a vacuum environment. In some embodiments, the coil unit may include only one coil, or it may include more than two coils.

[0017] In one embodiment, the magnet includes a receiving groove, the receiving groove includes a bottom wall and two side walls, the two side walls are respectively connected to opposite sides of the bottom wall and are arranged at an angle to the bottom wall, the two side walls form the receiving groove opening, and the bottom wall is opposite to the receiving groove opening;

[0018] The support body includes a base plate and a surrounding plate. The surrounding plate surrounds and is connected to the edge of the base plate. The surrounding plate protrudes from both sides of the base plate in the thickness direction. The base plate and the surrounding plate form two inner grooves. Along the thickness direction of the support body, the two ends of the surrounding plate facing away from the base plate form the openings of the two inner grooves. The positioning boss and the surrounding plate are spaced apart.

[0019] The two sealing plates are connected to the two ends of the enclosure facing away from the bottom plate; the receiving slot of the magnet faces the coil support, and along the height direction of the vacuum motor, the bottom wall of the magnet's slot is opposite to and spaced apart from one side of the enclosure along the height direction. Along the width direction of the vacuum motor, the two side walls of the magnet's slot are respectively spaced apart from the two sealing plates.

[0020] In this embodiment, unlike the existing cylindrical vacuum motor, the vacuum motor is a flat vacuum motor, and the coil support and magnet are both rectangular structures.

[0021] In one embodiment, the vacuum motor is a cylindrical vacuum motor; the coil support includes a support body and a sealing plate, the support body has an inner groove, the inner groove is recessed on the peripheral side of the support body and extends along the circumferential direction of the support body, and the two positioning bosses are both protruding from the bottom wall of the inner groove, and the two positioning bosses are arranged symmetrically back to back.

[0022] The filler is filled into the inner groove, and the sealing plate surrounds and seals the opening of the inner groove to seal the filler, the two coils and the temperature sensor;

[0023] The magnet is capable of moving relative to the coil support along the height direction of the vacuum motor.

[0024] In this embodiment, the vacuum motor is a cylindrical vacuum motor. The coil support has one inner groove, and two positioning bosses can be provided within this groove, meaning the vacuum motor can include two coils. Both coils are located within the inner groove, and each coil is fitted around the outer periphery of one positioning boss. One filler is used to enclose both coils within the inner groove. This embodiment uses a cylindrical sealing plate to seal the opening of the inner groove, thus sealing both coils and the filler within the groove and ensuring the vacuum performance of the vacuum motor in a vacuum environment. In some embodiments, the number of positioning bosses is not limited to two; it can also be three, four, five, etc., and can be customized according to the number of coils required by the vacuum motor.

[0025] In one embodiment, the coil assembly further includes two auxiliary positioning bosses, and the coil unit further includes two coils respectively fitted onto the two auxiliary positioning bosses. The two auxiliary positioning bosses are both protruding from the bottom wall of the inner groove and located between the two positioning bosses.

[0026] In this embodiment, two auxiliary positioning bosses may also be provided in the inner groove, the shape and size of which may be consistent with the shape and size of the positioning bosses. The two auxiliary positioning bosses are also used to initially fix the coil to the coil support. The two auxiliary positioning bosses are located between the two positioning bosses, and the spacing between one auxiliary positioning boss and its adjacent positioning boss is sufficient for the assembly of the two coils mounted thereon. In some embodiments, the number of auxiliary positioning bosses may not be limited to two, but may also be three, four, five, etc., which can be customized according to the number of coils required by the vacuum motor.

[0027] In one embodiment, the magnet includes a receiving groove, the receiving groove includes a bottom wall and a peripheral wall, the peripheral wall surrounds and is connected to the bottom wall and is set at an angle to the bottom wall, the peripheral wall forms the receiving groove opening, and the bottom wall is opposite to the receiving groove opening;

[0028] The bracket body includes a base plate, a first sub-plate, and a second sub-plate. The first sub-plate and the second sub-plate are respectively connected to both ends of the base plate in the height direction. The first sub-plate and the second sub-plate protrude from the periphery of the base plate and form the inner groove with the base plate. The edge of the first sub-plate and the edge of the second sub-plate form the opening of the inner groove. The positioning boss and the auxiliary positioning boss are both spaced apart from the first sub-plate and the second sub-plate.

[0029] The sealing plate surrounds and connects the periphery of the first sub-plate and the second sub-plate. The receiving slot of the magnet faces the coil support. Along the height direction of the vacuum motor, the bottom wall of the magnet slot is opposite to and spaced from the first sub-plate. Along the width direction of the vacuum motor, the peripheral wall of the magnet slot is opposite to and spaced from the sealing plate.

[0030] In this embodiment, unlike the existing flat vacuum motor, the vacuum motor is a cylindrical vacuum motor, the coil support is a cylindrical structure, and the magnet is a cylindrical structure.

[0031] In one embodiment, the coil assembly further includes a feedthrough, which is connected to the coil support and communicates with the inner groove. The feedthrough extends out of the coil support, and the cables of the coil and the temperature sensor in the coil assembly are both led out from the feedthrough.

[0032] In this embodiment, the cables of the coil and temperature sensor located in the inner groove are led out from the sealed inner groove through a feedthrough and connected to the external electronic components of the vacuum motor, realizing the opening and closing of the temperature sensor, and simultaneously realizing the energization and de-energization of the coil. Moreover, the connection between the feedthrough and the coil support is sealed, ensuring the vacuum applicability of the vacuum motor.

[0033] In one embodiment, the coil assembly further includes a heat-conducting element located between the coil and the sealing plate, and connected to the filler.

[0034] In this embodiment, a heat-conducting component is disposed between the sealing plate and the coil. The heat-conducting component is made of a material with a high thermal conductivity, which can conduct the heat of the coil to the sealing plate, thereby further enhancing the conduction of the heat of the coil to the coil support and promoting the heat dissipation of the coil.

[0035] In one embodiment, the material of the thermally conductive element is thermally conductive adhesive or indium sheet.

[0036] In one embodiment, the filler is made of epoxy resin.

[0037] In this embodiment, the filler encloses the coil and is disposed within the inner groove. The filler is made of a material with a high thermal conductivity, which can conduct the heat of the coil to the coil support, thereby enhancing the heat conduction of the coil towards the coil support, shortening the time required for temperature regulation of the vacuum motor, and promoting the heat conduction of the vacuum motor.

[0038] In one embodiment, the coil support is made of beryllium copper or aluminum alloy.

[0039] In this embodiment, the coil support is made of a material with a high thermal conductivity, which is beneficial for the heat conduction of the coil support, shortens the time required for temperature adjustment of the vacuum motor, and promotes the heat conduction of the vacuum motor.

[0040] Secondly, embodiments of this application provide a motor assembly, which includes a thermoelectric cooler, a heat sink structure, a control system, and the vacuum motor. Along the height direction of the motor assembly, the vacuum motor, the thermoelectric cooler, and the heat sink structure are stacked and connected. The side of the coil support facing away from the magnet in the height direction is fixedly connected to the thermoelectric cooler by welding, or formed into an integral structure by integral molding. The thermoelectric cooler and the heat sink structure are fixedly connected by welding, or formed into an integral structure by integral molding.

[0041] The control system acquires and identifies the temperature signal emitted by the temperature sensor of the vacuum motor, and controls the current of the thermoelectric cooler to adjust the temperature of the vacuum motor through the thermoelectric cooler and the heat sink structure.

[0042] Existing motor assemblies typically consist of a vacuum motor, a thermal conductivity controller (TEC), and a heat sink. In these separate, integrated units, the heat from the coils in the vacuum motor is conducted to the TEC via the coil support. The TEC then transfers its own heat, along with the heat from the coils it detects, to the heat sink, where cooling materials remove the heat and achieve temperature control. However, the connecting layers or gaps between these components increase the thermal resistance along the heat conduction path.

[0043] In this embodiment, the coil support, thermoelectric cooler, and heat sink structure of the vacuum motor are fixedly connected by welding or formed into a single integrated structure. Compared with existing technologies, this reduces the thermal resistance at the contact point between the coil unit and the heat sink structure on the heat conduction path, thereby reducing heat loss on the heat dissipation path and enabling precise temperature regulation of the vacuum motor. Simultaneously, the reduced thermal resistance shortens the time required for temperature regulation of the vacuum motor, especially in high-precision, high-vacuum applications (generally referring to a vacuum level less than 10⁻⁵). -3 In an environment of Pa, the temperature accuracy of the vacuum motor is improved, and the thermal conductivity of the motor assembly is also enhanced. Furthermore, the sealing bracket and the filler used to fix the coil unit are both made of materials with high thermal conductivity, further increasing the thermal conductivity of the vacuum motor.

[0044] In one embodiment, the thermoelectric cooler includes a first substrate, a second substrate, and a plurality of heat conductors. The first substrate and the second substrate are stacked along the thickness direction of the thermoelectric cooler. The plurality of heat conductors are located between the first substrate and the second substrate and are connected to the first substrate and the second substrate. The plurality of heat conductors are spaced apart from each other and have gaps.

[0045] The first substrate and the coil support are fixedly connected by welding or by integral molding to form an integral structure. The second substrate and the heat sink structure are fixedly connected by welding or by integral molding to form an integral structure.

[0046] In one embodiment, the plurality of heat conductors are connected to the first substrate and the second substrate by welding, or the plurality of heat conductors are connected to the first substrate and the second substrate by adhesive bonding;

[0047] When the plurality of heat conductors are bonded to the first substrate and the second substrate by adhesive, the gaps between the plurality of heat conductors are filled with sealant, and a sealing plate is used to surround and seal the edges of the connection to the first substrate and the second substrate, so as to seal the plurality of heat conductors and the sealant.

[0048] In this embodiment, there are two ways to connect the heat conductors in the thermoelectric cooler to the first and second substrates. When it is necessary to increase the structural strength of the thermoelectric cooler, sealant can be filled into the gaps between the multiple heat conductors, and a sealing plate can be used to surround the edges of the first and second substrates. The sealing plate is sealed to the first and second substrates, thus sealing the multiple heat conductors and the sealant, ensuring the good applicability of the thermoelectric cooler in a high vacuum environment, thereby ensuring the vacuum applicability of the motor assembly. At the same time, the cables of the thermoelectric cooler are led out from the sealed thermoelectric cooler through a vacuum feedthrough, which also meets the requirements for the thermoelectric cooler to be used in a high vacuum environment.

[0049] In one embodiment, there are multiple vacuum motors and thermoelectric coolers, with each vacuum motor corresponding to one thermoelectric cooler, and each vacuum motor connected to one thermoelectric cooler.

[0050] The control system acquires and identifies the temperature signals from the temperature sensors within each of the vacuum motors, and controls the current of the thermoelectric coolers connected to each of the vacuum motors, so that the temperature of each vacuum motor can be adjusted independently or simultaneously.

[0051] In existing technologies, when multiple vacuum motors requiring heat dissipation share a single cooling system, inconsistencies in flow channel dimensions may arise due to manufacturing deviations between the different motors. This leads to inconsistent flow resistance and consequently, inconsistent airflow distribution among the motors, resulting in inconsistent thermal conductivity. This issue is particularly problematic in high-precision, high-vacuum applications (generally referring to vacuum levels less than 10⁻⁵). -3 In an environment where each vacuum motor generates the same amount of heat while working together, the temperature of each vacuum motor is inconsistent and difficult to control precisely.

[0052] In this embodiment, a temperature sensor monitors the temperature of the vacuum motor and the difference between the vacuum motor's temperature and the target temperature, and feeds this information back to the control system. If the vacuum motor's temperature does not reach the target temperature, the control system controls the energization of the thermoelectric cooler connected to the vacuum motor, increasing or decreasing the current of the thermoelectric cooler. This regulates the vacuum motor's temperature through the thermoelectric cooler and heat sink structure, achieving active temperature control of the vacuum motor in the motor assembly. Furthermore, in a motor assembly where multiple vacuum motors share a single cooling system, the control system can not only control the temperature of each vacuum motor simultaneously but also independently, ensuring independent temperature adjustment of the multiple vacuum motors in the motor assembly.

[0053] Furthermore, the vacuum motor, thermoelectric cooler, and heat sink structure are fixedly connected by welding or formed into an integrated structure through integral molding, which reduces the contact thermal resistance between the coil and the heat sink structure in the heat conduction path. At the same time, the coil support and filler are made of materials with high thermal conductivity, which reduces the heat loss in the heat conduction path, thereby enabling precise temperature regulation of the vacuum motor in the motor assembly.

[0054] In one embodiment, the temperature signal includes a first temperature signal and a second temperature signal;

[0055] When the temperature of the vacuum motor is greater than the target temperature, the control system acquires and identifies the first temperature signal, and increases the current of the thermoelectric cooler connected to the vacuum motor, so that the temperature of the vacuum motor is reduced to the target temperature;

[0056] When the temperature of the vacuum motor is lower than the target temperature, the control system acquires and identifies the second temperature signal, and reduces the current of the thermoelectric cooler connected to the vacuum motor, so that the temperature of the vacuum motor increases to the target temperature.

[0057] In this embodiment, the control system acquires and identifies the first and second temperature signals to control the current magnitude within the thermoelectric cooler. When the current within the thermoelectric cooler increases, the Peltier effect of the thermoelectric cooler strengthens, increasing the temperature gradient between the cold and hot sides of the cooler. This enhances the cooling effect of the thermoelectric cooler on the vacuum motor, causing the vacuum motor temperature to decrease until it reaches the target temperature. Conversely, when the current within the thermoelectric cooler decreases, the Peltier effect weakens, reducing the temperature gradient between the cold and hot sides. This weakens the cooling effect of the thermoelectric cooler on the vacuum motor, causing the vacuum motor temperature to rise until it reaches the target temperature.

[0058] Thirdly, embodiments of this application provide an electrical device. The electrical device includes a device body and the aforementioned motor assembly, the motor assembly being used to drive the electrical device.

[0059] In this embodiment, the electrical equipment uses the aforementioned motor assembly, which enables active and precise temperature control of each vacuum motor within the motor assembly. At the same time, the motor assembly has good vacuum adaptability, allowing the electrical equipment to operate in a high-precision, high-vacuum environment. Attached Figure Description

[0060] To more clearly illustrate the technical solution of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0061] Figure 1 A partial structural schematic diagram of a first embodiment of the motor assembly provided in this application;

[0062] Figure 2 for Figure 1 The diagram shows an exploded view of the motor assembly.

[0063] Figure 3 for Figure 2 An exploded view of a portion of the coil assembly of the motor assembly shown.

[0064] Figure 4 for Figure 3 The diagram shows a partial exploded view of the coil assembly from another angle.

[0065] Figure 5 for Figure 2 The diagram shows the structure of the thermoelectric cooler in the motor assembly.

[0066] Figure 6 for Figure 1 The structure of the thermoelectric cooler in the motor assembly shown is after potting and sealing;

[0067] Figure 7 for Figure 1 The flowchart shows the temperature control process for each vacuum motor in the motor assembly shown.

[0068] Figure 8 A schematic diagram of a second embodiment of the motor assembly provided in this application;

[0069] Figure 9 for Figure 8 The diagram shows an exploded view of the motor assembly.

[0070] Figure 10 for Figure 9 An exploded view of a portion of the coil assembly of the vacuum motor in the motor assembly shown.

[0071] Figure 11 for Figure 10 A cross-sectional schematic diagram of a portion of the coil support structure in the coil assembly shown.

[0072] The reference numerals in the figures are as follows: Motor assembly 1000, Vacuum motor 100, Coil assembly 10, Coil unit 11, First coil 111, Second coil 112, Coil bracket 12, Feedthrough 13, Bracket body 14, First inner groove 141, Second inner groove 142, Base plate 143, Surrounding plate 144, First bottom surface 143a, Second bottom surface 143b, Positioning boss 145, First positioning boss 145a, Second positioning boss 145b, First sub-plate 144a, First surface a1, First assembly surface a2, Second sub-plate 144b, Second surface b1, Second assembly surface b2, Third sub-plate 144c, First connecting surface 146a, Second connecting surface 146b, Peripheral side surface 146c, First sealing plate 15, First sealing surface 151, First outer surface 152, Second sealing surface 153, First sealing surface 154, Second sealing surface 155, First sealing surface 156, Second ... Sealing plate 16, second sealing surface 161, second outer surface 162, third sealing plate 17, outer side surface 171, inner side surface 172, inner groove 18, outer arc surface 147, inner arc surface 148, auxiliary positioning boss 149, magnet 20, receiving groove 21, groove bottom wall 211, first groove side wall 212, second groove side wall 213, receiving groove opening 214, groove peripheral wall, thermoelectric cooler 200, first substrate 210, first surface 210a, second surface 210b, second substrate 220, third surface 220a, fourth surface 220b, heat conductor 230, cold end 231, hot end 232, gap H, heat sink structure 300, heat dissipation body 310, first heat dissipation surface 311, second heat dissipation surface 312, heat dissipation channel 320, first heat dissipation opening 321, second heat dissipation opening 322. Detailed Implementation

[0073] The specific embodiments of this application will now be described in more detail with reference to the accompanying drawings. Although exemplary embodiments of this application are shown in the drawings, it should be understood that this application may be implemented in other ways different from those described herein, and therefore, this application is not limited to these embodiments.

[0074] For ease of understanding, the terminology used in the embodiments of this application will be explained first.

[0075] Multiple: refers to two or more.

[0076] Connection: should be interpreted broadly. For example, the connection between A and B can be a direct connection between A and B, or an indirect connection between A and B through an intermediary.

[0077] The specific embodiments of this application will now be clearly described in conjunction with the accompanying drawings.

[0078] This application provides an electrical device that can be applied in fields such as scientific research, medical treatment, and high-precision manufacturing, and involves working scenarios in a vacuum environment. The electrical device can be, but is not limited to, a lithography machine, an ion implanter, a vacuum coating equipment, a vacuum centrifuge, a laser cutting machine, a vacuum heat treatment equipment, a vacuum chuck, and a vacuum clamp. In this embodiment, a vacuum coating equipment is used as an example for explanation.

[0079] Electrical equipment includes a motor assembly and the equipment body. The motor assembly is installed inside the equipment body and is used to drive the electrical equipment. When the electrical equipment requires high precision and high vacuum, the motor assembly should take into account its vacuum applicability and working accuracy in a high vacuum environment.

[0080] The following will describe in detail a motor assembly provided in this application embodiment with reference to two embodiments, which can be applied to high vacuum and high precision working environments.

[0081] Please see Figure 1 and Figure 2 , Figure 1 This is a partial structural schematic diagram of a first embodiment of the motor assembly provided in this application. Figure 2 for Figure 1 The diagram shown is an exploded view of the motor assembly. It should be noted that... Figure 1 The thermoelectric cooler shown is a structure after potting and sealing. Figure 2 The thermoelectric cooler shown is an un-glued and unsealed structure.

[0082] This application provides a motor assembly 1000.

[0083] For ease of description below, let's establish... Figure 1 The XYZ coordinate system is shown. The width direction of the motor assembly 1000 is defined as the X-axis (also called the third direction), the length direction of the motor assembly 1000 is defined as the Y-axis (also called the first direction), and the height direction of the motor assembly 1000 is defined as the Z-axis (also called the second direction). The X, Y, and Z axes are mutually perpendicular. It is understood that the coordinate system of the motor assembly 1000 can be flexibly set according to actual needs. This application only provides... Figure 1 The example shown is not intended to constitute a particular limitation on this application.

[0084] The motor assembly 1000 includes a vacuum motor 100, a thermoelectric cooler 200, and a heat sink structure 300. The vacuum motor 100, thermoelectric cooler 200, and heat sink structure 300 are stacked along the height of the motor assembly 1000. The thermoelectric cooler 200 is located between the vacuum motor 100 and the heat sink structure 300, and is connected and fixed to both. The thermoelectric cooler 200 is used to transfer heat from the vacuum motor 100 and its own heat to the heat sink structure 300 to control the temperature of the vacuum motor 100. The heat sink structure 300 is used to conduct heat to the outside of the vacuum motor 100. In this embodiment, the vacuum motor 100 in the motor assembly 1000 is a rectangular flat-plate vacuum motor, and there are multiple of them. The thermoelectric coolers 200 are thermoelectric coolers (TEC). The number of thermoelectric coolers 200 and the number of heat sink structures 300 are the same as the number of vacuum motors 100. Each vacuum motor 100 is adapted to a thermoelectric cooler 200 and a heat sink structure 300, and the three are integrated into a single structure by design or welding. In this embodiment, multiple vacuum motors 100 may be arranged along a third direction. Multiple thermoelectric coolers 200 may be arranged along a third direction. Multiple heat sink structures 300 may be arranged along a third direction. In some embodiments, the multiple vacuum motors 100 may not be limited to being arranged along a third direction, such as being arranged along a first direction, and the multiple thermoelectric coolers 200 and multiple heat sink structures 300 may also not be limited to being arranged along a third direction. This application does not impose any limitations on this.

[0085] The vacuum motor 100 includes a magnet 20 and a coil assembly 10. Along the height direction of the vacuum motor 100, the magnet 20 covers the side of the coil assembly 10 facing away from the thermoelectric cooler 200 and is spaced apart from it. The magnet 20 is movable relative to the coil assembly 10, meaning it moves within the magnetic field generated by the coil assembly 10. For example, the magnet 20 can move relative to the coil assembly 10 along a first direction, a second direction, or a third direction. The coil assembly 10 is connected to the thermoelectric cooler 200. In this embodiment, the coil assembly 10 and the thermoelectric cooler 200 are integrated into a single structure through design or welding. The coil assembly 10 has a rectangular structure.

[0086] The magnet 20 has a receiving groove 21. The receiving groove 21 is used to receive the coil assembly 10. The receiving groove 21 has a bottom wall 211, a first side wall 212, and a second side wall 213. The first side wall 212 and the second side wall 213 are respectively connected to opposite sides of the bottom wall 211 in the width direction and are both set at an angle to the bottom wall 211. The receiving groove 21 also has a receiving opening 214, which is formed by the first side wall 212 and the second side wall 213. Along the height direction of the magnet 20, the receiving opening 214 is opposite to the bottom wall 211. The receiving opening 214 is used for the coil assembly 10 to pass through. In this embodiment, the magnet 20 is generally a U-shaped magnet.

[0087] The vacuum motor 100 also includes multiple temperature sensors (not shown). These temperature sensors are located inside the coil assembly 10. Cables for the temperature sensors are led out from the inside of the coil assembly 10 via a feedthrough 13. The temperature sensors are used to detect the temperature of the vacuum motor 100 and include temperature signals. These temperature signals include a first temperature signal and a second temperature signal. The first and second temperature signals can be identifiable analog or digital signals representing temperature. The first temperature signal is used to lower the temperature of the vacuum motor 100, and the second temperature signal is used to raise the temperature of the vacuum motor 100. One temperature sensor is associated with a coil in the coil assembly 10. This association can be understood as the temperature sensor being adjacent to the coil or directly mounted on the coil.

[0088] In a motor assembly 1000 composed of multiple vacuum motors 100, the motor assembly 1000 also includes a control system (not shown). The control system acquires and identifies the temperature signals from the temperature sensors of each vacuum motor 100. Then, based on the temperature signals, the control system uses PID control to adjust the current of the thermoelectric cooler 200 connected to each vacuum motor 100, achieving active, independent, and precise temperature regulation. Specifically, if the control system acquires and identifies a first temperature signal from the temperature sensor, the control system is configured to increase the current of the thermoelectric cooler 200 connected to the vacuum motor 100. If the control system acquires and identifies a second temperature signal from the temperature sensor, the control system is configured to decrease the current of the thermoelectric cooler 200 connected to the vacuum motor 100.

[0089] Please refer to the following: Figure 2 , Figure 3 and Figure 4 , Figure 3 for Figure 2 The diagram shown is an exploded view of a portion of the coil assembly of the motor assembly. Figure 4 for Figure 3 The diagram shows a partial exploded view of the coil assembly from another angle.

[0090] The coil assembly 10 includes a coil unit 11, a coil support 12, a feedthrough 13, and a filler (not shown). The coil support 12 has a sealed receiving cavity in which the coil unit 11 is received. The coil unit 11 is fixedly connected to the coil support 12. The filler surrounds the coil unit 11 and fills the remaining receiving cavity within the coil support 12 to further limit and fix the coil unit 11. The feedthrough 13 is mounted on one side of the coil support 12 along its length (i.e., the length of the motor assembly 1000), with one end of the feedthrough 13 located inside the receiving cavity and the other end located outside the coil support 12. The feedthrough 13 communicates with both the receiving cavity and the outside of the coil support 12. The feedthrough 13 is used to lead the cables of the coil unit 11 and the temperature sensor out from the receiving cavity.

[0091] like Figure 3 and Figure 4 As shown, in this embodiment, the coil support 12 includes a first receiving cavity and a second receiving cavity. The first receiving cavity and the second receiving cavity are spaced apart along the thickness direction of the coil support 12. In this embodiment, the coil support 12 is generally a rectangular shell. The coil support 12 is made of a material with high strength and high thermal conductivity, such as beryllium copper or aluminum alloy, to meet the structural strength of the coil assembly 10 and the strong thermal conductivity of the coil support 12.

[0092] The coil support 12 includes a support body 14, a first sealing plate 15, and a second sealing plate 16. The support body 14 has a first inner groove 141 and a second inner groove 142. The first inner groove 141 and the second inner groove 142 are spaced apart along the thickness direction of the support body 14. The openings of the first inner groove 141 and the second inner groove 142 are opposite to each other along the thickness direction of the support body 14. The first sealing plate 15 seals the opening of the first inner groove 141 and forms a sealed first receiving cavity with the support body 14. The second sealing plate 16 seals the opening of the second inner groove 142 and forms a sealed second receiving cavity with the support body 14. In this embodiment, the support body 14 has a rectangular structure. Both the first sealing plate 15 and the second sealing plate 16 are rectangular plates.

[0093] The first sealing plate 15 includes a first sealing surface 151 and a first outer surface 152. The first outer surface 152 and the first sealing surface 151 are disposed opposite to each other along the thickness direction of the first sealing plate 15. The second sealing plate 16 includes a second sealing surface 161 and a second outer surface 162. The second outer surface 162 and the second sealing surface 161 are disposed opposite to each other along the thickness direction of the second sealing plate 16. The first outer surface 152 of the first sealing plate 15 and the second outer surface 162 of the second sealing plate 16 constitute a portion of the outer surface of the coil support 12.

[0094] The support body 14 includes a base plate 143 and a surrounding plate 144. The surrounding plate 144 surrounds and is connected to the edge of the base plate 143. In this embodiment, the surrounding plate 144 and the base plate 143 form a first inner groove 141 and a second inner groove 142 of the support body 14. It can be understood that along the thickness direction of the support body 14 (i.e., the width direction of the motor assembly 1000), the surrounding plate 144 protrudes from opposite sides of the base plate 143 in the thickness direction. The surrounding plate 144 forms the opening of the first inner groove 141 and the opening of the second inner groove 142. The surrounding plate 144 constitutes the sidewall of the first inner groove 141 and the sidewall of the second inner groove 142, and the base plate 143 constitutes the bottom wall of the first inner groove 141 and the bottom wall of the second inner groove 142. In this embodiment, the base plate 143 is a rectangular plate, and the surrounding plate 144 forms a rectangular frame.

[0095] The base plate 143 includes a first bottom surface 143a and a second bottom surface 143b, which are arranged opposite to each other along the thickness direction of the base plate 143. The first bottom surface 143a forms the surface of the bottom wall of the first inner groove 141, and the second bottom surface 143b forms the surface of the bottom wall of the second inner groove 142.

[0096] The base plate 143 also includes a first positioning boss 145a and a second positioning boss 145b. The first positioning boss 145a protrudes from the first bottom surface 143a of the base plate 143 and is spaced apart from the surrounding plate 144. The second positioning boss 145b protrudes from the second bottom surface 143b of the base plate 143 and is spaced apart from the surrounding plate 144. It is understood that the first positioning boss 145a is located within the first inner groove 141 and protrudes from the bottom wall of the first inner groove 141. The second positioning boss 145b is located within the second inner groove 142 and protrudes from the bottom wall of the second inner groove 142. In this embodiment, both the first positioning boss 145a and the second positioning boss 145b are used to limit and fix the coil unit 11. The shapes of the first positioning boss 145a and the second positioning boss 145b can be the same or different, such as, but not limited to, elliptical, circular, rectangular, capsule-shaped, etc. For example, as shown... Figure 3 and Figure 4 As shown, the first positioning boss 145a and the second positioning boss 145b have the same shape and are both capsule-shaped.

[0097] The enclosure 144 includes a first sub-plate 144a, a second sub-plate 144b, and two third sub-plates 144c. The second sub-plate 144b and the first sub-plate 144a are positioned opposite each other along the height direction of the bracket body 14 (i.e., the height direction of the motor assembly 1000). The two third sub-plates 144c are positioned opposite each other along the width direction of the bracket body 14 (i.e., the length direction of the motor assembly 1000). The two third sub-plates 144c are connected to the second sub-plate 144b and the first sub-plate 144a. The second sub-plate 144b is used for connection with the thermoelectric cooler 200. One of the third sub-plates 144c has a mounting hole (not shown). The mounting hole extends through both surfaces of the third sub-plate 144c in the thickness direction. The mounting hole communicates with the first inner groove 141 and the second inner groove 142 of the bracket body 14. The mounting hole is used for assembling the feeder 13. The shape of the mounting hole matches the shape of the feeder 13.

[0098] It should be noted that, for the sake of describing the structure of the support body 14, the support body 14 is divided into a base plate 143 and a surrounding plate 144, and the surrounding plate 144 is further divided into two third sub-plates 144c, second sub-plate 144b and first sub-plate 144a. This does not mean that the support body 14 is formed by connecting the base plate 143 and the surrounding plate 144. It can also be formed by slotting the plate, etc.

[0099] In this embodiment, the coil unit 11 includes a first coil 111 and a second coil 112. The first coil 111 and the second coil 112 are located on opposite sides of the base plate 143 in the thickness direction. The first coil 111 is located in the first receiving cavity of the coil bracket 12 and is fitted around the outer periphery of the first positioning boss 145a for fixed connection to the bracket body 14. The second coil 112 is located in the second receiving cavity of the coil bracket 12 and is fitted around the outer periphery of the second positioning boss 145b for fixed connection to the bracket body 14. The first coil 111 and the second coil 112 are wound and assembled using a mold or tooling. The shape of the first coil 111 matches the shape of the first positioning boss 145a, and the shape of the second coil 112 matches the shape of the second positioning boss 145b. For example, the shapes of the first coil 111 and the second coil 112 are approximately racetrack-shaped.

[0100] In some embodiments, the number of coil units 11 may be one, or three, four, five, etc., that is, in addition to including the first coil 111 and the second coil 112, the coil unit 11 may also include a single coil, or it may include a third coil, a fourth coil, a fifth coil, etc. When the coil unit 11 includes a single coil, the coil support 12 includes a receiving cavity in which the coil is received. This application does not limit the position of two or more coils, as long as the normal operation requirements of the vacuum motor 100 are met.

[0101] The feedthrough 13 is fixedly connected to the bracket body 14 through the mounting hole of the third sub-plate 144c. The feedthrough 13 communicates with the first and second receiving cavities and is used to lead the cable of the first coil 111 out of the sealed first receiving cavity and to lead the cable of the second coil 112 out of the sealed second receiving cavity. In this embodiment, the feedthrough 13 is suitable for a vacuum environment and is insulated from the coil bracket 12. The feedthrough 13 is generally cylindrical.

[0102] The filling body includes a first filling body (not shown) and a second filling body (not shown). The first filling body is used to further limit and fix the first coil 111 to the coil support 12. The second filling body is used to further limit and fix the second coil 112 to the coil support 12. In this embodiment, the shape of the first filling body matches the shape of the first receiving cavity. The shape of the second filling body matches the shape of the second receiving cavity. The first and second filling bodies are made of materials with high thermal conductivity, such as epoxy resin.

[0103] like Figure 3 and Figure 4 As shown, the first coil 111 and the second coil 112 are mounted on the bracket body 14. Specifically, the first coil 111 is mounted in the first inner groove 141 of the bracket body 14, and the first coil 111 surrounds and connects to the outer periphery of the first positioning boss 145a to achieve initial positioning and fixation of the first coil 111 and the bracket body 14. The second coil 112 is mounted in the second inner groove 142 of the bracket body 14, and the second coil 112 surrounds and connects to the outer periphery of the second positioning boss 145b to achieve initial positioning and fixation of the second coil 112 and the bracket body 14.

[0104] In this embodiment, there are two temperature sensors. One temperature sensor is installed in the first inner groove 141 of the bracket body 14, and this temperature sensor is associated with the first coil 111, that is, the temperature sensor is installed on or adjacent to the first coil 111. The other temperature sensor is installed in the second inner groove 142, and this temperature sensor is associated with the second coil 112, that is, the temperature sensor is installed on or adjacent to the second coil 112.

[0105] Feedthrough 13 is mounted on the bracket body 14. Specifically, feedthrough 13 is installed in the mounting hole of the third sub-board 144c to be fixedly connected to the bracket body 14. Feedthrough 13 connects the first inner groove 141 and the second inner groove 142 of the bracket body 14. The cable of the first coil 111 is led out from the first inner groove 141 through feedthrough 13 and electrically connected to other electronic devices outside the coil assembly 10 to realize the energization or de-energization of the first coil 111. The cable of the second coil 112 is led out from the second inner groove 142 through feedthrough 13 and electrically connected to other electronic devices outside the coil assembly 10 to realize the energization or de-energization of the second coil 112. The cables of the two temperature sensors are led out from the first inner groove 141 or the second inner groove 142 respectively through feedthrough 13 to realize the opening or closing of the temperature sensors. It should be noted that the connection between the feedthrough component 13 and the mounting hole of the third sub-plate 144c is sealed to further ensure that the vacuum motor 100 can be used in a high vacuum working environment, thereby ensuring the vacuum applicability of the vacuum motor 100.

[0106] The first and second fillers are filled into the support body 14. Specifically, the first filler is filled into the first inner groove 141 and surrounds the outside of the first coil 111 (the first coil 111 protrudes from the surface of the first inner groove 141), further limiting and fixing the first coil 111 to the support body 14, thereby improving the structural reliability of the coil assembly 10. The first sealing plate 15 is installed in the groove of the first inner groove 141. The first sealing surface 151 of the first sealing plate 15 faces the first filler and the first coil 111 and is connected to the first filler. The first sealing plate 15 is connected to the surrounding plate 144 at the groove of the first inner groove 141 by means not limited to welding or adhesive, so that the first sealing plate 15 and the support body 14 form a first receiving cavity, thereby completely isolating the first coil 111 and the first filler from the outside of the vacuum motor 100, ensuring the vacuum applicability of the vacuum motor 100.

[0107] The second filler is filled into the second inner groove 142 and surrounds the outer side of the second coil 112 (the second coil 112 protrudes from the surface of the second inner groove 142), further limiting and fixing the first coil 111 to the bracket body 14, thereby improving the structural reliability of the coil assembly 10. The second sealing plate 16 is installed in the groove of the second inner groove 142. The second sealing surface 161 of the second sealing plate 16 faces the second filler and the second coil 112 and is connected to the second filler. The second sealing plate 16 is connected to the surrounding plate 144 at the groove of the second inner groove 142 by means not limited to welding or adhesive, so that the second sealing plate 16 and the bracket body 14 form a second sealing cavity, thereby completely isolating the second coil 112 and the second filler from the outside of the vacuum motor 100, ensuring the vacuum applicability of the vacuum motor 100.

[0108] In this embodiment, both the first filler and the second filler are made of epoxy resin, both of which have a large thermal conductivity, which can improve the ability of the heat from the first coil 111 and the second coil 112 to be conducted to the coil support 12, and shorten the time required for temperature adjustment of the vacuum motor 100.

[0109] In some embodiments, the coil assembly 10 may further include a first thermally conductive element and / or a second thermally conductive element. Along the thickness direction of the coil assembly 10, the first thermally conductive element is located between the first coil 111 and the first sealing plate 15, and is connected to the first sealing plate 15 and the first filler. The first thermally conductive element is used to conduct the heat generated by the first coil 111 to the first sealing plate 15, thereby further enhancing the conduction of heat from the first coil 111 towards the coil support 12 and promoting heat dissipation from the first coil 111. The first thermally conductive element may be, but is not limited to, thermally conductive adhesive, indium foil, etc.

[0110] Along the thickness direction of the coil assembly 10, a second heat-conducting element is located between the second coil 112 and the second sealing plate 16, and is connected to the second sealing plate 16 and the second filler. The second heat-conducting element conducts heat generated by the second coil 112 to the second sealing plate 16, further enhancing the conduction of heat from the second coil 112 towards the coil support 12 and promoting heat dissipation from the second coil 112. The second heat-conducting element can be, but is not limited to, thermally conductive adhesive, indium foil, etc.

[0111] It should be noted that, on the basis of ensuring the structural reliability of the coil assembly 10, the first heat-conducting component and / or the second heat-conducting component should be made of materials with relatively high thermal conductivity as much as possible, so as to further enhance the conduction of heat from the first coil 111 and / or the second coil 112 to the coil support 12, shorten the time required for temperature adjustment of the vacuum motor 100, and promote the heat conduction of the vacuum motor 100.

[0112] Please see Figure 5 , Figure 5 for Figure 2 The diagram shows the structure of the thermoelectric cooler in the motor assembly. It should be noted that... Figure 5 The thermoelectric cooler shown is a structure that has not been potted or sealed.

[0113] The thermoelectric cooler 200 includes a first substrate 210, a second substrate 220, and a plurality of heat conductors 230. The first substrate 210 and the second substrate 220 are stacked along the thickness direction of the thermoelectric cooler 200. The plurality of heat conductors 230 are arranged in a matrix between the first substrate 210 and the second substrate 220, and are connected to both substrates 210 and 220. The plurality of heat conductors 230 are spaced apart from each other and have gaps H. The first substrate 210 is used to connect to the coil support 12 of the coil assembly 10 and to receive heat from the coil assembly 10. The heat conductors 230 are used to conduct the heat received by the first substrate 210 to the second substrate 220. The second substrate 220 is used to connect to the heat sink structure 300 and conduct the received heat to the heat sink structure 300. In this embodiment, both the first substrate 210 and the second substrate 220 are rectangular plates. The plurality of heat conductors 230 are cuboids. Multiple heat conductors 230 can be connected to the first substrate 210 and the second substrate 220 by adhesive bonding.

[0114] The first substrate 210 includes a first surface 210a and a second surface 210b. The first surface 210a and the second surface 210b are disposed opposite to each other along the thickness direction of the first substrate 210. In this embodiment, the first substrate 210 is a ceramic substrate.

[0115] The second substrate 220 includes a third surface 220a and a fourth surface 220b. The third surface 220a and the fourth surface 220b are disposed opposite to each other along the thickness direction of the second substrate 220. In this embodiment, the second substrate 220 is a ceramic substrate.

[0116] Multiple heat conductors 230 are connected to the second surface 210b of the first substrate 210 and the third surface 220a of the second substrate 220. The multiple heat conductors 230 include multiple N-type semiconductor elements and multiple P-type semiconductor elements. Both the N-type and P-type semiconductor elements are located between the first substrate 210 and the second substrate 220, and are connected to the second surface 210b of the first substrate 210 and the third surface 220a of the second substrate 220. The multiple N-type and P-type semiconductor elements are spaced apart from each other. Each N-type semiconductor element and an adjacent P-type semiconductor element form a PN junction, i.e., a thermocouple pair.

[0117] Based on the Peltier effect, when the thermoelectric cooler 200 is energized, the current flows through the PN junction. One end of the PN junction in the height direction absorbs heat and serves as the cold end 231. The other end of the PN junction in the height direction releases heat and serves as the hot end 232, thereby achieving cooling or heating of the thermoelectric cooler 200. The Peltier effect refers to the phenomenon of heat absorption or release at the junction when current flows through a circuit composed of two different semiconductors. In this embodiment, the end of the PN junction connected to the first substrate 210 is the cold end 231, used to absorb heat from the first substrate 210, which constitutes the cold side of the thermoelectric cooler 200. The end of the PN junction connected to the second substrate 220 is the hot end 232, used to conduct the absorbed heat and its own heat to the second substrate 220, which constitutes the hot side of the thermoelectric cooler 200.

[0118] Please refer to it again. Figure 2 .

[0119] The heat sink structure 300 includes a heat sink body 310 and a heat dissipation channel 320. In this embodiment, the heat sink body 310 is a rectangular tubular structure. The heat sink body 310 forms the heat dissipation channel 320 and a first heat dissipation port 321 and a second heat dissipation port 322 communicating with the heat dissipation channel 320. The heat dissipation channel 320 extends along the length direction of the heat sink body 310. The first heat dissipation port 321 and the second heat dissipation port 322 are located at opposite ends of the length direction of the heat dissipation channel 320. The heat dissipation channel 320 is used for the passage of a heat dissipation medium, such as coolant, water, or air. Both the first heat dissipation port 321 and the second heat dissipation port 322 are connected to the outside of the motor assembly 1000. For example, when the heat dissipation medium is coolant or water, the first heat dissipation port 321 and the second heat dissipation port 322 are connected to pipes outside the motor assembly 1000, and the heat dissipation medium can enter and exit the first heat dissipation port 321 or the second heat dissipation port 322 through the pipes outside the motor assembly 1000. It is understood that the heat dissipation medium can enter the heat dissipation channel 320 from the first heat dissipation port 321, exchange heat with the heat dissipation body 310, and then exit from the second heat dissipation port 322. In some embodiments, the heat dissipation medium can also enter the heat dissipation channel 320 from the second heat dissipation port 322, exchange heat with the heat dissipation body 310, and then exit from the first heat dissipation port 321. This application embodiment does not limit this.

[0120] The heat sink 310 includes a first heat sink surface 311 and a second heat sink surface 312, which are disposed opposite to each other along the thickness direction of the heat sink 310. The first heat sink surface 311 is used to contact the second substrate 220 of the thermoelectric cooler 200 for heat conduction. The second heat sink surface 312 faces the heat dissipation channel 320 and forms the channel surface of the heat dissipation channel 320. The second heat sink surface 312 is used to contact the heat dissipation medium for heat exchange.

[0121] Please refer to the following: Figure 1 , Figure 2 and Figure 6 , Figure 6 for Figure 1 The structure of the thermoelectric cooler in the motor assembly shown is after potting and sealing.

[0122] like Figure 2 and Figure 6 As shown, the coil assembly 10, heat sink structure 300, and un-applied and unsealed thermoelectric cooler 200 are assembled together. The coil support 12, thermoelectric cooler 200, and heat sink structure 300 of the coil assembly 10 are fixedly connected by welding or formed into a single structure by integral molding. Specifically, the first sub-plate 144a of the coil support 12 is away from the thermoelectric cooler 200, and the second sub-plate 144b of the coil support 12 is connected to the first surface 210a of the first substrate 210 of the thermoelectric cooler 200. The second sub-plate 144b and the second substrate 220 can be fixedly connected by welding or formed into a single structure by integral molding. The thermoelectric cooler 200 is located on one side of the heat sink structure 300 in the height direction. The fourth surface 220b of the second substrate 220 of the thermoelectric cooler 200 is connected to the first heat dissipation surface 311 of the heat dissipation body 310 of the heat sink structure 300. The second substrate 220 and the heat dissipation body 310 can be fixedly connected by welding or formed into a single structure by integral molding. In this embodiment, along the height direction of the motor assembly 1000, the orthographic projection of the thermoelectric cooler 200 is located within the range of the orthographic projection of the heat sink structure 300.

[0123] In this embodiment, the coil support 12 of the vacuum motor 100 and the first substrate 210 of the thermoelectric cooler 200 are integrally connected, and the second substrate 220 of the thermoelectric cooler 200 is integrally connected to the heat dissipation body 310 of the heat sink structure 300. This allows the heat from the coil inside the vacuum motor 100 to be sequentially conducted to the filling material, the coil support 12, the thermoelectric cooler 200, and the heat sink structure 300. The heat is then exchanged between the heat dissipation body 310 of the heat sink structure 300 and the heat dissipation medium in the heat dissipation channel 320. Finally, the heat is carried out of the motor assembly 1000 by the heat dissipation medium, thus achieving heat dissipation of the vacuum motor 100. Compared with the heat dissipation process of the prior art, this heat dissipation process reduces the thermal resistance on the heat dissipation path from the coil of the vacuum motor 100 to the heat sink structure 300, reducing heat loss on the heat dissipation path and enabling precise temperature adjustment of the vacuum motor 100. Simultaneously, the reduced thermal resistance shortens the time required for temperature adjustment of the vacuum motor 100, enabling high-precision, high-vacuum (generally referring to a vacuum degree less than 10) operation. -3 In an environment of Pa, the temperature accuracy of the vacuum motor is improved, and the thermal conductivity of the motor assembly 1000 is also enhanced.

[0124] Along the height direction of the motor assembly 1000, the receiving slot 214 of the magnet 20 faces the coil support 12, and the magnet 20 is inverted on the side of the coil support 12 facing away from the thermoelectric cooler 200, so that part of the coil support 12 is received in the receiving slot 21 of the magnet 20. The bottom wall 211 of the slot of the magnet 20 is opposite to and spaced apart from the first sub-plate 144a of the coil support 12. The ends of the first slot sidewall 212 and the second slot sidewall 213 of the magnet 20 away from the bottom wall 211 are both spaced apart from the thermoelectric cooler 200. Along the width direction of the motor assembly 1000, the first slot sidewall 212 of the magnet 20 is opposite to and spaced apart from the first outer surface 152 of the first sealing plate 15, and the second slot sidewall 213 of the magnet 20 is opposite to and spaced apart from the second outer surface 162 of the second sealing plate 16.

[0125] like Figure 1 and Figure 6 As shown, after the thermoelectric cooler 200 is assembled with the coil assembly 10 and the heat sink structure 300, sealant is filled into the gaps H between the multiple heat conductors 230 to increase the structural strength of the thermoelectric cooler 200. Then, a sealing plate is used to surround the edges of the first substrate 210 and the second substrate 220, and the sealing plate is welded to the first substrate 210 and the second substrate 220 to seal the multiple heat conductors 230 and the sealant between the first substrate 210 and the second substrate 220, ensuring the good applicability of the thermoelectric cooler 200 in a high vacuum environment, thereby ensuring the vacuum applicability of the motor assembly 1000. At the same time, the cables of the thermoelectric cooler 200 are led out from the sealed thermoelectric cooler 200 through a vacuum feedthrough (not shown), which also meets the requirements for the thermoelectric cooler 200 to be used in a high vacuum environment. The vacuum feedthrough is installed on the sealing plate and the connection position with the sealing plate is sealed to ensure the vacuum applicability of the thermoelectric cooler.

[0126] When the first coil 111 and the second coil 112 within the coil assembly 10 are energized, an electromagnetic field is generated between the first coil 111 and the second coil 112 and the magnet 20. Under the influence of this electromagnetic field, a magnetic force is generated between the first coil 111 and the second coil 112 and the magnet 20. This magnetic force allows the magnet 20 to move relative to the coil assembly 10 along a third direction, or along a first direction, or along a second direction; this application does not impose any limitations on this. It can be understood that the magnet 20 is the "moving element" in the vacuum motor 100, and is movable, while the first coil 111 and the second coil 112 are the "stator" in the vacuum motor 100, and are fixed. Therefore, the vacuum motor 100 is a moving magnet motor.

[0127] When the first coil 111 and the second coil 112 within the coil assembly 10 are energized, the first coil 111 and the second coil 112 generate heat. The heat from the first coil 111 is conducted to the coil support 12 through the first filler. The heat from the second coil 112 is conducted to the coil support 12 through the second filler. The heat on the coil support 12 is conducted to the first substrate 210 of the thermoelectric cooler 200 via thermal conduction. The heat received by the first substrate 210 is then conducted sequentially through multiple heat conductors 230 and the second substrate 220 to the heat sink body 310 of the heat dissipation structure 300. Finally, the heat received by the heat sink body 310 exchanges heat with the heat dissipation medium within the heat dissipation channel 320, allowing the heat to be dissipated to the outside of the vacuum motor 100 by the heat dissipation medium.

[0128] The following diagram illustrates the temperature regulation principle of the motor assembly 1000 for each vacuum motor 100, using a motor assembly 1000 consisting of three vacuum motors 100 as an example.

[0129] Please refer to the following: Figure 7 , Figure 7 for Figure 1 The flowchart shows the temperature control process for each vacuum motor in the motor assembly shown.

[0130] The motor assembly 1000 includes a first vacuum motor 100a, a second vacuum motor 100b, and a third vacuum motor 100c. The first vacuum motor 100a, the second vacuum motor 100b, and the third vacuum motor 100c can be the vacuum motor 100 described above. The thermoelectric cooler connected to the first vacuum motor 100a is a first thermoelectric cooler 200a. The thermoelectric cooler connected to the second vacuum motor 100b is a second thermoelectric cooler 200b. The thermoelectric cooler connected to the third vacuum motor 100c is a third thermoelectric cooler 200c.

[0131] When the coil unit inside the first vacuum motor 100a is energized, the coil unit generates heat, causing the first vacuum motor 100a to reach a certain temperature. If the temperature of the first vacuum motor 100a exceeds the target temperature, the control system acquires and identifies the first temperature signal from the temperature sensor inside the first vacuum motor 100a, thereby increasing the current to the first thermoelectric cooler 200a connected to the first vacuum motor 100a. The increased current to the first thermoelectric cooler 200a enhances the Peltier effect of the first thermoelectric cooler 200a, increasing the temperature gradient between the cold and hot sides of the first thermoelectric cooler 200a. This enhances the cooling effect of the first thermoelectric cooler 200a on the first vacuum motor 100a, causing the temperature of the first vacuum motor 100a to decrease until it reaches the target temperature.

[0132] If the first temperature sensor detects that the temperature of the first vacuum motor 100a is lower than the target temperature, the control system acquires and identifies the second temperature signal from the temperature sensor inside the first vacuum motor 100a to reduce the current of the first thermoelectric cooler 200a in the first vacuum motor 100a. As the current of the first thermoelectric cooler 200a decreases, the Peltier effect of the first thermoelectric cooler 200a weakens, and the temperature gradient between the cold and hot sides of the first thermoelectric cooler 200a decreases. Consequently, the cooling effect of the first thermoelectric cooler 200a on the first vacuum motor 100a weakens, causing the temperature of the first vacuum motor 100a to rise until it reaches the target temperature.

[0133] The structure and assembly of the second vacuum motor 100b are described above. The second vacuum motor 100b includes a second thermoelectric cooler 200b. The temperature regulation principle of the control system for the second vacuum motor 100b is the same as that for the first vacuum motor 100a. Further details will not be provided here.

[0134] The structure and assembly of the third vacuum motor 100c are described above. The third vacuum motor 100c includes a third thermoelectric cooler 200c. The temperature regulation principle of the control system for the third vacuum motor 100c is the same as that for the first vacuum motor 100a. Further details will not be provided here.

[0135] Firstly, existing motor assemblies typically include a vacuum motor, a TEC (Transmission Control Unit), and a heat sink. The coils of a vacuum motor are mounted on a coil support, and no other coil fixing materials are used. During operation, the connection between the coils and the coil support is less reliable.

[0136] In this application, in addition to using the positioning boss 145 to fix the coil to the coil bracket 12, a filler is also used to further fix the coil unit 11 to the coil bracket 12, thereby improving the reliability of the connection between the coil and the coil bracket 12. In some embodiments, the coil of the coil unit 11 can also be fixed inside the coil bracket 12 by the filler, as long as the stability of the coil assembly 10 is satisfied.

[0137] Secondly, in existing motor assemblies, the vacuum motor, TEC (Transmission Control Unit), and heat sink are integrated separately. In the vacuum motor, the heat from the coil is transferred to the TEC via the coil support through thermal conduction. The TEC then transfers its own heat and the heat received from the coil to the heat sink, where the cooling material carries it away, achieving temperature control. However, the connecting layers or gaps between the vacuum motor, TEC, and heat sink increase the thermal resistance along the heat conduction path.

[0138] In this application, the coil support 12, thermoelectric cooler 200, and heat sink structure 300 of the vacuum motor 100 are fixedly connected by welding or formed into an integral structure by integrated molding. Compared with the prior art, this reduces the contact thermal resistance between the coil unit 11 and the heat sink structure 300 on the heat conduction path, thereby reducing heat loss on the heat dissipation path and enabling precise temperature regulation of the vacuum motor 100. Simultaneously, the reduced thermal resistance shortens the time required for temperature regulation of the vacuum motor 100, enabling high-precision, high-vacuum (generally referring to a vacuum degree less than 10) operation. -3 In an environment of Pa, the temperature accuracy of the vacuum motor is improved, and the thermal conductivity of the motor assembly 1000 is also enhanced. In addition, the sealing bracket and the filler for fixing the coil unit 11 are both made of materials with high thermal conductivity, which further increases the thermal conductivity of the vacuum motor 100.

[0139] Thirdly, in existing motor assemblies, channels for gas flow are provided in the coil and coil support, and the airflow can directly cool the coil inside the vacuum motor, reducing the thermal resistance from the coil to the heat sink. However, the coil is not sealed, which can easily lead to poor vacuum performance of the vacuum motor in a vacuum environment.

[0140] In this application, a first sealing plate 15 and a second sealing plate 16 are used to seal the coil unit 11, the first filler, and the second filler, satisfying the applicability requirements of the vacuum motor 100 in a high vacuum environment. Simultaneously, potting and welding sealing plates can be used to seal the multiple heat conductors 230 in the thermoelectric cooler 200, satisfying the vacuum applicability of the thermoelectric cooler 200 in a high vacuum environment. Therefore, the vacuum performance of the motor assembly in this application is improved.

[0141] Furthermore, in existing technologies, when multiple vacuum motors requiring heat dissipation share a single cooling system, inconsistencies in flow channel dimensions may arise due to manufacturing deviations between the different vacuum motors. This leads to inconsistent flow resistance and consequently, inconsistent airflow distribution among the vacuum motors, resulting in inconsistent thermal conductivity. In high-precision, high-vacuum applications (generally referring to vacuum levels less than 10⁻⁵), this can cause further issues. -3 In an environment where each vacuum motor generates the same amount of heat while working together, the temperature of each vacuum motor is inconsistent and difficult to control precisely.

[0142] In this application, a temperature sensor is used to monitor the difference between the temperature of the vacuum motor 100 and the target temperature, and the feedback is sent to the control system. If the temperature of the vacuum motor 100 does not reach the target temperature, the control system controls the energization of the thermoelectric cooler 200 connected to the vacuum motor 100, increasing or decreasing the current of the thermoelectric cooler 200. This, along with the heat sink structure 300, regulates the temperature of the vacuum motor 100, achieving active temperature control of the vacuum motor 100 in the motor assembly 1000. Furthermore, in a motor assembly 1000 where multiple vacuum motors 100 share a single cooling system, the control system can not only simultaneously control the temperature of each vacuum motor 100 but also independently control the temperature of each vacuum motor 100, ensuring independent temperature adjustment of the multiple vacuum motors 100 in the motor assembly 1000.

[0143] Furthermore, the vacuum motor 100, thermoelectric cooler 200, and heat sink structure 300 are fixedly connected by welding or formed into an integral structure by integral molding, which reduces the contact thermal resistance between the coil and the heat sink structure 300 in the heat conduction path. At the same time, the coil support 12 and the filler are made of materials with a large thermal conductivity, which reduces the heat loss in the heat conduction path, thereby enabling precise temperature regulation of the vacuum motor 100 in the motor assembly 1000.

[0144] Please refer to the following: Figure 8 and Figure 9 , Figure 8 This is a schematic diagram of a second embodiment of the motor assembly provided in this application. Figure 9 for Figure 8 The diagram shows an exploded view of the motor assembly.

[0145] In this embodiment, unlike the structure of the motor assembly 1000 in the first embodiment described above, the vacuum motor 100 of the motor assembly 1000 in this embodiment is a cylindrical vacuum motor.

[0146] In this embodiment, the coil assembly 10 of the vacuum motor 100 is cylindrical. The magnet 20 is cylindrical. Along the height direction of the motor assembly 1000, the magnet 20 covers the side of the coil assembly 10 facing away from the thermoelectric cooler 200. The magnet 20 is movable relative to the coil assembly 10 along the height direction of the vacuum motor 100. The structure of the coil assembly 10 in this embodiment is described below. The receiving groove 21 of the magnet 20 in this embodiment is a circular groove. The receiving groove 21 has a bottom wall 211 and a peripheral wall. The peripheral wall surrounds and connects to the periphery of the bottom wall 211, and the peripheral wall and the bottom wall 211 are set at an angle. The peripheral wall forms a circular receiving opening 214.

[0147] The thermoelectric cooler 200 in this embodiment differs from the thermoelectric cooler 200 in the first embodiment described above, mainly in its shape and the connection method between the multiple heat conductors 230 and the first substrate 210 and the second substrate 220. In this embodiment, the thermoelectric cooler 200 is cylindrical. Both the first substrate 210 and the second substrate 220 are circular plates. The multiple heat conductors 230 are arranged in a matrix between the first substrate 210 and the second substrate 220, and are connected to both substrates 210 and 220. In this embodiment, the multiple heat conductors 230 can be connected and fixed to the first substrate 210 and the second substrate 220 by welding. The thermoelectric cooler 200 may be exempt from potting and sealing, as long as the structural strength of the thermoelectric cooler 200 is met.

[0148] Please refer to the following: Figure 10 and Figure 11 , Figure 10 for Figure 9 The diagram shown is an exploded view of a portion of the coil assembly of the vacuum motor in the motor assembly. Figure 11 for Figure 10 The diagram shows a cross-sectional view of a portion of the coil support structure in the coil assembly. It should be noted that... Figure 10 The coil unit and filler are not shown in the coil assembly.

[0149] like Figure 10 As shown, in this embodiment, the coil support 12 of the coil assembly 10 is the same as described above. Figure 3 and Figure 4 The coil support 12 shown has a different structure. In this embodiment, the coil support 12 is a cylinder with a sealed cavity inside.

[0150] The coil support 12 includes a support body 14 and a third sealing plate 17. The support body 14 has an inner groove 18, the opening of which faces away from the central axis of the support body 14. The third sealing plate 17 seals the opening of the inner groove 18 and forms a sealed receiving cavity with the support body 14. The coil unit 11 and the filler are both located within the receiving cavity. The filler surrounds and connects to the coil unit 11, and the filler is connected to the support body 14 and the third sealing plate 17.

[0151] The support body 14 includes a first sub-plate 144a, a second sub-plate 144b, and a base plate 143. The first sub-plate 144a and the second sub-plate 144b are respectively connected to opposite ends of the base plate 143 in the height direction. The first sub-plate 144a, the second sub-plate 144b, and the base plate 143 form an inner groove 18. The periphery of the first sub-plate 144a and the second sub-plate 144b forms the opening of the inner groove 18. The opening of the inner groove 18 faces away from the central axis of the base plate 143. In this embodiment, the first sub-plate 144a and the second sub-plate 144b are circular plates. The diameter of the first sub-plate 144a is equal to the diameter of the second sub-plate 144b. That is, along the height direction of the coil support 12, the orthographic projection of the first sub-plate 144a and the orthographic projection of the second sub-plate 144b overlap, and the orthographic projection of the base plate 143 is located within the range of the orthographic projection of the second sub-plate 144b. In some embodiments, the diameter of the first sub-plate 144a may not be equal to the diameter of the second sub-plate 144b, provided that the diameter of the base plate 143 is smaller than the smaller diameter of the first sub-plate 144a and the second sub-plate 144b.

[0152] The first sub-plate 144a includes a first surface a1 and a first assembly surface a2, which are arranged opposite to each other along the thickness direction of the first sub-plate 144a.

[0153] The second sub-plate 144b includes a second surface b1 and a second mounting surface b2, which are arranged opposite to each other along the thickness direction of the second sub-plate 144b. In this embodiment, the second sub-plate 144b is used to be fixedly connected to the thermoelectric cooler 200 by welding, or to form an integral structure by integral molding.

[0154] In this embodiment, the base plate 143 is a cylinder. The height direction of the base plate 143 is the same as the height direction of the support body 14. The base plate 143 includes a first connecting surface 146a and a second connecting surface 146b, which are arranged opposite to each other along the height direction of the base plate 143. The base plate 143 also includes a peripheral side surface 146c. The peripheral side surface 146c surrounds the periphery of the first connecting surface 146a and the second connecting surface 146b, and is connected to the first connecting surface 146a and the second connecting surface 146b. It can be understood that the support body 14 includes a peripheral side surface, and the inner groove 18 is recessed in the peripheral side surface of the support body 14 and extends along the circumferential direction of the support body 14.

[0155] The support body 14 also includes multiple positioning bosses 145, which protrude from the peripheral side surface 146c of the base plate 143. Along the circumferential direction of the base plate 143, adjacent positioning bosses 145 are spaced apart. The length direction of the multiple positioning bosses 145 is the same as the height direction of the base plate 143, and the length of the positioning bosses 145 is less than the height of the base plate 143. The positioning bosses 145 are used for limiting and fixing the coil of the coil unit 11. The shapes of the multiple positioning bosses 145 can be the same or different. In this embodiment, there are two positioning bosses 145, and the two positioning bosses 145 are identical in shape, both being elongated arc-shaped protrusions. The two positioning bosses 145 are arranged symmetrically opposite to each other along the radial direction of the support body 14.

[0156] The positioning boss 145 includes an outer arc surface 147 and an inner arc surface 148. The outer arc surface 147 and the inner arc surface 148 are arranged opposite to each other along the thickness direction of the positioning boss 145. Along the radial direction of the bracket body 14, the orientation of the outer arc surface 147 is the same as the orientation of the peripheral side surface 146c of the base plate 143, and the outer arc surface 147 faces away from the peripheral side surface 146c of the base plate 143. The inner arc surface 148 is connected to the peripheral side surface 146c of the base plate 143. In this embodiment, the arc length of the outer arc surface 147 of the positioning boss 145 is greater than the arc length of the inner arc surface 148 to prevent the coil from falling off the positioning boss 145 and to ensure the stability of the coil assembly 10 during operation.

[0157] The coil assembly 10 also includes multiple auxiliary positioning bosses 149. The shapes of the auxiliary positioning bosses 149 are the same as those of the positioning bosses 145. The auxiliary positioning bosses 149 are also used to position and fix the coil. The arc length of the outer arc surface of the auxiliary positioning boss 149 is greater than the arc length of the inner arc surface to prevent the coil from falling off the auxiliary positioning boss 149 and to ensure the stability of the coil assembly 10 during operation. In this embodiment, there are two auxiliary positioning bosses 149. Both auxiliary positioning bosses 149 protrude from the bottom wall of the inner groove 18, that is, from the circumferential side of the base plate 143. The two auxiliary positioning bosses 149 are located between the two positioning bosses 145 and are symmetrically arranged back-to-back along the radial direction of the support body 14.

[0158] In this embodiment, the shape of the third sealing plate 17 matches the shapes of the first sub-plate 144a and the second sub-plate 144b. The third sealing plate 17 is a circular tubular structure. The third sealing plate 17 includes an outer side 171 and an inner side 172. The outer side 171 and the inner side 172 are arranged opposite to each other along the thickness direction of the third sealing plate 17. The third sealing plate 17 has a mounting hole (not shown), which extends through the outer side 171 and the inner side 172 of the third sealing plate 17. The mounting hole communicates with the receiving cavity. The mounting hole is used for assembling the feedthrough member 13. The shape of the mounting hole matches the shape of the feedthrough member 13.

[0159] like Figure 10 and Figure 11 As shown, the first sub-plate 144a, the second sub-plate 144b, and the base plate 143 are assembled. The base plate 143 is located between the first sub-plate 144a and the second sub-plate 144b, and is connected to both sub-plates 144a and 144b. Specifically, the first connecting surface 146a of the base plate 143 is connected to the first mounting surface a2 of the first sub-plate 144a. The second connecting surface 146b of the base plate 143 is connected to the second mounting surface b2 of the second sub-plate 144b. It can be understood that the first sub-plate 144a and the second sub-plate 144b constitute the sidewalls of the groove 18. The base plate 143 constitutes the bottom wall of the groove 18. The first mounting surface a2 of the first sub-plate 144a, the second mounting surface b2 of the second sub-plate 144b, and the peripheral surface 146c of the base plate 143 form the groove wall surface of the groove 18. Along the height direction of the bracket body 14, two positioning bosses 145 and two auxiliary positioning bosses 149 are positioned opposite and spaced apart from the first mounting surface a2 of the first sub-plate 144a and the second mounting surface b2 of the second sub-plate 144b, ensuring sufficient clearance between the positioning bosses 145 and the two auxiliary positioning bosses 149 and the first and second sub-plates 144a and 144b for the coil to pass through. Along the height direction of the bracket body 14, the orthographic projections of the two positioning bosses 145 and the two auxiliary positioning bosses 149 along the height direction of the bracket body 14 are within the range of the orthographic projection of the second sub-plate 144b. In this embodiment, the first sub-plate 144a and the second sub-plate 144b can be integrally formed with the base plate 143 or can be formed separately; this application does not impose any limitations on this.

[0160] In this embodiment, two positioning bosses 145 are evenly spaced along the circumferential direction of the base plate 143, and two auxiliary positioning bosses 149 are evenly spaced along the circumferential direction of the base plate 143, with the two auxiliary positioning bosses 149 located between the two positioning bosses 145. The coil unit 11 includes four coils. Each coil is wound and assembled using a mold or tooling, with two coils respectively fitted around the outer periphery of the two positioning bosses 145 and connected to the positioning bosses 145 to achieve initial positioning and fixation of the coils and the bracket body 14. The other two coils are respectively fitted around the outer periphery of the two auxiliary positioning bosses 149 and connected to the auxiliary positioning bosses 149 to achieve initial positioning and fixation of the coils and the bracket body 14. It should be noted that the interval between a positioning boss 145 and an adjacent auxiliary positioning boss 149 needs to accommodate the assembly of the two coils mounted thereon.

[0161] In this embodiment, there are four temperature sensors, each associated with a coil of the coil unit 11. That is, each temperature sensor can be mounted on or adjacent to the coil.

[0162] The filler is filled into the inner groove 18 of the support body 14 and surrounds the outer side of the four coils of the coil unit 11 (the four coils protrude from the surface of the inner groove 18) to further fix the coils of the coil unit 11 to the support body 14. In this embodiment, the filler has a large thermal conductivity, which enhances the ability of the coil unit 11 to conduct heat to the coil support 12 and ensures the thermal conductivity of the vacuum motor 100.

[0163] The feedthrough component 13 is installed in the mounting hole of the third sealing plate 17. The connection between the feedthrough component 13 and the mounting hole of the third sealing plate 17 achieves a sealed connection, thereby ensuring that the vacuum motor 100 can be used in a high vacuum working environment, and thus ensuring the high vacuum applicability of the vacuum motor 100.

[0164] A third sealing plate 17, equipped with a feedthrough 13, is mounted on the support body 14 and forms a sealed receiving cavity with the support body 14. Specifically, the third sealing plate 17 surrounds and connects the periphery of the first sub-plate 144a and the second sub-plate 144b. The third sealing plate 17 surrounds the filler, the base plate 143, and the coil unit 11, and the inner side 172 of the third sealing plate 17 is connected to the filler. The third sealing plate 17 is connected to the first sub-plate 144a and the second sub-plate 144b by means not limited to welding or adhesive bonding, so as to seal the filler and the coil unit 11 in the receiving cavity of the coil support 12, so that the coil unit 11 and the filler are isolated from the outside of the vacuum motor 100, preventing the vacuum motor 100 from experiencing air leakage problems that would affect the vacuum degree of the vacuum motor 100, thereby ensuring the vacuum applicability of the vacuum motor 100. The cables of the four coils of the coil unit 11 and the cables of the four temperature sensors are led out from the inside of the coil support 12 through the feedthrough 13.

[0165] In some embodiments, the coil assembly 10 further includes a heat-conducting element. Along the radial direction of the coil assembly 10, the heat-conducting element is located between the coil of the coil unit 11 and the third sealing plate 17, and is connected to the third sealing plate 17 and the filler. The heat-conducting element is used to conduct the heat generated by the coil of the coil unit 11 to the third sealing plate 17, thereby further enhancing the conduction of heat from the coil towards the third sealing plate 17 and promoting heat dissipation of the coil unit 11. The heat-conducting element can be, but is not limited to, thermally conductive adhesive, indium foil, etc.

[0166] like Figure 8 and Figure 9As shown, the coil assembly 10, thermoelectric cooler 200, and heat sink structure 300 are assembled. The coil support 12 of the coil assembly 10, the thermoelectric cooler 200, and the heat sink structure 300 are fixedly connected by welding or formed into an integral structure by integral molding. Specifically, the second surface b1 of the second sub-plate 144b is connected to the first surface 210a of the first substrate 210 of the thermoelectric cooler 200. The second sub-plate 144b and the first substrate 210 can be fixedly connected by welding or formed into an integral structure by integral molding. The thermoelectric cooler 200 is located on one side of the heat sink structure 300 in the height direction. The fourth surface 220b of the second substrate 220 of the thermoelectric cooler 200 is connected to the first heat dissipation surface 311 of the heat dissipation body 310 of the heat sink structure 300. The second substrate 220 and the heat dissipation body 310 can be fixedly connected by welding or formed into an integral structure by integral molding. In this embodiment, along the height direction of the motor assembly 1000, the orthographic projection of the thermoelectric cooler 200 is located within the range of the orthographic projection of the heat sink structure 300.

[0167] Along the height direction of the motor assembly 1000, the receiving slot 214 of the magnet 20 faces the coil assembly 10. The magnet 20 covers the side of the coil support 12 facing away from the thermoelectric cooler 200, so that part of the coil support 12 is received in the receiving slot 21 of the magnet 20. The bottom wall 211 of the slot of the magnet 20 is opposite to and spaced apart from the first surface a1 of the first sub-plate 144a. The peripheral wall of the slot of the magnet 20 is spaced apart from the feedthrough member 13. Along the radial direction of the motor assembly 1000, the peripheral wall of the slot of the magnet 20 is opposite to and spaced apart from the outer surface 171 of the third sealing plate 17.

[0168] When the coil unit 11 within the coil assembly 10 is energized, an electromagnetic field is generated between the coil unit 11 and the magnet 20. Under the influence of this electromagnetic field, a magnetic force is generated between the coil unit 11 and the magnet 20, causing the magnet 20 to move relative to the coil assembly 10 along the height direction of the motor assembly 1000. It can be understood that the magnet 20 is the "moving element" in the vacuum motor 100, which is mobile, while the coil unit 11 is the "stator" in the vacuum motor 100, which is stationary. Therefore, the vacuum motor 100 described in this embodiment is a moving magnet motor.

[0169] Simultaneously, the coil unit 11 generates heat when energized, and this heat is conducted to the coil support 12 through the filler. The heat on the coil support 12 is then conducted to the first substrate 210 of the thermoelectric cooler 200 via thermal conduction. The heat received by the first substrate 210 is then conducted sequentially through multiple heat conductors 230 and the second substrate 220 to the heat sink body 310 of the heat dissipation structure 300. Finally, the heat received by the heat sink body 310 exchanges heat with the heat dissipation medium within the heat dissipation channel 320, allowing the heat to be dissipated to the outside of the vacuum motor 100 by the heat dissipation medium.

[0170] In this embodiment, the temperature regulation principle of the vacuum motor 100 in the motor assembly 1000 is the same as that of the vacuum motor 100 in the first embodiment described above, and will not be repeated here. Furthermore, any content in this embodiment that is the same as that in the first embodiment described above is detailed above and will not be repeated here either.

[0171] The above are exemplary embodiments of this application. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principles of this application, and these improvements and modifications are also considered to be within the scope of protection of this application.

Claims

1. A vacuum motor, characterized in that, The vacuum motor includes: magnetic steel; A coil assembly, comprising a coil unit, a coil support, and a filler, wherein the coil support includes an inner groove, and the coil unit includes coils, all of which are located within the inner groove; and A temperature sensor, used to detect the temperature of the coil inside the vacuum motor; The temperature sensor is located in the inner groove, the temperature sensor is mounted on the coil or adjacent to the coil, the filler fills the inner groove and wraps the coil, and the filler, the coil and the temperature sensor are sealed in the inner groove; The magnet is mounted on one side of the coil support in the height direction. The magnet is opposite to and spaced apart from the coil support, and the magnet is movable relative to the coil support.

2. The vacuum motor according to claim 1, characterized in that, The coil is provided in two parts, which are arranged opposite to each other. The coil support also includes two positioning bosses, which are arranged opposite to each other and protrude from the bottom wall of the inner groove. The two positioning bosses are located on two opposite sides of the bottom wall of the inner groove. Each coil is sleeved on the outer periphery of one of the positioning bosses and connected to the outer periphery of the positioning boss.

3. The vacuum motor according to claim 2, characterized in that, The vacuum motor is a flat vacuum motor; the coil support includes a support body and two sealing plates. The support body has two inner grooves, which are arranged opposite each other along the thickness direction of the support body. The openings of the two inner grooves are arranged opposite each other, and the two positioning bosses are respectively protruding from the bottom wall of the two inner grooves. The number of fillers is two, and the two fillers are respectively located in the two inner grooves. The two sealing plates are respectively sealed and connected to the openings of the two inner grooves, and the two sealing plates are respectively connected to the two fillers located in the two inner grooves.

4. The vacuum motor according to claim 3, characterized in that, The magnet includes a receiving groove, which includes a bottom wall and two side walls. The two side walls are respectively connected to opposite sides of the bottom wall and are set at an angle to the bottom wall. The two side walls form the receiving groove opening, and the bottom wall is opposite to the receiving groove opening. The support body includes a base plate and a surrounding plate. The surrounding plate surrounds and is connected to the edge of the base plate. The surrounding plate protrudes from both sides of the base plate in the thickness direction. The base plate and the surrounding plate form two inner grooves. Along the thickness direction of the support body, the two ends of the surrounding plate facing away from the base plate form the openings of the two inner grooves. The positioning boss and the surrounding plate are spaced apart. The two sealing plates are connected to the two ends of the enclosure facing away from the bottom plate; the receiving slot of the magnet faces the coil support, and along the height direction of the vacuum motor, the bottom wall of the magnet's slot is opposite to and spaced apart from one side of the enclosure along the height direction. Along the width direction of the vacuum motor, the two side walls of the magnet's slot are respectively spaced apart from the two sealing plates.

5. The vacuum motor according to claim 2, characterized in that, The vacuum motor is a cylindrical vacuum motor; the coil support includes a support body and a sealing plate. The support body has an inner groove, which is recessed on the circumferential side of the support body and extends along the circumferential direction of the support body. The two positioning bosses are both protruding from the bottom wall of the inner groove, and the two positioning bosses are arranged symmetrically back to back. The filler is filled into the inner groove, and the sealing plate surrounds and seals the opening of the inner groove to seal the filler, the two coils and the temperature sensor; The magnet is capable of moving relative to the coil support along the height direction of the vacuum motor.

6. The vacuum motor according to claim 5, characterized in that, The coil assembly further includes two auxiliary positioning bosses, and the coil unit further includes two coils respectively fitted onto the two auxiliary positioning bosses. The two auxiliary positioning bosses are both protruding from the bottom wall of the inner groove and located between the two positioning bosses.

7. The vacuum motor according to claim 6, characterized in that, The magnet includes a receiving groove, which includes a bottom wall and a peripheral wall. The peripheral wall surrounds and is connected to the bottom wall and is set at an angle to the bottom wall. The peripheral wall forms the receiving groove opening, and the bottom wall is opposite to the receiving groove opening. The bracket body includes a base plate, a first sub-plate, and a second sub-plate. The first sub-plate and the second sub-plate are respectively connected to both ends of the base plate in the height direction. The first sub-plate and the second sub-plate protrude from the periphery of the base plate and form the inner groove with the base plate. The edge of the first sub-plate and the edge of the second sub-plate form the opening of the inner groove. The positioning boss and the auxiliary positioning boss are both spaced apart from the first sub-plate and the second sub-plate. The sealing plate surrounds and connects the periphery of the first sub-plate and the second sub-plate. The receiving slot of the magnet faces the coil support. Along the height direction of the vacuum motor, the bottom wall of the magnet slot is opposite to and spaced from the first sub-plate. Along the width direction of the vacuum motor, the peripheral wall of the magnet slot is opposite to and spaced from the sealing plate.

8. The vacuum motor according to any one of claims 1-7, characterized in that, The coil assembly also includes a feedthrough, which is connected to the coil bracket and communicates with the inner groove. The feedthrough extends out of the coil bracket, and the cables of the coil and the temperature sensor in the coil assembly are both led out from the feedthrough.

9. The vacuum motor according to any one of claims 1-7, characterized in that, The coil assembly also includes a heat-conducting element located between the coil and the sealing plate, and connected to the filler.

10. The vacuum motor according to claim 9, characterized in that, The material of the heat-conducting component is thermally conductive adhesive or indium sheet.

11. The vacuum motor according to any one of claims 1-7, characterized in that, The filler is made of epoxy resin.

12. The vacuum motor according to any one of claims 1-7, characterized in that, The coil support is made of beryllium copper or aluminum alloy.

13. A motor assembly, characterized in that, The motor assembly includes a thermoelectric cooler, a heat sink structure, a control system, and a vacuum motor as described in any one of claims 1-12. Along the height direction of the motor assembly, the vacuum motor, the thermoelectric cooler, and the heat sink structure are stacked and connected. The side of the coil support facing away from the magnet in the height direction is fixedly connected to the thermoelectric cooler by welding, or formed into an integral structure by integral molding. The thermoelectric cooler and the heat sink structure are fixedly connected by welding, or formed into an integral structure by integral molding. The control system acquires and identifies the temperature signal from the temperature sensor inside the vacuum motor, and controls the current of the thermoelectric cooler to adjust the temperature of the vacuum motor through the thermoelectric cooler and the heat sink structure.

14. The motor assembly according to claim 13, characterized in that, The thermoelectric cooler includes a first substrate, a second substrate, and a plurality of heat conductors. The first substrate and the second substrate are stacked along the thickness direction of the thermoelectric cooler. The plurality of heat conductors are located between the first substrate and the second substrate and are connected to the first substrate and the second substrate. The plurality of heat conductors are spaced apart from each other and have gaps. The first substrate and the coil support are fixedly connected by welding or are integrally formed into a single structure by integral molding. The second substrate and the heat sink structure are fixedly connected by welding or are integrally formed into a single structure by integral molding.

15. The motor assembly according to claim 14, characterized in that, The plurality of heat conductors are connected to the first substrate and the second substrate by welding, or the plurality of heat conductors are connected to the first substrate and the second substrate by adhesive bonding; When the plurality of heat conductors are bonded to the first substrate and the second substrate by adhesive, the gaps between the plurality of heat conductors are filled with sealant, and a sealing plate is used to surround and seal the edges of the connection to the first substrate and the second substrate, so as to seal the plurality of heat conductors and the sealant.

16. The motor assembly according to claim 13, characterized in that, There are multiple vacuum motors and thermoelectric coolers, with each vacuum motor corresponding to one thermoelectric cooler, and each vacuum motor connected to one thermoelectric cooler; The control system acquires and identifies the temperature signals from the temperature sensors within each of the vacuum motors, and controls the current of the thermoelectric coolers connected to each of the vacuum motors, so that the temperature of each vacuum motor can be adjusted independently or simultaneously.

17. The motor assembly according to any one of claims 13-16, characterized in that, The temperature signal includes a first temperature signal and a second temperature signal; When the temperature of the vacuum motor is greater than the target temperature, the control system acquires and identifies the first temperature signal, and increases the current of the thermoelectric cooler connected to the vacuum motor, so that the temperature of the vacuum motor is reduced to the target temperature; When the temperature of the vacuum motor is lower than the target temperature, the control system acquires and identifies the second temperature signal, and reduces the current of the thermoelectric cooler connected to the vacuum motor, so that the temperature of the vacuum motor increases to the target temperature.

18. An electrical appliance, characterized in that, The electrical equipment includes a device body and a motor assembly as described in any one of claims 13-17, the motor assembly being used to drive the electrical equipment.

Images