Mask cleaning system and mask cleaning method

Abstract

The application provides a mask cleaning system and a mask cleaning method. The mask cleaning system comprises a storage cabinet, a first detection module, a second detection module, an exposure machine and a robot module. The storage cabinet is used for storing a carrier box for accommodating a mask. The first detection module is arranged at a door opening of the storage cabinet and is used for detecting the mask or the carrier box. The second detection module is arranged in the interior of the storage cabinet and is used for detecting the carrier box. The exposure machine comprises an inspection module, which is used for receiving the mask and detecting the mask. A conveying module is used for transferring the mask or the carrier box between the storage cabinet and the inspection module. The robot module is used for receiving a cleaning signal of each detection module, moving to the conveying module according to the cleaning signal, taking out the corresponding mask or carrier box and cleaning dust particles. The mask cleaning system provided by the application solves the technical problem that the cleaning of the mask and the carrier box thereof mainly depends on manual operation and it is difficult to ensure the consistency of the cleaning effect each time.

Description

Technical Field

[0001] This application belongs to the field of display device technology, and more specifically, relates to a mask cleaning system and a mask cleaning method. Background Technology

[0002] Masks are a very common and important tool or component in the field of display technology. Currently, the cleaning of masks mainly relies on manual operation. However, manual cleaning is unstable and it is difficult to guarantee the same cleaning effect every time. There is a risk of incomplete cleaning, which affects production efficiency. Summary of the Invention

[0003] The purpose of this application is to provide a mask cleaning system and a mask cleaning method to solve the technical problem in the prior art that the cleaning of masks and their carriers mainly relies on manual operation, making it difficult to ensure consistent cleaning results each time.

[0004] To achieve the above objectives, the technical solution adopted in this application is as follows: a mask cleaning system is provided, comprising: a storage cabinet having storage space for storing a carrier box for storing mask assemblies; a first detection module located at the door of the storage cabinet for detecting microparticles on the mask assemblies or the carrier box; a second detection module located inside the storage cabinet for detecting microparticles on the carrier box; an exposure machine including an inspection module for receiving the mask assemblies and detecting microparticles on them; a transfer module located between the storage cabinet and the inspection module for transferring the mask assemblies or the carrier box between the storage cabinet and the inspection module; and a robot module for receiving cleaning signals from the first detection module, the second detection module, or the inspection module, and moving to the transfer module according to the cleaning signals to retrieve the corresponding mask assemblies or carrier boxes and clean the microparticles.

[0005] In one optional embodiment, the conveying module includes a second enclosed conveyor belt, multiple first enclosed conveyor belts, and multiple third enclosed conveyor belts. The multiple first enclosed conveyor belts are connected between the storage cabinet and the second enclosed conveyor belt, and the multiple third enclosed conveyor belts are connected between the second enclosed conveyor belt and the inspection module. The second enclosed conveyor belt is provided with a working port for the robot module to pick up and put in the mask plate or the cargo box.

[0006] In one optional embodiment, the storage space has multiple placement areas, each placement area has multiple placement positions spaced apart, and each placement position is provided with a second detection module; the storage cabinet has multiple cabinet doors, and each cabinet door is provided with a first detection module.

[0007] In an optional embodiment, the mask cleaning system further includes a carrier module, which includes a conveyor and a carrier platform. The conveyor is connected to the carrier platform, and the carrier platform is used for the robot module to perform mask cleaning operations.

[0008] In an optional embodiment, the carrier module further includes a closed cover, fasteners, and supports. The conveyor, carrier platform, fasteners, and supports are all located inside the closed cover. The carrier platform is rotatably connected to the supports. The fasteners are connected to the carrier platform and are used to fix the mask or cargo box to the carrier platform. The closed cover has an entrance for the robot module to enter.

[0009] In an optional embodiment, the mask cleaning system further includes a third detection module, which is installed inside a closed enclosure and is used to detect the mask or carrier box on the stage.

[0010] In an optional embodiment, the mask cleaning system further includes a monitoring module connected to the second detection module for controlling the detection frequency of the second detection module.

[0011] Another objective of this application is to provide a mask cleaning method based on the above-described mask cleaning system. The mask cleaning method includes: placing a carrier box containing the mask in the mask cleaning system; detecting the mask or carrier box through a first detection module, or detecting the carrier box inside a storage cabinet through a second detection module, or detecting the mask through an inspection module; when the detection result is unqualified, controlling the first detection module, the second detection module, or the inspection module to send a cleaning signal to the conveying module and the robot module; controlling the conveying module to transfer the mask or carrier box out, and controlling the robot module to remove the mask or carrier box from the conveying module and clean the micro-dust particles.

[0012] In an optional embodiment, the cleaning system further includes a monitoring module; prior to the step of detecting the container inside the storage cabinet by the second detection module, the system further includes the step of connecting the monitoring module to the second detection module to control the detection frequency of the second detection module.

[0013] In an optional embodiment, the cleaning system further includes a carrier module, which includes a conveyor, a carrier platform, and a third detection module. The steps of controlling the conveyor module to transfer the mask or carrier box out, and controlling the robot module to remove the mask or carrier box from the conveyor module and clean the microparticles specifically include: controlling the conveyor module to transfer the mask or carrier box out; controlling the robot module to remove the mask or carrier box from the conveyor module; controlling the robot module to place the removed mask or carrier box on the conveyor, which then conveys the mask or carrier box to the carrier platform; the robot module cleaning the mask or carrier box on the carrier platform; and using the third detection module to detect the cleaned mask or carrier box. If the detection is qualified, the robot module and the conveyor module return the mask or carrier box to its original position.

[0014] The beneficial effects of the mask cleaning system and method provided in this application are as follows: Compared with the prior art, the mask cleaning system of this application, by setting a first detection module and a second detection module, can perform cabinet entry detection and cabinet interior detection on the masks and carrier boxes entering the storage cabinet. Through the inspection module of the exposure machine, the masks entering the exposure machine can be detected to ensure that the masks are detected for micro-dust particles from storage to production. Furthermore, by setting a robot module, it can receive cleaning signals from the first detection module, the second detection module, and the inspection module. After receiving the cleaning signal, it moves to the conveying module to retrieve the corresponding mask for cleaning. After cleaning, it is returned to its original position. By integrating the communication between the robot module and each detection point, a fully automated process from detection to cleaning and return is realized, reducing the need for manual intervention, ensuring the consistency and reliability of cleaning, avoiding operational differences caused by human factors, ensuring smooth production line operation, and reducing downtime frequency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of the mask cleaning system provided in the embodiments of this application;

[0017] Figure 2 for Figure 1 Enlarged view of point A along the middle edge;

[0018] Figure 3 This is a schematic diagram of the structure of the storage cabinet provided in an embodiment of this application;

[0019] Figure 4 A schematic diagram illustrating the interaction between the inspection module, the carrier box, and the mask provided in the embodiments of this application;

[0020] Figure 5 This is a schematic diagram of the structure of the carrier box and the mask provided in the embodiments of this application;

[0021] Figure 6 This is a schematic diagram illustrating the cooperation between the robot module and the carrier module provided in an embodiment of this application.

[0022] The following are the labeling elements in the figure:

[0023] 100-Mask cleaning system; 10-Storage cabinet; 11-Storage space; 111-Placement area; 112-Placement position; 12-Cabinet door; 21-First detection module; 22-Third detection module; 30-Exposure machine; 31-Inspection module; 311-Transfer arm; 312-Mask storage area; 40-Transfer module; 41-First enclosed conveyor belt; 42-Second enclosed conveyor belt; 421-Work port; 43-Third enclosed conveyor belt; 50-Robot module; 51-Mobile arm; 60-Carrying module; 61-Transfer component; 62-Carrying platform; 63-Enclosed cover; 631-Entrance; 64-Support component; 210-Mask; 220-Loading box. Detailed Implementation

[0024] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0025] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0026] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0028] Currently, the cleaning of photomasks and their carrier boxes mainly relies on manual operation, but this has the following problems: 1. Low cleaning efficiency, manual cleaning is time-consuming and affects production efficiency; 2. Unstable cleaning effect, manual cleaning cannot guarantee consistent results each time, and there is a risk of incomplete cleaning; 3. Risks of human operation, new dust particles may be introduced during manual cleaning, and manual cleaning mainly uses plasma air guns to clean dust particles, which can easily damage the photomask or carrier box shell. If the blowing pressure is too high, it can easily cause indentations, and the tip of the air gun can easily cause scratches.

[0029] Please refer to the following: Figures 1 to 6 The mask cleaning system 100 provided in this application embodiment will now be described. The mask cleaning system 100 includes: a storage cabinet 10, which has a storage space 11 for storing a container 220 for storing a mask 210; a first detection module 21, located at the cabinet door 12 of the storage cabinet 10, for detecting microparticles on the mask 210 or the container 220; a second detection module (not shown), located inside the storage cabinet 10, for detecting microparticles on the container 220; and an exposure machine 30, which includes an inspection module 31. 1. A module for receiving a mask 210 and detecting microparticles on the mask 210; a transfer module 40, located between the storage cabinet 10 and the inspection module 31, for transferring the mask 210 or the container 220 between the storage cabinet 10 and the inspection module 31; and a robot module 50, for receiving cleaning signals from the first detection module 21, the second detection module, or the inspection module 31, and moving to the transfer module 40 according to the cleaning signal to retrieve the corresponding mask 210 or container 220 and clean the microparticles.

[0030] The cleaning of the mask 210 is carried out in a clean room. That is, all components of the mask cleaning system 100 are located in a clean room. The cabinet door 12 of the storage cabinet 10 is connected to the opening of the clean room. The clean room maintains a highly clean environment by controlling the number of particulate matter, microorganisms and other pollutants in the air. This can significantly reduce the impact of external pollutants on the mask 210 during the cleaning process, and help prevent the equipment used in the cleaning process from being contaminated, thus extending its service life and maintaining its optimal working condition.

[0031] Outside the cleanroom, the mask 210 is first removed from the transport container and cleaned. Then, the mask 210 is packaged and safely placed inside the carrier box 220. After cleaning, the carrier box 220 is placed into the storage cabinet 10. During placement into the storage cabinet 10, when the carrier box 220 reaches the cabinet door 12, it is not immediately sealed. The first detection module 21 located at the cabinet door 12 of the storage cabinet 10 performs an entry inspection on the mask 210 to ensure that there are no foreign objects after the mask 210 enters the carrier box 220. The cleaned mask 210 is then placed in the clean carrier box 220, and the carrier box 220 is sealed. The first detection module 21 then inspects the surface of the carrier box 220 to ensure that there are no foreign objects on the surface. Finally, the carrier box 220 is returned to the storage cabinet 10. This design maintains overall cleanliness, helps preserve the mask 210 for a long time without compromising its quality, ensures it is always ready to use without additional handling, saves time, helps reduce rework due to product quality issues caused by mask 210 contamination, maintains smooth production processes, and improves overall work efficiency.

[0032] When the container 220 is placed in the storage space 11 of the storage cabinet 10, the container 220 is detected by the second detection module inside the storage cabinet 10. By detecting the internal environment of the container 220, it is possible to detect in time whether there is accumulation of particles, dust or other contaminants, which helps to reduce the contamination of the mask 210 stored therein, maintain the cleanliness of the mask 210, and thus reduce the impact on the mask 210, avoiding additional cleaning needs caused by the contamination of the mask 210.

[0033] The first detection module 21 and the second detection module can be photosensitive detection modules, particle counters, or surface scanners, etc. If set as photosensitive detection modules, they utilize the principle of light scattering to periodically scatter light signals to detect the presence and size of particles on the surface of the mask 210 and its carrier 220, and then provide feedback on whether it is clean.

[0034] The inspection module 31 of the exposure machine 30 is an inspection mechanism before the mask 210 enters the exposure machine 30. It checks for micro-dust particles on the mask 210. After the inspection module 31 performs foreign object inspection and finds no problems, the mask 210 is sent into the exposure machine 30 for subsequent production, so that the production can run more smoothly.

[0035] The conveyor module 40 is positioned between the storage cabinet 10 and the inspection module 31. It transfers the mask 210 from the storage cabinet 10 to the inspection module 31 of the exposure machine 30. Through the automated conveyor module 40, seamless connection from the storage cabinet 10 to the exposure machine 30 can be achieved, reducing manual intervention. Compared to manual operation, this reduces the risk of human error, provides higher positioning accuracy, shortens preparation time, and thus speeds up the entire production line, contributing to increased overall capacity. Furthermore, the inspection module 31 includes a conveyor arm 311 and a mask storage area 312. The conveyor arm 311 opens the carrier box 220, removes the mask 210, and moves it to the mask storage area 312 for inspection. Figure 4 The arrows in the diagram indicate the conveying path of the mask 210. First, the mask 210 is sent from the bottom of the inspection module 31 to the mask storage area 312 via the conveying module 40. Each mask storage area 312 has protruding rivets on both sides. The rivets extend into the holes on both sides of the lid of the container 220. When the mask 210 needs to be removed, the conveying arm 311 first extends to the bottom of the container 220, and then moves the container 220 downward. As a result, the lid of the container 220 will be hooked in the rivets, thus opening the lid.

[0036] Meanwhile, when the mask 210 or the container 220 needs cleaning, the conveying module 40 can transfer it from the storage cabinet 10 or the inspection module 31 for the robot module 50 to clean. Specifically: when a foreign object is detected upon entering the cabinet, the sealed container 220 is placed in the storage cabinet 10, the conveying module 40 conveys it out, and the robot module 50 moves to the conveying module 40 to remove it for cleaning. If a foreign object is detected in the mask 210 inside an unsealed container 220, it is manually cleaned, then sealed, and finally placed in the storage cabinet 10. When a foreign object is detected inside the cabinet, the container 220 is conveyed out by the conveying module 40, and the robot module 50 moves to the conveying module 40 to remove the container 220 for cleaning. When the inspection module 31 detects a foreign object, the mask 210 is conveyed out by the conveying module 40, and the robot module 50 moves to the conveying module 40 to remove the mask 210 for cleaning. After the robot module 50 is cleaned, it is sent to the conveyor module 40, which then sends it to the corresponding storage cabinet 10 or inspection module 31 for return to its original position.

[0037] The conveying module 40 can be a conveyor belt, a slide rail structure, a robotic arm, or a transport trolley.

[0038] The robot module 50 is configured to receive cleaning signals from the first detection module 21, the second detection module, and the inspection module 31. Upon receiving the corresponding cleaning signal, it retrieves the corresponding mask 210 from the conveying module 40 for cleaning, and then returns it to its original position.

[0039] The robot module 50 cleans the mask 210 or the container 220 using tools such as a plasma gun. The robot can precisely control the cleaning position, time, and intensity according to a preset program, ensuring consistency and reliability in each cleaning cycle and preventing damage to the mask 210.

[0040] By integrating the robot module 50 with communication between various detection points, a fully automated process from detection to cleaning and return to the correct location is achieved, reducing the need for manual intervention and improving the overall automation level of the system. When a detection module issues a cleaning signal, the robot module 50 can quickly respond and execute the cleaning task, significantly shortening processing time and improving overall work efficiency. Furthermore, using the robot module 50 for cleaning ensures consistency, guarantees higher cleanliness and reliability, avoids operational discrepancies caused by human factors, ensures smooth production line operation, and reduces downtime.

[0041] The automated cleaning system uses a robot module 50 to automatically clean the surfaces of the mask plate 210 and its container 220, eliminating the possibility of human-carried dust particles. A detection module is added to the storage cabinet 10 as an important means of checking for foreign objects. Furthermore, after each detection module automatically detects and identifies dust particles, it can transmit a cleaning signal via a server. Upon receiving the signal, the transmission module 40 and the robot module 50 perform corresponding actions.

[0042] In addition, the first detection module 21, the second detection module, and the inspection module 31 detect foreign objects. If a foreign object alarm is triggered, the server sends a notification to the robot module 50, which will then retrieve the mask 210 or the container 220 from the designated area and perform corresponding cleaning based on the particle distribution and size rating. The particle distribution and size rating refer to the three levels according to production standards, such as Level 1, Level 2, and Level 3. The robot will only perform cleaning after the particle reaches Level 3, which requires cleaning.

[0043] Compared with the prior art, the mask cleaning system 100 provided in this application, by setting up a first detection module 21 and a second detection module, can perform cabinet entry detection and cabinet internal detection on the mask 210 and the carrier box 220 entering the storage cabinet 10. Through the inspection module 31 of the exposure machine 30, the mask 210 entering the exposure machine 30 can be detected to ensure that the mask 210 is detected for micro-dust particles from storage to production. Furthermore, by setting up a robot module 50, it can receive cleaning signals from the first detection module 21, the second detection module, and the inspection module 31. After receiving the cleaning signal, it moves to the conveyor module 40 to retrieve the corresponding mask 210 for cleaning. After cleaning, it is returned to its original position. By integrating the communication between the robot module 50 and each detection point, a fully automated process from detection to cleaning and return is realized, reducing the need for manual intervention, ensuring the consistency and reliability of cleaning, avoiding operational differences caused by human factors, ensuring smooth production line production, and reducing downtime frequency.

[0044] In another embodiment of this application, see [reference] Figure 1 and Figure 2 The conveying module 40 includes a second enclosed conveyor belt 42, multiple first enclosed conveyor belts 41, and multiple third enclosed conveyor belts 43. The multiple first enclosed conveyor belts 41 are connected between the storage cabinet 10 and the second enclosed conveyor belt 42, and the multiple third enclosed conveyor belts 43 are connected between the second enclosed conveyor belt 42 and the inspection module 31. The second enclosed conveyor belt 42 is provided with a working port 421 for the robot module 50 to pick up and put in the mask plate 210 or the cargo box 220.

[0045] By setting up enclosed conveyor belts, the mask 210 is ensured to remain fully enclosed after entering the storage cabinet 10 until the operation is completed, effectively reducing the impact of dust and other contaminants from the external environment on the mask 210. The series design of the first enclosed conveyor belt 41, the second enclosed conveyor belt 42, and the third enclosed conveyor belt 43 forms a continuous conveying structure, enabling the mask 210 to be smoothly transported between different processing stages.

[0046] Multiple first enclosed conveyor belts 41 are set up to correspond to the various containers 220 in the storage cabinet 10 for separate transport; multiple third enclosed conveyor belts 43 are set up to correspond to the inspection modules 31 of multiple exposure machines 30 for separate transport; a second enclosed conveyor belt 42 is set up as an intermediate conveyor belt, and the set-up work port 421 provides a convenient operating platform for the robot module 50, further simplifying the operation process.

[0047] In addition, such as Figure 1Multiple robot modules 50 are also provided, which are respectively set on both sides of the system. Due to the different conveyor belt segments (such as multiple first closed conveyor belts 41 and multiple third closed conveyor belts 43), operations can be performed simultaneously in different placement areas 111. Different robot modules 50 perform cleaning operations on different mask plates 210, thereby improving the parallel processing capability of the overall production line.

[0048] In another embodiment of this application, please refer to Figures 1 to 3 The storage space 11 has multiple placement areas 111, and each placement area 111 is provided with multiple placement positions 112 at intervals. Each placement position 112 is provided with a second detection module. The storage cabinet 10 is provided with multiple cabinet doors 12, and each cabinet door 12 is provided with a first detection module 21.

[0049] The storage cabinet 10 has multiple cabinet doors 12 and multiple placement positions 112. It is equipped with corresponding first detection modules 21 and second detection modules according to the number of cabinet doors 12. No matter where the storage box 220 is stored, it can be effectively detected. Once the second detection module on a certain placement position 112 detects an abnormality, it can quickly locate the specific location and facilitate timely cleaning.

[0050] In one embodiment, such as Figure 1 Each placement position 112 is equipped with a first enclosed conveyor belt 41, which is convenient to correspond with each of the storage boxes 220 in the storage cabinet 10 and to transport them separately.

[0051] The first detection module 21 at each cabinet door 12 can provide detection when the mask plate 210 and the container 220 are placed into the cabinet, reducing the need for manual intervention and lowering the risk caused by human error.

[0052] In another embodiment of this application, please refer to Figure 1 and Figure 6 The mask cleaning system 100 also includes a carrier module 60, which includes a conveyor 61 and a carrier platform 62. The conveyor 61 is connected to the carrier platform 62, and the carrier platform 62 is used for the robot module 50 to perform the cleaning operation of the mask 210.

[0053] The conveyor 61 and the carrier 62 are also located within the cleanroom. The interconnected design between the conveyor 61 and the carrier 62 allows the mask 210 to be smoothly and directly transferred from the conveyor 61 to the carrier 62 for cleaning operations. The conveyor 61 can precisely place the mask 210 at the designated position on the carrier 62, ensuring that the robot module 50 can operate accurately and without error when performing cleaning tasks, avoiding the risk of incomplete cleaning or damage to the mask 210 due to positional deviations.

[0054] When cleaning is required, the robot module 50 retrieves the mask 210 or the container 220 from the transfer module 40 and places it on the support platform 62. The support platform 62 provides a stable working surface for the robot, ensuring that the mask 210 or the container 220 is not affected by vibration or other factors during the cleaning task, thus improving the accuracy and consistency of the cleaning process. Through the optimized design of the transfer component 61, the mask 210 or the container 220 can be quickly and accurately transported from the storage cabinet 10 or the inspection module 31 to the support platform 62. With a dedicated support platform 62, the robot module 50 can perform a comprehensive and thorough cleaning of the mask 210 according to preset paths and parameters, avoiding operational errors or incomplete cleaning caused by unstable working environments.

[0055] The conveyor 61 can adjust its transport method and speed according to different types of mask 210, ensuring that each mask 210 is placed on the support platform 62 in the optimal way. Furthermore, the support platform 62 itself can be adjusted in position or angle as needed to adapt to different cleaning requirements. The support platform 62 provides a stable foundation, maintaining high stability even during complex cleaning processes, ensuring the quality and consistency of the cleaning.

[0056] Since the conveyor 61 and the carrier 62 are independent components, they can be easily integrated with other automated equipment or testing devices to form a more complex and efficient production line layout. The carrier 62 can be adjusted in position or angle according to different cleaning needs to accommodate various types of masks 210 and cleaning tools (such as plasma guns).

[0057] In another embodiment of this application, please refer to Figure 6 The carrier module 60 also includes a closed cover 63, fasteners (not shown) and a support member 64. The conveyor 61, the carrier platform 62, the fasteners and the support member 64 are all located inside the closed cover 63. The carrier platform 62 is rotatably connected to the support member 64. The fasteners are connected to the carrier platform 62. The fasteners are used to fix the mask plate 210 or the container 220 to the carrier platform 62. The closed cover 63 has an entrance 631 for the robot module 50 to enter.

[0058] The enclosure 63 can form a small, independent cleanroom, providing a higher level of protection within a larger cleanroom, further isolating dust and other contaminants from the external environment, and ensuring that the mask 210 or the container 220 is not contaminated during the cleaning process.

[0059] The support platform 62 is rotatably connected to the support member 64. Fasteners are used to securely fix the mask 210 or the container 220 to the support platform 62. During cleaning, the support platform 62 can rotate the mask 210 to clean the two surfaces of the mask 210. The fasteners prevent the mask 210 from shifting or sliding during rotation, ensuring the safety and stability of the operation.

[0060] In one embodiment, by setting inlet 631, the design of inlet 631 allows robot module 50 to enter the enclosure 63 to perform cleaning tasks, realizing fully automated operation from transfer to cleaning to fixing, greatly improving work efficiency; in another embodiment, a cleaning robot is also set inside the enclosure 63, and robot module 50 sends mask plate 210 or cargo box 220 into conveyor 61, which then conveys it to carrier platform 62 for easy processing by robot module 50; Figure 6 At this time, the robot module 50 can be equipped with a mobile arm 51 that can move up and down. The entrance 631 of the enclosed cover 63 is adapted to the robot module 50, so that the mask plate 210 or the cargo box 220 on the mobile arm 51 can be sent onto the conveyor 61.

[0061] In another embodiment of this application, please refer to Figure 6 The mask cleaning system 100 also includes a third detection module 22, which is installed inside the enclosure 63 and is used to detect the mask 210 or the container 220 on the stage 62.

[0062] By incorporating a third detection module 22, a final quality check can be performed on the mask 210 or the cargo box 220 before it leaves the enclosure 63, ensuring that no residual particles or other contaminants remain on its surface. If the third detection module 22 detects any remaining foreign objects, it can trigger an additional cleaning step, and the robot will perform the cleaning again until the inspection results are satisfactory, thereby improving the automation and intelligence of the overall process.

[0063] By completing cleaning and inspection within the enclosure 63, only fully qualified masks 210 or containers 220 are removed from the enclosure 63, preventing defective products from entering the next process, reducing the possibility of rework, and improving overall production efficiency. Furthermore, completing inspection within the enclosure 63 allows items to be immediately reprocessed, helping to maintain the cleanliness of the entire cleanroom. Because the steps are all completed in a continuous workflow, the operation from cleaning to inspection to transfer is smoother, reducing time wasted in intermediate steps.

[0064] In addition, by setting up multiple detection points at different stages, such as before entering the cabinet, during storage, after cleaning, and before entering the exposure machine 30, a multi-level particle detection system is formed. The results of each test are recorded, and the data collected during the testing process can help analyze common sources of pollution or cleaning difficulties, providing a basis for subsequent optimization.

[0065] In another embodiment of this application, the mask cleaning system 100 further includes a monitoring module (not shown in the figure), which is connected to the second detection module and is used to control the detection frequency of the second detection module.

[0066] The monitoring module enables regular inspections, ensuring a consistently high level of cleanliness within the storage cabinet 10. This helps reduce product defects caused by contamination. The fixed inspection frequency ensures that all storage boxes 220 are monitored and maintained according to the same standards, improving product consistency and reliability.

[0067] Meanwhile, the monitoring module can flexibly adjust the operating frequency of the second detection module based on real-time data or other relevant parameters to cope with emergencies or special needs. Adjusting the detection frequency according to actual needs allows for more efficient use of resources (such as power and equipment lifespan).

[0068] In one embodiment, the detection frequency is once every 24 hours. By setting a fixed detection frequency, the status of the storage environment can be checked regularly without wasting resources due to overly frequent detections or failing to detect problems in a timely manner due to excessively long intervals. The system regularly checks the number of foreign objects in the storage cabinet 10, optimizes the monitoring system, and establishes system logic for regular cleaning. The second detection module is integrated with the monitoring system for convenient installation, and the regular cleaning logic is set based on previous system monitoring data.

[0069] In addition, the server is connected to the monitoring module, and can control the sending of detection signals to the second detection module.

[0070] This application also provides a mask cleaning method. Based on the mask cleaning system 100 described above, the mask cleaning method includes: placing a container 220 for storing the mask 210 in the mask cleaning system 100; detecting the mask 210 or the container 220 through a first detection module 21, or detecting the container 220 inside the storage cabinet 10 through a second detection module, or detecting the mask 210 through an inspection module 31; when the detection result is unqualified, controlling the first detection module 21, the second detection module, or the inspection module 31 to send a cleaning signal to the conveying module 40 and the robot module 50; controlling the conveying module 40 to transfer the mask 210 or the container 220 out, and controlling the robot module 50 to remove the mask 210 or the container 220 from the conveying module 40 and clean the micro-dust particles.

[0071] By setting up a first detection module 21, a second detection module, and an inspection module 31, a "three-stage" monitoring system is implemented. This system can perform cabinet entry detection and cabinet interior detection on the mask 210 and the carrier box 220 entering the storage cabinet 10. It directly monitors the micro-dust particles on the carrier box 220 and the mask 210 inside the storage cabinet 10, and inspects the mask 210 entering the exposure machine 30. Furthermore, by setting up a robot module 50, it can receive cleaning signals from the first detection module 21, the second detection module, and the inspection module 31. Upon receiving a cleaning signal, it moves to the conveyor module 40 to retrieve the corresponding mask 210 for cleaning, and then returns it to its original position. By integrating communication between the robot module 50 and each detection point, a fully automated process from detection to cleaning and return is achieved, reducing the need for manual intervention, ensuring the consistency and reliability of cleaning, avoiding operational differences caused by human factors, ensuring smooth production line operation, and reducing downtime frequency.

[0072] By employing fully automated cleaning, real-time monitoring, and intelligent management, the presence of particles on the mask 210 and its carrier box 220 of the exposure machine 30 is effectively reduced, thereby lowering labor costs and reducing the downtime rate of the exposure machine 30.

[0073] Furthermore, this method can more effectively identify the causes of microparticle generation and establish cleaning frequency through data analysis, greatly improving production efficiency. The entire system is automated, using a robotic module 50 to replace manual cleaning, achieving cost reduction and efficiency improvement, and eliminating unstable cleaning effects and low cleaning efficiency.

[0074] In another embodiment of this application, the cleaning system further includes a monitoring module; prior to the step of detecting the storage box 220 inside the storage cabinet 10 by the second detection module, the system further includes the step of connecting the monitoring module to the second detection module to control the detection frequency of the second detection module.

[0075] The monitoring module is set up to enable the second detection module to perform regular inspections, ensuring that the storage cabinet 10 always maintains a high level of cleanliness, which helps to reduce product defects caused by contamination.

[0076] In one embodiment, the detection frequency is once every 24 hours. By setting a fixed detection frequency, the status of the storage environment can be checked regularly without wasting resources due to overly frequent detections or failing to detect problems in a timely manner due to excessively long intervals. The system regularly checks the number of foreign objects in storage cabinet 10, optimizes the monitoring system, and establishes system logic for regular cleaning. The second detection module is integrated with the monitoring system for convenient installation, and the regular cleaning logic is set based on previous system monitoring data. Furthermore, the server is connected to the monitoring module, allowing the server to send signals to the second detection module.

[0077] In another embodiment of this application, the cleaning system further includes a carrier module 60, which includes a conveyor 61, a carrier platform 62, and a third detection module 22. The steps of controlling the conveyor module 40 to transfer the mask 210 or the container 220 out, and controlling the robot module 50 to remove the mask 210 or the container 220 from the conveyor module 40 and clean the microparticles specifically include: controlling the conveyor module 40 to transfer the mask 210 or the container 220 out; controlling the robot module 50 to remove the mask 210 from the conveyor module 40. The robot module 50 places the removed mask 210 or container 220 onto the conveyor 61, which then transports the mask 210 or container 220 to the support platform 62. The robot module 50 cleans the mask 210 or container 220 on the support platform 62. The third detection module 22 is used to detect the cleaned mask 210 or container 220. If the detection is qualified, the robot module 50 and the conveyor module 40 return the mask 210 or container 220 to its original position.

[0078] The connection between the conveyor 61 and the carrier 62 allows the mask 210 to be smoothly transferred directly from the conveyor 61 to the carrier 62 for cleaning operations. The conveyor 61 can accurately place the mask 210 at the designated position on the carrier 62, ensuring that the robot module 50 can operate accurately and without error when performing cleaning tasks. The carrier 62 provides a stable working surface for the robot, ensuring that the mask 210 or the container 220 will not be affected by vibration or other factors when performing cleaning tasks, which helps to improve the accuracy and consistency of the cleaning process.

[0079] By setting up a third detection module 22, a final quality inspection can be performed on the mask 210 or the container 220 before it leaves the enclosure 63, ensuring that there are no residual particles or other contaminants on its surface. If the third detection module 22 detects that foreign objects are still present, an additional cleaning step can be triggered, and the robot will clean again until the inspection result is qualified. After the inspection is qualified, the mask 210 or the container 220 is returned to its position by the robot module 50 and the conveyor module 40, improving the automation and intelligence of the overall process.

[0080] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A mask cleaning system, characterized in that, The mask cleaning system includes: A storage cabinet having storage space for storing a container box for storing a mask plate; The first detection module is located at the door of the storage cabinet and is used to detect micro-dust particles on the mask or the container. The second detection module is located inside the storage cabinet and is used to detect micro-dust particles on the container. An exposure machine, the exposure machine including an inspection module, the inspection module being used to receive the photomask and detect micro-dust particles on the photomask; A transfer module, disposed between the storage cabinet and the inspection module, is used to transfer a mask or carrier between the storage cabinet and the inspection module; and The robot module is used to receive cleaning signals from the first detection module, the second detection module, or the inspection module, and move to the conveying module according to the cleaning signals to take out the corresponding mask or carrier and clean the micro-dust particles.

2. The mask cleaning system as described in claim 1, characterized in that, The conveying module includes a second enclosed conveyor belt, multiple first enclosed conveyor belts, and multiple third enclosed conveyor belts. The multiple first enclosed conveyor belts are connected between the storage cabinet and the second enclosed conveyor belt, and the multiple third enclosed conveyor belts are connected between the second enclosed conveyor belt and the inspection module. The second enclosed conveyor belt is provided with a working port for the robot module to pick up and put in the mask plate or the cargo box.

3. The mask cleaning system as described in claim 1, characterized in that, The storage space has multiple placement areas, each of which has multiple placement positions spaced apart, and each placement position is equipped with a second detection module; the storage cabinet has multiple cabinet doors, and each cabinet door is equipped with a first detection module.

4. The mask cleaning system as described in any one of claims 1 to 3, characterized in that, The mask cleaning system also includes a carrier module, which includes a conveyor and a carrier platform. The conveyor is connected to the carrier platform, and the carrier platform is used for the robot module to perform the mask cleaning operation.

5. The mask cleaning system as described in claim 4, characterized in that, The carrier module also includes a closed cover, fasteners and support members. The conveyor, the carrier platform, the fasteners and the support members are all located inside the closed cover. The carrier platform is rotatably connected to the support members. The fasteners are connected to the carrier platform and are used to fix the mask or the cargo box to the carrier platform. The closed cover has an entrance for the robot module to enter.

6. The mask cleaning system as described in claim 5, characterized in that, The mask cleaning system also includes a third detection module, which is installed inside the enclosure and is used to detect the mask or container on the support platform.

7. The mask cleaning system as described in any one of claims 1 to 3, characterized in that, The mask cleaning system also includes a monitoring module, which is connected to the second detection module and is used to control the detection frequency of the second detection module.

8. A mask cleaning method based on the mask cleaning system according to any one of claims 1 to 7, characterized in that, The mask cleaning method includes: Place the container for storing the photomasks into the photomask cleaning system; The mask or container is detected by the first detection module, or the container is detected inside the storage cabinet by the second detection module, or the mask is detected by the inspection module. When the test result is unqualified, control the first detection module, the second detection module or the inspection module to send a cleaning signal to the transmission module and the robot module; The control transfer module moves the mask or cargo box out, and the control robot module removes the mask or cargo box from the transfer module and cleans up the micro-dust particles.

9. The mask cleaning method as described in claim 8, characterized in that, The cleaning system also includes a monitoring module; prior to the step of detecting the container inside the storage cabinet by the second detection module, the system further includes the step of connecting the monitoring module to the second detection module to control the detection frequency of the second detection module.

10. The mask cleaning method as described in claim 8, characterized in that, The cleaning system also includes a carrier module, which comprises a conveyor, a carrier platform, and a third detection module; the steps of controlling the conveyor module to transfer the mask or carrier box out, and controlling the robot module to remove the mask or carrier box from the conveyor module and clean the micro-dust particles specifically include: The control transfer module moves the mask or carrier box out; The robot control module retrieves the mask or cargo box from the transfer module; The control robot module places the retrieved mask or container into the conveyor, which then transports the mask or container to the support platform. The robot module cleans the mask or container on the support platform; The third detection module is used to inspect the cleaned mask or container. If the inspection is qualified, the robot module and the conveying module will return the mask or container to its original position.

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