A method and system for managing a semiconductor ceramic production process

Abstract

This invention relates to the field of industrial big data technology, specifically to a method and system for managing the semiconductor ceramic production process. The method includes the following steps: acquiring production process data corresponding to multiple production stages in the semiconductor ceramic production process; converting the production process data into process event data with a unified field structure; establishing a batch node chain based on the process sequence and time sequence of multiple process event data corresponding to the same batch identifier according to the semiconductor ceramic production process route; sequentially verifying the preceding process event, the current process event, equipment status, material flow status, and inspection record status based on the batch node chain; and outputting the production flow result or traceability query result according to the process status identifier. This invention organizes multi-source production records through process event data and batch node chains, enabling batch process data to form a continuous process relationship and providing a consistent basis for production flow and traceability queries.

Description

Technical Field

[0001] This invention relates to the field of industrial big data technology, and in particular to a method and system for managing the semiconductor ceramic production process. Background Technology

[0002] The field of industrial big data technology involves the collection, transmission, storage, association, querying, and retrieval of equipment status, process parameters, material batches, process records, and quality inspection data during industrial production. This typically involves field terminals, industrial control equipment, servers, databases, and management clients working together to complete data flow according to production batches, equipment numbers, process nodes, and time identifiers. Traditional semiconductor ceramic production process management methods involve establishing process data recording methods for production stages such as batching, slurry preparation, granulation, pressing, glue removal, sintering, testing, and warehousing. Field terminals or equipment interfaces obtain temperature curves, pressure parameters, material numbers, equipment numbers, test results, and flow status, which are then transmitted to the server via an industrial network. The server writes these data into the database according to preset fields, and the client retrieves the corresponding records by product number, process node, or inspection batch.

[0003] Traditional semiconductor ceramic production process management relies on field terminals and equipment interfaces to collect data in stages. The server writes the data into the database according to preset fields. Process records, equipment records, material records and test records are associated with batch numbers, timestamps or manual nodes, respectively. The corresponding paths between process parameters and test results are scattered. The production flow status depends on a single field or manual confirmation. When tracing abnormal batches, it is necessary to search multiple types of records separately. Batch process data lacks continuous process relationships. Summary of the Invention

[0004] The purpose of this invention is to provide a semiconductor ceramic production process management method and system, which addresses the problem of scattered and interconnected process records, equipment records, material records, and inspection records in the semiconductor ceramic production process. It organizes multi-source production process data in a unified manner according to batch, process, equipment, and time relationships, so that the production flow status and traceability query results have continuous process data basis.

[0005] To achieve the above objectives, the present invention provides a method for managing the semiconductor ceramic production process, comprising the following steps: Acquire production process data corresponding to multiple production stages in the semiconductor ceramic production process. The production process data includes at least two of the following: material number, equipment number, process parameters, time data, test results, and flow status. The production process data is converted into process event data with a unified field structure. Each process event data includes a batch identifier, process identifier, equipment identifier, and time identifier. According to the semiconductor ceramic manufacturing process route, multiple process event data corresponding to the same batch identifier are used to establish a batch node chain in the order of process sequence and time sequence; Based on the batch node chain, the preceding process event, the current process event, the equipment status, the material flow status, and the detection record status are checked sequentially. When the check result meets the node closure condition, a continued flow result is generated; when the check result does not meet the node closure condition, a process status identifier is generated. Output production flow results or traceability query results based on the process status identifier.

[0006] Furthermore, when acquiring production process data corresponding to multiple production stages in the semiconductor ceramic production process, the system receives manually entered material numbers and flow status from the field terminal, equipment numbers, process parameters, and time data from the industrial control equipment interface, and test results from the testing equipment interface. Data from the field terminal, industrial control equipment interface, and testing equipment interface are written into the same batch acquisition cache according to the corresponding production stages. When the same batch acquisition cache includes at least two types of data from material number, equipment number, process parameters, time data, test results, and flow status, the data in the same batch acquisition cache is identified as the production process data.

[0007] Furthermore, when converting the production process data into process event data with a unified field structure, the production process data in the same batch acquisition cache is read, and the process identifier is determined according to the correspondence of production links, the batch identifier is determined according to the material number, the equipment identifier is determined according to the equipment number, and the time identifier is determined according to the time data. The batch identifier, process identifier, equipment identifier, and time identifier are written into the same event record, and the process parameters, test results, and flow status are written into the process data field of the same event record. When the same event record has a batch identifier, process identifier, equipment identifier, and time identifier at the same time, the same event record is identified as the process event data.

[0008] Furthermore, when establishing the batch node chain, the batch identifier, process identifier, and time identifier in the process event data are read, and the process sequence relationship is determined according to the semiconductor ceramic production process route in the preset storage space; multiple process event data with the same batch identifier are sorted according to the process sequence relationship, and when multiple process event data exist in the same process, they are sorted according to the time identifier; the sorted multiple process event data are written into the same batch chain record, and the process event data corresponding to adjacent processes are established with a front-to-back node relationship to obtain the batch node chain.

[0009] Furthermore, after establishing the batch node chain, the node integrity is verified. The node integrity verification includes: reading the generated nodes and ungenerated nodes in the batch node chain according to the semiconductor ceramic production process route; when the process identifier of the generated node is consistent with the identifier of the preceding process in the semiconductor ceramic production process route, and the time identifier of the generated node is earlier than the time identifier of the adjacent subsequent node, the generated node is determined as a valid node; when the process identifier is missing or the time identifier does not meet the sequential order, a node missing state or node order abnormal state corresponding to the batch identifier is generated.

[0010] Furthermore, when determining the process status based on the batch node chain, the system reads the valid nodes, missing node status, and abnormal node sequence status obtained from the node integrity verification, and reads the equipment status, material flow status, and inspection record status corresponding to the valid nodes. When the preceding process event, current process event, equipment status, material flow status, and inspection record status under the same batch identifier all correspond to valid nodes, and there are no missing node statuses or abnormal node sequence statuses, the process node corresponding to the current process event is determined as a closed node. When any status does not correspond to a valid node, or there are missing node statuses or abnormal node sequence statuses, a process status identifier corresponding to the batch identifier and process identifier is generated.

[0011] Furthermore, when outputting production flow results based on the process status identifier, when the node corresponding to the process status identifier is closed, the process identifier of the current process event is read, and the identifier of the adjacent subsequent process is determined according to the semiconductor ceramic production process route to generate a continue flow result; when any of the following states are present: missing node, abnormal node sequence, non-corresponding equipment status, non-corresponding material flow status, or non-corresponding detection record status, a pause flow result is generated; the continue flow result or pause flow result is associated with the batch identifier, the current process event, and the identifier of the adjacent subsequent process and written into the flow record.

[0012] Furthermore, when outputting traceability query results based on process status identifiers, if the status of the detection record corresponding to the process status identifier does not correspond or the flow status is abnormal, the batch identifier and process identifier corresponding to the process status identifier are read; the target batch chain record is located in the batch node chain based on the batch identifier, and the preceding process event, current process event, and adjacent subsequent process event in the target batch chain record are read based on the process identifier; the equipment identifier, time identifier, process parameters, and detection results are extracted from the preceding process event, current process event, and adjacent subsequent process event, and the extracted content is associated with the batch identifier to generate the traceability query results.

[0013] Furthermore, after generating the traceability query results, the traceability query results are archived according to batch identifier, process identifier, equipment identifier, and time identifier. When there are multiple traceability query results under the same batch identifier, the output order is determined according to the sequential relationship of the process identifier in the semiconductor ceramic production process route. When multiple traceability query results have the same process identifier, the output order is determined according to the time identifier, and the sorted traceability query results are written into the query record.

[0014] The present invention also provides a semiconductor ceramic production process management system, which is used to support the above-mentioned semiconductor ceramic production process management method, including a process data access unit, a process event generation unit, a batch node chain construction unit, a process status determination unit, and a result output unit; The process data access unit is used to receive production process data during the semiconductor ceramic production process; The process event generation unit is used to convert the production process data into process event data with a unified field structure; The batch node chain building unit is used to create a batch node chain according to the batch identifier, process sequence, and time sequence. The process status determination unit is used to verify the preceding process events, the current process events, the equipment status, the material flow status, and the detection record status based on the batch node chain, and to generate a process status identifier; The result output unit is used to output production flow results or traceability query results based on the process status identifier.

[0015] Compared with the prior art, the advantages and positive effects of the present invention are as follows: In this invention, semiconductor ceramic production process data is converted into process event data with a unified field structure, enabling material numbers, equipment numbers, process parameters, time data, test results, and flow status to enter the same data organization basis according to batch identifiers, process identifiers, equipment identifiers, and time identifiers; by establishing batch node chains according to process sequence and time sequence, multi-stage records of the same batch are continuously associated; by sequentially verifying the preceding process events, the current process events, equipment status, material flow status, and test record status, the continued flow results, process status identifiers, production flow results, and traceability query results have consistent data basis. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a flowchart illustrating the production process management of this invention. Figure 2 This is a schematic diagram of the production process data access of the present invention; Figure 3 This is a schematic diagram of the process event data structure of the present invention; Figure 4 This is a schematic diagram of the batch node chain and state determination of the present invention; Figure 5 This is a schematic diagram of the system unit collaboration of the present invention. Detailed Implementation

[0018] The technical solutions described in this invention are explained below with reference to the accompanying drawings. The following embodiments are based on a semiconductor ceramic production process management method, and a corresponding semiconductor ceramic production process management system is described in conjunction with the method. The production process data, process event data, batch node chains, node integrity verification, process status identifiers, production flow results, and traceability query results used in the embodiments have the same meaning as the technical objects with the same names in the protection scope text, invention content, and original disclosure materials. The field terminals, industrial control equipment interfaces, testing equipment interfaces, servers, databases, and management clients in the embodiments are only used to illustrate the relationships of data collection, processing, storage, and retrieval in semiconductor ceramic production processes, and do not change the technical subject matter defined by the technical solutions described in this invention.

[0019] In this embodiment, production process data refers to a data set formed by multiple production stages in the semiconductor ceramic production process, including at least two types of data: material number, equipment number, process parameters, time data, and test results and flow status. Process event data refers to unified field structure data converted from production process data, with each process event data including at least a batch identifier, process identifier, equipment identifier, and time identifier. A batch node chain refers to a data chain formed by establishing sequential node relationships among multiple process event data based on the same batch identifier, according to process sequence and time sequence. A process status identifier refers to status data formed by verifying the results of previous process events, current process events, equipment status, material flow status, and test record status, used for generating subsequent production flow results or traceability query results. Since the original disclosure did not set physical component numerical labels for the field terminals, industrial control equipment interfaces, testing equipment interfaces, servers, databases, and management clients, the following embodiments do not configure separate numerical labels for the above objects; the drawing numbers and step numbers in the accompanying drawings are only used to identify the illustrated content and execution order, and do not constitute a limitation on quantity, parameters, sequence range, or component labels.

[0020] Please see Figures 1 to 4This embodiment provides a method for managing the semiconductor ceramic production process. This method is applicable to process data management in various semiconductor ceramic production stages, including batching, slurry preparation, granulation, pressing, debinding, sintering, testing, and warehousing. The method unifies the event processing of data from field terminals, industrial control equipment interfaces, and testing equipment interfaces, and establishes a batch node chain based on the semiconductor ceramic production process route. This allows process records, equipment records, material records, and testing records within the same production batch to be accessed within the same data link.

[0021] S1, acquire production process data corresponding to multiple production stages in the semiconductor ceramic production process.

[0022] In S1, production process data sources include field terminals, industrial control equipment interfaces, and testing equipment interfaces. Field terminals receive manually entered material numbers and flow statuses. Material numbers indicate raw material batches, semi-finished product batches, or finished product batches. Flow status indicates the current batch's entry, exit, waiting, or pause status between production processes. Industrial control equipment interfaces receive equipment numbers, process parameters, and time data. Equipment numbers identify production equipment performing batching, slurry preparation, granulation, pressing, debinding, sintering, or other processes. Process parameters record temperature curves, pressure parameters, debinding time, sintering time, or other process parameters related to the production process generated by the equipment. Time data records the acquisition time corresponding to the equipment data or field terminal data. Testing equipment interfaces receive testing results, which record the testing status of semiconductor ceramic products or semi-finished products in terms of dimensions, electrical properties, appearance, or pass / fail determination.

[0023] After receiving the above data, the server writes the data from field terminals, industrial control equipment interfaces, and testing equipment interfaces into the same batch acquisition cache according to the corresponding production stages. The same batch acquisition cache uses material number, production batch, or an identifier that can correspond to the same production object as the aggregation basis, and temporarily stores data from different sources based on the same batch. For data arriving sequentially within the same production stage, the server merges the data based on time data and data source; for data from different interfaces but pointing to the same batch, the server writes the data into the corresponding field in the same batch acquisition cache. Thus, material number, equipment number, process parameters, time data, test results, and flow status can form a basic data set under the same batch before entering subsequent processing.

[0024] In S1, when the same batch of data collected in the cache includes at least two types of data: material number, equipment number, process parameters, time data, and test results and flow status, the server identifies the data in the same batch as production process data. If the data in the same batch is insufficient to constitute production process data, the server retains the received data and waits for subsequent data from the same batch to arrive, without directly generating process event data. This process ensures that production process data has a clear batch attribution and source relationship, preventing data from different production stages from forming isolated records without batch correspondence before entering event processing.

[0025] S2 converts production process data into process event data with a unified field structure.

[0026] In S2, the server reads production process data from the same batch of data acquisition cache and determines the process identifier according to the correspondence between production stages. This correspondence can be provided by the semiconductor ceramic production process route stored in the pre-configured storage space. The process route includes the sequential relationships between processes such as batching, slurry preparation, granulation, pressing, debinding, sintering, testing, and warehousing. The server maps the production process data to the corresponding process identifier based on the data source, process entry point, process name, or process record field in the production process data.

[0027] The server determines the batch identifier based on the material number, the equipment identifier based on the equipment number, and the time identifier based on the time data. The batch identifier points to a continuous production process for the same production object, the equipment identifier points to the equipment that generated the current production process data, and the time identifier points to the position of the current production process data within the production timeline. The server writes the batch identifier, process identifier, equipment identifier, and time identifier to the same event record, and also writes the process parameters, test results, and flow status to the process data field of the same event record. The process data field carries information related to the current process event, such as temperature profiles, pressure parameters, glue removal time, sintering time, test results, and flow status, without altering the fundamental positioning function of the batch identifier, process identifier, equipment identifier, and time identifier for the event record.

[0028] In S2, when the same event record simultaneously possesses a batch identifier, process identifier, equipment identifier, and time identifier, the server identifies the same event record as process event data. If an event record lacks any of the basic positioning fields—batch identifier, process identifier, equipment identifier, or time identifier—the server does not consider the event record as data eligible to enter the batch node chain; instead, it retains the event record in a pending state. Through this method, production process data from different sources and with different field formats are converted into process event data with a unified field structure, providing a data foundation for subsequently establishing continuous process relationships based on batch, process, equipment, and time.

[0029] S3, based on the semiconductor ceramic manufacturing process route, establish a batch node chain by arranging multiple process event data corresponding to the same batch identifier in the order of process sequence and time sequence.

[0030] In S3, the server reads the batch identifier, process identifier, and time identifier from the process event data, and determines the sequence of processes based on the semiconductor ceramic production process route in the pre-stored storage space. The semiconductor ceramic production process route describes the execution order between processes such as batching, slurry preparation, granulation, pressing, debinding, sintering, testing, and warehousing, and serves as the sorting basis when constructing the batch node chain. The server first filters out multiple process event data belonging to the same production batch according to the batch identifier, and then sorts the multiple process event data under the same batch identifier according to the sequence of processes.

[0031] When multiple process event data exist for the same process, the server further sorts these data according to their timestamps. After sorting, the server writes the sorted process event data into the same batch chain record and establishes a sequential node relationship between the process event data of adjacent processes, resulting in a batch node chain. Each node in the batch node chain corresponds to one process event data, and the connection relationship between adjacent nodes corresponds to the sequential process relationship in the semiconductor ceramic manufacturing process. Therefore, multiple process event data within the same batch no longer exist as independent database records, but form a continuous data structure that reflects both process sequence and time sequence.

[0032] S4. After establishing the batch node chain, perform node integrity verification on the batch node chain.

[0033] In S4, the server reads the generated and ungenerated nodes in the batch node chain according to the semiconductor ceramic manufacturing process route. Generated nodes are those already written to the batch node chain by process event data, while ungenerated nodes are those that should exist according to the semiconductor ceramic manufacturing process route but have not yet been formed in the current batch node chain. The server determines whether the batch node chain covers the process nodes that the current production batch should undergo by comparing the process identifiers in the batch node chain with those in the semiconductor ceramic manufacturing process route.

[0034] When the process identifier of a generated node matches the identifier of a preceding process in the semiconductor ceramic manufacturing process, and the time identifier of the generated node is earlier than the time identifier of the adjacent subsequent node, the server determines the generated node as a valid node. Valid nodes serve as invoked preceding, current, or subsequent nodes in subsequent process status determinations. If a process identifier is missing in the batch node chain, the server generates a node missing status corresponding to the batch identifier; if a time identifier in the batch node chain does not meet the sequential requirement, the server generates a node order exception status corresponding to the batch identifier. Both node missing and node order exception statuses are written to the status record corresponding to the batch identifier and used as input for subsequent process status determinations.

[0035] S5 determines the process status based on the batch node chain.

[0036] In S5, the server reads valid nodes, missing node status, and abnormal node sequence status obtained from node integrity verification, and reads the equipment status, material flow status, and inspection record status corresponding to valid nodes. Equipment status can be provided by the industrial control equipment interface or by the equipment record field written into the process event data, indicating whether there is an identifiable equipment record for the equipment corresponding to the current process event. Material flow status is provided by the field terminal or flow record, indicating whether the current batch has completed the flow from the preceding process to the current process. Inspection record status is provided by the inspection equipment interface or inspection record field, indicating whether the current process has inspection records corresponding to the batch identifier and process identifier.

[0037] When determining the process status, the server uses the batch identifier as the primary index, the process identifier as the node location, and the equipment identifier and time identifier as auxiliary correspondences. It sequentially verifies the preceding process events, the current process event, the equipment status, the material flow status, and the inspection record status. When all preceding process events, the current process event, the equipment status, the material flow status, and the inspection record status under the same batch identifier correspond to valid nodes, and there are no missing nodes or abnormal node order states, the server determines the process node corresponding to the current process event as a closed node. A closed node indicates that the current process event has a consistent correspondence with the preceding data, equipment records, material flow records, and inspection records.

[0038] When any state does not correspond to a valid node, or when there is a missing node or an abnormal node sequence, the server generates a process status identifier corresponding to the batch identifier and the process identifier. The process status identifier characterizes the status of the current batch at the current process node and can correspond to missing node states, abnormal node sequence states, non-corresponding equipment states, non-corresponding material flow states, or non-corresponding inspection record states. The process status identifier is written to the status record and stored in association with the batch identifier, process identifier, current process event, and corresponding verification results. This status record is retrieved in subsequent flow outputs and traceability queries.

[0039] S6 outputs the production flow results based on the process status identifier.

[0040] In S6, the server reads the process status identifier and determines the production flow result based on it. When the node corresponding to the process status identifier is closed, the server reads the process identifier of the current process event and determines the identifier of the adjacent subsequent process according to the semiconductor ceramic manufacturing process route. The server uses the adjacent subsequent process identifier as the next flow node and generates a continuation flow result. The continuation flow result is associated with the batch identifier, the current process event, and the adjacent subsequent process identifier and written into the flow record, enabling the management client or production site terminal to read the subsequent flow direction of the current batch based on the same flow record.

[0041] When a process status identifier corresponds to any of the following states: missing node, abnormal node sequence, mismatched equipment status, mismatched material flow status, or mismatched detection record status, the server generates a paused flow result. The paused flow result does not alter the existing batch node chain; instead, it is associated with the batch identifier, the current process event, and the identifiers of adjacent subsequent processes and written into the flow record. By writing both the continue flow result and the paused flow result into the same type of flow record, the server can simultaneously read the flow judgment criteria and flow result based on the batch identifier and process identifier in subsequent queries, preventing the production flow status from deviating from the verification basis of the preceding and current process events.

[0042] S7 outputs traceability query results based on process status identifiers.

[0043] In S7, when the process status identifier does not correspond to the status of the detection record or the flow status is abnormal, the server reads the batch identifier and process identifier corresponding to the process status identifier. The server locates the target batch chain record in the batch node chain based on the batch identifier, and reads the preceding process event, current process event, and adjacent subsequent process event from the target batch chain record based on the process identifier. The preceding process event reflects the material, equipment, and process data before the current process; the current process event reflects the data corresponding to the current node; and the subsequent process event reflects the data connection status after the current node.

[0044] The server extracts equipment identifiers, time identifiers, process parameters, and test results from preceding process events, current process events, and adjacent subsequent process events, and associates the extracted content with batch identifiers to generate traceability query results. The traceability query results are not simply returned as single, independent records, but rather constitute data from the preceding and following nodes in the batch node chain that correspond to the current process status identifier. Based on the traceability query results, the management client can read the correspondence between equipment, time, process parameters, and test results in adjacent processes within the same batch.

[0045] S8 generates traceability query results, then archives and sorts these results.

[0046] In S8, the server archives traceability query results according to batch identifier, process identifier, equipment identifier, and time identifier. The archived traceability query results are written to query records, which store the correspondence between traceability query results and batch node chains. When multiple traceability query results exist under the same batch identifier, the server determines the output order according to the sequence of process identifiers in the semiconductor ceramic manufacturing process route. When multiple traceability query results have the same process identifier, the server determines the output order according to the time identifier and writes the sorted traceability query results to the query record. Therefore, when the management client reads the query record, it can obtain the traceability query results for the corresponding batch according to the process route and time sequence.

[0047] During the execution of S1 to S8 above, the field terminals, industrial control equipment interfaces, and testing equipment interfaces form the input terminals for production process data. The server completes the event-based conversion of production process data, batch node chain construction, node integrity verification, process status determination, production flow result generation, and traceability query result generation. The database is used to store process event data, batch node chains, status records, flow records, and query records. The management client is used to read production flow results or traceability query results. This data flow ensures that input data, process data, intermediate states, and output results all have clear sources and subsequent uses.

[0048] Please see Figure 5This embodiment also provides a semiconductor ceramic production process management system, which supports the aforementioned semiconductor ceramic production process management method. The system includes a process data access unit, a process event generation unit, a batch node chain construction unit, a process status determination unit, and a result output unit. The process data access unit receives production process data from the semiconductor ceramic production process. The received data includes material numbers and flow status from field terminals, device numbers, process parameters, and time data from industrial control equipment interfaces, and detection results from testing equipment interfaces. The process data access unit writes the received data into the same batch acquisition buffer and provides the production process data to the process event generation unit.

[0049] The process event generation unit converts production process data into process event data with a unified field structure. It reads production process data from the same batch acquisition cache, determines the batch identifier, process identifier, equipment identifier, and time identifier, and writes process parameters, inspection results, and flow status into the process data fields. The process event data output by the process event generation unit enters the batch node chain construction unit.

[0050] The batch node chain construction unit is used to build batch node chains according to batch identifier, process sequence, and time sequence. The unit reads the semiconductor ceramic manufacturing process route from a pre-set storage space and sorts multiple process event data with the same batch identifier according to their process sequence and time identifier, forming the preceding and following node relationships within the same batch chain record. The unit outputs the batch node chain and provides the process status determination unit with the valid nodes, nodes to be generated, and preceding and following node relationships within the batch node chain.

[0051] The process status determination unit is used to verify the preceding process events, current process events, equipment status, material flow status, and inspection record status based on the batch node chain, and generates a process status identifier. The process status determination unit reads the node integrity verification results and the corresponding status of each node. When the verification result meets the node closure condition, it provides the node closure status to the result output unit; when the verification result does not meet the node closure condition, it provides the corresponding process status identifier to the result output unit. The result output unit is used to output the production flow result or traceability query result based on the process status identifier. The result output unit generates a continue flow result when the node is closed, a pause flow result when the status does not correspond, and calls the batch node chain to generate a traceability query result when the inspection record status does not correspond or the flow status is abnormal. Each unit in the system can be implemented collaboratively by program instructions, database read / write structures, and communication interfaces in the server, or it can be implemented by an industrial data platform with corresponding processing capabilities.

[0052] The specific processes, field states, processing order, judgment conditions, module collaboration, and carrier inheritance relationships described in the above embodiments are used to explain the possible implementations of the present invention and should not limit the present invention to the specific embodiments listed. Without departing from the technical solutions described in the present invention and the scope supported by the original disclosure, any equivalent substitutions, equivalent modifications, equivalent combinations, order adjustments, corresponding module replacements, equivalent changes in field names, equivalent inheritance of the executing entity, or equivalent changes in the carrier form that can be conceived by those skilled in the art should fall within the scope of protection of this patent; however, the above changes should not be extended to unclaimed topics, nor should they alter the substantive correspondence of the technical objects through name changes, and they should not replace, delete, or weaken the method features, data relationships, temporal relationships, judgment conditions, or module collaboration relationships necessary to achieve the technical effect.

Claims

1. A method for managing the semiconductor ceramic production process, characterized in that, Acquire production process data corresponding to multiple production stages in the semiconductor ceramic production process. The production process data includes material number, equipment number, process parameters, time data, test results, and flow status. The production process data is converted into process event data with a unified field structure. Each process event data includes a batch identifier, process identifier, equipment identifier, and time identifier. According to the semiconductor ceramic manufacturing process route, multiple process event data corresponding to the same batch identifier are used to establish a batch node chain in the order of process sequence and time sequence; Based on the batch node chain, the preceding process event, the current process event, the equipment status, the material flow status, and the detection record status are checked sequentially. When the check result meets the node closure condition, a continued flow result is generated; when the check result does not meet the node closure condition, a process status identifier is generated. The production flow results and traceability query results are output based on the process status identifier.

2. The semiconductor ceramic production process management method according to claim 1, characterized in that, The steps for obtaining production process data corresponding to multiple production stages in the semiconductor ceramic production process include: receiving manually entered material numbers and flow status from the field terminal, receiving equipment numbers, process parameters and time data from the industrial control equipment interface, and receiving test results from the testing equipment interface; Data from field terminals, industrial control equipment interfaces, and testing equipment interfaces are written into the same batch acquisition cache according to the corresponding production links. When the same batch of data collected in the cache includes at least two types of data: material number, equipment number, process parameters, time data, test results, and flow status, the data in the same batch of data collected in the cache is identified as the production process data.

3. The semiconductor ceramic production process management method according to claim 2, characterized in that, The steps for converting the production process data into process event data with a unified field structure include: reading the production process data in the same batch acquisition cache, determining the process identifier according to the correspondence of production links, determining the batch identifier according to the material number, determining the equipment identifier according to the equipment number, and determining the time identifier according to the time data; Write the batch identifier, process identifier, equipment identifier, and time identifier into the same event record, and write the process parameters, test results, and flow status into the process data field of the same event record; When the same event record has batch identifier, process identifier, equipment identifier and time identifier at the same time, the same event record is identified as the process event data.

4. The semiconductor ceramic production process management method according to claim 3, characterized in that, The steps to establish a batch node chain include: reading the batch identifier, process identifier, and time identifier from the process event data, and determining the sequence of processes based on the semiconductor ceramic production process route in the preset storage space; Multiple process event data with the same batch identifier are sorted according to the sequence of processes; when multiple process event data exist in the same process, they are sorted according to the time identifier. The sorted process event data are written into the same batch chain record, and the process event data corresponding to adjacent processes are established with a front-to-back node relationship to obtain the batch node chain.

5. The semiconductor ceramic production process management method according to claim 4, characterized in that, After establishing the batch node chain, the node integrity is verified. The node integrity verification includes: reading the generated nodes and nodes to be generated in the batch node chain according to the semiconductor ceramic production process route. When the process identifier of the generated node is consistent with the identifier of the preceding process in the semiconductor ceramic manufacturing process route, and the time identifier of the generated node is earlier than the time identifier of the adjacent subsequent node, the generated node is determined as a valid node. When the process identifier is missing or the time identifier does not meet the sequential order, a node missing status and a node order abnormal status corresponding to the batch identifier are generated.

6. The semiconductor ceramic production process management method according to claim 5, characterized in that, The steps for determining the process status based on the batch node chain include: reading the valid nodes, missing node status, and abnormal node sequence status obtained from the node integrity verification, and reading the equipment status, material flow status, and detection record status corresponding to the valid nodes. When the preceding process event, current process event, equipment status, material flow status, and inspection record status under the same batch identifier all correspond to valid nodes, and there are no missing nodes or abnormal node order states, the process node corresponding to the current process event is determined as a closed node. When any state does not correspond to a valid node, or when there are missing nodes or abnormal node order states, a process status identifier corresponding to the batch identifier and the process identifier is generated.

7. The semiconductor ceramic production process management method according to claim 6, characterized in that, The steps for outputting production flow results based on the process status identifier include: when the node corresponding to the process status identifier is closed, reading the process identifier of the current process event, determining the identifier of the adjacent subsequent process according to the semiconductor ceramic production process route, and generating a continued flow result; When any of the following states are present: missing node, abnormal node sequence, non-corresponding equipment status, non-corresponding material flow status, or non-corresponding detection record status, a pause flow result is generated. The results of continued and paused workflows will be associated with the batch identifier, the current process event, and the identifier of the adjacent subsequent process and written into the workflow record.

8. The semiconductor ceramic production process management method according to claim 1, characterized in that, The steps for outputting traceability query results based on process status identifiers include: when the status of the detection record corresponding to the process status identifier does not correspond or the flow status is abnormal, reading the batch identifier and process identifier corresponding to the process status identifier; Locate the target batch chain record in the batch node chain based on the batch identifier, and read the previous process event, current process event, and adjacent subsequent process event in the target batch chain record based on the process identifier; The equipment identifier, time identifier, process parameters, and test results are extracted from the preceding process event, the current process event, and the adjacent subsequent process event, and the extracted content is associated with the batch identifier to generate the traceability query result.

9. The semiconductor ceramic production process management method according to claim 8, characterized in that, After generating the traceability query results, the traceability query results are archived according to batch identifier, process identifier, equipment identifier, and time identifier; When there are multiple traceability query results under the same batch identifier, the output order is determined according to the sequential relationship of the process identifier in the semiconductor ceramic production process route; When multiple traceability query results have the same process identifier, the output order is determined according to the time identifier, and the sorted traceability query results are written into the query record.

10. A semiconductor ceramic production process management system, used to support the semiconductor ceramic production process management method of any one of claims 1 to 9, characterized in that, It includes a process data access unit, a process event generation unit, a batch node chain construction unit, a process status determination unit, and a result output unit; The process data access unit is used to receive production process data during the semiconductor ceramic production process; The process event generation unit is used to convert the production process data into process event data with a unified field structure; The batch node chain building unit is used to create a batch node chain according to the batch identifier, process sequence, and time sequence. The process status determination unit is used to verify the preceding process events, the current process events, the equipment status, the material flow status, and the detection record status based on the batch node chain, and to generate a process status identifier; The result output unit is used to output production flow results and traceability query results based on the process status identifier.

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