Ion source neutralizer

Abstract

The application belongs to the technical field of vacuum coating and discloses an ion source neutralizer. The ion source neutralizer comprises a cavity shell, a sustaining electrode, a containing assembly, an ion collecting electrode, a separation piece, a current-carrying connector and a radio frequency assembly, the sustaining electrode is connected with the cavity shell; the containing assembly is provided with an ionization cavity; the containing assembly comprises an insulating piece and a gas inlet assembly, the insulating piece is arranged in the cavity shell, and the gas outlet end of the gas inlet assembly is communicated with the ionization cavity; the ion collecting electrode is arranged in the ionization cavity; the separation piece is detachably arranged on the side of the ionization cavity away from the sustaining electrode and covers at least part of the cavity wall on the side of the ionization cavity away from the sustaining electrode; and the current-carrying connector is electrically connected with the ion collecting electrode. The conductive separation piece is covered on at least part of the cavity wall on the side of the ion collecting electrode away from the sustaining electrode, so that the sputtered metal atoms are deposited on the surface of the separation piece instead of being directly deposited on the cavity wall of the ionization cavity, the pollution of the sputtering product to the insulating cavity wall can be effectively avoided, and the blackening problem of the inner wall of the ionization cavity is relieved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to an ion source neutralizer. Background Technology

[0002] In advanced film deposition processes, to obtain better film properties (such as density, adhesion, stress control, etc.), it is often necessary to use high-current, high-power ion sources to bombard or assist in deposition on the substrate. The ion source neutralizer is a key component of the ion source system. Its main function is to emit electrons or negative ions to neutralize the positive space charge accumulated in the ion stream, prevent the ion beam from diverging due to the mutual repulsion of its own positive charges, and avoid charge accumulation on the surface of the target material (or workpiece).

[0003] During operation of the ion source neutralizer, high-energy ions from the plasma bombard the surfaces of metal structures such as electrodes within the ionization cavity, ejecting atoms. These sputtered metal atoms subsequently deposit on the inner wall of the ionization cavity, causing it to blacken. Furthermore, uneven plasma distribution within the ionization cavity concentrates high-energy ions on the inner wall, also contributing to blackening. Since this black layer often exhibits conductivity, its presence in large quantities alters the original insulation properties of the ionization cavity, affecting the stable transmission of radio frequency power. Moreover, this black layer can become a source of particulate contamination, polluting the process environment, and, in large quantities, reducing the reliability of the ion source neutralizer. Therefore, an ion source neutralizer is urgently needed to address these technical problems. Summary of the Invention

[0004] The purpose of this invention is to provide an ion source neutralizer that can effectively avoid contamination of the insulating cavity wall by sputtering products, alleviate the problem of blackening of the inner wall of the ionization cavity, and improve the reliability of the ion source neutralizer.

[0005] To achieve this objective, the present invention adopts the following technical solution: An ion source neutralizer, comprising: Cavity shell; The electrode is maintained and connected to the cavity shell; A receiving assembly is provided with an ionization chamber; the receiving assembly includes an insulating component and an air inlet assembly, the insulating component is disposed inside the chamber shell, and the air outlet end of the air inlet assembly is connected to the ionization chamber; An ion collecting electrode is disposed in the ionization chamber; An isolator is detachably disposed on the side of the ionization chamber away from the sustaining electrode and covers at least a portion of the chamber wall on the side of the ion collecting electrode away from the sustaining electrode. A power connector is electrically connected to the ion collecting electrode. The radio frequency component is disposed between the cavity housing and the insulating component.

[0006] In some possible implementations, the isolator is a conductive element that is in contact with the ion collecting electrode.

[0007] In some possible implementations, the isolator contacts the cavity wall on the side of the ionization cavity away from the sustaining electrode; The ion collecting electrode has a connecting portion on the side away from the sustaining electrode; The power connector includes a first fixing member and a connector. The connector passes through the receiving assembly, and the first fixing member passes through the connecting portion and the isolation member and is fixedly connected to the connector.

[0008] In some possible implementations, the radio frequency assembly includes a coil, and the side of the first retainer near the sustaining electrode and the side of the coil away from the sustaining electrode have a gap in the longitudinal direction of the insulator.

[0009] In some possible implementations, the separator is made of nickel.

[0010] In some possible implementations, the insulating member has an inner cavity and a connecting hole, the connecting hole communicating with the inner cavity and located on the side of the inner cavity near the sustaining electrode, the air intake assembly being detachably covered at the opening on the side of the inner cavity away from the sustaining electrode, the air intake assembly and the insulating member forming the ionization cavity, the air outlet end of the air intake assembly communicating with the ionization cavity; the isolating member covers the end face of the air intake assembly facing the ionization cavity, the isolating member having an air inlet, the air inlet communicating with the air outlet end of the air intake assembly.

[0011] In some possible implementations, the insulating element is fixed inside the cavity, and the ion source neutralizer further includes a first fixing frame and a fixing assembly. The first fixing frame is fixed inside the cavity, and the fixing assembly is detachably connected to the first fixing frame. The fixing assembly can press the air intake assembly against the end of the insulating element away from the sustaining electrode.

[0012] In some possible embodiments, the insulating member includes an insulating body and an abutment portion disposed on the side of the insulating body away from the sustaining electrode; the air intake assembly abuts against the end face of the abutment portion; the thickness of the abutment portion along the length direction of the insulating body is greater than the wall thickness of the insulating body; the insulating member has a chamfer; and / or, The air intake assembly includes a first connector and an air guide nozzle. The air guide nozzle is fixed to the end of the first connector away from the ionization chamber. The fixing assembly abuts against the air guide nozzle. The air outlet end of the air guide nozzle is connected to the air intake end of the first connector. The air outlet end of the first connector is connected to the ionization chamber.

[0013] In some possible implementations, the ion source neutralizer further includes a reinforcement located at one end of the insulator near the sustaining electrode and between the insulator and the cavity shell; and / or, the ion collecting electrode is provided with a through hole penetrating opposite side walls of the ion collecting electrode along its thickness direction, the through hole extending along the length direction of the ion collecting electrode, and neither end of the through hole extending to opposite end faces of the ion collecting electrode along its length direction.

[0014] In some possible implementations, the radio frequency component includes a coil, the coil being a circular tube structure; and / or, The radio frequency component includes a coil and a second fixing member. The second fixing member has an inner spiral groove on the side near the insulating member. The inner spiral groove extends spirally along the length of the second fixing member. The coil is located in the inner spiral groove. The second fixing member is detachably connected to the cavity shell.

[0015] The beneficial effects of this invention are: The ion source neutralizer provided by this invention includes a cavity shell, a sustaining electrode, a containment assembly, an ion collecting electrode, an isolator, a power connector, and a radio frequency (RF) assembly. During operation, inert gas enters the ionization cavity through the outlet of the inlet assembly. The RF assembly creates an electromagnetic field within the ionization cavity and ionizes the inert gas, forming plasma. Positive ions in the plasma are collected by the ion collecting electrode. Under the action of the sustaining electrode, the generated free electrons are ejected from the side of the ionization cavity closest to the sustaining electrode and flow towards the ion beam, thereby neutralizing the positive charge of the ion beam. When metal components such as the ion collecting electrode are bombarded by high-energy ions in the plasma, sputtering occurs, causing the sputtered metal atoms to scatter in all directions. By covering at least a portion of the cavity wall on the side of the ion collecting electrode away from the sustaining electrode with the isolator, the sputtered metal atoms are deposited on the surface of the isolator, rather than directly on the insulating cavity wall of the ionization cavity. This minimizes the adhesion of conductive metal deposits to the insulating cavity wall surface, alleviates the problem of blackening of the ionization cavity inner wall, reduces particulate contamination, and improves process purity. Therefore, the ion source neutralizer can effectively prevent sputtering products from contaminating the insulating cavity wall, alleviate the problem of blackening of the inner wall of the ionization cavity, and improve the reliability of the ion source neutralizer. Attached Figure Description

[0016] Figure 1 This is a first cross-sectional view of the ion source neutralizer provided by the present invention; Figure 2 This is a second cross-sectional view of the ion source neutralizer provided by the present invention.

[0017] In the picture: 1. Cavity shell; 2. Maintaining electrode; 3. Containing assembly; 31. Ionization chamber; 32. Insulator; 321. Abutment part; 33. Air intake assembly; 331. First connector; 332. Air nozzle; 4. Ion collecting electrode; 41. Connecting part; 42. Through hole; 43. Opening; 5. Isolator; 6. Power connector; 61. First fixing part; 62. Connector; 7. Radio frequency assembly; 71. Coil; 72. Second fixing part; 8. First fixing frame; 81. Second connector; 82. Third connector; 83. Fourth connector; 9. Fixing assembly; 91. Abutment part; 92. First mounting part; 10. Reinforcing part; 20. Through part. Detailed Implementation

[0018] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0019] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0020] In the description of this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0021] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] like Figure 1 and Figure 2As shown, the present invention provides an ion source neutralizer, including a cavity shell 1, a sustaining electrode 2, a housing assembly 3, an ion collecting electrode 4, an isolator 5, an electrical connector 6, and a radio frequency assembly 7. The sustaining electrode 2 is connected to the cavity shell 1; the housing assembly 3 has an ionization chamber 31; the housing assembly 3 includes an insulating member 32 and an air inlet assembly 33, the insulating member 32 being disposed within the cavity shell 1, and the outlet end of the air inlet assembly 33 communicating with the ionization chamber 31; the ion collecting electrode 4 is disposed in the ionization chamber 31; the isolator 5 is detachably disposed on the side of the ionization chamber 31 away from the sustaining electrode 2, and covers at least a portion of the cavity wall on the side of the ionization chamber 31 away from the sustaining electrode 2, where the cavity wall refers to the inner surface of the ionization chamber 31; the electrical connector 6 is electrically connected to the ion collecting electrode 4; the radio frequency assembly 7 is disposed between the cavity shell 1 and the insulating member 32. The isolator 5 covering at least a portion of the cavity wall on the side of the ionization chamber 31 away from the sustaining electrode 2 means covering part or all of the cavity wall on the side of the ionization chamber 31 away from the sustaining electrode 2. Furthermore, it is understood that covering at least a portion of the cavity wall on the side of the ionization cavity 31 away from the sustaining electrode 2 means that the projection of the isolator 5 along the axial direction of the ionization cavity 31 onto the cavity wall on the side of the ionization cavity 31 away from the sustaining electrode 2 at least partially overlaps with the cavity wall on the side of the ionization cavity 31 away from the sustaining electrode 2. Additionally, the isolator 5 may cover and contact at least a portion of the cavity wall on the side of the ionization cavity 31 away from the sustaining electrode 2, or it may only cover without contacting at least a portion of the cavity wall on the side of the ionization cavity 31 away from the sustaining electrode 2.

[0023] When the ion source neutralizer is working, inert gas enters the ionization chamber 31 through the outlet of the inlet assembly 33. The radio frequency assembly 7 creates an electromagnetic field in the ionization chamber 31 and ionizes the inert gas to form plasma. Positive ions in the plasma are collected by the ion collection electrode 4. Under the action of the sustaining electrode 2, the generated free electrons are emitted from the side of the ionization chamber 31 near the sustaining electrode 2 and flow towards the ion beam, thereby neutralizing the positive charge of the ion beam.

[0024] By covering at least a portion of the cavity wall of the ionization cavity 31 away from the sustaining electrode 2 with the isolator 5, when the ion collecting electrode 4 is sputtered by high-energy ions in the plasma, the sputtered metal atoms are deposited on the surface of the isolator 5, rather than directly on the insulating cavity wall of the ionization cavity 31. This effectively prevents conductive metal deposits from adhering to the insulating cavity wall surface, thus maintaining the original insulation characteristics of the ionization cavity 31 and ensuring stable RF power transmission. Simultaneously, since the isolator 5 is a detachable component, it can be replaced or cleaned individually when surface deposits accumulate to the point of affecting performance, thereby mitigating the reliability degradation and particulate contamination problems caused by blackening of the inner wall of the ionization cavity 31 and improving process purity. Therefore, the ion source neutralizer effectively avoids sputtering product contamination of the insulating cavity wall, alleviates the blackening problem of the inner wall of the ionization cavity 31, improves the reliability of the ion source neutralizer, and enables the ion source neutralizer to meet the higher ion current requirements of special processes, broadening the range of process applications and meeting the requirements of high-power film deposition processes.

[0025] Optionally, in this embodiment, the isolator 5 is a conductive element, and it is in contact with the ion collecting electrode 4. Since the isolator 5 is conductive and in contact with the ion collecting electrode 4, and the energized connector 6 is electrically connected to the ion collecting electrode 4, when the energized connector 6 is energized, both the ion collecting electrode 4 and the isolator 5 are energized. In addition to the ion collecting electrode 4 collecting positive ions from the plasma, the isolator 5 effectively prevents sputtering products from contaminating the insulating cavity wall. Furthermore, the energized isolator 5 can also collect positive ions from the plasma, increasing the effective collection area and improving the efficiency of positive ion collection. Moreover, when the energized connector 6 is grounded, both the ion collecting electrode 4 and the isolator 5 are grounded. Furthermore, by providing the isolator 5, the heat generated by the plasma can be transferred through the isolator 5 to the energized connector 6 and then to the outside of the ionization cavity 31, resulting in good heat dissipation.

[0026] Optionally, in this embodiment, the isolator 5 contacts the cavity wall of the ionization cavity 31 on the side away from the sustaining electrode 2. This contact refers to mechanical contact. With this arrangement, the heat generated by the plasma can be transferred through the isolator 5 to the cavity wall of the ionization cavity 31, and then to the outside of the ionization cavity 31, improving heat dissipation. Optionally, in this embodiment, the ion collecting electrode 4 has a connecting portion 41 on the side away from the sustaining electrode 2. The energized connector 6 includes a first fixing member 61 and a connector 62. The connector 62 passes through the receiving assembly 3, and the first fixing member 61 passes through the connecting portion 41 and the isolator 5 and is fixedly connected to the connector 62. This arrangement allows for the disassembly and replacement of the isolator 5, and enables the connection of the isolator 5, the energized connector 6, and the ion collecting electrode 4, achieving electrical conduction. Optionally, in this embodiment, the connecting part 41 is provided with a first mounting hole, the isolator 5 is provided with a second mounting hole, and the receiving assembly 3 is provided with a third mounting hole. The third mounting hole communicates with the ionization chamber 31. The connector 62 passes through the third mounting hole, and the first fixing member 61 passes through the first mounting hole and the second mounting hole and is fixedly connected to the connector 62. Optionally, in this embodiment, the first fixing member 61 is a bolt, which passes through the first mounting hole and the second mounting hole and is threadedly connected to the connector 62. This arrangement facilitates disassembly and assembly and enables reliable contact between the ion collecting electrode 4 and the isolator 5. Optionally, in this embodiment, the energized connector 6 contacts the ion collecting electrode 4 but does not contact the isolator 5. Specifically, the diameter of the second mounting hole is larger than the diameter of the stud of the first fixing member 61, and the top surface of the connector 62 is lower than the bottom surface of the isolator 5. With this arrangement, the current flows sequentially through the energized connector 6 and the ion collecting electrode 4 to the isolator 5, achieving stable current transmission.

[0027] Optionally, such as Figure 2 As shown, the radio frequency assembly 7 includes a coil 71, and a gap exists between the side of the first fixing member 61 near the sustaining electrode 2 and the side of the coil 71 away from the sustaining electrode 2. This arrangement reduces the etching of the first fixing member 61 by the plasma, minimizing the impact on the connection performance between the isolator 5, the energized connector 6, and the ion collecting electrode 4.

[0028] Optionally, the ion collecting electrode 4 has a ring-shaped structure. This configuration improves the efficiency of collecting positive ions. Optionally, the ion collecting electrode 4 has a through-hole 42 that penetrates the opposite side walls of the ion collecting electrode 4 along its thickness direction. The through-hole 42 extends along the length direction of the ion collecting electrode 4, and neither end of the through-hole 42 extends to the opposite end faces of the ion collecting electrode 4 along its length direction. The through-hole 42 in the ion collecting electrode 4 can block the eddy currents generated on the ion collecting electrode 4 during discharge, reducing energy loss and heat generation. Furthermore, the through-hole 42 can release the internal stress generated by thermal expansion of the ion collecting electrode 4, reducing deformation or even short circuits caused by high temperatures. Based on this, neither end of the through-hole 42 extends to the opposite end faces of the ion collecting electrode 4 along its length. This reduces excessive plasma escape from the through-hole 42 into the space between the ion collecting electrode 4 and the ionization cavity 31, which is beneficial for improving plasma utilization, increasing plasma concentration within the ion collecting electrode 4, and thus enhancing the electron emission capability of the ion source neutralizer. Furthermore, it ensures the mechanical strength of the ion collecting electrode 4, reducing warping or deformation of the ion collecting electrode 4 structure under thermal stress and plasma ion bombardment within the ionization cavity 31. Optionally, three through-holes 42 are provided, spaced apart circumferentially along the ion collecting electrode 4. Figure 2 As shown, optionally, the ion collecting electrode 4 is provided with an opening 43, which penetrates the opposite side walls of the ion collecting electrode 4 along the thickness direction, and both ends of the opening 43 extend to the opposite end faces of the ion collecting electrode 4 along the length direction. This arrangement facilitates the shaping of the ion collecting electrode 4 and makes it easier to place the ion collecting electrode 4 into the ionization chamber 31.

[0029] Optionally, in this embodiment, the insulating member 32 has an inner cavity and a connecting hole. The connecting hole communicates with the inner cavity and is located on the side of the inner cavity closer to the sustaining electrode 2. The connecting hole is used for the passage of free electrons. The air intake assembly 33 is detachably covered at the opening on the side of the inner cavity away from the sustaining electrode 2. The air intake assembly 33 and the insulating member 32 together form an ionization cavity 31. The outlet end of the air intake assembly 33 communicates with the ionization cavity 31. The isolating member 5 covers the end face of the air intake assembly 33 facing the ionization cavity 31. The isolating member 5 has an air intake hole that communicates with the outlet end of the air intake assembly 33. Since the air intake assembly 33 is detachably covered at the opening on the side of the inner cavity away from the sustaining electrode 2, it is convenient to disassemble and replace the ion collecting electrode 4 and the isolating member 5. Furthermore, the isolator 5 covers the end face of the intake assembly 33 facing the ionization chamber 31. When the ion collecting electrode 4 is sputtered by high-energy ions in the plasma, the sputtered metal atoms are deposited on the surface of the isolator 5, rather than directly on the end face of the intake assembly 33 facing the ionization chamber 31. This reduces sputtering deposition contamination and lowers the difficulty of cleaning the intake assembly 33, further reducing the burden of equipment maintenance and the risk of performance degradation. Optionally, in this embodiment, the cross-sectional area of ​​the inner cavity is larger than the cross-sectional area of ​​the connecting hole. Optionally, in this embodiment, the connector 62 passes through the intake assembly 33. Optionally, in other embodiments, the insulating member 32 is provided with an inner cavity and a connecting hole. The cross-sectional area of ​​the inner cavity is larger than the cross-sectional area of ​​the connecting hole. The connecting hole communicates with the inner cavity and is located on the side of the inner cavity away from the sustaining electrode 2. The connecting hole is used to introduce inert gas. The opening on the side of the inner cavity near the sustaining electrode 2 is used to allow free electrons to pass through. The isolating member 5 covers the inner surface of the inner cavity on the side away from the sustaining electrode 2. The air intake assembly 33 is fixed to the outer surface of the insulating member 32 on the side away from the sustaining electrode 2. The air intake assembly 33 communicates with the connecting hole.

[0030] Optionally, in this embodiment, the insulating component 32 is fixed inside the cavity shell 1. The ion source neutralizer also includes a first fixing frame 8 and a fixing assembly 9. The first fixing frame 8 is fixed inside the cavity shell 1, and the fixing assembly 9 is detachably connected to the first fixing frame 8. The fixing assembly 9 can press the air intake assembly 33 against the end of the insulating component 32 away from the sustaining electrode 2. Through the above arrangement, the air intake assembly 33 can be fixed, reducing damage to the insulating component 32.

[0031] Optionally, the insulating member 32 includes an insulating body and an abutment portion 321. The abutment portion 321 is disposed on the side of the insulating body away from the maintaining electrode 2. The first fixing frame 8 and the air intake assembly 33 respectively abut against the opposite end faces of the abutment portion 321. The thickness of the abutment portion 321 along the length of the insulating body is greater than the wall thickness of the insulating body. Since the air intake assembly 33 abuts against the end face of the abutment portion 321, the abutment portion 321 becomes a stress concentration area. The thickness of the abutment portion 321 along the length of the insulating body is greater than the wall thickness of the insulating body, that is, increasing the wall thickness in the stress concentration area can enhance the mechanical strength of the insulating member 32. Under the thermal stress and plasma ion bombardment in the ionization cavity 31, the generation of cracks on the insulating member 32 can be reduced. Optionally, the thickness of the abutment portion 321 along the length of the insulating body is 8 mm. Optionally, the insulating member 32 is provided with a chamfer. Specifically, the insulating member 32 is provided with a rounded chamfer. The chamfer can effectively disperse thermal stress and prevent crack generation. Optionally, the insulating element 32 is manufactured by isostatic pressing and precision sintering. This arrangement gives the insulating element 32 a uniform and dense structure that is less prone to cracking.

[0032] Optionally, such as Figure 1 As shown, the air intake assembly 33 includes a first connector 331 and an air guide nozzle 332. The air guide nozzle 332 is fixed to the end of the first connector 331 away from the ionization chamber 31. The fixing assembly 9 abuts against the air guide nozzle 332. The air outlet end of the air guide nozzle 332 is connected to the air intake end of the first connector 331, and the air outlet end of the first connector 331 is connected to the ionization chamber 31. The air guide nozzle 332 is connected to the ionization chamber 31 through the first connector 331, which can reduce the possibility of the air guide nozzle 332 being etched by plasma, effectively disperse the thermal stress in the ionization chamber 31, and prevent crack formation. Optionally, both the first connector 331 and the insulating component 32 are made of ceramic material. Optionally, both the first connector 331 and the insulating component 32 are made of 99.9% high-purity alumina, which has extremely high purity and density, and good mechanical and thermal properties.

[0033] Optionally, such as Figure 2As shown, the ion source neutralizer also includes a reinforcing member 10, which is located at the end of the insulating member 32 near the sustaining electrode 2 and between the insulating member 32 and the cavity shell 1. By providing the reinforcing member 10, the insulating member 32 is reinforced, further dispersing the thermal stress within the ionization cavity 31 and preventing crack formation. Optionally, to improve the reinforcement effect and enable electron emission, the reinforcing member 10 has a ring structure. Optionally, the first fixing frame 8 abuts against the reinforcing member 10 to secure it to the cavity shell 1. This configuration allows for the fixing of the reinforcing member 10. Optionally, the first fixing frame 8 includes a second connecting member 81, a third connecting member 82, and a fourth connecting member 83. The second connecting member 81 and the third connecting member 82 are both sleeved outside the insulating member 32, and the two ends of the fourth connecting member 83 are respectively connected to the second connecting member 81 and the third connecting member 82. The second connecting member 81 is detachably connected to the cavity shell 1. This configuration simplifies the structure of the first fixing frame 8 and facilitates manufacturing. Optionally, the ion source neutralizer also includes a through-hole member 20, which passes through the inner wall of the cavity shell 1 and the reinforcing member 10 and is threadedly connected to the second connecting member 81. This configuration allows the first fixing frame 8 to be fixed inside the cavity shell 1. Optionally, the fixing assembly 9 includes an abutment member 91, a first mounting member 92, and a second mounting member. The abutment member 91 is sleeved on and abuts against the air inlet nozzle 332. One end of the first mounting member 92 is detachably connected to the first fixing frame 8, and the other end of the first mounting member 92 passes through the abutment member 91 and is threadedly connected to the second mounting member. This configuration allows the abutment member 91 to press the air inlet assembly 33 against the bottom end of the insulating member 32, and the threaded connection makes the pressing force adjustable.

[0034] Optionally, the material of the separator 5 is nickel. Nickel has good high-temperature stability, resistance to plasma corrosion, good electrical conductivity, and is non-volatile with low gas emission. It is also easy to process and has low cost.

[0035] Optionally, the radio frequency component 7 includes a coil 71, which is a circular tube structure. In high vacuum or high voltage environments, the circular tube structure provides a more uniform electric field distribution and better voltage withstand capability, preventing tip discharge. Furthermore, the circular tube structure makes the magnetic field distribution smoother, and the magnetic field transition at corners is more continuous, facilitating the formation of an axisymmetric and uniform magnetic field configuration, which is beneficial for confining the electron beam in the plasma. In addition, the circular tube structure has fewer wrinkles when bent, is less prone to breakage, and has a larger outer surface heat dissipation area, enabling it to withstand higher thermal loads.

[0036] Optionally, the radio frequency assembly 7 includes a coil 71 and a second fixing member 72. The second fixing member 72 has an inner spiral groove on the side near the insulating member 32, and the inner spiral groove extends spirally along the length of the second fixing member 72. The coil 71 is located within the inner spiral groove, and the second fixing member 72 is detachably connected to the cavity housing 1. Placing the coil 71 within the inner spiral groove restricts its position, ensuring structural stability and preventing deformation under high current and thermal loads, thus improving the reliability of the ion source neutralizer. Detachably connecting the second fixing member 72 to the cavity housing 1 facilitates its installation and removal. Optionally, the second fixing member 72 is fixed to the first fixing bracket 8 by bolts.

[0037] Optionally, the number of turns in coil 71 is greater than or equal to eight and less than or equal to twelve. If the number of turns in coil 71 is less than eight, the magnetic field generated by coil 71 is weak, resulting in insufficient confinement of the electron beam and easy divergence, leading to difficulty in igniting the ion source neutralizer or low beam utilization. If the number of turns in coil 71 is greater than twelve, the magnetic field can be strengthened, but the inductance and resistance of coil 71 increase, slowing down the response speed and causing more severe heat generation. More importantly, it changes the load characteristics of the driving power supply. Optionally, in this embodiment, the number of turns in coil 71 is equal to twelve, the spacing between adjacent turns in coil 71 is 4.5 mm, and the outer diameter of the circular tube structure is 3 mm. This configuration allows for a good match between the driving power supply power and the specifications of coil 71, enabling the generation of a sufficiently strong magnetic field at a lower current, and the moderate inductance generated by coil 71 ensures the stability of the electron beam emitted by the ion source neutralizer. Optionally, the coil 71 is made of chromium-zirconium copper alloy, which allows the coil 71 to withstand higher current density and heat load, while reducing ohmic losses and thermal deformation. Specifically, the coil 71 is made of C18150 chromium-zirconium copper.

[0038] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. An ion source neutralizer, characterized in that, include: Cavity shell (1); The maintenance electrode (2) is connected to the cavity shell (1); The accommodating assembly (3) is provided with an ionization chamber (31); the accommodating assembly (3) includes an insulating member (32) and an air intake assembly (33), the insulating member (32) is disposed inside the cavity shell (1), and the air outlet of the air intake assembly (33) is connected to the ionization chamber (31); An ion collecting electrode (4) is disposed in the ionization chamber (31); Isolator (5), which is detachably disposed on the side of the ionization cavity (31) away from the sustaining electrode (2) and covers at least a portion of the cavity wall on the side of the ionization cavity (31) away from the sustaining electrode (2); The power connector (6) is electrically connected to the ion collecting electrode (4); The radio frequency component (7) is disposed between the cavity shell (1) and the insulating member (32).

2. The ion source neutralizer according to claim 1, characterized in that, The isolator (5) is a conductive element and is in contact with the ion collecting electrode (4).

3. The ion source neutralizer according to claim 2, characterized in that, The isolator (5) is in contact with the cavity wall of the ionization cavity (31) on the side away from the sustaining electrode (2); The ion collecting electrode (4) has a connecting part (41) on the side away from the sustaining electrode (2). The power connector (6) includes a first fixing member (61) and a connector (62). The connector (62) passes through the receiving assembly (3). The first fixing member (61) passes through the connecting part (41) and the isolation member (5) and is fixedly connected to the connector (62).

4. The ion source neutralizer according to claim 3, characterized in that, The radio frequency component (7) includes a coil (71), and the first fixing member (61) has a gap in the length direction of the insulating member (32) between the side of the coil (71) near the sustaining electrode (2) and the side of the coil (71) away from the sustaining electrode (2).

5. The ion source neutralizer according to claim 2, characterized in that, The material of the isolation component (5) is nickel.

6. The ion source neutralizer according to claim 1, characterized in that, The insulating member (32) has an inner cavity and a connecting hole. The connecting hole communicates with the inner cavity and is located on the side of the inner cavity close to the sustaining electrode (2). The air intake assembly (33) is detachably covered at the opening on the side of the inner cavity away from the sustaining electrode (2). The air intake assembly (33) and the insulating member (32) together form the ionization cavity (31). The air outlet end of the air intake assembly (33) communicates with the ionization cavity (31). The isolation member (5) covers the end face of the air intake assembly (33) facing the ionization cavity (31). The isolation member (5) has an air inlet and the air inlet communicates with the air outlet end of the air intake assembly (33).

7. The ion source neutralizer according to claim 6, characterized in that, The insulating component (32) is fixed inside the cavity shell (1). The ion source neutralizer also includes a first fixing frame (8) and a fixing component (9). The first fixing frame (8) is fixed inside the cavity shell (1). The fixing component (9) is detachably connected to the first fixing frame (8). The fixing component (9) can press the air intake component (33) against the end of the insulating component (32) away from the sustaining electrode (2).

8. The ion source neutralizer according to claim 7, characterized in that, The insulating member (32) includes an insulating body and an abutment portion (321). The abutment portion (321) is disposed on the side of the insulating body away from the sustaining electrode (2). The air intake assembly (33) abuts against the end face of the abutment portion (321). The thickness of the abutment portion (321) along the length direction of the insulating body is greater than the wall thickness of the insulating body. The insulating member (32) is provided with a chamfer. And / or, The air intake assembly (33) includes a first connector (331) and an air guide nozzle (332). The air guide nozzle (332) is fixed to the end of the first connector (331) away from the ionization chamber (31). The fixing assembly (9) abuts against the air guide nozzle (332). The air outlet end of the air guide nozzle (332) is connected to the air intake end of the first connector (331). The air outlet end of the first connector (331) is connected to the ionization chamber (31).

9. The ion source neutralizer according to claim 1, characterized in that, The ion source neutralizer further includes a reinforcement member (10) located at one end of the insulator (32) near the sustaining electrode (2) and between the insulator (32) and the cavity shell (1); and / or, The ion collecting electrode (4) is provided with a through hole (42), which penetrates the opposite side walls of the ion collecting electrode (4) along the thickness direction. The through hole (42) extends along the length direction of the ion collecting electrode (4), and neither end of the through hole (42) extends to the opposite end faces of the ion collecting electrode (4) along the length direction.

10. The ion source neutralizer according to claim 1, characterized in that, The radio frequency component (7) includes a coil (71), which is a circular tube structure; and / or, The radio frequency component (7) includes a coil (71) and a second fixing member (72). The second fixing member (72) has an inner spiral groove on the side near the insulating member (32). The inner spiral groove extends spirally along the length direction of the second fixing member (72). The coil (71) is located in the inner spiral groove. The second fixing member (72) is detachably connected to the cavity shell (1).

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